KR20070004791A - Electrocast tube producing method, electrocast tube, and thin wire material for production of electrocast tubes - Google Patents

Abstract

The invention provides a method of producing an electrocast tube having a fine inner diameter, and an electrocast tube. It also provides a thin wire material for production of an electrocast tube having a fine inner diameter. An electrocast tube producing method comprising the steps of forming an elecrtodeposit around a thin wire material (30) by electrocasting, and removing the thin wire material (30) from the electrodeposit, wherein the thin wire material (30) is removed either by heating the electrodeposit for thermal expansion or by cooling the thin wire material (30) for contraction, so as to form a clearance between the electrodeposit and the thin wire material (30), followed by gripping and pulling, or sucking the thin wire material (30) or physically pushing it away or blowing gas or liquid to push it away. ® KIPO & WIPO 2007

Description

Manufacturing method of electric pole and electric wire for producing electric pole, electric pipe {ELECTROCAST TUBE PRODUCING METHOD, ELECTROCAST TUBE, AND THIN WIRE MATERIAL FOR PRODUCTION OF ELECTROCAST TUBES}

The present invention relates to a method for producing an electroforming (hereinafter referred to as "jeonju") pipe and a thin wire for producing an electric pole pipe, an electric pole pipe, and more particularly, a method for producing an electric pole pipe having a fine inner diameter and It is about the electric pole. In addition, the present invention relates to a thin wire for producing a main pipe having a fine inner diameter.

Conventionally, when manufacturing an integrated circuit such as an LSI, a semiconductor pattern is completed as designed, and an inspection is made to see whether electrical conduction is good. This test | inspection is made by making it contact each electrode in which the pin of the contact probe was formed using the apparatus provided with many contact probes (it is called a "probe apparatus" in this specification). The contact probe has a structure in which a spring is provided inside an ultrafine tube having a required length so that the pin can be pushed back and forth into the tube.

However, the recent evolution of semiconductor manufacturing technology is surprising, and the degree of integration tends to be higher and higher. As a result, even in a probe device for inspecting the electrical conduction of electrodes, the number of contact probes is increased (multiplyed), the diameter of the wire is made thinner (thinned), and the distance between the contact probes is also increased to cope with the latest integrated circuits. Narrower narrowing is required. It is believed that current tubes for contact probes are the world's smallest with an outer diameter of 110 µm and an inner diameter of 88 µm (see Non-Patent Document 1, for example).

However, as described above, as semiconductor manufacturing technology is evolving more and more, there is a need for further miniaturization of contact probes.

In addition, the necessity of a tube having a fine inner diameter is increasing in the fields of biotechnology and medical fields other than the semiconductor industry.

That is, the development of a tube having such a small inner diameter is strongly requested throughout the industry.

The present inventors have been doing research on electric poles, and have succeeded in manufacturing a pipe having a small diameter by electric poles before. In this case, the electric main pipe has a circular cross section and an inner diameter of 126 μm (see Patent Document 1, for example). Therefore, the present inventors have obtained the idea that by using the pole technology, a tube having a fine inner diameter (hollow part) for a contact probe can also be made.

Further studies have been conducted to attach a film of metal of at least 5 μm to the outer surface of the fine wire using a thin wire having a diameter of 10 μm to 85 μm. In this way, it has been found that a tube having a fine inner diameter (hollow part) can be made if the thin wire can be removed from the metal.

However, removing the thin wire material from the electrodeposited (precipitated) metal was not easy because the electrodeposited metal was in close contact with the outer surface of the thin wire material.

<Patent Document 1>

Japanese Patent Publication No. 2002-48947

<Non Patent Literature 1>

Nikkei Mechanical ON LINE, April 2001, Nikkei BP Company, Internet <URL: http://dm.nikkeibp.co.jp/free/nmc/kiji/h559/t559g.html>

The object of the present invention,

(1) The present invention provides a method for producing a pole tube with a fine inner diameter, a pole tube, and a fine wire for producing the pole tube.

(2) The present invention provides a method for manufacturing a main pipe that makes it easy to remove a thin wire by allowing a jig or a tool to be hung on the electrodeposition or a dirty when removing the thin wire from the electrodeposition or the urine.

(3) A conductive layer such as gold plating is formed on the inner surface to provide a method for producing an electric pole tube, which has better electrical conductivity than when only an electrodeposited material or a sediment is used, and a wire rod for producing the electric pole tube.

(4) To provide at least two conductive layers of different materials on the inner surface to provide good adhesion between the conductive layers and electrodepositions or contaminants, and to provide electrical wires and thin wires for producing the electrical poles. Is in.

(5) It is to provide a method for producing a pole tube with a plurality of hollow portions and a pole pole.

(6) A plurality of hollow portions are provided, and a method for producing an electric pole tube and an electric pole tube capable of independently conducting electric conduction for each portion forming the periphery of each hollow portion is provided.

(7) In removing the thin wire, it is difficult to apply a tensile force to the conductive layer provided on the inner surface, and to easily separate the conductive layer and the base wire, so that the adhesion between the conductive layer and the electrodeposition material or the sediment is hardly impaired. It is to provide a manufacturing method of an electric pole.

Means of the present invention, which have been devised to attain the above object, are as follows.

In the first aspect of the present invention, a method for forming an electrodeposited tube or concave substance around a thin wire rod by electroforming, and removing the fine wire rod from the electrodeposited substance or concave substance, produces a pole tube.

By heating and thermally depositing the electrodeposited or contaminated material, or by cooling and shrinking the thin wire, a gap is formed between the electrodeposited or contaminated material and the thin wire and the fine wire is pulled, attracted, or physically It is a manufacturing method of the electric main pipe characterized by removing the thinner using any one of the method of pushing out, or by blowing out a gas or a liquid.

In the second aspect of the invention, as a method of forming electrodeposited material or urine around the thin wire by electroforming, and removing the fine wire from the electrodeposited or urine, to produce a main pole tube,

By immersing or imparting the liquid in the wire, the wire is made to slip the area where the wire and the electrodeposited or contaminated material are in contact with each other, and thus the wire is pulled, drawn, physically pushed, or gas Or it removes by any method of ejecting and pushing a liquid, The manufacturing method of the electric main pipe characterized by the above-mentioned.

In the third aspect of the present invention, as a method of forming electrodeposited material or urine around a thin wire by electroforming, and removing the fine wire from the electrodeposited or urine, to produce a main pole tube,

The thin wire is pulled from one or both sides to be deformed to have a small cross-sectional area, and a gap is formed between the thin wire and the electrodeposition or sewage, and the fine wire is pulled, drawn, physically pushed out, or It is a manufacturing method of the electric main pipe characterized by removing by using any method of ejecting and pushing a liquid.

In the fourth aspect of the invention, the amount of electrodeposited material or concave substance on the end side formed in the thin wire member is increased. The method for manufacturing the electroplated tube according to the first, second, or third aspect of the invention is characterized by the above-mentioned.

In the fifth aspect of the invention, the amount of deformation of the transverse strain when the thin wire is pulled outward is 5% or more of the cross-sectional area. The manufacturing method of the main pipe according to the third aspect of the invention.

In the sixth invention, as a method of producing electrodeposited tubes by forming electrodeposited material or urine around the thin wire by electroforming, and removing the fine wire from the electrodeposited or urine,

A thin wire is a manufacturing method of the electric main pipe characterized by melt | dissolving and removing by heat or a solvent.

In the seventh aspect of the invention, the thin wire member is removed so that the conductive layer remains on the inner surface of the main pipe by using the thin wire member having the conductive layer formed on the outer surface thereof. It is a manufacturing method of the electric main pipe which concerns on 5 or 6th invention.

In the eighth aspect of the invention, the electrodeposited material or the contaminant and the outer conductive layer of the thin wire are brought into close contact with each other by using a thin wire having at least two layers of conductive layers having different materials on the outer surface side, and the inner conductive layer A fine wire rod is removed so as to remain on the inner surface of the main pipe. The method of manufacturing the main pipe according to the first, second, third, fourth, fifth, or sixth invention.

In the ninth invention, the internal shape of the hollow portion formed by removing the thin wire material from the electrodeposition material or the contaminant has a cross-sectional circular shape or a cross-sectional polygonal shape, wherein the first, second, third, and third It is a manufacturing method of the electric main pipe which concerns on 4th, 5th, 6th, 7th or 8th invention.

In the tenth aspect of the invention, a plurality of hollow portions formed by removing the thin wire member are provided, wherein the first, second, third, fourth, fifth, sixth, seventh, eighth, or the fifth is provided. It is a manufacturing method of the electroforming pipe which concerns on 9 invention.

According to the eleventh aspect of the present invention, an electrical conduction is independently performed for each portion forming the periphery of each hollow portion by interposing a partition wall having a conductive layer formed on the outer surface of the insulator between the hollow portions. It is a manufacturing method of the electric main pipe which concerns on 10th invention.

In the twelfth aspect of the present invention, a pole tube is formed by forming an electrodeposited object or a false substance around a thin wire member by a pole pole, and removing the fine wire member from the electrodeposited substance or a false substance.

The inner shape of the hollow portion formed by removing the fine wire material from the electrodeposited material or the sediment has a cross-sectional circular shape. The inner diameter of the hollow portion is 10 µm or more and 85 µm or less, and the hollow portion has a cross-sectional polygonal shape. The negative inscribed circle has a diameter of 10 µm or more and 85 µm or less.

In the thirteenth invention, the thickness is 5 µm or more and 50 µm or less, and the main tube according to the twelfth invention is characterized by the above-mentioned.

In the fourteenth aspect of the present invention, there is provided a conductive layer having a material different from that of an electrodeposition substance or a contaminant, on the inner surface thereof.

In the fifteenth invention, a conductive layer made of a material different from the electrodeposited material or the contaminant is formed on the inner surface, and between the electrodeposited material or the contaminated material and the conductive layer, a material of a different material from the conductive layer is provided. An electroconductive tube according to the twelfth or thirteenth invention, wherein a conductive layer is formed.

According to a sixteenth aspect of the invention, there are a plurality of hollow portions formed by removing the thin wire, and the main pipe according to the twelfth, thirteenth, fourteenth, or fifteenth inventions is characterized by the above-mentioned.

In the seventeenth aspect of the present invention, the conductive member is configured so that electric conduction can be independently performed for each portion forming the periphery of each hollow portion through a partition wall having a conductive layer formed on the outer surface of the insulator between the hollow portions. This is the electric main pipe according to the sixteenth invention.

In the eighteenth invention, the conductive layer formed on the outer surface of the partition body is configured to form a part of the hollow portion, which is the electric main pipe according to the seventeenth invention.

In the nineteenth aspect of the invention, the partition wall is the main pipe according to the seventeenth or eighteenth aspects, wherein the thickness of the portion provided between the adjacent hollow portions is 5 µm or more and 50 µm or less.

In the twentieth aspect of the present invention, as a thin wire for forming an electrodeposited object or a false substance by electroforming around it, and removing it from the electrodeposited substance or the dangerous substance, to manufacture a main pole tube,

The outer shape has a cross-sectional circular shape and the outer diameter is 10 µm or more and 85 µm or less, and the outer shape has a cross-sectional polygonal shape that the inscribed circle has a diameter of 10 µm or more and 85 µm or less, and is transversely strained when it is pulled outward. It is a fine wire material for manufacturing a main pipe, characterized in that the amount of deformation is 5% or more of the cross-sectional area.

In a twenty-first aspect of the present invention, there is provided a conductive layer having a material different from that of an electrodeposited material or a contaminant on its outer surface.

In the twenty-second aspect of the present invention, a conductive layer having a material different from that of an electrodeposition material or a constrained material is formed on the outer surface, and between the fine wire base member and the conductive layer, a material different from the conductive layer is provided. A conductive wire is formed, and it is a fine wire material for manufacturing the main pipe according to the twentieth invention.

In a twenty-third aspect of the present invention, there is a portion where the conductive layer is not formed on both ends, and is a thin wire material for producing the electroforming pipe according to the twentieth, twenty-first, or twenty-second aspect of the invention.

In the twenty-fourth aspect of the present invention, the outer shape is formed in a cross-sectional circular shape or a polygonal cross-sectional shape, and is a thin wire material for manufacturing the main pipe according to the twentieth, twenty-first, or twenty-second aspect of the present invention.

As the thin wire, for example, a metal wire may be formed of a conductive material as a whole, or a conductive layer (for example, metal or carbon such as plating) may be used around the conductive material. Moreover, the thing formed by providing the conductive layer (for example, metal, such as electroless plating, carbon, etc.) around this thin wire material using the thin wire material of insulating materials, such as a synthetic resin wire rod, can also be used.

Furthermore, in the case where a conductor of a separate member is formed in the vicinity of the thin wire and the metal is electrodeposited (precipitated), the whole is made of an insulating material in addition to the above thin wire and also made of a synthetic resin wire or the like (conductive May be used.

Although the material of the site | part to which metal is electrodeposited by electroplating has electroconductivity is not specifically limited, It is preferable to use the thing with favorable electrical conductivity in order to make electrode electrodeposit easy. For example, iron, stainless steel, copper, gold, silver, crude oil, nickel, aluminum, carbon and the like can be used.

As the thin wire material and the insulating material constituting the insulator of the partition wall, an insulator (insulator) in which electricity hardly flows, and a semiconductor, which is a conductor or a nonconductor, may be used due to temperature or the like. Examples of the insulating material include thermosetting resins, thermoplastic resins, engineer plastics, and chemical fibers (synthetic fibers, semisynthetic fibers, regenerated fibers, inorganic fibers) and the like. For example, phenol resin, urea resin, melamine resin, diallyl phthalate resin, unsaturated polyester resin, silicone resin, epoxy resin, polyethylene, crosslinked polyethylene, chlorinated polyethylene, ethylene / vinyl acetate copolymer, polypropylene, polyisobutylene , Polyvinyl chloride, polyvinylidene chloride, polyvinyl alcohol, polyvinyl acetal, acrylic resin, polyvinyl acetate, polyacrylonitrile, modacryl, polystyrene, styrene / acrylonitrile copolymer, acrylonitrile / butadiene / styrene Terpolymer, acetate, triacetate, fluororesin, polytetrafluoroethylene, polybutylene terephthalate, polyarylate, polyacetal, polycarbonate, polyphenylene sulfide, polysulfone, wholly aromatic polyimide, polyamideimide , Polyetherimide, polyetheretherketone, polybenzimidazole, poly It can be given hotel, polyethylene terephthalate, polyamide, nylon, aramid, polyurethane, elastane, polyalkylene p-benzoate, benzoate, ethylene polyfluoroalkyl, Pro-mix, rayon, cupra, glass fibers, and the like.

Furthermore, the insulating material may use so-called filament yarns which do not twist or unthread each other, or may use spun yarns.

The term "cross-sectional circular shape", which indicates the inner shape of the electric pipe or the external shape of the thin wire rod, does not strictly mean that the cross-sectional shape is a circular shape, but is used as a concept that includes a substantially circular shape or an elliptic shape. Doing.

The term "cross-sectional polygonal shape" represented by the inner shape of the main pipe or the external shape of the thin wire rod does not mean that the cross-sectional shape is polygonal in shape, and is substantially polygonal in shape, including, for example, rounded corners. We use as concept including thing to be. In addition, although it does not specifically limit, A polygonal shape specifically includes a substantially triangular shape, a substantially square shape (including a rectangle, a square, a ridge, a parallelogram), an approximately pentagonal shape, an approximately hexagonal shape, and the like.

As a solvent which melts and removes a thin wire material, an alkaline solution, an acidic solution, etc. are mentioned, for example.

Although it does not specifically limit as a use of a main pipe, For example, the pipe (casing which accommodates a spring) for a contact probe is mentioned.

The part that forms the periphery of the hollow part may be an electrodeposition material or a substance that is formed by a pole, and has a material different from that of the electrodeposition or substance, and is formed on the inner surface of the hollow portion. It may be included).

According to the present invention, it is possible to remove the fine wire from the electrodeposited material or the urine formed by the pole. The thin wire may be formed by: (1) heating and thermally expanding the electrodeposited or contaminated material, or cooling and shrinking the thin wire, thereby forming a gap between the electrodeposited or contaminated material and the thin wire, or (2) dipping or imparting a liquid. This makes it easy to slip the area where the thin wire material is in contact with the electrodeposited material or the false substance, or (3) pulls the thin wire finely from one or both sides so that the cross-sectional area becomes smaller, thereby leaving a gap between the fine wire material and the electrodeposited material or the urine. It can be removed using either method of forming, pulling, aspirating, or physically extruding, or by ejecting a gas or liquid. It can also be removed by fusing with heat or solvent.

In the removal of the thin wire, using such a method, for example, an electrodeposition material formed to have a thickness of 5 μm or more and 50 μm or less on the outer surface of the fine wire using a fine wire having a diameter of 10 μm to 85 μm, or The thin wire can also be removed from the dirty matter. Therefore, by using this thin wire removal method, it is possible to manufacture an electric main pipe having a fine inner diameter which can be used, for example, as a pipe for contact probes.

According to the method of manufacturing the electric pole by increasing the amount of electrodeposited material or constitution of the end side formed in the thin wire, for example, a jig or a tool or the like is removed when the fine wire is removed or pushed out of the electrodeposited or contaminated material. It can be hung on the end surface of the part which increased the amount of electrodeposition or a substance, and the like. Therefore, in this case, since the thin wire material can be removed in a state where the electrodeposition material or the contaminant is fixed, the thin wire material is easy to be removed.

According to the method of manufacturing the main pipe tube in which the amount of deformation of the transverse strain when the thin wire is pulled outward is increased to 5% or more of the cross-sectional area, the thin wire is removed between the thin wire and the electrodeposition material or the concave material. Since a sufficient gap can be formed in, it is highly likely that the thin wire can be removed from the electrodeposited or uncleaned material without any problems. If the amount of deformation of the transverse strain is only less than 5% of the cross-sectional area, the gap is not sufficient, which may cause a problem in removing the thin wire.

According to the manufacturing method of the electric pole tube which removes a thin wire material so that a conductive layer may remain in the inner surface of an electric pole tube using the thin wire material in which the conductive layer was formed in the outer surface, the electric pole tube in which gold plating etc. were formed in the inner surface can be manufactured. Such a main pipe can be used as a component suitable for conducting electricity in this case, because the electrical conductivity can be made better than that of only the electrodeposited material or the main body by the material of the conductive layer formed on the inner surface, for example.

On the other hand, the electrodeposited pipe in which the conductive layer of a material different from the electrodeposited material or the sewn material is formed on the inner surface, and the thin wire material in which the conductive layer of the material different from the electrodeposited material or the sewn material is formed on the inner surface is similarly electrodeposited or It is possible to form a main pipe having better electrical conductivity than when it is only a sediment.

According to the manufacturing method of the electric pole pipe using the thin wire material which has at least 2 layers of different conductive layers in the outer surface side, for example, the outer conductive layer consists of copper, and the inner conductive layer which contact | connects copper consists of gold, It is possible to cause nickel to be formed as an electrodeposited substance or a substance by electroforming. In this case, since nickel has better adhesiveness with copper than gold and copper has good adhesiveness with gold, it is possible to form a main pipe with good adhesiveness.

On the other hand, an electro-conducting pipe having a conductive layer of a different material from the electrodeposited material or the contaminant is formed on the inner surface, and a conductive layer of a different material from the conductive layer is formed between the electrodeposited or contaminated material and the conductive layer. The thin wire material having a conductive layer of a material different from the electrodeposited material or the concave material is formed on the outer surface, and a conductive layer of a material different from the conductive layer is formed between the thin wire base member and the conductive layer. It is possible to form an electroforming tube having good adhesion between the complex or the constitution and the conductive layer.

What provided with the some hollow part formed by removing a thin wire material can be used, for example by replacing it with the component manufactured by lining up a plurality of pipe | tubes in which only one hollow part is formed. According to this electric pole, individual pipes can be arranged side by side, eliminating the trouble of installing them. In addition, since the space | interval between hollow parts is also fixed by electrodeposition or sewage, it does not twist.

Between the hollow portions, an electrically conductive layer is formed on the outer surface of the insulator via a partition wall formed so as to independently conduct electrical conduction to each portion forming the periphery of each hollow portion, thereby independently conducting electricity to each hollow portion. Is possible.

In the thin wire having a portion where the conductive layer is not formed at both ends, the tensile force is less likely to be directly applied to the conductive layer by pulling the portion where the conductive layer is not formed outward. The wire rod is easy to be separated, and the adhesion between the conductive layer and the electrodeposition material or the sediment is also hardly impaired.

BRIEF DESCRIPTION OF THE DRAWINGS It is sectional explanatory drawing which shows an example of the pole apparatus for manufacturing the pole tube which concerns on this invention.

It is explanatory drawing which shows the state in which the large diameter part was formed in the one end side of a electrodeposition object.

3 is a cross-sectional explanatory diagram showing a state in which electrodepositions are formed around a thin wire having a substantially rectangular cross section.

It is sectional explanatory drawing which shows the state in which the electrodeposition was formed around the fine wire material in which the conductive layer was formed in the outer peripheral surface.

It is sectional explanatory drawing which shows the state in which the electrodeposition material was formed around the fine wire material in which two conductive layers differing in material were provided in the outer peripheral surface.

It is explanatory drawing which shows the state in which the electrodeposition was formed around the fine wire material in which the part in which the conductive layer was not provided in the both ends side was formed.

7 is a cross-sectional explanatory view showing another example of a pole apparatus for producing a pole tube according to the present invention.

FIG. 8 is an exploded perspective explanatory diagram showing a manufacturing jig used in the electroforming apparatus shown in FIG. 7.

FIG. 9 is an enlarged cross-sectional explanatory view showing a main pipe manufactured by using the manufacturing jig shown in FIG. 8.

Embodiments of the present invention will be described in more detail based on the drawings.

BRIEF DESCRIPTION OF THE DRAWINGS It is sectional explanatory drawing which shows an example of the pole apparatus for manufacturing the pole tube which concerns on this invention.

First, the electric pole apparatus which manufactures electric pole tube is demonstrated.

The electroforming apparatus 100 is equipped with the electroforming tank 10 and the outer tub 11 which accommodates this electroforming tank 10 inside. The upper part of the electroforming tank 10 and the outer tank 11 is open, and the electrolytic solution (electroforming liquid) 20 is always supplied in the electroforming tank 10 at the time of operation. In this way, the electrolyte solution 20 overflows from the upper part of the electroforming tank 10 and flows into the outer tank 11. In this embodiment, the electrolytic solution 20 is used by adding, for example, a brightening agent or an anti-beating agent to the nickel sulfamate solution.

The electrolytic solution 20 introduced into the outer tank 11 overflowing from the electroforming tank 10 is filtered by a filtration device (not shown), and is again supplied into the electroforming tank 10. That is, the electrolyte solution 20 continuously circulates between the electric casting tank 10 and the outer tank 11 at the time of operation. In addition, a well-known means can be used as a supply means which supplies the electrolyte solution 20 to the electroforming tank 10 (not shown).

In the present embodiment, the electrolyte solution 20 in the part overflowing from the upper part of the electroforming tank 10 is called the overflow part 12 for convenience. In the electric pole apparatus 100, electric pole is made in this overflow part 12. FIG. The order of the poles will be described later.

The horizontal adjustment apparatus 13 is provided in the lower part of the electro-casting 10. The horizontal adjusting device 13 keeps the electro-casting body 10 substantially horizontal, whereby an overflow portion 12 which is substantially horizontal is formed in the entire upper part of the electro-casting body 10, and the overflow portion 12 The electrolyte solution 20 can be distributed uniformly in each place.

The code | symbol 4 has shown the holding jig which hold | maintains the thin wire material 30 used as a mold member (base material) for electric poles. The holding jig 4 is provided with the horizontal member 40 which has a required length, and a pair of suspension members 41 and 41 provided in the both ends of this horizontal member 40. As shown in FIG. The holding jig 4 is provided so that the suspension members 41 and 41 may be located in the side of the electro-casting 10.

The rod-shaped wire rod fixing members 42, 43 having the required lengths are respectively provided in the suspension members 41, 41 in a substantially horizontal direction. The wire rod fixing members 42 and 43 are rotatably provided to the suspending members 41 and 41. The electrode 44 is provided in the edge part of the electro-casting 10 side of one wire rod fixing member 42. Moreover, the tension device 45 and the electrode 44 which attract the thin wire 30 are provided in the edge part of the other cast iron 10 side of the other wire rod fixing member 43. As shown in FIG. One end and the other end of the fine wire 30 are respectively fixed to the wire fixing members 42 and 43, and are provided in a tensioned state by the tension device 45.

Between the suspension members 41 and 41, the rotating shaft 46 is installed rotatably. Reference numeral 47 denotes a drive motor for driving the rotation shaft 46. The rotating shaft 46 penetrates the suspension members 41 and 41, and the cogwheels 480 and 481 are fixed by the both ends side.

The wire rod fixing members 42 and 43 are provided through the suspending members 41 and 41. A gear 482 is fixed to the wire rod fixing member 42 that penetrates the suspension member 41. Similarly, a gear 483 is fixed to the wire rod fixing member 43 that penetrates the suspension member 41. In this way, the cog wheel 480 and the cog wheel 482, the cog wheel 481 and the cog wheel 483 is meshed with each other. Therefore, by operating the drive motor 47 and rotating the cog wheels 480 and 481 together with the rotary shaft 46, the cog wheels 482 and 483 and the wire rod fixing members 42 and 43 rotate, The thin wire 30 can be rotated. The rotation speed of the thin wire 30 is not particularly limited. For example, it is controlled to 15 r.p.m or less.

Electroconductive electrode contact members 49 and 49 are provided at the outer ends of the wire fixing members 42 and 43, respectively. The electrode contact members 49 and 49 are in contact with the electrode portions 14 and 14 provided between the electro-casting 10 and the outer tub 11 when the holding jig 4 is disposed above the electro-casting 10. do. The electrode parts 14 and 14 are connected with the negative pole of a power supply. Therefore, the electrode contact members 49 and 49 are in the state of being electrically connected with the negative pole of a power supply in the state which contacted the electrode parts 14 and 14. FIG.

Reference numeral 15 denotes an electrode portion electrically connected to the positive electrode of the power supply. The electrode part 15 is provided in the bottom part of the electroforming casting 10. As the electrode portion 15, for example, a metal pallet (for example, a nickel pallet) for storing a pole can be used in a mesh-like or perforated case made of titanium steel.

The manufacturing method of the electric pole pipe using the electric pole apparatus 100 is demonstrated.

First, one end and the other end of the thin wire 30 are fixed to the wire fixing members 42 and 43, respectively, so that the thin wire 30 is tensioned between the wire fixing members 42 and 43. At this time, the electrolyte solution 20 is supplied to the electroforming tank 10, and overflows from the upper portion of the electroforming tank 10 (by forming the overflow portion 12) to flow into the outer vessel 11. In addition, the overflow part 12 is adjusted so that the electroforming solution 10 may be substantially horizontal by the horizontal adjustment apparatus 13, and the electrolyte solution 20 may be distributed uniformly in each place.

In the present embodiment, the thin wire 30 is made of stainless steel having a substantially circular cross-section having a diameter of 50 μm, and has a deformation amount of transverse strain when a tensile force of approximately 1500 N / mm ² is pulled outward. What used to be 10% of the cross-sectional area was used.

Subsequently, the drive motor 47 is operated to rotate the cog wheels 480 and 481 together with the rotation shaft 46. Thereby, the gears 482 and 483 and the wire rod fixing members 42 and 43 rotate, and the fine wire 30 rotates.

The electrode contact members 49 and 49 are brought into contact with the electrode portions 14 and 14, and the suspending members 41 and 41 are positioned on the side of the electro-casting 10, and the fine wire 30 is overflowed. ) Can be immersed in. When the electrode contact members 49 and 49 are in contact with the electrode portions 14 and 14, the electrode portion 15 is electrically connected to the positive pole of the power source, and thus the fine wire material 30 is electrically connected to the negative pole of the power source. It becomes connected state and starts electric pole. In this way, metal (nickel) is electrodeposited (precipitated) around the thin wire member 30. The metal electrodeposited around the thin wire member 30 is electrodeposited (or contaminated). )to be.

The fine wire 30 is immersed in the overflow part 12 for a required time, and is poled until the outer diameter of the electrodeposited metal becomes approximately 70 μm over the entire length. When the target outer diameter is reached, the thin wire 30 is pulled out of the overflow portion 12 to stop the pole. The electrodeposition amount (precipitation amount) of the metal, that is, the thickness of the metal electrodeposited on the thin wire material can be controlled in advance by the current, the voltage, the pole time, or the like.

In the electroforming apparatus 100, since the overflow part 12 is adjusted so that the electrolyte solution 20 may be distributed uniformly in each place, and the fine wire 30 is being rotated, the current density in the electrolyte solution 20 may be reduced. Even when a non-uniform site | part arises, a change hardly arises in the electrodeposition state (precipitation state) of the metal in the thin wire material 30. Therefore, metal is electrodeposited so that the thickness of the thin wire material 30 may have a substantially uniform thickness over the entire length. Accordingly, the electric pole pipe can be manufactured with high precision only by removing the fine wire 30.

In addition, the electroforming apparatus 100 is electroforming by the overflow part 12, and the electrolyte solution 20 which overflowed flows back to the electroforming tank 10, and is circulating. In other words, in performing the electroforming, the overflow portion 12 may be formed. Therefore, even a small amount of the electrolytic solution 20 can be electroplated.

In the electroforming apparatus 100, since the wire rod fixing members 42 and 43 which fix the fine wire 30 are arrange | positioned outside the overflow part 12, the wire rod fixing members 42 and 43 are electrolytic solution 20 Do not soak in Therefore, the wire fixing members 42 and 43 do not react with the electrolyte solution 20 to generate impurities. In addition, the electrolyte solution 20 is not attached to the wire fixing members 42, 43, etc., and does not come out, and the electrolyte solution 20 does not unnecessarily decrease from the electrolytic casting 10.

Then, the fine wire material 30 electrodeposited with metal is separated from the wire fixing members 42 and 43, and the fine wire material 30 is removed from the electrodeposition material (necessary substance) finally formed.

Since the electrodeposited material is in close contact with the outer surface of the thin wire material 30, the thin wire material 30 can be removed by simply pulling the fine wire material 30, pulling it in, sucking it out, or physically pushing it out, or ejecting the gas or liquid by pushing it out. Is difficult. Therefore, the thin wire 30 is removed using any of the methods (1) to (4) shown below.

(1) The electrodeposited material is heated and thermally expanded, or the thin wire material 30 is cooled and shrunk to form a gap between the electrodeposited material and the fine wire material 30 to pull and pull the fine wire material 30, or Removal by either aspiration, physical extrusion or by blowing off a gas or liquid.

(2) It is immersed in the liquid which melt | dissolved the washing | cleaning agent, or this liquid is given, and the site | part which the thin wire material 30 and electrodeposited material contact is made to slide easily. Then, the fine wire 30 is removed by using any of the methods of pulling, pulling, aspirating, physically pushing, or ejecting and pushing out a gas or a liquid.

(3) The thin wire 30 is pulled from one or both sides to be deformed so as to have a small cross sectional area. Then, a gap is formed between the electrodeposited material and the fine wire 30, and the fine wire 30 is pulled, drawn, or physically pushed, or a gas or a liquid is pushed out by using any method. To remove it.

(4) The fine wire 30 is melted by heat, or melted by a solvent such as an alkaline solution or an acidic solution and removed.

By removing the fine wire 30 in this way, the electric main pipe which has a fine inner diameter (hollow part) is produced by the remaining electrodeposition material. This electric main pipe can be used as a pipe for contact probes.

In the present embodiment, the thin wire is removed from the electrodeposited material having a substantially uniform thickness over the entire length, but the present invention is not limited thereto. For example, as illustrated in FIG. 2, a large diameter portion 500 having a large outer diameter is formed at one end of the electrodeposition 50 to attract, suck, physically push out the fine wire 30, or Alternatively, the liquid may be removed by ejecting and pushing out the liquid. By forming the large diameter part 500 in this way, when pulling out or pushing out, a jig or a tool can be hung on the end surface of the large diameter part 500. FIG. Therefore, in this case, since the thin wire member 30 can be removed while the electrodeposition is fixed, the thin wire member is easily removed. On the other hand, the work which increases the electrodeposition amount of a part in this way may be changed to another pole apparatus.

In addition, in the said Example, the fine wire 30 used what has a substantially circular cross section of 50 micrometers in diameter. However, the thickness and cross-sectional shape of the thin wire are not limited to this. For example, as shown in Fig. 3, a polygonal fine wire 31 having a cross-sectional shape of square or the like (including a substantially polygonal shape in which each portion is rounded) may be used. Reference numeral 51 is an electrodeposition product.

Said thin wire is fine if the outer diameter is 10 micrometers or more and 85 micrometers or less when the cross-sectional shape has a substantially circular shape, and if the diameter of an inscribed circle is 10 micrometers or more and 85 micrometers or less when the external shape has a cross-sectional polygonal shape. It can be seen from the experiments of the present inventors that the present invention can be used in the production of an electric pipe having an inner diameter.

In addition, the thin wire material 30 shown in the present Example used a deformation amount of the transverse strain to be 10% of the cross-sectional area when a tensile force of approximately 1500 N / mm ² applied in the outward direction was applied. However, the amount of deformation of the transverse strain of the thin wire rod is not particularly limited. According to the inventors' experiment, the deformation amount should be at least 5% of the cross-sectional area.

In this embodiment, the metal was electrodeposited to a thickness of approximately 10 μm around the thin wire 30 having a substantially circular cross-section having a diameter of 50 μm, and formed to have an outer diameter of approximately 70 μm as a whole, but the thickness of the metal to be electrodeposited Is not particularly limited. According to the inventors' experiment, it can be seen that the electrode tube can be formed even after the thin wire material 30 is removed if it can be electrodeposited around the thin wire material 30 to have a thickness of at least approximately 5 μm.

In the present embodiment, the thin wire 30 is made of stainless steel so that the metal is directly electrodeposited around the thin wire 30. However, the thin wire material usable in the electroforming apparatus 100 is not particularly limited as long as it has electrical conductivity. For example, the core part is made of a metal, a synthetic resin, or the like, and the conductive layer {[plating (metal layer (film)]) is formed on the outer surface thereof. Or carbon, etc. The electrodeposited material 52 may be formed on the fine wire 32 in which the gold plating 321 is formed on the outer circumferential surface thereof, for example, as shown in FIG. ), It is possible to leave the gold plating 321 on the inner circumferential surface of the electrodeposited material 52, and to remove only the base wire 320. In this case, the electric main pipe in which the gold plating 321 was applied to the inner circumferential surface is formed. Can be formed.

Since the electroplated tube with gold plating 321 on the inner circumferential surface can have better electrical conductivity than when the gold plating 321 is not formed, it can be used as a component suitable for conducting electricity, such as a tube for contact probes. Can be.

Further, for example, the thin wire member may be formed on the outer circumferential side of the conductive layer by the above-described plating or the like and on which another conductive layer having a different material is formed. For example, when the electrode electrodeposited by electroplating is nickel and the electrodeposition object 53 was formed around the fine wire 33 in which the copper plating 332 was formed in the outer peripheral side of the gold plating 331 (refer FIG. 5) Since nickel has better adhesiveness with copper than gold and copper has good adhesiveness with gold, only the base wire 330 can be removed to form a main pipe in which nickel, copper and gold are bonded in a good adhesive state. The gold plating 331 is exposed on the inner circumferential surface of the electric main pipe.

As described above, when the thin wire member provided with the conductive layer (for example, gold plating) on the outer circumferential portion is deformed to have a small cross-sectional area and removed from the precipitated metal, as shown in FIG. 6, both ends of the thin wire member 34 are electrically conductive. It is preferable to provide portions (masking portions 341 and 341) which do not form a layer (for example, gold plating 340) to attract portions which do not form this conductive layer. By doing in this way, it becomes difficult to apply a tensile force directly to a conductive layer, and it is easy to isolate | separate a conductive layer and a base wire, and also the adhesiveness of a conductive layer and electrodeposition 54 is hard to be impaired.

Fig. 7 is a cross-sectional explanatory view showing another example of a pole apparatus for manufacturing a pole tube according to the present invention. Fig. 8 is an exploded perspective explanatory view showing a manufacturing jig used in the pole apparatus shown in Fig. 7. It is an enlarged cross-sectional explanatory drawing which shows the electric main pipe manufactured using the manufacturing jig shown in FIG.

The electroforming apparatus 101 is of the type which installs a thin wire material in the tensioned state in the vertical direction (vertical direction in FIG. 7).

The electroforming apparatus 101 is equipped with the electroforming 60. The electro-casting body 60 is formed in the box shape which has the rough part 61 inside, and opens the upper side. The upper edge of the electro-casting 60 is formed with a cover loading portion 62 that extends outwards over the entire length, and the cover loading portion 62 has a cover 64 to cover the opening of the electro-casting 60. It is covered.

A locking portion 63 is provided above the jaw portion 61. The locking portion 63 is provided with an anode portion 66 that is electrically connected to the positive electrode of the power supply. A receptor 660 is attached to the anode portion 66, and a large number of nickel spheres are filled in the receptor 660. Reference numeral 65 denotes a negative electrode portion electrically connected to the negative electrode of the power source. In the cathode portion 65, a cathode ray 650 for connecting with a production jig 8 to be described later is provided in a row.

In the present embodiment, the nickel spheres are filled in the receptor 660, but the filling in the receptor 660 is not limited to this, and is selected according to the type of metal to be deposited. For example, nickel, iron, copper, cobalt or the like can be used. Moreover, a shape and a structure are not specifically limited, either.

The jig fixing frame 7 is housed inside the jaw portion 61. The jig | tool 8 for manufacturing overlaps with the jig | tool fixing frame 7 in 5 steps, and is provided.

The electrolytic solution 21 is filled in the rough part 61 of the electro-casting 60. The electrolyte solution 21 is placed so that the positive electrode portion 66 and the jig fixing frame 7 are completely locked. In the present embodiment, the electrolyte 21 is composed of sulfamic acid nickel as the main component.

See FIG. 8. The manufacturing jig 8 can install the several wire fine wire 35, and manufactures the main pipe which has a some hollow part. In addition, since the thin wire 35 shown in the present Example used the same thing as what was used by the pole apparatus 100, description is abbreviate | omitted.

The manufacturing jig 8 is equipped with the plate-shaped jig main body 80 which has a required length. In the substantially center portion of the jig main body 80, a penetrating opening 81 is formed. In FIG. 8, on both ends (short side) of the jig main body 80 used as the upper and lower ends, a plurality of fixing members 82 and 83 for fixing the thin wire member 35 are provided in the width direction with a required interval therebetween (specific volume). 8 parts) is installed. In the present embodiment, the fixing members 82 and 83 use a screw type, but are not particularly limited thereto.

Further, a plurality of guide pins 84 (specifically, eight parts) are provided in the inner portion of the fixing members 82 and 83 more narrowly than the intervals in which the fixing members 82 and 83 are provided. It is.

Moreover, in the vicinity of the opening part 81 which becomes an inner part rather than the guide pin 84, the positioning members 85 and 85 for setting the installation position of the thin wire material 35 are provided. The positioning members 85 and 85 are strip-shaped plates having a length approximately equal to the width of the jig main body 80, and have a V-shaped groove (detachment in the drawing) for fitting the thin wire 35 in the center portion. Covered with a preventing member 850 (to be described later)]. These grooves are formed over the full width (up and down direction in FIG. 8) of the positioning member 85, and are continuously formed in plurality (specifically 8 parts) in the longitudinal direction (left and right direction in FIG. 8). have.

On the upper surface side of each positioning member 85, a separation prevention member 850 having a width substantially the same as that of the positioning member 85 but formed of a short plate is provided, and the fine wire member 35 fitted into the groove is provided. Do not let go of the groove. In this embodiment, the groove of the positioning member 85 is formed such that a gap of 10 μm is formed between the adjacent thin wire members 35, but the present invention is not limited thereto, and the spacing of the thin wire members 35 is appropriate. Can be set to

The thin wire 35 of a plurality of lines (specifically, eight lines) is attached to the manufacturing jig 8. Each thin wire 35 is attached in the following manner.

First, the tension spring 86 is attached to the other end (lower side in FIG. 8) of the fine wire 35. As shown in FIG. Then, one end (upper side in FIG. 8) of the thin wire member 35 is fixed by the fixing member 82. The thin wire member 35 fixed by the fixing member 82 passes through the adjacent guide pins 84 and 84 and is fitted into a groove formed in each of the positioning members 85, thereby positioning the members 85 and 85. It is hypothesized between.

The other end side of the fine wire material 35 fitted in the groove passes between the adjacent guide pins 84 and 84 similarly to the upper end side, and the tension spring 86 is fixed by the fixing member 83. The thin wire member 35 is attached to the portion corresponding to the opening portion 81 of the thin wire member 35 in a tensioned state by the tensile force of the tension spring 86.

On the other hand, in the manufacturing jig 8, although the fine wire 35 is attached with a clearance of 10 micrometers between adjacent ones, in FIG. 8, the clearance is exaggerated for the sake of easy understanding.

Reference numeral 87 denotes a holding member for attaching the partition member 88. The holding member 87 is formed in a rectangular plate-like body having a size substantially the same as the shape of the opening of the opening 81.

The partition member 88 has a length substantially equal to the length of the holding member 87 in the vertical direction in FIG. 8, and has a thin strip shape. In detail, the partition member 88 includes an insulating foundation member 880 having a thickness of approximately 8 µm, and a conductive layer (eg, a plating layer having a thickness of approximately 2 to 3 µm) on the front and back surfaces of the insulating foundation member 880 ( Film) 881 is formed. The material for forming the conductive layer 881 only needs to have conductivity, and is not particularly limited. However, it is preferable that adhesiveness (adhesiveness) and electrodeposition material by electroforming have favorable properties.

The partition member 88 is arranged in plurality (specifically, seven) at a predetermined interval so that the conductive layers 881 face each other, and the entire length in the vertical direction in FIG. 8 is substantially at the center of the surface of the holding member 87. It is extended so that it is attached to and detachable. In the present embodiment, the partition member 88 is attached to the jig main body 80 by forming the gap of approximately 10 μm as described above, so that the partition member 88 is similarly attached at intervals of approximately 10 μm. It is becoming.

The holding member 87 provided with the partition member 88 inserts the partition member 88 from the side (arrow direction) between the thin wires 35 provided with the opening 81 terminated. The partition member 88 is clamped by the tension of the wire rod 35 so as to be attached to the jig main body 80. That is, the thin wire 35 and the partition member 88 (in detail, the conductive layer 881) are in contact with each other.

The manufacturing jig 8 attaches the holding member 87 to the jig main body 80 in the same manner as described above, and connects the cathode ray 650 so that electricity flows through the fine wire material 35 (shown in FIG. 8). After that, it is accommodated in the jig fixing frame 7 of the jaw portion 61 and immersed in the electrolyte solution 21 to be electroplated. In addition, although the detailed description is abbreviate | omitted, the masking process is given to the site | parts other than the opening part 81 in the manufacturing jig 8 so that electrolyte solution 21 may not be wetted.

According to the electroplating apparatus 101, an electrodeposition object is formed in the circumference | surroundings of the fine wire 35 and the surface of the conductive layer 881 by energizing. And the thin wire material 35 and the partition member 88 stop the electric pole by the electrodeposition thing 55 in the place where the required degree was critical. The electrodeposition amount (precipitation amount) of the electrodeposited material 55 can be controlled in advance by the current, the voltage, the pole time, or the like.

The manufacturing jig 8 which stopped electric pole is taken out from electrolyte solution 21, and is disassemble | disassembled into the jig main body 80 and the holding member 87 again. At this time, the partition member 88 is separated from the holding member 87 because the partition member 88 is fixed between the thin wires 35 by the deposited electrodeposited material 55. Thereafter, the thin wire material 35 and the partition member 88 which are integrated by the electrodeposition 55 are removed from the jig main body 80.

Then, the electrodeposited object 55 and the partition member 88 are machined to have a shape (see FIG. 9), and the fine wire 35 is removed from the electrodeposited object 55. In addition, since the removal of the fine wire 35 is performed by the method similar to what was manufactured by the said pole apparatus 100, description is abbreviate | omitted.

In this way, an electric pole tube having a plurality of hollow portions (specifically, eight) is formed.

Since the partition member 88 is interposed between the hollow portions formed by removing the thin wire 35, the electric main pipe can independently conduct electricity to each portion forming the periphery of each hollow portion.

On the other hand, also in the electroforming apparatus 101, the fine wire material which made the core part from metal, synthetic resin, etc., and formed the conductive layer (plating (metal layer (film)), carbon etc.) in the outer surface can be used. In addition, the cross-sectional shape etc. of a thin wire material are not specifically limited similarly to the thin wire material shown by the pole apparatus 101. FIG.

In this embodiment, although the partition member 88 was provided and moved between the thin wire materials 35, it is not limited only to this, For example, it can also be rolled in the state of only a thin wire material without providing a partition member. .

The electroplating pipe can also be manufactured using electroforming apparatuses of other forms than the electroplating apparatuses 100 and 101 shown in the said Example. Moreover, the kind of manufacturing jig used by a pole apparatus is not specifically limited, either.

The numerical value which shows the specific dimension (size, length) shown in this Example is described in order to make understanding easy, and there is no intention in particular to limit a dimension. For example, the diameter of the thin wire material, the thickness of the electrodeposited material, the amount of deformation and tensile force of the thin wire material, the thickness of the conductive layer (film) (plating, etc.), the thickness of the partition member, and the like. These dimensions can be set arbitrarily within the range which set the range.

In the present embodiment, the outer surface of the thin wire rod was electrodeposited to cover the thin wire rod, but the present invention is not limited thereto. For example, an electrically conductive conductor (metal, etc.) is provided near the thin wire rod. Thus, the electrode tube can be made by electrodepositing a metal by electroforming on this conductor so that the thin wire material is also covered by the electrode which is electroplated.

In the above embodiment, an electrolyte solution containing nickel sulfamate as a main component is used, but the electrolyte solution is not limited to this, and is selected according to the type of metal to be deposited. Examples of the metal to be electrodeposited (precipitated) include metals such as nickel or nickel alloys, iron or iron alloys, copper or copper alloys, cobalt or cobalt alloys, tungsten alloys, and fine particle dispersion metals. As the electrolyte solution for depositing the above metals, for example, nickel chloride, nickel sulfate, ferrous sulfamate, ferrous boride, copper pyrolate, copper sulfate, copper boride, copper silicate, copper titanium fluoride, alkanolsulfonic acid A liquid containing copper, cobalt sulfate, sodium tungstate, or the like as a main component, or a liquid obtained by dispersing fine powders such as silicon carbide, tungsten carbide, boron carbide, zirconium oxide, silicon nitride, alumina, and diamond in these solutions is used.

Moreover, the stirring means for stirring electrolyte solution can also be provided in a precast tank. As the stirring means, for example, one by blowing air, suctioning an electrolyte solution and injecting it into the electrolytic cell again, a rotatable stirring blade (propeller), ultrasonic waves, vibration, or the like can be used. However, the stirring means is not limited to these.

The terms and expressions used herein are for the purpose of description and should not be regarded as limiting, and are not intended to exclude the terms and expressions equivalent to the features described herein and parts thereof. It goes without saying that various deformation states are possible within the scope of the technical idea of the present invention.

This invention is equipped with the said structure, and has the following effects.

(a) According to the present invention, the thin wire can be removed from the electrodeposition material or the main body formed by the pole. The thin wire may be formed by: (1) thermally expanding the electrodeposited or contaminated material, or cooling and shrinking the thin wire, thereby forming a gap between the electrodeposited or contaminated material and the thin wire, or (2) dipping in the liquid or dipping the liquid. By making it easy to slip the area where the thin wire material and electrodeposited material or urine are in contact with each other, or (3) pull the thin wire material from one or both sides to deform so that the cross-sectional area becomes smaller, It may be removed using any of the methods of forming a gap, pulling it out, aspiring it, physically pushing it out, or blowing out a gas or liquid. It can also be removed by fusing with heat or solvent.

In the removal of the thin wire, using such a method, for example, an electrodeposition material formed to have a thickness of 5 μm or more and 50 μm or less on the outer surface of the fine wire using a fine wire having a diameter of 10 μm to 85 μm, or The thin wire can also be removed from the dirty matter. Therefore, by using this thin wire removal method, it is possible to manufacture an electric main pipe having a fine inner diameter that can be used, for example, as a pipe for a contact probe.

(b) According to the method of manufacturing the electric pole by increasing the amount of electrodeposited material or sewage on the end side formed in the thin wire, for example, a jig when the thin wire is removed from the electrodeposited or seized and removed by a jig. Or a tool or the like can be hung on the end face of the portion where the amount of electrodeposition or contaminant is increased. Therefore, in this case, since the thin wire can be removed while the electrodeposition material or the contaminant is fixed, it is easy to remove the thin wire.

(c) According to the manufacturing method of the main pipe, in which the amount of deformation of the transverse strain when the thin wire is extended outward is 5% or more of the cross-sectional area, the thin wire is removed between the thin wire and the electrodeposition material or the sewage. Since a sufficient gap can be formed, there is a high possibility that the thin wire can be removed from the electrodeposited or sediment without any trouble. If the amount of deformation of the transverse strain is only less than 5% of the cross-sectional area, the gap is not sufficient, which may cause a problem in removing the thinner.

(d) According to the manufacturing method of the electric pole tube which removes a thin wire material so that a conductive layer may remain in the inner surface of a pole tube using the thin wire material in which the conductive layer was formed in the outer surface, the electric pole tube in which the gold plating etc. were formed in the inner surface can be manufactured. Since the electrical conductivity can be made better than when only the electrodeposited material or the urine is formed by the material of the conductive layer formed on the inner surface, such a main pipe can be used as a suitable component for conducting electricity in this case.

On the other hand, a thin wire material having a conductive layer of a different material from the electrodeposited material or the sediment formed on the inner surface of the electric main pipe in which a conductive layer of a different material from the electrodeposited material or the sewn material is formed on the inner surface is similarly applied to the electrodeposited material or the electrodeposited material. It is possible to form a good electric pole than when only sew water.

(e) According to the manufacturing method of the electric pole pipe using the thin wire material which has at least 2 or more layers of different conductive layers in the outer surface side, for example, the outer conductive layer consists of copper, and the inner conductive layer which contacts copper is gold. It is possible to configure nickel to form nickel as an electrodeposited substance or a substance by electroforming. In this case, since nickel has better adhesiveness with copper than gold and copper has good adhesiveness with gold, it is possible to form a main pipe with good adhesiveness.

On the other hand, a conductive layer made of a different material from the electrodeposited material or the contaminant is formed on the inner surface, and a conductive layer made of a different material from the conductive layer is formed between the electrodeposited material or the contaminated material and the conductive layer. In the thin wire material, the conductive layer of a material different from the electrodeposited material or the contaminant is formed on the main pipe or the outer surface, and a conductive layer of a material different from the conductive layer is formed between the fine wire base member and the conductive layer. Similarly, an electroforming tube with good adhesion between the electrodeposited material or the sediment and the conductive layer can be formed.

(f) The thing provided with two or more hollow parts formed by removing a thin wire material can be used, for example, by replacing with the components which were manufactured by lining up a plurality of pipe | tubes in which only one hollow part is formed. According to this electric pole, individual pipes can be arranged side by side, eliminating the trouble of installing them. In addition, since the space | interval between hollow parts is also fixed by electrodeposition or sewage, it does not twist.

(g) Between the hollow portions, it is possible to independently conduct electrical conduction to each of the portions forming the periphery of each hollow portion through a partition formed by providing a conductive layer on the outer surface of the insulator. Electric conduction is possible independently every time.

(h) In the thin wire having a portion where the conductive layer is not formed at both ends, the tensile force is less likely to be directly applied to the conductive layer by pulling the portion where the conductive layer is not formed outward. It is easy to separate a layer and a base wire, and also the adhesiveness of a conductive layer and electrodeposition thing or a contaminant is hard to be impaired.

Claims (24)

As a method for forming electrodeposited material or sewage around the thin wire by electroforming, and removing the fine wire from the electrodeposited or seized, The thin wire is formed by heating the electrodeposited material or the sewage by thermal expansion, or by cooling and shrinking the thin wire, thereby forming a gap between the electrodeposited material or the sewage and the fine wire, and pulling the fine wire or pulling out the suction. Or by physically extruding or by ejecting and extinguishing gas or liquid. As a method for forming electrodeposited material or sewage around the thin wire by electroforming, and removing the fine wire from the electrodeposited or seized, By immersing or imparting the liquid in the wire, the wire is made to slip the area where the wire and the electrodeposited or contaminated material are in contact with each other, and thus the wire is pulled, drawn, physically pushed, or gas Or it removes using any method of ejecting and pushing out a liquid. As a method for forming electrodeposited material or sewage around the thin wire by electroforming, and removing the fine wire from the electrodeposited or seized, The thin wire is pulled from one or both sides to be deformed to have a small cross-sectional area, and a gap is formed between the thin wire and the electrodeposited or enclosed material to pull, suck, physically push the thin wire, A method for producing a main pipe, characterized in that the removal by using any method of blowing out the gas or liquid. The manufacturing method of the electric main pipe as described in any one of Claims 1-3 which increases the quantity of the electrodeposition material of the end side formed in a fine wire material, or a main body. The method for manufacturing a main pipe according to claim 3, wherein the amount of deformation of the transverse strain when the thin wire is pulled outward is 5% or more of the cross-sectional area. As a method for forming electrodeposited material or sewage around the thin wire by electroforming, and removing the fine wire from the electrodeposited or seized, The thin wire is melted and removed by heat or a solvent. The method for manufacturing a main pipe according to any one of claims 1 to 6, wherein the thin wire is removed so that the conductive layer remains on the inner surface of the electric pipe using a thin wire having a conductive layer formed on its outer surface. The conductive layer according to any one of claims 1 to 6, wherein at least two layers of conductive layers having different materials are formed on the outer surface side of the electrodeposited material or concave material and the outer conductive layer of the thin wire member. The fine wire material is removed so that the inner conductive layer remains on the inner surface of the electric main pipe. The internal shape of the hollow part formed by removing a thin wire material from electrodeposition material or a contaminated substance has a cross-sectional circular shape or a cross-sectional polygonal shape, The manufacturing method of the electric main pipe in any one of Claims 1-8 characterized by the above-mentioned. . The manufacturing method of the electric main pipe of any one of Claims 1-9 provided with the some hollow part formed by removing a fine wire material. 12. The method according to claim 10, wherein a partition wall formed by providing a conductive layer on an outer surface of the insulator is provided between the hollow portions so that electric conduction can be independently performed for each portion forming the periphery of each hollow portion. Manufacturing method of electric pipe to be made. As a pole tube manufactured by forming electrodeposition or sewage around a thin wire by electroforming, and removing a fine wire from an electrodeposition or sewage, The inner shape of the hollow portion formed by removing the fine wire material from the electrodeposited material or the sediment has a cross-sectional circular shape. The inner diameter of the hollow portion is 10 µm or more and 85 µm or less, and the hollow portion has a cross-sectional polygonal shape. The diameter of the negative inscribed circle is 10 µm or more and 85 µm or less. The electric main pipe according to claim 12, wherein the thickness is 5 µm or more and 50 µm or less. The electroplated pipe according to claim 12 or 13, wherein a conductive layer made of a material different from that of the electrodeposited material or the urine is formed on the inner surface. The conductive layer according to claim 12 or 13, wherein a conductive layer having a material different from that of the electrodeposited material or the substance is formed on the inner surface, and between the electrodeposited substance or the substance and the conductive layer, An electric main pipe characterized in that a conductive layer of different material is formed. The electric main pipe according to any one of claims 12 to 15, wherein there are a plurality of hollow portions formed by removing the thin wire. 17. The structure according to claim 16, wherein the conductive portion is formed between the hollow portions via a partition wall formed by providing a conductive layer on the outer surface of the insulator so as to independently conduct electrical conduction to each portion forming the periphery of the hollow portion. The electric pole characterized by the above. 18. The electric main pipe according to claim 17, wherein the conductive layer formed on the outer surface of the partition body is configured to form part of the hollow portion. 19. The main pipe according to claim 17 or 18, wherein the partition wall has a thickness of 5 µm or more and 50 µm or less between the adjacent hollow portions. As a thin wire for forming electrodeposited or sewable by electroforming around and removing from electrodeposited or seized, to produce electroplated tubes, The outer shape has a cross-sectional circular shape and the outer diameter is 10 µm or more and 85 µm or less, and the outer shape has a cross-sectional polygonal shape that the inscribed circle has a diameter of 10 µm or more and 85 µm or less, and is transversely strained when it is pulled outward. Fine wire for producing a main pipe, characterized in that the deformation amount of more than 5% of the cross-sectional area. 21. The thin wire for producing a main pipe according to claim 20, wherein a conductive layer having a material different from that of the electrodeposition material or the urine material is formed on the outer surface. 21. The conductive layer according to claim 20, wherein a conductive layer of a material different from that of the electrodeposited material or the contaminant is formed on the outer surface, and a conductive material of a material different from that of the conductive layer is formed between the fine wire base member and the conductive layer. A thin wire for producing a pole tube, characterized in that the layer is formed. 23. The thin wire for manufacturing an electric pole tube according to any one of claims 20 to 22, wherein there are portions in which both conductive layers are not formed. The thin wire according to any one of claims 20 to 23, wherein the outer shape is formed in a cross-sectional circular shape or a cross-sectional polygonal shape.

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