KR20100013808A - Apparatus for depositing organic material - Google Patents

Abstract

PURPOSE: An apparatus for depositing organic material is provided to increase continuity deposition time and improve productivity by uniformly forming an organic layer on a large substrate. CONSTITUTION: An apparatus for depositing organic material comprises a chamber, a substrate support part, a mask, a rail(40) and a transport part(50). The transport part is placed on the rail and comprises a main body(51), a first and a second drive part, and a first and a second plate(52a,52b). In the main body, a guide rail(53) is installed. The first and the second plate move along the guide rail by the second drive part contacted with the guide rail.

Description

Organic material deposition apparatus {Apparatus for depositing organic material}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an organic material deposition apparatus, and more particularly, to an organic material deposition apparatus of a sliding running type in which a deposition source moves along a rail.

The organic electroluminescent device includes an anode electrode, a cathode electrode, and an organic thin film, and holes are injected through the anode and electrons injected through the cathode are recombined in the organic thin film due to energy differences. Emits light.

The organic thin film includes an electron injection layer, a hole transport layer, a light emitting layer, an electron transport layer, and an electron injection layer, and these organic thin films are usually formed by a vacuum deposition method.

The deposition apparatus for forming an organic thin film includes a deposition source for heating an organic material to deposit evaporated organic material on a substrate.

Korean Unexamined Patent Publication No. 10-2006-0040233 (published on May 10, 2006) discloses an organic material deposition apparatus configured to deposit organic substances vaporized or sublimed from a crucible by heating onto a substrate to be treated.

However, since the conventional organic material deposition apparatus is installed so that the deposition source is fixed, the distance between the deposition source and the substrate must be increased in order to form an organic thin film on a large area substrate. Therefore, the size of the device must be large, and there is a disadvantage that the thickness uniformity of the organic thin film to be deposited is lowered. In addition, since the amount of the organic material contained in the deposition source is limited, it takes a long time to replenish the organic material, which has the disadvantage of low productivity.

In order to increase productivity, the amount of organic material must be increased. However, increasing the size of the deposition source to increase the amount of organic material is difficult to control the deposition rate, and increasing the number of deposition sources decreases the thickness uniformity of the organic thin film due to cross talk.

SUMMARY OF THE INVENTION An object of the present invention is to provide an organic vapor deposition apparatus capable of forming an organic thin film on a large area substrate with a uniform thickness.

Another object of the present invention is to provide an organic material deposition apparatus for increasing productivity by increasing the continuous deposition time.

An organic material deposition apparatus according to an aspect of the present invention for achieving the above object is a chamber, a substrate support portion disposed on one side of the chamber to support the substrate, a rail disposed on the other side of the chamber, along the rail A transfer part having first and second plates moving in a direction crossing the rails, a first deposition source and a first auxiliary deposition source disposed on the first plate and evaporating organic matter, and the second plate A second deposition source and a second auxiliary deposition source disposed on the substrate and evaporating the organic material, wherein the first and second plates are moved when the organic material of the first and second deposition sources is exhausted. And positions of the first auxiliary deposition source, the second deposition source, and the second auxiliary deposition source are changed, and organic matter is evaporated from the first and second auxiliary deposition sources. It is deposited on a substrate group.

The organic material deposition apparatus of the present invention includes a deposition source and an auxiliary deposition source, the position of the deposition source and the auxiliary deposition source can be changed by the movement of the plate in the deposition process. By being able to continuously use the organic material of the evaporation source and the auxiliary evaporation source, the deposition time can be increased by about twice as compared to the conventional, and the productivity can be improved. In addition, the organic material deposition apparatus of the present invention can deposit an organic thin film on a large area substrate with a uniform thickness without increasing the size of the equipment by moving the deposition source along the rail.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. The following embodiments are provided to those skilled in the art to fully understand the present invention, and may be modified in various forms, and the scope of the present invention is limited to the embodiments described below. no.

1A, 1B and 1C are diagrams for explaining an organic material deposition apparatus according to the present invention. FIG. 1A is a front view, FIG. 1B is a side view, and FIG. 1C is a plan view.

1A and 1B, the chamber 10 is a space in which deposition is performed, and the inside of the chamber 10 may be maintained in a vacuum by an exhaust means such as a vacuum pump (not shown).

A substrate support 20 supporting the substrate 22 is disposed at one side of the chamber 10, and a rail 40 is installed at the other side of the chamber 10 facing the substrate support 20.

On the rail 40, a transfer unit 50 for moving the deposition source along the rail 40 is disposed. The transfer unit 50 includes a main body 51, first and second drives (not shown), and first and second plates 52a and 52b. The main body 51 is disposed above the rail 40 and moves along the rail 40 by a first driving part contacting the rail 40. In addition, the guide rails 53 are installed in the main body 51 in a direction crossing the rails 40, and the first and second plates 52a and 52b are formed by the second driving unit which is in contact with the guide rails 53. It moves along the guide rail 53. At this time, the first and second plates 52a and 52b move to be adjacent to or far from each other by the second driver.

A first deposition source 62a and a first auxiliary deposition source 64a are disposed on the first plate 52a, and a second deposition source 62b is formed to evaporate the organic material on the second plate 52b. The second auxiliary deposition source 64b is disposed. In this case, the first deposition source 62a and the second deposition source 62b are disposed to be adjacent to each other, and the first auxiliary deposition source 64a and the second auxiliary deposition source 64b are the first deposition source 62a. ) And the second deposition source 62b. Alternatively, on the contrary, the first auxiliary deposition source 64a and the second auxiliary deposition source 64b are disposed to be adjacent to each other, and the first deposition source 62a and the second deposition source 62b are first auxiliary deposition. It may be disposed outside the circle 64a and the second auxiliary deposition source 64b.

Referring to FIG. 1C, in this embodiment, two first deposition sources 62a and two first auxiliary deposition sources 64a are disposed on the first plate 52a and second deposition on the second plate 52b. Although the circle 62b and the second auxiliary deposition source 64b are each disposed two, the number of deposition sources can be changed as necessary.

Referring to FIG. 2, the first deposition source 62a, the first auxiliary deposition source 64a, the second deposition source 62b, and the second auxiliary deposition source 64b are each a crucible 60a in which an organic material is accommodated. The heater unit 60b installed outside the crucible 60a for heating the organic material and the cooling unit 60c installed outside the heater unit 60b so as to prevent heat from being emitted to the outside. do. The size of the crucible 60a can be appropriately adjusted within the range in which the organic material is not denatured and the selected organic material can be deposited at a desired rate.

In addition, a plurality of sensors 55 for sensing the deposition thickness of the organic material and a compensation plate (not shown) for uniformly evaporating the organic material may be disposed in the chamber 10. The plurality of sensors 55 and the compensating plate are disposed in a path through which organic materials are evaporated from the first deposition source 62a, the first auxiliary deposition source 64a, the second deposition source 62b, and the second auxiliary deposition source 64b. For example, it may be installed to be fixed to the main body 51 of the transfer unit 50.

Then, the present invention will be described in more detail through the operation of the organic material deposition apparatus configured as described above.

1A and 1B, the chamber 10 may be divided into a deposition region D and an atmospheric region S. Referring to FIG. First, in the atmosphere region S, an organic material is formed in each of the crucibles 60a of the first deposition source 62a, the first auxiliary deposition source 64a, the second deposition source 62b, and the second auxiliary deposition source 64b. The first deposition source 62a, the first auxiliary deposition source 64a, the second deposition source 62b, and the second auxiliary deposition source 64b filled with the organic material or filled with the organic material are transferred from the outside to the first and second When placed on the plates 52a and 52b, the inside of the chamber 10 is evacuated by the exhaust means and the crucible 60a starts to be heated by the heater 60b. When the crucible 60a is sufficiently heated to allow deposition, the substrate 22 is mounted on the substrate support 20 of the deposition region D, and an opening pattern is formed on the front surface of the substrate 22 to selectively deposit organic materials. Mask 30 is disposed.

Next, the transfer unit 50 is moved along the rail 40 to the deposition region D by the first driving unit, and the transfer unit 50 moves along the rail 40 at a constant speed in the deposition region D. Organic materials are evaporated from the first deposition source 62a and the second deposition source 62b and deposited on the substrate 22. Before the transfer part 50 is moved to the deposition region D by the first driver, the positions of the first and second plates 52a and 52b are adjusted by the second driver so that the first and second deposition sources 62a and 62b) and the substrate 22 should be aligned.

When the organic materials of the first deposition source 62a and the second deposition source 62b are exhausted through the deposition process, the first and second plates 52a and 52b are moved by the second driving unit, so that the first deposition source ( 62a), the first auxiliary deposition source 64a, and the positions of the second deposition source 62b and the second auxiliary deposition source 64b are changed, and organic matter is removed from the first and second auxiliary deposition sources 64a and 64b. It is evaporated and deposited on the substrate 22.

3A and 3B, the first auxiliary deposition source 64a is disposed at the position of the first deposition source 62a by moving inward so that the first and second plates 52a and 52b are adjacent to each other. The second auxiliary deposition source 64b is disposed at the position of the second deposition source 62b.

In order to allow continuous deposition at this time, the first and second deposition sources 62a and 62b during the organic material is deposited or before changing the position of the first and second deposition sources 62a and 62b And preheating the organic material of the second auxiliary deposition sources 64a and 64b to a constant temperature.

Although not shown in the drawing, the first driving unit and the second driving unit, the plurality of sensors 55 and the heater unit 60b may be controlled in conjunction with each other by being connected to a control unit for controlling the operation of the organic material deposition apparatus.

As described above, the preferred embodiment of the present invention has been disclosed through the detailed description and the drawings. The terms are used only for the purpose of describing the present invention and are not used to limit the scope of the present invention as defined in the meaning or claims. Therefore, those skilled in the art will understand that various modifications and equivalent other embodiments are possible from this. Therefore, the true technical protection scope of the present invention will be defined by the technical spirit of the appended claims.

1A, 1B and 1C are front, side and plan views for explaining the organic material deposition apparatus according to the present invention.

FIG. 2 is a perspective view for explaining a deposition source shown in FIGS. 1A, 1B, and 1C.

3A and 3B are a front view and a plan view for explaining an organic material deposition apparatus according to the present invention.

<Explanation of symbols for the main parts of the drawings>

10 chamber 20 substrate support

22: substrate 30: mask

40: rail 50: transfer part

51: main bodies 52a and 52b: first and second plates

53: guide rail 55: sensor

60a: crucible 60b: heating part

60c: cooling sections 62a and 62b: first and second deposition sources

64a and 64b: first and second auxiliary deposition sources

Claims (8)

chamber; A substrate supporter disposed on one side of the chamber to support a substrate; A rail disposed on the other side of the chamber; A conveying part moving along the rail and having first and second plates moving in a direction crossing the rail; A first deposition source and a first auxiliary deposition source disposed on the first plate to evaporate the organic material; And A second deposition source and a second auxiliary deposition source disposed on the second plate to evaporate organic matter, And the first and second plates move to change positions of the first deposition source, the first auxiliary deposition source, the second deposition source, and the second auxiliary deposition source. The method of claim 1, wherein when the organic material of the first and second deposition sources is exhausted, the first and second plates move to move the first deposition source, the first auxiliary deposition source, the second deposition source, and the second deposition source. 2 The position of the auxiliary deposition source is changed, the organic material deposition apparatus is deposited on the substrate by evaporating the organic material from the first and second auxiliary deposition source. According to claim 1, The transfer unit is disposed on the upper rail, the main body having a guide rail installed in a direction crossing the rail; A first driving unit moving the main body along the rail; The first and second plates disposed on the guide rails; And And a second driver for moving the first and second plates along the guide rail. The method of claim 1, wherein the first deposition source, the first auxiliary deposition source, the second deposition source and the second auxiliary deposition source is a crucible in which the organic material is accommodated; A heater installed outside the crucible to heat the organic material; And Organic material deposition apparatus comprising a cooling unit installed outside the heater unit. The method of claim 1, wherein the first deposition source and the second deposition source are disposed adjacent to each other, wherein the first auxiliary deposition source and the second auxiliary deposition source outside the first deposition source and the second deposition source. The organic substance deposition apparatus which is arrange | positioned. The organic material deposition apparatus of claim 1, wherein a plurality of the first deposition sources, the first auxiliary deposition sources, the second deposition sources, and the second auxiliary deposition sources are disposed. The method of claim 1, further comprising a plurality of sensors installed in a path through which organic materials are evaporated from the first deposition source, the first auxiliary deposition source, the second deposition source, and the second auxiliary deposition source to detect the deposition thickness of the organic material. Organic material deposition apparatus comprising. The method of claim 1, further comprising a correction plate installed in a path through which the organic material is evaporated from the first deposition source, the first auxiliary deposition source, the second deposition source, and the second auxiliary deposition source so as to uniformly evaporate the organic material. Organic material deposition apparatus.

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