KR20070058700A - Container for conveying substrate, inner wall structure of the container, and bottom raising member used for the container - Google Patents

Abstract

[PROBLEMS] A container for conveying a substrate, the main part of which container is made from a foamed synthetic resin. In the container, loading and unloading of a glass substrate into and out of a container body is facilitated and unexpected vertical movement of the substrate during conveyance is prevented, thereby the substrate is less likely to chip or crack. [MEANS FOR SOLVING PROBLEMS] A container body of a container for conveying a substrate is constructed from foamed synthetic resin inner heat insulators and sheet members so as to form double walls of the heat insulators, and the heat insulators and members are formed as separate bodies in advance. Vertically arranged inner heat insulators are provided with inclination where the thickness of the heat insulators gradually thins from the opening of the container body downward. Further, in an inner heat insulator provided on the bottom side of the container body, a recess is formed in the thickness direction, and a slit in which a drying agent can be inserted is formed in a sheet member placed on the recess.

Description

CONTAINER FOR CONVEYING SUBSTRATE, INNER WALL STRUCTURE OF THE CONTAINER, AND BOTTOM RAISING MEMBER USED FOR THE CONTAINER}

The present invention relates to a substrate transport container that is optimal for accommodating and transporting a plurality of substantially short liquid crystal glass substrates, an inner wall structure of the transport container, and a floor raising member optimally used for the transport container. will be.

In general, in the case of manufacturing a substrate such as a liquid crystal glass substrate, when moving to a different place, the substrates are not contacted with each other and the contamination is prevented, and at the same time, the substrate is safely transported without being cracked or broken. In order to enable this, a substrate transport container in which a lid is densely fitted in a state where a plurality of pieces are accommodated is used.

In such a substrate transport container, a substantially rectangular parallelepiped container body and a lid attached to an opening of the container body are formed together from a foamed synthetic resin (for example, Patent Document 1).

In the substrate transport container of Patent Document 1, a glass substrate is directly transported to a substrate support formed on the inner surface of the container body made of foamed synthetic resin. For this reason, when friction occurs on the glass substrate during transportation, the support portion of the inner surface of the container body, which is in direct contact with the glass substrate, is likely to deteriorate. As a result, the substrate support made of the foamed synthetic resin is shaved and the foam is dusty. There is a problem that is attached to.

On the other hand, the container for board | substrate conveyance which separately provided the protective film made from the polyethylene film inside the container main body is also provided (patent document 2, patent document 3).

In the case of Patent Literature 2, as shown in Fig. 18, grooves corresponding to the shape of the grooves 212a of the inner wall 211 on the foam side are formed in a preformed flat polyethylene film 212B by heating. The protective film 212b in which the concave convex groove is formed is heat-fused at the same time as the formation of the groove 212a, thereby covering the inner surface of the groove 212a.

According to this structure, unlike the case of Patent Document 1, since the glass substrate does not directly contact the inner wall 211 of the foam, it is possible to prevent the formation of dust by the foam.

However, in the case of Patent Document 2, since the protective film 212b is densely attached to the inner wall 211 of the foam, the inner wall 211 and the protective film 212b always move integrally.

Therefore, in the case of applying an impact to the inner wall 211 of the container body, the protective film 212b is impossible to perform the function of the cushioning material, such an impact is directly transmitted to the substrate. As a result, there is a problem of preventing cracks, splitting, etc. from occurring in the substrate.

In addition, Patent Document 2 discloses that the width S of a pair of substrate fixing grooves 212b facing each other extends from the upper portion of the box body (the inlet portion of the substrate insertion) to the lower portion (the final portion of the substrate insertion) and is about the same length. Is set to.

If the width S of the substrate stop groove is formed in the same width from the entrance of the substrate in the insertion direction to the end of the inserted portion, there is a problem that the substrate is broken when the substrate is slightly inclined.

In addition, in the case of patent document 2, as shown in FIG. 19, the distance E between the board | substrate stop groove 212b of both ends is the same from the vicinity of the entrance of a board insertion direction to the last part of a board insertion direction. Because of the distance E, insertion in the direction of the arrow is difficult unless the substrate G enters straight. In addition, even if the glass substrate G is mounted without being damaged to the end, there is no room for attention in the substrate, which causes the glass substrate G to be damaged, for example, when the container body is subjected to vibration in the vertical direction. There is.

Further, claim 1 of Patent Document 3 (Japanese Patent Laid-Open No. 7-257681) discloses a groove 2a for supporting a substrate in a box 1 made of a foam having a foaming ratio of 3 to 30 times. Disclosed is a substrate transport box having a box-shaped groove interpolation member (2).

Regarding this interpolation member 2, for example, in the paragraph, "A resin sheet (ABS resin sheet, etc.) is set as a groove interpolation member 2 in a mold, and is vacuumed while heating. Use a pressure-forming body that sucks and forms into a box at one time. " The groove-containing interpolation member 2 includes five surfaces corresponding to the inner wall surface and the bottom surface of the foamed resin box 1, as shown by reference numeral 2 in FIG. 3. The other side is renovated.

In this case, even if one side of the cube is to be placed in the foamed resin box 1, a box-shaped interpolation member 2 having a shape substantially the same as that of the foamed resin box 1 is inserted into the foamed resin box 1. The work to be done is very complicated. In addition, if such an interpolation member 2 is formed in a box shape, the substrate supporting sphere 2a is fixed by the side formed by contacting each surface of the box-shaped interpolation member 2. In this way, the fixed sphere 2a for substrate support does not have cushioning properties.

In this patent document 3, the interpolation member 2 is obtained by melt-forming a plate- or box-shaped press-formed body obtained by press-forming a plate-shaped or box-shaped foam-forming body made of a foam, or a resin sheet. It is described as a plate- or box-shaped machined product obtained by machining a plate- or box-shaped article or a plate shape.

In addition, in the paragraph, the engaging convex 11a is formed inside the pair of surfaces corresponding to the main body portion 11 of the box 1, and the plate-shaped groove inserting insertion member ( 2) and (2), on the rear surface side, when a rough groove 2b engaging with the convex jaw 11a is formed, installation and removal of the plate-shaped groove inserting member 2 for the box 1 is performed. It is described that can be made more smooth.

However, when the interpolation member 2 described in the patent document 3 is box-shaped, the work of inserting the box-shaped interpolation member 2 into the foamed resin box 1 is very complicated, and the joining fixtures The interpolation member having a thickness for containing i) does not have cushioning properties.

Therefore, in the substrate transport boxes disclosed in Patent Documents 1 and 3, the impact from the outside is absorbed by the box made of foamed resin, but the impact caused by the vibration of the substrate contained in the box is the substrate. Since the spherical interpolation member for supporting the insulator has a buffering property, it is impossible to absorb it in this box.

In addition, the board | substrate conveyance boxes of patent document 1 and patent document 3 are the uniform size, The magnitude | size of the board | substrate which can be stably conveyed by such a board | substrate conveyance box is one kind, and the thing of a different size cannot convey.

In addition, Patent Document 4 (Japanese Patent Application Laid-open No. 57-91272) includes a box-shaped opening formed on one surface of a hexahedron and formed into a foam-shaped synthetic resin material and the inner sides of four sides that are adjacent to the opening of the box shape. A built-in member which is provided on a pair of opposing side surfaces and includes a plurality of spheres arranged at predetermined intervals extending from the one surface to a bottom surface direction opposite to the one surface, and formed in a box-like material made of a competitive resin material. Thereby, an accommodating device for a plate member is disclosed, wherein both ends of the plate member are mounted in the opposing grooves.

The storage device as described above has a structure in which a sphere is formed on a pair of opposite sides of a box shape, and the sphere is in close contact with a built-in member made of synthetic resin on the surface of the groove formed in the box shape. However, this sphere itself is not buffering. Therefore, there is a disadvantage that splitting and cracking occur.

On the other hand, when conveying a liquid crystal glass substrate to a distant place by such a container for transporting a substrate made of a foamed synthetic resin, it is necessary to protect the substrate from moisture. For this purpose, although a desiccant may be accommodated in a container body or a lid, usually, such a desiccant is generally adhered with a tape or the like, so that if the adhesive force of the tape decreases and the desiccant falls, This causes a problem of scratches on the surface of the glass substrate.

Patent Document 1: Japanese Patent Application Laid-Open No. 7-132986

Patent Document 2: Japanese Patent Application Laid-Open No. 2005-8194

Patent Document 3: Japanese Patent Application Laid-Open No. 7-257681

Patent Document 4: Japanese Patent Application Laid-Open No. 57-91272

Problem to be solved by invention

SUMMARY OF THE INVENTION In view of the above-described situation, the present invention is a container for transporting a substrate, the main part of which is formed from a foamed synthetic resin, which is not only easy to mount and take out the glass substrate to the container body, but also to unintentional up and down direction of the substrate during transport. It is an object of the present invention to provide a substrate transport container and an inner wall structure thereof, which prevent movement and reduce the disadvantages of causing cracking and breaking of the substrate.

Moreover, an object of this invention is to provide the board | substrate carrying container which does not produce the board | substrate damage resulting from the fall of a desiccant even when a desiccant is accommodated.

Means for Solving the Invention

The substrate transport container according to the present invention for achieving the above object,

A box whose upper part is opened by a bottom wall part, a pair of long side wall parts and a pair of short side wall parts integrally provided from the bottom wall part. Iii) a container body made of synthetic resin formed by opening one side in a shape;

In the container for transporting the substrate consisting of a lid made of a foamed synthetic resin freely detachable to cover the opening of the one side of the container body,

The container body,

An outer container in which an inner insulation plate made of a foamed synthetic resin is formed from a foamed synthetic resin in advance so that the bottom wall portion and the pair of long side walls and the pair of short side walls respectively integrally formed from the bottom wall portion constitute a double wall made of a heat insulating material. In addition to being detachably arranged inside the main body, a resin sheet member previously formed as a separate sheet is detachably attached to the inner heat insulating plate.

According to the invention according to the related configuration,

Since it is possible to form a small gap between the resin sheet material and the sheet made of a foamed synthetic resin, it is possible to exert a buffering effect between the resin sheet and the plate material by interposing such voids.

In addition, even if the substrate itself vibrates by an impact, it is possible to absorb such vibrations by deformation in an acceptable range of the resin sheet. Therefore, in normal conveyance, even if the substrate moves unintentionally, it is possible to prevent the occurrence of cracking and cracking. In addition, since the inner heat insulating plate and the resin sheet are not all formed as a box-shaped integral part, but all are in the form of a single plate, it is easy to form and it is easy to maintain the accuracy of the dimensions.

Here, it is preferable that the bottom-up member made of a foamed synthetic resin previously formed on the bottom surface of the inner heat insulating material disposed on the bottom of the container body is detachably freely and selectively disposed.

According to this structure, if the floor raising member is used as needed, the accommodation of glass substrates of different sizes is also applicable. In addition, since the cushion action is also exhibited, it is possible to improve impact resistance.

Further, in the present invention, the positioning fixing means for uniquely determining the mutual assembly position between the bottom surface of the container body and the inner heat insulating material disposed thereon, and between the inner heat insulating material disposed on the bottom surface and the bottom raising member. It is preferable that this is constituted.

According to such a structure, assembling / disassembly work of an inner heat insulating material, a bottom raising member, etc. with respect to the bottom of a container main body becomes easy.

In addition, the said positioning fixing means may be comprised from the convex part and the recessed part.

According to such a structure, a design is easy and it is easy to match a position.

In addition, a recess for accommodating the desiccant may be formed in the inner heat insulating plate disposed on the bottom of the container body.

If a desiccant is accommodated in such a recess, it is possible to protect a glass substrate from the moisture etc. during conveyance.

Moreover, it is preferable that the slit communicating with the said recess is formed in the resin sheet arrange | positioned at the upper part of the inner side heat insulation board arrange | positioned at the bottom face of the said container main body.

According to this structure, the desiccant can be easily taken in and out.

In addition, the internal structure of the substrate transport container according to the present invention for achieving the above object,

A container body made of synthetic resin having one side opened in a box shape having an open upper portion,

Consists of a lid made of synthetic resin freely detachable to cover the opening of the one side of the container body,

In an inner wall structure of a container for transporting a substrate, a glass plate having a substantially short flat plate shape is conveyed in a state of being held by a substrate latch formed at least three spaces apart from a bottom wall and a pair of side walls in the container body.

The substrate accommodating portion in the container body is composed of an inner heat insulating plate made of foamed synthetic resin in the form of a substantially flat plate and a thin sheet member covering the surface of the inner heat insulating plate, and concave convex of the inner heat insulating plate and the substrate-based region formed on the sheet member. A cushion gap is secured between the surfaces.

According to the present invention according to the related constitution, it is possible to exert a buffering action between the sheet member and the inner heat insulating plate by the cushioning gap between the sheet member and the inner heat insulating plate made of the foamed synthetic resin.

In addition, even if the glass substrate vibrates by impact, it is possible to absorb such vibrations by deforming within the allowable range of the sheet member.

Therefore, in normal conveyance, it is possible to prevent the occurrence of cracking and cracking even if the glass substrate moves unintentionally. In addition, since the inner heat insulating plate and the sheet member are not formed as a box-shaped integral product, but are in the form of a single plate, the inner heat insulating plate and the sheet member are easy to form and easily maintain the accuracy of the dimensions.

In the present invention, the lid is composed of a lid body made of foamed synthetic resin and a lid sheet member covering the inner surface of the lid body, wherein the substrate receiving tool is formed at a predetermined pitch on the ceiling of the lid body. In addition, a substrate receiving device corresponding to this is formed in the lid sheet member detachably attached to the inner surface of the lid body, and the substrate receiving apparatus of the lid body and the substrate receiving apparatus of the lid sheet member are formed. It is preferable that the clearance gap for cushion is secured in between.

According to such a structure, since the clearance gap for a cushion is secured also in the lid side on which the upper part of a glass substrate is latched, it is possible to absorb a shock and prevent a split and a crack, especially when a glass substrate vibrates up and down. .

In addition, the substrate transport container according to the present invention for achieving the above object,

A container body made of synthetic resin having one side opened in a box shape having an open upper portion,

Consists of a lid made of synthetic resin freely detachable to cover the opening of the one side of the container body,

An approximately short flat glass substrate is transported to a substrate conveying container which is held in a state of being held at a substrate latching hole formed at least three spaced apart from at least three bottom walls and a pair of side walls in the container body. In

The container body,

An outer container in which an inner insulation plate made of a foamed synthetic resin is formed from a foamed synthetic resin in advance so that the bottom wall portion and the pair of long side walls and the pair of short side walls respectively integrally formed from the bottom wall portion constitute a double wall made of a heat insulating material. In addition to being detachably arranged inside the main body, a resin sheet member previously formed as a separate sheet is detachably attached to the inside of the inner heat insulating plate.

The inner heat insulating material is characterized in that a gradient is made so that the thickness becomes thinner from the position at the opening of the container body to the inside.

According to the present invention according to the related constitution, since the distance of the substrate engaging region on the opening side is set to be short in the vicinity of the entrance, it is possible to prevent vibration of the glass substrate in the vertical direction. It is possible to prevent the occurrence of cracking and cracking.

In addition, the substrate transport container according to the present invention for achieving the above object,

A container body made of synthetic resin having one side opened in a box shape having an open upper portion,

Consists of a lid made of synthetic resin freely detachable to cover the opening of the one side of the container body,

A substrate transport container in which a substantially short flat plate-shaped glass substrate is conveyed in a state held at a substrate latching region formed at least three spaced apart from at least three bottom walls and a pair of side walls in the container body.

An inner heat insulating plate made of a foamed synthetic resin is disposed on the bottom wall portion of the container body, and a resin sheet member formed separately as a separate sheet is detachably mounted thereon.

In the inner heat insulating plate disposed on the bottom surface of the container body, a recess is formed in the thickness direction, and a slit communicating with the recess is formed in a sheet member freely detachable from the upper portion of the inner heat insulating plate. I am doing it.

Moreover, it is preferable that the drying agent is accommodated in the recess of the said inner heat insulating material through the slit formed in the said sheet member.

According to the present invention by the related constitution, it is possible to protect the glass substrate from moisture and the like during conveyance by the desiccant. In addition, the desiccant is easy to enter and exit, and the desiccant does not fall on the surface of the glass substrate.

In addition, the container for transporting the substrate of the present invention for achieving the above object is a box shape in which the upper portion of the foamed resin product of one direction is opened is opened, the substrate support on the inner circumferential wall opposed to the open box shape of the upper portion The container body portion is formed,

A lid part made of a foamed resin, which is detachably attached to cover the opening of the container body part;

A wall substrate supporting resin sheet provided with at least an inner circumferential wall surface at which the substrate supporter is formed and opposed to the inner circumferential wall surface so as to form a small void, and which has a surface shape substantially the same as that of the inner circumferential wall surface; ,

The said resin substrate for wall substrate support is hold | maintained at the said inner peripheral wall surface by fall prevention means.

In addition, the container for transporting the substrate of the present invention for achieving the above object is a box shape in which the upper portion of the foamed resin product of one direction is opened is opened, the substrate support on the inner circumferential wall opposed to the open box shape of the upper portion The container body portion is formed,

A lid part made of a foamed resin, which is detachably attached to cover the opening of the container body part;

A resin sheet for supporting a wall surface substrate, on which at least the substrate support is formed, the inner circumferential wall surface of the container body portion is formed so as to form a small gap in the inner circumferential wall surface, and the surface shape is substantially the same as the inner circumferential wall surface;

It is a plate-shaped plate made of foamed resin having a substrate support formed on the surface thereof, which is housed in the bottom of the housing body part in the container body part, and holds the substrate jointly with the substrate support formed in the drainage wall of the container body. It characterized in that it comprises a bottom lifting member for preventing the fall of the support resin sheet.

Furthermore, the bottom raising member of the substrate transport container of the present invention is preferably housed in a container body made of foamed resin in the bottom raising member used in the same manner as the substrate transport container as described above. In addition to adjusting the storage depth in the part, the holder for holding the substrate to be stored in the container body is co-operated with the resin sheet for wall substrate which is formed by forming a small gap in the opposing wall surface in the container body. It is characterized in that it is in the form of a plate made of foamed resin formed in the.

The container for carrying a substrate of the present invention is provided with a holding tool for holding the stored substrate on a pair of side wall surfaces that face the container body portion formed of foamed resin, and on the surface of such side wall surfaces, A resin sheet for supporting a wall substrate provided with a surface shape substantially the same as the surface shape of the side wall surface is arranged to form a small gap with the side wall surface.

Thus, by arranging the resin sheet for supporting the wall substrate so that a small gap is formed without fixing it to the side wall surface, the vibration generated by the substrate stored between the container body portion and the resin sheet for supporting the wall substrate is absorbed. A buffer space is formed.

In general, by using a container for transporting a substrate containing an optical body made of foamed resin, impacts and the like are absorbed from the outside by the optical body part made of foamed resin, and the stored substrate Although securely preserved, in such a substrate transport container, the substrate stored therein is fixed by a holder formed on the inner wall of the housing, and thus does not have any mitigation means for vibration generated by the substrate itself.

In the substrate conveyance container of the present invention, a resin sheet for supporting a wall surface substrate provided with a shape substantially the same as the surface shape of the inner circumferential wall surface is disposed on an inner wall surface on which a holder for holding a substrate of the container body portion made of foamed resin is formed. As a result, the shock from the outside and the vibration generated by the substrate housed in the container are absorbed by the buffer gap formed between the resin sheet for supporting the wall substrate and the inner wall surface where the holder is formed, so that the adjacently stored substrate It is possible to store or move in a more stable state.

That is, for example, the glass substrate for liquid crystal is very thin, and is bent by very slight stress. By using the container for transporting the substrate formed of the foamed resin, most of the stress applied from the outside is absorbed by the housing portion made of the foamed resin, but the internal stress generated by the bending of the stored substrate or the like is applied to the inner wall surface of the housing. It is difficult to absorb with only the holder formed in the.

In the case of handling a substrate material or a substrate such as a liquid crystal substrate, the substrate material or the substrate stored therein is carefully handled so as not to be damaged, and damage to the substrate material or the substrate may be caused by damage to the substrate material or the substrate rather than careless damage. Breakages caused by internal stresses are much more frequent.

In particular, as liquid crystals are enlarged, this tendency is increasing. The breakage of the substrate material or the substrate due to such internal stress is often caused by this self weight being applied to the holding portion.

In the substrate transport container of the present invention, a resin sheet for supporting a wall substrate is formed by forming a small gap in the surface of a holder formed on a pair of sidewalls facing the container body portion at the portion of the substrate material or substrate held therein. Is arranged, and the holder of the resin sheet for supporting the wall substrate is not fixed to the holder formed in the container body portion.

Therefore, excessive deformation of the holder of the resin sheet for supporting the wall substrate is prevented by the holder formed in the container body. That is, the stored substrate material or substrate has some degree of flexibility, and the movement of the substrate material or the substrate within this flexibility range does not damage the substrate material or the substrate.

When transporting the substrate material or the substrate, the substrate material or the substrate must be fixed, but when the substrate is fixed, the stress is concentrated on the fixed portion (specifically, the substrate material sandwiched by the holding tool or both ends of the substrate). .

Therefore, if the damage of the substrate material or the substrate during conveyance excludes damage caused by careless handling such as falling, such damage of the substrate material or the substrate is more likely to occur at both ends of the end portions sandwiched as described above.

In the container for transporting the substrate of the present invention, a slight gap is formed between the holder formed in the container body portion and the holder of the resin sheet for supporting the wall substrate, and the resin sheet for supporting the wall substrate is not fixed to the wall surface of the container body portion. Instead, it acts as a buffer space that accepts deformations within the flexible range having the substrate material or substrate in which these voids are stored.

Therefore, by using the container for transporting the substrate of the present invention, it is possible to prevent damage from both ends of the stored substrate material or the substrate. However, even if such a wall substrate supporting resin sheet is disposed on the side wall of the container body portion, since it is not fixed to the side wall of the wall substrate supporting resin sheet and the container body, such wall surface is not contained before storing the substrate material or the substrate. The resin sheet for substrate support may fall in a container.

Such a substrate carrying container is used by a substrate material or a substrate maker handling the substrate, and when the resin sheet for supporting the wall substrate falls in the container in the process of reaching the substrate maker or the like from the manufacturer of the substrate carrying container, As described above, it is not possible to stably supply a substrate transport container having excellent characteristics.

In particular, in a substrate maker or the like, a substrate material or a substrate is often stored in such a substrate transport container and transported by an automatic device or the like, and a holder for holding the substrate material or the substrate, such as the substrate transport container of the present invention, is carried out. When the sidewall shape of the foamed resin body body and the surface shape of the wall substrate support resin sheet disposed on the surface become substantially the same, it is difficult to recognize the presence or absence of the resin sheet for wall substrate support mechanically. have.

In the container for conveyance of the substrate of the present invention, the fall prevention means of the wall substrate support resin sheet is formed so that the wall substrate support resin sheet disposed on the side surface on which the holder of the container body portion is formed does not fall.

By providing the fall prevention means of the resin sheet for wall substrate support in this way, it is possible to effectively utilize the outstanding damage prevention function containing the board | substrate carrying container of this invention.

The substrate material or substrate stored as described above inevitably comes into contact with the bottom of the container body at the bottom of the container body part. However, in the container for transporting the substrate of the present invention, it is preferable to place the bottom-up member in the container body part. desirable.

On the surface of such a bottom-up member, the holder which holds the board | substrate material or board | substrate which was collectively stored with the holder which was formed in the inner surface of the container main part is formed.

And it is preferable to arrange | position the bottom board | substrate support resin sheet which has a shape substantially the same as the surface shape of such a floor raising member, and such a bottom board support resin sheet | seat has a space | gap with which the resin sheet for base board support of foamed resin is few. It is preferable to form and arrange | position.

The voids thus formed are in contact with the stored substrate material or the bottom of the substrate, and furthermore, since the bottom substrate supporting resin sheet is not fixed to the raised member formed of the foamed resin, the stored substrate material And nothing keeps the substrate tight.

Therefore, even if the substrate material and the substrate held by the resin substrate for supporting the bottom substrate are deformed within the range of availability of such substrate material or substrate, it is possible to prevent such stress from concentrating on the bottom of the substrate or the like.

And such a bottom-up member becomes a very favorable fall prevention means with respect to the resin sheet for low wall board | substrate support. In addition, the bottom raising member is capable of adjusting the storage depth in such a substrate transport container by forming a bottom raising member having various thicknesses, and by appropriately selecting the thickness of the bottom raising member, or By appropriately assembling and using a plurality of different raising members, since the depth can be adjusted by the raising member in one kind of container, it is possible to stably convey substrate materials or substrates of different sizes.

In this way, the substrate material and the holding portion of the substrate become three positions of the pair of sidewalls and the bottom raising member (or the holding portion of the bottom substrate supporting resin sheet) disposed at the bottom, and more securely the substrate material or the substrate. It is possible to hold and convey.

Effects of the Invention

In the container for board | substrate conveyance which concerns on this invention, the workability of taking out the apparatus of a board | substrate and a board | substrate becomes favorable.

In addition, since the cushioning effect is exerted in the gap formed between the resin sheet and the inner heat insulating plate, the resin sheet may be concave and deformed even when the force is transmitted to the resin sheet slightly up and down due to vibration during transportation. It is possible to absorb that power.

As a result, cracking of the substrate and the like can be prevented as much as possible. In addition, when the transmission of the force by vibration is released, it is possible to return the deformed resin sheet to its original state. In addition, by using the floor raising member, it is possible not only to improve the cushioning function but also to convey the glass substrates of different sizes in one substrate container.

In addition, in the container for transporting the substrate of the present invention, since the inner heat insulating plate and the resin sheet are not integrally formed such as a hexahedron, all of them are formed separately, so that the accuracy of the formation and the size can be easily improved.

In addition, for achieving a predetermined dimensional accuracy, it is possible to adjust between the inner heat insulating plate and the resin sheet without managing all the dimensional accuracy, and to increase the degree of freedom in design. In the case of accommodating the desiccant, if the desiccant is accommodated inside via the slit together with the tape or the like, it is possible to prevent the desiccant from falling and damaging the substrate.

Moreover, if the clearance gap for a cushion is ensured also in the lid side, it is possible to effectively absorb the impact force at the time of oscillation in an up-down direction, and to prevent a splitting crack further.

In addition, it is possible to suppress vibration in the vertical direction of the glass substrate during conveyance by providing a gradient such that the thickness of the inner heat insulating material faces inward and becomes thinner. Thereby, generation | occurrence | production of the crack, etc. of the glass substrate resulting from this can be prevented.

Further, in the container for transporting a substrate according to the present invention, when the desiccant is accommodated, if the desiccant is contained inside the slit in addition to the tape or the like, it is possible to prevent the desiccant from falling and damaging the substrate. have.

In the container for carrying a substrate of the present invention, a resin sheet for supporting a wall surface substrate having a shape substantially the same as the surface shape of such a wall surface is disposed on the wall surface of the container body portion holding the substrate so as to form a small void in the wall surface. Means for preventing the resin sheet for supporting the wall surface substrate from falling in the container are provided.

By arranging the resin sheet for supporting the wall substrate on the wall surface through a small gap, the stress generated by the substrate itself stored in this container can be absorbed by the void, and the holding portion of the storage substrate can be separated. It is possible to significantly reduce the occurrence of substrate damage that causes (iii). That is, a slight void formed between the side surface of the container and the resin sheet for supporting the wall substrate serves as a buffer space for internal stress caused by warpage of the substrate itself to be stored.

Thus, in the container for board | substrate conveyance of this invention, it is not restrained even if the resin substrate for wall substrate support arrange | positioned on this surface is not in close contact with the side surface of the container in which the board | substrate holding tool was formed, and this wall substrate support Since the fall prevention means of the resin sheet is provided, it is possible to keep the resin sheet for supporting the wall substrate to form a constant gap with respect to the wall surface and to stably maintain it.

In addition, in the container for transporting the substrate of the present invention, a bottoming member having a substrate holder is disposed at a bottom portion which is always in contact with the stored substrate, and is preferably approximately the same as the surface shape of the bottoming member. Since the resin substrate for supporting the bottom substrate having a shape is disposed so as to form a small gap on the surface of the bottom lifting member, it is possible to reduce the occurrence of deformation such as warpage generated in the stored substrate.

In addition, it is possible to act as a buffer space for internal stress generated in the substrate itself by allowing a slight void formed between the bottom raising member and the bottom substrate supporting resin sheet to significantly reduce the occurrence of breakage of the storage substrate. It is possible.

In addition, by using this bottom raising member, it is possible to adjust the depth of the storage space in a container according to the board | substrate to be stored, and also the support which has a buffer space | gap which has the same shape as the above also inside the lid. By forming, it is possible to store a board | substrate more safely.

According to the container for transporting the substrate of the present invention, it is possible to protect the storage substrate against impact from the outside from being formed of the foamed resin, and also to prevent stresses in the substrate caused by its own weight or such warpage of the stored substrate. It is possible to absorb and prevent breakage of the substrate.

In addition, as described above, the resin sheet for supporting the wall substrate is inserted into the container body part made of foamed resin in the same shape as a hexahedron (box shape) having an opening, and the flexibility of the support tool is impaired, and the wall surface and the wall substrate are Even if a gap is formed between the supporting resin sheets, the gap does not function as a buffer gap for the containment substrate.

In addition, when attempting to insert the box-shaped container body part, the insertion of the box becomes remarkably difficult, and the working efficiency is very bad.

And, in the present invention, a plurality of formed plain shapes so as to maintain the flexibility of the support of the resin substrate for wall substrate support, which is basically given the same shape as the support formed on the wall surface of the container body portion. The resin sheet for supporting the wall substrate on the wall inside the container body part made of foamed resin by disposing a plurality of independent wall surface substrate supporting resin sheets for each wall surface, for example, for each support It is possible to arrange easily.

Moreover, since the container for substrate conveyance of this invention is provided with the fall prevention means, it is possible to arrange | position the resin substrate for wall surface support which was arrange | positioned in the stable state at each side surface.

In addition, by using the bottom raising member, it is possible to hold the storage substrate not only on the side but also on the bottom face, and furthermore, since the bottom raising member has a buffer property of the internal stress of the substrate, it is possible to transport the substrate more safely. Do.

Moreover, since it is possible to adjust the storage depth of a container, it becomes possible to apply the container for single board | substrate conveyance to the conveyance of various kinds of board | substrates. In addition, this bottom raising member is a very good fall prevention means for the side wall substrate holding resin sheet disposed on the side wall of the container body portion. Moreover, the conveyance safety of a board | substrate also becomes high by reducing the excess space in a container.

In addition, the container for transporting the substrate of the present invention is made of foamed resin, and it is possible to protect the storage substrate against impact from the outside, and to prevent dew or the like caused by a temperature difference from the outside. to be.

1 is a front view of a substrate transport container according to an embodiment of the present invention,

FIG. 2 is a plan view of the container body when the upper lid part is removed from the container for transporting the substrate of FIG.

3 is an exploded perspective view of the container for transporting the substrate shown in FIG. 1;

4 is a cross-sectional view when FIG. 1 is cut with a line in a long life direction,

5 is a cross-sectional view taken along line B-B of FIG. 4,

6 is an enlarged perspective view of the floor raising member shown in FIG. 3;

FIG. 7 is an exploded perspective view illustrating an assembly of an inner heat insulating plate and a sheet member disposed in the bottom wall portion of FIG. 3;

8 is an exploded perspective view showing the assembly of the inner heat insulating plate and the sheet member disposed on the long side wall portion of FIG.

9 is an exploded perspective view showing the assembly of the inner heat insulating plate and the sheet member disposed on the short side wall portion of FIG.

10 is a side view of the inner heat insulating material for the long side wall,

11 is a side view of an inner heat insulating material for short side walls;

FIG. 12 is an enlarged cross-sectional view in a state in which the inner heat insulating material and resin sheet for the short side wall shown in FIG. 9 are assembled, and a glass substrate is disposed at a portion of g;

13 is an exploded perspective view of a substrate transport container according to another embodiment of the present invention;

14 is an exploded perspective view of a substrate transport container according to another embodiment of the present invention;

15 is an exploded perspective view showing an example of the floor raising member of the present invention;

16 is an explanatory view showing an enlarged state of the substrate support;

FIG. 17 shows an example of an embodiment in which the surfaces of the other wall surfaces 123a and 123b are protruded to prevent the wall substrate supporting resin sheets 122a and 122b from falling over.

18 is a view showing the structure of a conventional transport container, Figure 18 (A) is a cross-sectional view of the polyethylene film before heating, Figure 18 (B) is a cross-sectional view of the heated protective film, Figure 18 (C) is a heated protective film And a cross-sectional view showing a coupling structure between the foam and the inner wall of the foam,

19 is a schematic diagram of a case where a glass substrate is inserted into a conventional transport container.

Explanation of the sign

2: substrate transfer container

4: container body

4a: bottom wall

4b, 4c: Long side wall

4d, 4e: short side wall

4f: opening

4g: entrance

4h: horizontal protrusion

4i: protrusion

6: lid

6a: concave

8: floor raising member

8a: protrusion

8b: recess

10: inner heat insulating plate for barrier

12: inner heat insulating plate for single wall

14: sheet member

16: sheet member

18: sheet member

20: inner heat insulating plate for bottom

20a: Board-based district

21: stone

22: concave

50: external container

110: (first) substrate transport container

111: (second) substrate transport container

112: container body

113a, 113b: a pair of walls

114: opening

115: block portion

116: substrate support

116a: Supporting convex tank

117: bottom

118: seat fitting slit

119: slight void

122a, 122b: Resin sheet for wall substrate support

123a, 123b: another pair of walls

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

1 is a front view of a substrate transport container according to an embodiment of the present invention, Figure 2 is a plan view of the container body when the lid is removed from the substrate transport container shown in FIG. FIG. 3 is an exploded cross-sectional view of the substrate transport container shown in FIG. 1, FIG. 4 is a cross-sectional view in the cut direction of the substrate transport container, and FIG. 5 is a cross-sectional view in the long life direction of the substrate transport container. .

If the container for transporting the substrate of this embodiment is schematically described, a plate-shaped heat insulating material is arranged in a two-layered structure inside a box-shaped outer container made from a foamed synthetic resin, and a resin sheet is disposed on the entire inner surface of the inner side thereof. .

That is, as shown in Figs. 1 and 2, the container 2 for transporting the substrate of the present embodiment includes a container body 4 made of a foamed synthetic resin having one side open and a container body 4 of the container body 4; It consists of a lid 6 made of foamed synthetic resin freely detachable to cover the upper opening 4f. In addition, in the following description, the outer container 50 of the container main body 4 is the outermost outermost part in the container main body 4 which removed the lid 6 from the container 2 for board | substrate conveyance. It shows the part of the foamed synthetic resin of the square cylinder shape that the upper part constituting the opening.

That is, the outer container 50 made of the foamed synthetic resin constituting the outermost part of the container body 4, as shown in Figs. 1 and 3, the band-shaped concave (22), (22) on the outer surface Is formed. This strip-shaped recess 22 is formed continuously in the recess 6a, 6a formed in the outer surface of the lid 6. As shown in FIG. When the container body 4 and the lid 6 are integrally assembled into the recess 22 and the recess 6a, the combined bands are packed through.

The outer container 50 is a pair of integrally assembled from the bottom wall portion 4a in the same manner as the pair of long side wall portions 4b and 4c integrally assembled from the bottom wall portion 4a and the bottom wall portion 4a. It consists of short side wall parts 4d and 4e.

In the inlet portion 4g of the outer container 50, as shown in FIGS. 3 to 5, horizontal protrusions 4h are formed in the horizontal direction. Since the concave hole (not shown) formed in the inner peripheral surface of the lid 6 is fitted to this horizontal protrusion 4h, the lid 6 is tightly fitted to the container main body 4, and fall-out is prevented.

Although the inner wall surface of the periphery 4 of the outer container 50 is formed in substantially flat surface, as shown in FIG. 5, the two projections 4i are shown in the upper surface of the bottom wall part 4a of the outer container 50. As shown in FIG. ) And 4i are formed at a predetermined interval apart.

The outer container 50 has a plate-shaped inner heat insulating plate 20, 10, on the inner wall side of the bottom wall portion 4a, the pair of long side wall portions 4b, 4c, and the pair of short side wall portions 4d, 4e. 10, 12 and 12 are arrange | positioned, respectively. Moreover, the bottom raising member 8 is selectively disposed on the bottom wall portion 4a.

When the bottom raising member 8 is disposed, the inner heat insulating plate 20 is disposed thereon. Since the bottom raising member 8 is made from a foamed synthetic resin having a predetermined plate thickness, as shown in an enlarged view in FIG. 6, by this, if the plate-shaped bottom raising member 8 is prepared, the bottom raising member ( In the case of 8), and not otherwise, it is possible to adjust the height of the space inside the container in two stages. Therefore, it is possible to accommodate substrates of different sizes.

In addition, a pair of projections 8a and 8a are formed on the upper surface of the floor raising member 8 at a predetermined interval apart. The distance between these protrusions 8a and 8a is formed to be equal to the distance between the protrusions 4i and 4i of the outer container 50. Moreover, on the back surface of the bottom raising member 8, it is located just under the projection 8a, and recessed part 8b, 8b is formed.

Therefore, if the bottom raising member 8 is installed inside the outer container 50, the recess 8b of the bottom raising member 8 is located in the projection 4i of the outer container 50, and Is fitted. As a result, the bottom raising member 8 is provided so as not to move with respect to the outer container 50.

On the other hand, each inner side of the bottom inner heat insulating plate 20 disposed inside the outer container 50, the inner heat insulating plates 10, 10 for the long side walls, and the inner heat insulating plates 12, 12 for the short side walls. The surface is covered with the sheet members 18, 14, 16 made of resin, respectively.

In addition, since these resin sheet members 18, 14, 16 have almost no thickness, it is shown integrally with the inner side heat insulating plates 20, 10, 12 in FIG. 2, FIG. 4, FIG.

FIG. 7 shows the relationship between the inner heat insulating material 20 and the sheet member 18 with respect to the bottom wall portion, FIG. 8 shows the relationship between the inner heat insulating material 10 and the sheet member 14 with respect to the long side wall, and FIG. 9. Shows the relationship between the inner heat insulating material 12 and the sheet member 16 with respect to the short side wall, respectively.

Hereinafter, each of these components will be described in detail.

As shown in FIG. 7, in the bottom wall part, attachment / detachment is provided freely so that the thin sheet member 18 made of resin may cover the upper surface of the inner side heat insulation board 20 for bottom surfaces. The sheet member 18 made of resin becomes a recess into which the inside enters when viewed from the back side. On the contrary, the surface shape of the sheet member 18 is formed in substantially the same shape as the outer shape of the inner heat insulating material 20.

In the bottom inner heat insulating material 20, a plurality of protrusions 21 are formed on the upper surface, whereby the substrate holding regions 20a are formed between the adjacent protrusions 21 at a predetermined pitch.

On the other hand, the recessed part 20b extended in the horizontal direction is formed in the center part and the both ends by the pair of short sides of the inner side heat insulating material 20, and the recessed part is formed in the intermediate part of this convex part 20b.

And by putting a finger about this recess easily, work between assembling and detaching becomes easy. On the other hand, the convex part 20c is formed in the center part at the long side of the inner side heat insulating material 20, and 20 d and 20 d are formed in both sides of the convex part 20c. This concave 20d is used as a storage space for a desiccant, as will be described later.

On the other hand, on the outer surface of the thin resin sheet member 18, which is detachably attached to the upper surface of the bottom inner heat insulating material 20, a recess corresponding to the protrusion 21 of the inner heat insulating material 20 (state of FIG. 7). When viewed from the outside, the projection 19 is protruded to the outside, the rear side is a concave) is formed at predetermined intervals.

In addition, on one long side of the sheet member 18, slits 23 and 23 that constitute Y-shapes are formed on both sides, and such a slit 23 is interposed so as to allow a finger to enter therein. And when such a slit 23 is formed, when covering the sheet | seat member 18 to the inner side insulating board 20, a drying agent is applied to the recess 20d of the inner side insulating board 20 through the slit 23. It becomes possible to put. In addition, the shape of the slit 23 is not limited to this Y-shape.

Next, the structure of the long side wall will be described with reference to FIGS. 8 and 10.

In the long side wall, the inner side surface of the sheet member 14 is formed in substantially the same shape as the outer shape of the inner side heat insulating plate 10. That is, on the surface of the inner heat insulating material 10, a plurality of thin ring-shaped stone bases 10a (3 x 5 = 15 in the embodiment) are formed.

In addition, the range of the formation area T (A x B) surrounding this protrusion 10a is slightly thicker than the outer peripheral part R part.

As a result, the inner surface of the inner heat insulating plate 10 is provided with scattering protrusions 10a interspersed on the central surface of the inner heat insulating plate 10, and at the same time, the thickness of the forming region T is set thicker than the surroundings. It is prevented from forming.

On the other hand, the plate thickness of the outer circumferential portion (R) of the inner heat insulating plate 10 is formed slightly thinner as shown from the top to the bottom (D> d). As a result, the shape of the inner heat insulating plate 10 is formed so that the tip portion near the bottom wall portion is slightly pointed.

The sheet member 14 has a slightly larger outer diameter so as to cover the inner heat insulating plate 10. The portion corresponding to the projection 10a of the inner heat insulating plate 10 is not an annular recess but is made of a recess surrounded by the longitudinal and horizontal lattice 32 (the line taking the edge).

Moreover, when the line of this grating 32 is seen from the inner side heat insulation board 10 side with respect to FIG. 8, it protrudes to the inner side heat insulation board 10 side, and is seen. In addition, when the tongue piece 14a provided in the upper edge part of the sheet member 14 is bent in the back part of the inner side heat insulation board 10, the position which cannot move with respect to the inner side heat insulation board 10 is determined.

Next, with reference to FIG. 9, FIG. 11, and FIG. 12, assembly of the inner side heat insulation board 12 of the short side wall and the sheet member 16 is demonstrated.

First, as shown in Fig. 9, a plurality of substrate counter portions 12a are formed continuously in the longitudinal direction on the inner side heat insulating plate 12 for the short side wall. The width f of the substrate holding part 12a is the same as the upper side and the lower side.

However, as shown in Fig. 11, the thickness of the inner heat insulating plate 12 is different in thickness at the top and the bottom, and is formed slightly thinner as it goes from the top to the bottom (E> e). In this way, the inner heat insulating plate 12 also has the same shape as that of the inner heat insulating plate 10 so that the tip portion is slightly pointed.

The thin resin sheet member 16 is formed to have a larger outer diameter than the inner heat insulating plate 12 so as to cover the surface of the inner heat insulating material 12. In addition, the width | variety g of the sphere 16a is set similarly to the upper side and the lower side.

As shown in FIG. 12, the sheet member 16 is secured with respect to the outer surface of the inner heat insulating material 12. That is, the cushion gap H is secured in the concave convex surface of the inner heat insulating material 12 and the sheet member 16.

Therefore, when the board | substrate is fitted in the part of g, even if a board | substrate vibrates in the left-right direction by the cushion gap H, the board | substrate movement in this left-right direction is attained. In addition, even if the substrate vibrates in the vertical direction in the state of FIG. 12, the substrate can be moved in the vertical direction.

As a result, the cushion gap H is secured between the inner heat insulating material 12 and the sheet member 16 so that the substrate can be moved even when a large force is suddenly applied to the container for transporting the substrate. do. In addition, when this sudden force disappears, the deformation | transformation of the sheet member 16 also returns to an original state.

As shown in FIG. 9, when the sheet member 16 is mounted on the outer side of the inner side heat insulating material 12, the tongue piece 16b of the upper edge part is bent to the back part of the inner side heat insulating plate 12, and the inside It is the same as the sheet member 14 that the position is immovably determined with respect to the heat insulation board 12.

Here, the inner wall surface of the outer container 50 provided from foamed synthetic resin is formed perpendicularly with respect to the bottom face. Therefore, as shown in FIG. 3, when the inner heat insulating plate 10 and the inner heat insulating plate 12 are inserted into and installed on the inner wall surface of the outer container 50, the closer to the upper opening of the container body 4. As a result, the half distance between the pair of side walls facing each other becomes small, and the half distance increases toward the inside (bottom) of the container body 4.

Therefore, when the glass substrate is inserted so as to span between the pair of short side walls in the container body 4, the front end portion (end in the first entering direction) side of the glass substrate is inserted in a large space, and the rear end portion (hand of the glass substrate) is inserted. The end) side held in the back and lifted from the back side is inserted into a narrow space near the entrance.

Although each component of the board | substrate container 2 which concerns on a present Example is comprised as mentioned above, the assembly procedure is demonstrated below. In addition, the assembly order is not limited to this. In addition, in the following description, the case used for the floor raising member 8 is demonstrated.

First, the inner heat insulating plates 10, 10 and thin sheet members 14, 14 made of foamed synthetic resin disposed on the pair of long side walls, and the inner heat insulating plates 12, 12 of the pair of single side walls ) And thin sheet members 16 and 16 are assembled in advance.

In the same manner, the bottom inner heat insulating plate 20 and the thin sheet member 18 are assembled in advance. In this way, if each unit disposed inside the outer container 50 is formed, first, the bottom lifting member 8 is inserted into the outer container 50. In this case, the projections 8a and 8a of the bottom raising member 8 are arranged to meet the projections 4i and 4i of the outer container 50.

Next, the bottom surface unit, that is, the unit of the inner heat insulating plate 20 and the sheet member 18 shown in FIG. 7, is disposed on the bottom raising member 8. Thereby, a bottom face is comprised.

Next, the unit for the short side wall, that is, the unit of the inner heat insulating plate 12 and the sheet member 16 shown in FIG. 9 is assembled to the short side wall.

Further, the unit for the long side wall, that is, the unit of the inner heat insulating plate 10 and the sheet member 14 shown in FIG. 8 is assembled to the long side wall.

Thereby, all the components are assembled and the assembly of the container main body 4 is completed. When a desiccant such as silica gel is provided in the container, if a desiccant such as silica gel is inserted from the slit 23 of the sheet member 18 disposed in the bottom wall portion, the desiccant is contained in the concave 20d. It is possible.

However, since the inlet is a Y-shaped slit 23, this desiccant is prevented from inadvertently escaping outward. Therefore, when conveying from the far side, it is possible to protect the glass substrate which moves for a long time from moisture.

Thereby, the board | substrate container 2 is comprised.

The container for conveyance of the board | substrate of this Example contains the above structures, It is possible to store a board | substrate in this container, and to convey it safely.

That is, the container for transporting the substrate of the present embodiment is formed of a foamed synthetic resin having excellent impact resistance and heat resistance, so that the container body portion and the lid are formed, so that it is possible to protect the substrate from external shocks and external humidity changes. The internal stress generated by the stored substrate (primarily the stress generated by the weight of the substrate itself) can be absorbed by the flexibility of the sheet member disposed by forming a small void in the wall or the like in the container. It is possible to transport or store the substrate more safely.

Further, for example, when the glass substrate is inserted into the container body 4, the plate thicknesses of the inner heat insulating plates 10 and 12 disposed on the outer side of the container of the sheet member 16 directly contacting each part of the substrate. Since the upper portion of the opening is thicker and the thinner the lower side is, the glass substrate is easily inserted after positioning at the entrance.

Moreover, when insertion of a board | substrate is completed, since it fits in the narrow part of the upper side (opening part side), the unintentional deviation of a board | substrate from such a bend part is prevented. In addition, when the substrate is inserted, if the substrate is inserted less, the inside width becomes wider from the inlet, so that even if the substrate is slightly bent, it is possible to absorb such bending.

On the contrary, even if the vibration occurs in the container main body during transportation, and the substrate attempts to escape from the container body due to the vibration, the opening is narrowed, so that the substrate can be prevented from coming off.

In addition, even when the substrate is slightly bent and inserted, the gap H is secured between the resin sheet member and the inner inner heat insulating plate, as shown in FIG. Since the member 16 is deformed by pressing the inner heat insulating plate 12, the repulsive force does not strongly act on the substrate. Thereby, it is possible to prevent the board | substrate breaking, a crack, etc. as much as possible.

In addition, by using the bottom raising member 8, it is possible to adjust the depth of the container corresponding to the substrate to be conveyed, and it is possible to prevent extra space from being formed in the container. It is possible.

In addition, although the structure of the lid 6 is not demonstrated in detail by the said Example, this lid 6 is also formed in substantially the same way as the container main body 4. In other words, the lid 6 is different from the container body 4, and no plate-shaped inner heat insulating plate is provided.

However, a box-shaped thin sheet member with one side open is interposed inside the lid body (foam base body, foam corresponding to an outer container) made of foamed synthetic resin. As a result, the lid 6 has a double structure of a foam and a resin sheet member.

That is, when the cross section of FIG. 12 is seen from the figure of a lid, the thin sheet member 16 is fitted in the lid main body 12 made from foamed synthetic resin. In this case, the lid body 12 and the sheet member 16 are provided with substrate mounting holes, respectively, and the upper end of the glass substrate is directly in contact with the width of g.

With such a lid 6, it is possible to protect the upper end side of the glass substrate when the glass substrate is mounted. In this case, the upper end of the glass substrate is movable in the up, down, left and right directions as in the case of the container body 4.

The substrate transport container of the present invention is not limited to the above embodiment, and various improvements can be made.

For example, a gas exchange port may be provided in the container for transporting the substrate, and the air in the substrate transporting container may be replaced with an inert gas such as nitrogen gas or argon gas.

Although the container for carrying a substrate of the present invention is usually used so that the stored glass substrates stand up, in order to clarify the loading direction of such a substrate carrying container, a marking indicating the loading direction is provided on the outside of the container. It is also possible.

The container for transporting the substrate of the present embodiment is optimally used, for example, when the glass substrate is moved, but of course, it is not limited to the movement and can be used for storage and the like.

Such a substrate transport container can stably transport and store substrates such as a liquid crystal substrate, a liquid crystal glass substrate, a wiring substrate, and a circuit board.

In addition, of course, the position in which the slit 23 is provided can be increased corresponding to the number of drying agents.

Further, in the above embodiment, since the bottom raising member 8 is provided, when the drying agent is inserted from the slit 23, the drying agent is disposed on the upper surface of the bottom raising member 8, but the bottom raising member 8 When not using, a desiccant is arrange | positioned directly on the bottom face of the outer container 50.

In addition, when not using the raised member 8, it is possible to accommodate large board | substrates.

Next, a substrate transport container and a bottom lifting member according to another embodiment of the present invention will be described.

FIG. 13 is an exploded perspective view of the first substrate transport container of the present invention, FIG. 14 is an exploded perspective view of the second substrate transport container of the present invention, and FIG. 15 shows an example of the raised member of the present invention. An exploded perspective view. In addition, about the description and drawing shown below, the same code | symbol is attached | subjected to the same member.

The first substrate conveyance container 110 of the present invention includes a container body 112 made of foamed resin and a foamed resin resin lid freely opened and closed at an opening 114 of the container body 112. 145.

The container body 112 made of foamed resin has a user cylinder shape in which one direction is opened so as to store a substrate material or a substrate 160 (hereinafter referred to as "substrate" in the present invention). Include the form of.

And the board | substrate support part 116 for having the board | substrate 160 is formed in the pair of wall surface 113a, 113b which opposes the inner peripheral wall surface of this container body part 112. As shown in FIG. The substrate support 116 is a sphere formed toward the bottom 117 from the opening 114 of the container body 112.

By inserting both ends of the substrate 160 into the substrate supporting members 116 and 116 formed on the two wall surfaces 113a and 113b, the substrate 160 can stand and be stored. The substrate support 116 is formed so as to be able to store 1 to 45 sheets, preferably 2 to 20 sheets, in one substrate transport container 110.

Therefore, on the pair of wall surfaces 113a and 113b opposed to the container body 112, 1 to 45, preferably 2 to 20 substrate supports 116 are formed.

As enlarged in FIG. 16, the pitch of this board | substrate support 116, ie, the distance from the centerline of any board | substrate support 116 to the centerline of the adjacent board | substrate support 116 can be set suitably. However, although it is also possible to form narrower than 3-30 mm normally so that the some stored base material 160 may not contact, since this container body part 112 is manufactured by foam resin molding using a metal mold | die, pitch width If this becomes narrow, the shape stability of the support convex 116a which forms the board | substrate support 116 will become low.

The substrate support 116 may have a depth that can stably hold the substrate 160 stored therein, and is usually about 5 to 45 mm, preferably about 7 to 25 mm.

The substrate support 116 and the support protrusion 116a may be formed at right angles to the wall surface 113a or the wall surface 113b, respectively, and the distal end portion of the substrate support 116 may be proximal. It is also possible to form and form a taper so that it becomes wider than a base station.

The substrate supporting member 116 as described above may be formed integrally with the container body portion 112, and further includes a foamed resin plate including the substrate supporting member 116 for the container body portion 112. It is also possible to form separately from this, and it is also possible to form this board | substrate support structure attached foamed resin board by fitting the container main-body part 112 to the said wall surface.

In this case, it is required to fit the resin plate so as to form the sheet-fitting slit 118 which will be described later between the both end portions of the foam support plate with substrate support.

In this way, since the inner peripheral surface structure of the container body portion is simplified by forming the foamed resin plate with substrate support separately from the container body portion, it is easy to remove the frame after the container body portion 112 is formed. There is an advantage to doing this.

In a portion directly contacting the pair of wall surfaces 123a and 123b adjacent to the pair of wall surfaces 113a and 113b in which the substrate support 116 as described above of the first substrate transport container 110 of the present invention is formed. It is preferable that the sheet fitting slit 118 for fitting the resin sheet is formed.

In the first substrate transport container 110 of the present invention, the wall substrate support resin sheets 122a and 122b are formed on the surfaces of the pair of wall surfaces 113a and 113b on which the substrate support 116 as described above is formed. ) Is placed. The wall substrate support resin sheets 122a and 122b are formed in a shape substantially the same as the shape of the surface of the pair of wall surfaces 113a and 113b of the container body 112.

That is, the sheet surface support 126 and the sheet surface supporting convex corresponding to the substrate support 116 formed on the pair of wall surfaces 113a and 113b are formed in the wall sheet resin supporting sheets 122a and 122b. 126a has substantially the same shape as the substrate support 116 and the support protrusion 116a formed on the pair of wall surfaces 113a and 113b.

When such wall substrate support resin sheets 122a and 122b are disposed on the surfaces of the wall surfaces 113a and 113b, a slight gap between the wall substrate support resin sheets 122a and 122b and the wall surfaces 113a and 113b ( 119 is formed.

That is, the sheet-fitting slit formed at a portion of the wall substrate support resin sheets 122a and 122b directly contacting the pair of wall surfaces 123a and 123b adjacent to the wall surfaces 113a and 113b, for example. It is arrange | positioned at the surface of the wall surfaces 113a and 113b by fitting in 118.

Then, in the vicinity of the substrate support 116 formed on the wall surfaces 113a and 113b, the wall substrate support resin sheets 122a and 122b are arranged in accordance with the shape of the substrate support 116, but the wall surfaces 113a, It is not fixed to 113b), and a slight space | gap 119 is formed between both.

With respect to the substrate transport container 110 of the present invention, the slight voids 119 formed between the wall surfaces 113a and 113b and the wall substrate support resin sheets 122a and 122b are formed in the substrate 160 itself. It acts as a buffer space for absorbing deformation of the substrate 160 due to internal stress or the like, and it is possible to effectively prevent damage to the containment substrate 160.

Such voids 119 may be very small. For example, when the substrate 160 is stored, the wall surface and the sheet are usually about 0.01 to 1 mm, preferably about 0.01 to 0.7 mm, particularly preferably. Preferably within the range of 0.01 to 0.5 mm. That is, in the case where the substrate support 116 and the sheet surface support 126 formed on the wall surfaces 113a and 113b have the substrate 160, the substrate 160 may be caused by distortion or warpage generated in the substrate 160. If the variation is absorbed by the void 119, the width of the slight void 119 is the variation width corresponding to the amount of warpage of the substrate 160 because the substrate 160 is usually formed of glass or the like. It should be approximately equal to

In this way, the resin substrates 122a and 122b for wall surface support are disposed on the surfaces of the pair of wall surfaces 113a and 113b on which the substrate support 116 is formed so as to form a small gap as described above. Although it is possible to effectively prevent damage to the substrate 160 due to stress caused by warpage or distortion occurring in the substrate 160 itself, the resin substrates 122a and 122b for supporting such wall substrates are the substrate 160. ) Is often stored in a container before storing.

Particularly, in the present invention, the wall substrate supporting resin sheets 122a and 122b are arranged in the container body 110 as an independent sheet which is not in contact with the resin sheet covering the other wall surface, so that the wall substrate supporting resin sheets 122a and 122b can be arranged very efficiently. Although it is possible to arrange the resin sheets 122a and 122b for wall surface support, the sheet tends to fall.

In the substrate conveyance container 110 of the present invention, the fall prevention means is formed in order to prevent the wall substrate supporting resin sheets 122a and 122b from falling as described above.

As described above, the sheet fitting slit 118 formed at a portion directly contacting the pair of wall surfaces 113a and 113b on which the base support 116 is formed and the adjacent pair of wall surfaces 123a and 123b is also prevented from falling. In the present invention, however, it is preferable that a fall prevention means is formed on the pair of wall surfaces 123a and 123b adjacent to the pair of wall surfaces 113a and 113b on which the base support 116 is formed.

As this fall prevention means, as shown in FIG. 17, the protrusion 125a formed in the pair of other wall surfaces 123a and 123b which the board | substrate support 16 of the container body part 12 is not formed is replaced with. It is possible to make

It is formed to be fixed by the protrusion 129 formed as described above. In FIG. 17, as the protrusion 125a, the aspect by which the edge part was removed in the pair of other wall surfaces 123a and 123b which oppose, and the large convex part was formed is shown.

Furthermore, in the present invention, the projection 125a may be formed such that the above-described large convex portion is formed between the convex portion and the convex portion with a lattice shape to form a gap between the surface protective resin sheet described later. It is possible.

In addition, such a fall prevention means may be formed in the surface of the surface protection resin sheets 124a and 124b arrange | positioned at the surface of the pair of opposing wall surfaces 123a and 123b. FIG. 17 shows an embodiment in which the anti-falling means of the protrusion 125b is formed in the longitudinal direction by protruding inside the container main body 112 near both edge portions of the surfaces of the surface protective resin sheets 124a and 124b. have.

Projections 125a or projections for preventing the fall of the pair of wall surfaces 123a and 123b or the surface protection resin sheets 124a and 124b disposed on the wall surface where the substrate support 116 is not formed. 125b) should just normally protrude from 2 to 10 mm, preferably about 3 to 8 mm from the surface.

That is, as described above, the pair of other wall surfaces 123a and 123b to which the substrate support 116 of the container main body 112 of the present invention is not formed and is not in contact with the substrate 160 to be stored therein. For example, as shown in FIG. 17, the other wall surfaces 123a and 123b thereof can be protruded to prevent the wall substrate supporting resin sheets 122a and 122b from falling down. .

In addition, when arrange | positioning the surface protection resin sheets 124a and 124b on the surface of the other wall surfaces 123a and 123b, as fall prevention means in the vicinity of the both side end parts of this surface protection resin sheets 124a and 124b, By forming the ridges 125a, it is possible to effectively prevent the fall of the wall substrate support resin sheets 122a and 122b before the substrate 160 is stored.

In addition, the surface protection resin sheets 124a and 124b arranged in this way have a shape substantially the same as the surface shape of the other side surfaces 123a and 123b on which these sheets are arranged.

In addition, it is preferable that the surface protective resin sheets 124a and 124b form and arrange a small gap on the surfaces of the side surfaces 123a and 123b. The surface protective resin sheets 124a and 124b do not come into direct contact with the substrate 160. However, the surface protective resin sheets 124a and 124b can be easily disposed to form the container body 112. There is no direct contact between the foamed resin and the containment substrate 160.

In addition, the surface protection resin sheets 124a and 124b are formed by arranging the small voids on the surfaces of the side surfaces 123a and 123b, so that these small voids become shock absorbing zones against the impact from the outside. Also becomes high.

Although the surface protection resin sheets 124a and 124b can also be adhered to the other side surfaces 123a and 123b, for example, both ends of the surface protection resin sheets 124a and 124b are inserted into the sheet fitting slit. Thereby, it is possible to arrange | position to the surface of other side surface 123a, 123b.

Although the bottom part 117 of the space for storing the board | substrate 160 of the board | substrate conveyance container 110 of this invention may be formed with foamed resin, it is also possible to arrange | position the resin board 128 for bottom board | substrate support. desirable.

Although the 1st board | substrate conveyance container 110 of this invention has a structure as mentioned above, the 2nd board | substrate conveyance container 111 of this invention is the same structure as mentioned above as shown in FIG. The bottom raising member 130 is disposed at the bottom of the first substrate transport container 110 including a.

The bottom raising member 130 is formed of a foamed resin, and the surface thereof is collectively stored with the substrate support 116 formed on the pair of wall surfaces 113a and 113b facing the container body 112. A bottom support 136 is formed to have the substrate 160. The depth of the bottom support 136 may be provided to a depth capable of stably having the substrate 160 stored therein, and is usually about 5 to 45 mm, preferably about 7 to 25 mm.

The bottom substrate supporting resin sheet 128 disposed on the surface of the bottom raising member 130 has a shape substantially the same as the surface shape of the bottom raising member 130 as shown in FIGS. 14 and 15. .

The bottom substrate supporting resin sheet 128 provided in such a shape is disposed on the surface of the bottom raising member 130 made from foamed resin. A small gap 131 is formed between the bottom substrate support resin sheet 128 and the bottom raising member 130, and the small amount of void 131 is formed to form the substrate 160. It is possible to absorb the internal stress due to the vibration of the substrate, and the breakage of the substrate 160 is significantly reduced.

As shown in FIG. 14, the bottom raising member 130 having the above-described shape is disposed on the bottom raising member 130 by placing the bottom raising member 130 in the bottom portion 117 of the substrate transport container 110 according to the present invention. The formed bottom support 136 can stably store the stored substrate 160 in collaboration with the substrate support 116 formed on the wall surfaces 113a and 113b.

In addition, the bottom raising member 130 is a very good fall prevention means with respect to the wall sheets supporting resin sheets 122a and 122b. The bottom raising member 130 may further change the receiving depth of the substrate 160 formed in the substrate transport containers 110 and 111 of the present invention to an optimal depth.

The bottom raising member 130 may be arranged in plural in the container body 112. That is, there are various kinds of sizes of the substrate stored in such a container, and if there is a size that can be stored in such a container, it is possible to store it regardless of the depth of the container.

However, with respect to the accommodated substrate 160, if the container is too deep, the stability of the substrate 160 in the container becomes bad. Therefore, it is preferable that the depth of the container which accommodates the board | substrate 160 is provided in the depth corresponding to the board | substrate to be stored.

In the substrate transport container of the present invention, by lowering the container by arranging the bottom lifting member 130, it is possible to reduce the excess space in the container and to carry and store the substrate 160 to be stored more stably. It is possible.

In the present invention, when using a plurality of low raising materials, the bottom support sphere 136 may be formed on the surface of the bottom raising member located on the surface of the bottom raising member 130 located at least on the top surface, In addition, the bottom substrate supporting resin sheet 128 having a surface shape corresponding to the bottom supporting member sphere 136 may be disposed on the surface of the bottom raising member 130 located at least on the top surface.

That is, in the case of arranging a plurality of bottom raising members in this way, the bottom supporting member 136 may be formed in the bottom raising member 130 disposed below, and the surface of the bottom raising member 130 may be formed. The bottom substrate supporting resin sheet 128 may be arranged, or may be a plate made of a foamed resin in which the resin sheet is not arranged.

As described above, the bottom raising member adjusts the depth for accommodating the substrate 160. The bottom raising member uses a plate made of foamed resin having a depth of each type and is used in correspondence with the substrate 160 stored therein. It is also possible to select and use the kind of 130 appropriately.

In particular, the depth that the upper end of the substrate 160 is intended to have by the lid support 148 formed in the lid substrate supporting resin sheet 147 in which the upper end of the stored substrate 160 is disposed inside the lid 145. It is desirable to adjust.

A lid 145 made of foamed resin is formed to cover the opening 114 formed in the container body 112 of the first and second substrate transfer containers 110 and 111 of the present invention, and the lid 145 is formed. ) Is fitted to the container body 112 to block the opening 114, so that the container for transporting the substrate of the present invention can be stored in a sealed state.

That is, the upper end portion of which the opening 114 of the container body 112 of the first and second substrate transfer containers 110 and 111 of the present invention are formed as described above, and the lower end portion of the lid 145 is mutually different. It is fitted so that the internal space for storing the substrate 160 can be stored in a sealed state.

For example, the convex part 115 is formed in the fitting part of the container body part 112, and the recessed part is formed in the fitting part of the lid 145, and it fits so that both may fit. By forming the portion, it is possible to form a higher sealed state.

A lid substrate supporting resin sheet 147 is disposed inside the lid 145 as described above, and preferably, an upper end portion of the stored substrate 160 is formed on the lid substrate supporting resin sheet 147. Retained by support 148.

In addition, it is preferable that the resin sheet 147 for lid substrate support forms a slight gap with respect to the lid 145 and is disposed on the surface of the lid 145.

The container body 112, the lid 145, and the bottom raising member 130 of the present invention as described above are formed from a foamed resin, and are not particularly limited to such a foamed resin, but polystyrene: polyolefin: poly It is possible to form using a foamable resin such as urethane, which is usually used as a resin foam.

In addition, the raw material which forms such a resin foam body does not need to exist as a single foamable water support material, For example, in order to improve impact resistance, several resins, such as resin composition in which rubber component was mix | blended with foamable polystyrene, It is possible to use a composition containing the same.

The composition which mix | blends a rubber component with such polystyrene is supplied as a high inpart polystyrene. Using such a resin foam raw material, a foam obtained by, for example, foaming in a mold so as to have a foaming ratio of 10 to 60 times, preferably 20 to 50 times, for example, The characteristic required as a container for board | substrate conveyance, such as favorable impact resistance and heat insulation, is represented.

That is, by forming the container body and the lid made from the foamed resin as described above, the substrate holding container becomes about 0.26 kcal / m.hr. ° C or higher, and the substrate transport container is also changed by external temperature change. It is possible to prevent the internal temperature from changing rapidly.

In addition, by forming the resin foam at such a foaming ratio, a skin layer is formed on the surface of the formed foam, and this skin layer is a layer that is denser than the foam in the vicinity of the middle portion in the thickness direction of the foamed resin. To form.

By forming such a skin layer, there is a difficulty in generating dust or the like from the surface of the foamed resin, the strength of the foam is improved, excellent in water resistance, moisture permeability, and abrasion resistance. Such a skin layer is formed to a depth of about 1 mm from the surface of the foam. Such a skin layer can be formed by contacting a metal mold | die with a foamed resin, when forming a foamed resin.

Further, in the present invention, the wall substrate support resin sheets 122a and 122b, the surface protection resin sheets 124a and 124b, the bottom substrate support resin sheet 128, the lid substrate support resin sheet 147, and the like, It is possible to form from a synthetic resin sheet.

Here, as an example of the synthetic resin sheet used, the sheet | seat made from (alpha) olefins, such as polyethylene, a LLDPE, a polypropylene, and a polybutylene, a polystyrene, a polyvinyl chloride, a polyethylene terephthalate, a polyethylene naphtharet, a polycarbonate, a polyester It may be provided as a sheet made from a thermoplastic resin such as polyamino.

In the present invention, it is preferable that the resin sheet provided with the predetermined form as described above is manufactured by various molding methods such as pore forming, compression molding, extrusion molding, and the like. When manufacturing the resin sheet provided to a specific shape, it is preferable to use a hot melt resin.

Moreover, you may mix | blend and add various additives to such a resin sheet. Examples of such additives include antistatic agents, conductive fillers, colorants, antioxidants, and the like.

Especially in this invention, it is preferable to mix | blend an antistatic agent and / or an electroconductive filler. In other words, such a substrate transport container may contain a substrate on which semiconductors are assembled, and in such a case, it is necessary to discharge and remove electric potential generated by friction and the like, and thus, an antistatic agent and / or a conductive filler may be used. It is preferable to mix.

Examples of such antistatic agents and conductive fillers include conductive carbon, conductive metals, conductive surfactants, and the like.

In the case of blending such an antistatic agent and / or a conductive filler, an amount such that such a component does not depart from the surface of the resin sheet and contaminates the substrate to be stored is used, and usually 100 parts by weight of the resin component forming the resin sheet is used. Relative to 0.1 to 100 parts by weight.

By blending the antistatic agent and / or the conductive filler in this manner, such a resin sheet and usually 10 ³ ~. It has a volume resistivity of about 10 ¹² Ω.cm, and the electrical characteristics are no longer impaired by static electricity even in a substrate on which the electronic component is mounted.

As described above, the resin sheet can be formed by, for example, vacuum molding, and in general, the resin sheet is given a shape substantially the same as the surface shape of the wall surface of the container body portion in which the resin sheet is disposed. .

By forming a resin sheet for each arrangement wall surface of such a container body part, it is possible to absorb the internal stress which arises in the inside of the board | substrate 160 stored very efficiently, without losing the flexibility of the formed resin sheet.

Therefore, although the resin sheet used by this invention is preferable to manufacture for every arrangement wall surface, the sheet | seat in which the sheet surface support 126 was formed, for example, and the sheet | seat in which the support tool adjacent to this are not formed are integrated together. Even when the L-shaped sheet formed of the sheet is used, the flexibility of the plain sheet-like sheet support 126 of the wall substrate support resin sheets 122a and 122b on which the sheet surface support 126 is formed is damaged. Since it is not a thing, it is also possible to use the resin sheet formed in the above L shape. In addition, even in the case of the cylindrical resin sheet in which the bottom part is not formed similarly, since the flexibility of the plain sheet seat support 126 does not lose, it is not possible to pass through the resin sheet in this way. (角 筒) It may be provided in a shape.

Thus, even if a resin sheet is formed in each cylinder shape, since there is no bottom part, insertion of a sheet into a container main body part does not become especially difficult.

However, when the bottom portion is bonded to the square sheet, the box-shaped sheet composite box having the upper portion is made difficult to be inserted into the container body portion to absorb the stress of the storage substrate. A plain-shaped support is fixed to the edge of the bottom.

Since such availability is damaged, it is not possible to reduce the occurrence of damage to the substrate due to internal stress generated in the substrate itself, such as in the substrate transport container of the present invention.

The board | substrate conveyance container of this invention has the above structures, and it is possible to store a board | substrate in such a container, and to convey a board | substrate safely.

That is, the container for transporting the substrate of the present invention is formed of a foamed body having excellent impact resistance and thermal insulation, so that the container body and the lid are formed, of course, it is possible to protect the substrate from external shocks and external temperature changes. The internal stress (mainly stress caused by the weight of the substrate itself) generated by the stored substrate can also be absorbed by the flexibility of the resin sheet arranged by forming a small void in the corresponding wall surface in the container. It is possible to return or store safely.

In addition, the resin sheet disposed in the container for transporting the substrate of the present invention is not fixed to the wall surface and is formed by forming a slight void, but means for preventing the water instruction from falling into the container are formed. Since the resin sheet is reliably disposed at a predetermined position, it is not necessary to confirm whether or not the resin sheet is correctly disposed at the predetermined position in a substrate maker or the like which actually uses the substrate transport container of the present invention.

In addition, as in the present invention, the resin sheet is basically provided separately from the wall surface, whereby the mounting of the resin sheet becomes very simple.

In addition, by using the bottom raising member, it is possible to adjust the depth of the container in correspondence with the substrate to be conveyed, and it is possible to ensure that no extra space is formed in the container, so that the substrate can be transported more safely. Do.

Although the container for board | substrate conveyance of this invention contains the structure mentioned above, it can change variously in the range which does not impair the objective of this invention.

For example, a gas exchange port may be formed in the container for transporting the substrate of the present invention, and the air in the substrate transporting container may be replaced with an inert gas such as nitrogen gas or argon gas.

In addition, by forming a band temporary recess in the outer peripheral portion of the substrate transport container of the present invention, it is possible to improve the sealing property of the substrate transport container and to facilitate the band construction for preventing the lid from falling off due to carelessness. It is possible.

The substrate transport container of the present invention is usually used so that the substrate stored therein stands up, but in order to clarify the loading direction of such a substrate transport container, it is also possible to give the container a mark indicating the loading direction. Do.

Although the container for carrying a substrate of the present invention can be suitably used when the substrate moves, it is of course not only limited to moving, but also used for storage.

Claims (27)

A container body made of synthetic resin having one side opened in a box shape with an open top by a pair of long side wall portions and a pair of short side wall portions integrally provided from the bottom wall portion and the bottom wall portion, In the container for transporting the substrate consisting of a lid made of a foamed synthetic resin freely detachable to cover the opening of the one side of the container body, The container body, An outer container in which an inner insulation plate made of a foamed synthetic resin is formed from a foamed synthetic resin in advance so that the bottom wall portion and the pair of long side walls and the pair of short side walls respectively integrally formed from the bottom wall portion constitute a double wall made of a heat insulating material. A container for carrying a substrate, wherein detachment is freely arranged inside the main body, and a sheet member made of resin, which is formed separately as previously, is detachably attached to the inner heat insulating plate. The method of claim 1, And a bottom raising member made of a foamed synthetic resin previously formed on the bottom surface of the inner heat insulating material disposed on the bottom surface of the container body is detachably and selectively disposed. The method according to claim 1 or 2, Between the bottom surface of the container body and the inner heat insulating material disposed thereon, and between the inner heat insulating material disposed on the bottom surface and the bottom raising member, positioning fixing means for uniquely determining the mutual assembly position is configured. Substrate conveying container. The method of claim 3, And said positioning fixing means comprises a convex portion and a concave portion. The method of claim 3, The container for transporting a substrate, characterized in that a recess for accommodating a desiccant is formed in the inner heat insulating plate disposed on the bottom of the container body. The method of claim 5, The container for transporting a substrate, characterized in that a slit communicating with the recess is formed in the resin sheet disposed above the inner heat insulating plate disposed on the bottom surface of the container body. A container body made of synthetic resin having one side opened in a box shape having an open upper portion, Consists of a lid made of synthetic resin freely detachable to cover the opening of the one side of the container body, In the inner wall structure of the container for transporting a substrate, a glass plate of a short flat plate shape is conveyed in a state of being held at a substrate engaging region formed at least three spaced apart from the bottom wall and the pair of side walls of the container body at a predetermined interval. The substrate accommodating portion in the container body is composed of an inner heat insulating plate made of a single flat plate-shaped foamed synthetic resin and a thin sheet member covering the surface of the inner heat insulating plate, and a concave convex surface of the inner heat insulating plate and the substrate holding region formed on the sheet member. An inner wall structure of the substrate transport container, wherein a gap for cushioning is secured therebetween. The method of claim 7, wherein The lid is composed of a lid body made of foamed synthetic resin and a lid sheet member covering the inner surface of the lid body, wherein the lid is formed at a predetermined pitch on the ceiling of the lid body, and the lid In the lid sheet member detachably attached to the inner surface of the main body, a substrate receiving device corresponding thereto is formed, and a cushion gap is provided between the substrate receiving device of the lid body and the substrate receiving device of the lid sheet member. An inner wall structure of a substrate transport container, which is secured. A container body made of synthetic resin having one side opened in a box shape having an open upper portion, Consists of a lid made of synthetic resin freely detachable to cover the opening of the one side of the container body, A substrate transport container in which a single flat plate-shaped glass substrate is conveyed in a state held at a substrate latching region formed at least three spaced apart from at least three bottom walls and a pair of side walls in the container body. The container body, An outer container in which an inner insulation plate made of a foamed synthetic resin is formed from a foamed synthetic resin in advance so that the bottom wall portion and the pair of long side walls and the pair of short side walls respectively integrally formed from the bottom wall portion constitute a double wall made of a heat insulating material. In addition to being detachably arranged inside the main body, a resin sheet member previously formed as a separate sheet is detachably attached to the inside of the inner heat insulating plate. The inner heat insulating material is a substrate transport container, characterized in that a gradient is made so that the thickness becomes thinner from the position at the opening of the container body to the inside. A container body made of synthetic resin having one side opened in a box shape having an open upper portion, Consists of a lid made of synthetic resin freely detachable to cover the opening of the one side of the container body, A substrate transport container in which a single flat plate-shaped glass substrate is conveyed at a state held by a substrate latching region formed at least three spaced apart from at least three bottom walls and a pair of side walls in the container body. An inner heat insulating plate made of a foamed synthetic resin is disposed on the bottom wall portion of the container body, and a resin sheet member formed separately as a separate sheet is detachably mounted thereon. In the inner heat insulating plate disposed on the bottom surface of the container body, a recess is formed in the thickness direction, and a slit communicating with the recess is formed in a sheet member that is freely attached to or detached from the upper portion of the inner heat insulating plate. A substrate carrying container. The method of claim 10, A container for transporting a substrate, characterized in that a drying agent is accommodated in a recess of the inner heat insulating material via a slit formed in the sheet member. A container body portion in which an upper portion of the foamed resin product having an opening in one direction is opened, and a substrate support is formed on an inner circumferential wall opposite to the opened box shape; A lid part made of a foamed resin, which is detachably attached to cover the opening of the container body part; A wall substrate supporting resin sheet provided with at least an inner circumferential wall surface at which the substrate supporter is formed and opposed to the inner circumferential wall surface so as to form a small void, and having the same surface shape as that of the inner circumferential wall surface; The said board | substrate support resin sheet is hold | maintained at the said inner peripheral wall surface by fall prevention means, The board | substrate conveyance container characterized by the above-mentioned. The method of claim 12, The fall prevention means is a substrate transport container, characterized in that provided with a convex portion formed on the inner circumferential wall surface is not formed the substrate support sphere of the container body portion. The method of claim 12, The surface protective resin sheet is disposed on the inner circumferential wall surface where the substrate support sphere is not formed, and the substrate support is formed on the inner circumferential wall surface where the substrate support sphere is not formed. A container for transporting a substrate, characterized in that the fall prevention means of the resin sheet for supporting the wall substrate disposed on the inner circumferential wall surface is formed. The method of claim 12, A surface protective resin sheet is disposed on a bottom surface of the container body portion and / or an inner peripheral wall surface of the lid portion. The method of claim 15, A substrate support container, characterized in that the substrate support is formed on the bottom surface of the container body portion and / or the resin sheet for surface protection disposed on the inner peripheral wall surface of the lid portion. The method of claim 16, The bottom surface of the container body portion, the inner circumferential wall surface on which the substrate support sphere is formed, the inner circumferential wall surface on which the substrate support sphere is not formed, and the resin sheet disposed on the inner circumferential wall surface of the lid portion are the same as the surface shape of the surface on which the respective surfaces are disposed. It is provided so that each resin sheet may form and arrange | position a small space | gap with respect to the surface of the directly contact surface which consists of foamed resin, The board | substrate conveyance container characterized by the above-mentioned. A container body portion in which an upper portion of the foamed resin product having an opening in one direction is opened, and a substrate support is formed on an inner circumferential wall opposite to the opened box shape; A lid part made of a foamed resin, which is detachably attached to cover the opening of the container body part; A resin sheet for supporting a wall surface substrate on which at least the substrate support is formed and opposed to an inner circumferential wall surface of which is formed so as to form a small void in the inner circumferential wall surface, and which is given the same surface shape as the inner circumferential wall surface; It is a plate-shaped plate made of foamed resin having a substrate support formed on the surface thereof, which is housed in the bottom of the housing body part in the container body part, and holds the substrate jointly with the substrate support formed in the drainage wall of the container body. A substrate transport container comprising a bottom lifting member for preventing the support resin sheet from falling. The method of claim 18, A bottom substrate supporting resin sheet provided with a surface shape similar to the surface shape of the bottom raising member is formed by forming a small gap in the surface of the bottom raising member. The method of claim 18 or 19, And the bottom raising member is provided as a fall preventing means of the resin sheet for supporting the wall surface substrate. The method of claim 18 or 20, And a convex portion formed on the inner circumferential wall surface of the container main body portion in which the substrate support sphere is not formed, unlike the bottom raising member, as the fall prevention means of the resin sheet for supporting the wall surface substrate. The method of claim 18 or 20, The resin sheet for surface protection is arrange | positioned at the inner peripheral wall surface in which the board | substrate support tool is not formed, and the board | substrate support tool is formed in the surface protection resin sheet arrange | positioned at the inner peripheral wall surface in which the board support tool is not formed. A substrate transport container, characterized in that a fall prevention means of a resin sheet for supporting a wall substrate disposed on an inner circumferential wall surface is provided. The method of claim 18, The lid portion is a substrate transport container, characterized in that the surface protective resin sheet is disposed on the inner peripheral wall surface. The method of claim 15, And the lid portion is provided with a substrate support on a surface protection resin sheet disposed on an inner circumferential wall surface. The method of claim 18, The substrate transport container is a substrate transport container, characterized in that to accommodate a plurality of bottom lifting member and to adjust the storage depth of the substrate transport container. The container is housed in a container body part made of foamed resin, and in addition to adjusting the storage depth of the container body part, the container is co-operated with a resin sheet for supporting a wall surface substrate which is formed by forming a small gap in the wall surface opposed to the container body. A bottom raising member of a substrate transport container, characterized in that a holder for holding a substrate accommodated in a main body is provided in the shape of a plate made of foamed resin formed on a surface thereof. The method of claim 26, The bottom raising member is formed of a bottom substrate supporting resin sheet provided in the same shape as the plate shape made of the foamed resin and the surface shape of the plate made of the foamed resin, and the bottom portion is formed with a small gap on the surface of the plate shape. Bottom-up member, characterized in that the substrate supporting resin sheet is disposed.

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