KR100541887B1 - Fabrication apparatus of semiconductor and display with particulate elimination function - Google Patents

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor and display manufacturing apparatus having a dust removal function for removing dust generated by friction of a power transmission device.

An apparatus for manufacturing a semiconductor and a display having a dust removal function according to an embodiment of the present invention includes a plurality of process chambers, an in-chamber mechanism for operating a substrate on which a semiconductor or display is formed, and the process chamber. An out-of-chamber movable mechanism portion for operating the substrate between the substrates, a power generator for generating power for driving the movable mechanism portions, and installed in the process chambers to transfer the power from the power generator in the chamber. A power transmission device for transmitting to the movable mechanism portion, and is provided in the power transmission device characterized in that it comprises a magnet means for attracting the dust generated by the metal friction in the power transmission device with magnetic force.

The present invention can improve the productivity by preventing a process defect of a semiconductor device or display due to metallic dust. In addition, the present invention by adsorbing the metallic dust due to the friction between the metal by using a permanent magnet does not occur outgassing due to the use of conventional grease can prevent the air pollution.

Description

Manufacturing apparatus for semiconductors and displays with dust removal function {FABRICATION APPARATUS OF SEMICONDUCTOR AND DISPLAY WITH PARTICULATE ELIMINATION FUNCTION}             

1 is a view showing an apparatus for manufacturing a semiconductor and a display having a dust removal function according to an embodiment of the present invention.

2 is a view showing the power transmission device shown in FIG.

3 is an enlarged view of a portion A shown in FIG. 2;

4 is an enlarged view of a portion B shown in FIG. 2;

<Description of Symbols for Main Parts of Drawings>

50: process chamber 52: power generating device

54: power transmission device 56: moving mechanism in the chamber

60: vacuum pump 70: movable chamber part outside the chamber

100: clean room 120: housing

122, 142: drive shaft 124, 144: gear

126, 146: bearing 128, 148: fixed cover

130, 150: magnetic force 132, 152, 182: permanent magnet

180: hole 184: adsorption plate

200: dust

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for manufacturing semiconductors and displays having a dust removal function, and more particularly to an apparatus for manufacturing semiconductors and displays having a dust removal function for removing dust generated by friction of a power transmission device.

Semiconductor devices, displays (flat display devices) and the like are manufactured by various in-line processes such as ion implantation, dry etching, film formation, cleaning, and deposition on substrates in clean and vacuum containers.

In-line processes in clean and vacuum vessels use various power transmission devices to carry out the process. Such a power transmission device generally uses a non-magnetic material (Ex; stainless steel, aluminum, etc.). This adversely affects semiconductor devices or displays due to nonmetallic (nonmagnetic) dust generated from frictional parts (bearings, timing belts, power transmission gears, LM guiders, etc.) of conventional power transmission devices in clean and vacuum containers. Go crazy. For example, due to metallic dust, short-circuits and opening of signal wirings formed in a semiconductor device or a display occur.

On the other hand, in order to prevent contamination in the clean and vacuum vessel due to the metallic dust, the portion of the metallic dust generated in the power transmission device is installed outside, or grease (Grease) is applied to use. In addition, in the conventional power transmission device, the friction material of the portion where the metallic dust is generated is used differently. However, when grease is used in a conventional power transmission device, out gassing, which is a phenomenon in which the mixed material escapes out of the mixed material in vacuum, generates air pollution. In addition, when the material of the friction part of the conventional power transmission device is different, that is, metal and plastic (a variety of materials used for cleaning and vacuum vessels, but the "plastic" method and power transmission method) In the device, when other driving devices (Ex (timing belt, plastic gear)) are made of plastic, the material is soft and dust is generated, and the molecules constituting the material are outgassed under vacuum. In addition, when the conventional power transmission device is manufactured of the same metal material, metallic dust is generated by friction and spreads in clean and vacuum containers, which is an obstacle to the production process of semiconductor devices or display products.

Accordingly, power transmission devices used in clean and vacuum containers use metal products rather than plastic materials due to the outgassing problem described above. When cleaning by constant management, all equipment in the clean and vacuum containers are stopped and cleaned. You must Thus, productivity is lowered because all manufacturing equipment is stopped and cleaned in clean and vacuum containers.

Accordingly, it is an object of the present invention to provide a semiconductor and display manufacturing apparatus having a dust removal function for removing dust generated by friction of a power transmission device.

In addition, another object of the present invention is to provide a semiconductor and display manufacturing apparatus having a dust removal function to prevent the air pollution by removing dust generated by the friction of the power transmission device.

In order to achieve the above object, a semiconductor and display manufacturing apparatus having a dust removal function according to an embodiment of the present invention is a chamber for operating a plurality of process chambers, the substrate on which the semiconductor or display is formed in the process chamber A movable mechanism portion, an out-of-chamber movable mechanism portion for operating the substrate between the process chambers, a power generator for generating power for driving the movable mechanism portions, and installed in the process chambers from the power generator; A power transmission device for transmitting the power to the movable mechanism in the chamber, and magnet means for adsorbing dust generated by metal friction in the power transmission device by magnetic force installed in the power transmission device. It is done.

Each of the movable mechanism parts and the power transmission device in the manufacturing apparatus is characterized by having a friction transfer mechanism including a bearing.

In the manufacturing apparatus, the power transmission device includes a housing having an inner space; A first drive shaft connected to the power generator and penetrating one side of the housing, a first bearing provided between the first drive shaft and the housing, and a first gear installed at an end of the first drive shaft in the inner space; A first driver including a; A second drive shaft connected to the mechanism inside the chamber and penetrating the other side of the housing; a second bearing provided between the second drive shaft and the housing; and a second drive shaft disposed at an end of the second drive shaft in the inner space. A second drive including a second gear meshed with a gear and transmitting the power from the first drive to the mechanism within the chamber; And holes formed on both sides of the housing to form a flow path between the internal space and the process chamber.

In the manufacturing apparatus, the magnetic means is inserted into one side of the housing through which the first driving shaft penetrates, and uses the magnetic force between the first and second polarities to drive the first bearing, the first driving shaft, and the gears. First permanent magnets that adsorb the dust generated in the space, and the second bearing and the second driving shaft by being inserted into the other side of the housing through which the second driving part passes and by using a magnetic force between the first and second polarities And second permanent magnets absorbing the dust generated in the inner space when the gears are driven, and installed in a zigzag form in the holes to adsorb the dust passing through the holes from the inner space by the flow path. It characterized in that it comprises a third permanent magnet.

In the manufacturing apparatus, the magnet means is installed on one surface of each of the third permanent magnets, characterized in that it further comprises an adsorption plate magnetized by the third permanent magnet to adsorb the dust.

Other objects and features of the present invention in addition to the above object will be apparent from the description of the embodiments with reference to the accompanying drawings.

Hereinafter, exemplary embodiments of the present invention will be described with reference to FIGS. 1 to 4.

Referring to FIG. 1, an apparatus for manufacturing a semiconductor and a display having a dust removing function according to an exemplary embodiment of the present invention may be provided in a clean room 100 and an interior of the clean room 100 under a atmospheric pressure. A plurality of process chambers 50 for performing each process required for manufacturing a device or a display, an in-chamber moving mechanism 56 for operating a substrate (not shown) in which a semiconductor or display is formed in the process chamber 50; In addition, the vacuum pump 60 for depressurizing the plurality of process chambers 50 in a high vacuum state, a plurality of power generators 52 installed in the clean room 100, and a plurality of process chambers 50, respectively. And a power transmission device 54 which is installed in the power transmission device 52 and transmits power from each of the plurality of power generation devices 52 to a manufacturing device for performing a semiconductor device or a display manufacturing process, and friction when driving the power transmission device 54. By Magnetic means 132, 152, and 182 for removing the dust 200 generated therein and a plurality of process chambers 50 installed between the process chambers 50 to load or unload the semiconductor devices or displays that have been processed in the adjacent process chambers 50. An out-of-chamber movable mechanism unit 70 is provided.

Each of the power generators 52 generates power by a motor or the like driven by a power source from a power supply.

The out-of-chamber movable mechanism 70 is installed between the plurality of process chambers 50 to unload the semiconductor device or display from which the previous process is completed in the process chamber 50 of the previous process and load the process chamber 50 of the next process. It plays a role. This, out of chamber movable mechanism portion 70 may be a conveyor or a robot. At this time, the out-of-chamber movable mechanism portion 70 has a frictional transfer mechanism including a bearing.

The in-chamber moving mechanism 56 is installed in each of the plurality of process chambers 50 to transfer or lift / lower a substrate (not shown) on which semiconductors or displays to be loaded from the out-of-chamber movable mechanism 70 are formed. To this end, the chamber moving mechanism 56 has a frictional transfer mechanism including bearings.

The vacuum pump 60 depressurizes the interior of each of the plurality of process chambers 50 in a high vacuum state. That is, each of the vacuum pumps 60 depressurizes each of the plurality of process chambers 50 in a high vacuum state by using molecular collisions in the plurality of process chambers 50.

Each of the plurality of process chambers 50 is installed at predetermined intervals in the clean room 100 at atmospheric pressure, and is in a high vacuum state by the vacuum pump 60. Each of the plurality of process chambers 50 is provided with process apparatuses for performing one process required for manufacturing a semiconductor device or a display. In this case, each of the process apparatuses is apparatuses for performing each process for manufacturing a semiconductor device or a display, that is, ion implantation, dry etching, film formation, cleaning, deposition, etching, and the like.

The power transmission device 54 is for transmitting power from the power generation device 52 to the manufacturing device, and there are chains, splines and gears, LM guiders, bearings, and ball screws made of metal, which are magnetic materials. In the apparatus for manufacturing a semiconductor and display having a dust removal function according to an embodiment of the present invention will be described based on a power transmission means having a friction transfer mechanism including a drive shaft and a bearing and a gear.

Specifically, as shown in FIG. 2, the power transmission device 54 includes a housing 120, a first drive shaft 122 connected to the power generator 52 through one side of the housing 120, and a housing. The first gear 124 installed at the end of the first drive shaft 122 disposed inside the 120 and the second drive shaft 142 disposed in the housing 120 are installed at the end of the first gear ( A second gear 144 engaged with the 124, a second drive shaft 142 connected to a manufacturing apparatus in the process chamber 50 through one side opposite to the housing 120, and first and second drive shafts 122. And a hole 180 formed at both sides of the housing 120 orthogonal to the 142.

The housing 120 is formed in a quadrangular shape, and the first and second gears 124 and 144 are installed in the first and second driving shafts 122 and 142, respectively.

Each of the inner and outer surfaces of one side of the housing 120 through which the first drive shaft 122 penetrates is provided with each of the first fixing covers 128 fixed to the housing 120 by fixing bolts, and the housing 120 and the first. A first bearing 126 through which the first drive shaft 122 penetrates is installed between the drive shafts 122 for smooth rotation of the first drive shaft 122.

Each of the inner and outer surfaces of one side of the housing 120 through which the second drive shaft 142 penetrates is provided with each of the second fixing covers 128 fixed to the housing 120 by fixing bolts. A second bearing 146 through which the second drive shaft 142 penetrates is installed between the two drive shafts 142 to smoothly rotate the second drive shaft 142.

The first gear 124 transmits the power from the power generator 52 to the second gear 144. The second gear 144 is engaged with the first gear 124 to transfer the power of the second gear 144 to the second drive shaft 142 to drive the manufacturing apparatus installed in the process chamber 50. . Each of the first and second gears 124 has a metal material so that the metallic dust 200 is generated during friction due to the engagement. That is, the material of each of the first and second gears 124 is preferably a metal material, an alloy and a stainless steel alloy of SUS 4XX (where X is a positive integer) having corrosion resistance and strong magnetic material. As such, the reason why each of the first and second gears 124 is made of a material having a strong magnetic material is to remove dust 200 by using a magnetic force of a magnet.

The magnet means 132, 152, 182 are first and second permanent magnets 132, 152 installed inside the housing 120 adjacent to the first and second drive shafts 122, 142 of the power transmission device 54. And a third permanent magnet 182 installed in the hole 180.

As shown in FIG. 3, the first permanent magnet 132 is installed in the housing 120 between the first bearing 126 and the first fixing cover 128. To this end, a groove into which the first permanent magnet 132 is inserted is formed in the housing 120 between the first bearing 126 and the first fixing cover 128. The first permanent magnet 132 is metallic dust 200 generated by friction between the inner ring and the outer ring of the first bearing 126 by using the magnetic force 130 of the magnet generated between its north pole and the south pole (S) Will be adsorbed. The magnetic force of the first permanent magnet 132 extends to the inner center of the housing 120 into which the first and second gears 124 and 144 are engaged according to the strength of the magnet.

The second permanent magnet 152 is installed in the housing 120 between the second bearing 146 and the second fixing cover 148. To this end, a groove into which the second permanent magnet 152 is inserted is formed in the housing 120 between the second bearing 146 and the second fixing cover 148. The second permanent magnet 152 is a metallic dust 200 generated by the friction between the inner and outer rings of the second bearing 146 by using the magnetic force 150 of the magnet generated between their poles N and S poles (200) Will be adsorbed. The magnetic force of the second permanent magnet 152 extends to the inner center of the housing 120 into which the first and second gears 124 and 144 are engaged according to the strength of the magnet.

Each of the holes 180 forms a movement path of molecules such that when the process chamber 50 is decompressed to a high vacuum state by the decompression of the vacuum pump 60, the internal space of the housing 120 is also decompressed to a high vacuum state.

Each of the third permanent magnets 182 is installed in a zigzag form in the hole 180 as shown in FIG. 4. The suction plate 184 is installed on one side of each of the third permanent magnets 182. The adsorption plate 184 adsorbs the metallic dust 200 passing through the hole 180 by the magnetic force between the N pole and the S pole of each of the third permanent magnets 182. That is, the adsorption plate 184 is magnetized by the third permanent magnet 182 to adsorb the metallic dust 200 passing through the hole 180.

As such, the apparatus for manufacturing a semiconductor and a display having a dust removing function according to an exemplary embodiment of the present invention drives the vacuum pump 60 to reduce the pressure of each of the plurality of process chambers 50 to a high vacuum state. Then, each process apparatus for driving each process of manufacturing a semiconductor device or a display installed in each of the plurality of process chambers 50 is driven. At this time, the semiconductor device or the display is loaded or unloaded into each of the plurality of process chambers 50 by the power transmitted to the power transmission device 54 by the driving of the power generator 52.

Accordingly, each process apparatus installed in each of the plurality of process chambers 50 performs a respective process to manufacture a semiconductor device or a display.

At this time, the apparatus for manufacturing a semiconductor or display having a dust removal function according to an embodiment of the present invention is the power transmission means such as chains, splines and gears, LM guiders, bearings and ball screws constituting the power transmission device 54 In operation, metallic dust 200 is generated by friction between metals.

The metallic dust 200 generated by friction when driving the power transmission device 54 is removed by the magnetic means 132, 152, and 182. Accordingly, each of the plurality of process chambers 50 is contaminated by the plurality of process chambers 50 due to the metallic dust 200 by removing the metallic dust 200 generated when the magnetic means 132, 152, 182 is driven. Can be prevented.

Specifically, in the case of a power transmission device having a bearing for smoothly driving the drive shaft, the magnet means 132, 152, 182 may be formed by using the first and second permanent magnets 128, 148 as shown in FIG. 2. The metallic dust 200 inside the housing 120 generated by friction between the inner and outer rings of the first and second bearings 126 and 146 is absorbed and removed. In addition, in the case of a power transmission device having a ball screw and an LM guider, the magnet means 132, 152, 182 may install permanent magnets in the carrier block to adsorb metallic dust by friction between the carrier block and the guide using the ball. Will be removed. In addition, in the case of a power transmission device having a chain, a spline, and a gear, the magnetic means 132, 152, and 182 may be provided with a permanent magnet around the housing 120 where the gear and the gear engage with each other, thereby being metallic due to friction between the gear and the gear. The dust is adsorbed and removed.

Meanwhile, the magnetic means 132, 152, and 182 of the apparatus for manufacturing a semiconductor and a display having a dust removing function according to an embodiment of the present invention may form holes for forming a flow path between the inside of the housing 120 and the process chamber 50. The adsorption plate 184 magnetized by the third permanent magnet 182 installed in the 180 is used to remove the metallic dust 200 passing through the holes 180 by depressurization of the vacuum pump 60. do.

As described above, the semiconductor and display manufacturing apparatus having a dust removal function according to an embodiment of the present invention by using a permanent magnet adsorbs the metallic dust generated by the friction between the metals to produce the metallic dust semiconductor device or display It is possible to prevent inflow into the device and outflow to the outside. Accordingly, the present invention can improve the productivity by preventing a process defect of a semiconductor device or a display due to metallic dust.                     

 In addition, the present invention can improve the efficiency of cleaning by cleaning only by separating the magnetic means without cleaning the entire manufacturing device of the semiconductor device or display during cleaning. In addition, the present invention by adsorbing the metallic dust due to the friction between the metal by using a permanent magnet does not occur outgassing due to the use of conventional grease can prevent the air pollution.

Those skilled in the art will appreciate that various changes and modifications can be made without departing from the technical spirit of the present invention. Therefore, the technical scope of the present invention should not be limited to the contents described in the detailed description of the specification but should be defined by the claims.

Claims (5)

delete Multiple process chambers, An in-chamber moving mechanism unit for operating a substrate on which a semiconductor or a display is formed in the process chamber; An out-of-chamber movable mechanism part for operating said substrate between said process chambers; A power generator for generating power for driving the movable mechanism parts; A power transmission device installed in the process chambers to transfer the power from the power generation device to the movable mechanism in the chamber; It is provided in the power transmission device has a magnetic means for adsorbing dust generated by metal friction in the power transmission device with magnetic force, And said movable mechanism parts and said power transmission device each have a friction transfer mechanism including a bearing. The method of claim 2, The power transmission device; A housing having an inner space; A first drive shaft connected to the power generator and penetrating one side of the housing, a first bearing provided between the first drive shaft and the housing, and a first gear installed at an end of the first drive shaft in the inner space; A first driver including a; A second drive shaft connected to the mechanism inside the chamber and penetrating the other side of the housing; a second bearing provided between the second drive shaft and the housing; and a second drive shaft disposed at an end of the second drive shaft in the inner space. A second drive including a second gear meshed with a gear and transmitting the power from the first drive to the mechanism within the chamber; And a hole formed in both sides of the housing to form a flow path between the inner space and the process chamber. The method of claim 3, wherein The magnet means, The dust is generated in the internal space when the first bearing, the first driving shaft and the gears are driven by using a magnetic force between the first and second polarities and inserted into one side of the housing through which the first driving shaft penetrates. The first permanent magnets, The dust is generated in the inner space when the second bearing, the second driving shaft and the gears are driven by using a magnetic force between the first and second polarity and is inserted into the other side of the housing through which the second driving part passes. Second permanent magnets, And a third permanent magnet installed in a zigzag shape in the holes to adsorb the dust passing through the holes from the inner space by the flow path. 3. The method of claim 4, wherein The magnet means, And a suction plate installed on one surface of each of the third permanent magnets and magnetized by the third permanent magnets to adsorb the dust.

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