KR20090056486A - Apparatus for transferring substrate - Google Patents

Abstract

A substrate transfer apparatus is provided to precisely control rollers at the same time by mounting the rollers on a single shaft and regulating the level of the shaft using control bars. A substrate transfer apparatus comprises a plurality of shafts(210a,210b) installed at an interval and rotated with by a driving member, a plurality of rollers(220a,220b) installed at an interval on each shaft and transferring substrates in contact with the substrates, a plurality of guide shafts(260) installed under the shafts to correspond to the respective shafts, and control bars(270) fixed to the guide shafts in the perpendicular direction to the shafts in order to control the position of the shafts.

Description

Apparatus for transferring substrate

The present invention relates to a substrate transfer apparatus, and more particularly, to a substrate transfer apparatus capable of easily adjusting a roller for transferring a substrate.

In general, a flat panel display device refers to a liquid crystal display, a plasma display panel, organic light emitting diodes, and the like. Such flat panel display devices are manufactured by repeating processes such as photo, diffusion, deposition, etching, cleaning, and drying on a substrate.

Among each of these processes, the drying process injects air onto the substrate after the cleaning process to remove the remaining cleaning liquid or impurities.

In addition, the substrate transfer apparatus which transfers a board | substrate across a chamber is provided in the drying equipment which a drying process advances. The substrate transfer apparatus is provided with a plurality of shafts at predetermined intervals for supporting and transferring a large glass substrate. Each shaft is provided with one or more rollers for rotating and transporting the substrate. The plurality of rollers provided in the substrate transfer apparatus may include a main roller and an auxiliary roller.

In addition, an air knife is installed above and below the substrate transfer apparatus to spray, clean and dry air on the substrate to be transferred. The air knife receives compressed air from a compressor and injects air to the substrate.

In the substrate transfer apparatus as described above, a plurality of main rollers are installed on each shaft, and the auxiliary rollers are fixed to the plate between the main rollers. Therefore, when the shaft is bent by the weight of the substrate when the substrate is transferred, the auxiliary rollers may not be in uniform contact with the substrate.

Accordingly, there is a problem that the positions of the rollers must be adjusted respectively so that the substrate can be transported in uniform contact with the rollers. Thus, during substrate transfer, the working time for adjusting the rollers is increased.

In addition, since the auxiliary rollers are fixed to the plate, respectively, the substrate and the rollers are not uniformly contacted, and the respective auxiliary rollers must be adjusted and cannot be precisely adjusted.

Accordingly, an object of the present invention is to provide a substrate transfer apparatus capable of easily adjusting a roller for transferring a substrate.

The objects of the present invention are not limited to the above-mentioned objects, and other objects that are not mentioned will be clearly understood by those skilled in the art from the following description.

Substrate transfer apparatus according to an embodiment of the present invention for achieving the object to be solved is rotated by a drive member, a plurality of shafts installed in one direction spaced apart in one direction, spaced apart at regular intervals installed on each shaft A plurality of rollers for transferring the substrate while contacting the substrate by rotation of the shaft, a plurality of guide shafts installed corresponding to the respective shafts under the plurality of shafts, fixed to the guide shaft, and perpendicular to the longitudinal direction of the shaft. It is installed to include an adjustment bar for adjusting the position of the shaft.

Specific details of other embodiments are included in the detailed description and the drawings.

The substrate transport apparatus according to the embodiment of the present invention as described above can adjust a plurality of rollers simultaneously and precisely by mounting a plurality of rollers on one shaft and adjusting the level of the shaft through the adjustment bars.

And, by adjusting the two or three adjustment bar, the level of the auxiliary roller can be adjusted, it is possible to shorten the adjustment time of the rollers during substrate transfer.

Effects of the present invention are not limited to the above-mentioned effects, and other effects not mentioned will be clearly understood by those skilled in the art from the description of the claims.

Advantages and features of the present invention and methods for achieving them will be apparent with reference to the embodiments described below in detail with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but can be implemented in various different forms, only the embodiments are to make the disclosure of the present invention complete, the general knowledge in the art to which the present invention belongs It is provided to fully inform the person having the scope of the invention, which is defined only by the scope of the claims. Like reference numerals refer to like elements throughout.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. In this specification, the singular also includes the plural unless specifically stated otherwise in the phrase. As used herein, “comprises” and / or “comprising” refers to the presence of one or more other components, steps, operations and / or elements. Or does not exclude additions.

Hereinafter, a substrate transfer apparatus according to a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings. For reference, in the following description of the present invention, if it is determined that a detailed description of related known functions or configurations may unnecessarily obscure the subject matter of the present invention, the detailed description thereof will be omitted. In addition, an embodiment of the present invention will be described by taking a substrate transfer apparatus provided in the substrate drying equipment as an example, the substrate transfer apparatus according to an embodiment of the present invention can be applied to other equipment or systems that require the transfer of large plates. Of course.

1 is a plan view of a substrate transfer apparatus according to an embodiment of the present invention. 2 is a cross-sectional view of the X-axis of the substrate transfer apparatus according to an embodiment of the present invention. 3 is a cross-sectional view of the Y-axis of the substrate transfer apparatus according to an embodiment of the present invention.

As shown in FIGS. 1 to 3, the substrate drying equipment includes a process chamber 100, a substrate transfer device and an air knife 300, wherein the substrate transfer device includes shafts 210a and 210b, rollers 220a, 220b), guide shaft 260 and adjustment bar 270.

The process chamber 100 is a space where a substrate drying process is performed, and an inlet 112 through which the substrate G is carried is formed at one side thereof, and a substrate G is disposed at the opposite side corresponding to the inlet 112. The carrying out port 114 carried out to the outside is formed. In addition, an exhaust port 120 that discharges impurities or air in the process chamber 100 to the outside is formed at an upper portion of the process chamber 100. In addition, a discharge line 130 is connected to the bottom of the process chamber 100 to remove the chemical liquid or the cleaning liquid that is removed from the substrate G and dropped to the bottom when the substrate is dried.

In the process chamber 100, a substrate transfer device for transferring the substrate G from the inlet 112 to the outlet 114 is provided.

In more detail with respect to the substrate transfer apparatus, a plurality of shafts (210a, 210b) are horizontally spaced apart at predetermined intervals in the process chamber 100, so that the substrate (top) over the plurality of shafts (210a, 210b) G) is moved. In addition, horizontally installed shafts 210a and 210b may be vertically installed to face each other, and the substrate G may be transferred between the upper and lower shafts 210a and 210b. The shafts 210a and 210b have a length determined according to the size of the object to be transported, and the long shafts 210a and 210b having a long length are used to transport the large substrate G used in the flat panel display apparatus. do.

In addition, the long shafts 210a and 210b having long lengths may include first and second shafts 210a and 210b having different radii. In this case, when the shafts 210a and 210b are installed in one direction, the first and second shafts 210a and 210b are alternately disposed.

In addition, each of the shafts 210a and 210b supports a substrate G, and a plurality of rollers 220a and 220b which rotate in a predetermined direction and transport the substrate G are installed at regular intervals. That is, the shafts 210a and 210b may be penetrated through the rollers 220a and 220b and the rollers 220a and 220b may be fixed to a predetermined area of the shafts 210a and 210b by using a coupling means (not shown).

Here, the plurality of rollers 220a and 220b may include first rollers 220a and second rollers 220b having different radii. The first rollers 220a are a main roller, and have a larger radius than the second rollers 220b, which are auxiliary rollers. Such first rollers 220a are installed at predetermined intervals on the first shafts 210a, and the second rollers 220b are installed at predetermined intervals on the second shafts 210b.

The first and second rollers 220a and 220b installed as described above are arranged in the shape of a zigzag.

The ends of the shafts 210a and 210b are connected to the driving motor 250 and rotated by the driving motor 250. In more detail, both ends of each of the shafts 210a and 210b are connected to the pulley 230, and each pulley 230 is connected to each other by the belt 240. In addition, one of the plurality of pulleys 230 is connected to the drive motor 250 providing a driving force to the shafts (210a, 210b) by the belt 240. Therefore, the shafts 210a and 210b may be rotated in the same direction by receiving power from the driving motor 250.

In addition, when the substrate G is transferred to the second shafts 210b having the auxiliary rollers 220b among the shafts, the second shafts 210b are bent so that the auxiliary roller 220b is the substrate G. In order to prevent the phenomenon from coming into contact with, an adjustment bar 270 that adjusts the level of the second shafts 210b is installed. Therefore, when the second shaft 210b is bent, the adjusting bars 270 are adjusted up and down so that the auxiliary rollers 220b installed on the second shaft 210b may be in uniform contact with the substrate G.

In more detail, the adjustment bars 270 are vertically connected to the length direction of the second shaft 210b in predetermined regions of each second shaft 210b. That is, two or three adjustment bars 270 are vertically connected to the shaft 21b. Such adjustment bars 270 may be moved up and down, thereby raising the adjustment bars 270 when the second shaft 210b is bent to prevent the bending of the second shaft 210b.

In addition, guide shafts 260 are installed at the lower portions of the second shafts 210b to correspond to each other. The guide shafts 260 are fixed at both ends thereof, and are long shafts of long length, and fix and support the adjusting bars 270.

In addition, between the adjustment bars 270 and the guide shaft 260 is provided with a fixed block 280 for fixing and up and down the adjustment bars 270. The fixing block 280 is formed of a member that can move up and down, so that the adjustment bar 270 connected to the fixing block 280 may be moved up and down by adjusting the fixing block 280.

Thus, by adjusting the height of the adjusting bar 270 through the fixing block 280, the level of the second shaft 210b is adjusted, and thus, the plurality of auxiliary rollers 220b mounted on the second shaft 210b. Can be adjusted at the same time. Therefore, the position of the plurality of auxiliary rollers 220b can be adjusted at the same time, so that the auxiliary rollers 220b can be in uniform contact with the substrate G when transporting the substrate G.

Meanwhile, in the exemplary embodiment of the present invention, the adjusting bar 270 is installed only on the second shafts 210b. However, when the bending occurs in the first shafts 210a, the first shafts 210a are formed. An adjustment bar may also be installed.

In addition, the upper and lower portions of the substrate G positioned on the rollers 220a and 220b of the substrate transfer apparatus are provided so that the air knife 300 for injecting air to the upper and lower surfaces of the substrate G is opposed to each other. The air knife 300 is formed to have a sufficient length to supply sufficient air to the substrate to be transferred.

And the air knife 300 provided in the upper and lower portions may be installed diagonally with respect to the substrate (G) in order to dry the chemical liquid remaining on the substrate (G) more effectively when the substrate (G) is inclined to be transferred.

Although embodiments of the present invention have been described above with reference to the accompanying drawings, those skilled in the art to which the present invention pertains have various permutations, modifications, and modifications without departing from the spirit or essential features of the present invention. It is to be understood that modifications may be made and other embodiments may be embodied. Therefore, it should be understood that the embodiments described above are exemplary in all respects and not restrictive.

1 is a plan view of a substrate transfer apparatus according to an embodiment of the present invention.

2 is a cross-sectional view of the X-axis of the substrate transfer apparatus according to an embodiment of the present invention.

3 is a cross-sectional view of the Y-axis of the substrate transfer apparatus according to an embodiment of the present invention.

* Description of the main parts of the drawings *

100: process chamber 210a: first shaft

210b: second shaft 220a: first roller

220b: second roller 230: pulley

240: belt 250: drive member

260: guide shaft 270: adjustment bar

280: fixed block 300: air knife

400: base

Claims (6)

A plurality of shafts rotated by the driving member and installed at predetermined intervals in one direction; A plurality of rollers spaced apart at regular intervals on each of the shafts and transferring the substrate while being in contact with the substrate by rotation of the shaft; A plurality of guide shafts installed corresponding to the respective shafts under the plurality of shafts; And an adjustment bar fixed to the guide shaft and installed perpendicular to the longitudinal direction of the shaft to adjust the position of the shaft. The method of claim 1, The adjustment bar is a substrate transfer device connected to a plurality of one shaft. The method of claim 1, The adjustment bar is a substrate transfer device capable of vertical movement. The method of claim 1, And a fixing block fixing the adjusting bar to the guide shaft, wherein the fixing block moves up and down by moving up and down. The method of claim 1, And the plurality of rollers include first rollers and second rollers having different radii. The method of claim 5, wherein And a shaft on which the first rollers are installed and a shaft on which the second roller is installed are alternately disposed in one direction.

Images