CN220827454U

CN220827454U - Coating chamber and coating equipment

Info

Publication number: CN220827454U
Application number: CN202322656579.4U
Authority: CN
Inventors: 裴蓓; 吕启蒙; 余龙; 曹永军
Original assignee: Optorun Shanghai Co Ltd
Current assignee: Optorun Shanghai Co Ltd
Priority date: 2023-09-28
Filing date: 2023-09-28
Publication date: 2024-04-23
Anticipated expiration: 2033-09-28

Abstract

The utility model belongs to the technical field of vacuum coating and discloses a coating chamber and coating equipment. The coating chamber comprises a coating cavity, a first driving piece, a second driving piece and a coating source, wherein the first driving piece is in transmission connection with a first rotating disk, the first rotating disk is arranged in the coating cavity, and the first driving piece can enable the first rotating disk to rotate; the second driving piece is in transmission connection with a plurality of second rotating discs, the second driving piece can enable the second rotating discs to rotate, the plurality of second rotating discs are rotationally connected to the first rotating discs, and the second rotating discs are used for placing substrates; coating sources are respectively arranged on the upper side and the lower side of the second rotating disk; the coating equipment comprises a loading and unloading chamber, a conveying chamber arranged at the downstream of the loading and unloading chamber and a coating chamber above, wherein the coating chamber is arranged at the downstream of the conveying chamber. According to the utility model, the coating chamber and the coating equipment can enable the revolution and the rotation of the substrate to be relatively independent, the rotation speed of the substrate can be freely adjusted, and the adaptability of the coating equipment is improved.

Description

Coating chamber and coating equipment

Technical Field

The utility model relates to the technical field of vacuum coating, in particular to a coating chamber and coating equipment.

Background

In the vacuum coating process, a rotatable substrate rotating mechanism can be generally arranged in the vacuum coating chamber, and the substrate rotating mechanism can load a substrate and a substrate clamp thereof and can realize revolution or autorotation of the substrate.

In conventional vacuum plating equipment, the plating source is typically disposed on the same side of the substrate. When the plating is required on both sides of the substrate, the plating is usually completed on one side, then the turning operation is performed, and then the plating is continued on the other side of the substrate. However, the above coating methods are generally time-consuming; particularly, when the multilayer optical film is plated on a large-size substrate with small thickness, the substrate is easy to warp in the process of plating. In addition, in the prior art, the substrate rotation mechanism is often limited by the revolution mechanism, the transmission ratio is relatively fixed, free adjustment of the substrate rotation speed is difficult to realize, and the adaptability of equipment is reduced.

Disclosure of utility model

The utility model aims to provide a coating chamber and coating equipment, so that revolution and rotation of a substrate are independent, the rotation speed of the substrate can be freely adjusted, and the adaptability of the coating equipment is improved.

To achieve the purpose, the utility model adopts the following technical scheme:

coating film room, including the coating film chamber, still include:

The first driving piece is in transmission connection with the first rotating disk, the first rotating disk is arranged in the coating cavity, and the first driving piece can enable the first rotating disk to rotate;

The second driving piece is in transmission connection with a plurality of second rotating discs, the second driving piece can enable the second rotating discs to rotate, the plurality of second rotating discs are connected with the first rotating discs in a rotating mode, and the second rotating discs are used for placing substrates;

The coating sources are respectively arranged on the upper side and the lower side of the second rotating disk.

As an alternative scheme of coating film chamber, the first driving piece is located the outside in coating film chamber, first driving piece connects the transmission shaft, the transmission shaft with the chamber wall in coating film chamber rotates to be connected, the transmission shaft with first rotary disk transmission is connected.

As an alternative scheme of coating film room, be equipped with the bearing frame in the coating film chamber, the transmission shaft passes the bearing frame, the outer wall of bearing frame is equipped with first bearing, first bearing outside cover is equipped with first duplex gear, first duplex gear's one deck teeth of a cogwheel with the drive end gear drive of second driving piece is connected, another layer teeth of a cogwheel of first duplex gear is connected with execution gear drive, the locating hole has been seted up to the execution gear, the second rotary disk is inlayed and is located in the locating hole.

As an alternative scheme of the coating chamber, the driving end gear is in transmission connection with the first duplex gear through an adjusting gear, the adjusting gear is meshed with the driving end gear and the first duplex gear, and the adjusting gear can adjust the distance between the second driving piece and the transmission shaft.

As an alternative of the film plating chamber, the other layer of gear teeth of the first duplex gear is meshed with one layer of gear teeth of the second duplex gear for transmission, and the other layer of gear teeth of the second duplex gear is connected with the executing gear for transmission.

As an alternative scheme of the coating chamber, the other layer of gear teeth of the second duplex gear are in transmission connection with the executing gear through a gear set, and the gear set comprises a plurality of adjusting gears which are sequentially meshed and connected.

As an alternative scheme of coating film room, the cover is equipped with the locating sleeve on the outer wall of second rotary disk, the locating sleeve with the execution gear sets up side by side, the outer wall cover of locating sleeve is equipped with the second bearing, the second bearing outer wall with the mounting hole inner wall of first rotary disk is connected.

As an alternative scheme of coating film room, be equipped with the supporting shoe in the mounting hole of first rotary disk, the supporting shoe ring is located the outer wall of second bearing, the supporting shoe is close to the teeth of a cogwheel one end ring of execution gear is equipped with magnet, magnet can adsorb the granule that contains ferromagnetic substance iron fillings that the teeth of an cogwheel dropped.

As an alternative scheme of the film plating chamber, a labyrinth component is arranged on the outer wall of the second rotary disk in a surrounding manner, and the labyrinth component is arranged at one end, far away from the executing gear, of the second bearing.

As an alternative scheme of coating film room, the maze subassembly includes two rings are located the labyrinth backplate of second rotary disk outer wall that is the L type, two the labyrinth backplate combination encloses to be established and forms labyrinth seal.

The coating equipment comprises a loading and unloading sheet chamber, a conveying chamber and the coating chamber according to any scheme, wherein the conveying chamber is arranged between the loading and unloading sheet chamber and the coating chamber.

As an alternative scheme of the film plating equipment, the substrate is placed in the loading and unloading chamber, and a manipulator is arranged in the conveying chamber and can selectively load and unload the substrate between the loading and unloading chamber and the film plating chamber.

The beneficial effects are that:

In the first aspect of the utility model, the coating cavity is a closed coating cavity and is used for providing a coating environment of closed vacuum for the substrate; the substrate is arranged on the second rotary disk, and by enabling the coating sources to be respectively arranged on the upper side and the lower side of the second rotary disk, double-sided coating of the substrate can be realized, coating efficiency is improved, and the influence on coating quality caused by the fact that a single-sided coating technology in the prior art is used for coating a coating on one side is avoided; further, the first rotating disk is driven to rotate through the first driving piece, so that the substrates can revolve around the shaft in the film coating process, the uniformity of film coating of the plurality of substrates is ensured, the film coating efficiency of the plurality of substrates is improved, in addition, the second rotating disk is driven to rotate through the second driving piece, the consistency of film coating thickness of a single substrate is ensured, and the film coating quality of the substrates is improved.

In the second aspect of the utility model, the coating equipment provided with the coating chamber can effectively improve the coating efficiency and the coating quality.

Drawings

FIG. 1 is a schematic structural view of a coating apparatus according to an embodiment of the present utility model;

FIG. 2 is a schematic cross-sectional view of a coating chamber with a hidden coating chamber according to an embodiment of the present utility model;

FIG. 3 is an enlarged view of a portion of FIG. 2 at A;

FIG. 4 is a partial enlarged view of FIG. 2 at B;

FIG. 5 is an enlarged view of a portion of FIG. 4 at C;

Fig. 6 is a schematic diagram illustrating operation of a plating apparatus according to a top view of the present utility model.

In the figure:

100. a film coating cavity; 200. loading and unloading a slice chamber; 300. a conveying chamber; 310. a manipulator; 400. a substrate;

10. a first driving member; 11. a first rotating disk; 111. a mounting hole; 112. a support block; 113. a magnet; 12. a transmission shaft; 13. a bearing seat; 14. a first bearing; 15. a first double gear; 16. magnetic fluid;

20. A second driving member; 21. a second rotating disk; 211. a positioning sleeve; 212. a second bearing; 22. a drive end gear; 23. an execution gear; 231. positioning holes; 24. an adjusting gear; 25. a second duplex gear; 26. a gear set; 261. an adjusting gear; 27. a labyrinth assembly; 271. a labyrinth guard plate;

30. And a film coating source.

Detailed Description

The utility model is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the utility model and are not limiting thereof. It should be further noted that, for convenience of description, only some, but not all of the structures related to the present utility model are shown in the drawings.

In the description of the present utility model, unless explicitly stated and limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

In the present utility model, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.

In the description of the present embodiment, the terms "upper", "lower", "right", etc. orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are merely for convenience of description and simplicity of operation, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the utility model. Furthermore, the terms "first," "second," and the like, are used merely for distinguishing between descriptions and not for distinguishing between them.

Referring to fig. 1-6, a first aspect of the present embodiment relates to a coating chamber, which includes a coating chamber 100, and further includes a first driving member 10 and a second driving member 20, where the first driving member 10 is in transmission connection with a first rotating disc 11, the first rotating disc 11 is disposed in the coating chamber 100, and the first driving member 10 can make the first rotating disc 11 rotate; the second driving member 20 is in transmission connection with a plurality of second rotating discs 21, the second driving member 20 can enable the second rotating discs 21 to rotate, the plurality of second rotating discs 21 are rotatably connected to the first rotating disc 11, and the second rotating discs 21 are used for placing the substrate 400; the coating sources 30 are disposed on the upper and lower sides of the second rotary disk 21.

In this embodiment, the coating chamber 100 is a closed coating chamber for providing a vacuum-tight coating environment for the substrate 400; the substrate 400 is arranged on the second rotary disk 21, and by arranging two coating sources 30 on the upper side and the lower side of the second rotary disk 21, double-sided coating of the substrate 400 can be realized, coating efficiency is improved, and the influence on coating quality caused by turning over coating after coating on one side in the single-sided coating technology in the prior art is avoided; further, the first driving piece 10 drives the first rotating disc 11 to rotate, so that the substrate 400 can revolve around a shaft in the film coating process, the film coating uniformity of a plurality of substrates 400 is ensured, the film coating efficiency of the plurality of substrates 400 is improved, in addition, the second driving piece 20 drives the second rotating disc 21 to rotate, the uniformity of the film coating thickness of the single substrate 400 is ensured, the film coating quality of the substrate 400 is improved, in the embodiment, the linkage revolution and the rotation motion of the substrate 400 are effectively avoided by adopting single driving in the prior art, the revolution and the rotation are prevented from adopting fixed transmission ratio transmission connection, the revolution and the rotation of the substrate 400 are relatively independent, the rotation speed of the substrate 400 can be freely adjusted, and the adjustment adaptability of the substrate 400 to rotation speeds of different types is greatly improved.

Alternatively, the first driving member 10 is disposed outside the coating cavity 100, the first driving member 10 is connected to the driving shaft 12, the driving shaft 12 is rotationally connected to the cavity wall of the coating cavity 100, and the driving shaft 12 is in driving connection with the first rotating disc 11.

Referring to fig. 1 and fig. 2, the first driving member 10 is disposed outside the coating cavity 100, so as to avoid the influence of working temperature rise and noise of the first driving member 10 on the internal environment of the coating cavity 100, penetrating into the coating cavity 100 through the transmission shaft 12, and being in transmission connection with the first rotating disc 11 at the other end of the transmission shaft 12, wherein a specific connection mode can be a conventional key connection or welding integrated structure, and a person skilled in the art can reasonably select the connection strength, transmission torque and economy; in order to improve the tightness of the rotary connection and prevent foreign matters from entering through the rotary gap between the transmission shaft 12 and the coating cavity 100 to pollute the coating cavity 100, optionally, the transmission shaft 12 is sleeved with the magnetic fluid 16 for rotationally sealing the gap between the transmission shaft 12 and the coating cavity 100. Further, a bearing seat 13 is arranged in the film coating cavity 100, the transmission shaft 12 passes through the bearing seat 13, a first bearing 14 is arranged on the outer wall of the bearing seat 13, a first duplex gear 15 is sleeved on the outer side of the first bearing 14, one layer of gear teeth of the first duplex gear 15 are in transmission connection with a driving end gear 22 of the second driving piece 20, the other layer of gear teeth of the first duplex gear 15 are in transmission connection with an executing gear 23, a positioning hole 231 is formed in the executing gear 23, and the second rotating disk 21 is embedded in the positioning hole 231. Referring to fig. 1 to fig. 3 again, in order to realize independent rotation and revolution of the substrate 400, a first bearing 14 is sleeved on an outer wall of a bearing seat 13, the bearing seat 13 is fixed in a film coating cavity 100, an inner ring of the first bearing 14 is tightly connected with the bearing seat 13, an outer ring rotates along with a first duplex gear 15, one layer of gear teeth of the first duplex gear 15 are in gear engagement transmission with a driving end gear 22, and the other layer of gear teeth are in gear engagement transmission with an executing gear 23, so that the whole transmission process is specifically as follows: firstly, the second driving member 20 drives the driving end gear 22 to rotate, the driving end gear 22 drives the first duplex gear 15, and the first duplex gear 15 drives the executing gear 23 to rotate, while in the embodiment, the executing gear 23 is used as a carrier capable of supporting the second rotating disc 21, and the second rotating disc 21 rotates along with the executing gear 23 to realize the rotation of the second rotating disc 21; referring to fig. 4 and fig. 5, in order to ensure the stable limit of the second rotating disk 21, a positioning hole 231 is formed on the actuating gear 23, and the second rotating disk 21 is embedded in the positioning hole 231.

Optionally, the driving end gear 22 is in transmission connection with the first duplex gear 15 through the adjusting gear 24, the adjusting gear 24 is meshed with both the driving end gear 22 and the first duplex gear 15, and the adjusting gear 24 can adjust the distance between the second driving member 20 and the transmission shaft 12.

In this embodiment, a person skilled in the art can reasonably select the adjusting gears 24 with different sizes according to the transmission ratio relationship, the position of the second driving member 20 relative to the transmission shaft 12, and the size of the first rotating disc 11, so that the adjustment is convenient.

Alternatively, the other layer of gear teeth of the first duplex gear 15 is meshed with one layer of gear teeth of the second duplex gear 25, and the other layer of gear teeth of the second duplex gear 25 is in driving connection with the executing gear 23.

In the present embodiment, a second duplex gear 25 is further provided, and the second duplex gear 25 can further adjust the transmission ratio; of course, the second duplex gear 25 may be configured as two common gears having different coaxial sizes, and the distance between the second rotating disk 21 and the second driving member 20 may be changed by adjusting the distance between the two common gears.

Preferably, the second driving member 20 is a driving motor with adjustable rotation speed.

Further, the other layer of gear teeth of the second duplex gear 25 is in driving connection with the executing gear 23 through a gear set 26, and the gear set 26 comprises a plurality of adjusting gears 261 which are sequentially meshed and connected.

In the present embodiment, a gear set 26 is further disposed between the second duplex gear 25 and the executing gear 23, the gear set 26 is formed by a plurality of adjusting gears 261 which are sequentially meshed, the plurality of adjusting gears 261 can not only adjust the transmission ratio, but also adapt to the layout of the second rotating disk 21 on the first rotating disk 11, since the second rotating disk 21 should be disposed on the disk surface of the first rotating disk 11 close to the outer side, and distributed in the circumferential direction, since each of the second rotating disks 21 requires a set of gear sets 26 for transmission, when a single gear is adopted as the adjusting gear 261, the size of the gear is too large to adapt to the layout of the plurality of second rotating disks 21, so that it is necessary to reduce the gears of the adjusting gears 261, and to dispose a plurality of adjusting gears 261, in the present embodiment, two adjusting gears 261 are disposed, and a person skilled in the art can adjust the number of adjusting gears 261 according to the layout of the second rotating disk 21 relative to the first rotating disk 11.

Optionally, a positioning sleeve 211 is sleeved on the outer wall of the second rotating disk 21, the positioning sleeve 211 is arranged side by side with the executing gear 23, a second bearing 212 is sleeved on the outer wall of the positioning sleeve 211, and the outer wall of the second bearing 212 is connected with the inner wall of the mounting hole 111 of the first rotating disk 11.

With continued reference to fig. 4 and 5, the positioning sleeve 211 is configured to position the second bearing 212 and enable the second rotating disk 21 to perform a rotation motion relative to the first rotating disk 11.

Further, a supporting block 112 is disposed in the mounting hole 111 of the first rotary disk 11, the supporting block 112 is disposed around the outer wall of the second bearing 212, a magnet 113 is disposed at an end ring of the supporting block 112 near the teeth of the executing gear 23, and the magnet 113 can adsorb the particles containing iron filings of ferromagnetic substances falling from the teeth of the executing gear 23.

In this embodiment, a supporting block 112 is further disposed between the second bearing 212 and the inner wall of the mounting hole 111 of the first rotating disc 11, the supporting block 112 is also an annular member, and the annular groove is disposed on the supporting block 112, so that the annular magnet 113 is embedded in the annular groove, the magnet 113 is opposite to the teeth of the actuating gear 23, and the particles containing iron filings of ferromagnetic substances are prevented from adhering to the substrate 400 due to the abrasion and falling of the actuating gear 23 in the long-term working process of the coating chamber, thereby affecting the coating quality of the substrate 400.

Optionally, the outer wall of the second rotating disc 21 is provided with a labyrinth assembly 27, and the labyrinth assembly 27 is arranged against the end of the second bearing 212 remote from the actuator gear 23.

In order to prevent the coated particles from contaminating the second bearing 212, a labyrinth assembly 27 is disposed at an end of the second bearing 212 away from the actuator gear 23, and the labyrinth assembly 27 can effectively block the coated particles below the substrate 400 from contacting the second bearing 212; for the other side of the second bearing 212, a blocking structure may be protruded on the supporting block 112, and the blocking structure may extend obliquely toward the actuator gear 23, so as to prevent the coating particles generated from the coating source 30 on the upper side of the substrate 400 from contacting the second bearing 212.

Further, the labyrinth assembly 27 includes two labyrinth guard plates 271 having an L shape and annularly provided on the outer wall of the second rotary disk 21, and the two labyrinth guard plates 271 are combined and surrounded to form a labyrinth seal.

In this embodiment, two annular L-shaped labyrinth guard plates 271 are provided, in a specific arrangement, see fig. 4 and 5, the first guard plate having one end fixed to the outer wall of the second rotary disk 21 and the other end extending downward at a right angle, the second guard plate having one end fixed to the bottom of the first rotary disk 11 and the other end extending upward at a right angle, and the staggered extension of the two guard plates forming a labyrinth seal.

Another aspect of this embodiment also relates to a plating apparatus comprising a loading and unloading chamber 200, a transfer chamber 300, and the plating chambers above, the transfer chamber 300 being disposed between the loading and unloading chamber 200 and the plating chambers. Further, the substrate 400 is placed in the loading/unloading chamber 200, and the robot 310 is provided in the transfer chamber 300, and the robot 310 can selectively load/unload the substrate 400 between the loading/unloading chamber 200 and the plating chamber.

The loading and unloading piece room 200 is provided with a lamination tool, the substrate 400 is placed on the lamination tool in sequence, the substrate can be conveniently taken one by the manipulator 310 and put into the second rotary disk 21 in the film coating room through the carrying room 300, the automation level is higher, and the existing structure comprising the loading and unloading piece room 200 and the carrying room 300 is the prior art, so that the repeated expansion description is not performed in this embodiment.

It is to be understood that the above examples of the present utility model are provided for clarity of illustration only and are not limiting of the embodiments of the present utility model. Various obvious changes, rearrangements and substitutions can be made by those skilled in the art without departing from the scope of the utility model. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the utility model are desired to be protected by the following claims.

Claims

1. Coating film room, including coating film chamber (100), its characterized in that still includes:

The first driving piece (10) is in transmission connection with the first rotating disc (11), the first rotating disc (11) is arranged in the coating cavity (100), and the first driving piece (10) can enable the first rotating disc (11) to rotate;

The second driving piece (20) is in transmission connection with a plurality of second rotating discs (21), the second driving piece (20) can enable the second rotating discs (21) to rotate, the plurality of second rotating discs (21) are rotationally connected with the first rotating discs (11), and the second rotating discs (21) are used for placing substrates (400);

The coating sources (30) are respectively arranged on the upper side and the lower side of the second rotating disk (21).

2. The coating chamber according to claim 1, characterized in that the first driving member (10) is arranged outside the coating chamber (100), the first driving member (10) is connected with a transmission shaft (12), the transmission shaft (12) is rotatably connected with the chamber wall of the coating chamber (100), and the transmission shaft (12) is in transmission connection with the first rotating disc (11).

3. The coating chamber according to claim 2, characterized in that a bearing seat (13) is arranged in the coating chamber (100), the transmission shaft (12) passes through the bearing seat (13), a first bearing (14) is arranged on the outer wall of the bearing seat (13), a first duplicate gear (15) is sleeved outside the first bearing (14), one layer of gear teeth of the first duplicate gear (15) are in transmission connection with a driving end gear (22) of the second driving member (20), the other layer of gear teeth of the first duplicate gear (15) are in transmission connection with an executing gear (23), a positioning hole (231) is formed in the executing gear (23), and the second rotating disc (21) is embedded in the positioning hole (231).

4. A coating chamber according to claim 3, characterized in that the drive gear (22) is in driving connection with the first double gear (15) by means of an adjusting gear (24), the adjusting gear (24) is in engagement with both the drive gear (22) and the first double gear (15), and the adjusting gear (24) is capable of adjusting the distance of the second driving member (20) relative to the transmission shaft (12).

5. A coating chamber according to claim 3, characterized in that the other layer of teeth of the first double gear (15) is in meshing transmission with one layer of teeth of the second double gear (25), the other layer of teeth of the second double gear (25) being in driving connection with the actuator gear (23).

6. The coating chamber according to claim 5, characterized in that the other layer of gear teeth of the second duplex gear (25) is in driving connection with the executing gear (23) through a gear set (26), the gear set (26) comprising a plurality of adjusting gears (261) which are in engagement with each other in sequence.

7. A coating chamber according to claim 3, characterized in that a positioning sleeve (211) is sleeved on the outer wall of the second rotating disc (21), the positioning sleeve (211) and the executing gear (23) are arranged side by side, a second bearing (212) is sleeved on the outer wall of the positioning sleeve (211), and the outer wall of the second bearing (212) is connected with the inner wall of the mounting hole (111) of the first rotating disc (11).

8. The coating chamber according to claim 7, wherein a supporting block (112) is arranged in the mounting hole (111) of the first rotating disc (11), the supporting block (112) is annularly arranged on the outer wall of the second bearing (212), a magnet (113) is arranged on an end ring of the supporting block (112) close to the gear teeth of the executing gear (23), and the magnet (113) can absorb iron filings containing ferromagnetic substances, which fall from the gear teeth of the executing gear (23).

9. The coating chamber according to claim 8, characterized in that the outer wall of the second rotating disc (21) is annularly provided with a labyrinth assembly (27), the labyrinth assembly (27) being arranged against the end of the second bearing (212) remote from the actuating gear (23).

10. The coating chamber according to claim 9, characterized in that the labyrinth assembly (27) comprises two L-shaped labyrinth shields (271) which are arranged around the outer wall of the second rotating disc (21), and the two labyrinth shields (271) are arranged around to form a labyrinth seal.

11. Coating equipment, characterized in that it comprises a loading and unloading chamber (200), a carrying chamber (300) and a coating chamber according to any one of claims 1-10, said carrying chamber (300) being arranged between said loading and unloading chamber (200) and said coating chamber.

12. The plating apparatus according to claim 11, wherein the loading/unloading chamber (200) houses the substrate (400), and a robot (310) is provided in the transport chamber (300), and the robot (310) is selectively loaded/unloaded to/from the substrate (400) between the loading/unloading chamber (200) and the plating chamber.