KR20100015605A - 기화된 유기 물질의 정밀 제어 - Google Patents
기화된 유기 물질의 정밀 제어 Download PDFInfo
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- KR20100015605A KR20100015605A KR1020097021532A KR20097021532A KR20100015605A KR 20100015605 A KR20100015605 A KR 20100015605A KR 1020097021532 A KR1020097021532 A KR 1020097021532A KR 20097021532 A KR20097021532 A KR 20097021532A KR 20100015605 A KR20100015605 A KR 20100015605A
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Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/735,544 | 2007-04-16 | ||
| US11/735,544 US20080254217A1 (en) | 2007-04-16 | 2007-04-16 | Fine control of vaporized organic material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20100015605A true KR20100015605A (ko) | 2010-02-12 |
Family
ID=39431623
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020097021532A Ceased KR20100015605A (ko) | 2007-04-16 | 2008-04-02 | 기화된 유기 물질의 정밀 제어 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20080254217A1 (https=) |
| EP (1) | EP2137335B1 (https=) |
| JP (1) | JP2010525163A (https=) |
| KR (1) | KR20100015605A (https=) |
| CN (1) | CN101657561B (https=) |
| WO (1) | WO2008127554A1 (https=) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4974036B2 (ja) * | 2009-11-19 | 2012-07-11 | 株式会社ジャパンディスプレイセントラル | 有機ｅｌ装置の製造方法 |
| WO2013052460A1 (en) * | 2011-10-05 | 2013-04-11 | First Solar, Inc. | Vapor transport deposition method and system for material co-deposition |
| US10450527B2 (en) | 2015-01-29 | 2019-10-22 | Jtekt Corporation | Low-friction coating production method and sliding method |
| WO2016121936A1 (ja) * | 2015-01-29 | 2016-08-04 | 株式会社ジェイテクト | 非晶質炭化水素系膜、ならびにそれを備えた摺動部材および摺動システム |
| JP6796297B2 (ja) * | 2015-01-29 | 2020-12-09 | 株式会社ジェイテクト | 摺動システム |
| US12307933B1 (en) | 2024-04-26 | 2025-05-20 | Dell Products L.P. | Organic light emitting diode display film pixel shifting with temporal segmented image tracking |
| US12456420B1 (en) | 2024-04-26 | 2025-10-28 | Dell Products L.P. | Organic light emitting diode display film comfort state personalization by machine learning |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4885211A (en) * | 1987-02-11 | 1989-12-05 | Eastman Kodak Company | Electroluminescent device with improved cathode |
| US4769292A (en) * | 1987-03-02 | 1988-09-06 | Eastman Kodak Company | Electroluminescent device with modified thin film luminescent zone |
| US5273583A (en) * | 1990-07-02 | 1993-12-28 | Xerox Corporation | Fabrication of electrophotographic imaging members |
| US5149612A (en) * | 1990-07-02 | 1992-09-22 | Xerox Corporation | Fabrication of electrophotographic imaging members |
| JP3586551B2 (ja) * | 1998-01-27 | 2004-11-10 | 松下電器産業株式会社 | 光記録媒体の製造方法及び製造装置 |
| KR20040019293A (ko) * | 2001-05-24 | 2004-03-05 | 셀레리티 그룹 아이엔씨 | 소정 비율의 프로세스 유체를 제공하는 방법 및 장치 |
| JP2003086375A (ja) * | 2001-09-14 | 2003-03-20 | Nippon Seiki Co Ltd | 有機電界発光素子 |
| US6749906B2 (en) * | 2002-04-25 | 2004-06-15 | Eastman Kodak Company | Thermal physical vapor deposition apparatus with detachable vapor source(s) and method |
| KR100560783B1 (ko) * | 2003-09-03 | 2006-03-13 | 삼성에스디아이 주식회사 | 도핑된 발광층을 갖는 유기전계발광소자 |
| US7232588B2 (en) * | 2004-02-23 | 2007-06-19 | Eastman Kodak Company | Device and method for vaporizing temperature sensitive materials |
| US7238389B2 (en) * | 2004-03-22 | 2007-07-03 | Eastman Kodak Company | Vaporizing fluidized organic materials |
| US7501151B2 (en) * | 2004-09-21 | 2009-03-10 | Eastman Kodak Company | Delivering particulate material to a vaporization zone |
| US7501152B2 (en) * | 2004-09-21 | 2009-03-10 | Eastman Kodak Company | Delivering particulate material to a vaporization zone |
| US7288285B2 (en) * | 2004-09-21 | 2007-10-30 | Eastman Kodak Company | Delivering organic powder to a vaporization zone |
| US7288286B2 (en) * | 2004-09-21 | 2007-10-30 | Eastman Kodak Company | Delivering organic powder to a vaporization zone |
-
2007
- 2007-04-16 US US11/735,544 patent/US20080254217A1/en not_active Abandoned
-
2008
- 2008-04-02 JP JP2010504042A patent/JP2010525163A/ja active Pending
- 2008-04-02 CN CN2008800121583A patent/CN101657561B/zh active Active
- 2008-04-02 EP EP08742472.7A patent/EP2137335B1/en active Active
- 2008-04-02 KR KR1020097021532A patent/KR20100015605A/ko not_active Ceased
- 2008-04-02 WO PCT/US2008/004264 patent/WO2008127554A1/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| CN101657561B (zh) | 2011-09-28 |
| US20080254217A1 (en) | 2008-10-16 |
| CN101657561A (zh) | 2010-02-24 |
| EP2137335B1 (en) | 2014-02-12 |
| WO2008127554A1 (en) | 2008-10-23 |
| JP2010525163A (ja) | 2010-07-22 |
| EP2137335A1 (en) | 2009-12-30 |
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