CN113358060A - Three-dimensional measurement system and method based on confocal light path - Google Patents
Three-dimensional measurement system and method based on confocal light path Download PDFInfo
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Abstract
The invention discloses a three-dimensional measurement system based on a confocal light path, which comprises: an illumination assembly for outputting incident light; the dispersion objective lens assembly is used for dispersing and spreading the incident light into light rays with different wavelengths, respectively focusing the light rays with target wavelengths on corresponding measuring points of a measured object and receiving emergent light rays reflected by the measuring points; the filtering component is arranged between the lighting component and the dispersion objective lens component, and comprises a small hole mask array plate, a plurality of small holes are arranged at intervals, and emergent light rays reflected by each measuring point are respectively focused to the corresponding small holes; and the light splitting imaging assembly is used for receiving the emergent light rays passing through the small holes and respectively focusing the emergent light rays passing through each small hole on image surface coordinates corresponding to the small holes and the measuring points. The three-dimensional measurement system can solve the problems that the process difficulty is high and the simultaneous and accurate measurement of multiple points on a measured object cannot be realized due to the fact that the existing three-dimensional measurement system adopts complex optical fibers to be spliced together to transmit light.
Description
Technical Field
The invention relates to the technical field of object three-dimensional information measurement, in particular to a three-dimensional measurement system based on a confocal light path and a three-dimensional measurement method based on the confocal light path.
Background
Various imaging systems for two-dimensional (2D) and three-dimensional (3D) object measurements have been developed, wherein techniques for measuring three-dimensional (3D) macrostructures have received increasing attention, in particular in the optical, electronic and semiconductor industries for advanced product development and quality control thereof. For example, many known imaging techniques commonly used to measure 3D macrostructures include phase-shift methods, optical coherence tomography, holography, and the like. However, these available optical imaging methods often fail to achieve satisfactory results, particularly in terms of the speed and accuracy of measurement of the system, and the quality of the images acquired. In addition, the existing measuring system adopts complex light to piece together to conduct the light path, the process difficulty is high, the cost is high, and meanwhile, a view field blind area can be caused by a mode that a certain included angle is formed between the light source light path and the measured object reflection light path.
Disclosure of Invention
In order to overcome the defects of the prior art, embodiments of the present invention provide a three-dimensional measurement system and method based on a confocal light path, which can solve the problems that the existing three-dimensional measurement system adopts complex optical fibers to splice together to transmit light, so that the process difficulty is high, and multiple points on a measured object cannot be measured accurately at the same time.
Specifically, the invention provides a three-dimensional measurement system based on a confocal light path, which comprises: the device comprises an illumination component, a filtering component, a dispersive objective lens component and a spectral imaging component; the lighting assembly is used for outputting incident light; the dispersive objective lens assembly is used for dispersing and spreading the light rays with different wavelengths in the incident light rays, respectively focusing the light rays with target wavelengths in the light rays with different wavelengths on corresponding measuring points of a measured object, and receiving the emergent light rays with the target wavelengths reflected by the measuring points; the filter assembly is arranged between the illumination assembly and the dispersive objective lens assembly and comprises a small hole mask array plate, a plurality of small holes which are arranged at intervals are arranged on the small hole mask array plate, and the emergent light rays with target wavelengths are respectively focused to the corresponding small holes; the light splitting imaging component reflected by each measuring point is used for receiving the emergent light rays passing through the small hole and respectively focusing the emergent light rays with target wavelengths on image surface coordinates corresponding to the small hole and the measuring point on an imaging surface.
In one embodiment of the present invention, the filtering component further comprises: the dispersive objective lens component and the illumination component are coaxially arranged, and the incident light is parallel to the light path of the emergent light before being reflected by the semi-transparent semi-reflective mirror.
In one embodiment of the invention, the aperture mask array plate is arranged between the half-mirror and the dispersive objective lens assembly or between the illumination assembly and the half-mirror and between the half-mirror and the spectral imaging assembly respectively.
In an embodiment of the present invention, the dispersive objective lens assembly focuses the incident light with a target wavelength at a corresponding height of the object to be measured, and the object to be measured moves along a direction different from the height during measurement, the measurement point corresponding to the same aperture on the aperture mask array plate changes correspondingly with the movement of the object to be measured, and the wavelength of the focused emergent light changes correspondingly with the change of the corresponding measurement point at the height of the object to be measured.
In one embodiment of the present invention, the spectroscopic imaging assembly comprises: the light splitting device and the telecentric collimating lens combination and the telecentric converging lens combination which are arranged on two sides of the light splitting device are combined, the emergent light rays penetrate through the aperture mask array plate and reach the light splitting device after the telecentric collimating lens combination, the light splitting device passes through the same aperture, the emergent light rays are separated according to different wavelengths, and the emergent light rays are focused on the imaging surface through the telecentric converging lens combination and correspond to the image surface coordinates.
In one embodiment of the invention, the light splitting device is a prism or a grating; the shape of the pores on the pore mask array plate comprises: circular, triangular and parallelogram.
In addition, an embodiment of the present invention provides a three-dimensional measurement method based on a confocal optical path, which is applicable to any one of the three-dimensional measurement systems based on a confocal optical path in the foregoing embodiments, and includes: outputting incident light from the illumination assembly; the incident light passes through the small-hole mask array plate and then reaches the dispersive objective lens assembly, the dispersive objective lens assembly disperses and expands the light with different wavelengths in the incident light, and the light with the target wavelength in the light with different wavelengths is respectively focused on the corresponding measuring points of the measured object; receiving the emergent light rays with the target wavelength reflected by the measuring points by the dispersive objective lens assembly, and respectively focusing the emergent light rays with the target wavelength reflected by each measuring point to the small holes at the corresponding positions on the small hole mask array plate; and the emergent light rays with the target wavelength passing through each small hole are respectively focused on image surface coordinates corresponding to the small holes and the measuring points on an imaging surface by the light splitting imaging component.
In an embodiment of the present invention, the incident light further passes through a half mirror before reaching the dispersive objective lens assembly, the emergent light is reflected by the half mirror after passing through the dispersive objective lens assembly, and the incident light is parallel to an optical path of the emergent light before being reflected by the half mirror.
In an embodiment of the present invention, the incident light beam with a target wavelength at a certain time is focused on the measurement point of the measured object through axial dispersion, and the emergent light beam passing through the same small hole is focused on the image plane coordinate corresponding to the target wavelength on the imaging plane through radial dispersion.
In one embodiment of the invention, the emergent light rays passing through the target wavelength pass through a telecentric light path and are focused on the corresponding image plane coordinates on the imaging plane after being split by the grating for imaging.
From the above, the above embodiments of the present invention may have one or more of the following advantages:
(1) the system has the advantages that complex optical fiber splicing is avoided as a light conducting medium, the system is simple in structure and low in cost, incident light rays with target wavelengths are focused on corresponding measuring points of a measured object through the dispersive objective lens assembly, emergent light rays with the target wavelengths reflected by each measuring point pass through corresponding small holes in the small hole mask array plate respectively, and finally imaging is carried out through the light splitting system, so that the longitudinal signal-to-noise ratio and the transverse signal-to-noise ratio of a light path can be greatly improved, and the quality of the obtained image is improved;
(2) the illumination component and the dispersive objective lens component are coaxially arranged, and the incident light is parallel to the light path of the emergent light reflected by the measured object, so that the problem of generating a view blind area caused by adopting a light path scheme of obliquely entering and obliquely exiting is solved;
(3) the measured object moves along the direction different from the height when being measured, the measuring point corresponding to the same small hole on the small hole mask array plate correspondingly changes along with the movement of the measured object, the wavelength of the focused emergent light correspondingly changes along with the height change of the corresponding measuring point on the measured object, and because a plurality of small holes arranged at intervals on the small hole mask array correspond to the measuring points on the measured object one by one, and each small hole respectively focuses the emergent light reflected by the corresponding measuring point and with different wavelengths, a plurality of position points on the measured object can be scanned and measured at the same time, and the detection speed of the system is greatly improved;
the light splitting imaging component splits light by adopting a telecentric light path, so that light rays of different view fields are collimated in parallel, and finally a distortionless light path can be obtained on an imaging surface.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention and not to limit the invention. In the drawings:
fig. 1 is a schematic structural diagram of a three-dimensional measurement system based on a confocal optical path according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of another three-dimensional measurement system based on a confocal optical path according to an embodiment of the present invention;
fig. 3a is a schematic structural diagram of an aperture mask array plate according to an embodiment of the present invention;
FIG. 3b is a schematic structural diagram of another aperture mask array plate according to an embodiment of the present invention;
FIG. 3c is a schematic structural diagram of another aperture mask array plate according to an embodiment of the present invention;
fig. 4 is a flowchart of a three-dimensional measurement method based on a confocal optical path according to an embodiment of the present invention.
Description of the reference numerals
11: a lighting assembly; 12: a dispersive objective lens assembly; 13: a filtering component; 131: a semi-transparent semi-reflective mirror; 132: a pinhole mask array plate; 14: a spectroscopic imaging assembly; 141: a light splitting device; 142: a telecentric collimating lens combination; 143: a telecentric converging lens combination;
S11-S14: and a three-dimensional measuring method based on the confocal light path.
Detailed Description
It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict. The invention will be described in connection with embodiments with reference to the drawings.
In order to make those skilled in the art better understand the technical solution of the present invention, the technical solution in the embodiment of the present invention will be clearly and completely described below with reference to the drawings in the embodiment of the present invention, and it is obvious that the described embodiment is only a part of the embodiment of the present invention, and not all embodiments should fall into the protection scope of the present invention.
It should be noted that the terms "first," "second," and the like in the description and claims of the present invention and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the terms so used are interchangeable under appropriate circumstances such that the embodiments of the invention described herein are, for example, capable of operation in sequences other than those illustrated or otherwise described herein. Furthermore, the method is simple. The terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
It should be noted that the division of the embodiments of the present invention is only for convenience of description and should not be construed as a limitation, and features of various embodiments may be combined and referred to each other without contradiction.
[ first embodiment ] A method for manufacturing a semiconductor device
As shown in fig. 1, a first embodiment of the present invention provides a three-dimensional measurement system based on a confocal optical path, for example, including: an illumination assembly 11, a dispersive objective lens assembly 12, a filtering assembly 13, and a spectroscopic imaging assembly 14.
The illumination assembly 11 includes, for example, a slit light source 111, and the slit light source 111 outputs incident light with high brightness, and further, the incident light reaches the filtering assembly 13 after passing through, for example, a lens assembly, and the lens assembly includes one or more lenses for modulating the light path of the incident light, so as to improve the collimation and brightness of the light.
The filter assembly 13 is disposed between the illumination assembly 11 and the dispersive objective lens assembly 12, and includes, for example, a half-mirror 131 and an aperture mask array 132; the half mirror 131 is disposed obliquely with respect to incident light, in one embodiment, the aperture mask array 132 is disposed between the half mirror 131 and the dispersive objective lens assembly 12, a plurality of light-transmitting apertures are disposed on the aperture mask array 132 at intervals, and the incident light sequentially passes through the half mirror 131 and the aperture mask array 132 and then reaches the dispersive objective lens assembly 12.
The dispersive objective lens assembly 12 is configured to disperse incident light, and focus light of a target wavelength among the dispersed light of different wavelengths on a corresponding measurement point of the object to be measured, and receive outgoing light of the target wavelength formed by reflection at the measurement point. For example, as shown in fig. 1, the dispersive objective lens assembly 12 includes a plurality of lens combinations, and the parameters such as the thickness of each lens and the distance between the lenses are controlled to spread the incident light beams with different wavelengths in the axial direction, so as to obtain the light beams with the target wavelengths λ 1, λ 2 and λ 3, which are respectively focused on the measuring points of the height h1, the height h2 and the height h3 of the measured globule, and the emergent light beams with the target wavelengths are formed and returned to the dispersive objective lens assembly 12 after being reflected by the measured globule.
As described above, the position information of the object to be measured carried by the outgoing rays with the wavelengths λ 1, λ 2, and λ 3 is denoted as (x 1, h 1), (x 2, h 2), and (x 3, h 3), respectively, and the outgoing rays pass through the dispersive objective lens assembly 12 and are focused on the plane where the aperture mask array plate 132 is located. Specifically, the emergent light beams with different wavelengths can be converged to be small enough only in the corresponding small holes on the small hole mask array plate 132, for example, the emergent light beam with the wavelength λ 1 is focused on the small hole x1 ', the emergent light beams with the wavelengths λ 2 and λ 3 are respectively focused on the small holes x2 ' and x3 ', and for different small holes, the light beams with non-target wavelengths are dispersed more and more along with the deviation of the wavelengths from the target wavelengths, and therefore, the light beams are blocked and filtered by the small hole mask array plate 132. Therefore, the design of the aperture mask array plate 132 and the dispersive objective lens assembly 13 can filter out the non-target color light at the same point, and only the desired wavelength is passed, so that the longitudinal signal-to-noise ratio is greatly improved, meanwhile, because the apertures are arranged at intervals, the detection information between adjacent object points cannot be mutually interfered, the transverse signal-to-noise ratio is also improved, and the accuracy of system measurement is improved.
The emergent light passing through the aperture mask array plate 132 is reflected to the spectroscopic imaging assembly 14 through the half mirror 131, and further, the dispersive objective lens assembly 12 is coaxially arranged with the illumination assembly 11, and the incident light is parallel to the optical path of the emergent light before being reflected by the half mirror 131. Therefore, the light reflected by each object point on the measured object can be accurately received, and the problem of generating a visual field blind area due to the adoption of a light path scheme of obliquely entering and obliquely exiting is avoided.
In one embodiment, as shown in fig. 2, two aperture mask array plates 132 are respectively disposed between the illumination module 11 and the half mirror 131 and between the half mirror 131 and the spectral imaging module 14, for example, the incident light sequentially passes through the first aperture mask array plate 132 and the half mirror 131 and reaches the dispersive objective module 12, the emergent light passes through the dispersive objective module 12 and is reflected to the second aperture mask array plate 132 by the half mirror 131, the apertures on the two aperture mask array plates 132 are in one-to-one correspondence, and the emergent light with different wavelengths obviously passes through the second aperture mask array plate 132 and reaches the spectral imaging module 14. The above-described advantageous effects can also be achieved by the filter assembly 13 of this embodiment.
In one embodiment, as shown in fig. 3a to 3c, the shapes of the apertures on the aperture mask array plate 131 include, for example: the arrangement of the circular, triangular and parallelogram can be regular and uniform interval arrangement, and also can be irregular arrangement, such as gradually increasing or gradually decreasing of the distance. It should be noted that in other embodiments of the present invention, the apertures on the aperture mask array plate 131 may also have other shapes and arrangements, and by controlling parameters such as the distance and diameter between the apertures, the apertures can be used to filter the light with the target wavelength reflected by the target object point, which is not limited in this respect.
The spectral imaging assembly 14 is used for receiving the emergent light reflected by the half mirror 131 and focusing the emergent light with different wavelengths on image plane coordinates corresponding to the aperture and the measuring point on an imaging plane, such as an imaging plane of a camera photosensitive element. For example, the position information of the object to be measured carried by the emergent light with the wavelength λ 1 is (x 1, h 1), the coordinate point of the image plane focused on the imaging plane after passing through the pinhole x1 'on the pinhole mask array plate 131 is (x 1 ", y 1), the position information of the object to be measured carried by the emergent light with the wavelength λ 2 is (x 2, h 2), the coordinate point of the image plane focused on the imaging plane after passing through the pinhole x 2' on the pinhole mask array plate 131 is (x 2", y 2), and similarly, for example, n points are sampled on one scanning line of the object to be measured, the position information of the object to be measured carried by the emergent light with the wavelength λ n is (xn, hn), and the coordinate point of the image plane focused on the imaging plane after passing through the pinhole xn 'on the pinhole mask array plate 131 is (xn', yn).
Further, the measured object moves along a direction different from the height during measurement, for example, moves along a direction perpendicular to the height, the measurement point corresponding to the same aperture on the aperture mask array plate correspondingly changes with the movement of the measured object, and the wavelength of the focused emergent light changes correspondingly with the change of the height of the corresponding measurement point on the measured object, for example, when the small sphere of the measured object moves from right to left in the figure, the wavelength of the emergent light passing through any one of the apertures is λ 1, λ 2 … … λ n in sequence, so that the coordinate conversion on one scanning line is completed. It is worth mentioning that the scanning mode and the coordinate conversion mode between different scanning lines of the measured object are the same, and a plurality of scanning lines form a scanning surface along with the scanning, and finally the image of the measured object is obtained. Therefore, as the plurality of small holes arranged at intervals on the small hole mask array respectively focus the emergent light rays with different wavelengths reflected by different height positions on the measured object, the information of a plurality of position points on the measured object can be simultaneously and accurately measured, and the detection speed of the system is greatly improved.
Further, the spectroscopic imaging assembly 14 includes, for example: the light splitting device 141, and the telecentric collimating lens combination 142 and the telecentric converging lens combination 143 which are arranged on two sides of the light splitting device 141, emergent light rays reflected by the half-mirror 131 reach the light splitting device 141 after penetrating through the telecentric collimating lens combination 142, the emergent light rays are separated by the light splitting device 141 according to different wavelengths, and the emergent light rays passing through the same small hole are focused on corresponding image plane coordinates on an imaging plane through the telecentric converging lens combination 143. Further, the mentioned light splitting device 141 is, for example, a prism, a grating, or other light splitting devices, and is configured to perform lateral dispersion on the outgoing light with different wavelengths passing through the same small hole, and focus the outgoing light on a corresponding image plane coordinate on an imaging plane to form an image. The spectroscopic imaging assembly 14 employs telecentric optical paths on two sides of the spectroscopic device 141 to perform light splitting, so that light rays of different viewing fields are collimated in parallel, and finally an undistorted optical path can be obtained on an imaging plane.
In summary, the three-dimensional measurement system based on the confocal optical path provided by the embodiment of the invention avoids the use of complex optical fiber splicing as a light transmission medium, has a simple system structure, saves cost, focuses incident light with a target wavelength on a measurement point corresponding to a measured object through a dispersive objective lens assembly, and images through a light splitting system, so that the longitudinal signal-to-noise ratio and the transverse signal-to-noise ratio of the optical path can be greatly improved, and the quality of the obtained image is improved; the illumination component and the dispersive objective lens component are coaxially arranged, and the incident light is parallel to the light path of the emergent light reflected by the measured object, so that the problem of generating a view blind area caused by adopting a light path scheme of obliquely entering and obliquely exiting is solved; the measured object moves along the direction different from the height when being measured, the measuring point corresponding to the same small hole on the small hole mask array plate correspondingly changes along with the movement of the measured object, the focused emergent light rays with the target wavelength correspondingly change along with the height change of the corresponding measuring point on the measured object, and because a plurality of small holes arranged at intervals on the small hole mask array correspond to the measuring points on the measured object one by one, and each small hole respectively focuses the emergent light rays with different wavelengths reflected by the corresponding measuring point, a plurality of position points on the measured object can be scanned and measured at the same time, and the detection speed of the system is greatly improved; the light splitting imaging component splits light by adopting a telecentric light path, so that light rays of different view fields are collimated in parallel, and finally a distortionless light path can be obtained on an imaging surface.
[ second embodiment ]
As shown in fig. 3, a second embodiment of the present invention provides a three-dimensional measurement method based on a confocal optical path, for example, including steps S11 to S14. In step S11, the illumination assembly outputs incident light; step S12, the incident light passes through the small-hole mask array plate and then reaches the dispersive objective lens assembly, the dispersive objective lens assembly disperses and expands the light with different wavelengths in the incident light, and the light with the target wavelength in the light with different wavelengths is respectively focused on the corresponding measuring points of the measured object; step S13, receiving, by the dispersive objective lens assembly, the outgoing light ray of the target wavelength reflected by the measurement point; step S14 is to focus the emergent light with the target wavelength reflected by each measurement point to the corresponding aperture on the aperture mask array plate; step S15 is performed by the spectroscopic imaging assembly to focus the emergent light beam with the target wavelength passing through each of the apertures on an image plane coordinate corresponding to the aperture and the measuring point.
Furthermore, the illumination component and the dispersive objective lens component are coaxially arranged, the incident light also penetrates through a semi-transparent and semi-reflective mirror before reaching the dispersive objective lens component, the emergent light is reflected by the semi-transparent and semi-reflective mirror after passing through the dispersive objective lens component, and the incident light is parallel to the light path of the emergent light before being reflected by the semi-transparent and semi-reflective mirror.
Furthermore, the incident light of a target wavelength at a certain moment is focused on the measuring points of the measured object at different heights through axial dispersion, and the emergent light passing through the same small hole is focused on the image plane coordinates corresponding to the target wavelength on the imaging plane through radial dispersion at different moments in the measuring process of the measured object.
Further, the emergent light rays with the target wavelength pass through a telecentric light path and are focused on the corresponding image plane coordinates on the imaging plane to be imaged after being split by the grating.
It should be noted that the three-dimensional measurement method based on the confocal optical path provided in the second embodiment of the present invention is applicable to the three-dimensional measurement system based on the confocal optical path provided in the first embodiment, and the specific three-dimensional measurement system based on the confocal optical path may refer to the system described in the first embodiment, and is not described herein again for brevity.
In addition, it should be understood that the foregoing embodiments are merely exemplary illustrations of the present invention, and the technical solutions of the embodiments can be arbitrarily combined and collocated without conflict between technical features and structural contradictions, which do not violate the purpose of the present invention.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (10)
1. A three-dimensional measurement system based on a confocal light path is characterized by comprising; the device comprises an illumination assembly (11), a dispersive objective lens assembly (12), a filtering assembly (13) and a spectral imaging assembly (14);
the lighting assembly (11) is used for outputting incident light;
the dispersive objective lens assembly (12) is used for dispersing and spreading the light rays with different wavelengths in the incident light rays, respectively focusing the light rays with target wavelengths in the light rays with different wavelengths on corresponding measuring points of a measured object, and receiving the emergent light rays with the target wavelengths reflected by the measuring points;
the filter component (13) is arranged between the illumination component (11) and the dispersive objective lens component (12), and comprises a small hole mask array plate (132), a plurality of small holes arranged at intervals are arranged on the small hole mask array plate (132), and the emergent light rays of the target wavelength reflected by each measuring point are respectively focused to the corresponding small holes;
the light splitting imaging component (14) is used for receiving the emergent rays passing through the small holes and focusing the emergent rays of the target wavelength passing through each small hole on image surface coordinates corresponding to the small holes and the measuring points on an imaging surface respectively.
2. The confocal optical path-based three-dimensional measurement system of claim 1, wherein the filtering component further comprises: the dispersive objective lens assembly (12) and the illumination assembly (11) are coaxially arranged, and the incident light rays are parallel to the light path of the emergent light rays before being reflected by the semi-transparent and semi-reflective mirror (131).
3. The confocal optical path-based three-dimensional measurement system according to claim 2, wherein the aperture mask array plate (132) is disposed between the semi-transparent and semi-reflective mirror (131) and the dispersive objective lens assembly (12) or between the illumination assembly (11) and the semi-transparent and semi-reflective mirror (131) and between the semi-transparent and semi-reflective mirror (131) and the spectroscopic imaging assembly (14), respectively.
4. The confocal optical path-based three-dimensional measurement system according to claim 1, wherein the dispersive objective lens assembly (12) focuses the incident light with a target wavelength at a corresponding height of the measured object at a certain time, and the measured object moves along a direction different from the height during measurement, the measurement point corresponding to the same pinhole on the pinhole mask array plate changes correspondingly with the movement of the measured object, and the focused emergent light changes correspondingly with the change of the corresponding measurement point in the height of the measured object.
5. The confocal light path-based three-dimensional measurement system according to claim 4, wherein the spectroscopic imaging component (14) comprises: spectroscopic device (141) with set up in telecentric collimation lens combination (142) and telecentric convergent lens combination (143) of spectroscopic device (141) both sides, through aperture mask array board emergent ray sees through arrive behind telecentric collimation lens combination (142) spectroscopic device (141), spectroscopic device (141) will be through same the aperture emergent ray is according to different wavelength separately to through telecentric convergent lens combination (143) with different wavelength emergent ray focus is in correspond on the imaging surface image plane coordinate.
6. The confocal light path-based three-dimensional measurement system according to claim 5, wherein the light splitting device (141) is a prism or a grating; the shape of the aperture on the aperture mask array plate (132) comprises: circular, triangular, parallelogram.
7. A three-dimensional measurement method based on a confocal light path is characterized by comprising the following steps:
outputting incident light from the illumination assembly;
the incident light passes through the small-hole mask array plate and then reaches the dispersive objective lens assembly, the dispersive objective lens assembly disperses and expands the light with different wavelengths in the incident light, and the light with the target wavelength in the light with different wavelengths is respectively focused on the corresponding measuring points of the measured object;
receiving, by the dispersive objective lens assembly, the outgoing light rays of the target wavelength reflected by the measurement point,
focusing the emergent light rays with the target wavelength reflected by each measuring point to the small holes at corresponding positions on the small hole mask array plate respectively;
and the emergent light rays with the target wavelength passing through each small hole are respectively focused on image surface coordinates corresponding to the small holes and the measuring points on an imaging surface by the light splitting imaging component.
8. The confocal optical path-based three-dimensional measurement method according to claim 7, wherein the incident light beam further passes through a half mirror before reaching the dispersive objective lens assembly, the emergent light beam is reflected by the half mirror after passing through the dispersive objective lens assembly, and the incident light beam is parallel to the optical path of the emergent light beam before being reflected by the half mirror.
9. The confocal optical path-based three-dimensional measurement method according to claim 7, wherein the incident light beam with a target wavelength is focused on a measurement point of the measured object by axial dispersion at a certain time, the emergent light beam passing through the same small hole is focused on an image plane coordinate corresponding to the target wavelength on the imaging plane by radial dispersion, and then the height of the measurement point is obtained by the image plane coordinate.
10. The confocal optical path-based three-dimensional measurement method according to claim 7, wherein the emergent rays with the target wavelength pass through a telecentric optical path and are focused to be imaged at the corresponding image plane coordinates on the imaging plane after being split by the grating.
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