KR20090049778A - 저온경화형 폴리아믹산 수지 조성물로부터 제조된폴리이미드 절연막 및 이를 이용한 전유기 박막 트랜지스터 - Google Patents
저온경화형 폴리아믹산 수지 조성물로부터 제조된폴리이미드 절연막 및 이를 이용한 전유기 박막 트랜지스터 Download PDFInfo
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- KR20090049778A KR20090049778A KR1020070116068A KR20070116068A KR20090049778A KR 20090049778 A KR20090049778 A KR 20090049778A KR 1020070116068 A KR1020070116068 A KR 1020070116068A KR 20070116068 A KR20070116068 A KR 20070116068A KR 20090049778 A KR20090049778 A KR 20090049778A
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- South Korea
- Prior art keywords
- acid
- polyimide resin
- low temperature
- thin film
- group
- Prior art date
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- 229920005575 poly(amic acid) Polymers 0.000 title claims abstract description 25
- 239000010409 thin film Substances 0.000 title abstract description 69
- 239000012212 insulator Substances 0.000 title abstract description 10
- 229920001721 polyimide Polymers 0.000 claims abstract description 82
- 239000003054 catalyst Substances 0.000 claims abstract description 18
- 238000013035 low temperature curing Methods 0.000 claims abstract description 8
- 239000009719 polyimide resin Substances 0.000 claims description 38
- 238000000034 method Methods 0.000 claims description 21
- 150000004985 diamines Chemical class 0.000 claims description 16
- BVJSUAQZOZWCKN-UHFFFAOYSA-N p-hydroxybenzyl alcohol Chemical compound OCC1=CC=C(O)C=C1 BVJSUAQZOZWCKN-UHFFFAOYSA-N 0.000 claims description 8
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 claims description 7
- 230000005669 field effect Effects 0.000 claims description 7
- SDGKUVSVPIIUCF-UHFFFAOYSA-N 2,6-dimethylpiperidine Chemical compound CC1CCCC(C)N1 SDGKUVSVPIIUCF-UHFFFAOYSA-N 0.000 claims description 6
- -1 3,5-diaminophenyl Chemical group 0.000 claims description 6
- AEMRFAOFKBGASW-UHFFFAOYSA-N Glycolic acid Chemical compound OCC(O)=O AEMRFAOFKBGASW-UHFFFAOYSA-N 0.000 claims description 6
- 125000006158 tetracarboxylic acid group Chemical group 0.000 claims description 6
- 125000003118 aryl group Chemical group 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 5
- XYHKNCXZYYTLRG-UHFFFAOYSA-N 1h-imidazole-2-carbaldehyde Chemical compound O=CC1=NC=CN1 XYHKNCXZYYTLRG-UHFFFAOYSA-N 0.000 claims description 4
- GWYFCOCPABKNJV-UHFFFAOYSA-M 3-Methylbutanoic acid Natural products CC(C)CC([O-])=O GWYFCOCPABKNJV-UHFFFAOYSA-M 0.000 claims description 4
- 125000004203 4-hydroxyphenyl group Chemical group [H]OC1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 4
- 125000000217 alkyl group Chemical group 0.000 claims description 4
- GWYFCOCPABKNJV-UHFFFAOYSA-N beta-methyl-butyric acid Natural products CC(C)CC(O)=O GWYFCOCPABKNJV-UHFFFAOYSA-N 0.000 claims description 4
- 125000006159 dianhydride group Chemical group 0.000 claims description 4
- MWRVRCAFWBBXTL-UHFFFAOYSA-N 4-hydroxyphthalic acid Chemical compound OC(=O)C1=CC=C(O)C=C1C(O)=O MWRVRCAFWBBXTL-UHFFFAOYSA-N 0.000 claims description 3
- 239000002253 acid Substances 0.000 claims description 3
- 125000003368 amide group Chemical group 0.000 claims description 3
- 125000004432 carbon atom Chemical group C* 0.000 claims description 3
- 125000004185 ester group Chemical group 0.000 claims description 3
- 125000001033 ether group Chemical group 0.000 claims description 3
- 125000005462 imide group Chemical group 0.000 claims description 3
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 claims description 3
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- UIAFKZKHHVMJGS-UHFFFAOYSA-N 2,4-dihydroxybenzoic acid Chemical compound OC(=O)C1=CC=C(O)C=C1O UIAFKZKHHVMJGS-UHFFFAOYSA-N 0.000 claims 4
- PLIKAWJENQZMHA-UHFFFAOYSA-N 4-aminophenol Chemical compound NC1=CC=C(O)C=C1 PLIKAWJENQZMHA-UHFFFAOYSA-N 0.000 claims 4
- RGHHSNMVTDWUBI-UHFFFAOYSA-N 4-hydroxybenzaldehyde Chemical compound OC1=CC=C(C=O)C=C1 RGHHSNMVTDWUBI-UHFFFAOYSA-N 0.000 claims 4
- FJKROLUGYXJWQN-UHFFFAOYSA-N 4-hydroxybenzoic acid Chemical compound OC(=O)C1=CC=C(O)C=C1 FJKROLUGYXJWQN-UHFFFAOYSA-N 0.000 claims 4
- XQXPVVBIMDBYFF-UHFFFAOYSA-N 4-hydroxyphenylacetic acid Chemical compound OC(=O)CC1=CC=C(O)C=C1 XQXPVVBIMDBYFF-UHFFFAOYSA-N 0.000 claims 4
- NMHMNPHRMNGLLB-UHFFFAOYSA-N phloretic acid Chemical compound OC(=O)CCC1=CC=C(O)C=C1 NMHMNPHRMNGLLB-UHFFFAOYSA-N 0.000 claims 4
- YGSDEFSMJLZEOE-UHFFFAOYSA-N salicylic acid Chemical compound OC(=O)C1=CC=CC=C1O YGSDEFSMJLZEOE-UHFFFAOYSA-N 0.000 claims 4
- JOXIMZWYDAKGHI-UHFFFAOYSA-N toluene-4-sulfonic acid Chemical compound CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 claims 4
- SJJCQDRGABAVBB-UHFFFAOYSA-N 1-hydroxy-2-naphthoic acid Chemical compound C1=CC=CC2=C(O)C(C(=O)O)=CC=C21 SJJCQDRGABAVBB-UHFFFAOYSA-N 0.000 claims 2
- DNUYOWCKBJFOGS-UHFFFAOYSA-N 2-[[10-(2,2-dicarboxyethyl)anthracen-9-yl]methyl]propanedioic acid Chemical compound C1=CC=C2C(CC(C(=O)O)C(O)=O)=C(C=CC=C3)C3=C(CC(C(O)=O)C(O)=O)C2=C1 DNUYOWCKBJFOGS-UHFFFAOYSA-N 0.000 claims 2
- XFDUHJPVQKIXHO-UHFFFAOYSA-N 3-aminobenzoic acid Chemical compound NC1=CC=CC(C(O)=O)=C1 XFDUHJPVQKIXHO-UHFFFAOYSA-N 0.000 claims 2
- IMRVRTDYOOJNHM-UHFFFAOYSA-N 4,5-dihydroxycyclohexane-1,2-dicarboxylic acid Chemical compound OC1CC(C(O)=O)C(C(O)=O)CC1O IMRVRTDYOOJNHM-UHFFFAOYSA-N 0.000 claims 2
- ALYNCZNDIQEVRV-UHFFFAOYSA-N 4-aminobenzoic acid Chemical compound NC1=CC=C(C(O)=O)C=C1 ALYNCZNDIQEVRV-UHFFFAOYSA-N 0.000 claims 2
- FEPBITJSIHRMRT-UHFFFAOYSA-N 4-hydroxybenzenesulfonic acid Chemical compound OC1=CC=C(S(O)(=O)=O)C=C1 FEPBITJSIHRMRT-UHFFFAOYSA-N 0.000 claims 2
- 229940090248 4-hydroxybenzoic acid Drugs 0.000 claims 2
- 229940114055 beta-resorcylic acid Drugs 0.000 claims 2
- 150000001732 carboxylic acid derivatives Chemical class 0.000 claims 2
- IJFXRHURBJZNAO-UHFFFAOYSA-N meta--hydroxybenzoic acid Natural products OC(=O)C1=CC=CC(O)=C1 IJFXRHURBJZNAO-UHFFFAOYSA-N 0.000 claims 2
- 229920001187 thermosetting polymer Polymers 0.000 claims 2
- IMNIMPAHZVJRPE-UHFFFAOYSA-N triethylenediamine Chemical compound C1CN2CCN1CC2 IMNIMPAHZVJRPE-UHFFFAOYSA-N 0.000 claims 2
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- 239000004642 Polyimide Substances 0.000 abstract description 44
- 238000006243 chemical reaction Methods 0.000 abstract description 39
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- 230000001590 oxidative effect Effects 0.000 abstract 1
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 30
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 18
- 239000000178 monomer Substances 0.000 description 15
- 239000002904 solvent Substances 0.000 description 13
- CBCKQZAAMUWICA-UHFFFAOYSA-N 1,4-phenylenediamine Chemical compound NC1=CC=C(N)C=C1 CBCKQZAAMUWICA-UHFFFAOYSA-N 0.000 description 11
- 238000002360 preparation method Methods 0.000 description 11
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 10
- 229910001873 dinitrogen Inorganic materials 0.000 description 10
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- 239000007787 solid Substances 0.000 description 10
- 238000004528 spin coating Methods 0.000 description 10
- 238000006116 polymerization reaction Methods 0.000 description 9
- WKDNYTOXBCRNPV-UHFFFAOYSA-N bpda Chemical compound C1=C2C(=O)OC(=O)C2=CC(C=2C=C3C(=O)OC(C3=CC=2)=O)=C1 WKDNYTOXBCRNPV-UHFFFAOYSA-N 0.000 description 7
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- WFDIJRYMOXRFFG-UHFFFAOYSA-N Acetic anhydride Chemical group CC(=O)OC(C)=O WFDIJRYMOXRFFG-UHFFFAOYSA-N 0.000 description 5
- 150000004984 aromatic diamines Chemical class 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- GQHTUMJGOHRCHB-UHFFFAOYSA-N 2,3,4,6,7,8,9,10-octahydropyrimido[1,2-a]azepine Chemical compound C1CCCCN2CCCN=C21 GQHTUMJGOHRCHB-UHFFFAOYSA-N 0.000 description 4
- ZXSWZQSYZYMZKS-UHFFFAOYSA-N 2-methoxyethyl 4-(3-hydroxyphenyl)-7-(2-methoxyphenyl)-2-methyl-5-oxo-4,6,7,8-tetrahydro-1h-quinoline-3-carboxylate Chemical compound COCCOC(=O)C1=C(C)NC(CC(CC2=O)C=3C(=CC=CC=3)OC)=C2C1C1=CC=CC(O)=C1 ZXSWZQSYZYMZKS-UHFFFAOYSA-N 0.000 description 4
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- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
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- 230000000704 physical effect Effects 0.000 description 2
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- FTTATHOUSOIFOQ-UHFFFAOYSA-N 1,2,3,4,6,7,8,8a-octahydropyrrolo[1,2-a]pyrazine Chemical compound C1NCCN2CCCC21 FTTATHOUSOIFOQ-UHFFFAOYSA-N 0.000 description 1
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- 150000007524 organic acids Chemical class 0.000 description 1
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- 239000003960 organic solvent Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- SLIUAWYAILUBJU-UHFFFAOYSA-N pentacene Chemical compound C1=CC=CC2=CC3=CC4=CC5=CC=CC=C5C=C4C=C3C=C21 SLIUAWYAILUBJU-UHFFFAOYSA-N 0.000 description 1
- 238000000016 photochemical curing Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000003495 polar organic solvent Substances 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 238000012643 polycondensation polymerization Methods 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 230000000379 polymerizing effect Effects 0.000 description 1
- 235000020004 porter Nutrition 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
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- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
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- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
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- H10K10/462—Insulated gate field-effect transistors [IGFETs]
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Abstract
Description
Claims (12)
- 제 1 항에 있어서,상기 폴리이미드 수지의 고유점도가 0.57~1.79 g/dL이고, 중량평균분자량은 10,000~500,000 g/mol인 것임을 특징으로 하는 저온 경화형 폴리이미드 수지.
- 제 1 항에 있어서,상기 폴리이미드 수지의 유전상수가 2~4 인 것임을 특징으로 하는 저온 경화형 폴리이미드 수지.
- 제 1 항에 있어서,상기 폴리이미드 수지의 표면장력이 30~55 dyne/cm인 것임을 특징으로 하는 저온 경화형 폴리이미드 수지.
- 제 1 항에 있어서,상기 폴리이미드 수지는 120 ~200 ℃에서 60~120분 동안 열경화된 것임을 특징으로 하는 저온 경화형 폴리이미드 수지.
- 제 6항에 있어서,상기 디아민성분으로 1-(3,5-디아미노페닐)-3-알킬-숙시닉이미드(DA-IM-R1), 3,5-디아미노페닐-알킬-에테르(DA-O-R1), 3,5-디아미노페닐-알킬-에스테르(DA-Es-R1) 및 3,5-디아미노페닐-알킬-아미드(DA-AM-R1) 에서 선택되는 1종 또는 2종이상을 전체 디아민성분에 대하여 0.1~80몰%로 더 함유하는 저온 경화형 폴리이미드 수지.
- 상기 청구항 1 내지 6 중에서 선택된 어느 한 항에 있어서,상기 촉매는 아세트산이무수물, 피리딘, p-톨루엔술폰산, 1,3-디시클로카르보이미드, 1,4-디아자바이시클로[2.2.2]옥탄, 1,8-디아자바이시클로[5.4.0]언덱-7-센, 2,6-디메틸피페리딘, p-히드록시페닐아세트산, o-히드록시벤조산, m-히드록시벤조산, p-히드록시벤조산, 2,4-디히드록시벤조산, 1-히드록시-2-나프토익산, 2-(4-히드록시페닐)이소발레릭산, 글리코릭산, 4,5-디히드록시헥사히드로프탈산, 4-히드록시프탈산, 4-히드록시신나믹산, 3-(4-히드록시페닐)프로피오닉산, p-히드록시벤젠설폰산, 2,2'4,4'-테트라히드록시벤조페논, p-히드록시벤질알코올, p-아미노페놀, p-히드록시벤즈알데히드, m-아미노벤조산, p-아미노벤조산에서 선택되는 하나 또는 2 이상의 혼합성분에 의해 제조되는 저온 경화형 폴리이미드 수지.
- 상기 청구항 7항의 폴리이미드 수지를 사용하여 제작된 것으로 전계효과전하이동도가 0.1~1.00 ㎠/V·s인 것임을 특징으로 하는 유기트랜지스터.
- 제 9항에 있어서,상기 촉매는 아세트산이무수물, 피리딘, p-톨루엔술폰산, 1,3-디시클로카르보이미드, 1,4-디아자바이시클로[2.2.2]옥탄, 1,8-디아자바이시클로[5.4.0]언덱-7-센, 2,6-디메틸피페리딘, p-히드록시페닐아세트산, o-히드록시벤조산, m-히드록시벤조산, p-히드록시벤조산, 2,4-디히드록시벤조산, 1-히드록시-2-나프토익산, 2-(4-히드록시페닐)이소발레릭산, 글리코릭산, 4,5-디히드록시헥사히드로프탈산, 4-히드록시프탈산, 4-히드록시신나믹산, 3-(4-히드록시페닐)프로피오닉산, p-히드록시벤젠설폰산, 2,2'4,4'-테트라히드록시벤조페논, p-히드록시벤질알코올, p-아미노페놀, p-히드록시벤즈알데히드, m-아미노벤조산, p-아미노벤조산에서 선택되는 하나 또는 2 이상의 혼합성분에 의해 제조되는 저온 경화형 폴리이미드 수지의 제조방법.
- 제 10 항에 있어서,상기 디아민은 1-(3,5-디아미노페닐)-3-알킬-숙시닉이미드(DA-IM-R1), 3,5-디아미노페닐-알킬-에테르(DA-O-R1), 3,5-디아미노페닐-알킬-에스테르(DA-Es-R1) 및 3,5-디아미노페닐-알킬-아미드(DA-AM-R1) 에서 선택되는 1종 또는 2종 이상을 전체 디아민성분에 대하여 0.1~80몰%로 더 함유하는 저온 경화형 폴리이미드 수지의 제조방법.
- 제 10 항 또는 11항에 있어서,상기 폴리이미드 수지는 120 ~200 ℃에서 60~120분 동안 열경화된 것임을 특징으로 하는 저온 경화형 폴리이미드 수지의 제조방법.
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KR101334350B1 (ko) * | 2011-06-28 | 2013-11-29 | 한국화학연구원 | 거대고리형 이미드 올리고머의 개선된 제조방법 |
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KR100622026B1 (ko) * | 2004-10-29 | 2006-09-19 | 한국화학연구원 | 가용성 폴리이미드 수지를 함유한 절연막 및 이를 이용한전유기 박막 트랜지스터 |
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WO2011004938A1 (ko) * | 2009-07-08 | 2011-01-13 | 한국화학연구원 | 높은 패킹구조를 갖는 폴리아믹산 수지 조성물로부터 제조된 저온경화형 폴리이미드 절연체 및 이를 이용한 낮은 히스테리스 특성 보유 전유기박막트랜지스터 소자 |
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KR101334350B1 (ko) * | 2011-06-28 | 2013-11-29 | 한국화학연구원 | 거대고리형 이미드 올리고머의 개선된 제조방법 |
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