KR20090036895A - Magnetic gear for substrate transfering apparatus - Google Patents

Abstract

A magnetic gear for transferring a substrate is provided to improve a connection condition between a shaft and a connection gear by improving a right extent and a concentric extent between the shaft and the connection gear. A magnetic gear(100) for transferring a substrate includes a magnetic body(110), a fixing plate(120), a magnetic body holder(130), and a holder cover(140). The magnetic body is positioned on one side of the fixing plate. A shaft is positioned on the other side of the fixing plate. The magnetic body is arranged on an edge region of the fixing plate. The shaft is arranged on a central region of the fixing plate. The fixing plate is integrally formed with the magnetic body and the shaft. The magnetic holder loads the magnetic body, and has a first hole. The first hole of the magnetic holder corresponds to the magnetic body. The holder cover is arranged on the magnetic body, and has a second hole in a central region. The second hole of the holder cover is penetrated by the shaft.

Description

Magnetic gear for substrate transfer {{Magnetic gear for substrate transfering apparatus}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic gear for transporting a substrate, and more particularly, to a magnetic gear for transporting a substrate, which minimizes deformation due to injection molding and improves squareness and concentricity.

Recently, liquid crystal display (LCD) devices, plasma display panel (PDP) devices, and the like have been rapidly replacing conventional CRTs as display devices for displaying images. These use a substrate commonly referred to as a flat panel display (FPD).

In order to manufacture a flat panel display device, many processes such as a substrate manufacturing process, a cell manufacturing process, and a module manufacturing process must be performed. In particular, in the substrate fabrication process, in order to form patterns on the substrate, a patterning process consisting of photoresist formation, exposure, development, etching, and photoresist removal must be performed, followed by an inspection process. Most of these processes are performed in a process chamber for carrying out the process, and a transfer device for transferring or conveying the substrate to each of these process chambers is installed.

1 is a perspective view showing a substrate transfer apparatus for manufacturing a general substrate.

In general, the substrate transfer apparatus 1 includes a plurality of transfer shafts 20 arranged at predetermined intervals in the process chamber and a plurality of transfer substrates 10 for supporting the substrates 10 on the transfer shafts 20. Roller 30 is included.

As shown in FIG. 1, a pulley 42 is directly connected to an end of each transfer shaft 20, and each pulley 42 is connected to a belt 43 so that the rotational force of the driving device 41 may be increased. It is delivered to each of the transport shaft (20). However, in the substrate transport apparatus 1 having such a structure, a plurality of transport shafts 20 are directly connected to the driving unit 40, and particles are generated by abrasion due to direct friction, and noise and vibration are generated. do. In particular, such a connection method requires a lot of difficulty in separating or sealing the substrate transfer device 1 from the outside so that fumes of various chemical liquids sprayed onto the substrate 10 do not escape to the outside.

The chamber in which the transfer of the substrate 10 is carried out can be completely sealed, and the contamination of the driving unit 40 can be prevented from the chemical liquid fume, and the structure of the driving unit 40 for driving the transfer shaft 20 is provided. Magnetic conveying devices are mainly used for simplicity.

2 is a perspective view showing a general magnetic substrate transfer device.

The magnetic transfer device is basically the same structure as the substrate transfer device of FIG. 1, but is configured such that the transfer shaft 20 and the drive unit 40 are interconnected by the magnetic force of the magnetic gear 50. That is, the drive magnetic gear 50a is connected to the drive part 40, and the driven magnetic gear 50b is connected to the transfer shaft 20. As shown in FIG. Therefore, the rotational force of the driving unit 40 is transmitted to the driven magnetic gear 50b by the magnetic force of the driving magnetic gear 50a so that the transfer shaft 20 rotates. Between the drive magnetic gear 50a and the driven magnetic gear 50b there may be a wall of the chamber (not shown).

3 is an exploded perspective view showing a conventional magnetic gear for substrate transfer.

Conventional substrate transfer magnetic gears were composed of a magnetic holder 51, a plurality of magnetic bodies 54, and a holder cover 55.

However, the conventional magnetic gear for substrate transfer has the following problems.

Conventionally, the injection molding process was performed when the magnetic holder 51 was manufactured and when the holder cover 55 was coupled to the upper surface of the magnetic holder 51. However, a problem arises in that deformation occurs in the product in two injection processes. Therefore, in order to correct the deformed shape after completion of the second injection, an additional machining process such as planar machining was required. In addition, a plurality of magnetic disks 54 having a disc shape are inserted into the plurality of grooves 52 formed in the magnetic holder 51. However, a separate process of inserting the plurality of magnetic bodies 54 into the plurality of grooves 52 is required. It was.

Meanwhile, the key 56 is inserted into the key grooves 53 and 21 formed at the portion where the magnetic holder 51 and the transfer shaft 20 are fastened to fasten the transfer shaft 20 to the magnetic holder 51. At this time, there was a problem that it is difficult to match the right angle of the transfer shaft 20.

The present invention is designed to improve the above problems, the technical problem to be achieved by the present invention is to produce a magnetic gear by a single injection molding for minimizing deformation caused by injection molding and improve the squareness and concentricity To provide a magnetic gear.

Technical problem of the present invention is not limited to those mentioned above, another technical problem that is not mentioned will be clearly understood by those skilled in the art from the following description.

In order to achieve the above object, the magnetic substrate transfer substrate according to an embodiment of the present invention, a plurality of magnetic body, a fixed plate to which the shaft is fixed to the upper surface and the plurality of magnetic body is fixed to the lower surface, the plurality of magnetic materials And a holder cover having a plurality of grooves having a plurality of grooves inserted therein and a hollow hole through which the shaft penetrates and covering the upper surface of the magnetic holder to seal the plurality of magnetic bodies.

According to the magnetic gear for transporting the substrate of the present invention as described above has one or more of the following effects.

First, the deformation due to the injection molding can be minimized by generating the magnetic gear by one injection molding.

Secondly, a separate process of inserting a plurality of magnetic bodies into the plurality of grooves is not necessary, and thus the process efficiency can be increased.

Third, there is no need for an assembly process for minimizing deformation due to injection molding and fastening the transfer shaft, thereby increasing accuracy of right angle and concentricity.

The effects of the present invention are not limited to the above-mentioned effects, and other effects not mentioned will be clearly understood by those skilled in the art from the description of the claims.

Advantages and features of the present invention and methods for achieving them will be apparent with reference to the embodiments described below in detail with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but can be implemented in various different forms, and only the embodiments make the disclosure of the present invention complete, and the general knowledge in the art to which the present invention belongs. It is provided to fully inform the person having the scope of the invention, which is defined only by the scope of the claims. Like reference numerals refer to like elements throughout.

Hereinafter, the present invention will be described with reference to the drawings for describing a magnetic gear for transferring a substrate by embodiments of the present invention.

4 is a perspective view illustrating a magnetic gear for transporting a substrate according to an embodiment of the present invention, and FIG. 5 is a longitudinal cross-sectional view illustrating a coupling state of the magnetic gear for transporting a substrate of FIG. 4.

The magnetic gear 100 for transferring a substrate according to an exemplary embodiment of the present invention may include a plurality of magnetic bodies 110, a fixed plate, a magnetic holder 130, and a holder cover 140.

Substrate transfer magnetic gear 100 described below, as shown in Figure 2, take a driven magnetic gear 50b connected to the transfer shaft 20 as an example. Therefore, the driving magnetic gear 50a connected to the driving unit 40 may mean a driving shaft (not shown) instead of the transfer shaft 20. In addition, the driven magnetic gear 50b may be directly connected to the transfer shaft 20, or may be connected to a coupling shaft (not shown) coupled to the transfer shaft 20 by a method such as welding.

The plurality of magnetic bodies 110 are magnetic objects, and preferably a magnetic member may be used. The plurality of magnetic bodies 110 may have a shape of a disc.

Meanwhile, each magnetic body 110 may be formed by alternately arranging unit magnets, that is, a first unit magnet having a positive (+) pole and a second unit magnet having a negative (−) pole. In addition, referring to FIG. 2, the magnetic material inside the driving magnetic gear 50a connected to the driving unit 40 and the magnetic material inside the driven magnetic gear 50b connected to the transport shaft 20 may have opposite magnetisms. It can be installed to cope with. Therefore, the driving magnetic gear 50a and the driven magnetic gear 50b can rotate in the same direction.

Preferably, the number of the plurality of magnetic bodies 110 may be eight.

6 is an exploded perspective view illustrating a state in which the transfer shaft and the plurality of magnetic bodies are fixed to the fixing plate.

As shown in FIG. 6, the fixing plate may have a disc shape, and the transfer shaft 20 may be fixed to the upper surface thereof, and the plurality of magnetic bodies 110 may be fixed to the lower surface thereof. That is, the transfer shaft 20 and the plurality of magnetic bodies 110 may be previously fastened to the fixed plate to be integrally formed. Preferably, the plurality of magnetic bodies 110 and the transfer shaft 20 may be fixed to the fixed plate by welding. On the other hand, the plurality of magnetic body 110 may be arranged in a plurality of circular intervals around the central portion of the fixed plate at equal intervals.

Referring back to FIG. 4, the magnetic holder 130 may have a plurality of grooves 133 into which the plurality of magnetic bodies 110 are inserted and fixed.

The magnetic holder 130 may have a base portion 131 having a disc shape and a sidewall 132 formed in a direction perpendicular to the base portion 131 along the circumference of the base portion 131. A plurality of grooves 133 to which the plurality of magnetic bodies 110 are inserted and fixed may be formed in the base portion 131 of the magnetic holder 130. The plurality of grooves 133 may be formed at positions corresponding to the plurality of magnetic bodies 110. Preferably, the plurality of grooves 133 may be circularly arranged at equal intervals around the central portion of the base portion 131.

The holder cover 140 may have a disc shape and a hollow hole 142 through which the transfer shaft 20 passes. Preferably, the holder cover 140 may be formed to correspond to the shape of the fixing plate. Accordingly, the holder cover 140 covers the upper surface of the magnetic holder 130 to seal the plurality of magnetic bodies 110.

Preferably, the magnetic holder 130 and the holder cover 140 may be integrally generated by being combined by injection molding. In other words, the fixed plate on which the transfer shaft 20 and the plurality of magnetic bodies 110 are fixed may be placed in a mold mold (not shown) for injection molding, and then generated by one injection process. The mold mold may include a lower mold mold having a shape of the magnetic holder 130 and an upper mold mold having a shape of the holder cover 140.

Conventionally, as illustrated in FIG. 3, an injection molding process was performed when manufacturing the magnetic holder 51 and when the holder cover 55 is coupled to the upper surface of the magnetic holder 51. However, a problem arises in that deformation occurs in the product in two injection processes. That is, in the case of injection molding (primary injection) the magnetic holder 51, the thickness of the bottom surface of the magnetic holder 51 is not constant because of the plurality of grooves 52 formed in the magnetic holder 51. There was a problem that the deformation caused the recesses around the plurality of grooves 52 and a sink mark occurred. In addition, in the case of injection molding (secondary injection) in order to couple the holder cover 55 to the upper surface of the magnetic holder 51, further deformation was caused. Therefore, in order to correct the deformed shape after completion of the second injection, an additional machining process such as planar machining was required.

However, in the case of the magnetic substrate 100 for transporting the substrate according to an embodiment of the present invention, the transport shaft 20 and the plurality of magnetic bodies 110 are first fixed to the fixing plate 120 to be manufactured in one piece, and then used. Thus, the magnetic holder 130 and the holder cover 140 are simultaneously manufactured by injection molding in a single injection method, thereby minimizing the problem of shape deformation due to injection molding. Therefore, the accuracy of the squareness and concentricity of the transfer shaft 20 and the magnetic gear 100 can be increased. In addition, since a separate process of inserting the plurality of magnetic bodies 110 into the plurality of grooves 133 is not required, the process efficiency can be increased.

Referring to the operation of the magnetic gear for transporting the substrate according to the present invention configured as described above are as follows.

First, the manufacturing procedure of the magnetic gear 100 for substrate transfer is demonstrated with reference to FIG. First, the transport shaft 20 is fixed to the upper surface of the fixing plate, and a plurality of magnetic bodies 110 are fixed to the lower surface of the fixing plate. The conveying shaft 20 and the plurality of magnetic bodies 110 may be fixed by welding. Then, the fixed plate on which the transfer shaft 20 and the plurality of magnetic bodies 110 are fixed is placed in a mold frame (not shown) for injection molding, and then the magnetic body holder 130 and the holder are performed by performing one injection process. Create a cover 140 assembly. It is apparent to those skilled in the art that the manufacturing process as described above may be changed depending on the shape of the magnetic holder 130, the shape of the transfer shaft 20, or the shape of the plurality of magnetic bodies 110.

As shown in FIG. 2, the magnetic gear is connected to the driving unit 40 and the transfer shaft 20, respectively, to transmit power by magnetic force. That is, the rotational force of the driving unit 40 is transmitted to the driven magnetic gear 50b by the magnetic force of the driving magnetic gear 50a so that the transfer shaft 20 rotates.

In the present embodiment, only the magnetic gear for transferring the substrate has been described, but the magnetic gear according to an embodiment of the present invention can be used in a power transmission device using a magnetic other than the substrate transfer.

In addition, in the present embodiment, the substrate 10 is for manufacturing a flat panel display (FPD) and is a rectangular flat plate, and the flat panel display is a liquid crystal display (LCD), a plasma display (PDP), or a VFD ( Vacuum Fluorescent Display (FED), Field Emission Display (FED), or Electro Luminescence Display (ELD). Alternatively, the substrate 10 may be a wafer used for manufacturing a semiconductor chip.

Those skilled in the art will appreciate that the present invention can be embodied in other specific forms without changing the technical spirit or essential features of the present invention. Therefore, it should be understood that the embodiments described above are exemplary in all respects and not restrictive. The scope of the present invention is indicated by the scope of the following claims rather than the detailed description, and all changes or modifications derived from the meaning and scope of the claims and the equivalent concept are included in the scope of the present invention. Should be interpreted.

1 is a perspective view showing a substrate transfer apparatus for manufacturing a general substrate.

2 is a perspective view showing a general magnetic substrate transfer device.

3 is an exploded perspective view showing a conventional magnetic gear for substrate transfer.

Figure 4 is a perspective view showing a magnetic gear for transferring the substrate according to an embodiment of the present invention.

5 is a longitudinal cross-sectional view illustrating a coupling state of the magnetic gear for transferring a substrate of FIG. 4.

6 is an exploded perspective view illustrating a state in which the transfer shaft and the plurality of magnetic bodies are fixed to the fixing plate.

<Explanation of symbols for main parts of the drawings>

1: substrate transfer apparatus 10: substrate

20: feed shaft 30: roller

40: drive part 50, 100: magnetic gear

110: magnetic material 120: fixed plate

130: magnetic material holder 140: holder cover

Claims (6)

A plurality of magnetic bodies; A fixing plate to which a shaft is fixed to an upper surface and the plurality of magnetic bodies are fixed to a lower surface; A magnetic holder having a plurality of grooves in which the plurality of magnetic bodies are inserted and fixed; And And a hollow hole through which the shaft penetrates and covering an upper surface of the magnetic holder to seal the plurality of magnetic bodies. The method of claim 1, In the plurality of magnetic bodies, each magnetic body is a magnetic gear for substrate transfer, wherein the first unit magnets having a positive (+) pole and the second unit magnets having a negative (-) pole are alternately arranged. The method of claim 1, And a plurality of magnetic bodies and the shaft are fixed to the fixed plate by welding. The method of claim 1, The magnetic holder, A base portion having a disc shape; And And a sidewall formed along a circumference of the base portion in a direction perpendicular to the base portion. The method of claim 4, wherein The plurality of grooves is a magnetic gear for substrate transfer formed in the base portion. The method of claim 1, The magnetic holder and the holder cover are coupled to each other by injection molding magnetic gear for substrate transfer.

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