KR20070052789A - Method for aligning micro-apertures of parts using laser difflection patern and system using the same - Google Patents

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of aligning apertures using a laser, and to a method of aligning vertical alignment between holes of a plurality of parts by forming a diffraction pattern using a laser beam.

Description

 METHOD FOR ALIGNING MICRO-APERTURES OF PARTS USING LASER DIFFLECTION PATERN AND SYSTEM USING THE SAME}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for aligning micropores using a laser diffraction pattern. The present invention relates to precisely coaxially aligning holes of components such as various and very small pinhole-type electron lenses, especially in an ultra-small electron beam apparatus. It relates to a method and a system. The present invention relates to a method and a system for arranging thin plates composed of fine holes in multiple layers by analyzing interference patterns generated by using a laser beam in a hole located in the center of each square or circular membrane.

High magnification optical microscopes or aligners when aligning electron lenses (consisting of several to several hundred micrometers of circular holes in the center of a thin film having a thickness of several micrometers in the center) in multiple layers in a conventional micro electron beam device It will be aligned using equipment such as.

However, the above methods have a problem that the precision is determined by the resolution of the microscope and the aligner, and final alignment confirmation is not easy, and expensive equipment must be used.

Accordingly, in order to solve such a problem, the present applicant relates to a method of aligning apertures using a laser, and related to a method of aligning vertical alignment between holes of a plurality of parts by forming a diffraction pattern using a laser beam. Patent application No. 10-2001-0040196 has been filed. In the above-mentioned conventional invention, a diffraction pattern, a precision linear stage, and the like, which are formed when a laser beam having a certain phase passes through an aperture based on wave optics, etc. It uses a relatively simple technique to provide a way to align thin plates consisting of fine holes into layers.

However, the above-described conventional invention has a disadvantage in that precision is low when the size of the hole is very small in aligning holes of various sizes by forming a diffraction pattern through a hole such as a lens. In addition, when there are several holes in the part, that is, when the microcolumn lens is multi-type such as wafer type, each hole must be aligned. You may get out of coax and realign. In addition, the alignment method using the diffraction pattern of the conventional laser beam has no problem when the size of the holes of the lens and the like to be aligned is similar to the cross-sectional size of the laser beam and the sizes of the holes of the lenses and the like are similar. If the size of the holes of the lens is diversified or the sizes of the holes of the plurality of lenses are different, there is a problem that the precise alignment is not made because the diffraction pattern is not accurately formed.

In addition, in the interpretation of the diffraction pattern, visual interpretation by the naked eye or a CCD camera may be difficult to precisely interpret. Because it is difficult to exclude subjective judgments about individual differences of vision and shapes, and errors may occur in precise alignment.

In addition, the above method has a problem in that efficient production is difficult due to the read time in mass production.

Technical challenge

Accordingly, the present invention has been made to solve the problems of the prior art, and focusing the laser beam according to the size of the hole, such as the lens to focus the diffraction pattern to form more precisely to align the holes such as the lens and The purpose is to provide a system.

It is also an object of the present invention to provide a method and system for aligning two or more holes, such as a plurality of lenses, so that the other remaining holes are also aligned.

In addition, the present invention provides a method for easier analysis and alignment than analyzing the shape of the pantone such as the naked eye or CCD camera in analyzing the existing diffraction pattern.

Technical solution

Alignment method of the fine holes using the laser of the present invention for achieving the above object,

Fixing a part having an aperture (hereinafter referred to as a “first part”) to the stage so as to penetrate the laser beam through the hole;

Focusing the laser beam such that the laser beam is focused in the hole of the first part;

An alignment means that the focused laser beam aligns with the laser beam such that an accurate diffraction pattern according to the shape of the hole appears on a screen placed at a predetermined distance from the hole of the first part. 1 sorting step; And

The other part (hereinafter referred to as 'second part') having a through hole to be aligned with the first part is passed through the aperture of the second part again so that the laser beam on the screen A second alignment, positioned above or below the first part so as to appear on the screen and aligned with a positioning device such that the laser beam on the screen again forms an accurate rotation pattern according to the shape of the hole of the new second part It includes; step.

In addition, the method for aligning the parts having a reference through aperture (aperture) according to the invention, characterized in that the parts are aligned by aligning the parts by the fine hole alignment method.

The system for aligning the holes of the parts according to the invention

laser; A focus lens for beam focusing coming from the laser; A first stage for fixing and adjusting a first alignment target component (hereinafter referred to as a first component) to align the laser beam focused by the focus lens through the hole of the alignment target component; A second stage for fixing and adjusting a second alignment target part (hereinafter referred to as a second part) to align the laser beam penetrating the hole of the first part through the hole of the second part; And a screen or an image sensor for projecting a laser beam through the hole of the second part.

The basic principle of aligning using a laser beam is the same as that of Korean Patent Application No. 10-2001-0040196, which is used herein as a reference.

In other words, as shown in FIG. 1, the present invention, which uses a laser beam to align micropores, uses the principle of interference, that is, passes through the first microhole (a) of the first membrane (m1) to be used for optical alignment. The interference fringes generated from the interference fringes of the light generate bright fringes due to constructive interference at every distance y _m to the mth destructive interference fringes. When viewed on the screen of a monitor (not shown) connected to an image detector or a screen, or directly on a screen, the position of the interference pattern due to the constructive and destructive interference can be confirmed. y _m is

As shown in FIG. 1, a is the diameter of the hole, s is the distance between the target thin film and the screen, m is the natural number, which indicates the number of destructive interferences, and λ is the wavelength of the laser used as the wavelength of the light source.

In this state, if the optical alignment micro holes (b) of the second thin film (m2) are inserted and maintained with the distance (s) between the first micro holes (a) and the screen (CCD), accurate collimation cannot be achieved. If not, a change occurs in the position of the brightest part corresponding to m = 0, and the first microlens and the second microlens are aligned in a straight line as in the case of the optical alignment microhole. In addition, several thin films can be collimated in a straight line.

In addition, if the laser wavelength and the exact distance to the thin film and the CCD sensor are known in advance, the exact diameter of the electron lens can be determined from the position y _m of the interference fringe measured on the monitor for each thin film.

Favorable effect

As described above, the method and system for aligning micropores by focusing a laser beam in accordance with the present invention allows for easier and shorter alignment of the holes in the components.

The alignment method and system according to the invention allows for easy and short alignment of parts with multiple holes.

1 is a schematic diagram showing the basic principle of the present invention;

2 is an exemplary view briefly showing a configuration of an apparatus for applying the present invention.

Figure 3 is an illustration showing schematically the alignment of the holes in accordance with the present invention.

4 is for confirming the laser diffraction pattern as another embodiment according to the present invention. Top view of the detector.

5 is an exemplary view schematically showing that the holes are aligned using the detector of FIG.

Best Mode for Carrying Out the Invention

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

2 is a schematic view showing the configuration of an apparatus for applying the present invention, in which a beam 21 from a laser 20 is split into two beams 22 and 23 by a splitter 30. In FIG. 2, the first beam 22 is split and proceeds in the advancing direction, but the second beam is reflected by the mirror 40 to travel toward the holes of the parts 1 and 2. The first beam 22 and the second beam 23 are focused by the focus lenses 60 and 60a, respectively, and penetrate through the holes to be aligned of the first component 1 and the second component 2, respectively. Is projected on. The holes of the first component 1 are XY- Θ moved by the stage 80 and adjusted to project the diffraction pattern onto the screen 10 by the focused first and second beams. After the holes of the first part 1 are aligned, the stage 70 including the chuck and lens support 71 fixes and adjusts the second part 2 to fix the holes to be aligned of the second part 2. Adjust in the XYZ- Θ direction so that the laser beams passing through the holes in the first part 1 project the diffraction pattern on the screen. The focus lenses 60 and 60a are fixed by the xyz stages 50 and 50a, respectively. The beams 22 and 23 are then focused on the holes to be aligned of the first lens. Therefore, the focusing is variably adjusted by the stages 50 and 50a. The stages can adjust the focusing according to the size and distance of the holes to be aligned.

3 is a conceptual diagram showing that two holes of three parts are aligned according to the present invention. In FIG. 3, two lasers are shown, but when a splitter is used as in FIG. 2, one laser may be used. Focus lenses are provided to match the number of holes of each component, indicating that the focused laser beams pass through the holes of the three component layers to form diffraction patterns on the screen.

2 and 3 show an example in which two laser beams align two holes, but in FIG. 2 split more than three laser beams in a splitter or use more lasers as in FIG. 3 to simultaneously open more holes. You can sort. If the holes of the parts to be aligned are single, you can use them without splitters.

In Fig. 3, the holes of the parts may be different. Preferably, the parts having the smallest holes are aligned first and other parts are arranged thereon. It is preferable to make a reference | standard. In addition, since the focusing distance can be varied by adjusting the focus lens by a stage or the like, if the hole in the middle is smaller, the focusing point can be aligned with respect to the hole. Focusing according to the present invention is to allow as many laser beams to pass through the holes of the part as possible, so focusing is to allow the most laser beams to pass through all the holes to be aligned. This can be done. In order to change the focusing, a quick alignment may be performed by automatically installing or replacing an automatic changer of various focusing lenses or automatically adjusting a stage of the focusing lens.

In addition, according to the present invention, when two or more holes of each part are used, for example, the lenses of the microcolumn are multiplied like a wafer type so that there are several holes in one lens layer so that these lenses must be aligned or each aligned. In the case where the parts each have several alignment reference holes, the alignment of the three or more holes relative to the lenses or the parts can be more precise. In this case, even if there is a difference or deflection such as slight distortion, the alignment may be terminated by judging the diffraction pattern if the deflection is constant. If some of the holes in the microcolumns are deflected, deflections that are slightly off-axis using deflectors or the like in the electron column can all be deflected to compensate for the deflection of alignment. If the deflection must be compensated for, it may be inaccurate to align the two holes, so it is desirable to align three or more holes. That is, even if two holes are deflected differently, the torsional deflection may not be easily compensated if the two holes are determined based on the two holes. However, when three or more holes are used as reference, the deflection can be judged more accurately. In this case, it is preferable to make the alignment holes widely distributed.

In addition, the diffraction pattern formed on the screen can be stored. In a method of storing the pattern, the pattern is monitored by a monitor connected to a screen or the like, and the pattern is stored in a recording device built in or connected to the monitor. It is to let. As an example of a method of using the stored pattern, the alignment of the parts may be automated by comparing the preset pattern or the stored pattern to determine the degree of alignment, and automatically adjusting the part alignment stage.

In addition, all the holes in which the holes of the part can form diffraction patterns such as polygons or ellipses of various shapes can be aligned according to the present invention.

The above description has described specific embodiments according to the present invention, and the present invention is not limited to the above embodiments.

2 and 3, the splitter 30 and the mirror 40 were used using only one laser. Two or more laser beams can be split by the splitter 30, and when two or more splitters are used, two or more holes can be aligned at the same time by splitting more laser beams. However, if two lasers are used or split using optical fibers or the like, splitters and mirrors may not be needed or a separate splitter may be used to separate the optical fibers. That is, in order to use two or more laser beams in the present invention, various methods may be used. Various modifications may be made by those skilled in the art, such as using as many laser beams as needed or splitting a laser beam.

Embodiment for Invention

4 is a plan view of a detector for confirming a laser diffraction pattern, according to another embodiment of the present invention, for convenience of determining a shape of the diffraction pattern.

The detector of FIG. 4 is capable of converting the amount of laser beam irradiation to an amount such as voltage or current. As a representative example, the detector may convert an amount of light into an amount of current or voltage, such as a photo-diode. It is.

The present invention is based on the principle that as the alignment between the holes is made accurately, the diffraction pattern of the laser beam forms concentric circles with respect to the center in the form of a circle. That is, instead of examining the shape of the diffraction pattern through the screen, the shape of the diffraction pattern formed in the detector can be more conveniently determined.

Accordingly, the detector 200 of FIG. 4 has boundary lines 220a and 220b which divide each zone around the hole 210 having the same shape as the hole such as a lens to be aligned in the center and the boundary line 220a. There are four zones 231, 232, 233, 234, separated by 220b. If the laser beam passing through the hole to be aligned is located at the center of the detector 200 and the diffraction pattern 240 forms positive concentric circles, the same current or voltage value may be observed in each zone. Therefore, if the holes of the part to be aligned are not aligned, they will not form concentric circles, so different values are generated for each zone. If different values are observed for each zone, this value can be used to realign the alignment holes. Sorting the parts to be sorted by using the observed values in each zone can be used in various ways, such as a value of each zone or a difference of 0 for each zone.

In order to use the detector of FIG. 4, it is preferable to use the laser beam and the detector in advance. In addition, although the hole 210 is formed in the center of the detector of FIG. 4, this is not necessary. In other words, only the wall data can be obtained accurately. The pattern of the laser beam irradiated to each zone 231, 232, 233, 234 of the detector may know the amount of beam irradiated by the amplifier or controller corresponding to each detector, which will be determined by the detector selected.

FIG. 5 is an exemplary view schematically illustrating that holes are aligned using the detector of FIG. 4, in which the laser beam 390 passing through the alignment target parts 310 forms a pattern 351 on the detector 320. And the laser beam 390 passing through the hole 321 of the detector again forms the pattern 361 on the screen 360.

4 and 5, the holes 210 and 321 of the detector may be used without necessarily being required to inspect the pattern with only the detector. However, in order to further check the pattern past the detector, a hole can be made in the same shape as the part to be aligned so that the pattern can be observed. In this case, the alignment between the detector and the laser beam can be easily corrected or confirmed. In other words, if the position of the detector changes or an abnormality occurs in the path of the laser beam during use, the abnormality can be easily detected through the pattern, and it is easier to align with the initial setting of the detector and laser alignment, and whether there are foreign substances in the hole. It can be used to check the structure of the hole and the hole.

The hole alignment method and alignment system of the component using the laser according to the present invention can be used to align the holes of the components accurately and quickly.

Claims (12)

 Fixing a part having an aperture (hereinafter referred to as a 'first part') to the stage so that the laser beam can enter and penetrate the hole; Focusing the laser beam such that the laser beam is focused in the hole of the first part; Align the laser beam with an accurate diffraction pattern according to the shape of the hole on a screen or image sensor positioned at a distance separated from the focused laser beam through the hole of the first part. A first alignment step); And Another part (hereinafter referred to as a 'second part') having a through hole to be aligned with the first part is passed through the aperture of the second part again so that the laser beam is placed on the screen. A second alignment, positioned above or below the first part so that it appears on the screen and aligned with a positioning device such that the laser beam on the screen again forms an accurate diffraction pattern according to the shape of the hole of the new second part step; Hole alignment method of the parts comprising a. 2. The hole alignment method according to claim 1, wherein the same step as the second alignment step is repeated by the number of additional parts to align other parts to be additionally aligned after the second alignment step.  3. The hole alignment method according to claim 1 or 2, wherein the two or more holes of each of the first component and the second component are aligned by repeating or simultaneously performing the above steps. 4. The hole alignment method according to any one of claims 1 to 3, wherein the screen is used to determine the shape alignment of the pattern using a laser beam detector. The diffraction pattern of any one of claims 1 to 3, wherein the diffraction patterns of the first part are sensed and recorded using an electromagnetic coupling element, a monitor, and a recording device, and the parts to be aligned other than the first part are detected. And comparing them with a pattern of a pre-recorded first part. The hole of each of the components according to any one of claims 1 to 5, wherein the distance between the laser and the respective components is preset to a predetermined distance so as to align the holes of the respective components aligned from the interference pattern positions of the respective diffraction patterns. The method of claim 1, further comprising the step of checking the size. A method of aligning parts having a reference aperture, the method comprising: 7. A method of aligning parts, wherein the parts are aligned by aligning the holes by the alignment method of any one of claims 1 to 6. 8. The method of claim 7, wherein the component is provided with two reference through-holes in which the components are aligned. A system for aligning holes in parts, the system comprising: a laser; A focus lens for beam focusing coming from the laser; A first stage for fixing and adjusting a first alignment target component (hereinafter referred to as a first component) to align the laser beam focused by the focus lens through the hole of the alignment target component; A second stage for fixing and adjusting a second alignment target part (hereinafter referred to as a second part) so that the laser beam penetrating the hole of the first part is aligned through the hole of the second part; And A screen or image sensor for projecting a laser beam through the hole of the second part; Alignment system comprising a. 10. The system of claim 9, wherein the system is A splitter for splitting the beam exiting the laser by the number of holes to be aligned of the parts and a split lens for the number of split lenses for focusing the beams split by the splitter, And the first and second stages adjust each split laser beam to be aligned through an alignment hole. 11. The alignment system of claim 9 or 10, wherein the system further comprises as many stages as parts that need to be aligned to align the holes of the three or more components. 12. The alignment system according to any one of claims 9 to 11, wherein in said system, said image sensor is used as a laser beam detector to determine a pantone shape alignment.

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