JP2006009082A5 - - Google Patents
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- JP2006009082A5 JP2006009082A5 JP2004187285A JP2004187285A JP2006009082A5 JP 2006009082 A5 JP2006009082 A5 JP 2006009082A5 JP 2004187285 A JP2004187285 A JP 2004187285A JP 2004187285 A JP2004187285 A JP 2004187285A JP 2006009082 A5 JP2006009082 A5 JP 2006009082A5
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- JP
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- Prior art keywords
- dome
- vacuum apparatus
- side gear
- substrate
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Claims (16)
該回転機構を該ベースから該真空槽底面方向に着脱可能な構成としたことを特徴とする真空装置。 A vacuum apparatus comprising a vacuum chamber, a base fixed inside the vacuum chamber, a rotation mechanism attached to the base, and a substrate dome mounted with a film formation substrate and rotated horizontally by the rotation mechanism,
A vacuum apparatus characterized in that the rotating mechanism is configured to be detachable from the base toward the bottom of the vacuum chamber.
該回転機構が少なくとも、
該ドーム基板の回転中心と同じ回転中心を持つように配置され、該回転機構外部に設けられた駆動源からの動力により水平に回転されるドーム側歯車、
該ベースに対して該ドーム側歯車を支持するための支持手段、及び、
該基板ドームを該ドーム側歯車に取り付けるための保持手段からなり、
該ドーム側歯車の外径が該ベースの内径よりも小さいことを特徴とする真空装置。 The vacuum apparatus according to claim 1,
The rotation mechanism is at least
A dome-side gear that is arranged to have the same rotation center as the rotation center of the dome substrate and is rotated horizontally by power from a drive source provided outside the rotation mechanism;
Support means for supporting the dome side gear with respect to the base; and
Comprising holding means for attaching the substrate dome to the dome side gear;
A vacuum apparatus, wherein an outer diameter of the dome side gear is smaller than an inner diameter of the base.
該支持手段が該ベースの下端に取り付けられることを特徴とする真空装置。 The vacuum apparatus according to claim 2,
A vacuum apparatus, wherein the support means is attached to the lower end of the base.
該支持手段が、少なくとも、
該ドーム側歯車と同心円状に該ドーム側歯車に固定される回転軸、及び、
該ドーム側歯車と同心円状に配置され、該ベースに取り付けられる軸受からなり、
該軸受が該ベースの下端に取り付けられることを特徴とする真空装置。 A vacuum apparatus according to claim 2 or claim 3,
The support means is at least
A rotating shaft fixed to the dome side gear concentrically with the dome side gear, and
It is arranged concentrically with the dome side gear, and comprises a bearing attached to the base,
A vacuum apparatus, wherein the bearing is attached to a lower end of the base.
該支持手段が、さらに、
該ドーム側歯車と同心円状に配置され、該軸受に支持され該ドーム側歯車を支持するスラストベアリング、及び、
該ドーム側歯車と同心円状に配置され、該回転軸に設置されるラジアルベアリングからなることを特徴とする真空装置。 The vacuum apparatus according to claim 4,
The support means further comprises:
A thrust bearing arranged concentrically with the dome side gear, supported by the bearing and supporting the dome side gear; and
A vacuum apparatus comprising a radial bearing arranged concentrically with the dome side gear and installed on the rotating shaft.
該回転機構が少なくとも、
該ドーム基板の回転中心と同じ回転中心を持つように配置され、該回転機構外部に設けられた駆動源からの動力により水平に回転されるドーム側歯車、
該ベースに対して該ドーム側歯車を支持するための支持手段、及び、
該基板ドームを該ドーム側歯車に取り付けるための保持手段からなり、
該支持手段が、
該ドーム側歯車と同心円状に配置され、該軸受に支持され該ドーム側歯車を支持するスラストベアリング、及び、該ドーム側歯車と同心円状に配置され、該回転軸に設置されるラジアルベアリングからなることを特徴とする真空装置。 The vacuum apparatus according to claim 1 , wherein
The rotation mechanism is at least
A dome-side gear that is arranged to have the same rotation center as the rotation center of the dome substrate and is rotated horizontally by power from a drive source provided outside the rotation mechanism;
Support means for supporting the dome side gear with respect to the base; and
Comprising holding means for attaching the substrate dome to the dome side gear;
The support means is
A thrust bearing that is concentrically arranged with the dome side gear, is supported by the bearing and supports the dome side gear, and a radial bearing that is concentrically arranged with the dome side gear and is disposed on the rotating shaft. A vacuum apparatus characterized by that.
該スラストベアリングと該ラジアルベアリングとが略同一平面上に配置されたことを特徴とする真空装置。 The vacuum apparatus according to claim 5 or 6,
A vacuum apparatus, wherein the thrust bearing and the radial bearing are arranged on substantially the same plane.
該スラストベアリングが切る面の高さ方向の幅と該ラジアルベアリングが切る面の高さ方向の幅とが重なる部分を持つように配置されたことを特徴とする真空装置。 The vacuum apparatus according to claim 5 or 6,
A vacuum apparatus, wherein the thrust bearing is arranged so that a width in a height direction of a surface cut by the thrust bearing overlaps a width in a height direction of a surface cut by the radial bearing.
該基板ドームの上方に該基板ドームの少なくとも一部分を覆う粉塵受けを配置したことを特徴とする真空装置。 A vacuum apparatus according to claim 1, further consists of a bearing composed of a plurality of balls and the lubricating oil accommodated in the annular groove of the rotating mechanism,
A vacuum apparatus, wherein a dust receiver covering at least a part of the substrate dome is disposed above the substrate dome.
該粉塵受けは該成膜基板加熱用のドームヒーターであることを特徴とする真空装置。 The vacuum apparatus according to claim 9, wherein
The vacuum apparatus, wherein the dust receiver is a dome heater for heating the film formation substrate.
該成膜基板加熱用のドームヒーターが該ベースに固定されたことを特徴とする真空装置。 The vacuum apparatus according to claim 10,
A vacuum apparatus, wherein the deposition substrate heating dome heater is fixed to the base.
該回転機構は、さらに、
該ドーム側歯車と同心円状に該ドーム側歯車に固定される回転軸、及び、
該ドーム側歯車と同心円状に配置され、該ベースに取り付けられる軸受からなり、
該回転軸が外周方向に伸びる突起部を有し、
該粉塵受けは該突起部に設けられた溝であることを特徴とする真空装置。 A vacuum apparatus according to any one of claims 9 to 11,
The rotating mechanism further includes:
A rotating shaft fixed to the dome side gear concentrically with the dome side gear, and
It is arranged concentrically with the dome side gear, and comprises a bearing attached to the base,
The rotating shaft has a protrusion extending in the outer circumferential direction;
The vacuum apparatus, wherein the dust receiver is a groove provided in the protrusion.
該保持手段の少なくとも1箇所に皿ビスを用いたことを特徴とする真空装置。 A vacuum apparatus according to any one of claims 3 to 12,
A vacuum apparatus characterized in that a countersunk screw is used in at least one place of the holding means.
少なくとも該回転機構を該真空槽底面側に着脱することを特徴とする組立分解方法。 A vacuum chamber, a substrate dome on which the deposition substrate is mounted, a rotation mechanism that is disposed immediately above the substrate dome and rotates the substrate dome, and at least the rotation mechanism that is disposed on the top plate of the vacuum chamber. A method for assembling and disassembling a vacuum device comprising a base mounted inside,
An assembling / disassembling method, wherein at least the rotating mechanism is attached to and detached from the bottom surface side of the vacuum chamber.
該回転機構と該基板ドームと固定する固定具をさらに有する真空装置において、
該固定具と該回転機構間、又は、該固定具と該基板ドーム間の少なくとも一方を皿ビスで固定し、該基板ドームの位置出しを行なうことを特徴とする組立分解方法。 The assembly and disassembly method according to claim 14,
In a vacuum apparatus further comprising a fixture for fixing the rotating mechanism and the substrate dome,
An assembling / disassembling method, wherein at least one of the fixing tool and the rotating mechanism or between the fixing tool and the substrate dome is fixed with a countersunk screw, and the substrate dome is positioned.
前記回転機構と該基板ドームの間に設けられた粉塵受けにより該回転機構から発生する粉塵を受けることを特徴とする成膜方法。 In a vacuum apparatus assembled by exploded method of claim 14, a film deposition method for depositing a deposition material from the deposition source to the deposition substrate while rotating the substrate dome,
A film forming method, wherein dust generated from the rotating mechanism is received by a dust receiver provided between the rotating mechanism and the substrate dome.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004187285A JP4002959B2 (en) | 2004-06-25 | 2004-06-25 | Substrate dome rotation mechanism |
CN2005800131933A CN1946873B (en) | 2004-06-25 | 2005-01-24 | Substrate dome rotating mechanism |
PCT/JP2005/000851 WO2006001095A1 (en) | 2004-06-25 | 2005-01-24 | Substrate dome rotating mechanism |
KR1020067022026A KR100855174B1 (en) | 2004-06-25 | 2005-01-24 | Vacuum device comprising substrate dome, assembling and disassembling method thereof, and film-forming method in vacuum device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004187285A JP4002959B2 (en) | 2004-06-25 | 2004-06-25 | Substrate dome rotation mechanism |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2006009082A JP2006009082A (en) | 2006-01-12 |
JP2006009082A5 true JP2006009082A5 (en) | 2007-02-15 |
JP4002959B2 JP4002959B2 (en) | 2007-11-07 |
Family
ID=35776645
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004187285A Expired - Fee Related JP4002959B2 (en) | 2004-06-25 | 2004-06-25 | Substrate dome rotation mechanism |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4002959B2 (en) |
KR (1) | KR100855174B1 (en) |
CN (1) | CN1946873B (en) |
WO (1) | WO2006001095A1 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008138276A (en) * | 2006-12-05 | 2008-06-19 | Tsukishima Kikai Co Ltd | Vacuum film deposition system |
CN104651795B (en) * | 2015-03-10 | 2017-01-11 | 丹阳市鼎新机械设备有限公司 | Turntable for vacuum lens coating machine |
JP6019310B1 (en) * | 2015-04-16 | 2016-11-02 | ナルックス株式会社 | Vapor deposition apparatus and manufacturing method including film forming process by vapor deposition apparatus |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2853267B2 (en) * | 1990-05-25 | 1999-02-03 | 本田技研工業株式会社 | Integrated planetary gear transmission using three sets of planetary gear trains |
JPH0754286Y2 (en) * | 1990-06-27 | 1995-12-18 | 関西日本電気株式会社 | Planetar for vapor deposition |
KR960013625B1 (en) * | 1992-12-22 | 1996-10-10 | 재단법인 한국전자통신연구소 | Vacuum heat deposition device |
JPH0835065A (en) * | 1994-07-22 | 1996-02-06 | Murata Mfg Co Ltd | Vacuum film forming device |
US6294025B1 (en) * | 1996-11-01 | 2001-09-25 | THEVA DüNNSCHICHTTECHNIK GMBH | Device for producing oxidic thin films |
JP4482972B2 (en) * | 1999-09-08 | 2010-06-16 | 株式会社昭和真空 | Optical thin film manufacturing equipment |
-
2004
- 2004-06-25 JP JP2004187285A patent/JP4002959B2/en not_active Expired - Fee Related
-
2005
- 2005-01-24 WO PCT/JP2005/000851 patent/WO2006001095A1/en active Application Filing
- 2005-01-24 KR KR1020067022026A patent/KR100855174B1/en not_active IP Right Cessation
- 2005-01-24 CN CN2005800131933A patent/CN1946873B/en not_active Expired - Fee Related
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