KR20070101853A - Rotary joint and housing segment bodies for rotary joint - Google Patents

Abstract

Provided are a rotary joint that is capable of inexpensively coping with an increase and decrease in chemical liquid etc. used and that can be reduced in production costs etc. and in a time period required for its production, and housing segment bodies for the rotary joint. The rotary joint has a substantially circular column-like shaft body (3), shaft body flow holes (15a, 15b, 15c, 15d) formed in the shaft body (3) and having openings in the side face of the shaft body (3); a housing (7) having in it an insertion hole (5) into which the shaft body (3) is relatively rotatably inserted; housing segment bodies (25, 25, 27a, 27b, 27c, 27d) that are segments divided in the housing (7) so as to be laid out in the direction of the center axis (C) of the shaft body (3); a housing flow hole (51) for communicating the shaft body flow holes (15a, 15b, 15c, 15d) and the outside of the housing (7); an annular groove (49) for communicating the shaft body flow holes (15a, 15b, 15c, 15d) and the housing flow hole (51); and an annular-like leakage prevention member (43) for blocking the movement of fluid in the center axis (C) direction, between the shaft body (3) and the housing (7).

Description

ROTARY JOINT AND HOUSING SEGMENT BODIES FOR ROTARY JOINT}

The present invention relates to a rotary joint and a housing partition of the rotary joint.

The surface polishing process of the semiconductor wafer by the conventional CMP (Chemical Mechanical Polishing) apparatus was performed by rotating a turntable and a top ring independently, respectively, with a semiconductor wafer sandwiched between the turntable and a top ring of a CMP apparatus.

Thus, when polishing a semiconductor wafer, various chemical liquids used for polishing are made from a turntable or a top ring. In addition, vacuum adsorption of semiconductor wafers and the like, supply of air and water used for air spouts, water spouts, and the like are also made from a turntable or a top ring.

Therefore, a rotary joint is provided between the fixed CMP device main body and the turntable or the top ring which is freely supported by the rotation so as not to leak the various chemicals, air, water, and the like.

As a rotary joint of this kind, a cylindrical shaft and a cylindrical housing formed to surround the shaft are arranged so as to be relatively rotatable, and various chemical liquids, etc., flow from the housing to the shaft or from the shaft to the housing without leaking. This is generally known (for example, see patent document 1).

Patent Document 1: US Patent No. 5713609

In the above-mentioned Patent Document 1, the rotary joint is roughly composed of a cylindrical shaft and a housing having a hole through which the shaft is inserted, and the shaft and the housing are disposed so as to be relatively rotatable about the shaft central axis. The housing is formed with side-by-side through holes serving as flow paths along the central axis of the shaft. The shaft is formed with an opening through hole corresponding to the above-mentioned through hole along the central axial direction on the side of the shaft. This configuration forms a flow path for flowing the chemical liquid or the like between the shaft and the housing.

However, in the rotary joint of Patent Document 1 described above, since the number of flow paths formed in the shaft and the housing cannot be changed, for example, when the type of chemical liquid used in the CMP apparatus or the like is increased or decreased, the rotary joint cannot cope with the increase or decrease. There was a problem that the whole exchange was necessary and was expensive.

In addition, the kind of chemical liquid used in CMP apparatus etc. may be from 1 type to 4 types, and 5 types, for example, and it manufactures as many pieces of rotary joints corresponding to all these patterns as necessary, and stocks it. It was a burden on the manufacturer.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and can provide a rotary joint and a rotary joint that can cope with an increase or decrease of a chemical solution to be used at a low cost, and can shorten the time required for production or reduction of the manufacturing cost. It is an object to provide a housing partition.

In order to achieve the above object, the present invention provides the following means.

The rotary joint of the present invention has a generally cylindrical shaft body, a shaft flow hole formed in the shaft body and having an opening on its side, a housing formed with a insertion hole through which the shaft body is rotatably inserted, and a center of the shaft body. A housing partition formed by dividing the housing into a plurality of sections so as to be arranged in an axial direction, a housing distribution hole formed in the housing partition to communicate the shaft flow hole with the outside of the housing, and a side surface of the shaft or the insertion hole. A ring-shaped groove formed in at least one of the inner circumferential surface of the ring to communicate the shaft flow hole and the housing flow hole, and a ring shape for blocking the movement of the fluid in the central axis direction between the shaft body and the housing. It is characterized by including a leakage preventing member.

According to the present invention, by changing the number of housing partitions and replacing the shafts with shafts corresponding to the number of housing partitions, the number of types of fluids that can be passed without being mixed with each other, such as chemical liquids Can be changed.

For example, in the case of reducing the number of types of fluids, only a shaft corresponding to the reduced number of types of fluids may be newly manufactured or ordered from a manufacturer, and the extra housing partition may be removed from the rotary joint. In addition, when increasing the number of types of fluids, a shaft body corresponding to the increased number of types of fluids and a insufficient housing divider may be newly produced or ordered from a manufacturer.

Therefore, compared with the method of replacing the whole rotary joint, only the shaft body or only the housing part lacking in a shaft body needs to be newly prepared, and it can respond at low cost.

The housing partition body does not need to change its shape because the housing partition responds to the variation in the number of types of fluids to be flowed. Therefore, compared with the method of using the exclusive housing corresponding to the number of types of fluids to be circulated, only the housing partition having the same shape needs to be manufactured, thereby making it easy to achieve a simplification of the manufacturing process, a reduction in time, and a reduction in cost. . In addition, the space for storing inventory can be reduced.

In the above invention, a center axis determining means is provided on the opposite surface where one housing partition and the other housing partition face each other so as to coincide with the central axis of the insertion hole formed in the one housing partition and the other housing partition. Preferred configuration is preferred.

By providing the central axis determining means in this way, the central axis of the insertion hole formed in the housing partition can be easily matched. Therefore, the housing divider is shifted and the step is prevented from occurring on the inner circumferential surface of the insertion hole, and the variation in the distance between the shaft and the insertion hole can be suppressed.

As a result, the nonuniformity of the surface pressure in the contact part of a shaft and a leakproof member can be suppressed, and the acceleration of abrasion of a shaft or a leakproof member can be prevented. Furthermore, leakage of the fluid which flows between a shaft flow hole and a housing body flow hole can be prevented.

In the above configuration, the central axis determining means meshes with a ring-shaped convex portion centered on the central axis formed on the opposing surface of the one housing partition, and the convex portion formed on the opposing surface of the other housing partition. It is preferable that it is a ring-shaped recessed part centering on the said central axis.

By doing in this way, since a convex part and a recessed part can be formed simultaneously in forming a housing | casing division body, especially the insertion hole, the center axis of an insertion hole, the center axis of a convex part, the center axis of an insertion hole, and the center axis of a recessed part are highly precise. Can be matched with Therefore, the nonuniformity of the space | interval of a shaft body and an insertion hole can further be suppressed, and the abrasion of a shaft body and a leakproof member can be prevented, and the fluid which flows between a shaft body hole and a housing body hole can be prevented from leaking.

Specifically, since the convex portion and the concave portion can be processed without separating the housing divider from the holding jig (chuck) in the same process as that of the insertion hole, high relative position accuracy can be ensured.

In the above invention, the housing partition has the plurality of housing partitions arranged in a line and a fastening member for integrally fixing the plurality of housing partitions, and the pair of housing partitions disposed at both ends of the housing include: It is preferable that a locking portion for engaging the fastening member is formed, and a hole for the fastening member through which the fastening member is inserted is formed in the housing partition sandwiched between the pair of housing partitions.

In such a manner, the plurality of housing partitions can be fixed and engaged integrally by fastening the housing partitions arranged at both ends of the plurality of housing partitions arranged in a row by a fastening member. Therefore, the plurality of housing dividers can be easily separated and joined, and the change in the number of kinds of fluids to be passed can be easily handled.

In the above invention, the housing partition has the plurality of housing partitions arranged in a line and a fastening member for integrally fixing the plurality of housing partitions, and the pair of housing partitions disposed at both ends of the housing include: An engaging portion for locking the fastening member is formed, and a housing for the fastening member through which the fastening member is inserted is formed in the housing partition sandwiched between the pair of housing partitions, and the fastening member is at least the tip of either end. A bolt having a head portion formed at the other end thereof at the same time as the male thread portion in the region, and an engaging portion formed on one side of the pair of housing partitions is a female threaded portion for screwing with the male thread portion; It is preferable that the formed locking portion is a seat surface in contact with the head.

In this way, since the fastening member is a bolt, the plurality of housing dividers can be easily integrally coupled by screwing the male screw portion of the bolt and the locking female screw portion of the housing divider. Further, by releasing the screw coupling, the plurality of housing dividers can be easily separated.

In the above invention, the housing partition has the plurality of housing partitions arranged in a line and a fastening member for integrally fixing the plurality of housing partitions, and the pair of housing partitions disposed at both ends of the housing include: An engaging portion for engaging the fastening member is formed, and the housing partition sandwiched between the pair of housing partitions is formed with a hole for the fastening member through which the fastening member is inserted, and the fastening member is formed at least at the leading end region at one end. A bolt formed with a male thread portion and a head portion formed at the other end thereof, and a locking portion formed on one side of the pair of housing partitions is a locking female threaded portion for screwing with the male thread portion; A branch is a seat surface in contact with the head, and the outer diameter of the male screw portion is on the inner circumferential surface of the hole for the fastening member. It is preferably is formed with a large hole diameter female screw.

By doing in this way, for example, even if it is difficult to remove the plurality of housing partitions even after the fastening member is released, the plurality of housing partitions can be easily separated. Specifically, by first shifting the relative phases of adjacent housing partitions, the fastening member holes are shifted, and then predetermined bolts that are screwed with the hole female threaded portions are screwed into the hole female threaded portions. The bolt can be separated by pressing the adjacent housing partition.

In the said invention, at least one pair of the rotation support which supports the said shaft body and the said housing rotatably around the said central axis is provided in the said shaft body, The outer diameter of the said rotating support body provided in one end of the said shaft body is said shaft body. It is better to smaller than the outer diameter.

By doing in this way, since the rotating support body is arrange | positioned in a shaft body, a shaft body and a housing can be disassembled and assembled without degrading the relative position precision of the center shaft of a shaft body, and the central axis of a insertion hole.

For example, when the rotating support is a bearing, the arrangement of the bearing's outer ring and the housing so that the bearing's outer ring and the housing can be detachably compared to the method of separating the inner ring and the shaft from the center axis of the shaft and the insertion hole is the center axis. Easy to secure relative position accuracy As a result, the nonuniformity of the space | interval of a shaft body and an insertion hole can be prevented, and the acceleration of abrasion of a shaft body and a leakage prevention member can be prevented. Furthermore, the fluid flowing between the shaft hole and the housing hole can be prevented from leaking.

Specifically, the following problems can be prevented by arranging the outer ring and the housing of the bearing so as to be separable.

In general, it is known that it is necessary to bring the bearing inner ring into close contact with the shaft. In such a configuration, a dedicated jig is required when the bearing is removed from the shaft or when the bearing is reassembled in the shaft when maintenance is performed. Therefore, the problem which becomes difficult to maintain on site can be prevented.

When the bearing is separated from the shaft, the bearing may be damaged, and the damage may cause the relative positional accuracy of the central shaft of the shaft and the central shaft of the insertion hole to deteriorate. This can prevent the leakage of chemicals and the like and the shortening of the life of the rotary joint.

Therefore, since the rotary joint of the present invention does not need to remove the shaft body from the inner ring of the rotating support during maintenance, the outer ring of one rotating support is made smaller than the outer diameter of the shaft and inserted so as to fit tightly to the shaft. Can be. By loosening the coupling between the housing body and the rotational support, the housing can be separated without removing the shaft body from the rotational support, and the rotary joint can be maintained.

Moreover, even when reassembly of maintenance or the like does not require a jig for pressing the inner ring of the rotary support and does not require an operation such as reassembly for the rotary support, maintenance can be performed on-site easily. have.

As a result, the rotary joint can be held or the like without using the jig for installing and removing the rotary support and without damaging the rotary support.

Moreover, since the outer diameter of the rotating support body provided in one end part is smaller than the outer diameter of a shaft body, a leakage preventing member can be isolate | separated from the said one end part. Therefore, it is not necessary to separate the rotational support from the shaft even at the time of replacing the deteriorated or worn leakage preventing member, changing the number of the housing partitions, and the relative position between the central axis of the shaft and the central axis of the insertion hole. Deterioration of precision can be prevented.

In the said invention, it is good that the said leakproof member is fixed to the said housing side, and the wear-resistant material is coat | covered at least in the sliding area | region with the said leakproof member as a side surface of the said shaft body.

By doing in this way, a wear-resistant material is coated and it can prevent that a shaft body wears by sliding with a leak-proof member. Therefore, the fall of the contact surface pressure of a shaft body and a leak prevention member, and also the clearance of a shaft body and a leak prevention member can be prevented, and the leak of the fluid which flows between a shaft flow hole and a housing flow hole can be prevented.

In addition, since the wear-resistant material is coated on the side surface of the shaft, for example, compared to the method of covering the cylinder formed from the wear-resistant material on the shaft, it is easier to secure the dimensional drawing of the shaft, and the manufacture thereof becomes easier. The manufacturing cost can be reduced.

In the above invention, the leakage preventing member is a seal member having a substantially U-shaped cross section, and a pair of the seal members are arranged side by side in the central axis direction with the joining surfaces of the housing partitions interposed therebetween. At the same time, it is preferable that the substantially U-shaped opening is arranged to face in the opposite direction along the central axis direction, and a ring-shaped reinforcing member is disposed between the seal members.

By doing in this way, since a seal member can be supported by a reinforcement member, movement of a seal member can be prevented and it can be fixedly arrange | positioned at a predetermined position. Therefore, the contact part of a seal member and a shaft body can be stabilized, and a fluid can be prevented from leaking.

For example, when a pair of said seal member contacts and supports each other, there exists a possibility that a seal member may move. Then, the contact part of a seal member and a shaft body may shift, and a fluid may leak.

The housing partition of the rotary joint of the present invention includes a housing having a substantially cylindrical shaft, a shaft flow hole formed in the shaft and having an opening on its side, and a insertion hole for inserting the shaft in a relatively rotatable manner; A housing partition formed by dividing the housing into a plurality, a housing distribution hole formed in the housing partition to communicate the shaft flow hole with the outside of the housing, and formed on at least one side of the shaft body or the inner circumferential surface of the insertion hole. And a ring-shaped groove communicating the shaft flow hole and the housing flow hole, and a ring-shaped leak-proof member for blocking the movement of fluid in the direction of the central axis between the shaft body and the housing. A housing divider, wherein the housing divider is divided so as to line up in the direction of the central axis of the shaft. It is characterized by that.

According to the present invention, the housing divider is formed by dividing the housing divider so as to line up in the direction of the central axis of the shaft. Therefore, by changing the number of the housing partitions and replacing the shafts with shafts corresponding to the number of the housing partitions, the type of fluid that can be passed between the housing and the shafts without mixing with each other, for example, You can increase or decrease the type.

In addition, the housing partition body does not need to change its shape because the housing partition responds to the variation in the number of types of fluids to be flowed by changing the number. Therefore, compared with the method of using the exclusive housing corresponding to the number of types of fluids to be circulated, only the housing partition having the same shape needs to be manufactured, thereby making it easy to achieve a simplification of the manufacturing process, a shortening of time, and a reduction in cost. . In addition, the space for storing inventory can be reduced.

According to the rotary joint and the housing partition of the rotary joint of the present invention, the number of the housing partitions is changed with respect to the increase and decrease of the chemical liquid to be used, and the shaft body is changed to the shaft corresponding to the number of the housing partitions at low cost. There is a corresponding effect.

Since the housing divider does not need to change its shape with respect to the variation in the number of types of fluids to be flowed, it is possible to reduce the time required for manufacturing and to reduce the manufacturing cost of the rotary joint including the housing divider. Provide effect.

BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic diagram which shows the part which concerns on the said rotary joint in the CMP apparatus provided with the rotary joint which concerns on this invention.

It is a figure which shows the structure of one Embodiment of the rotary joint of FIG.

3 is a side view of the rotary joint of FIG. 2.

It is a figure which shows the modification which changed the number of corresponding chemical | medical solutions etc. to one type in the rotary joint of FIG.

5 is a side view of the rotary joint of FIG. 4.

EMBODIMENT OF THE INVENTION The CMP apparatus provided with the rotary joint and rotary joint which concerns on one Embodiment of this invention is demonstrated with reference to FIGS.

First, the CMP apparatus provided with the rotary joint of the present invention will be described.

BRIEF DESCRIPTION OF THE DRAWINGS In the CMP apparatus provided with the rotary joint which concerns on this invention, it is a schematic diagram explaining the part which concerns on the said rotary joint.

As shown in FIG. 1, the CMP apparatus 101 is schematically composed of a rotary table 103 which is rotationally driven about a rotation axis P in a substantially vertical direction, and a pad support 105 which is horizontally moved back and forth (reciprocating). Then, a wafer 107 such as silicon to be polished is disposed between the rotary table 103 and the pad support 105.

The pad support portion 105 supplies a polishing pad 109 that is rotationally driven about a rotation axis Q in a substantially vertical direction, a supply / discharge device 111 for supplying and supplying chemicals for polishing to the polishing pad 109, and pressurized air. The rotary joint 1 which connects between the air supply apparatus 113, the supply-discharge apparatus 111, and the polishing pad 109, and between the air supply apparatus 113 and the polishing pad 109 so that rotation is relatively possible is arrange | positioned. It is.

A supply and discharge path 115 is formed between the supply and discharge device 111 and the polishing pad 109, and the pressurized air is distributed between the air supply device 113 and the polishing pad 109. An air path 117 is formed.

Moreover, as a polishing chemical liquid, what added isopropyl alcohol to the silica slurry containing KOH (potassium hydroxide) as an alkali component is mentioned.

According to this CMP apparatus 101, the wafer 107 is first placed and held on the rotary table 103 so that the surface 107a of the wafer 107 is upward. Further, the polishing pad 109 is moved toward the wafer 107 and the pad portion 119 of the polishing pad 109 is brought into contact with the surface 107a.

Next, along with the air pressurized by the air supply device 113, the chemical liquid for polishing supplied from the supply / discharge device 111 is ejected between the pad portion 119 and the wafer 107. At this time, the surface 107a of the wafer 107 is polished by rotating the polishing pad 109 at the same time or by revolving the horizontal advance movement (reciprocating movement) or the polishing pad 109.

The pad portion 119 is formed with a plurality of branched air paths for blowing pressurized air toward the wafer 107. The pressurized air blown out from the branch air path quickly and uniformly disperses the polishing chemical sprayed between the same pad portion 119 and the wafer 107. In addition, the pressurized air quickly removes the remaining liquid of the chemical from the pad portion 119 and the wafer 107.

In addition, after completion of polishing, the chemical liquid for polishing remaining in the supply / discharge path 115 is sucked and discarded by the supply / discharge device 111 to prevent it from falling onto the surface 107a of the wafer 107.

Next, the rotary joint according to the present invention will be described.

It is sectional drawing explaining the structure of the rotary joint by this invention.

As shown in FIG. 2, the rotary joint 1 is a substantially cylindrical housing 7 in which a substantially cylindrical shaft (shaft: 3) and an insertion hole 5 through which the shaft 3 is inserted are formed. The shaft 3 and the housing 7 are configured to be relatively rotatable about the central axis of the shaft 3.

The shaft 3 has a substantially cylindrical shaft portion 9, a flange portion 11 larger in diameter than the shaft portion 9 formed at one end thereof, and a small diameter portion smaller in diameter than the shaft portion 9 formed at the other end thereof. It is formed in outline (13). Moreover, the ceramic which is a wear-resistant material is melt-sprayed on the surface of the shaft part 9 and the sliding surface with the seal member mentioned later at least, and is coated on the surface of the shaft part 9. In addition, it is preferable that the ceramic coating is not applied to the arrangement portion of the shaft bearing described later. In addition, various methods are known for the method used for melt spraying, but are not particularly limited.

In addition, the shaft 3 is preferably made of a material having chemical resistance, and is formed of, for example, a metal such as stainless, and can be exemplified by SUS316, but is not limited thereto.

3 is a side view of the rotary joint of FIG. 2.

In the shaft portion 9, four axial flow passages (shaft flow holes: 15a, 15b, 15c, 15d) are formed as shown in Figs. Each axial flow path 15a, 15b, 15c, 15d has the opening part of a flange side in the cross section of the flange part 11, and the opening part of each flange side is the central axis C of the shaft 3, as shown in FIG. Are arranged at equal intervals on the same circumference centering on the center. As shown in FIG. 2, the axial flow path 15a, 15b, 15c, 15d extends to the small diameter part 13 side along the shaft center axis C from the opening part of a flange side.

Each of the axial passages 15a, 15b, 15c, and 15d is formed to be bent at substantially right angles at different predetermined positions, and communicates with the outside at the axial opening of the shaft 9 side. Specifically, each of the axial flow passages 15a, 15b, 15c, and 15d is formed to be bent at positions corresponding to the housing flow passages described later.

The shaft 3 is provided with a shaft bearing (rotary support 17) arranged on the flange portion 11 side of the shaft portion 9 and a small diameter bearing (rotary support 19) disposed at the small diameter portion. ), The shaft 3 is supported to be rotatable about the central axis C. As shown in FIG. The outer diameter of the small diameter bearing 19 is set smaller than the outer diameter of the shaft portion 9.

The flange portion 11 is provided with a connection screw hole 21 to be connected to the above-described polishing pad 109 (see FIG. 1). The flange part 11 and the polishing pad 109 are connected through this connection screw hole 21.

As shown in FIG. 2, the housing 7 is comprised by the partition part arranged in a line, The partition part is a front partition part (housing partition 23) arrange | positioned at the end, and a rear partition part (housing partition: 25) and housing partitions (housing partitions 27a, 27b, 27c, 27d) disposed therebetween. The front cover 29 is arrange | positioned at the front partition 23, and the rear cover 31 is arrange | positioned at the rear partition 25. As shown in FIG.

Further, the first through bolt (fastening member 33) and the front cover 29 which integrally fix the front partition 23, the housing partitions 27a, 27b, 27c, 27d and the rear partition 25, A second through bolt (fastening member) 35 is provided which integrally fixes the front partition 23, the housing partitions 27a, 27b, 27c, 27d, the rear partition 25 and the rear cover 31. have.

In the housing 7, an insertion hole 5 is formed through the housing partitions 27a, 27b, 27c, 27d, the front partition 23, the rear partition 25, and the rear cover 31. The shaft 3 is inserted into the insertion hole 5.

An insertion hole is formed in the outer periphery region of the rear contact surface (facing surface 37) on the rear partition 25 side in the housing partitions 27a, 27b, 27c, 27d and the front partition 23. 5) and an in-row (center-axis determination means, convex part 39a) which are ring-shaped convex parts which share the central axis C are formed. In addition, an insertion hole 5 is provided in the outer periphery region of the front contact surface (facing surface: 41) on the front partition 23 side in the housing partitions 27a, 27b, 27c, 27d and the rear partition 25. An in-row (center axis determination means, recess: 39b), which is a ring-shaped recess, which shares the central axis C with each other, is formed.

These in-low 39a and in-low 39b are formed so that mutual coupling is possible, and by combining the in-lows 39a and 39b, the housing dividers 27a, 27b, 27c, 27d, and the front divider 23 ) And the central axis of each insertion hole 5 formed in the rear partition 25 can be arranged within a predetermined error range.

In addition, as described above, by using the in-rows 39a and 39b, the center axis of the insertion hole 5 may be aligned, and for example, the positioning pin 5 may be used to position the insertion hole 5. The center axis may be aligned.

Rear contact surface 37 and front contact surface 41 of housing partitions 27a, 27b, 27c, and 27d, rear contact surface 37 of front partition 23, and front contact surface 41 of rear partition 25. The ring-shaped step part 42 in which the sealing member mentioned later is arrange | positioned is formed in the internal-contiguous adjacent area | region in this.

Moreover, the holding part which adjoins the radially outer side of the step part 42, and hold | maintains the reinforcement member mentioned later is formed.

The seal member (leak prevention member: 43) is formed in a ring shape in its entirety, and has a substantially U-shaped jacket having an opening in the direction of the center axis of the insertion hole 5, and a spring formed in the jacket in a coil shape. It consists of. As the material of the jacket, a resin-based material having chemical resistance and fluid sealing property and abrasion resistance is preferable. For example, PTFE (polytetrafluoroethylene) having improved abrasion resistance by adding graphite, carbon, and glass fiber, etc. For example. In addition, the spring presses the jacket against the shaft 3 and the step portion 42 while elastically supporting the jacket so that the jacket is pushed out from the inside.

The seal member 43 is disposed between the step portion 42 and the shaft 3. Moreover, in the case of the seal member 43 arrange | positioned at the housing part 27a, 27b, 27c, 27d, the opening of a jacket is arrange | positioned toward the ring-shaped groove side mentioned later. With respect to the seal member 43 disposed on the front partition 23 and the rear partition 25, the opening of the jacket is disposed in the reverse direction with respect to the housing partitions 27a, 27b, 27c, 27d. . That is, the adjacent seal members 43 are arrange | positioned so that openings mutually may face in the opposite direction. A reinforcing member 45 formed on a ring shape is disposed between the seal members 43. The reinforcement member 45 is arrange | positioned in contact with the jacket of the seal member 43 arrange | positioned at both sides, and is preventing the seal member 43 from moving.

In the front contact surface 41 of the housing partitions 27a, 27b, 27c, and 27d and the front contact surface 41 of the rear partition 25, the in-row 39b and the stepped portion 42 will be described later. A ring-shaped groove portion for arranging the O-ring is formed, and an O-ring 47 which is a leak-proof member formed in a ring-shaped is disposed. The O-ring 47 is arranged to be in contact with the groove and to be in contact with the opposing rear contact surface 37. By arranging the O-ring 47, it is possible to prevent fluid leakage or intrusion of outside air from between the front contact surface 41 and the rear contact surface 37.

In addition, as described above, the O-ring 47 may be disposed in the groove portion, but may be other as long as it is a member having a leakage preventing action, and is not particularly limited.

Between the step portion 42 of the inner circumferential surface of the insertion hole 5 of the housing partitions 27a, 27b, 27c, and 27d, each has a ring shape having the central axis C of the insertion hole 5 as its central axis. The groove 49 is formed. In addition, the housing divider 27a, 27b, 27c, 27d is formed with a housing flow path (housing flow hole 51) connecting the ring-shaped groove 49 and the outside of the housing 7. These ring-shaped grooves 49 are disposed at positions capable of communicating with the openings on the axial side of the axial flow passages 15a, 15b, 15c, and 15d described above.

The front division part 23 is provided with the front support part 53 which supports the outer ring of the small diameter part bearing 19 mentioned above. The front support part 53 is formed with the ring part which protruded in the convex shape from the inner peripheral surface of the insertion hole 5.

Moreover, the rear support part 55 is provided in the rear part 25 which supports the outer ring of the axial bearing 17 mentioned above. The rear support part 55 is formed in the ring-shaped groove which recessed with respect to the inner peripheral surface of the insertion hole 5.

These front support part 53 and the rear support part 55 are formed so that the center axis may coincide with the center axis C of the insertion hole 5. Moreover, the front support part 53 and the rear support part 55 are arrange | positioned so that contacting and spaced apart from the small diameter part bearing 19 and the axial part bearing 17, respectively, are not fixed.

The front partition 23 and the housing partitions 27a, 27b, 27c, and 27d are formed with first through bolt holes (holes for fastening members 57) through which the first through bolts 33 are inserted, and the rear partitions. A locking female threaded portion (locking portion 61) is formed at 25 to screw the male thread portion 59 of the first through bolt 33 therein. In addition, the front part 23 is provided with a flat part for accommodating the head part 63 of the first through bolt 33, and the seat surface (locking part 65) which is the bottom surface of the flat part is in contact with the head part 63. Doing.

On the inner circumferential surface of the first through bolt hole 57, a hole female screw portion 67 having an inner diameter larger than the outer diameter of the male screw portion 59 is formed. For example, when the male screw portion 59 is a male screw of M6, the hole female threaded portion 67 becomes a female screw of M8 in the above relationship.

Similarly with respect to the second through bolt 35, the second through bolt hole 69 is provided in the front cover 29, the front partition, the housing partitions 27a, 27b, 27c, 27d and the rear cover 31. ) Is formed, and a locking female threaded portion 61 for screwing the male threaded portion 59 to the second through bolt 35 is formed in the rear cover 31.

In the outer side surface of the housing partition 27d, an installation hole (not shown) is provided for providing a member for restricting the rotation of the housing 7. At this time, the rotation of the housing 7 can be regulated by providing a rotation restricting member (not shown). In addition, the mounting hole 71 may be formed in the housing partition 27d as described above, or may be formed in the other housing partitions 27a, 27b, 27c, and the front partition 23 or the rear partition. It may be formed in the sieve 25.

Next, operation | movement in the rotary joint 1 which consists of said structure is demonstrated.

As shown in FIGS. 1 and 2, the rotary joint 1 is rotated and driven by the shaft 3 connected to the pad support 105, and the housing 7 is fixedly disposed by the rotation restricting member described above. . In addition, although the rotational speed of the shaft 3 changes with the use conditions of the CMP apparatus 101, for example, the rotational speed of about 100 to 200 rotations per minute can be illustrated.

In this state, each chemical liquid and air supplied from the supply / discharge device 111 and the air supply device 113 are supplied to the rotary joint 1. Each supplied chemical liquid, air, and the like flow through the housing flow passage 51 and flow into the ring-shaped groove 49, and flow into the axial flow passages 15a, 15b, 15c, and 15d therefrom. Each chemical liquid and air introduced into the axial passages 15a, 15b, 15c, and 15d are supplied to the pad support 105 and used for polishing the wafer 107. In addition, although supply pressures, such as chemical liquid and air supplied, depend on the use conditions of the CMP apparatus 101, it can illustrate supply pressure in the range of about -100 kPa to about 250 kPa, for example. When supply pressure is a negative pressure, it shows that the chemical | medical solution and air are suctioned.

In addition, most of each chemical liquid and air introduced into the ring-shaped groove 49 flows into the axial flow passages 15a, 15b, 15c, and 15d, but some flow into the gap between the shaft 3 and the insertion hole 5. do. Each chemical liquid or air introduced into this gap is blocked by the seal member 43 disposed in the step portion 42. Specifically, it is interrupted by the contact of the jacket of the seal member 43 and the step portion 42 and the contact of the jacket of the seal member 43 and the shaft 3. The jacket is pressed by the pressure of each chemical liquid or air, and the sealing property is increased when the contact pressure between the step portion 42 and the shaft 3 is increased.

Although the seal member 43 is pushed by the pressure of each chemical liquid or air, since the support is supported by the reinforcing member 45, its movement is prevented.

On the other hand, when the supply pressure of each chemical liquid or air is negative pressure, inflow of other chemical liquids or air is blocked by the adjacent sealing member 43 with the reinforcing member 45 interposed with respect to the ring-shaped groove which became negative pressure. On the other hand, the inlet of the outside air is blocked by the O-ring 47.

As for the seal member 43 adjacent to the ring-shaped groove | channel which became negative pressure, the force of the direction in which the opening of a jacket closes acts by the pressure difference of both sides, and airtightness falls. On the contrary, a force in the direction in which the opening of the jacket opens is applied to the adjacent seal member 43 with the reinforcing member interposed therebetween, thereby improving airtightness.

Next, the method of changing the number of chemical | medical solutions etc. which can be responded in the rotary joint 1 is demonstrated.

First, by removing the second through bolt 35, the front cover 29 is separated from the housing 7, and the first through bolt 33 is separated from the housing 7.

Thereafter, the front partition 23 constituting the housing 7, the housing partitions 27a, 27b, 27c, 27d, and the rear partition 25 are sequentially arranged on the small-diameter portion 13 side of the shaft 3. To separate from. In this way, the shaft 3 is separated.

FIG. 4 is a diagram showing a modification in which the number of corresponding chemical liquids is changed to one type in the rotary joint 1 of FIG. 2, and FIG. 5 is a side view of the rotary joint of FIG. 4.

When changing the number of corresponding chemical liquids or the like, only the shaft 3 can be replaced since the number of axial flow passages formed therein and the length of the shaft 3 cannot be changed. Here, as shown in FIG. 4 and FIG. 5, the case where the number of corresponding chemical | medical solutions etc. is one type is demonstrated. Therefore, one axial flow path 15a is formed in the replaced new shaft (shaft: 3 ').

And the rear part 25, the housing part 27a, and the front part 23 are inserted in this order from the small diameter part 13 side of the shaft 3 '.

At this time, the relative alignment between the front divider 23 and the housing divider 27a and the relative alignment between the housing divider 27a and the rear divider 25 are performed by the in-low 39a and the in-low 39b. By bonding Therefore, they are combined so that the center axis | shaft of the insertion hole 5 formed may correspond substantially.

In addition, the front partition 23, the housing partition 27a, and the rear partition 25 are integrally fastened by a first through bolt (fastening member 33 '). In this way, since the respective fastening bodies are integrally fastened by the first through bolts 33 ', the fastenings can be fastened without harming the degree of coincidence of the central axes of the respective insertion holes 5.

In addition, in the case of maintenance of the rotary joint 1, for example, replacement of the seal member 43, the front partition 23 and the housing partitions 27a, 27b, 27c, 27d, and the like, the shaft 3 By separating through the small diameter portion 13 side, the seal member 43 and the like are exchanged through the small diameter portion 13 side.

When a slurry is contained in chemical | medical solution etc., separation of each division may become difficult. For example, when separation of the housing partitions 27a and 27b is difficult, the phase of the circumferential direction of the housing partition 27a and the housing partition 27b is shifted, and the housing partition 27a and the housing partition are shifted. The 1st through bolt hole 57 of 27b is shifted | deviated.

Then, the bolt M8 bolt (JIS) that is screwed into the hole female threaded portion 67 is screwed from the housing partition 27a. The housing partitions 27a and 27b can be separated by contacting and pressing the tip of the bolt to the housing partition 27b.

According to the above configuration, by changing the number of housing partitions and changing the shaft 3 to the shaft 3 corresponding to the number of housing partitions, the number of types of chemical liquids and the like that can be distributed without mixing with each other can be obtained. You can change it.

For example, when reducing the number of types of chemicals and the like, the shaft 3 is reduced to a shaft corresponding to the number of types of chemicals and the like, and the extra housing partition can be removed by removing the rotary joint 1 from the rotary joint 1. In addition, when increasing the number of types of chemicals and the like, it is possible to cope by changing to a shaft corresponding to the number of types of chemicals and the like after increasing and adding a insufficient housing divider.

Therefore, compared with the method of replacing the whole rotary joint, only the shaft or only the housing part which is lacking with a shaft can be responded simply, and it can respond inexpensively.

The housing divider does not need to change the shape of the housing divider because the housing divider responds to variations in the number of kinds of chemicals and the like by changing the number thereof. Therefore, since only the housing part of the same shape may be manufactured compared with the method of using the exclusive housing corresponding to the number of kinds of chemical liquids, etc., it is easy to simplify a manufacturing process, shorten time, and reduce cost. It also reduces the space for storing inventory.

By providing in-rows 39a and 39b, the central axis C of the insertion hole 5 formed in the housing partition or the like can be easily matched. Therefore, step formation of the inner circumferential surface of the insertion hole 5 due to misalignment of the housing divider or the like can be prevented, and nonuniformity in the interval between the shaft 3 and the insertion hole 5 can be suppressed.

As a result, the nonuniformity of the surface pressure in the contact part of the shaft 3 and the seal member 43 can be suppressed, and the acceleration of abrasion of the shaft 3 and the seal member 43 can be prevented, and the axial flow path Leakage of the chemical liquid or the like flowing between the 15a, 15b, 15c, and 15d and the housing flow path 51 can be prevented.

Since the in-rows 39a and 39b can be formed at the same time when forming the housing divider, especially the insertion hole 5, the center axis C of the insertion hole 5 and the center axis of the in-low 39a are made. The center axis C of the insertion hole 5 and the center axis of the in-row 39b can be matched with high precision. Therefore, the nonuniformity of the space | interval of the shaft 3 and the insertion hole 5 can be suppressed further.

Specifically, since the in-rows 39a and 39b can be processed without removing the housing divider from the holding jig in the same process as that of the insertion hole 5, high relative position accuracy can be ensured. Can be.

Since the small diameter part bearing 19 and the axial part bearing 17 are provided in the shaft 3, the shaft 3 is not deteriorated in the relative position accuracy of the central axis of the shaft 3 and the central axis of the insertion hole 5. ) And the housing divider can be disassembled and assembled.

That is, compared with the method of arranging the inner ring of the bearing and the shaft 3 separably, the arranging of the outer ring of the bearing and the housing 7 so as to be separable includes the central axis of the shaft 3 and the insertion hole 5. It is easy to secure the relative position accuracy with the central axis of.

Moreover, since the outer diameter of the small diameter part bearing 19 with which the small diameter part 13 of the shaft 3 was equipped is smaller than the outer diameter of the shaft part 9 in the shaft 3, the small diameter part bearing from the shaft 3 is carried out. The housing partition etc. can be disassembled and assembled without removing (19). Therefore, coupling of the small diameter part bearing 19 and the shaft 3 can be made close, and the deterioration of the relative position precision of the center axis of the shaft 3 and the center axis of the insertion hole 5 can be prevented.

Since the small diameter part bearing 19 does not need to be separated from the tightly coupled shaft 3, there is no fear of damaging the small diameter part bearing 19 when the small diameter part bearing 19 is taken out or reassembled. Therefore, deterioration of the relative positional accuracy of the center axis of the shaft 3 and the center axis of the insertion hole 5 can be prevented, and the leakage of chemical liquids, etc., or the life of the rotary joint 1 is shortened. can do.

In addition, during maintenance, the jig for removing the small diameter part bearing 19 becomes unnecessary, and the fitting jig for pressing the inner ring of the small diameter part bearing 19 to be used for reassembly becomes unnecessary. Maintenance work can be facilitated.

Moreover, since the outer diameter of the small diameter part bearing 19 provided in the small diameter part 13 of the shaft 3 is smaller than the outer diameter of the axial part 9 of the shaft 3, the small diameter part bearing 19 is made into the shaft 3 The seal member 43 can be separated from the small diameter portion 13 without being removed from it. This eliminates the need to separate the small diameter bearing 19 and the shaft bearing 17 from the shaft 3 even when the deteriorated or worn seal member 43 is replaced or when the number of housing dividers is changed. The deterioration of the relative positional accuracy of the central axis of the shaft 3 and the central axis of the insertion hole 5 can be prevented.

Since the ceramic is coated on the shaft 3, it is possible to prevent the shaft 3 from being worn by sliding with the seal member 43. Therefore, the fall of the contact surface pressure of the shaft 3 and the seal member 43, and the space | interval of the shaft 3 and the seal member 43 can be prevented, and the axial flow path 15a, 15b, 15c, 15d is prevented. Leakage of the chemical liquid and the like that flows between the housing flow path 51 and the housing can be prevented.

In addition, since the ceramic is coated on the side surface of the shaft 3 by melt spraying, for example, the manufacturing cost becomes easier compared to the method of covering the cylindrical member formed of ceramic on the shaft 3, and thus the manufacturing cost Can be reduced.

In addition, the technical scope of this invention is not limited to the said embodiment, It is possible to add various changes in the range which does not deviate from the meaning of this invention.

For example, although this invention was demonstrated as a rotary joint applied to the CMP apparatus in the said embodiment, this invention is not limited to what was applied to the CMP apparatus, It is applicable to the apparatus etc. which have various other rotating parts.

According to the present invention, the housing divider is formed by dividing the housing divider so as to line up in the direction of the central axis of the shaft. Therefore, by changing the number of the housing partitions and replacing the shafts with shafts corresponding to the number of the housing partitions, the type of fluid that can be passed between the housing and the shafts without mixing with each other, for example, You can increase or decrease the type.

In addition, the housing partition body does not need to change its shape because the housing partition responds to the variation in the number of types of fluids to be flowed by changing the number. Therefore, compared with the method of using the exclusive housing corresponding to the number of types of fluids to be circulated, only the housing partition having the same shape needs to be manufactured, thereby making it easy to achieve a simplification of the manufacturing process, a shortening of time, and a reduction in cost. . In addition, the space for storing inventory can be reduced.

According to the rotary joint and the housing partition of the rotary joint of the present invention, the number of the housing partitions is changed with respect to the increase and decrease of the chemical liquid to be used, and the shaft body is changed to the shaft corresponding to the number of the housing partitions at low cost. There is a corresponding effect.

Since the housing divider does not need to change its shape with respect to the variation in the number of types of fluids to be flowed, it is possible to reduce the time required for manufacturing and to reduce the manufacturing cost of the rotary joint including the housing divider. Provide effect.

By providing the in-row, the central axis of the insertion hole formed in the housing partition or the like can be easily matched. Therefore, formation of the step | step difference of the inner peripheral surface of the insertion hole by the shift | offset | difference of a housing part etc. can be prevented, and the nonuniformity of the space | interval of a shaft and an insertion hole can be suppressed.

Moreover, since the outer diameter of the small diameter part bearing provided in the small diameter part of a shaft is smaller than the outer diameter of the axial part in a shaft, a housing part etc. can be disassembled and assembled without removing a small diameter part bearing from a shaft. Therefore, the combination of the small diameter bearing and the shaft can be tightly coupled, and the deterioration in the relative positional accuracy of the central axis of the shaft and the central axis of the insertion hole can be prevented.

In addition, since the ceramic is coated on the shaft, the shaft can be prevented from being worn by sliding with the seal member. Therefore, the fall of the contact surface pressure of a shaft and a seal member, and the space | interval of a shaft and a seal member can be prevented, and the chemical liquid etc. which flow between the axial flow path and a housing flow path can be prevented from leaking.

Claims (10)

Roughly cylindrical shaft, A shaft flow hole formed in the shaft and having an opening at its side; A housing formed with an insertion hole for inserting the shaft in a rotatable manner; A housing divider formed by dividing the housing into a plurality of lines so as to be arranged in a direction of a central axis of the shaft body; A housing flow hole formed in the housing divider for communicating the shaft flow hole with the outside of the housing; A ring-shaped groove formed on at least one of a side surface of the shaft body or an inner circumferential surface of the insertion hole and communicating the shaft body hole with the housing body hole; And a ring-shaped leakage preventing member for blocking movement of the fluid in the direction of the central axis between the shaft and the housing. The method of claim 1, On the opposite surface where one housing partition and the other housing partition face each other, a center axis determining means is provided for matching the central axis of the insertion hole formed in the one housing partition and the other housing partition. Rotary joint. The method of claim 2, The central axis determining means, A ring-shaped convex centering on the central axis formed on the opposite surface of the one housing partition; And a ring-shaped recess around the central axis engaged with the convex portion formed on the opposite surface of the other housing partition. The method according to any one of claims 1 to 3, A plurality of housing partitions in which the housings are arranged in a row, and a fastening member for integrally fixing the plurality of housing partitions, A pair of housing partitions disposed at both ends of the housing is provided with a locking portion for engaging the fastening member. A housing joint inserted between the pair of housing dividers is provided with a hole for a fastening member through which the fastening member is inserted. The method of claim 4, wherein The fastening member is a bolt having a male thread portion formed at least at a leading end region of one end portion and a head portion formed at the other end portion, The locking portion formed on one of the pair of housing dividers is a locking female screw portion for screwing with the male screw portion, The engaging portion formed in the other housing partition is a seat surface which contacts the said head part, The rotary joint characterized by the above-mentioned. The method of claim 5, And a hole female screw portion having an inner diameter larger than an outer diameter of the male screw portion is formed on an inner circumferential surface of the hole for the fastening member. The method according to any one of claims 1 to 6, At least one pair of the rotation support body which supports the said shaft body and the said housing rotatably about the said central axis is provided in the said shaft body, The outer diameter of the said rotary support provided in one end of the said shaft body is smaller than the outer diameter of the said shaft body. The method according to any one of claims 1 to 7, The leakage preventing member is fixed to the housing side, A rotary joint, characterized in that a wear-resistant material is coated on at least a sliding region with the leakage preventing member as a side surface of the shaft. The method of claim 1, The leakage preventing member is a seal member having a substantially U-shaped cross section, A pair of said seal member is arrange | positioned side by side in the said central axis direction, and the substantially U-shaped channel | path is arrange | positioned in the opposite direction along the said central axis direction, with the joining surface of the said housing divisions interposed between, A ring joint reinforcing member is disposed between the seal members. Roughly cylindrical shaft, A shaft flow hole formed in the shaft and having an opening at its side; A housing formed with an insertion hole for inserting the shaft in a rotatable manner; A housing divider in which the housing is divided into a plurality; A housing body distribution hole formed in the housing divider and configured to communicate the outside of the housing with the shaft distribution hole; A ring-shaped groove formed on at least one of a side surface of the shaft body or an inner circumferential surface of the insertion hole to communicate the shaft body hole with the housing body body hole; A housing part of a rotary joint provided with a ring-shaped leakage preventing member which blocks a movement of a fluid in the direction of the central axis between the shaft and the housing. And the housing divider is divided so as to line up in the direction of the central axis of the shaft.

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