CN112941483B - Multi-station rotary workpiece table suitable for special-shaped curved surface workpiece - Google Patents
Multi-station rotary workpiece table suitable for special-shaped curved surface workpiece Download PDFInfo
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- CN112941483B CN112941483B CN202110135993.3A CN202110135993A CN112941483B CN 112941483 B CN112941483 B CN 112941483B CN 202110135993 A CN202110135993 A CN 202110135993A CN 112941483 B CN112941483 B CN 112941483B
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- rotating shaft
- revolution
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- water
- carousel
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a multi-station rotary workpiece table suitable for a special-shaped curved surface workpiece, which comprises a revolution turntable, a rotating shaft assembly connected with the revolution turntable and a driving mechanism connected with the rotating shaft assembly, wherein a plurality of mounting seats are arranged above the revolution turntable along the circumferential direction, a rotation rotating shaft for driving the workpiece to rotate is arranged on each mounting seat, a rotation driving part is arranged below the revolution turntable, and the rotation driving part is connected with the rotation rotating shaft through a universal flexible shaft. The invention has the advantages of reducing the time for loading and vacuumizing the workpiece, avoiding faults caused by film coating and baking of the motor, and the like.
Description
Technical Field
The invention relates to magnetron sputtering coating equipment, in particular to a multi-station rotary workpiece table suitable for a special-shaped curved surface workpiece.
Background
The quartz harmonic oscillator of the inertial gyroscope is bowl-shaped, the center of the quartz harmonic oscillator is provided with a small shaft, metal film electrodes are required to be deposited on the inner surface and the outer surface of a bowl-shaped hemispherical surface, the inner surface and the outer surface of the workpiece are special-shaped curved surfaces, the sizes of the quartz harmonic oscillators of different inertial gyroscopes are different, conventional magnetron sputtering film plating equipment is planar film plating, and the requirement of uniform film plating on the special-shaped curved surfaces of the quartz harmonic oscillator of the inertial gyroscope cannot be met. At present, a part of research and development units use a test machine table, so that a coating cavity needs to be opened every time a workpiece is loaded, the atmosphere is exposed, the loading and vacuumizing time is long, and the efficiency is extremely low. Meanwhile, the motor is directly connected with the workpiece, and the motor is easy to be coated in the process, so that the rotating position is blocked. Meanwhile, when the workpiece is baked, the motor is also in the irradiation range, and the motor is extremely easy to fail and damage at high temperature.
Disclosure of Invention
The invention aims to solve the technical problem of overcoming the defects of the prior art and providing a multi-station rotary workpiece table which can reduce the time for loading and vacuumizing workpieces and avoid faults caused by film coating and baking of a motor and is suitable for irregularly-shaped curved workpieces.
In order to solve the technical problems, the invention adopts the following technical scheme:
the utility model provides a multistation rotary workpiece platform suitable for special-shaped curved surface work piece, includes revolution carousel, the pivot subassembly that links to each other with revolution carousel and the actuating mechanism that links to each other with the pivot subassembly, revolution carousel top is equipped with a plurality of mount pads along the circumferencial direction, be equipped with the rotation pivot that is used for driving the work piece rotation on the mount pad, revolution carousel below is equipped with rotary driving spare, rotary driving spare through a universal flexible axle with the rotation pivot links to each other.
As a further improvement of the above technical scheme: the revolution carousel top is equipped with the carousel protection casing, the mount pad periphery is equipped with the mount pad protection casing.
As a further improvement of the above technical scheme: the revolution turntable is provided with an adjusting mechanism for adjusting the position and the pitching angle of the rotation rotating shaft.
As a further improvement of the above technical scheme: the adjusting mechanism comprises a first telescopic adjusting piece and a second telescopic adjusting piece, wherein the first telescopic adjusting piece is radially arranged along the revolution turntable, the second telescopic adjusting piece is vertically arranged, the second telescopic adjusting piece is arranged on the first telescopic adjusting piece, and the mounting seat is rotatably arranged on the second telescopic adjusting piece.
As a further improvement of the above technical scheme: the rotating shaft assembly comprises a rotating shaft, a water-gas introducing box and a magnetic fluid sealing shaft which are sequentially connected, the rotating shaft, the water-gas introducing box and the magnetic fluid sealing shaft are of hollow structures and are communicated, an electric conduction slip ring is arranged on the rotating shaft, and one end, far away from the water-gas introducing box, of the rotating shaft is connected with a rotary joint.
As a further improvement of the above technical scheme: the rotary driving piece is arranged below the revolution turntable through a water jacket, the water jacket waterways are connected in series and extend into the water vapor introducing box, and a cooling water source is introduced into the water vapor introducing box through the rotary joint and the rotating shaft.
As a further improvement of the above technical scheme: the driving mechanism is a synchronous belt mechanism, and a driven belt wheel of the synchronous belt mechanism is arranged on the rotating shaft.
Compared with the prior art, the invention has the advantages that: the invention discloses a multi-station rotary workpiece table suitable for a special-shaped curved surface workpiece, when in operation, a small shaft at the center of a quartz harmonic oscillator of an inertial gyroscope is connected with a rotation rotating shaft, a driving mechanism is utilized to drive a rotating shaft assembly to rotate, the rotating shaft assembly further drives a revolution turntable to rotate, a mounting seat above the revolution turntable, the rotation rotating shaft, the workpiece and a rotary driving piece below the revolution turntable rotate along with the revolution turntable, and the rotary driving piece drives the quartz harmonic oscillator of the inertial gyroscope to rotate around the small shaft of the quartz harmonic oscillator through a universal flexible shaft, so that uniform coating of the special-shaped curved surface of the workpiece in the circumferential direction is realized; the workpiece table can realize a loading process of multiple workpieces, reduce the time for loading and vacuumizing the workpieces, improve the productivity, and simultaneously, the workpieces and the rotary driving parts are respectively arranged on the upper side and the lower side of the revolution turntable.
Drawings
Fig. 1 is a schematic perspective view of a multi-station rotary workpiece table suitable for a special-shaped curved surface workpiece.
Fig. 2 is a schematic top view of a multi-station rotary workpiece table suitable for a special-shaped curved surface workpiece according to the present invention.
Fig. 3 is a schematic cross-sectional structure of a multi-station rotary workpiece table suitable for a special-shaped curved surface workpiece.
Fig. 4 is a schematic structural view of the adjusting mechanism in the present invention.
The reference numerals in the drawings denote: 1. a revolution turntable; 11. a turntable protective cover; 2. a spindle assembly; 21. a rotating shaft; 22. a moisture introducing box; 23. a magnetic fluid seal shaft; 24. a conductive slip ring; 25. a rotary joint; 3. a driving mechanism; 31. a driven pulley; 4. a mounting base; 41. a rotation shaft; 42. the mounting seat protective cover; 5. a workpiece; 6. a rotary driving member; 61. a universal flexible shaft; 62. a water jacket; 7. an adjusting mechanism; 71. a first telescopic adjustment member; 72. and a second telescopic adjusting member.
Detailed Description
The invention is described in further detail below with reference to the drawings and specific examples of the specification.
Fig. 1 to 4 show an embodiment of a multi-station rotary workpiece table suitable for a special-shaped curved surface workpiece according to the present invention, which comprises a revolution turntable 1, a rotating shaft assembly 2 connected with the revolution turntable 1, and a driving mechanism 3 connected with the rotating shaft assembly 2, wherein a plurality of mounting seats 4 are arranged above the revolution turntable 1 along the circumferential direction, a rotation rotating shaft 41 for driving the workpiece 5 to rotate is arranged above the mounting seats 4, a rotation driving member 6 is arranged below the revolution turntable 1, and the rotation driving member 6 is connected with the rotation rotating shaft 41 through a universal flexible shaft 61. The rotary drive 6 may be, for example, a conventional motor or the like.
The multi-station rotary workpiece table suitable for the special-shaped curved surface workpiece is characterized in that when the multi-station rotary workpiece table is in operation, a small shaft in the center of a quartz harmonic oscillator of an inertial gyroscope is connected with a rotation rotating shaft 41, a rotating shaft assembly 2 is driven to rotate by a driving mechanism 3, the rotating shaft assembly 2 further drives a revolution turntable 1 to rotate, a mounting seat 4 above the revolution turntable 1, the rotation rotating shaft 41, a workpiece 5 and a rotary driving piece 6 below the revolution turntable 1 rotate along with the revolution turntable 1, and the rotation driving piece 6 drives the quartz harmonic oscillator of the inertial gyroscope to rotate around the rotation rotating shaft 41 through a universal flexible shaft 61, so that uniform coating of the special-shaped curved surface of the workpiece 5 in the circumferential direction is realized; the workpiece table can realize a loading process of multiple workpieces 5, reduce the time for loading and vacuumizing the workpieces 5, improve the productivity, and meanwhile, the workpieces 5 and the rotary driving pieces 6 are respectively arranged on the upper side and the lower side of the revolution turntable 1, in the process, the revolution turntable 1 can provide a protection effect for the rotary driving pieces 6, so that the rotary driving pieces 6 are prevented from being coated and heated when the workpieces 5 are baked, and the reliability and the service life of equipment are improved.
Further, in this embodiment, a turntable protective cover 11 is disposed above the revolution turntable 1, and a mount protective cover 42 is disposed on the outer periphery of the mount 4. The turntable protective cover 11 is beneficial to preventing a film layer from depositing on the revolution turntable 1 in the process; the mounting seat protecting cover 42 can protect the inner rotation rotating shaft 41, the bearing and the like from being coated with films and baked at high temperature, and is beneficial to prolonging the service life and improving the reliability of each part.
In the preferred embodiment, the revolution turntable 1 is provided with an adjusting mechanism 7 for adjusting the position and pitch angle (angle β in fig. 4) of the rotation shaft 41. When the position and the pitching angle of the rotation rotating shaft 41 are changed, the position and the angle of the workpiece 5 are correspondingly changed, and the uniform coating requirement of the irregularly-shaped curved-surface workpieces 5 with different radius sizes can be met.
Further, in the present embodiment, the adjusting mechanism 7 includes a first telescopic adjusting member 71 radially arranged along the revolution turntable 1 and a second telescopic adjusting member 72 vertically arranged, the second telescopic adjusting member 72 is provided on the first telescopic adjusting member 71, and the mount 4 is rotatably provided on the second telescopic adjusting member 72. The second telescopic adjusting piece 72 and the first telescopic adjusting piece 71 can be in sliding fit to adjust the radial position of the second telescopic adjusting piece 72, the second telescopic adjusting piece 72 can also slide to realize telescopic adjustment, the adjustment of the height of the mounting seat 4 is realized, the mounting seat 4 is rotated around the second telescopic adjusting piece 72 to realize the change of the angle of the mounting seat 4 and is locked through lock holes matched with different positions by lock pins, and the telescopic device is simple and reliable in structure and convenient to adjust. Of course, in other embodiments, adjustments may be made in ways such as pneumatically, electrically, or manually.
Further, in this embodiment, the rotating shaft assembly 2 includes a rotating shaft 21, a water vapor introducing box 22 and a magnetic fluid sealing shaft 23 which are sequentially connected, the rotating shaft 21, the water vapor introducing box 22 and the magnetic fluid sealing shaft 23 are hollow structures and are communicated, so that water pipes and electric pipelines can pass through conveniently, winding and torsion occur in the process of avoiding, the structure is simple and reliable, a conductive slip ring 24 is arranged on the rotating shaft 21, one end of the rotating shaft 21, far away from the water vapor introducing box 22, is connected with a rotary joint 25, and the conductive slip ring 24 and the rotary joint 25 are conveniently connected with a power source, a cooling water source and the like.
Furthermore, in the present embodiment, the rotary driving member 6 is installed below the revolution turntable 1 through a water jacket 62, the water jacket 62 is beneficial to timely taking away heat, the rotary driving member 6 is guaranteed to be in a low temperature environment, the water jackets 62 are connected in series along the water path and extend into the water vapor introducing box 22, and the cooling water source is introduced into the water vapor introducing box 22 through the rotary joint 25 and the rotary shaft 21, so that the structure is simple and reliable.
In the preferred embodiment, the driving mechanism 3 is a synchronous belt mechanism, and the driven pulley 31 of the synchronous belt mechanism is arranged on the rotating shaft 21, so that the rotary joint 25 is arranged below the rotating shaft 21. Of course, in other embodiments, other driving modes may be adopted, which is convenient for the arrangement of the conductive slip ring 24 and the rotary joint 25 and can drive the rotary shaft 21 to rotate.
While the invention has been described with reference to preferred embodiments, it is not intended to be limiting. Many possible variations and modifications of the disclosed technology can be made by anyone skilled in the art, or equivalent embodiments with equivalent variations can be made, without departing from the scope of the invention. Therefore, any simple modification, equivalent variation and modification of the above embodiments according to the technical substance of the present invention shall fall within the scope of the technical solution of the present invention.
Claims (4)
1. The utility model provides a multistation rotatory workpiece table suitable for dysmorphism curved surface work piece which characterized in that: including revolution carousel (1), with the pivot subassembly (2) that revolution carousel (1) links to each other and with the actuating mechanism (3) that pivot subassembly (2) links to each other, revolution carousel (1) top is equipped with a plurality of mount pad (4) along the circumferencial direction, be equipped with on mount pad (4) and be used for driving the rotatory rotation pivot (41) of work piece (5), revolution carousel (1) below is equipped with rotary drive spare (6), rotary drive spare (6) pass through a universal flexible axle (61) with rotation pivot (41) link to each other, revolution carousel (1) top is equipped with carousel protection casing (11), mount pad (4) periphery is equipped with mount pad protection casing (42), be equipped with on revolution carousel (1) be used for adjusting rotation pivot (41) position and every single move angle's adjustment mechanism (7), adjustment mechanism (7) are including along first flexible regulating part (71) of carousel (1) radial arrangement and along vertical second flexible regulating part (72), second flexible regulating part (72) are located on first regulating part (71), flexible setting up on the second flexible seat (72).
2. The multi-station rotary stage for profiled-surface workpieces as claimed in claim 1, wherein: the rotating shaft assembly (2) comprises a rotating shaft (21), a water-air introducing box (22) and a magnetic fluid sealing shaft (23) which are sequentially connected, the rotating shaft (21), the water-air introducing box (22) and the magnetic fluid sealing shaft (23) are of hollow structures and are communicated, a conductive slip ring (24) is arranged on the rotating shaft (21), and one end, far away from the water-air introducing box (22), of the rotating shaft (21) is connected with a rotary joint (25).
3. The multi-station rotary stage for profiled-surface workpieces as claimed in claim 2, wherein: the rotary driving piece (6) is arranged below the revolution turntable (1) through a water jacket (62), the water jackets (62) are connected in series in a water way and extend into the water vapor introducing box (22), and a cooling water source is introduced into the water vapor introducing box (22) through the rotary joint (25) and the rotary shaft (21).
4. The multi-station rotary stage for profiled-surface workpieces as claimed in claim 2, wherein: the driving mechanism (3) is a synchronous belt mechanism, and a driven belt wheel (31) of the synchronous belt mechanism is arranged on the rotating shaft (21).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110135993.3A CN112941483B (en) | 2021-02-01 | 2021-02-01 | Multi-station rotary workpiece table suitable for special-shaped curved surface workpiece |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110135993.3A CN112941483B (en) | 2021-02-01 | 2021-02-01 | Multi-station rotary workpiece table suitable for special-shaped curved surface workpiece |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112941483A CN112941483A (en) | 2021-06-11 |
| CN112941483B true CN112941483B (en) | 2023-09-05 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202110135993.3A Active CN112941483B (en) | 2021-02-01 | 2021-02-01 | Multi-station rotary workpiece table suitable for special-shaped curved surface workpiece |
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| CN (1) | CN112941483B (en) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104630734B (en) * | 2015-02-13 | 2017-07-11 | 北京中科科美科技股份有限公司 | A kind of specimen rotating holder |
| CN109423629B (en) * | 2017-08-31 | 2021-05-04 | 中国科学院苏州纳米技术与纳米仿生研究所 | Workpiece driving device for one-time full-surface deposition of disc parts and vapor deposition furnace |
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2021
- 2021-02-01 CN CN202110135993.3A patent/CN112941483B/en active Active
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| CN112941483A (en) | 2021-06-11 |
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