KR20070013443A - System for sensing the touch status of display panel - Google Patents

Abstract

A system for sensing a touch status of a display panel is provided to prevent a scratch from being formed on the display panel by generating alarm sounds, when a transferred panel is contacted with a stage. A system for sensing a touch status of a display panel includes a stage(100), a power supply(200), and a contact sensor(300). A substrate, on which an electrode film is formed, is transferred while spaced apart from the stage. A conductive material is formed on at least a portion of the stage. The power supply supplies a voltage to the electrode film of the substrate or the conductive material of the stage. The contact sensor detects a contact state between the electrode film and the conductive material. The stage includes plural air holes for levitating the substrate. The contact sensor includes an alarm generator, which generates an alarm sound, when the substrate is contacted with the stage.

Description

Substrate Contact Detection System {SYSTEM FOR SENSING THE TOUCH STATUS OF DISPLAY PANEL}

1 is a cross-sectional view showing a display substrate transport apparatus according to the prior art.

Figure 2 is a schematic diagram of a substrate contact detection system according to the present invention.

Figure 3a is a plan view showing a stage of the substrate touch sensing system according to the present invention.

3B is a cross-sectional view taken along the line A-A of FIG. 3A.

4 is a flow chart schematically showing an operation procedure by the substrate touch sensing system according to the present invention.

5 and 6 are plan views illustrating stages of a substrate contact sensing system according to a modification of the present invention.

<Code Description of Main Parts of Drawing>

100 ... Stage 110 ... Conductor

200 ... power supply unit 300 ... contact detection unit

310 ... Warning sound generator 320 ... Contact display

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate contact sensing system, and more particularly, to a substrate contact sensing system for quickly determining whether an air-floating substrate being transferred is in contact with a stage top surface.

In general, a flat panel display (FPD) is an interface between an electronic device and a person, and converts electrical information signals output from various electronic devices into optical information signals, so that humans can recognize numbers and letters through vision. Is a device for displaying patterned information such as figures, figures, and images. In particular, its thickness is only a few centimeters and only a few millimeters, so it is easy to design light weight and thin, and has advantages such as high quality and low power consumption. Is released.

Such a display device may have scratches or various stains formed on the substrate in a manufacturing process, and a display substrate inspection apparatus is used for the purpose of reducing scratch rate by inspecting scratches and various stains. For example, In-Line FPD Automatic Optical Inspection captures an image of an object to be inspected using an optical lens and a CCD camera while guiding a TFT LCD substrate, a display substrate such as a PDP, a color filter, etc. It is a device that detects various defects that a user wants to find by applying a processing algorithm. In order to perform a role as an inspection system, such inspection equipment can perform a repair process that accurately locates and detects a detected defect and finds and restores the detected defect.

1 is a view showing a state in which a substrate is supported on the stage of the display substrate transfer device.

As shown in FIG. 1, a stage 20 for floating the center of the substrate 10 is formed at an upper portion of the conveyance table extending in one direction, and at both opposite side ends of the stage 20 of the conveyance table. A conveying means 30 capable of conveying the substrate 10 carried in the stage 20 is formed. The conveying means 30 may be a suction pad adsorbs the substrate 30 to move vertically and horizontally to move the substrate 10, the substrate may be transported by the rolling of the roller, the clapping device It can also be transferred by. In this way, the substrate passes the upper part of the stage in the state in which both opposite side ends are supported. When the size of the substrate is large, the center portion of the substrate is sag due to the weight of the substrate, and thus the flat state cannot be maintained. Therefore, an air gap is formed on the stage so that the substrate can be transferred in an air-floating state. An inspection apparatus (not shown), such as a CCD camera, which is transferred to the upper portion of the conveyance table and inspects whether there is an abnormality of the substrate is installed.

However, when the air gap formed between the substrate and the stage becomes unstable in such a substrate transfer apparatus, the substrate being transferred is in contact with the upper surface of the stage and scratches occur on the substrate and the stage. In other words, when a pneumatic imbalance occurs in the stage for supporting the substrate by pneumatic pressure or an abnormality occurs in one air hole, the supply of air cannot be maintained smoothly. In this case, the substrate and the upper surface of the stage had a problem that the scratch occurs by contact.

In addition, the minute damage that can not be recognized by the operator can occur on the substrate, there was a problem that takes a lot of time and cost in repairing such damage on the substrate (repair).

Disclosure of Invention An object of the present invention is to solve the above-mentioned problems of the prior art, and when a substrate that is being air-fed and transported contacts the upper surface of the stage, the scratch and the position of the substrate may be recognized in a short time. To provide a substrate contact detection system that can minimize the damage caused by.

In order to achieve the above object, the present invention provides a substrate transfer apparatus in which a substrate having an electrode film formed on a surface thereof is transported at a predetermined distance from an upper surface, and a conductor is provided on at least a portion of the upper surface, and an electrode film of the substrate or And a power supply unit for supplying power to the conductor of the stage, and a contact sensing unit for sensing whether the electrode film and the conductor are energized.

In this case, the stage may form a plurality of air holes for supporting the substrate, and the conductor may have a plurality of predetermined patterns spaced apart from each other on the upper surface of the stage.

An embodiment of the present invention will be described in detail with reference to the accompanying drawings.

2 is a view showing a schematic configuration of a substrate contact detection system, Figures 3a and 3b is a plan view and a cross-sectional view of the stage of the substrate transfer apparatus equipped with a substrate contact detection system according to the present invention.

As shown in FIG. 2 to FIG. 3B, the present invention provides a power supply to the stage 100 of the substrate 400 transfer apparatus provided with the conductor 110 on the surface, and the electrode film 410 or the conductor 110. It includes a power supply unit 200 for applying a, and a contact detecting unit 300 for detecting whether the substrate 400 is in contact with the stage 100.

First, a brief description of the substrate transfer apparatus provided with the stage 100 according to the present embodiment, the stage 100 is spaced apart from the lower surface of the substrate 400 and the substrate 100 is conveyed to the stage 100 Camera inspection unit for inspecting the pattern defect and abnormality of the substrate 400 by scanning the substrate transfer means 130 and the substrate 400 for transporting the substrate 400 brought into the stage 100 on the table (Not shown). The substrate transfer means 130 is provided at both opposite side ends of the transfer table to absorb and move the substrate 400 in a suspended state on the stage 100, or to move the substrate 400 at one end of the roller. It may be configured to be moved by rolling, it may be provided with a clamp device for holding and transporting the substrate on both opposite side ends or one side end of the stage (100). That is, the substrate transfer means 130 includes all of the configurations that the substrate 400 can be supported by the stage 100 and transferred.

In the stage 100, a plurality of air holes 120 are formed to be spaced apart by a predetermined interval so that the substrate 400 is floated by a predetermined interval by air, and the air holes 120 supply air to the substrate ( 400) to support a stable transport without sagging of a specific area. That is, the substrate 400 is configured to be transportable without being contacted on the stage 100 by an air gap formed between the substrate 400 and the stage 100. Such a configuration is satisfactory in accordance with one embodiment, provided that the substrate 400 is air slid on the stage 100.

On the other hand, an electrode film 410 is formed on the surface of the substrate 400 to be spaced apart on the stage 100. The electrode film 410 is a transparent electrode film that is widely used, such as a thin film transistor liquid crystal display device, a plasma display substrate 400 display device, an electroluminescence display device, and an indium tin oxide (ITO) film is mainly used. Briefly describing the indium tin oxide (ITO) film, the indium tin oxide (ITO) is an electrode film composed of indium oxide and tin oxide, and there is no oxide layer serving as an insulating layer on the surface of the ITO substrate. It has a very high sensitivity to, and has a transparent characteristic in the visible region, which is useful when both electrical and optical signals are to be detected at the same time. In the present invention, when such an electrode film 410 is formed on one surface of the substrate 400, the substrate must be transferred so that the electrode film faces the stage 100.

On the upper surface of the stage 100, a plurality of conductors 110 serving as a sensor are formed in a predetermined pattern so that the contact of the substrate 400 on which the electrode film 410 is formed is possible. That is, the conductor 110 may be formed to be spaced apart from each other a plurality of strips formed extending in the longitudinal direction on the stage (100).

The contact detecting unit 300 applies a microcurrent to the electrode film 410 or the conductor 110 by the power supply unit 200 to contact the electrode film 410 and the conductor 110 of the substrate. It is configured to determine whether there is a contact between the energized or not and notify them with a beep when a contact occurs, and the user can recognize the contact position of the substrate. That is, the contact detection unit 300 is a warning sound generating unit 310 for notifying the user whether the substrate 400 is in contact with the stage 100 through the buzzer, and the substrate 400 is the stage 100 It includes a contact indicator 320 for informing the contact position.

The warning sound generating unit 310 includes a buzzer capable of generating a warning sound, and when the substrate 400 is energized by the contact of the stage 100, power is applied to the buzzer to generate a warning sound. In this case, the user may recognize whether the substrate 400 is in contact with the stage 100 through the warning sound.

In addition, the contact display unit 320 applies the sensing signal to a control unit (not shown) that controls the transfer of the substrate 400 and the electrode film 410 and the conductor 110 through a contact state of the substrate displayed. It is possible to determine whether or not the contact. That is, when the substrate 400 contacts the stage 100, the controller may store the contact position of the substrate 400 on the stage 100, and then display the contact position of the substrate 400 on the screen. Can be. Through this, the user can easily recognize the presence or absence of the contact of the substrate 400, and check the abnormal state on the stage 100 to solve the problem. By analyzing the stored information, the cause analysis and the solution may be identified to prevent an accident that may occur later. In addition, the contact display 320 may be provided with a plurality of lamps electrically connected to the respective conductors 110 to determine whether the electrode film 410 is in contact with the conductors 110 by turning on the lamps. It may be. For example, the user determines whether to conduct electricity of the conductor 110 corresponding to the contact position of the substrate 400 through the contact display unit 320, thereby the air hole corresponding to the position of the conductor 110. The abnormality of 120) can be quickly identified.

Meanwhile, in the present embodiment, the power supply unit 200 may detect whether the substrate is in contact with the conductor 110 of the stage by applying a microcurrent through the electrode film 410 formed on the substrate 400. Although the configuration has been described, the power supply unit 200 is electrically connected to the conductor 110 to apply a microcurrent to the conductor 110 so as to contact through electricity through the contact of the substrate 400. Of course it can detect whether or not.

Referring to the operation of the present invention made of such a configuration as follows.

4 is a schematic flowchart of an operation procedure by the substrate touch sensing system according to the present invention.

As shown in FIG. 4, when the substrate 400 having the electrode film 410 formed on the surface is loaded into the display substrate transfer apparatus, the substrate 400 may be air-floated on the stage 100 and then moved. In this case, a microcurrent is applied to the electrode film 410 or the conductor 110 by the power supply unit 200.

That is, the substrate 400 on which the electrode film 410 is formed moves on the stage 100. At this time, when an incomplete air supply is generated in the air gap formed on the stage 100, the pneumatic pressure uniformly supporting the substrate 400 is unbalanced, and the substrate 400 is at a position where a relatively weak pneumatic pressure is formed. The substrate is struck to contact the upper surface of the stage 100. When the electrode film 410 of the substrate 400 is in contact with the conductor 110 of the stage 100, current is supplied by mutual contact between the electrode film 410 and the conductor 110. The conductor 110 is electrically connected to the contact detecting unit 300 to apply a detection signal to the contact detecting unit 300.

In this case, the conductor 110 is formed in a predetermined pattern so as to detect whether the contact and the contact position, the substrate 110 according to the band shape or dot shape formed on the stage (100). Each conductor 110 through which 400 is energized by a contact transmits a detection signal to the contact sensing unit 300 electrically connected thereto.

Subsequently, when power is applied to the warning sound generating unit 310 and the contact display unit 320 of the contact detecting unit 300 by the conductor 110 of the stage 100, the warning sound generating unit 310 is configured to perform the The substrate 400 generates a warning sound due to the contact of the stage 100, and the contact indicator 320 selectively displays the contact position of the substrate 400 according to the position where the conductor 110 is disposed. do. In this case, the user may determine whether the substrate 400 contacts the stage 100 through the warning sound, and recognizes the contact position of the substrate 400 on the stage 100 through the contact display 320. The abnormality of the air hole 120 corresponding to the position of the conductor 110 can be quickly determined.

5 and 6 are plan views showing stages in which a conductor is provided according to a modification of the present invention.

As shown in FIG. 5, a plurality of conductors 110 may be formed to be spaced apart from each other in the width direction on the stage 100. As shown in FIG. 6, the conductors 110 may be A plurality of dot shapes having a predetermined pattern may be formed on the upper surface of the stage 100, and each of the conductors 110 may be electrically connected to the contact sensing unit 300 through different routes. In addition, each conductor 110 in the form of a dot may be changed in size to form a space between adjacent conductors 110, thereby increasing the contact sensing accuracy of the substrate for sensing. That is, when the substrate 400 is in contact with the stage 100 to conduct electricity between the electrode film 410 and the conductor 110, power is applied to the contact detecting unit 300 while the warning sound generating unit ( Through the 310 and the contact indicator 320, it is possible to check whether the substrate 400 is in contact with each other and to identify the contact position of the substrate 400.

Here, the shape and pattern of the conductor 110 formed on the stage 100 is not limited by the above-described embodiment and various modifications are possible. For example, a plurality of strip-shaped conductors 110 are formed on the upper surface of the stage 100 to confirm the minute contact positions on the substrate 400 and the stage 100. A dot-shaped conductor 110 may be further formed between the 110 and the strip-shaped conductor and the dot-shaped conductor 110 may be disposed in a mixed state. In addition, the conductor 110 may be formed on the entire surface of the stage 100 so that the user can check only the contact when the electrode film 410 of the substrate 400 contacts the conductor 110. .

While the invention has been shown and described with respect to specific embodiments thereof, it will be appreciated that the invention can be variously modified and modified without departing from the spirit or scope of the invention as provided by the following claims. It will be clear to those skilled in the art that they can easily know.

As described above, according to the present invention, a warning sound is generated when the substrate being transported contacts the upper surface of the stage, so as to quickly identify the position where the substrate is in contact, thereby reducing damage due to scratches that may occur on the substrate and the stage. There is an advantage to this.

In addition, the present invention can detect the abnormal state of the fine substrate that can be found in the post-test step in advance has the advantage of reducing the cost and time accordingly.

In addition, the present invention has the advantage that can accurately grasp the position on the stage when the substrate is in contact with the stage, and can quickly cope with it to achieve an efficient management and supervision of the reliability of the substrate transfer device.

Claims (6)

A stage of the substrate transfer apparatus, in which a substrate having an electrode film formed on the surface thereof is transported at a predetermined distance from the upper surface, and a conductor is provided on at least a portion of the upper surface; A power supply unit for applying power to the electrode film of the substrate or the conductor of the stage; And a contact sensing unit configured to sense whether electricity is supplied between the electrode film and the conductor. The method according to claim 1, The stage is And a plurality of air holes for supporting the substrate. The method according to claim 1 or 2, The conductor A substrate contact sensing system, characterized in that a plurality of predetermined patterns are formed spaced apart from each other on the upper surface of the stage. The method according to claim 1 or 2, The conductor Substrate contact sensing system, characterized in that the plurality of strips formed extending in one direction are spaced apart from each other. The method according to claim 1 or 2, The contact detecting unit And a warning sound generating unit for generating a warning sound so that a user can recognize when the substrate contacts the stage. The method according to claim 1 or 2, The contact detecting unit And a contact indicator for detecting the contact position of the substrate on the stage according to the energization of the substrate and the conductor on the stage.

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