CN101657561B - 汽化的有机材料的精确控制 - Google Patents

汽化的有机材料的精确控制 Download PDF

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Publication number
CN101657561B
CN101657561B CN2008800121583A CN200880012158A CN101657561B CN 101657561 B CN101657561 B CN 101657561B CN 2008800121583 A CN2008800121583 A CN 2008800121583A CN 200880012158 A CN200880012158 A CN 200880012158A CN 101657561 B CN101657561 B CN 101657561B
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China
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mixture
manifold
organic
organic components
film
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CN2008800121583A
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English (en)
Chinese (zh)
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CN101657561A (zh
Inventor
M·L·博罗森
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Global OLED Technology LLC
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Global OLED Technology LLC
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
CN2008800121583A 2007-04-16 2008-04-02 汽化的有机材料的精确控制 Active CN101657561B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/735,544 2007-04-16
US11/735,544 US20080254217A1 (en) 2007-04-16 2007-04-16 Fine control of vaporized organic material
PCT/US2008/004264 WO2008127554A1 (en) 2007-04-16 2008-04-02 Fine control of vaporized organic material

Publications (2)

Publication Number Publication Date
CN101657561A CN101657561A (zh) 2010-02-24
CN101657561B true CN101657561B (zh) 2011-09-28

Family

ID=39431623

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2008800121583A Active CN101657561B (zh) 2007-04-16 2008-04-02 汽化的有机材料的精确控制

Country Status (6)

Country Link
US (1) US20080254217A1 (https=)
EP (1) EP2137335B1 (https=)
JP (1) JP2010525163A (https=)
KR (1) KR20100015605A (https=)
CN (1) CN101657561B (https=)
WO (1) WO2008127554A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107208263A (zh) * 2015-01-29 2017-09-26 株式会社捷太格特 非晶态烃基膜、以及具有所述膜的滑动构件和滑动系统

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4974036B2 (ja) * 2009-11-19 2012-07-11 株式会社ジャパンディスプレイセントラル 有機ｅｌ装置の製造方法
WO2013052460A1 (en) * 2011-10-05 2013-04-11 First Solar, Inc. Vapor transport deposition method and system for material co-deposition
WO2016121936A1 (ja) * 2015-01-29 2016-08-04 株式会社ジェイテクト 非晶質炭化水素系膜、ならびにそれを備えた摺動部材および摺動システム
JP6796297B2 (ja) * 2015-01-29 2020-12-09 株式会社ジェイテクト 摺動システム
US12307933B1 (en) 2024-04-26 2025-05-20 Dell Products L.P. Organic light emitting diode display film pixel shifting with temporal segmented image tracking
US12456420B1 (en) 2024-04-26 2025-10-28 Dell Products L.P. Organic light emitting diode display film comfort state personalization by machine learning

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1256003A (zh) * 1998-01-27 2000-06-07 松下电器产业株式会社 光记录介质的制造方法及制造装置
EP1357200A1 (en) * 2002-04-25 2003-10-29 Eastman Kodak Company Thermal PVD apparatus with detachable vapor source(s)

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4885211A (en) * 1987-02-11 1989-12-05 Eastman Kodak Company Electroluminescent device with improved cathode
US4769292A (en) * 1987-03-02 1988-09-06 Eastman Kodak Company Electroluminescent device with modified thin film luminescent zone
US5273583A (en) * 1990-07-02 1993-12-28 Xerox Corporation Fabrication of electrophotographic imaging members
US5149612A (en) * 1990-07-02 1992-09-22 Xerox Corporation Fabrication of electrophotographic imaging members
KR20040019293A (ko) * 2001-05-24 2004-03-05 셀레리티 그룹 아이엔씨 소정 비율의 프로세스 유체를 제공하는 방법 및 장치
JP2003086375A (ja) * 2001-09-14 2003-03-20 Nippon Seiki Co Ltd 有機電界発光素子
KR100560783B1 (ko) * 2003-09-03 2006-03-13 삼성에스디아이 주식회사 도핑된 발광층을 갖는 유기전계발광소자
US7232588B2 (en) * 2004-02-23 2007-06-19 Eastman Kodak Company Device and method for vaporizing temperature sensitive materials
US7238389B2 (en) * 2004-03-22 2007-07-03 Eastman Kodak Company Vaporizing fluidized organic materials
US7501151B2 (en) * 2004-09-21 2009-03-10 Eastman Kodak Company Delivering particulate material to a vaporization zone
US7501152B2 (en) * 2004-09-21 2009-03-10 Eastman Kodak Company Delivering particulate material to a vaporization zone
US7288285B2 (en) * 2004-09-21 2007-10-30 Eastman Kodak Company Delivering organic powder to a vaporization zone
US7288286B2 (en) * 2004-09-21 2007-10-30 Eastman Kodak Company Delivering organic powder to a vaporization zone

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1256003A (zh) * 1998-01-27 2000-06-07 松下电器产业株式会社 光记录介质的制造方法及制造装置
EP1357200A1 (en) * 2002-04-25 2003-10-29 Eastman Kodak Company Thermal PVD apparatus with detachable vapor source(s)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107208263A (zh) * 2015-01-29 2017-09-26 株式会社捷太格特 非晶态烃基膜、以及具有所述膜的滑动构件和滑动系统
CN107208263B (zh) * 2015-01-29 2019-09-20 株式会社捷太格特 非晶态烃基膜、以及具有所述膜的滑动构件和滑动系统

Also Published As

Publication number Publication date
US20080254217A1 (en) 2008-10-16
CN101657561A (zh) 2010-02-24
EP2137335B1 (en) 2014-02-12
KR20100015605A (ko) 2010-02-12
WO2008127554A1 (en) 2008-10-23
JP2010525163A (ja) 2010-07-22
EP2137335A1 (en) 2009-12-30

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Date Code Title Description
C06 Publication
PB01 Publication
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ASS Succession or assignment of patent right

Owner name: GLOBAL OLED TECHNOLOGY CO., LTD.

Free format text: FORMER OWNER: EASTMAN KODAK COMPANY

Effective date: 20100611

C41 Transfer of patent application or patent right or utility model
COR Change of bibliographic data

Free format text: CORRECT: ADDRESS; FROM: NEW YORK, USA TO: DELAWARE, USA

TA01 Transfer of patent application right

Effective date of registration: 20100611

Address after: Delaware, USA

Applicant after: Global OLED Technology LLC

Address before: American New York

Applicant before: Eastman Kodak Co.

C14 Grant of patent or utility model
GR01 Patent grant