KR20110117479A - Apparatus for conveying substrate - Google Patents

Apparatus for conveying substrate Download PDF

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Publication number
KR20110117479A
KR20110117479A KR1020100036968A KR20100036968A KR20110117479A KR 20110117479 A KR20110117479 A KR 20110117479A KR 1020100036968 A KR1020100036968 A KR 1020100036968A KR 20100036968 A KR20100036968 A KR 20100036968A KR 20110117479 A KR20110117479 A KR 20110117479A
Authority
KR
South Korea
Prior art keywords
substrate
contact
stage
contact plate
power supply
Prior art date
Application number
KR1020100036968A
Other languages
Korean (ko)
Inventor
김현희
Original Assignee
김현희
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김현희 filed Critical 김현희
Priority to KR1020100036968A priority Critical patent/KR20110117479A/en
Publication of KR20110117479A publication Critical patent/KR20110117479A/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/911—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks

Abstract

The present invention relates to a substrate transfer device that is easy to detect a substrate contact that can quickly notify a worker when the substrate moved along the upper surface of the stage is in contact with the upper surface of the stage.
According to an aspect of the present invention, there is provided a substrate transfer apparatus provided with a plurality of air holes to transfer a substrate along an upper surface, wherein the substrate transfer apparatus includes a stage provided with a plurality of contact plates on an upper surface thereof, and a connection between the contact plate and an electric wire. And a power supply unit for supplying power to the contact plate, an alarm unit connected to the power supply unit through a wire to detect whether the contact plate and the substrate are energized, and a contact between the power supply unit and a wire to contact the substrate and the contact plate. And a display unit for displaying the corrected position.
According to the present invention as described above, even when the substrate is in contact with the upper surface of the stage even during the operation of transferring the substrate through the substrate transfer apparatus, the contact state and the contact position of the substrate and the stage can be grasped through the alarm unit and the display unit, thereby contacting the substrate and the stage. It is possible to reduce the damage caused by, and to deal with the accident quickly in case of contact with the substrate and the stage has the advantage of achieving an efficient substrate transfer operation.

Description

Substrate transfer device for easy substrate contact detection {APPARATUS FOR CONVEYING SUBSTRATE}

The present invention relates to a substrate transfer device that is easy to detect a substrate contact, and relates to a substrate transfer device that can easily detect a problem that a substrate that is air-fed and transferred is in contact with an upper surface of a stage.

In general, a flat panel display (FPD) is an interface between an electronic device and a person, and converts electrical information signals output from various electronic devices into optical information signals, so that humans can recognize numbers and letters through vision. Is a device for displaying patterned information such as figures, figures, and images. In particular, its thickness is only a few centimeters and only a few millimeters, so it is easy to design light weight and thin, and has advantages such as high quality and low power consumption. Is released.

Such a display device may have scratches or various stains formed on the substrate in a manufacturing process, and a display substrate inspection apparatus is used for the purpose of reducing scratch rate by inspecting scratches and various stains. For example, In-Line FPD Automatic Optical Inspection captures an image of an object to be inspected using an optical lens and a CCD camera while guiding a TFT LCD substrate, a display substrate such as a PDP, a color filter, etc. It is a device that detects various defects that a user wants to find by applying a processing algorithm. In order to perform a role as an inspection system, such inspection equipment can perform a repair process that accurately locates and detects a detected defect and finds and restores the detected defect.

1 is a schematic view showing a general substrate transfer apparatus.

As shown in FIG. 1, a stage 20 is formed at the upper portion of the table extending in one direction to float the center portion of the substrate 10, and a stage of the conveying table is formed at opposite ends of the stage 20. The transfer means 30 which can transfer the board | substrate 10 carried in 20 is formed. The conveying means 30 may be a suction pad adsorbs the substrate 30 to move vertically and horizontally to move the substrate 10, the substrate may be transported by the rolling of the roller, the clapping device It can also be transferred by. In this way, the substrate passes the upper part of the stage in the state in which both opposite side ends are supported. When the size of the substrate is large, the center portion of the substrate is sag due to the weight of the substrate, and thus the flat state cannot be maintained. Therefore, an air gap is formed on the stage so that the substrate can be transferred in an air-floating state. An inspection apparatus (not shown), such as a CCD camera, which is transferred to the upper portion of the conveyance table and inspects whether there is an abnormality of the substrate is installed.

However, in the conventional substrate transfer apparatus, when the air gap formed between the substrate and the stage becomes unstable, the substrate being transferred is in contact with the upper surface of the stage, and scratches may occur in the substrate and the stage. There was a problem that it could increase a lot of time and money to identify and reorganize the site.

The present invention has been made to solve the above-described problems of the prior art, and when the substrate transported along the upper surface of the stage is in contact with the stage top surface to notify the operator quickly to avoid damage caused by the contact between the substrate and the stage It is to provide a substrate transfer device that can easily detect the substrate contact can be reduced as much as possible.

In order to achieve the above object, the present invention provides a substrate transfer apparatus for transporting a substrate along an upper surface with a plurality of air holes, wherein the substrate transfer apparatus comprises: a stage provided with a plurality of contact plates on the upper surface; A power supply unit connected to a contact plate and an electric wire to apply power to the contact plate, an alarm unit connected to the power supply unit through an electric wire, and detecting whether the contact plate and the substrate are energized, and connected to the power supply unit via a wire And a display unit for displaying the contacted position of the contact plate.

The present invention as described above can obtain the following effects.

According to the present invention, even when the substrate is in contact with the upper surface of the stage even during the operation of transferring the substrate through the substrate transfer apparatus, the contact state and the contact position of the substrate and the stage can be grasped through the alarm unit and the display unit. Damage can be reduced.

In addition, the present invention has the advantage of being able to cope with the accident quickly in the event of contact with the substrate and the stage to achieve an efficient substrate transfer operation.

1 is a schematic view showing a conventional substrate transfer apparatus.
Figure 2 is a schematic diagram showing a substrate transfer device easy to detect the substrate contact according to the present invention.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Before describing the present invention, a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings. First of all, in adding reference numerals to the components of each drawing, it should be noted that the same reference numerals are used as much as possible even if displayed on different drawings. In addition, the terms described below are defined in consideration of the functions of the present invention, which may vary depending on the intention or custom of the user, the operator. Therefore, definitions of these terms should be made based on the contents throughout the specification.

First, the configuration of the present invention according to the illustrated Figure 2 will be described.

As shown in FIG. 2, the present invention provides a substrate transfer apparatus 10 in which a plurality of air holes 11 are provided to transfer the substrate 20 along an upper surface thereof.

A stage 100 having a plurality of contact plates 110 on an upper surface, a power supply unit 200 connected to the contact plate 110 and an electric wire L to apply power to the contact plate 110, and the The alarm unit 300 connected to the power supply unit 200 and the wire L to detect whether the contact plate 110 and the substrate 20 are energized, and the power supply unit 200 and the wire L are connected to each other. And a display unit 400 which displays a position where the substrate 20 is in contact with the contact plate 110.

In detail, the substrate transfer apparatus of the present invention is provided with a stage 100 configured to be spaced apart from the lower surface of the substrate 20 and a substrate provided on the transfer table to transfer the substrate 20 transferred along the upper surface of the stage. It comprises a test means (not shown) for scanning the transfer means 13 and the substrate 20 to be transferred.

The stage 100 is provided with an air hole 11 at regular intervals along the longitudinal direction of the stage 100 so that the substrate 20 is supported on the upper portion and transferred through the substrate transfer means 13 described above. Although not shown in detail in the present invention, the air hole 11 is configured to combine air supply means (not shown) for supplying air to the air hole 11.

That is, the above configuration, that is, through the substrate transfer apparatus of the present invention to reveal that the substrate 20 is supported on the upper surface of the stage 100 in the same manner as the conventional substrate transfer apparatus can be transported.

In addition, the above-described configuration is an embodiment in which the substrate 20 may be transferred along the upper surface of the stage 100 as described above, and the substrate 20 may move along the upper surface of the stage 100. Any configuration can be applied.

In addition, although not shown in detail in the present invention, when the contact plate 110 and the substrate 20 of the stage 100 is in contact with the substrate 20 so as to represent in more detail the contact state of the substrate 20 The transparent electrode film may be formed.

That is, when the contact plate 100 and the substrate 20 are in contact with each other, the contact state between the substrate 20 and the contact plate 100 is more smoothly formed through an electrode film (not shown) formed on the substrate 20. I can figure it out.

In addition, the power supply unit 200 is configured to transmit a current to the contact plate 110 to determine the state that the substrate 20 and the contact plate 110 is energized.

In detail, the power supply unit 200 transmits a signal to the alarm unit 300 and the display unit 400 to be described later when the contact plate 110 and the substrate 20 are in contact with the contact plate 110. It is configured to detect the contact state as well as the contact position of the substrate 20.

The alarm unit 300 detects a minute current applied to the power supply unit 200 when the substrate 20 contacts the upper surface of the stage 100 and generates a warning sound according to the substrate 20. The contact state of the stage 100 is configured to promptly notify the worker.

In addition, the display unit 400 may indicate a state in which the substrate 20 and the stage 110 are in contact with each other separately from the alarm sound of the alarm unit 300 described above. Preferably, the contact is configured such that its location is displayed on the screen.

As described above, the present invention is to enable the operator to quickly detect and smoothly handle the problem that the substrate to be transported along the upper surface of the stage is in contact with the upper surface of the stage.

While the invention has been shown and described with respect to particular embodiments, it is to be understood that various changes and modifications can be made in the art without departing from the spirit or scope of the invention as provided by the following claims. It will be obvious to those of ordinary skill.

Description of the Related Art [0002]
100: stage 200: power supply
300: alarm unit 400: display unit

Claims (1)

In the substrate transfer apparatus 10 is provided with a plurality of air holes 11 to transfer the substrate 20 along the upper surface,
The substrate transfer device 10
The stage 100 is provided with a plurality of contact plates 110 on the upper surface,
A power supply unit 200 connected to the contact plate 110 and an electric wire L to apply power to the contact plate 110;
An alarm unit 300 connected to the power supply unit 200 and a wire L to detect whether the contact plate 110 and the substrate 20 are energized;
The substrate easy to detect the substrate contact, characterized in that it comprises a display unit 400 is connected to the power supply unit 200 and the wire (L) to indicate the contact position of the substrate 20 and the contact plate 110. Conveying device.
KR1020100036968A 2010-04-21 2010-04-21 Apparatus for conveying substrate KR20110117479A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020100036968A KR20110117479A (en) 2010-04-21 2010-04-21 Apparatus for conveying substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020100036968A KR20110117479A (en) 2010-04-21 2010-04-21 Apparatus for conveying substrate

Publications (1)

Publication Number Publication Date
KR20110117479A true KR20110117479A (en) 2011-10-27

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020100036968A KR20110117479A (en) 2010-04-21 2010-04-21 Apparatus for conveying substrate

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017116178A1 (en) * 2015-12-31 2017-07-06 한국생산기술연구원 Precision tool tip contact module and contact method using same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017116178A1 (en) * 2015-12-31 2017-07-06 한국생산기술연구원 Precision tool tip contact module and contact method using same

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E601 Decision to refuse application