JP2004149166A - Glass board transportation box - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To reduce electrostatic troubles occurring on glass boards during the transportation of them. <P>SOLUTION: Spacer pads 15a, 15b made of expanded polyethylene are arranged in a glass board transportation box in such a way that part of the lower end of glass boards are pressed to the pads 15a, 15b while the lower part of the glass boards are born on two lines of grooves 11a formed on a bottom lid 11 of the transportation box. When an upper lid of the transportation box is closed while the lower part of the glass boards are born on the grooves 11a and the lower end of the glass boards is partly in contact with the space pads 15a, 15b, a force to press the lower end against space pads 15a, 15b is applied to the glass boards, stabilizing the glass boards in the transportation box. As a result, the vibration of the glass boards is prevented to suppress the generation of static electricity, thus the electrostatic troubles occurring on the glass boards are reduced. <P>COPYRIGHT: (C)2004,JPO

Description

【００３２】
底蓋部または上蓋部については、図５に示すように、ガラス基板を収納可能な空間の底面サイズを、長さＡ，幅Ｂで規定する。長さＡについては、表１に示すように、ガラス基板のサイズが１５，１６，１９，２０インチと異なる場合であっても同じ値（３４０ｍｍ）とする。一方、幅Ｂについては、１９，２０インチの比較的大きなガラス基板の場合には同じ値（３２４ｍｍ）とし、１５，１６インチの比較的小さなガラス基板の場合には、そのサイズに応じてそれぞれ適切な値（２４２ｍｍ，２７０ｍｍ）を設定する。
【００３３】
この底蓋部または上蓋部の一方の側壁からＣだけ離れた位置に、幅Ｄの溝が複数形成された列をその側壁と平行に形成する。さらに、この列からＥだけ離れた位置に、幅Ｆの溝が複数形成されたもう１つの列を形成する。この列と底蓋部または上蓋部の他方の側壁との間隔をＧとし、Ｃ，Ｄ，Ｅ，Ｆ，Ｇの和が幅Ｂになるようにする。通常、ＣとＧの長さ、ＤとＦの長さは、それぞれ等しくなるよう設計する。
【００３４】
この底蓋部または上蓋部において、長さＣ，Ｇは、表１に示すように、１９，２０インチのガラス基板の場合には同じ値（６２ｍｍ）とし、１５，１６インチの場合にはそのサイズに応じてそれぞれ適切な値（３６ｍｍ，５０ｍｍ）とする。また、長さＥは、１９，２０インチの場合には同じ値（１００ｍｍ）とし、１５，１６インチの場合には１９，２０インチの場合よりも小さな値であって同じ値（７０ｍｍ）とする。幅Ｄ，Ｆについては、ガラス基板のサイズに依らず一定の値（５０ｍｍ）とする。
【００３５】
幅Ｄ，Ｆで形成される列には、図５および図６に示すように、側壁からそれぞれ長さＨ，Ｉだけ離れた領域に複数の溝を形成し、底蓋部または上蓋部の底面から高さＪの位置が底になる深さＫの溝を形成する。この溝は、溝を形成している隣り合う突出部同士の間隔をＬで、溝の幅をＭで形成する。突出部の先端部分は幅Ｎで形成する。この突出部は、先端部分から底面側に向かって広がるように形成し、隣り合う突出部の間に、幅Ｍの溝が形成されるようにする。
【００３６】
このような溝が形成される底面からの高さＪの値は、表１に示すように、１５，１６，１９，２０インチのガラス基板のサイズに応じてそれぞれ適切な値（１２ｍｍ，５ｍｍ，２０ｍｍ，５ｍｍ）に設定する。Ｈ，Ｉ，Ｋ，Ｌ，Ｍ，Ｎの各値は、ガラス基板のサイズによらずそれぞれ一定の値（４０ｍｍ，１０ｍｍ，１０ｍｍ，１４ｍｍ，５ｍｍ，５ｍｍ）とする。
【００３７】
底蓋部または上蓋部自体の底面からの高さは、図７に示すように、Ｏ，Ｐの和となる。このうち長さＰの部分で、組み立て時に側壁溝部または側壁部と重なり合って連結されるようにする。組み立て時に底蓋部または上蓋部として有効な空間の高さはＱであり、すなわち、底面からの高さＯと収納されるガラス基板の下部が支持される高さＪとの差になる。
【００３８】
底面からの高さＯについては、表１に示すように、１９，２０インチの場合と１５，１６インチの場合でそれぞれ同じ値（７０ｍｍ，２５ｍｍ）とする。したがって、高さＱの値は、ガラス基板が１５，１６，１９，２０インチの場合の高さＪの値に応じた値（１３ｍｍ，２０ｍｍ，５０ｍｍ，６５ｍｍ）に設定されることになる。
【００３９】
ガラス基板搬送用ボックスの底蓋部または上蓋部に配置されるスペーサパッドは、その大きさを長さＡ，幅Ｃで規定し、その高さをＪ＋αで規定する。すなわち、スペーサパッドは、図７に示したように、ガラス基板の下部が支持される高さＪの位置よりもαだけ高くなるように形成される。そのため、ガラス基板が溝に挿入されると、ガラス基板の下端部は、高さＪの位置よりも高くなっているαの部分に当接するようになる。ガラス基板は、底蓋部と上蓋部とで挟まれることで、その下端部がスペーサパッドに押し当てられ、固定されるようになる。スペーサパッドのガラス基板搬送用ボックス内で固定するマージンであるαは、１〜４ｍｍ程度となるようにするのが好ましい。
【００４０】
側壁溝部については、図８に示すように、ガラス基板の収納に寄与する空間サイズを、長さＡ，高さＲで規定する。高さＲの値は、長さＡと同様、表１に示すように、ガラス基板のサイズが１５，１６，１９，２０インチと異なる場合であっても同じ値（２９４ｍｍ）とする。
【００４１】
この側壁溝部には、底蓋部または上蓋部における場合と同じく、両側端からそれぞれ長さＨ，Ｉだけ離れた領域の上端から下端に向かう溝を複数形成する。この溝は、図９に示すように、側壁溝部の底面から高さＪの位置に、深さＳ、溝を形成している隣り合う突出部同士の間隔Ｌ、溝の幅Ｍ、突出部の先端部分の幅Ｎで、形成する。側壁溝部における溝の深さＳは、ガラス基板のサイズによらず一定の値（１５ｍｍ）とする。ガラス基板は、対向配置される２つの側壁溝部によって、その両側縁部を支持される。これら２つの側壁溝部は共に同一の設計とする。
【００４２】
側壁部については、図１０に示すように、ガラス基板の収納に寄与する空間サイズを、長さＢ，高さＲで規定する。ガラス基板の面側を保護するための２つの対向配置される側壁部は、共に同一の設計とする。
【００４３】
これらの底蓋部、上蓋部、側壁溝部、側壁部を組み立てた場合の各部材の厚み（板厚３０ｍｍ）を含んだガラス基板搬送用ボックス全体のサイズは、図１１に示すように、高さＴ、長さＵ、幅Ｖで規定される。このうち、長さＵについては、表１に示すように、ガラス基板のサイズによらず一定の値（４３５ｍｍ）とする。一方、高さＴについては、１９，２０インチの場合と１５，１６インチの場合でそれぞれ同じ値（４９５ｍｍ，４０５ｍｍ）とする。幅Ｖについても同様に、１９，２０インチの場合と１５，１６インチの場合でそれぞれ同じ値（４１０ｍｍ，３５５ｍｍ）とする。表面に露出している底蓋部および上蓋部の高さＷは、１９，２０インチの場合と１５，１６インチの場合でそれぞれ同じ値（１２０ｍｍ，７５ｍｍ）となる。表面に露出している側壁溝部ならびに側壁部の高さＸは、ガラス基板のサイズによらず一定の値（２５５ｍｍ）である。
【００４４】
ガラス基板搬送用ボックスを表１の例に基づいて設計した場合の空間サイズとガラス基板サイズおよび両者の差を表２に示す。
【００４５】
【表２】

【００４６】
１５，１６，１９，２０インチの各ガラス基板の収納用に設計したガラス基板搬送用ボックスにおいては、実際にガラス基板の収納に用いることのできる空間サイズが、それぞれ表２に示した値となる。すなわち、空間サイズの幅は、表１に示した幅Ｂの値になり、空間サイズの高さは（Ｑ×２＋Ｒ）の値になる。
【００４７】
１５，１６，１９，２０インチのガラス基板のサイズは、それぞれ、実際にはこの表２に示した値となる。したがって、ガラス基板は、その下部・上部および側部ともわずかな隙間が保たれた状態で、底蓋部、上蓋部および側壁溝部に形成されている溝によって支持されるようになる。
【００４８】
このようなガラス基板搬送用ボックスにガラス基板を収納する場合には、通常、ガラス基板を、表面抵抗率が１×１０^９〜１×１０^１２Ω・ｃｍの静電袋で梱包した状態で、底蓋部、上蓋部および側壁溝部の溝に挿入する。これにより、前述のように、ガラス基板の縁部（下部、上部および側部）が、底蓋部、上蓋部および側壁溝部の溝によって支持されるようになる。
【００４９】
そして、ガラス基板搬送用ボックスをバンドなどによって固定することで、ガラス基板が底蓋部と上蓋部とに挟まれ、縁部を支持されているガラス基板に対し、その下端部をスペーサパッドに押し当てる力が加わる。その際、スペーサパッドは、押し当てられたガラス基板の下端部において若干変形する。その結果、ガラス基板は、底蓋部、上蓋部および側壁溝部の溝に支持された状態で、スペーサパッドによってガラス基板搬送用ボックス内に固定される。
【００５０】
このようなガラス基板搬送用ボックスによれば、スペーサパッドがガラス基板への衝撃を緩衝するとともに、ガラス基板が振動するのを抑制することができる。従来の梱包形態で搬送した場合には、その振動によって静電気障害が１０％程度発生する場合があったのに対し、搬送時の静電気障害発生率を１％以下に低減することができるようになる。
【００５１】
また、このガラス基板搬送用ボックスでは、大きく分けて、１５，１６インチの比較的小さなものと１９，２０インチの比較的大きなものとの２種類のガラス基板サイズに対応することができる。すなわち、１５，１６インチのガラス基板に対しては、ガラス基板搬送用ボックスの外観サイズ（Ｔ，Ｕ，Ｖ，Ｗ，Ｘ）は同じで、底蓋部および上蓋部の一部の寸法（Ｂ，Ｃ，Ｇ，Ｊ，Ｑ）を変えることで対応することができる。１９，２０インチのガラス基板に対しても同様に、ガラス基板搬送用ボックスの外観サイズ（Ｔ，Ｕ，Ｖ，Ｗ，Ｘ）は同じで、底蓋部および上蓋部の一部の寸法（Ｊ，Ｑ）を変えることで対応することができる。底蓋部および上蓋部のこのような寸法変化に応じて、スペーサパッドも、固定するマージン（α）を含め、適当なサイズとし、ガラス基板を適切に固定できるように調整する。
【００５２】
このように、ガラス基板サイズを大きく２種類に分けた上で、特定の部材の一部について寸法を変化させるだけでサイズの異なるガラス基板を収納することができるようにすることで、様々な種類のガラス基板の搬送に適用することが可能になる。そのため、サイズの異なるガラス基板を収納するときには、寸法変化を伴う部材のみ変更すればよく、ガラス基板ごとにガラス基板搬送用ボックス全体を作製する必要がない。
【００５３】
なお、ガラス基板には半導体部品が組み込まれており、通常、温度・湿度が一定に保たれたクリーンルーム内で梱包される。したがって、冬季の輸送や航空機輸送による急激な温度の低下、船によるコンテナ輸送における水分の侵入などによって、ガラス基板が結露する可能性がある。ガラス基板搬送用ボックスをクリーンルーム外へ搬送するときには、クリーンルーム内で、ガラス基板搬送用ボックスをアルミがコーティングされたアルミコートポリエチレン袋、例えば内側からポリエチレン（７０μｍ）／アルミ（９μｍ）／ポリエチレン（１５μｍ）／ナイロン（１５μｍ）の層構成としたアルミコートポリエチレン袋で包み、これを排気後に熱シールして梱包するようにする。これにより、外部からの水分の侵入を抑えることが可能になる。
【００５４】
また、このようなガラス基板搬送用ボックスへのガラス基板の収納を、ロボットなどを用いて自動で行う場合には、ガラス基板を上記の静電袋には梱包せず、直接ガラス基板搬送用ボックスに梱包することも可能である。その場合は、ガラス基板搬送用ボックスに、ロボットのつかみしろ部分のスペースを空けるなど、適当に設計変更を行うようにする。
【００５５】
次に、第２の実施の形態について説明する。
図１２は第２の実施の形態のガラス基板搬送用ボックスの底蓋部の概略図であって、（ａ）底蓋部の平面図、（ｂ）側壁溝部が配置される側から見た底蓋部の中央縦断面図、（ｃ）側壁部が配置される側から見た底蓋部の中央縦断面図である。ただし、図１２では、図１に示した要素と同一の要素については同一の符号を付し、その説明の詳細は省略する。
【００５６】
第２の実施の形態のガラス基板搬送用ボックスは、底蓋部２０の底面に、シリカゲルなどの乾燥剤２１が配置されている点で第１の実施の形態のガラス基板搬送用ボックス１０と相違する。その他の点については、第１の実施の形態と同様である。
【００５７】
クリーンルーム内で梱包されたガラス基板２２は、輸送時のガラス基板搬送用ボックスへの水分の侵入による結露を抑制する目的で、図１２（ａ），（ｃ）に示したように、底蓋部２０の底面に乾燥剤２１を配置する。
【００５８】
この乾燥剤２１は、図１２（ａ）に示したように、底蓋部２０の列１１ｂ，１１ｃの間の２箇所に配置されている。さらに、乾燥剤２１は、図１２（ｃ）に示したように、ガラス基板２２の下端部がスペーサパッド１５ａ，１５ｂに当接している場合でも、ガラス基板２２に触れないように配置されている。
【００５９】
この第２の実施の形態のガラス基板搬送用ボックスをクリーンルーム外へ搬送するときには、クリーンルーム内で、ガラス基板搬送用ボックスをアルミコートポリエチレン袋で包み、排気後、熱シールして梱包する。これにより、外部からの水分の侵入を抑え、かつ、乾燥剤２１によりガラス基板搬送用ボックス内を一定湿度にコントロールすることが可能になる。ガラス基板搬送用ボックス内の体積に応じて乾燥剤２１の量（重量あるいは個数）を調整すれば、内部湿度の調整が可能である。
【００６０】
次に、第３の実施の形態について説明する。
図１３は第３の実施の形態のガラス基板搬送用ボックスの上蓋部の概略図であって、（ａ）上蓋部の平面図、（ｂ）側壁溝部が配置される側から見た上蓋部の中央縦断面図、（ｃ）側壁部が配置される側から見た上蓋部の中央縦断面図である。
【００６１】
第３の実施の形態のガラス基板搬送用ボックスは、上蓋部３０にガス吸入口３１が設けられている点で第１の実施の形態のガラス基板搬送用ボックス１０と相違する。その他の点については、第１の実施の形態と同様である。
【００６２】
この第３の実施の形態のガラス基板搬送用ボックスによれば、クリーンルーム外へ搬送するときには、まず、クリーンルーム内で、ガス吸入口３１から窒素ガスまたは不活性ガスを導入してガラス基板搬送用ボックス内のガスを置換する。そして、置換後のガラス基板搬送用ボックスを、アルミコートポリエチレン袋で包み、これを排気後に熱シールして梱包する。これにより、外部からの水分の侵入を抑え、ガラス基板が結露するのを抑制することができる。
【００６３】
次に、第４の実施の形態について説明する。
第４の実施の形態のガラス基板搬送用ボックスは、各部材の表面に界面活性剤を塗布し、あるいは一般的に界面活性剤として用いられている物質を樹脂発泡体に練り込んで各部材を形成した構成とする。これにより、ガラス基板搬送用ボックス自体の抵抗を下げることができ、ガラス基板の振動を抑えるとともに、静電気の発生をいっそう抑えることが可能になる。
【００６４】
さらに、樹脂発泡体に界面活性剤を練り込む場合に、カーボンブラックなどを用いてカーボンを練り込むようにすれば、よりいっそうガラス基板搬送用ボックス自体の抵抗を下げることができる。
【００６５】
次に、第５の実施の形態について説明する。
第５の実施の形態のガラス基板搬送用ボックスは、スペーサパッドに、底蓋部と同様の溝を形成した構成とする。これにより、ガラス基板は、底蓋部、上蓋部および側壁溝部の溝でその縁部を支持されるとともに、スペーサパッドに形成された溝によってその下端部を確実に固定されるようになる。この場合、スペーサパッドがガラス基板の振動を抑えられるように、その溝の深さおよびガラス基板の固定に必要となるマージン（α）を、適当に設定するようにする。
【００６６】
次に、第６の実施の形態について説明する。
図１４は第６の実施の形態のガラス基板搬送用ボックスの側壁溝部の概略図であって、（ａ）平面図、（ｂ）正面図、（ｃ）下面図である。
【００６７】
第６の実施の形態のガラス基板搬送用ボックスの側壁溝部４０は、溝の部分を別体で形成した溝分割部４１を、外壁部４２に着脱可能とした構造を有している。ここで、図示しないが、溝分割部４１には、その溝が形成されていない背面側に凸部が形成されており、一方、外壁部４２には、溝分割部４１が配置される側に凹部が形成されている。溝分割部４１は、その凸部を外壁部４２の凹部に嵌め込むことで、外壁部４２に取り付けることができるようになっている。溝分割部４１を取り外す際には、その凸部を外壁部の凹部から引き抜くようにすればよい。
【００６８】
溝分割部４１は、発泡ポリエチレンなどの樹脂発泡体で形成され、外壁部４２を形成している樹脂発泡体よりも柔らかくなるように形成されている。このように、溝分割部４１を着脱可能な構成とすることで、この部分を外壁部４２と異なる材質で形成することが可能である。すなわち、外壁部４２はガラス基板搬送用ボックスの強度などを考慮して形成し、溝分割部４１は、ガラス基板の振動抑制に適した発泡倍率や原材料を選択して形成することが可能になる。
【００６９】
さらに、この第６の実施の形態では、底蓋部５０の溝の部分についても、図１４に示した側壁溝部４０と同様の構造とする。
図１５は第６の実施の形態のガラス基板搬送用ボックスの底蓋部の概略図であって、（ａ）底蓋部の平面図、（ｂ）側壁溝部が配置される側から見た底蓋部の中央縦断面図、（ｃ）側壁部が配置される側から見た底蓋部の中央縦断面図である。
【００７０】
底蓋部５０では、複数の溝が形成されている列の部分を別体で形成した溝分割部５１を、外壁部５２の所定の位置に着脱可能としている。図示しないが、溝分割部５１に凸部が形成され、外壁部５２に凹部が形成されている点は、上記の側壁溝部４０と同じである。溝分割部５１についても、その材質は発泡ポリエチレンなどの樹脂発泡体とし、外壁部５２を形成している樹脂発泡体よりも柔らかくなるようにすることができる。すなわち、溝分割部５１と外壁部５２とを異なる材質で形成することが可能である。
【００７１】
このように、側壁溝部４０および底蓋部５０の溝を、それぞれ溝分割部４１，５１として別体で形成することで、溝の寸法が異なる溝分割部４１，５１を共通の外壁部４２，５２に取り付けて用いることができる。したがって、溝分割部４１，５１の溝の寸法を調整することによって複数種のサイズのガラス基板の収納に対応したり、ひとつのガラス基板搬送用ボックスで搬送することのできるガラス基板の枚数変更に対応したりすることが可能になる。
【００７２】
なお、上記の第２から第６の実施の形態のガラス基板搬送用ボックスには、本発明に係るスペーサパッドを備えたもののほか、スペーサパッドを備えていない従来のガラス基板搬送用ボックスについても適用可能である。
【００７３】
（付記１） 内部にガラス基板が挿入される溝を有し、前記ガラス基板の縁部を前記溝によって支持して前記ガラス基板を搬送するためのガラス基板搬送用ボックスにおいて、
樹脂発泡体を用いて形成されて、前記ガラス基板が前記縁部を前記溝によって支持されるときに前記ガラス基板の端部の少なくとも一部が押し当てられるように配置されたスペーサパッドを有することを特徴とするガラス基板搬送用ボックス。
【００７４】
（付記２） 前記ガラス基板の下部を支持する底蓋部と、前記ガラス基板の上部を支持する上蓋部と、前記ガラス基板の側部を支持する側壁溝部と、前記ガラス基板の面側を保護する側壁部と、を有することを特徴とする付記１記載のガラス基板搬送用ボックス。
【００７５】
（付記３） 前記スペーサパッドは、前記溝によって前記ガラス基板の下部を支持する底蓋部に、前記ガラス基板の下端部の少なくとも一部が押し当てられる面が、前記底蓋部の前記溝の底よりも、前記ガラス基板を内部に収納できる範囲で、高くなるように配置されていることを特徴とする付記１記載のガラス基板搬送用ボックス。
【００７６】
（付記４） 前記スペーサパッドは、発泡倍率が３倍から３０倍の発泡ポリエチレンを用いて形成されていることを特徴とする付記１記載のガラス基板搬送用ボックス。
【００７７】
（付記５） 発泡倍率が３倍から３０倍の樹脂発泡体を用いて形成されて、表面抵抗率が１×１０^３から１×１０^１２Ω・ｃｍの範囲であることを特徴とする付記１記載のガラス基板搬送用ボックス。
【００７８】
（付記６） 前記溝が形成されている部分が別体で着脱可能に形成された溝分割部を有することを特徴とする付記１記載のガラス基板搬送用ボックス。
（付記７） 表面に界面活性剤が塗布されまたは形成している材料の組成に前記界面活性剤を含んでいることを特徴とする付記１記載のガラス基板搬送用ボックス。
【００７９】
（付記８） 形成している材料の組成にカーボンを含んでいることを特徴とする付記１記載のガラス基板搬送用ボックス。
（付記９） 内部にガラス基板が挿入される溝を有するガラス基板搬送用ボックスによって、前記ガラス基板の縁部を前記溝によって支持して前記ガラス基板を搬送するガラス基板搬送方法において、
前記ガラス基板を静電袋に梱包し、
前記静電袋に梱包された状態で前記ガラス基板を前記溝に挿入し、
前記ガラス基板搬送用ボックスの組み立てを完了したときに、前記溝に挿入された前記ガラス基板の端部の少なくとも一部をスペーサパッドに押し当てて前記ガラス基板を固定することを特徴とするガラス基板搬送方法。
【００８０】
（付記１０） 内部にガラス基板が挿入される溝を有するガラス基板搬送用ボックスによって、前記ガラス基板の縁部を前記溝によって支持して前記ガラス基板を搬送するガラス基板搬送方法において、
前記ガラス基板を前記溝に挿入し、
前記ガラス基板搬送用ボックスの組み立てを完了したときに、前記溝に挿入された前記ガラス基板の端部の少なくとも一部をスペーサパッドに押し当てて前記ガラス基板を固定し、
前記ガラス基板が固定されている前記ガラス基板搬送ボックスをアルミコートポリエチレン袋で包み、
前記アルミコートポリエチレン袋内のガスを排気し、
前記アルミコートポリエチレン袋を熱シールすることを特徴とするガラス基板搬送方法。
【００８１】
【発明の効果】
以上説明したように本発明では、スペーサパッドを、樹脂発泡体を用いて形成し、ガラス基板がその縁部を溝で支持されるときにガラス基板の端部の少なくとも一部が押し当てられるように、ガラス基板搬送用ボックスに配置する。これにより、ガラス基板の振動を抑えて静電気の発生を抑制し、ガラス基板の静電気障害を抑制することができる。
【図面の簡単な説明】
【図１】第１の実施の形態のガラス基板搬送用ボックスの底蓋部の概略図であって、（ａ）底蓋部の平面図、（ｂ）側壁溝部が配置される側から見た底蓋部の中央縦断面図、（ｃ）側壁部が配置される側から見た底蓋部の中央縦断面図である。
【図２】第１の実施の形態のガラス基板搬送用ボックスの外観図である。
【図３】側壁溝部と側壁部との連結方法の説明図である。
【図４】底蓋部と側壁溝部および側壁部との連結方法の説明図であって、（ａ）底蓋部の側壁部が配置される側から見た中央縦断面図、（ｂ）側壁溝部および側壁部が連結された底蓋部を上から見た図である。
【図５】底蓋部または上蓋部の平面模式図である。
【図６】底蓋部または上蓋部に形成される溝の側面模式図である。
【図７】底蓋部または上蓋部の断面模式図である。
【図８】側壁溝部の平面模式図である。
【図９】側壁溝部に形成される溝の側面模式図である。
【図１０】側壁部の平面模式図である。
【図１１】ガラス基板搬送用ボックス全体の模式図である。
【図１２】第２の実施の形態のガラス基板搬送用ボックスの底蓋部の概略図であって、（ａ）底蓋部の平面図、（ｂ）側壁溝部が配置される側から見た底蓋部の中央縦断面図、（ｃ）側壁部が配置される側から見た底蓋部の中央縦断面図である。
【図１３】第３の実施の形態のガラス基板搬送用ボックスの上蓋部の概略図であって、（ａ）上蓋部の平面図、（ｂ）側壁溝部が配置される側から見た上蓋部の中央縦断面図、（ｃ）側壁部が配置される側から見た上蓋部の中央縦断面図である。
【図１４】第６の実施の形態のガラス基板搬送用ボックスの側壁溝部の概略図であって、（ａ）平面図、（ｂ）正面図、（ｃ）下面図である。
【図１５】第６の実施の形態のガラス基板搬送用ボックスの底蓋部の概略図であって、（ａ）底蓋部の平面図、（ｂ）側壁溝部が配置される側から見た底蓋部の中央縦断面図、（ｃ）側壁部が配置される側から見た底蓋部の中央縦断面図である。
【符号の説明】
１０ ガラス基板搬送用ボックス
１１，２０，５０ 底蓋部
１１ａ 溝
１１ｂ，１１ｃ 列
１１ｄ 凹部
１２，３０ 上蓋部
１３，４０ 側壁溝部
１３ａ 突起部
１３ｂ 突起
１４ 側壁部
１４ａ 開口部
１５ａ，１５ｂ スペーサパッド
１６ カギ
２１ 乾燥剤
２２ ガラス基板
３１ ガス吸入口
４１，５１ 溝分割部
４２，５２ 外壁部[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a glass substrate transport box, and more particularly to a glass substrate transport box for transporting a glass substrate such as a completed liquid crystal panel or a substrate on which a thin film transistor (TFT) is formed.
[0002]
[Prior art]
A glass substrate on which various electronic components such as semiconductors are placed (hereinafter referred to as a "glass substrate"), such as a completed liquid crystal panel or a substrate on which a TFT has been formed, is subject to impact during packing and transport. May be damaged, or failure may be caused by adhesion of static electricity or dust. In order to prevent such breakage and failure from occurring, various proposals have been made on a method of packing or transporting a glass substrate. (For example, refer to Patent Documents 1, 2, and 3).
[0003]
In recent years, as a glass substrate transport box used for transporting a glass substrate, a box mainly assembled and used for respective members of a bottom cover, an upper cover, and a side wall has been used. Such a glass substrate transport box includes a bottom lid and an upper lid that respectively support the lower and upper parts of the glass substrate, a side wall groove that supports the side of the glass substrate, and a side wall that protects the surface side of the glass substrate. It is composed of each member. Of these, a plurality of grooves for supporting the glass substrate are formed integrally with each member in the bottom cover, the top cover, and the side wall groove. In the glass substrate transport box after assembly, insert and support the glass substrate in each groove to suppress contact and misalignment of the glass substrates during transportation and protect the glass substrate from impact. ing.
[0004]
[Patent Document 1]
JP-A-7-132886
[Patent Document 2]
JP-A-10-230975
[Patent Document 3]
JP-A-10-21938
[0005]
[Problems to be solved by the invention]
However, the conventional glass substrate transport box has a design with a certain margin because the members are divided and errors occur in the formation accuracy of each member.There is a gap between the groove and the glass substrate. Therefore, there is a problem that the glass substrate may vibrate during the transfer. If the glass substrate vibrates while being transported by the glass substrate transport box, static electricity is generated due to friction between the glass substrate and the groove, and there is a possibility that an electrostatic failure may occur in the glass substrate.
[0006]
Also, when transporting glass substrates using such a glass substrate transport box, if the temperature and humidity in the glass substrate transport box are not properly controlled, the glass substrate may condense due to ingress of moisture. This may affect the quality of the glass substrate.
[0007]
The present invention has been made in view of such a point, and provides a glass substrate transport box capable of suppressing vibration of a glass substrate during transportation and suppressing occurrence of an electrostatic failure in the glass substrate. With the goal.
[0008]
Another object of the present invention is to provide a glass substrate transport box capable of suppressing intrusion of moisture during transport of a glass substrate.
[0009]
[Means for Solving the Problems]
In order to solve the above-described problems, the present invention provides a glass substrate transport box that can be realized by the configuration illustrated in FIG. The glass substrate transport box of the present invention has a groove into which a glass substrate is inserted, and a glass substrate transport box for transporting the glass substrate while supporting an edge of the glass substrate by the groove. And a spacer pad formed using a resin foam and arranged so that at least a part of an end of the glass substrate is pressed against the glass substrate when the edge is supported by the groove. It is characterized by the following.
[0010]
According to such a box for transporting a glass substrate, when the glass substrate is inserted into a groove 11a of a bottom cover 11 as shown in FIG. Part of the portion abuts on the spacer pads 15a and 15b formed adjacent to the groove 11a. In this state, for example, when the upper lid for supporting the upper part of the glass substrate is closed and the edge of the glass substrate is supported by the groove, the lower end of the glass substrate is pressed against the spacer pads 15a and 15b. , Is fixed in the glass substrate transport box. As described above, at least a part of the end of the glass substrate whose edge is supported by the groove 11a is pressed against the spacer pads 15a and 15b, so that the glass substrate is fixed in the glass substrate transport box, and Vibration is suppressed.
[0011]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
First, a first embodiment will be described.
[0012]
FIG. 2 is an external view of the glass substrate transport box according to the first embodiment. However, FIG. 2 shows a state in which the upper lid of the glass substrate transport box is removed.
[0013]
The glass substrate transport box 10 includes a bottom lid 11 and an upper lid 12, which respectively support the lower and upper parts of the glass substrate housed in the assembled state, a side wall groove 13, which supports the side of the glass substrate, and It is assembled using each member of the side wall portion 14 for protecting the surface side of the glass substrate.
[0014]
Although not shown, a plurality of grooves for respectively supporting the lower and upper portions of the glass substrate are integrally formed at predetermined positions in the bottom cover 11 and the upper cover 12. Similarly, a plurality of grooves for supporting the side portion of the glass substrate are integrally formed in a predetermined region in the side wall groove portion 13.
[0015]
Each member of the glass substrate transport box 10 is formed using a resin foam having an expansion ratio of 3 to 30 times. For example, foamed polypropylene can be used as such a resin foam. When the expansion ratio of the resin foam is smaller than 3 times, the member becomes too hard. On the other hand, when the expansion ratio is larger than 30 times, the member becomes too soft. I do. Further, in selecting the resin foam, it is considered that the strength of the entire glass substrate transport box 10 is ensured. The surface resistivity of each member is 1 × 10 ³ ~ 1 × 10 ¹² Ω · cm.
[0016]
After assembling such members, the glass substrate transport box 10 is assembled by connecting each member by a connecting method described later, and finally the bottom cover 11 and the top cover 12 are fixed using a band or the like. Then, each member is prevented from coming off. Thus, the glass substrate accommodated therein is surely supported at the lower portion, the upper portion, and the side portions by the grooves.
[0017]
FIG. 1 is a schematic view of the bottom cover of the glass substrate transport box according to the first embodiment, in which (a) a plan view of the bottom cover, and (b) a bottom viewed from the side where the side wall groove is disposed. It is a center longitudinal cross-sectional view of a lid part, (c) It is the center longitudinal cross-sectional view of the bottom lid part seen from the side where a side wall part is arrange | positioned.
[0018]
As described above, the bottom cover 11 has a plurality of grooves 11a for supporting the lower portion of the glass substrate. The grooves 11a are arranged in two rows integrally with the bottom cover 11 at a predetermined width and a predetermined interval. In each of the rows 11b and 11c, the width and the interval of the formed grooves 11a are formed to be the same in both. The distance between the rows 11b and 11c and the distance between the rows 11b and 11c and the side wall of the bottom cover 11 are set to predetermined values according to the size of the glass substrate to be supported.
[0019]
Further, spacer pads 15a and 15b are arranged on the bottom cover 11 between the rows 11b and 11c and the side walls of the bottom cover 11, respectively. The spacer pads 15a and 15b are formed using a resin foam having a foaming ratio of 3 to 30 times, which is softer and less dusty than the resin foam forming each member such as the bottom cover 11. ing. As the resin foam for forming the spacer pads 15a and 15b, for example, foamed polyethylene can be used. The reason why the expansion ratio is set to 3 to 30 times is to consider the hardness and softness of the spacer pads 15a and 15b as in the case of the resin foam used for each member such as the main body of the bottom lid 11. .
[0020]
The reason why a soft resin foam with low dust generation is used for the spacer pads 15a and 15b is that the lower end of the glass substrate to be housed comes into direct contact with the spacer pads 15a and 15b as described later. By using a resin foam such as foamed polyethylene, the vibration of the glass substrate is suppressed, the generation of static electricity due to friction is suppressed, and the resin foam is prevented from being scraped and attached to the glass substrate. The spacer pads 15a and 15b may be entirely formed of a resin foam such as foamed polyethylene, or such a resin foam may be formed on the side where the lower end of the glass substrate contacts. It may be a laminate.
[0021]
The upper lid part 12 is formed in the same configuration as the bottom lid part 11. That is, it has a plurality of grooves formed in two rows, and the width and spacing of the grooves, the spacing between the rows, and the spacing between each row and the side wall of the upper lid part 12 are designed to be the same as the bottom lid part 11. ing. In the first embodiment, the spacer pad is not arranged on the upper lid portion 12. However, similarly to the bottom lid portion 11, the spacer pad is provided between each row and the side wall of the upper lid portion 12. Pads may be arranged.
[0022]
The side wall groove portion 13 is formed with a groove similar to the bottom lid portion 11 or the upper lid portion 12 shown in FIG. 1 on the side inside the glass substrate transport box 10 shown in FIG. A plurality of grooves are formed in the side wall groove 13 in a predetermined region from the side where the top cover 12 is arranged to the side where the bottom cover 11 is arranged. It is designed to be the same as the groove of 11 a and the upper lid 12.
[0023]
The basic structure of the glass substrate transport box 10 is assembled by connecting the members of the bottom cover 11, upper cover 12, side wall groove 13, and side wall 14. Here, a method of connecting the respective members constituting the glass substrate transport box 10 will be described.
[0024]
FIG. 3 is an explanatory diagram of a method of connecting the side wall groove and the side wall. FIGS. 4A and 4B are explanatory views of a method of connecting the bottom lid to the side wall groove and the side wall. FIG. 4A is a central longitudinal sectional view seen from the side where the side wall of the bottom lid is arranged. It is the figure which looked at the bottom lid part with which the side wall groove part and the side wall part were connected from the top.
[0025]
First, the connection between the side wall groove 13 and the side wall 14 will be described with reference to FIG. The side wall groove 13 has a plurality of sets of protrusions 13a formed at a side end thereof at predetermined intervals. On the other hand, the side wall portion 14 is provided with a plurality of openings 14a formed at the side edges to be connected to the side wall groove portions 13 so as to have a diameter into which the protrusion 13a can be inserted. When connecting the side wall groove 13 and the side wall 14, first, the protrusion 13 a is inserted into the opening 14 a. Then, the key 16 is inserted from the outside of the side wall portion 14 into the gap provided in the protrusion 13a. As a result, the side wall groove 13 and the side wall 14 are connected.
[0026]
Next, the connection between the bottom lid 11 and the side wall groove 13 and the side wall 14 will be described with reference to FIG. As shown in FIG. 4A, a concave portion 11d is formed inside the side wall of the bottom lid portion 11. On the other hand, in the side wall groove 13 and the side wall 14, convex portions protruding outward are formed near the respective lower ends. When connecting the bottom lid part 11 to the side wall groove part 13 and the side wall part 14, the convex part is fitted into the concave part 11d. Note that a protrusion 13b for defining the direction is provided near the side edge of the side wall groove portion 13. In connection with the side wall groove portion 13, the protrusion 13b is used as a mark to consider the fitting direction. To
[0027]
The connection between the upper lid part 12 and the side wall groove part 13 and the side wall part 14 is made in the same manner as the connection between the bottom lid part 11 and the side wall groove part 13 and the side wall part 14.
In the bottom cover 11, upper cover 12, and side wall groove 13 shown in FIG. 1 and FIGS. 12 to 15, the recess 11d, the protrusion 13a, the protrusion 13b, the opening 14a, and the key shown in FIG. 3 or FIG. The illustration of 16 is omitted.
[0028]
In the glass substrate transport box 10 having the above-described configuration, the grooves formed in the bottom cover 11, the top cover 12, and the side wall grooves 13 are for the purpose of supporting the glass substrate. It is not intended to fix the substrate. When the glass substrate is stored in the glass substrate transport box 10, the groove supports the edges (upper, lower, and side) of the glass substrate, and further fixes the glass substrate by spacer pads 15a and 15b. I am trying to do it.
[0029]
Here, the design of the glass substrate transport box will be described in detail with reference to FIGS. 5 to 11 and Table 1. FIG. Here, the design of a glass substrate transport box used for transporting a 15-inch, 16-inch, 19-inch, or 20-inch glass substrate will be described as an example.
[0030]
FIG. 5 is a schematic plan view of the bottom lid or the upper lid, FIG. 6 is a schematic side view of a groove formed in the bottom lid or the upper lid, FIG. 7 is a schematic cross-sectional view of the bottom lid or the upper lid, and FIG. FIG. 9 is a schematic side view of a groove formed in the side wall groove, FIG. 10 is a schematic plan view of the side wall, and FIG. 11 is a schematic view of the entire glass substrate transport box. 5 to 10 except for the thickness of each member, and FIG. 11 includes the thickness of each member. Table 1 exemplifies design values of each member shown in FIGS.
[0031]
[Table 1]

[0032]
As for the bottom cover or the top cover, the bottom size of the space in which the glass substrate can be stored is defined by the length A and the width B as shown in FIG. As shown in Table 1, the length A has the same value (340 mm) even when the size of the glass substrate is different from 15, 16, 19, or 20 inches. On the other hand, the width B is the same value (324 mm) in the case of a relatively large 19 or 20 inch glass substrate, and is appropriate in accordance with the size in the case of a relatively small glass substrate of 15 or 16 inches. Value (242 mm, 270 mm).
[0033]
A row formed with a plurality of grooves having a width D is formed at a position separated by C from one of the side walls of the bottom cover or the upper cover in parallel with the side wall. Further, another row formed with a plurality of grooves having a width F is formed at a position separated by E from this row. The distance between this row and the other side wall of the bottom cover or the top cover is G, and the sum of C, D, E, F, and G is the width B. Usually, the lengths of C and G and the lengths of D and F are designed to be equal to each other.
[0034]
As shown in Table 1, the lengths C and G of the bottom cover or the top cover have the same value (62 mm) for a 19-inch or 20-inch glass substrate, and have the same length for a 15-inch or 16-inch glass substrate. Appropriate values (36 mm, 50 mm) are set according to the size. The length E is the same value (100 mm) for 19 and 20 inches, and the same value (70 mm) for 15 and 16 inches than for 19 and 20 inches. . The widths D and F are constant (50 mm) regardless of the size of the glass substrate.
[0035]
As shown in FIG. 5 and FIG. 6, a plurality of grooves are formed in the regions formed by the widths D and F in regions separated from the side walls by the lengths H and I, respectively. A groove having a depth K where the position at a height J from the bottom becomes a bottom is formed. In this groove, the distance between adjacent protrusions forming the groove is L, and the width of the groove is M. The tip of the protrusion is formed with a width N. The protruding portion is formed so as to spread from the front end portion toward the bottom surface so that a groove having a width M is formed between adjacent protruding portions.
[0036]
As shown in Table 1, the value of the height J from the bottom where such a groove is formed is an appropriate value (12 mm, 5 mm, 20 mm, 5 mm). The values of H, I, K, L, M, and N are constant values (40 mm, 10 mm, 10 mm, 14 mm, 5 mm, and 5 mm) regardless of the size of the glass substrate.
[0037]
The height of the bottom cover or the top cover itself from the bottom surface is the sum of O and P as shown in FIG. The portion having the length P is overlapped with the side wall groove or the side wall at the time of assembling so as to be connected. The height of the space effective as the bottom cover or the top cover at the time of assembly is Q, that is, the difference between the height O from the bottom surface and the height J at which the lower part of the stored glass substrate is supported.
[0038]
As shown in Table 1, the height O from the bottom surface is the same value (70 mm, 25 mm) for 19 and 20 inches and for 15 and 16 inches. Therefore, the value of the height Q is set to a value (13 mm, 20 mm, 50 mm, 65 mm) corresponding to the value of the height J when the glass substrate is 15, 16, 19, or 20 inches.
[0039]
The size of the spacer pad arranged on the bottom or top cover of the glass substrate transport box is defined by length A and width C, and its height is defined by J + α. That is, as shown in FIG. 7, the spacer pad is formed so as to be higher by α than the position of the height J at which the lower portion of the glass substrate is supported. Therefore, when the glass substrate is inserted into the groove, the lower end of the glass substrate comes into contact with the portion of α that is higher than the position of height J. The glass substrate is sandwiched between the bottom cover and the top cover, so that the lower end is pressed against the spacer pad and fixed. It is preferable that α, which is a margin for fixing the spacer pad in the glass substrate transport box, be about 1 to 4 mm.
[0040]
As for the side wall groove, as shown in FIG. 8, a space size contributing to storage of the glass substrate is defined by a length A and a height R. As shown in Table 1, the value of the height R is the same (294 mm) even when the size of the glass substrate is different from 15, 16, 19, or 20 inches as shown in Table 1.
[0041]
As in the case of the bottom cover or the top cover, a plurality of grooves are formed in the side wall groove from the upper end to the lower end of the region separated by lengths H and I from both side ends. As shown in FIG. 9, this groove has a depth S, a distance L between adjacent protrusions forming the groove, a width M of the groove, a width of the protrusion at a position of height J from the bottom surface of the side wall groove. It is formed with the width N of the tip portion. The depth S of the groove in the side wall groove is a constant value (15 mm) regardless of the size of the glass substrate. The glass substrate is supported on both side edges by two side wall grooves arranged to face each other. These two side wall grooves have the same design.
[0042]
As for the side wall portion, as shown in FIG. 10, a space size contributing to storage of the glass substrate is defined by a length B and a height R. The two opposing side wall portions for protecting the surface side of the glass substrate have the same design.
[0043]
As shown in FIG. 11, the size of the entire box for transporting glass substrates including the thickness (plate thickness: 30 mm) of each member when the bottom cover, the top cover, the side wall groove, and the side wall is assembled is as shown in FIG. It is defined by T, length U, and width V. Among them, as shown in Table 1, the length U is a constant value (435 mm) regardless of the size of the glass substrate. On the other hand, the height T is set to the same value (495 mm, 405 mm) for 19 and 20 inches and for 15 and 16 inches. Similarly, the width V is set to the same value (410 mm, 355 mm) for 19 and 20 inches and for 15 and 16 inches. The height W of the bottom lid and the top lid exposed on the surface has the same value (120 mm, 75 mm) in the case of 19, 20 inches and in the case of 15, 16 inches. The height X of the side wall groove and the side wall exposed on the surface is a constant value (255 mm) regardless of the size of the glass substrate.
[0044]
Table 2 shows the space size and the glass substrate size when the glass substrate transport box is designed based on the example of Table 1, and the difference between the two.
[0045]
[Table 2]

[0046]
In the glass substrate transport box designed to store 15, 16, 19, and 20 inch glass substrates, the space sizes that can be actually used to store the glass substrates are the values shown in Table 2, respectively. . That is, the width of the space size becomes the value of the width B shown in Table 1, and the height of the space size becomes the value of (Q × 2 + R).
[0047]
The sizes of the 15, 16, 19, and 20 inch glass substrates are actually the values shown in Table 2 respectively. Therefore, the glass substrate is supported by the grooves formed in the bottom cover, the top cover, and the side wall groove with a small gap maintained between the lower part, the upper part, and the side part.
[0048]
When a glass substrate is stored in such a box for transporting a glass substrate, the glass substrate is usually set to a surface resistivity of 1 × 10 ⁹ ~ 1 × 10 ¹² After being packed in an electrostatic bag of Ω · cm, it is inserted into the grooves of the bottom cover, the top cover, and the side wall groove. Thus, as described above, the edges (lower, upper, and side) of the glass substrate are supported by the grooves of the bottom cover, the top cover, and the side wall grooves.
[0049]
Then, by fixing the glass substrate transport box with a band or the like, the glass substrate is sandwiched between the bottom lid and the upper lid, and the lower end of the glass substrate whose edge is supported is pressed by the spacer pad. Hitting power is added. At that time, the spacer pad is slightly deformed at the lower end of the pressed glass substrate. As a result, the glass substrate is fixed in the glass substrate transport box by the spacer pads while being supported by the grooves of the bottom lid, the upper lid, and the side wall groove.
[0050]
According to such a box for transporting a glass substrate, the spacer pad can buffer the impact on the glass substrate and can suppress the vibration of the glass substrate. When transported in a conventional packaging form, the vibration may cause about 10% of the electrostatic damage, but the rate of occurrence of the electrostatic damage at the time of transfer can be reduced to 1% or less. .
[0051]
Further, the glass substrate transport box can roughly correspond to two types of glass substrate sizes, that is, a relatively small one of 15,16 inches and a relatively large one of 19,20 inches. That is, for the glass substrates of 15 and 16 inches, the appearance size (T, U, V, W, X) of the glass substrate transport box is the same, and a part of the dimensions of the bottom cover and the top cover (B , C, G, J, Q). Similarly, the appearance size (T, U, V, W, X) of the glass substrate transport box is the same for the 19 and 20 inch glass substrates, and a part of the dimensions of the bottom cover and the upper cover (J , Q) can be dealt with. In accordance with such a dimensional change of the bottom cover and the top cover, the spacer pad is also adjusted to an appropriate size including a fixing margin (α) so that the glass substrate can be appropriately fixed.
[0052]
As described above, the glass substrate size is roughly divided into two types, and the glass substrates having different sizes can be accommodated by merely changing the dimensions of a part of the specific member, so that various types can be accommodated. Can be applied to the transfer of the glass substrate. Therefore, when accommodating glass substrates having different sizes, only the members having dimensional changes need to be changed, and it is not necessary to manufacture the entire glass substrate transport box for each glass substrate.
[0053]
Note that semiconductor components are incorporated in the glass substrate, and are usually packaged in a clean room where the temperature and humidity are kept constant. Therefore, there is a possibility that the glass substrate may condense due to a sharp drop in temperature due to winter transportation or air transportation, or intrusion of moisture during container transportation by ship. When the glass substrate transport box is transported outside the clean room, the glass substrate transport box is transferred from the inside to an aluminum-coated polyethylene bag, for example, polyethylene (70 μm) / aluminum (9 μm) / polyethylene (15 μm) in the clean room. / Nylon (15 μm) layered aluminum-coated polyethylene bag, evacuated and heat-sealed for packing. This makes it possible to suppress intrusion of moisture from the outside.
[0054]
In addition, when automatically storing the glass substrate in such a glass substrate transport box using a robot or the like, the glass substrate is not directly packed in the above-mentioned electrostatic bag, but directly in the glass substrate transport box. It is also possible to pack in. In such a case, the design should be changed appropriately, for example, by leaving a space in the glass substrate transfer box where the robot can grip.
[0055]
Next, a second embodiment will be described.
FIG. 12 is a schematic view of the bottom cover of the glass substrate transport box according to the second embodiment, in which (a) a plan view of the bottom cover, and (b) a bottom viewed from the side where the side wall groove is disposed. It is a center longitudinal cross-sectional view of a lid part, (c) It is the center longitudinal cross-sectional view of the bottom lid part seen from the side where a side wall part is arrange | positioned. However, in FIG. 12, the same elements as those shown in FIG. 1 are denoted by the same reference numerals, and detailed description thereof will be omitted.
[0056]
The glass substrate transport box according to the second embodiment differs from the glass substrate transport box 10 according to the first embodiment in that a desiccant 21 such as silica gel is disposed on the bottom surface of the bottom cover 20. I do. Other points are the same as those of the first embodiment.
[0057]
As shown in FIGS. 12A and 12C, the glass substrate 22 packed in the clean room is provided with a bottom cover for the purpose of suppressing dew condensation due to intrusion of moisture into the glass substrate transport box during transportation. The desiccant 21 is disposed on the bottom surface of the drying agent 20.
[0058]
As shown in FIG. 12A, the desiccant 21 is disposed at two places between the rows 11b and 11c of the bottom cover 20. Further, as shown in FIG. 12C, the desiccant 21 is disposed so as not to touch the glass substrate 22 even when the lower end of the glass substrate 22 is in contact with the spacer pads 15a and 15b. .
[0059]
When transporting the glass substrate transport box of the second embodiment to the outside of the clean room, the glass substrate transport box is wrapped in an aluminum-coated polyethylene bag in the clean room, evacuated, and heat-sealed and packed. This makes it possible to suppress the intrusion of moisture from the outside and control the inside of the glass substrate transport box to a constant humidity by the desiccant 21. The internal humidity can be adjusted by adjusting the amount (weight or number) of the desiccant 21 according to the volume in the glass substrate transport box.
[0060]
Next, a third embodiment will be described.
FIG. 13 is a schematic view of the upper lid of the glass substrate transport box according to the third embodiment, in which (a) a plan view of the upper lid, and (b) a top view of the upper lid as viewed from the side where the side wall grooves are arranged. It is a center longitudinal cross-sectional view, (c) It is the center longitudinal cross-sectional view of the upper lid part seen from the side where a side wall part is arrange | positioned.
[0061]
The glass substrate transport box according to the third embodiment differs from the glass substrate transport box 10 according to the first embodiment in that a gas inlet 31 is provided in the upper cover 30. Other points are the same as those of the first embodiment.
[0062]
According to the glass substrate transport box of the third embodiment, when the glass substrate transport box is transported outside the clean room, first, nitrogen gas or an inert gas is introduced from the gas suction port 31 in the clean room. Replace the gas inside. Then, the glass substrate transport box after the replacement is wrapped in an aluminum-coated polyethylene bag, which is evacuated and heat-sealed for packing. Thereby, invasion of moisture from the outside can be suppressed, and dew condensation on the glass substrate can be suppressed.
[0063]
Next, a fourth embodiment will be described.
The glass substrate transport box according to the fourth embodiment applies a surfactant to the surface of each member, or kneads a substance generally used as a surfactant into a resin foam to form each member. The configuration is formed. This makes it possible to reduce the resistance of the glass substrate transport box itself, suppress the vibration of the glass substrate, and further suppress the generation of static electricity.
[0064]
Furthermore, when the surfactant is kneaded into the resin foam, if the carbon is kneaded using carbon black or the like, the resistance of the glass substrate transport box itself can be further reduced.
[0065]
Next, a fifth embodiment will be described.
The glass substrate transport box according to the fifth embodiment has a configuration in which the same groove as the bottom lid is formed in the spacer pad. Thus, the edge of the glass substrate is supported by the grooves of the bottom cover, the top cover, and the side wall groove, and the lower end is securely fixed by the groove formed in the spacer pad. In this case, the depth of the groove and the margin (α) required for fixing the glass substrate are appropriately set so that the spacer pad can suppress the vibration of the glass substrate.
[0066]
Next, a sixth embodiment will be described.
FIG. 14 is a schematic view of a side wall groove portion of the glass substrate transport box according to the sixth embodiment, in which (a) is a plan view, (b) is a front view, and (c) is a bottom view.
[0067]
The side wall groove portion 40 of the glass substrate transport box according to the sixth embodiment has a structure in which a groove division portion 41 in which a groove portion is formed separately can be attached to and detached from an outer wall portion 42. Here, although not shown, the groove dividing portion 41 has a convex portion on the back side where the groove is not formed, while the outer wall portion 42 has a convex portion on the side where the groove dividing portion 41 is arranged. A recess is formed. The groove dividing portion 41 can be attached to the outer wall portion 42 by fitting the convex portion into the concave portion of the outer wall portion 42. When removing the groove dividing portion 41, the convex portion may be pulled out from the concave portion of the outer wall portion.
[0068]
The groove dividing portion 41 is formed of a resin foam such as foamed polyethylene, and is formed so as to be softer than the resin foam forming the outer wall portion 42. In this way, by making the groove dividing portion 41 detachable, this portion can be formed of a material different from that of the outer wall portion 42. That is, the outer wall portion 42 is formed in consideration of the strength of the glass substrate transport box and the like, and the groove dividing portion 41 can be formed by selecting a foaming ratio and a raw material suitable for suppressing vibration of the glass substrate. .
[0069]
Further, in the sixth embodiment, the groove portion of the bottom lid portion 50 has the same structure as the side wall groove portion 40 shown in FIG.
FIG. 15 is a schematic view of a bottom cover of the glass substrate transport box according to the sixth embodiment, in which (a) a plan view of the bottom cover, and (b) a bottom viewed from the side where the side wall groove is disposed. It is a center longitudinal cross-sectional view of a lid part, (c) It is the center longitudinal cross-sectional view of the bottom lid part seen from the side where a side wall part is arrange | positioned.
[0070]
In the bottom lid portion 50, a groove dividing portion 51 in which a row portion in which a plurality of grooves are formed is formed separately is detachable at a predetermined position on an outer wall portion 52. Although not shown, a point that a convex portion is formed in the groove dividing portion 51 and a concave portion is formed in the outer wall portion 52 is the same as the above-described side wall groove portion 40. The groove dividing portion 51 can also be made of a resin foam such as foamed polyethylene so as to be softer than the resin foam forming the outer wall portion 52. That is, the groove dividing portion 51 and the outer wall portion 52 can be formed of different materials.
[0071]
As described above, the grooves of the side wall groove 40 and the bottom lid 50 are formed separately as the groove divisions 41 and 51, respectively, so that the groove divisions 41 and 51 having different groove dimensions can be shared by the common outer wall 42 and the common outer wall 42. 52 can be used. Therefore, by adjusting the dimensions of the grooves of the groove divisions 41 and 51, it is possible to accommodate a plurality of sizes of glass substrates or to change the number of glass substrates that can be transported by one glass substrate transport box. It is possible to respond.
[0072]
It should be noted that the glass substrate transport box of the second to sixth embodiments is not only provided with the spacer pad according to the present invention, but is also applicable to a conventional glass substrate transport box having no spacer pad. It is possible.
[0073]
(Supplementary Note 1) In a glass substrate transport box for internally transporting the glass substrate having a groove into which the glass substrate is inserted, the edge of the glass substrate being supported by the groove,
Having a spacer pad formed using a resin foam and arranged so that at least a part of an end of the glass substrate is pressed when the glass substrate is supported at the edge by the groove. A box for transporting a glass substrate, characterized by:
[0074]
(Supplementary Note 2) A bottom lid supporting the lower part of the glass substrate, an upper lid supporting the upper part of the glass substrate, a side wall groove supporting the side of the glass substrate, and protecting a surface side of the glass substrate. 3. The glass substrate transport box according to claim 1, wherein the glass substrate transport box comprises:
[0075]
(Supplementary Note 3) The spacer pad has a surface on which at least a part of a lower end portion of the glass substrate is pressed against a bottom lid portion that supports a lower portion of the glass substrate by the groove. The glass substrate transport box according to claim 1, wherein the glass substrate transport box is arranged so as to be higher than a bottom of the glass substrate within a range in which the glass substrate can be housed inside.
[0076]
(Supplementary Note 4) The glass substrate transport box according to supplementary note 1, wherein the spacer pad is formed using expanded polyethylene having an expansion ratio of 3 to 30 times.
[0077]
(Supplementary Note 5) Formed using a resin foam having an expansion ratio of 3 to 30 times, and having a surface resistivity of 1 × 10 ³ From 1 × 10 ¹² 2. The glass substrate transport box according to claim 1, wherein the glass substrate transport range is Ω · cm.
[0078]
(Supplementary Note 6) The glass substrate transport box according to Supplementary Note 1, wherein the portion where the groove is formed has a groove dividing portion formed separately and detachably.
(Supplementary note 7) The glass substrate transport box according to Supplementary note 1, wherein the surfactant is included in a composition of a material having a surface coated or formed with a surfactant.
[0079]
(Supplementary Note 8) The glass substrate transport box according to supplementary note 1, wherein the composition of the material being formed includes carbon.
(Supplementary Note 9) In the glass substrate transporting method for transporting the glass substrate by supporting the edge of the glass substrate by the groove by a glass substrate transport box having a groove into which the glass substrate is inserted,
Packing the glass substrate in an electrostatic bag,
Inserting the glass substrate into the groove in a state packed in the electrostatic bag,
When the assembly of the glass substrate transport box is completed, at least a part of the end of the glass substrate inserted into the groove is pressed against a spacer pad to fix the glass substrate. Transport method.
[0080]
(Supplementary Note 10) In the glass substrate transporting method for transporting the glass substrate by supporting the edge of the glass substrate by the groove by a glass substrate transport box having a groove into which the glass substrate is inserted,
Inserting the glass substrate into the groove,
When the assembly of the glass substrate transport box is completed, at least a part of the end of the glass substrate inserted into the groove is pressed against a spacer pad to fix the glass substrate,
Wrap the glass substrate transfer box to which the glass substrate is fixed in an aluminum-coated polyethylene bag,
Exhaust the gas in the aluminum-coated polyethylene bag,
A method of transporting a glass substrate, wherein the aluminum-coated polyethylene bag is heat-sealed.
[0081]
【The invention's effect】
As described above, in the present invention, the spacer pad is formed using a resin foam, and at least a part of the edge of the glass substrate is pressed when the edge of the glass substrate is supported by the groove. Then, it is placed in a glass substrate transport box. Thereby, the generation of static electricity can be suppressed by suppressing the vibration of the glass substrate, and the static electricity failure of the glass substrate can be suppressed.
[Brief description of the drawings]
FIG. 1 is a schematic view of a bottom cover of a glass substrate transport box according to a first embodiment, wherein (a) is a plan view of the bottom cover, and (b) is viewed from a side where a side wall groove is disposed. It is a center longitudinal cross-sectional view of a bottom lid part, (c) It is a center longitudinal cross-sectional view of the bottom lid part seen from the side where a side wall part is arranged.
FIG. 2 is an external view of a glass substrate transport box according to the first embodiment.
FIG. 3 is an explanatory diagram of a method of connecting a side wall groove and a side wall.
FIGS. 4A and 4B are explanatory views of a method of connecting the bottom cover to the side wall groove and the side wall, and FIG. 4A is a central longitudinal sectional view as viewed from the side where the side wall of the bottom cover is arranged; It is the figure which looked at the bottom lid part to which the groove part and the side wall part were connected from the top.
FIG. 5 is a schematic plan view of a bottom cover or an upper cover.
FIG. 6 is a schematic side view of a groove formed in a bottom cover or an upper cover.
FIG. 7 is a schematic cross-sectional view of a bottom cover or an upper cover.
FIG. 8 is a schematic plan view of a side wall groove.
FIG. 9 is a schematic side view of a groove formed in a side wall groove.
FIG. 10 is a schematic plan view of a side wall portion.
FIG. 11 is a schematic view of the entire glass substrate transport box.
FIGS. 12A and 12B are schematic views of a bottom cover of the glass substrate transport box according to the second embodiment, in which FIG. 12A is a plan view of the bottom cover, and FIG. It is a center longitudinal cross-sectional view of a bottom lid part, (c) It is a center longitudinal cross-sectional view of the bottom lid part seen from the side where a side wall part is arranged.
FIGS. 13A and 13B are schematic views of the upper lid of the glass substrate transport box according to the third embodiment, wherein FIG. 13A is a plan view of the upper lid, and FIG. 13B is an upper lid viewed from the side where the side wall groove is disposed. (C) is a central vertical cross-sectional view of the upper lid seen from the side where the side wall is disposed.
FIG. 14 is a schematic view of a side wall groove portion of a glass substrate transport box according to a sixth embodiment, wherein (a) is a plan view, (b) is a front view, and (c) is a bottom view.
FIGS. 15A and 15B are schematic views of a bottom cover of the glass substrate transport box according to the sixth embodiment, in which FIG. 15A is a plan view of the bottom cover, and FIG. It is a center longitudinal cross-sectional view of a bottom lid part, (c) It is a center longitudinal cross-sectional view of the bottom lid part seen from the side where a side wall part is arranged.
[Explanation of symbols]
10 Glass substrate transport box
11,20,50 Bottom lid
11a groove
11b, 11c columns
11d recess
12,30 Upper lid
13,40 Side wall groove
13a Projection
13b protrusion
14 Side wall
14a opening
15a, 15b Spacer pad
16 keys
21 Desiccant
22 Glass substrate
31 Gas inlet
41, 51 Groove division
42,52 Outer wall

Claims (5)

A glass substrate transport box for transporting the glass substrate with a groove into which the glass substrate is inserted, and supporting the edge of the glass substrate by the groove,
Having a spacer pad formed using a resin foam and arranged so that at least a part of an end of the glass substrate is pressed when the glass substrate is supported at the edge by the groove. A box for transporting a glass substrate, characterized by: A bottom lid supporting the lower part of the glass substrate, an upper lid supporting the upper part of the glass substrate, a side wall groove supporting the side of the glass substrate, and a side wall protecting the surface side of the glass substrate. The glass substrate transport box according to claim 1, comprising: The surface of the spacer pad against which at least a part of the lower end of the glass substrate is pressed against the bottom lid supporting the lower part of the glass substrate by the groove, than the bottom of the groove of the bottom lid. The glass substrate transport box according to claim 1, wherein the glass substrate transport box is arranged to be as high as possible within a range in which the glass substrate can be housed inside. 2. The glass substrate transport box according to claim 1, wherein the spacer pad is formed using foamed polyethylene having a foaming ratio of 3 to 30 times. 2. The glass substrate transport box according to claim 1, wherein a portion where the groove is formed has a groove dividing portion formed separately and detachably.

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