KR20090017319A - Cooling apparatus for fan filter unit using theremoelectric element - Google Patents

Cooling apparatus for fan filter unit using theremoelectric element Download PDF

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Publication number
KR20090017319A
KR20090017319A KR1020070081963A KR20070081963A KR20090017319A KR 20090017319 A KR20090017319 A KR 20090017319A KR 1020070081963 A KR1020070081963 A KR 1020070081963A KR 20070081963 A KR20070081963 A KR 20070081963A KR 20090017319 A KR20090017319 A KR 20090017319A
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South Korea
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fan
filter unit
cooling
fan filter
clean room
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KR1020070081963A
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Korean (ko)
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KR100909611B1 (en
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문인호
박덕준
박길용
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(주)신성이엔지
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F5/00—Air-conditioning systems or apparatus not covered by F24F1/00 or F24F3/00, e.g. using solar heat or combined with household units such as an oven or water heater
    • F24F5/0042—Air-conditioning systems or apparatus not covered by F24F1/00 or F24F3/00, e.g. using solar heat or combined with household units such as an oven or water heater characterised by the application of thermo-electric units or the Peltier effect
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67109—Apparatus for thermal treatment mainly by convection

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)

Abstract

A cooling apparatus for fan filter unit using theremoelectric element is provided to remove the moisture existing inside the clean room by cooling the external air introduced by the fan filter unit. The fan filter unit is installed at the partition frame installed at the ceiling of the clean room in the lattice type. The fan filter unit comprises the fan guide(30) for guiding the flow of the discharged air. The fan guide has the wall. The fan filter unit comprises the flow side of the air current in order to cool the air current flowing by the fan and the electronic cooling unit including the thermoelectric element module and the heat sink pin.

Description

열전소자를 이용한 팬 필터 유닛의 냉각 장치{Cooling apparatus for Fan Filter Unit using theremoelectric element}Cooling apparatus for Fan Filter Unit using theremoelectric element

본 발명은 무진을 요구하는 전자기기조립실, 반도체조립실, 병원의 수술실, 무균실, 세균배양실등 항상 청정을 유지해야만 되는 클린 룸에 정화된 공기를 송풍하여 주는 클린 룸(Clean Room)용 팬필터유닛의 항온냉각장치에 관한 것이다.The present invention is a fan filter for a clean room that blows purified air to a clean room such as an electronics assembly room, a semiconductor assembly room, a hospital operating room, a sterile room, a bacterial culture room, etc. It relates to a constant temperature cooling device of a unit.

일반적으로, 병원이나 반도체 제조 공장 등의 클린 룸에서，종래 팬필터유닛(FFU) 방식 및 가압 천장 챔버 방식이 주로 사용되고 있다．도 1은종래의 팬필터유닛 방식의 구성도이다．건물(1) 내의 클린 룸(2)은, 구획프레임(5)으로 형성된 시스템 천장(3)을 구비하고 있다. 이 시스템 천장(3)의 구획프레임(5)으로 형성된 방형(方形)의 있는 팬 하우징(15)에 필터(14)와 송풍팬(13)을 조합하여 일체화한 팬필터유닛(16)이 장착되어 있다.In general, in a clean room such as a hospital or a semiconductor manufacturing plant, a conventional fan filter unit (FFU) method and a pressurized ceiling chamber method are mainly used. Fig. 1 is a configuration diagram of a conventional fan filter unit method. The clean room 2 in the interior has a system ceiling 3 formed of the partition frame 5. The fan filter unit 16, which is a combination of the filter 14 and the blower fan 13, is incorporated in a rectangular fan housing 15 formed by the partition frame 5 of the system ceiling 3. have.

이러한 팬필터유닛(16)의 송풍팬(13)에 의해, 천장 내부(17)의 공기를 흡인하고 필터(14)를 통하여 클린 룸(2) 내에 공급한다. 클린 룸(2) 내의 공기는, 프리 액세스 플로어(4)를 통하여 마루 하부로 유동하여, 또한 드라이 코일(9)을 통하여 제습되고、리턴 스페이스(12)를 흐르고 천장 내부(17)로 돌아와 순환한다. 이 FFU 방식으로는 천장에 마련한 각 송풍팬(13)에 의해 천장 내부(17)의 공기를 흡인하므로, 천장 내부(17)는 주위에 대하고 부압이 된다.The blowing fan 13 of the fan filter unit 16 sucks air in the ceiling 17 and supplies it to the clean room 2 through the filter 14. The air in the clean room 2 flows to the bottom of the floor through the free access floor 4 and is also dehumidified through the dry coil 9, flows through the return space 12 and returns to the ceiling interior 17 to circulate. . In this FFU method, since the air inside the ceiling 17 is sucked by each blower fan 13 provided in the ceiling, the ceiling 17 is negative for the surroundings.

이와 같은 FFU 방식에 있어서는, 천장 내부(17)가 부압이기 때문에, 각 팬 하우징(15, …)의 구획프레임(5)　부분의 리크 등에 의해 천장 내의 공기가 필터를 통과하지 않고 클린 룸(2) 안으로 유입되는 것이 없도록 함으로써, 클린 룸(2) 안의 청정도가 확실하게 유지된다. 따라서, 필터(14)와 구획프레임(5)과의 사이의 밀봉성에 관해서는, 다소의 틈이 있더라도 클린룸(2) 측으로 누설되는 등의 문제는 없다.In such an FFU system, since the inside of the ceiling 17 is a negative pressure, the air in the ceiling does not pass through the filter due to the leakage of the portion of the partition frame 5 of each fan housing 15,... By ensuring that nothing flows in, cleanliness in the clean room 2 is reliably maintained. Therefore, regarding the sealing property between the filter 14 and the partition frame 5, there is no problem of leaking to the clean room 2 side even if there is some gap.

또, 각 팬 하우징(15) 마다 팬이 마련되기 때문에, 필터 교환의 경우 등에 클린 룸(2) 전체의 운전을 정지하는 일이 없이, 개별 송풍팬(13) 만을 정지하고 필터(14)를 교환한 것이 가능하여, 클린 룸(2)의 가동율이 높아지며 사용성이 향상된다.Moreover, since a fan is provided for each fan housing 15, only the individual blower fan 13 is stopped and the filter 14 is replaced without stopping the operation of the whole clean room 2 in the case of filter replacement. As a result, the operation rate of the clean room 2 is increased and the usability is improved.

그러나, 상술한 바와 같이, 클린 룸(2)에 대해 천장 내가 부압이 되기 때문에, 클린 룸(2)의 청정도의 유지를 확실히 할 수 있고, 또 클린 룸 전체의 운전을 정지하지 않고도, 개별적으로 필터(14) 교환을 수행할 수 있는 등의 이점을 보유한 반면, 송풍팬(13)을 다수개 사용하기 때문에, 에너지 효율이 나쁘고, 전체적으로 볼 때, 큰 전력을 소비함과 함께 다수의 팬이 천장 내에 마련되기 때문에 필터(14)내로 유입되는 외부의 더운 공기로 인해, 클린룸 내 에너지 손실이 발생함과 동시 에, 일예로 반도체 제조 수율을 일정하게 유지하지 못하는 등의 단점을 내포하고 있었다.However, as mentioned above, since the inside of the ceiling becomes a negative pressure with respect to the clean room 2, the cleanliness of the clean room 2 can be maintained reliably, and an individual filter is performed without stopping the operation of the whole clean room. (14) While having the advantage of being able to carry out an exchange, etc., since the use of a plurality of blower fans 13, the energy efficiency is bad, as a whole, consumes a lot of power and a large number of fans in the ceiling Since it is provided, due to the external hot air flowing into the filter 14, the energy loss in the clean room occurs, and at the same time has a disadvantage, such as not maintaining the semiconductor manufacturing yield constant.

다시 말해서, 일반적으로 같은 중량의 공기라도 온도가 다르면 함유할 수 있는 수분의 양이 달라지고 온도가 높을수록 많은 수분을 함유하기 때문에, 수분이 많이 함유된 공기가 클린룸 내로 도입되게 되어 그만큼 반도체 제조 수율을 저감시키는 등의 문제가 발생하는 것이다.In other words, in general, even when the air of the same weight is different, the amount of moisture that can be contained varies, and the higher the temperature, the more water is contained, so that the air containing a lot of moisture is introduced into the clean room. Problems such as reducing the yield occur.

더욱이, 클린룸으로 제공되는 공기의 온도가 일정치 못할 경우에는, 반도체 소자 등의 열변형을 야기하게 되어 그만큼 반도체 제조 수율을 저감시키게 되는 단점을 내포하고 있었다.In addition, when the temperature of the air provided to the clean room is not constant, thermal deformation of the semiconductor device or the like is caused, which may reduce the semiconductor manufacturing yield.

따라서, 본 발명은 상술한 우려를 감안하여 이루어진 것으로서, 본 발명의 목적은, 팬필터유닛 내로 도입되는 외부 공기를 1차적으로 냉각시켜 공급시킴으로써, 클린룸 내의 공기 내의 수분을 재함유하는 상황이 극력 규제됨과 아울러, 클린룸으로 제공되는 공기의 온도가 일정하게 유지되게 되어 보다 청정화된 공기의 공급에 기인한 반도체 제조 수율 향상을 도모할 수 있도록 한 팬필터유닛의 냉각장치를 제공함에 주된 기술적 해결과제가 있는 것이다.Accordingly, the present invention has been made in view of the above-described concerns, and an object of the present invention is to provide a situation in which water in the clean room is recontained by primarily cooling and supplying external air introduced into the fan filter unit. In addition to being regulated, the main technical problem is to provide a cooling device for a fan filter unit that enables the temperature of the air provided to the clean room to be kept constant to improve the semiconductor manufacturing yield due to the supply of cleaner air. There is.

이를 실현하기 위해 본 발명은,In order to realize this, the present invention,

클린 룸에서 구획프레임으로 형성된 시스템 천장의 구획프레임에 탑재된 각각의 팬 하우징에 팬 및 필터를 조합하여 일체화한 팬필터유닛에 있어서,In a fan filter unit in which a fan and a filter are integrated with each fan housing mounted on a partition frame of a system ceiling formed as a partition frame in a clean room,

상기 팬에 의해 유동하는 기류의 냉각을 위해 상기 기류의 유동측에, 냉각측 면이 배치되고 반대편에 방열을 위한 방열측면이 배치되는 열전소자모듈 및 방열핀을 구비한 전자냉각수단이 배열된 것을 특징으로 한다.On the flow side of the airflow for cooling the airflow flowing by the fan, a cooling element surface is arranged on the opposite side and a heat dissipation side for dissipating the heat dissipation side is arranged, the electronic cooling means having a heat dissipation fin is arranged. It is done.

또, 본 발명은 상기 팬 주위에 대하여 그의 원주방향으로 갈수록 멀어지도록 이격되는 벽면을 갖도록 배치된 팬가이드의 내벽면에, 냉각을 위한 냉각측면이 배치되고 반대편에 방열을 위한 방열측면이 배치되는 열전소자모듈 및 방열핀을 구비한 전자냉각수단이 착접 배열되도록 구성됨이 바람직하다.In addition, the present invention is a thermoelectric that the cooling side is disposed on the inner wall surface of the fan guide arranged to have a wall surface spaced apart from the circumferential direction toward the circumferential direction, the heat dissipation side for heat radiation on the opposite side Preferably, the electronic cooling means including the device module and the heat dissipation fins are arranged to be in contact with each other.

또한, 본 발명은 상기 팬 주위에 대하여 팬하우징의 유입구측에, 상기 팬측 방향으로 냉각을 위한 냉각측면이 배치되고 반대편에 방열을 위한 방열측면이 기립 배치되는 열전소자모듈, 냉각핀 및 방열핀을 구비한 전자냉각수단이 기립 배열되도록 구성됨이 바람직하다.In addition, the present invention is provided with a thermoelectric element module, a cooling fin and a heat dissipation pin which is arranged on the inlet side of the fan housing around the fan, and a cooling side surface for cooling in the fan side direction, and a heat dissipation side surface for heat dissipation on the opposite side. Preferably, the electronic cooling means is configured to stand up.

이하, 본 발명의 바람직한 실시 예를 첨부된 도면에 의거 상세히 설명하기로 한다.Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

본 발명의 설명에서 종래와 동일 또는 동등한 부분은 동일한 도면부호를 부여하여 설명한다.In the description of the present invention, the same or equivalent parts as in the prior art will be described with the same reference numerals.

도 2는 본 발명에 따른 클린룸용 팬필터유닛의 내부구조를 개략적으로 나타낸 평면도이고, 도 3은 도 2에서의 팬필터유닛의 내부구조를 측방에서 바라보아 예시하기 위한 개략적인 종단면 구조도이며, 도 4는 도 3에서의 팬필터유닛 종단면 구조에서의 요부 확대 단면 구조도이다.Figure 2 is a plan view schematically showing the internal structure of the fan filter unit for a clean room according to the present invention, Figure 3 is a schematic longitudinal cross-sectional structural view for illustrating the internal structure of the fan filter unit in Figure 2 from the side, 4 is an enlarged cross-sectional structural view of the main portion of the fan filter unit longitudinal section structure in FIG.

본원에 따른 팬필터유닛(20)은, 클린 룸(2)의 천장에 설치하여 클린 룸(2)으 로 정화된 공기를 공급하는 클린 룸(2)의 필터링 유닛의 일환으로, 팬필터유닛(20)에서의 공기흐름 경로 내외에서의 공기 냉각 기능을 효율적으로 수행할 수 있도록 구성되어 있다.The fan filter unit 20 according to the present application is installed on the ceiling of the clean room 2 and is a part of the filtering unit of the clean room 2 for supplying the purified air to the clean room 2. It is configured to efficiently perform the air cooling function inside and outside the air flow path in 20).

또, 상기 팬필터유닛(20)은, 클린 룸(2) 천장에 바둑판과 같이 격자상으로 설치된 구획프레임(5)에 팬하우징(15), 그릴(22), 필터(14), 팬(25) 및 모터(M)와 함께 설치되어 있다.The fan filter unit 20 includes a fan housing 15, a grille 22, a filter 14, and a fan in a partition frame 5 provided in a grid shape like a checkerboard on the ceiling of the clean room 2. ) And the motor (M).

또, 클린 룸 팬필터유닛(20) 내에는 팬(25)에 의해 토출되는 공기의 흐름을 저항을 최소로 하면서 가이드하기 위해 팬가이드(30)가 팬(25)을 둘러싸도록 설치되어 있다.In addition, in the clean room fan filter unit 20, the fan guide 30 is provided to surround the fan 25 to guide the flow of air discharged by the fan 25 with a minimum of resistance.

또한, 상기 팬가이드(30)는 상기 팬(25) 주위에 대하여 그의 원주방향으로 갈수록 멀어지도록 이격되는 벽면(31)을 갖도록 구성되어 있다.In addition, the fan guide 30 is configured to have a wall surface 31 spaced apart from the periphery of the fan 25 toward the circumferential direction.

또, 상기 팬필터유닛(20) 내부에는, 상기 팬(25)에 의해 유동하는 기류의 냉각을 위해 상기 기류의 유동측에 냉각측면이 배치되고, 그 반대편에 방열을 위한 방열측면이 배치되는 열전소자모듈(41) 및 방열핀(45)을 구비한 전자냉각수단이 배열되어 있다.In addition, in the fan filter unit 20, a cooling side is disposed on the flow side of the air flow for cooling the air flow flowing by the fan 25, and a heat dissipation side for radiating heat is disposed on the opposite side. Electronic cooling means having an element module 41 and a heat dissipation fin 45 are arranged.

또한, 상기 팬가이드(30)에 있어, 상기 팬(25) 주위에 대하여 그의 원주방향으로 갈수록 멀어지도록 이격되는 벽면을 갖도록 배치된 팬가이드(30)의 내벽면에, 냉각을 위한 냉각측면이 배치되고 반대편에 방열을 위한 방열측면이 배치되는 열전소자모듈(41) 및 방열핀(45)을 구비한 전자냉각수단(40)이 착접 배열되어 있다.Further, in the fan guide 30, a cooling side surface for cooling is disposed on an inner wall surface of the fan guide 30 arranged to have a wall surface spaced apart from the circumferential direction toward the periphery of the fan 25 in the circumferential direction thereof. And an electronic cooling means 40 provided with a thermoelectric element module 41 and a heat dissipation fin 45 on which the heat dissipation side surface is disposed on the opposite side.

또, 상기 팬 주위에 대하여 팬하우징(15)의 유입구측에, 상기 팬(25)측 방향 으로 냉각을 위한 냉각측면이 배치되고 반대편에 방열을 위한 방열측면이 기립 배치되는 열전소자모듈(41) 및 방열핀을 구비한 전자냉각수단이 수평 배열되도록 제1 또는 제2 고정계합부(60, 70)를 매개로 고정결합됨이 바람직하다.In addition, a thermoelectric element module 41 having a cooling side surface for cooling in the fan 25 side direction and a heat dissipating side surface standing up on the opposite side are arranged on the inlet side of the fan housing 15 with respect to the fan circumference. And it is preferable that the electronic cooling means having a heat radiating fin is fixedly coupled via the first or second fixed engaging portion (60, 70) so that the horizontal arrangement.

또한, 상기 제1 고정계합부(60)는 상기 열전소자모듈(41)의 양단부면에 오목형성된 요홈(61)과 판상의 제1 걸림부(63)를 포함하여 구성되어 있다.In addition, the first fixed engagement portion 60 is configured to include a recess 61 and a plate-shaped first engaging portion 63 formed in both end surfaces of the thermoelectric module 41.

또, 상기 제2 고정계합부(70)는 상기 열전소자모듈(41)의 양단을 상하로 감싸는 단면이 ㄷ자 형상의 제2 걸림부(71)를 포함하여 구성되어 있다.In addition, the second fixed engagement portion 70 is configured to include a second locking portion 71 having a c-shaped cross section surrounding both ends of the thermoelectric module 41 up and down.

물론, 도시하지는 않았으나, 팬필터유닛(20) 내부나 외부에 온도 센서가 배치되어, 룸내의 적절한 설정 온도를 관리하여 항시 최적화된 환경을 유지토록 하기 위해 상기 전자냉각수단(40, ‥)의 제어를 행하기 위한 온도 조절기와 전기적 접속하도록 구성해도 좋다.Of course, although not shown, a temperature sensor is disposed inside or outside the fan filter unit 20, so that the control of the electronic cooling means 40 is maintained in order to maintain an optimized environment at all times by managing an appropriate set temperature in the room. It may be configured to be electrically connected to a temperature controller for performing the

다음에, 본원 발명에 따른 팬필터유닛의 작동을 설명한다.Next, the operation of the fan filter unit according to the present invention will be described.

먼저, FFU에 전원을 인가하여 팬(25)을 구동시키면, 공기 흡입 및 토출 유동이 발생하게 된다.First, when the fan 25 is driven by applying power to the FFU, air intake and discharge flows are generated.

또, 상기 팬(25)의 회전축과 직교방향으로 공기의 토출이 발생하면, 이 팬(25)을 둘러싸고 있는 팬가이드(30)의 벽면(31)을 따라 회전유동하면서 팬가이드(30)의 방출부측으로 유동하게 되는 공기 흐름이 발생된다.When air is discharged in a direction orthogonal to the rotation axis of the fan 25, the fan guide 30 is discharged while rotating along the wall surface 31 of the fan guide 30 surrounding the fan 25. An air stream is generated which flows to the negative side.

여기에서, 상기 팬필터유닛(20)의 양단측의, 상기 팬(25) 주위에 대하여 그의 원주방향으로 갈수록 멀어지도록 이격되는 벽면을 갖도록 배치된 팬가이드(30)를 내벽을 따르는 면에, 상기 팬(25)측 방향으로 냉각을 위한 냉각측면이 배치되고 반대편에 방열을 위한 방열측면이 기립 배치되는 열전소자모듈(41), 냉각핀(43) 및 방열핀(45)을 구비한 전자냉각수단(40, …)이 배치되어 있기 때문에, 클린룸(2) 내의 공기 내의 수분을 재함유하거나, 또는 열변형을 야기할 정도의 온도 변동이 발생되는 상황이 소거되게 됨으로써, 보다 청정화된 공기의 공급이 가능케되는 것이다.Here, the fan guide 30 disposed on both sides of the fan filter unit 20 so as to have a wall surface spaced apart from the periphery of the fan 25 toward the circumferential direction thereof on the surface along the inner wall, Electronic cooling means having a thermoelectric element module 41, a cooling fin 43 and a heat radiating fin 45 in which a cooling side for cooling is arranged in the direction of the fan 25 and a heat radiating side for standing a heat is placed on the opposite side ( 40,... Are arranged, it is possible to eliminate the situation in which the temperature fluctuations to the extent that the moisture in the air in the clean room 2 is contained again or cause thermal deformation are eliminated, thereby providing a cleaner supply of air. It is possible.

또한, 상기 팬필터유닛(20)의 공기 도입구측에 열전소자모듈(41)을 배치함으로써, 내부 유입되는 공기를 1차적으로 냉각시켜 팬필터유닛(20) 내부로 유입될 수 있도록 함으로써, 보다 청정화된 공기의 공급이 가능케 된다.In addition, by arranging the thermoelectric element module 41 on the air inlet side of the fan filter unit 20, by primarily cooling the air flowing in to be introduced into the fan filter unit 20, further cleansing The supply of air is possible.

이와 같이, 청정화된 일정한 온도를 유지하는, 저수분 함유의 도입 공기의 제공에 기인한 반도체 제조 수율 향상을 도모할 수 있게 되는 장점을 구가할 수 있게 되는 것이다.In this way, it is possible to provide an advantage that the semiconductor manufacturing yield can be improved due to the provision of low moisture-containing introduction air, which maintains a constant clean temperature.

이상에서 설명한 바와 같이 본 발명은, 팬필터유닛(20) 내로 도입되는 외부 공기를 1차적으로 냉각시켜 공급시킴으로써, 클린룸 내의 공기 내의 수분을 재함유하는 상황이 극력 규제됨과 아울러 일정온도의 보다 청정화된 공기의 공급에 기인한 반도체 제조 수율 향상을 도모할 수 있다는 매우 뛰어난 효과가 있는 것이다.As described above, according to the present invention, the external air introduced into the fan filter unit 20 is primarily cooled and supplied, whereby the situation of re-containing water in the air in the clean room is regulated as much as possible, and at a certain temperature, the cleaner There is a very excellent effect that it is possible to improve the yield of semiconductor manufacturing due to the supply of air.

상기에서 설명한 바와 같이, 본 발명의 열전소자를 이용한 팬(25) 필터 유닛의 냉각 시스템에 의하면, 모터에 의해 구동하는 팬(25)을 회전시키면서 동시에 이송채널 내에서 전자냉각수단을 매개로 하여, 냉기로 전열되도록 하는 냉각장치를 구성함으로써 팬필터유닛(20)에서의 공기이송경로 내에서의 냉각 작동을 수행할 수 있도록 하는 효과를 내재하고 있는 것이다.As described above, according to the cooling system of the fan 25 filter unit using the thermoelectric element of the present invention, while rotating the fan 25 driven by the motor, at the same time through the electronic cooling means in the transfer channel, By configuring the cooling device to be transferred to the cold air is to have the effect of performing the cooling operation in the air transfer path in the fan filter unit (20).

본 발명은 도면에 도시된 바람직한 실시 예를 참고로 설명되었으나 이는 예시적인 것에 불과하며, 당해 기술분야에 통상의 지식을 지닌 자라면 이로부터 다양한 변형 및 균등한 타실시 예가 가능함은 물론이다.Although the present invention has been described with reference to the preferred embodiments shown in the drawings, which are merely exemplary, and various modifications and equivalent other embodiments may be made by those skilled in the art.

도 1은 종래의 클린룸용 팬필터유닛 및 룸 내부의 개략적인 종단면도,1 is a schematic longitudinal sectional view of a conventional fan filter unit for a clean room and an interior of a room;

도 2는 본 발명에 따른 클린룸용 팬필터유닛의 내부구조를 개략적으로 나타낸 평면도,2 is a plan view schematically showing the internal structure of a fan filter unit for a clean room according to the present invention;

도 3은 도 2에서의 팬필터유닛의 내부구조를 측방에서 바라보아 예시하기 위한 개략적인 종단면 구조도,FIG. 3 is a schematic longitudinal cross-sectional view illustrating the internal structure of the fan filter unit in FIG.

도 4는 본 발명의 실시예에 따른, 팬필터유닛에 열전소자모듈이 배열된 상태를 도시한 요부 단면 구조도, 및4 is a main cross-sectional structural view showing a state in which a thermoelectric module is arranged in a fan filter unit according to an embodiment of the present invention; and

도 5는 본 발명의 다른 실시예에 따른, 팬필터유닛에 열전소자모듈이 배열된 상태를 도시한 요부 단면 구조도.5 is a main cross-sectional structural view showing a state in which the thermoelectric module is arranged in the fan filter unit according to another embodiment of the present invention.

<도면의 주요 부분에 대한 부호의 설명><Explanation of symbols for the main parts of the drawings>

20 : 팬필터유닛 15 : 팬하우징 20: fan filter unit 15: fan housing

22 : 그릴 14 : 필터   22: grill 14: filter

25 : 팬 30 : 팬가이드   25: fan 30: fan guide

31 : 벽면 40 : 전자냉각수단   31 wall 40 electronic cooling means

41 : 열전소자모듈 43 : 냉각핀   41: thermoelectric module 43: cooling fin

45 : 방열핀   45: heat dissipation fin

Claims (5)

클린 룸에서 구획프레임으로 형성된 시스템 천장의 구획프레임에 탑재된 각각의 팬 하우징에 팬 및 필터를 조합하여 일체화한 팬필터유닛에 있어서,In a fan filter unit in which a fan and a filter are integrated with each fan housing mounted on a partition frame of a system ceiling formed as a partition frame in a clean room, 상기 팬에 의해 유동하는 기류의 냉각을 위해 상기 기류의 유동측에, 냉각측면이 배치되고 반대편에 방열을 위한 방열측면이 배치되는 열전소자모듈 및 방열핀을 구비한 전자냉각수단이 배열된 것을 특징으로 하는 팬필터유닛의 냉각장치.In order to cool the airflow flowing by the fan, a cooling side is disposed on the flow side of the airflow, and a heat dissipation side having a heat dissipation side for dissipating heat is disposed on the opposite side. Cooling device for the fan filter unit. 제 1 항에 있어서,The method of claim 1, 상기 팬 주위에 대하여 그의 원주방향으로 갈수록 멀어지도록 이격되는 벽면을 갖도록 배치된 팬가이드의 내벽면을 따라, 냉각을 위한 냉각측면이 배치되고 반대편에 방열을 위한 방열측면이 배치되는 열전소자모듈 및 방열핀을 구비한 전자냉각수단들이 착접 배열된 것을 특징으로 하는 팬필터유닛의 냉각장치.A thermoelectric element module and a heat dissipation fin having a cooling side for cooling and a heat dissipating side for dissipating on the opposite side are disposed along an inner wall surface of the fan guide arranged to have a wall spaced apart from the circumferential direction toward the circumferential direction of the fan. Cooling apparatus of the fan filter unit, characterized in that the electronic cooling means having a contact arrangement. 제 1 항에 있어서,The method of claim 1, 상기 팬 주위에 대하여 팬하우징의 유입구측에, 상기 팬측 방향으로 냉각을 위한 냉각측면이 배치되고 반대편에 방열을 위한 방열측면이 기립 배치되는 열전소 자모듈 및 방열핀을 구비한 전자냉각수단이 수평 배열되도록 제1 또는 제2 고정계합부를 매개로 고정결합된 것을 특징으로 하는 팬필터유닛의 냉각장치.The electronic cooling means having a heat element module and a heat dissipation fin are arranged horizontally on the inlet side of the fan housing, on the inlet side of the fan housing, on the opposite side of the fan housing, and on the opposite side. Cooling apparatus of the fan filter unit, characterized in that fixed to the first or second fixed engaging portion as possible. 제 3 항에 있어서,The method of claim 3, wherein 상기 제1 고정계합부는 상기 열전소자모듈의 양단부면에 오목형성된 요홈과 판상의 제1 걸림부로 이루어지는 것을 특징으로 하는 팬필터유닛의 냉각장치.The first fixed engaging portion is a cooling device of the fan filter unit, characterized in that the concave groove formed in the both end surfaces of the thermoelectric element module and the plate-like first engaging portion. 제 3 항에 있어서,The method of claim 3, wherein 상기 제2 고정계합부는 상기 열전소자모듈의 양단을 상하로 감싸는 단면이 ㄷ자 형상의 제2 걸림부를 포함하여 구성되는 것을 특징으로 하는 팬필터유닛의 냉각장치.The second fixed engaging portion is a cooling device of the fan filter unit, characterized in that the cross-section surrounding the upper and lower ends of the thermoelectric element module comprises a second locking portion of the U-shape.
KR1020070081963A 2007-08-14 2007-08-14 Cooling device of fan filter unit using thermoelectric element KR100909611B1 (en)

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US10702819B2 (en) 2017-11-27 2020-07-07 Samsung Electronics Co., Ltd. Air cleaner
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