KR20070024518A - Substrate dome rotating mechanism - Google Patents

Abstract

A vacuum device enabling the efficient assembly and disassembly of a rotating mechanism even in a limited space for excellent maintainability and workability. The vacuum device prevents a substrate dome from running out, prevents contamination by dust from bearings, and increases a film-forming accuracy by reducing the thickness of the rotating mechanism. The vacuum device comprises a vacuum tank, a base fixed to the inside of the vacuum tank, the rotating mechanism mounted on the base, and the substrate dome carrying the film-forming substrate and horizontally rotated by the rotating mechanism. The rotating mechanism is formed detachable from the base in the direction of the bottom face of the vacuum tank. ® KIPO & WIPO 2007

Description

Substrate dome rotating mechanism {SUBSTRATE DOME ROTATING MECHANISM}

The present invention relates to a rotating mechanism of a substrate dome mounted in a vacuum apparatus.

The vacuum vapor deposition method refers to a film formation method in which a vapor deposition material is evaporated in a state where the inside of a vacuum chamber is evacuated to a high vacuum region in advance, and the vapor deposition material is deposited on the substrate surface. In order to increase the efficiency of film formation, it is required to deposit a plurality of substrates at the same time, but since the evaporation distribution of the deposition material in the vacuum chamber is not uniform, a plurality of substrates are mounted on a dome-shaped support called a substrate dome. In addition, it is generally performed to keep the film thickness distribution of each substrate uniformly by rotating the dome. The present invention relates to a rotation mechanism of a rotation drive type substrate dome connected to a drive source with the center of the dome as the rotation axis.

Fig. 5 shows a schematic configuration diagram of a vacuum deposition apparatus for an optical thin film as an example of a vacuum apparatus equipped with a rotationally driven substrate dome.

The vacuum chamber main body 40 has a substrate 11, a substrate dome 12 on which the substrate 11 is mounted, a substrate dome rotating mechanism 42, a substrate heating heater 47 for heating the substrate 11, and vapor deposition. The material 43, the crucible 44 for filling the evaporation material, the electron gun 45 for heating the evaporation material 43 to the evaporation temperature, the shutter 46 closing the evaporation completion and shielding the evaporation material are arranged.

In the case of performing vapor deposition by the apparatus shown in the same figure, the board | substrate 11 is first provided in the board | substrate dome 12, and the vapor deposition material 43 is put into the crucible 44. FIG. After making the inside of the vacuum chamber 40 high vacuum by the exhaust system not shown, the board | substrate dome 12 is rotated by the board | substrate dome rotating mechanism 42, and the board | substrate 11 is used using the board | substrate heating heater 47. FIG. )). When the degree of vacuum and the substrate temperature reach the target value, the electron beam is irradiated onto the deposition material 43 from the electron gun 45, and the deposition material 43 is heated up to the evaporation temperature. When the shutter 46 is opened, the vapor deposition material 43 scatters in the vacuum chamber 40 and deposits on the substrate 11 to form a thin film. When the film thickness reaches the target value, the shutter 46 is closed, the electron gun 45, the substrate heater 47, and the like are stopped, and after cooling, the substrate 11 is formed with a thin film after introducing air into the vacuum chamber. It is good to take out.

Said vacuum vapor deposition apparatus is disclosed by patent document 1 etc., for example.

5 and 6, a conventional substrate dome rotating mechanism will be described.

The substrate dome rotating mechanism 42 is a thrust bearing mechanism 51 that is joined to the dome side gear 2, the rotation shaft 6 fixed to the dome side gear 2, the dome side gear 2, and receives a load in the load direction, and the rotation shaft. The dome side gear 2 is formed by the bearing 53 and the bolt 55 supporting the radial bearing mechanism 52, the thrust bearing mechanism 51, and the radial bearing mechanism 52 which are joined to (6) and receive a circumferential load. The rotating mechanism 42 is rotated by the dome catcher 10 fixed to the head) and rotates by receiving the transmission from the drive source side gear 15 connected to the drive source 41. It is structured.

The board | substrate dome 12 is fixed to the dome catcher 10 by the bolt 56, and is connected to the rotating mechanism 42, and rotates with predetermined | prescribed rotation speed with the dome-side gear 2. Since the rotary shaft 6, the dome catcher 10, and the substrate dome 12 are attached to the dome side gear 2, a longitudinal thrust load is applied. The thrust bearing mechanism 51 is arrange | positioned in order to receive the load of this thrust direction. Moreover, the radial bearing mechanism 52 is arrange | positioned in order to receive the load of the lateral direction at the time of rotation. A schematic view of the thrust bearing mechanism 51 is shown in FIG. 7A. The thrust bearing mechanism is comprised by the annular groove 22 which accommodates the steel ball 20, the lubricating material 21, the some steel ball 20, and the lubricating material 21. As shown in FIG. 7B is a schematic cross-sectional view of the steel ball 20, and FIG. 7C is a schematic cross-sectional view of the lubricant 21. Although the steel ball 20 is comprised by iron etc., for example, and the lubricating material 21 is comprised by tungsten bisulfide etc., for example, the material should just be selected suitably. As described above, the thrust bearing mechanism 51 has been described for illustrative purposes, but the components are also the same in the radial bearing mechanism 52. The bearing 53 serves as a bearing of the thrust bearing mechanism 51 and the radial bearing mechanism 52, and supports the dome side gear 2, the substrate dome 12, and the like freely in the vacuum chamber 40. . The bearing 53 is fitted from above the base 50 and is fixed by the bolt 54 from the direction opposite to the substrate dome 12.

For example, when disassembling the rotating mechanism 42 shown in the figure by maintenance etc., first, the board | substrate dome 12 is removed from the dome catcher 10 below, and then upward of the rotating mechanism 42 is shown. The peripheral mechanisms, such as a film thickness monitor mechanism, a heater, etc. which are not shown in figure, are removed, the bearing 53 and the base 50 are removed, and the rotating mechanism 42 is integrally separated from the upper portion of the base 50. I'm paying. When assembling, the rotary mechanism 42 is attached from above the base 50 before the peripheral mechanism is attached, and the substrate dome 12 is attached below the base 50.

Patent Document 1: Japanese Patent Application Laid-Open No. 2001-73136

Problems to be Solved by the Invention

FIG. 8 shows an aspect when the thrust bearing mechanism 51 shown in FIG. 7 is consumed by rotation. Since the lubricant 21 has the effect of forming a lubricating film on the surfaces of the steel ball 20 and the annular groove 22 and smoothly rotating the steel ball 20, the lubricant ( If 21) is consumed, it may cause the occurrence of noise or shorten the bearing life. In addition, when the lubricant 21 is consumed by the rotation, a problem arises that the consumed lubricant 21 becomes dust 60 and accumulates in the annular groove 22. The dust 60 includes not only the lubricant 21 but also iron debris due to abrasion of the steel ball 20. If such dust 60 is accumulated in the annular groove 22, the steel ball 20 is smooth. It cannot be rotated, and it becomes a problem of rotation. Since the same problem occurs in the radial bearing mechanism 52, maintenance work, such as a periodic replacement of a lubricating material, and cleaning of a rotating part, is needed for a bearing mechanism. However, the conventional rotating mechanism is inconvenient in that the bearing cannot be detached without removing the peripheral mechanism. This is because a plurality of mechanisms, such as a film thickness monitor mechanism and a heater, which need to be disposed in close proximity to the substrate dome are arranged in a limited space above the substrate dome, and thus a space for maintenance cannot be secured.

Dust generated from the lubricating material not only accumulates in the rotating part, but also hinders the rotation, and also blows into the vacuum chamber, causing the problem of film formation. Referring to FIG. 8, a part of the dust 60 accumulated in the annular groove 22 overflows downward. With reference to FIG. 6, since the board | substrate dome is arrange | positioned directly under the thrust bearing mechanism 51 and the radial bearing mechanism 52, the part of the dust 60 which fell over is blown off by the board | substrate dome. When dust blows off a board | substrate dome, dust adheres to a film-forming board | substrate with evaporation material at the time of film-forming, and leads to deterioration of film quality.

Moreover, in the conventional rotating mechanism, since the substrate heating heater is disposed above the bearing, there is also a problem that the consumption of the lubricant is accelerated by the heating.

In addition, in the conventional mechanism, the dome-side gear and the substrate dome are fixed by bolt filling, but there is also a problem that the bolt do not allow accurate positioning of the substrate dome. If the center of the dome side gear does not coincide with the center of the substrate dome, the substrate dome itself swings left and right while rotating. When the film is formed in this state, the vapor deposition material does not adhere uniformly to the substrate mounted on the substrate dome, which leads to deterioration of the film thickness distribution.

In addition, in the conventional rotating mechanism, there is a problem with respect to the height thereof. A film thickness monitor mechanism for measuring the film thickness is generally disposed above the substrate dome rotating mechanism, but the height of the rotating mechanism of the substrate dome needs to be as thin as possible so that the monitor does not become a shadow of the evaporation source. .

Means to solve the problem

A first aspect of the present invention is a vacuum apparatus comprising a vacuum chamber, a base fixed inside the vacuum chamber, a rotating mechanism attached to the base, and a substrate dome on which a film forming substrate is mounted and rotated horizontally by the rotating mechanism, wherein the rotating apparatus is rotated. A vacuum apparatus in which a mechanism is detachable from the base in the direction of the bottom of the vacuum chamber. Here, the support mechanism for supporting the dome-side gear against the base and the dome-side gear, which is disposed so as to have a rotational center at least equal to the rotational center of the dome substrate, and is rotated horizontally by the power from a drive source provided outside the rotational mechanism, and the base. And a supporting means for attaching the substrate dome to the dome-side gear, and the outer diameter of the dome-side gear is smaller than the inner diameter of the base. Moreover, the support means was set as the structure attached to the lower end of a base. Specifically, the support means comprises at least a rotating shaft fixed to the dome side gear in a concentric shape with the dome side gear, and a bearing arranged concentrically with the dome side gear and attached to the base, and the bearing is attached to the lower end of the base. It was set as the structure. Moreover, the support means was set as the structure which consists of a thrust bearing arrange | positioned concentrically with a dome-side gear, and is supported by a bearing, and supports a dome-side gear, and a radial bearing arrange | positioned concentrically with a dome-side gear and contacting a rotating shaft.

A second aspect of the present invention is a vacuum apparatus comprising a vacuum chamber, a base fixed inside the vacuum chamber, a rotating mechanism attached to the base, and a substrate dome on which a film forming substrate is mounted and rotated horizontally by the rotating mechanism, wherein the rotating apparatus is rotated. The mechanism is disposed so as to have a rotational center at least equal to the rotational center of the dome substrate, and the dome-side gear that is horizontally rotated by power from a drive source provided outside the rotational mechanism, support means for supporting the dome-side gear against the base, and the substrate. A support means for attaching the dome to the dome-side gear, the support means being disposed concentrically with the dome-side gear and supported by the bearing to support the dome-side tooth, and being disposed concentrically with the dome-side gear and contacting the rotating shaft. It is a vacuum device consisting of a radial bearing.

Moreover, in the said 1st side surface and the 2nd side surface, the thrust bearing and the radial bearing were set as the structure arrange | positioned on the substantially same plane. Moreover, it was set as the structure arrange | positioned so that the width | variety of the height direction of the surface which a thrust bearing cuts, and the width | variety of the height direction of the surface which a radial bearing may cut may overlap.

The third aspect of the present invention is a vacuum chamber, a base fixed inside the vacuum chamber, a rotating mechanism attached to the base, a substrate dome on which the film forming substrate is mounted and rotated horizontally by the rotating mechanism, and the rotating mechanism has an annular groove. A vacuum device comprising a plurality of balls and a bearing composed of lubricating oil contained therein, wherein the dust collector is disposed above the substrate dome to cover at least a portion of the substrate dome. Here, the dome heater for film-forming board | substrate heating was made into dust collecting. Moreover, the dome heater for film-forming board | substrate heating was set as the structure fixed to the base. The rotating mechanism further comprises a rotating shaft fixed to the dome side gear in a concentric shape with the dome side gear, and a bearing arranged concentrically with the dome side gear and attached to the base, and having a protrusion in which the rotating shaft extends in the circumferential direction, The receiving part was composed of a groove provided in the protrusion part.

Moreover, in the said 1st thru | or 3rd side surface, it was set as the structure which uses a dish vis in at least 1 place of a support means.

A fourth aspect of the present invention is a vacuum chamber, a substrate dome on which a film-forming substrate is mounted, a rotating mechanism disposed directly above the substrate dome and rotating the substrate dome, and disposed on a top plate of the vacuum chamber and at least rotating the mechanism within the vacuum chamber. A method of assembling and disassembling a vacuum device comprising a base to be attached, which is a method of attaching and detaching at least a rotating mechanism to the bottom surface of a vacuum chamber. Further, in a vacuum apparatus further comprising a rotating mechanism and a fixture fixed to the substrate dome, at least one of the fixture and the rotating mechanism or between the fixture and the substrate dome is fixed with a dish vis to align the substrate dome. .

A fifth aspect of the present invention is a vacuum chamber, an evaporation source for filling a film forming material, a substrate dome on which a film forming substrate is mounted and disposed opposite to the film forming material, a rotating mechanism disposed directly above the substrate dome and rotating the substrate dome, and The film-forming method which deposits a film-forming material on a film-forming board | substrate in the state which rotated the board | substrate dome in the vacuum apparatus which is arrange | positioned at the top plate of a vacuum chamber, and consists of a base which attaches a rotating mechanism or a rotating mechanism, and a board | substrate dome inside a vacuum chamber. This is a film forming method that receives dust generated from the rotating mechanism by the dust collector provided between the rotating mechanism and the substrate dome.

Effects of the Invention

According to the present invention, since it is possible to assemble and disassemble the rotary mechanism efficiently even in a limited space, it becomes possible to improve maintenance and workability. In addition, it is possible to contribute to the improvement of film formation accuracy by preventing core vibration of the substrate dome, preventing contamination by dust generated from the bearing, and reducing the thickness of the rotating mechanism.

1 is a schematic cross-sectional view of the rotating mechanism of the present invention

Figure 2 is a schematic plan view of the rotating mechanism of the present invention

3 is a schematic diagram of a bearing mechanism;

4 is a stopper schematic view

5 is a configuration schematic diagram of an optical thin film manufacturing apparatus;

6 is a schematic view of a conventional rotating mechanism

7 is a schematic diagram of a thrust bearing mechanism;

8 is a schematic diagram of a thrust bearing mechanism after consumption;

(Explanation of symbols for the main parts of the drawing)

1 Base 2 Dome Gear

3: thrust bearing mechanism 4: radial bearing mechanism

5: bearing 6: axis of rotation

7: bolt 8: dish bis

9: dish vis 10: dome catcher

11 film formation substrate 12 substrate dome

13 heater dome 14 rotating mechanism

15: drive source side gear 20: steel ball

21: lubricant 30: stopper

31: groove 40: vacuum chamber

41: drive source 42I: rotating mechanism

43: evaporation material 44: crucible

45: electron gun 46: shutter

47: substrate heating heater 50: base

51 thrust bearing mechanism 52 radial bearing mechanism

53: bearing 54: bolt

55: bolt 56: bolt

60: dust

Although the embodiment of the board | substrate dome rotating mechanism which concerns on this invention is demonstrated with reference to FIGS. 1-4, the same code | symbol is attached | subjected and the description is abbreviate | omitted. Although the rotating mechanism shown in FIGS. 1-4 is mounted in the vacuum apparatus shown in FIG. 5, for example, since operation | movement regarding vacuum film forming is the same as that of the prior art, description is abbreviate | omitted.

1, the rotation mechanism 14 comprised by the dome side gear 2, the rotating shaft 6, the dome catcher 10, the thrust bearing mechanism 3, the radial bearing mechanism 4, the bearing 5, rotation, Base 1 for fixing mechanism 14, drive source side gear 15 for driving rotary mechanism 14, substrate dome 12, film-forming substrate 11 mounted on substrate dome 12, substrate heating A schematic sectional view of the heater dome 13 is shown. FIG. 2 is a schematic plan view of the rotary mechanism shown in FIG. 1 as viewed from above. FIG.

The rotating mechanism 14 shown in FIGS. 1-2 design the inner diameter of the base 1 fixedly arrange | positioned in a vacuum chamber larger than the outer diameter of the dome side gear 2, and the bearing 5 is compared with respect to the base 1 It fits in the direction of the board | substrate dome 12, It is characterized by fixing the base 1 and the bearing 5 by the bolt 7 in the direction of the board | substrate dome 12. It is characterized by the above-mentioned. The bearing 5 fixes the thrust bearing mechanism 3 and the radial bearing mechanism 4, and the dome-side gear 2 and the rotation shaft 6 are rotatably supported so that when the bolt 7 is removed, the rotation mechanism 14 It is possible to remove all the downward. Thereby, the assembly and disassembly of the rotating mechanism 14 can be performed without removing a peripheral mechanism, and it became possible to remarkably improve workability, such as during maintenance. In the embodiment, a disk-shaped base 1 whose inner diameter is larger than the outer diameter of the dome-side gear 2 is used, but the base 1 may have any shape as long as it has a space in which the dome-side gear 2 is inserted. .

3, the schematic diagram of the thrust bearing mechanism 3 and the radial bearing mechanism 4 is shown. The thrust bearing mechanism 3 and the radial bearing mechanism 4 are arranged concentrically in the same plane, and are comprised by the steel ball 20 and the lubricant 21 accommodated in the annular groove 22. The rotation is smoothly performed by using the lubricant 21, but the lubricant 21 may not be used as long as the bearing mechanism has a low load such as the radial bearing mechanism 4, for example. In the embodiment, by placing the thrust bearing mechanism 3 and the radial bearing mechanism 4 in the same plane, the height of the rotating mechanism 14 is reduced, and the film thickness monitor mechanism disposed above the rotating mechanism 14. And the distance between the film forming substrate and the film forming substrate can be approximated. In addition, with this thinning, the total weight of the rotating mechanism 14 can be reduced by, for example, lowering the height of the dome catcher 10, and the rotating mechanism 14 is detached downward or downward. From this, effort reduction and safety improvement at the time of attachment can be aimed at.

Since the steel ball 20 and the lubricating material 21 used for the bearing mechanism are worn out by rotation, and dust is generated, in the Example, the heater dome 13 was arrange | positioned just under the rotating mechanism 14. The heater dome 13 may be fixed to the base 1. As a result, even when dust is generated, the heater dome 13 picks up the blow dome from the outer circumferential direction of the rotary mechanism 14, thereby preventing adhesion of debris to the substrate 11 during film formation. . In addition, when the heater dome 3 is directly above the rotary mechanism, there is a problem that the heater dome 13 heats the lubricant to accelerate consumption, but the heater dome 13 is disposed directly below the rotary mechanism 14. As a result, the effect of extending the life of the lubricant 21 is also achieved. In the embodiment, since the heater dome 13 for substrate heating required for film formation is used as the dust plate, the dust plate can be prevented without adding any component. You may arrange | position separately.

FIG. 4 shows a detailed view of the part 60 surrounded by the broken line in FIG. 1. The bearing 5 is provided with a stopper 30 for preventing the dome side gear 2 from falling upward, but in the embodiment, the groove 31 is provided in the stopper 30 to provide the steel ball 20 and the lubricant. It was set as the structure which receives the dust generate | occur | produced from (21). This makes it possible to further prevent contamination of the substrate 11.

Hereinafter, the assembling operation of the rotary mechanism shown in FIGS. 1 to 4 will be described.

First, the rotating shaft 6 and the dome catcher 10 are fixed to the dome side gear 2, the thrust bearing mechanism 3 and the radial bearing mechanism 4 are assembled on the bearing 5, and the thrust bearing mechanism 3 ), The bearing 5 is fixed to the base 1 with the bolt 7 in a state where the dome side gear 2 is joined to the radial bearing mechanism 4 with the rotary shaft 6 bonded thereto. At this time, the plate screw 8 is used for fixing the dome side gear 2 and the dome catcher 10. Next, the board | substrate dome 12 which mounts the board | substrate 11 is attached to the dome catcher 10, and is fixed with the dish screw 9, and seam fitting is performed. The dome side gear 2 is rotated at a predetermined rotation speed by a motor of the drive source. By using the dish screws 8 and 9 for the connection between the dome side gear 2 and the dome catcher 10 and the connection between the dome catcher 10 and the substrate dome 12, the center of the dome side gear 2 By accurately centering the center of the substrate dome 12, it becomes possible to rotate the substrate dome 12 without deep vibration. By using the dish screws 8 and 9 in the embodiment, it is possible to eliminate individual differences caused by workers during maintenance, to eliminate core vibrations, and to prevent deterioration of the film thickness distribution during film formation. .

At the time of disassembly, the dome catcher 10 and the board | substrate dome 12 are removed, and the rotating mechanism 14 whole can be removed below by removing the bolt 7 of the bearing 5. Since the rotating mechanism 14 can be disassembled without removing other components, especially a peripheral device not shown above the rotating mechanism, it is possible to remarkably improve the workability at the time of maintenance.

In the above embodiment, the film formation using the vapor deposition method has been described. However, the film deposition method in which the apparatus and method of the present invention can be implemented is not limited to the vapor deposition method.

The present invention is used in a rotating mechanism of a substrate dome mounted in a vacuum apparatus.

Claims (16)

A vacuum apparatus comprising a vacuum chamber, a base fixed inside the vacuum chamber, a rotating mechanism attached to the base, and a substrate dome on which a film forming substrate is mounted and rotated horizontally by the rotating mechanism, And the rotating mechanism is detachable from the base in the direction of the bottom of the vacuum chamber. The method of claim 1, The rotating mechanism is at least, A dome-side gear that is disposed to have a rotational center that is the same as the rotational center of the dome substrate, and is horizontally rotated by power from a drive source provided outside the rotational mechanism, Support means for supporting the dome-side gear against the base, and A support means for attaching the substrate dome to the gear on the dome side; A vacuum apparatus, characterized in that the outer diameter of the gear on the dome side is smaller than the inner diameter of the base. The method of claim 2, And the support means is attached to the bottom of the base. The method of claim 2 or 3, The supporting means is at least A rotating shaft fixed to the dome-side gear in a concentric shape with the dome-side gear, and A vacuum device, characterized in that the dome-side gear is arranged concentrically and made of a bearing attached to the base, the bearing is attached to the lower end of the base. The method of claim 4, wherein That support means, A thrust bearing disposed concentrically with the dome-side gear and supported by the bearing and supporting the dome-side gear, and And a radial bearing disposed concentrically with the dome-side gear and mounted to the rotary shaft. A vacuum apparatus comprising a vacuum chamber, a base fixed inside the vacuum chamber, a rotating mechanism attached to the base, and a substrate dome on which a film forming substrate is mounted and rotated horizontally by the rotating mechanism, The rotating mechanism is at least, A dome-side gear disposed to have the same rotation center as the rotation center of the dome substrate, and rotate horizontally by power from a drive source provided outside the rotation mechanism; Support means for supporting the dome-side gear against the base, and A support means for attaching the substrate dome to the gear on the dome side; That support means, A thrust bearing disposed concentrically with the dome-side gear and supported by the bearing and supporting the dome-side gear, and a radial bearing disposed concentrically with the dome-side gear and installed on the rotary shaft. . The method according to claim 5 or 6, And the thrust bearing and the radial bearing are arranged on substantially the same plane. The method according to claim 5 or 6, And the width of the surface in which the thrust bearing is cut in the height direction and the width of the surface in which the radial bearing is cut have an overlapping portion. A vacuum chamber, a base fixed inside the vacuum chamber, a rotating mechanism attached to the base, a substrate dome on which the film forming substrate is mounted and rotated horizontally by the rotating mechanism, and a plurality of the rotating mechanisms accommodated in the annular groove. A vacuum device consisting of a bearing composed of a ball and lubricating oil, And a dust collector covering at least a portion of the substrate dome above the substrate dome. The method of claim 9, The dust receiver is a dome heater for heating the film forming substrate. The method of claim 10, And a dome heater for heating the film forming substrate is fixed to the base. The method according to any one of claims 9 to 11, Corresponding rotating mechanism, A rotating shaft fixed to the dome-side gear in a concentric shape with the dome-side gear, and It is arranged in a concentric shape with the gear on the dome side, consisting of a bearing attached to the base, The rotating shaft has a protrusion extending in the circumferential direction, The dust collector is a vacuum device, characterized in that the groove provided in the projection. The method according to any one of claims 3 to 12, A vacuum apparatus, characterized in that a dish vis is used for at least one of the supporting means. A vacuum chamber, a substrate dome on which the deposition substrate is mounted, a rotating mechanism disposed directly above the substrate dome and rotating the substrate dome, and a base disposed on the top plate of the vacuum chamber and attaching the rotating mechanism at least to the inside of the vacuum chamber. As a method of assembling and disassembling a vacuum device, At least the said rotating mechanism is attached or detached to the said vacuum chamber bottom face side. The method of claim 14, In the vacuum apparatus further having a fixture for fixing the rotating mechanism and the substrate dome, A method of assembling and disassembling, wherein at least one of the fixture and the rotary mechanism, or the fixture and the substrate dome is fixed with a dish vis, and the substrate dome is aligned. A vacuum chamber, an evaporation source for filling the deposition material, a substrate dome on which the deposition substrate is mounted and disposed opposite to the deposition material, a rotating mechanism disposed directly above the substrate dome and rotating the substrate dome, and disposed on the top plate of the vacuum chamber. In the film forming method of depositing the film-forming material on the film-forming substrate in a state in which the substrate dome is rotated in a vacuum apparatus comprising a base for attaching the rotating mechanism or the rotating mechanism and the substrate dome to the inside of the vacuum chamber. And a dust collection provided between the rotary mechanism and the substrate dome to receive dust generated from the rotary mechanism.

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