JP2007042776A - Substrate transferring container - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate transferring container which is formed of a foamed synthetic resin in its major part to assure easier input and output of glass substrates to and from the container body, to prevent careless transfer to the upper and lower directions of the substrates being transferred, and to assure less generation of missing or crack due to such careless transfer. <P>SOLUTION: Previously formed individual internal heat insulating plates 10, 12, 20 formed of foamed synthetic resin are arranged to be removable at the internal side of an external container formed of the foamed synthetic resin in order to constitute a double-wall of heat insulating material with a bottom wall 4a, a pair of longer side walls integrally erected from this bottom wall 4a, and a pair of short side walls. Simultaneously, these internal heat insulating plates 10, 12, 20 and resin sheet members 14, 16, 18 previously formed individually are loaded to be removable, and a little gap is assured between the sheet member and the internal heat insulating plate. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a substrate carrying container suitable for accommodating and carrying a large number of substantially rectangular glass substrates for liquid crystal.

  In general, when moving substrates such as glass substrates for liquid crystals to other locations for the purpose of manufacturing processes, etc., a large number of sheets are accommodated so that the substrates do not come into contact with each other and can be transported safely while preventing contamination. A substrate transport container is used in which the lid is tightly fitted in the state.

  Among such substrate transport containers, there is one in which a substantially rectangular parallelepiped container main body and a lid attached to the opening of the container main body are both formed from a foamed synthetic resin (for example, Patent Documents). 1).

  In the substrate transport container of Patent Document 1, the glass substrate is transported in a state of being directly locked in a substrate support groove formed on the inner surface of the foamed synthetic resin container body. Therefore, when rubbing or the like occurs on the glass substrate in the middle of conveyance, the support groove portion on the inner surface of the container body that is in direct contact with the glass substrate is likely to deteriorate. As a result, the substrate support groove made of foamed synthetic resin is scraped and foamed. Has a problem of adhering to the glass substrate as dust.

  Further, when the glass substrate for liquid crystal is transported far away using such a foam synthetic resin substrate transport container, it is necessary to protect the substrate from moisture. For this reason, the desiccant is stored in the container body or the lid. However, since such a desiccant is generally attached with a tape or the like, when the adhesive strength of the tape is reduced and the desiccant falls, the desiccant may damage the surface of the glass substrate. was there.

On the other hand, there is also provided a container for transporting a substrate in which a protective film made of a polyethylene film is additionally provided inside the container body (Patent Document 2).
In the case of this Patent Document 2, as shown in FIG. 13, a groove that matches the shape of the groove 212a of the inner wall 211 on the foam side is formed on a pre-formed flat polyethylene film 212B by thermoforming. The protective film 212b in which the groove is formed is heated and fused simultaneously with the formation of the groove 212a, thereby covering the inner surface of the groove 212a. With such a configuration, unlike the case of Patent Document 1, since the glass substrate does not directly contact the inner wall 211 of the foam, the formation of dust by the foam can be prevented.
JP 7-132986 A JP 2005-8194 A

  However, in the case of Patent Document 2, since the protective film 212b is closely bonded to the foam inner wall 211, the inner wall 211 and the protective film 212b always move together. Therefore, even if an impact is applied to the inner wall 211 of the container body, the protective film 212b cannot function as a cushioning material, and the impact is directly transmitted to the substrate. As a result, there is a problem that the substrate is chipped or cracked.

  Furthermore, in Patent Document 2, the width s of the pair of substrate locking grooves 212b facing each other is set to be substantially the same length from the upper part (the entrance part of the board insertion) to the lower part (the final part of the board insertion) of the box body. ing.

  When the width s of the substrate locking groove is formed to be the same width from the entrance in the substrate insertion direction to the end of the inserted portion, when the substrate is inserted with a slight inclination, There was a problem that the substrate was damaged.

  Even if the substrate is safely mounted to the end of the substrate locking groove without being damaged, if the glass substrate bounces vertically, for example, while the substrate is being transported, play around the substrate. There is also a problem that the substrate is damaged by the impact because there is no space for the use.

  In view of such a situation, the present invention is a substrate transport container, the main part of which is formed from a foamed synthetic resin, and it is easy to mount and take out a glass substrate on the container body, and the substrate being transported is not prepared. It is an object of the present invention to provide a substrate transport container that prevents the vertical movement of the substrate and thereby reduces the risk of chipping or cracking of the substrate.

  It is another object of the present invention to provide a substrate transport container that does not cause substrate damage due to the falling of the desiccant even when the desiccant is stored.

In order to achieve the above object, a substrate carrying container according to the present invention is:
A synthetic resin container having a bottomed rectangular tube shape and one side opened by a bottom wall portion, a pair of long side wall portions and a pair of short side wall portions raised integrally from the bottom wall portion. The body,
A substrate carrying container made of a foamed synthetic resin lid that is detachably mounted so as to cover the opening of the one surface of the container body,
The container body is
Foam formed separately in advance so that the bottom wall portion, the pair of long side wall portions raised integrally from the bottom wall portion, and the pair of short side wall portions each constitute a double wall made of a heat insulating material. A synthetic resin inner heat insulating plate is detachably disposed inside the outer container body made of foamed synthetic resin, and a resin sheet member formed separately in advance is detachable on the inner heat insulating plate. It is characterized by being attached to.

  According to the present invention having such a configuration, a slight gap can be formed between the resin sheet material and the foamed synthetic resin plate material, so that a buffering action is provided between the resin sheet and the plate material due to the gap. It can be demonstrated. Further, even if the substrate itself vibrates due to an impact, the vibration can be absorbed by deformation within an allowable range of the resin sheet. Therefore, even when the substrate is moved carelessly during normal conveyance, it is possible to prevent the occurrence of cracks and chips. In addition, the inner heat insulating plate and the resin sheet are not formed as a box-shaped integrated product, but are all rectangular plate-shaped products, so that the formation is easy and it is easy to maintain the dimensional accuracy.

Here, it is preferable that a foam raising synthetic resin bottom raising member formed separately in advance is detachably and selectively disposed on the lower surface of the inner heat insulating material disposed on the bottom surface of the container body.
If it is such a structure, if a bottom raising member is used as needed, it is applicable also to accommodation of the glass substrate from which a size differs. Furthermore, since the cushion action is also exhibited, the impact resistance can be improved.

  Further, in the present invention, between the bottom surface of the container body and the inner heat insulating material disposed thereon, and between the inner heat insulating material disposed on the bottom surface and the bottom raising member, mutual assembly posture It is preferable that a positioning and fixing means for uniquely determining the above is configured.

With such a configuration, it is easy to attach and remove the inner heat insulating agent and the bottom raising member to the bottom surface of the container body.
Further, the positioning and fixing means may be composed of a convex portion and a concave portion.

Such a configuration is easy to design and easy to align.
Moreover, the inner heat insulating board arrange | positioned at the bottom face of the said container main body may be formed with the recess for accommodating a desiccant.

If the desiccant is accommodated in such a recess, the glass substrate can be protected from moisture during transportation.
Furthermore, it is preferable that the resin sheet arrange | positioned at the upper part of the inner side heat insulation board arrange | positioned at the bottom face of the said container main body is formed with the slit connected to the said recess.

  With such a configuration, the desiccant can be easily taken in and out.

  In the substrate transport container according to the present invention, the substrate mounting and substrate taking out workability is good. In addition, since the cushion action is exhibited in the gap formed between the resin sheet and the inner heat insulating plate, even if the substrate moves up and down by vibrations during transportation, the force is transmitted to the resin sheet The resin sheet can be recessed or deformed to absorb the force. Moreover, if transmission of the force by vibration is cancelled | released, the deformed resin sheet can be returned to the original state. In this way, cracks and the like of the substrate can be prevented as much as possible. Furthermore, the cushioning action is improved by using the bottom raising member. Of course, one substrate container can also be used for transporting glass substrates having different sizes.

  Further, in the substrate transport container of the present invention, the inner heat insulating plate and the resin sheet are not integrally formed like a hexahedron, and are all formed separately, so that formation and improvement in dimensional accuracy are easy.

  Furthermore, in order to obtain a predetermined dimensional accuracy, it is possible to adjust between the inner heat insulating plate and the resin sheet without managing all the dimensional accuracy, and the degree of freedom in design can be increased. Further, when the desiccant is accommodated, a tape or the like is not necessary, and if the desiccant is accommodated inside through the slit, the desiccant can be prevented from dropping and damaging the substrate.

  Further, the container body is made of a foamed synthetic resin, and the substrate accommodated against an external impact can be protected from the impact, and the occurrence of condensation due to a temperature difference or the like can be prevented.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is a front view of a substrate transport container according to an embodiment of the present invention, and FIG. 2 is a plan view of the container body when a lid is removed from the substrate transport container shown in FIG. 3 is an exploded cross-sectional view of the substrate transfer container shown in FIG. 1, FIG. 4 is a cross-sectional view of the substrate transfer container in the short direction, and FIG. 5 is a cross-sectional view of the substrate transfer container in the longitudinal direction.

  Briefly explaining the substrate transfer container of this embodiment, a plate-like heat insulating material is arranged in a two-layer structure inside a box-shaped outer container made of foamed synthetic resin, and further, the inner inner surface thereof A resin sheet is disposed throughout.

That is, as shown in FIGS. 1 and 2, the substrate transport container 2 of this embodiment includes a container body 4 made of foamed synthetic resin having an opening on one side, and an upper portion of the container body 4. It is composed of a foamed synthetic resin lid 6 that is detachably mounted so as to cover the opening 4f. In addition,
In the following description, the outer container 50 of the container body 4 is the angle at which the upper part constituting the outermost outer shell is opened in the container body 4 from which the lid body 6 is removed from the substrate transport container 2. A cylindrical foamed synthetic resin portion is shown.

  That is, as shown in FIGS. 1 and 3, the outer container 50 made of foamed synthetic resin constituting the outermost shell of the container body 4 has band-shaped recesses 22 and 22 formed on the outer surface. These strip-shaped recesses 22 are formed continuously with the recesses 6 a and 6 a formed on the outer surface of the lid body 6. And when the container main body 4 and the cover body 6 are assembled | attached integrally to the recess 22 and the recess 6a, a fastening band is passed and it packs.

  Such an outer container 50 includes a bottom wall portion 4a, a pair of long side wall portions 4b and 4c that are integrally raised from the bottom wall portion 4a, and a pair that is also integrally raised from the bottom wall portion 4a. Short side wall portions 4d and 4e.

  As shown in FIGS. 3 to 5, a horizontal protrusion 4 h is formed in the mouth 4 g of the outer container 50 in the lateral direction. By fitting a concave groove (not shown) formed on the inner peripheral surface of the lid body 6 to the horizontal protrusion 4h, the lid body 6 is closely fitted to the container body 4 and is prevented from falling off.

  The four inner wall surfaces around the outer container 50 are formed to be substantially flat. On the upper surface of the bottom wall part 4a of the outer container 50, as shown in FIG. They are spaced apart.

  The outer container 50 has a plate-like inner heat insulating plate 20, 10, 10, 12, on the inner surface side of the bottom wall portion 4a, the pair of long side wall portions 4b, 4c, and the pair of short side wall portions 4d, 4e. 12 are arranged respectively. A bottom raising member 8 is selectively disposed on the bottom wall portion 4a. Thus, when the bottom raising member 8 is arrange | positioned, the inner side heat insulation board 20 is arrange | positioned on it. As shown in an enlarged view in FIG. 6, the bottom raising member 8 is made of a foamed synthetic resin having a predetermined plate thickness. Thus, if the plate-like bottom raising member 8 is prepared, the bottom raising member 8 The space height inside the container can be adjusted in two stages depending on whether it is present or absent. Therefore, it becomes possible to accommodate substrates of different sizes.

  A pair of protrusions 8a and 8a are formed on the upper surface of the bottom raising member 8 so as to be separated by a predetermined distance. The separation distance between the protrusions 8 a and 8 a is formed to be equal to the separation distance between the protrusions 4 i and 4 i of the outer container 50. Further, concave portions 8b and 8b are formed on the rear surface of the bottom raising member 8 so as to be located immediately below the protrusion 8a.

  Therefore, if such a bottom raising member 8 is installed inside the outer container 50, the recess 8 b of the bottom raising member 8 is positioned on the protrusion 4 i of the outer container 50 and fitted to each other. Thereby, the bottom raising member 8 is installed so as not to move with respect to the outer container 50.

  On the other hand, the inner surface of the bottom side heat insulating plate 20, the long side wall inner heat insulating plates 10 and 10, and the short side wall inner heat insulating plates 12 and 12 disposed inside the outer container 50 are made of resin. Covered by sheet members 18, 14, 16. In addition, since these resin-made sheet members 18, 14, and 16 have almost no thickness, in FIG.2, FIG.4, FIG.5 etc., it is shown integrally with the inner side heat insulation board 20,10,12.

  7 shows the relationship between the inner heat insulating material 20 and the sheet member 18 at the bottom wall, FIG. 8 shows the relationship between the inner heat insulating material 10 and the sheet member 14 at the long side wall, and FIG. 9 shows the inner heat insulating material at the short side wall. 12 shows the relationship between the sheet member 16 and the sheet member 16, respectively.

Hereinafter, each of these components will be described in detail.
As shown in FIG. 7, at the bottom wall portion, a thin resin sheet member 18 is detachably installed so as to cover the upper surface of the inner heat insulating plate 20 for the bottom surface. The resin sheet member 18 is a recess that is recessed inward when viewed from the back side. Conversely, the surface shape of the sheet member 18 is formed in substantially the same manner as the outer shape of the inner heat insulating material 20.

A plurality of protrusions 21 are formed on the upper surface of the inner heat insulating material 20 for the bottom surface, whereby substrate locking grooves 20 a are formed at a predetermined pitch between the adjacent protrusions 21.
On the other hand, on the pair of short sides of the inner heat insulating material 20, convex portions 20 b extending in the horizontal direction are formed at the center portion and both end portions, so that concave portions are formed at intermediate portions of these convex portions 20 b. Further, by making it easy to put a finger or the like into the recess, convenience of taking in / out work is achieved. On the other hand, on the long side of the inner heat insulating material 20, the concave portions 20 d and 20 d are formed on both sides of the convex portion 20 c by forming the convex portion 20 c at the central portion. These recesses 20d are used as a desiccant-containing space, as will be described later.

  On the other hand, in the outer surface of the thin resin sheet member 18 that is detachably mounted on the upper surface of the inner heat insulating material 20 for the bottom surface, a recess corresponding to the protrusion 21 of the inner heat insulating material 20 (in the state of FIG. 7). If it sees, it is the protrusion 19 which protruded to the outer side, and this back side becomes a recessed part). Further, slits 23 and 23 are formed on one long side of the sheet member 18 so that a finger or the like can enter inside through the slits 23. And when the sheet | seat member 18 is covered on the inner side heat insulation board 20, it is made possible to put a desiccant into the recess 20d of the inner side heat insulation board 20 through the slit 23. FIG.

Next, the structure of the long side wall will be described with reference to FIGS.
On the long side wall, the inner side surface of the sheet member 14 is formed in substantially the same manner as the outer shape of the inner heat insulating plate 10. That is, a plurality of thin round protrusions 10a (3 × 5 = 15 in the embodiment) are formed on the surface of the inner heat insulating material 10. In addition, the region of the formation region T (A × B) surrounding the protrusion 10a is formed to be slightly thicker than the outer peripheral portion R.

  As described above, the protrusions 10a are provided on the central surface of the inner heat insulating plate 10 and the thickness of the formation region T is set to be thicker than that of the surrounding area, so that the inner heat insulating plate 10 is warped. Is prevented. On the other hand, as shown in FIG. 10, the thickness of the outer peripheral portion R of the inner heat insulating plate 10 is formed to become slightly thinner from the upper side to the lower side (D> d). Thus, the shape of the inner heat insulating plate 10 is formed such that the tip portion close to the bottom wall portion is slightly sharpened like a wedge.

  The sheet member 14 has a slightly larger outer diameter so that the inner heat insulating plate 10 can be covered. Further, the portion corresponding to the protrusion 10a of the inner heat insulating plate 10 is not a round recess but a recess surrounded by vertical and horizontal lattices 32 (border lines). In addition, if the line | wire of this grating | lattice 32 is seen from the inner side heat insulation board 10 side in FIG. 8, it will protrude to the inner side heat insulation board 10 side. Further, the tongue piece 14 a provided at the upper edge portion of the sheet member 14 is bent to the back surface portion of the inner heat insulating plate 10, so that it is positioned so as not to move with respect to the inner heat insulating plate 10.

Next, the assembly of the short-side-wall inner heat insulating plate 12 and the sheet member 16 will be described with reference to FIGS.
First, as shown in FIG. 9, a large number of substrate locking grooves 12a are formed continuously in the length direction on the inner heat insulating plate 12 for the short side wall. The width f of the substrate locking groove 12a is the same on the upper side and the lower side. However, as shown in FIG. 11, the thickness of the inner heat insulating plate 12 is different between the upper part and the lower part, and is formed to be slightly thinner from the top to the bottom (E> e). As described above, the inner heat insulating plate 12 is also formed to have a slightly wedge-shaped tip as in the case of the inner heat insulating plate 10.

  The thin resin sheet member 16 has an outer diameter dimension slightly larger than that of the inner heat insulating plate 12 so as to cover the surface of the inner heat insulating material 12. The width g of the groove 16a is set to be the same on the upper side and the lower side.

  As shown in FIG. 12, the resin sheet 16 has a play portion with respect to the inner heat insulating material 12. Therefore, the substrate can be moved when the substrate is sandwiched between the portions g.

  As shown in FIG. 9, when the sheet member 16 is attached to the outside of the inner heat insulating material 12, the tongue 16 b at the upper edge is bent to the back surface of the inner heat insulating plate 12, thereby Positioning so as to be immovable with respect to 12 is the same as the sheet member 14 described above.

  Each component of the substrate transport container 2 according to this embodiment is configured as described above, and the assembly order will be described below. Note that the order of assembly is not limited to this. Moreover, in the following description, the case where the bottom raising member 8 is used will be described.

  First, the inner heat insulating plates 10 and 10 made of foamed synthetic resin and the thin sheet members 14 and 14 disposed on the pair of long side walls, the inner heat insulating plates 12 and 12 of the pair of short side walls, and the thin sheet members 16 and 16. Assembled in advance. Similarly, the inner heat insulating plate 20 for the bottom surface and the thin sheet member 18 are assembled in advance. When the units arranged inside the outer container 50 are thus formed, first, the bottom raising member 8 is inserted into the outer container 50. At this time, the protrusions 8 a and 8 a of the bottom raising member 8 are arranged so as to be aligned with the protrusions 4 i and 4 i of the outer container 50.

Next, the unit for the bottom surface, that is, the unit of the inner heat insulating plate 20 and the sheet member 18 shown in FIG. 7 is disposed on the bottom raising member 8. This constitutes the bottom surface.
Next, the short side wall unit, that is, the unit of the inner heat insulating plate 12 and the sheet member 16 shown in FIG. 9 is assembled to the short side wall.

Further, the long side wall unit, that is, the unit of the inner heat insulating plate 10 and the sheet member 14 shown in FIG. 8 is assembled to the long side wall.
Thereby, all the components are assembled and the assembly of the container body 4 is completed. When a desiccant such as silica gel is installed in the container, if a desiccant such as silica gel is inserted into the inside of the slit 23 of the sheet member 18 disposed on the bottom wall portion, the desiccant is contained in the recess 20d. Can be accommodated. Moreover, since the entrance is the slit 23, the desiccant is prevented from inadvertently jumping outward.

Thus, the substrate transport container 2 is configured.
The substrate transport container of the present embodiment has the above-described configuration, and the substrate can be stored and transported safely in this container. That is, since the container main body and the lid are formed of the foamed synthetic resin excellent in impact resistance and heat resistance, the substrate transport container of the present embodiment is not affected by external impacts or external temperature changes. It is possible to protect the internal stress generated by the stored substrate (mainly stress caused by the weight of the substrate), and a slight gap is formed on the corresponding wall surface in the container. The sheet member can be absorbed by the flexibility, and the storage substrate can be transported or stored more safely.

Further, for example, when the glass substrate is inserted into the container body 4, the thickness of the inner heat insulating plates 10 and 12 disposed outside the container of the sheet member 16 with which the corners of the substrate come into contact is as large as the upper part of the opening. Since it is thicker and thinner toward the lower side, it is easy to insert after positioning the glass substrate in the vicinity of the entrance. Further, when the insertion of the substrate is completed, the substrate is sandwiched by the narrow portion on the upper side (opening side), so that the substrate is prevented from inadvertently protruding from the groove portion. Further, when the substrate is inserted, if the substrate is inserted a little, the width of the inside is wider than the entrance, so that even if the substrate is bent slightly, the bending can be absorbed. On the contrary, vibration occurs in the container main body during transportation, and even if the substrate tries to jump out of the container main body due to the vibration, the opening is narrowed so that the substrate can be prevented from jumping out. Furthermore, even if the board may be inserted slightly bent, a gap is secured between the resin sheet member and the inner heat insulating plate inside as shown in FIG. Since it deform | transforms so that the sheet | seat member 16 may be pressed on the inner side heat insulation board 12, reaction force does not act strongly on a board | substrate. Therefore, cracks and the like of the substrate can be prevented as much as possible.

  Further, by using the bottom raising member 8, the depth of the container can be adjusted in correspondence with the substrate to be transported, and an extra space can be prevented from being formed in the container. The substrate can be transported.

  In addition, although the structure of the cover body 6 by the said Example is not demonstrated in detail, even if it does not provide an inner side heat insulating board about this cover body 6, it can be set as a two-layer structure. That is, a thin sheet member may be fitted inside the lid container made of foamed synthetic resin. In such a case, a substrate mounting groove is provided in each of the lid container and the sheet member. If such a lid 6 is prepared, three sides of the glass substrate can be held when the glass substrate is mounted.

The substrate transport container of the present invention is not limited to the above-described embodiment, and various modifications can be made.
For example, a gas exchange port may be provided in the substrate transport container, and the air in the substrate transport container may be replaced with an inert gas such as nitrogen gas or argon gas.

  The substrate transfer container of the present invention is usually used so that the glass substrate stored in the container stands upright. In order to clarify the loading direction of such a substrate transfer container, the outer side of the container is used. Can also be marked to clearly indicate the loading direction.

The substrate transfer container of the present embodiment is preferably used, for example, when the glass substrate is moved, but is not limited to the time of movement, and can of course be used during storage. .
Such a substrate transport container can safely transport and store a substrate such as a liquid crystal substrate, a glass substrate for liquid crystal, a wiring substrate, and a circuit substrate.

FIG. 1 is a front view of a substrate carrying container according to an embodiment of the present invention. FIG. 2 is a plan view of the container body when the upper lid is removed from the substrate carrying container of FIG. 1 and the inside is viewed. FIG. 3 is an exploded perspective view of the substrate transfer container shown in FIG. 4 is a cross-sectional view of FIG. 1 taken along the longitudinal line. FIG. 5 is a cross-sectional view taken along line BB in FIG. FIG. 6 is an enlarged perspective view of the bottom raising member shown in FIG. FIG. 7 is an exploded perspective view showing the assembly of the inner heat insulating plate and the sheet member arranged on the bottom wall portion in FIG. FIG. 8 is an exploded perspective view showing the assembly of the inner heat insulating plate and the sheet member arranged on the long side wall portion in FIG. FIG. 9 is an exploded perspective view showing the assembly of the inner heat insulating plate and the sheet member arranged on the short side wall portion in FIG. FIG. 10 is a side view of the inner heat insulating material for the long side wall. FIG. 11 is a side view of the inner heat insulating material for the short side wall. FIG. 12 is an enlarged cross-sectional view in a state in which the short side wall inner heat insulating material and the resin sheet shown in FIG. 9 are assembled, and is an explanatory diagram in which a glass substrate is arranged in a portion g. FIG. 13 shows the structure of a conventional transport container. FIG. 13 (A) is a cross-sectional view of a polyethylene film before heating, FIG. 13 (B) is a cross-sectional view of a heated protective film, and FIG. ) Is a cross-sectional view showing an attachment structure between the heated protective film and the inner wall of the foam.

Explanation of symbols

2 Substrate transport container 4 Container body 4a Bottom wall portion 4b, 4c Long side wall portion 4d, 4e Short side wall portion 4f Opening 4g Opening portion 4h Horizontal projection 4i Protrusion 6 Lid 6a Recess 8 Bottom raising member 8a Protrusion 8b Recess 10 For long wall Inner heat insulating plate 12 Inner heat insulating plate 14 for short wall Sheet member 16 Sheet member 18 Sheet member 20 Inner heat insulating plate 20a for bottom surface Substrate locking groove 21 Projection 22 Recess 50 Outer container

Claims (6)

A synthetic resin container having a bottomed rectangular tube shape and one side opened by a bottom wall portion, a pair of long side wall portions and a pair of short side wall portions raised integrally from the bottom wall portion. The body,
A substrate carrying container made of a foamed synthetic resin lid that is detachably mounted so as to cover the opening of the one surface of the container body,
The container body is
Foam formed separately in advance so that the bottom wall portion, the pair of long side wall portions raised integrally from the bottom wall portion, and the pair of short side wall portions each constitute a double wall made of a heat insulating material. A synthetic resin inner heat insulating plate is detachably disposed inside the outer container body made of foamed synthetic resin, and a resin sheet member formed separately in advance is detachable on the inner heat insulating plate. A substrate transporting container which is mounted on a substrate.   The bottom raising member made of foamed synthetic resin, which is separately formed in advance, is detachably and selectively disposed on the lower surface of the inner heat insulating material disposed on the bottom surface of the container body. 1. A container for transporting a substrate according to 1.   A mutual assembling posture is uniquely determined between the bottom surface of the container body and the inner heat insulating material disposed thereon, and between the inner heat insulating material disposed on the bottom surface and the bottom raising member. 3. The substrate transfer container according to claim 1, wherein positioning and fixing means are configured.   4. The substrate transfer container according to claim 3, wherein the positioning and fixing means includes a convex portion and a concave portion.   4. The substrate transfer container according to claim 3, wherein a recess for accommodating a desiccant is formed in the inner heat insulating plate disposed on the bottom surface of the container main body.   The container for transporting a substrate according to claim 5, wherein a slit communicating with the recess is formed in a resin sheet disposed on an upper side of an inner heat insulating plate disposed on a bottom surface of the container body. .

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