KR20080038015A - 위치결정장치, 노광장치, 및 디바이스 제조방법 - Google Patents

위치결정장치, 노광장치, 및 디바이스 제조방법 Download PDF

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Publication number
KR20080038015A
KR20080038015A KR1020070104450A KR20070104450A KR20080038015A KR 20080038015 A KR20080038015 A KR 20080038015A KR 1020070104450 A KR1020070104450 A KR 1020070104450A KR 20070104450 A KR20070104450 A KR 20070104450A KR 20080038015 A KR20080038015 A KR 20080038015A
Authority
KR
South Korea
Prior art keywords
stage
repulsive force
stator
thrust
positioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
KR1020070104450A
Other languages
English (en)
Korean (ko)
Inventor
유고 시바타
Original Assignee
캐논 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 캐논 가부시끼가이샤 filed Critical 캐논 가부시끼가이샤
Publication of KR20080038015A publication Critical patent/KR20080038015A/ko
Abandoned legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70766—Reaction force control means, e.g. countermass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K16/00—Machines with more than one rotor or stator
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/10—Structural association with clutches, brakes, gears, pulleys or mechanical starters
    • H02K7/106—Structural association with clutches, brakes, gears, pulleys or mechanical starters with dynamo-electric brakes
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/10—Structural association with clutches, brakes, gears, pulleys or mechanical starters
    • H02K7/118—Structural association with clutches, brakes, gears, pulleys or mechanical starters with starting devices
    • H02K7/1185—Structural association with clutches, brakes, gears, pulleys or mechanical starters with starting devices with a mechanical one-way direction control, i.e. with means for reversing the direction of rotation of the rotor

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Combustion & Propulsion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Linear Motors (AREA)
KR1020070104450A 2006-10-27 2007-10-17 위치결정장치, 노광장치, 및 디바이스 제조방법 Abandoned KR20080038015A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006293154A JP5020597B2 (ja) 2006-10-27 2006-10-27 位置決め装置、露光装置、及びデバイス製造方法
JPJP-P-2006-00293154 2006-10-27

Publications (1)

Publication Number Publication Date
KR20080038015A true KR20080038015A (ko) 2008-05-02

Family

ID=39329275

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020070104450A Abandoned KR20080038015A (ko) 2006-10-27 2007-10-17 위치결정장치, 노광장치, 및 디바이스 제조방법

Country Status (4)

Country Link
US (1) US7804207B2 (enExample)
JP (1) JP5020597B2 (enExample)
KR (1) KR20080038015A (enExample)
TW (1) TW200844683A (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5020597B2 (ja) * 2006-10-27 2012-09-05 キヤノン株式会社 位置決め装置、露光装置、及びデバイス製造方法
US7932646B2 (en) * 2007-01-15 2011-04-26 Canon Kabushiki Kaisha Exposure apparatus with a stage, driving unit,and force applying unit having a separate magnetic shield
KR20130015864A (ko) * 2011-08-05 2013-02-14 삼성전기주식회사 리니어진동장치
US9298106B1 (en) * 2011-09-07 2016-03-29 Kla-Tencor Corporation Wafer stage with reciprocating wafer stage actuation control
EP2907158B1 (en) * 2012-10-09 2016-05-04 Koninklijke Philips N.V. Positioning device, control device and control method
CN104049472B (zh) * 2014-06-30 2016-03-30 清华大学 一种电磁弹射启动式掩模台系统

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3614181A (en) * 1970-07-02 1971-10-19 Us Air Force Magnetic bearing for combined radial and thrust loads
US4890023A (en) * 1985-02-19 1989-12-26 Hinds Walter E Linear induction motor systems
JP3363662B2 (ja) * 1994-05-19 2003-01-08 キヤノン株式会社 走査ステージ装置およびこれを用いた露光装置
JP3720593B2 (ja) * 1998-09-09 2005-11-30 キヤノン株式会社 ステージ装置、露光装置および露光方法
US6144118A (en) * 1998-09-18 2000-11-07 General Scanning, Inc. High-speed precision positioning apparatus
JP3849932B2 (ja) * 2002-08-12 2006-11-22 キヤノン株式会社 移動ステージ装置
JP2004172557A (ja) * 2002-11-22 2004-06-17 Canon Inc ステージ装置及びその制御方法
JP2007258356A (ja) * 2006-03-22 2007-10-04 Canon Inc ステージ装置
JP2008010643A (ja) * 2006-06-29 2008-01-17 Canon Inc ステージ装置
JP5020597B2 (ja) * 2006-10-27 2012-09-05 キヤノン株式会社 位置決め装置、露光装置、及びデバイス製造方法
US20080170213A1 (en) * 2007-01-12 2008-07-17 Canon Kabushiki Kaisha Stage apparatus, exposure apparatus, and device manufacturing method
US7932646B2 (en) * 2007-01-15 2011-04-26 Canon Kabushiki Kaisha Exposure apparatus with a stage, driving unit,and force applying unit having a separate magnetic shield

Also Published As

Publication number Publication date
TW200844683A (en) 2008-11-16
US20080100149A1 (en) 2008-05-01
US7804207B2 (en) 2010-09-28
JP2008112757A (ja) 2008-05-15
JP5020597B2 (ja) 2012-09-05

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Legal Events

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A201 Request for examination
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 20071017

PA0201 Request for examination
PG1501 Laying open of application
E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20090226

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20090824

NORF Unpaid initial registration fee
PC1904 Unpaid initial registration fee