JP2006009082A5

JP2006009082A5 -

Info

Publication number: JP2006009082A5
Application number: JP2004187285A
Authority: JP
Filing date: 2004-06-25
Publication date: 2007-02-15
Anticipated expiration: 2024-06-25

Claims

A vacuum apparatus comprising a vacuum chamber, a base fixed inside the vacuum chamber, a rotation mechanism attached to the base, and a substrate dome mounted with a film formation substrate and rotated horizontally by the rotation mechanism,
A vacuum apparatus characterized in that the rotating mechanism is configured to be detachable from the base toward the bottom of the vacuum chamber.

The vacuum apparatus according to claim 1,
The rotation mechanism is at least
A dome-side gear that is arranged to have the same rotation center as the rotation center of the dome substrate and is rotated horizontally by power from a drive source provided outside the rotation mechanism;
Support means for supporting the dome side gear with respect to the base; and
Comprising holding means for attaching the substrate dome to the dome side gear;
A vacuum apparatus, wherein an outer diameter of the dome side gear is smaller than an inner diameter of the base.

The vacuum apparatus according to claim 2,
A vacuum apparatus, wherein the support means is attached to the lower end of the base.

A vacuum apparatus according to claim 2 or claim 3,
The support means is at least
A rotating shaft fixed to the dome side gear concentrically with the dome side gear, and
It is arranged concentrically with the dome side gear, and comprises a bearing attached to the base,
A vacuum apparatus, wherein the bearing is attached to a lower end of the base.

The vacuum apparatus according to claim 4,
The support means further comprises:
A thrust bearing arranged concentrically with the dome side gear, supported by the bearing and supporting the dome side gear; and
A vacuum apparatus comprising a radial bearing arranged concentrically with the dome side gear and installed on the rotating shaft.

The vacuum apparatus according to claim 1 , wherein
The rotation mechanism is at least
A dome-side gear that is arranged to have the same rotation center as the rotation center of the dome substrate and is rotated horizontally by power from a drive source provided outside the rotation mechanism;
Support means for supporting the dome side gear with respect to the base; and
Comprising holding means for attaching the substrate dome to the dome side gear;
The support means is
A thrust bearing that is concentrically arranged with the dome side gear, is supported by the bearing and supports the dome side gear, and a radial bearing that is concentrically arranged with the dome side gear and is disposed on the rotating shaft. A vacuum apparatus characterized by that.

The vacuum apparatus according to claim 5 or 6,
A vacuum apparatus, wherein the thrust bearing and the radial bearing are arranged on substantially the same plane.

The vacuum apparatus according to claim 5 or 6,
A vacuum apparatus, wherein the thrust bearing is arranged so that a width in a height direction of a surface cut by the thrust bearing overlaps a width in a height direction of a surface cut by the radial bearing.

A vacuum apparatus according to claim 1, further consists of a bearing composed of a plurality of balls and the lubricating oil accommodated in the annular groove of the rotating mechanism,
A vacuum apparatus, wherein a dust receiver covering at least a part of the substrate dome is disposed above the substrate dome.

The vacuum apparatus according to claim 9, wherein
The vacuum apparatus, wherein the dust receiver is a dome heater for heating the film formation substrate.

The vacuum apparatus according to claim 10,
A vacuum apparatus, wherein the deposition substrate heating dome heater is fixed to the base.

A vacuum apparatus according to any one of claims 9 to 11,
The rotating mechanism further includes:
A rotating shaft fixed to the dome side gear concentrically with the dome side gear, and
It is arranged concentrically with the dome side gear, and comprises a bearing attached to the base,
The rotating shaft has a protrusion extending in the outer circumferential direction;
The vacuum apparatus, wherein the dust receiver is a groove provided in the protrusion.

A vacuum apparatus according to any one of claims 3 to 12,
A vacuum apparatus characterized in that a countersunk screw is used in at least one place of the holding means.

A vacuum chamber, a substrate dome on which the deposition substrate is mounted, a rotation mechanism that is disposed immediately above the substrate dome and rotates the substrate dome, and at least the rotation mechanism that is disposed on the top plate of the vacuum chamber. A method for assembling and disassembling a vacuum device comprising a base mounted inside,
An assembling / disassembling method, wherein at least the rotating mechanism is attached to and detached from the bottom surface side of the vacuum chamber.

The assembly and disassembly method according to claim 14,
In a vacuum apparatus further comprising a fixture for fixing the rotating mechanism and the substrate dome,
An assembling / disassembling method, wherein at least one of the fixing tool and the rotating mechanism or between the fixing tool and the substrate dome is fixed with a countersunk screw, and the substrate dome is positioned.

In a vacuum apparatus assembled by exploded method of claim 14, a film deposition method for depositing a deposition material from the deposition source to the deposition substrate while rotating the substrate dome,
A film forming method, wherein dust generated from the rotating mechanism is received by a dust receiver provided between the rotating mechanism and the substrate dome.