TW202413731A - Method of manufacturing electroformed tube and electroforming apparatus - Google Patents

Abstract

A method of manufacturing electroformed tube of the present invention includes a step of moving at least one of an anode and at least one wire acting as a cathode around the other of the anode and the at least one wire.

Description

Electrocast tube manufacturing method and electrocasting device

The present invention relates to a method for manufacturing an electrocast tube and an electrocasting device.

In recent years, various methods for manufacturing electrocast tubes have been developed. Electrocast tubes are used, for example, in probes for inspecting objects such as integrated circuits (ICs). For example, in the method described in Patent Document 1, a stainless steel wire that acts as a cathode and an anode are infiltrated into electrocasting liquid, and the wire is rotated around the axis of the wire.

[Prior Art Literature]

[Patent Literature]

Patent document 1: Japanese Patent Publication No. 2004-115838

There is a case where an electrocast layer is formed on a wire without moving the wire and the anode and making the same portion of the outer circumference of the wire face the anode. However, in this case, the thickness of the electrocast layer of the portion of the wire facing the anode is thicker than the thickness of the electrocast layer of the other portions of the wire. In addition, for example, as described in Patent Document 1, there is a disclosure of rotating the wire around the axis of the wire. However, in this case, it may also be difficult to form the electrocast layer uniformly around the wire.

One example of the purpose of the present invention is to uniformly form an electrocasting layer around a wire. Other purposes of the present invention will become clearer from the description in this specification.

One aspect of the present invention is a method for manufacturing an electrocast tube, which includes the step of causing at least one of the anode and at least one wire that acts as a cathode to move around the anode and the other of the at least one wire (that is, to move around the anode and the other of the at least one wire).

One aspect of the present invention is an electrocasting device having:

Anode; and

The first driving unit is used to move at least one of the aforementioned anode and at least one wire rod acting as a cathode around the other of the aforementioned anode and at least one wire rod.

According to the above aspects of the present invention, the electrocasting layer can be uniformly formed around the wire.

1,1A:Electrocasting equipment

10:Electrocasting tank

12: External groove

20: Electrocasting fluid

32: Cathode wiring

34:Cathode Motor

40,40’: Yang pole

42: Anode wiring

44,44A: Anode motor

45aA: Rotation axis

45bA: Upper gear

45cA: Lower gear

46: Fixed support body

48: Rotating support body

50: Power supply

100,100’: Wire

200:Electrocasting layer

L,L’:Virtual line

P: piece

Figure 1 is a diagram for explaining a manufacturing method of an electrocast tube of an implementation type.

Figure 2 is a diagram for explaining the manufacturing method of the electrocast tube of the embodiment.

FIG3 is a diagram for explaining a manufacturing method of an electrocast tube of an implementation type.

FIG. 4 is a diagram for explaining a manufacturing method of an electrocast tube of an implementation type.

FIG5 is a diagram showing an electrocasting device of an implementation type.

FIG6 is a diagram showing the electrocasting device of variant example 1.

Figure 7 is a diagram for explaining the manufacturing method of the electrocast tube of variant 2.

The following drawings are used to illustrate the embodiments and variations of the present invention. In all drawings, the same components are given the same symbols, and the description is appropriately omitted.

Figures 1 to 4 are diagrams for explaining the manufacturing method of the electrocast tube of the embodiment. The electrocast tube of the embodiment can be used on a probe for inspecting an inspection object such as an IC. The manufacturing method of the electrocast tube of the embodiment is referred to as the method of the embodiment below.

The X direction is defined to illustrate the direction. In the embodiment, the X direction shows the axial direction of the wire 100 described later.

The implementation method is explained with reference to Figures 1 to 4.

First, as shown in FIG1 , prepare the wire 100. The wire 100 is electrically conductive. The wire 100 is made of, for example, stainless steel. However, the wire 100 may also be made of a material different from stainless steel. For example, the wire 100 may also be made of iron, copper, gold, silver, brass, nickel, aluminum, carbon, plastic, resin, etc. The wire 100 extends approximately parallel to the X direction. The cross section of the wire 100 perpendicular to the X direction is formed into a roughly circular shape. The diameter of the wire 100 perpendicular to the X direction is, for example, greater than 10 μm and less than 500 μm. When viewed from the X direction, the outer peripheral surface of the wire 100 may also be covered with metal.

Next, as shown in FIG. 2 , an electrocasting layer 200 is formed around the outer peripheral surface of the wire 100 when viewed from the X direction, except for the two ends of the wire 100 in the X direction. The electrocasting layer 200 is composed of metals such as nickel, gold, copper, palladium, rhodium, platinum, silver, or alloys thereof. The electrocasting layer 200 is formed using the electrocasting device 1 described later. The thickness of the electrocasting layer 200 perpendicular to the X direction is, for example, 5 μm or more and 100 μm or less.

Next, as shown in FIG. 3 , the wire 100 is removed from the electrocasting layer 200. For example, the wire 100 can be removed from the electrocasting layer 200 by pulling the wire 100 out from the electrocasting layer 200 in the X direction. However, the method of removing the wire 100 from the electrocasting layer 200 is not limited to this example.

Next, as shown in FIG. 4 , the electrocast layer 200 is cut into a plurality of pieces P. Each of the cut pieces P becomes an electrocast tube. In this way, an electrocast tube of an implementation type is manufactured.

FIG5 is a diagram showing an electrocasting device 1 of an implementation form.

Herein, the X direction, Y direction, and Z direction are defined to explain the directions. The Z direction is a direction parallel to the vertical direction. The X direction is one of the horizontal directions perpendicular to the Z direction. The Y direction is one of the horizontal directions perpendicular to the Z direction and the X direction. In the implementation form, the X direction is set as the left-right direction, the Y direction is set as the front-back direction, and the Z direction is set as the up-down direction for explanation. In each figure, the directions indicated by the arrows in the X direction and the Z direction are defined as the right direction and the up direction, respectively. In each figure, the white circle marked with an X showing the Y direction is from the back of the paper to the front, indicating that it is the front direction.

The electrocasting device 1 of embodiment 1 comprises: an electrocasting tank 10, an outer tank 12, a cathode wiring 32, a pair of cathode motors 34, an anode 40, an anode wiring 42, a pair of anode motors 44, a pair of fixed supports 46, a pair of rotating supports 48 and a power source 50.

The electrocasting tank 10 is accommodated in the inner part of the outer tank 12. The upper ends of the electrocasting tank 10 and the upper ends of the outer tank 12 are open upward. When the electrocasting device 1 is in operation, the electrocasting liquid 20 is constantly supplied to the electrocasting tank 10. Thereby, the electrocasting liquid 20 overflows from the upper part of the electrocasting tank 10. The electrocasting liquid 20 overflowing from the electrocasting tank 10 flows into the outer tank 12. The electrocasting liquid 20 overflowing from the electrocasting tank 10 and flowing into the outer tank 12 is supplied to the electrocasting tank 10 again by a filtering device not shown. In this way, when the electrocasting device 1 is in operation, the electrocasting liquid 20 circulates in the electrocasting tank 10, the outer tank 12 and the filtering device.

The type of electrocasting liquid 20 is determined according to predetermined conditions such as the material of the electrocasting layer 200 formed on the outer peripheral surface of the wire 100. The electrocasting liquid 20 includes, for example, nickel sulfate liquid or nickel sulfamate liquid, and optionally contains a glossing agent and a pinhole (bit) preventing agent.

The wire 100 is immersed in the electrocasting liquid 20 in the electrocasting tank 10. In the embodiment, the length direction of the wire 100 is roughly parallel to the X direction. Both ends of the wire 100 in the X direction are electrically connected to the power source 50 via the cathode wiring 32. Thereby, the wire 100 acts as a cathode.

In FIG. 5 , a dotted line L is shown in phantom for the sake of illustration. The dotted line L passes through the center of the wire 100 approximately parallel to the X direction. That is, the dotted line L shows the axial direction of the wire 100.

When viewed from the X direction, the wire 100 can rotate around the virtual line L by a pair of cathode motors 34. Specifically, a pair of cathode motors 34 are connected to both ends of the wire 100 in the X direction. Therefore, by driving a pair of cathode motors 34, the wire 100 can rotate around the virtual line L when viewed from the X direction.

The anode 40 is immersed in the electrocasting liquid 20 in the electrocasting tank 10. In the embodiment, the length direction of the anode 40 is roughly parallel to the X direction. Both ends of the anode 40 in the X direction are electrically connected to the power source 50 via the anode wiring 42.

When viewed from the X direction, the anode 40 can rotate around the wire 100. Specifically, a pair of fixed supports 46 are arranged on both sides of the two ends of the anode 40 in the X direction. Each of the pair of anode motors 44 is mounted on each of the pair of fixed supports 46. The pair of anode motors 44 are roughly parallel to the X direction and are arranged side by side with the two ends of the wire 100 in the X direction. That is, the pair of anode motors 44 are arranged so that the virtual line L passes through the pair of anode motors 44. One end of each of the pair of rotating supports 48 is connected to each of the pair of anode motors 44. The other end of each of the pair of rotating supports 48 is connected to each of the two ends of the anode 40 in the X direction. When viewed from the X direction, the other end of each of the pair of rotating supports 48 is offset in a direction perpendicular to the X direction relative to the one end of each of the pair of rotating supports 48. A pair of anode motors 44 rotate the other end of each of the pair of rotating supports 48 around the one end of each of the pair of rotating supports 48 when viewed from the X direction. Thereby, when viewed from the X direction, the anode 40 rotates along a roughly circular track with the wire 100 as the center along with the other end of each of the pair of rotating supports 48. When viewed from the X direction, the circular motion of the anode 40 may be a constant velocity circular motion or a non-constant velocity circular motion.

In the embodiment, the anode 40 is rotated around the wire 100 when viewed from the X direction, so that the anode 40 moves around the wire 100 when viewed from the X direction. Therefore, the same portion of the outer circumference of the wire 100 does not always face the anode 40 when viewed from the X direction. Thereby, the electric field can be suppressed from being concentrated only on a specific portion of the outer circumference of the wire 100. Therefore, compared with the case where the anode 40 does not move around the wire 100 when viewed from the X direction, the electrocasting layer 200 can be uniformly formed around the wire 100 when viewed from the X direction.

In the embodiment, the electrocasting liquid 20 around the wire 100 can be stirred by moving the anode 40 around the wire 100 when viewed from the X direction. At this time, a circumferential vortex with an axis roughly parallel to the horizontal direction or close to the horizontal direction can be generated in the electrocasting liquid 20 around the wire 100 when viewed from the X direction. Therefore, compared with the case where the anode 40 does not move around the wire 100 when viewed from the X direction, the electrocasting layer 200 can be uniformly formed around the wire 100 when viewed from the X direction.

In the embodiment, the wire 100 is rotated around the virtual line L when viewed from the X direction, so that the outer peripheral surface of the wire 100 moves around the virtual line L when viewed from the X direction. Therefore, the same portion of the outer peripheral surface of the wire 100 does not always face the anode 40 when viewed from the X direction. Thereby, the electric field can be suppressed from being concentrated only on a specific portion of the outer peripheral surface of the wire 100. Therefore, compared with the case where the outer peripheral surface of the wire 100 does not move around the virtual line L when viewed from the X direction, the electrocasting layer 200 can be uniformly formed around the wire 100 when viewed from the X direction.

The operation of the electrocasting device 1 of the embodiment is not limited to the above example.

For example, the movement of the anode 40 around the wire 100 when viewed from the X direction is not limited to the above example. For example, the anode 40 may move around the wire 100 along a track of a shape different from a substantially circular track when viewed from the X direction. For example, the anode 40 may move around the wire 100 along a substantially polygonal track such as a substantially triangular track, a substantially quadrilateral track, or a substantially elliptical track when viewed from the X direction. In addition, the anode 40 may travel back and forth on a predetermined track around the wire 100 when viewed from the X direction, rather than moving only in one direction on a predetermined track around the wire 100. In such examples, the same portion of the outer peripheral surface of the wire 100 may not always face the anode 40 when viewed from the X direction. In addition, the electrocasting liquid 20 around the wire 100 may be stirred by the anode 40. Therefore, compared to the case where the anode 40 does not move around the wire 100 when viewed from the X direction, the electrocasting layer 200 may be uniformly formed around the wire 100 when viewed from the X direction.

The movement of the outer circumference of the wire 100 around the virtual line L when viewed from the X direction is not limited to the above example. For example, the rotation of the wire 100 in one direction around the virtual line L and the rotation of the wire 100 in the opposite direction around the virtual line L can be repeated alternately when viewed from the X direction. In this example, the same portion of the outer circumference of the wire 100 when viewed from the X direction will not always face the anode 40. Therefore, compared to the case where the outer circumference of the wire 100 does not move around the virtual line L when viewed from the X direction, the electrocasting layer 200 can be uniformly formed around the wire 100 when viewed from the X direction.

The number of wires 100 immersed in the electrocasting liquid 20 in the electrocasting tank 10 is not limited to one. For example, a plurality of wires 100 may be immersed in the electrocasting liquid 20 in the electrocasting tank 10. In this example, the plurality of wires 100 may be arranged substantially parallel to the X direction. When viewed from the X direction, the anode 40 may move around the plurality of wires 100.

The length direction of the wire 100 and the length direction of the anode 40 may not be roughly parallel to the horizontal direction. At least one of the length direction of the wire 100 and the length direction of the anode 40 may be inclined at an angle of, for example, less than 45° relative to the horizontal direction.

FIG6 is a diagram showing the electrocasting device 1A of variant example 1. The electrocasting device 1A of variant example 1 is the same as the electrocasting device 1 of the embodiment except for the following points.

The electrocasting device 1A of the modification 1 replaces the pair of anode motors 44 of the embodiment with a single anode motor 44A, a rotating shaft 45aA, a pair of upper gears 45bA, and a pair of lower gears 45cA. Hereinafter, in the modification 1, unless otherwise stated, the approximate center of each of the rotating shaft 45aA, a pair of upper gears 45bA, and a pair of lower gears 45cA refers to the approximate center of each of the rotating shaft 45aA, a pair of upper gears 45bA, and a pair of lower gears 45cA in a direction perpendicular to the X direction.

When viewed from the X direction, the rotating shaft 45aA can rotate around the approximate center of the rotating shaft 45aA by the driving force of a single anodic motor 44A. Specifically, in the example shown in FIG. 6 , the rotating shaft 45aA is located above the electrocasting tank 10 and extends approximately parallel to the X direction. The single anodic motor 44A is connected to one end of the rotating shaft 45aA in the X direction.

The approximate center of each of the pair of upper gears 45bA and each of the two ends of the rotating shaft 45aA in the X direction are connected to each other. Therefore, when viewed from the X direction, the pair of upper gears 45bA can rotate around the approximate center of the rotating shaft 45aA in synchronization with the rotation of the rotating shaft 45aA.

A pair of lower gears 45cA is located below a pair of upper gears 45bA. A pair of upper gears 45bA and a pair of lower gears 45cA are engaged with each other. Therefore, by the rotation of a pair of upper gears 45bA, a pair of lower gears 45cA can rotate. The approximate center of each of the pair of lower gears 45cA and one end of each of a pair of rotating supports 48 are connected to each other. The other end of each of the pair of rotating supports 48 is connected to each of the two ends of the anode 40 in the X direction. Therefore, when viewed from the X direction, the anode 40 can rotate along a substantially circular track centered on the wire 100 together with the other end of each of the pair of rotating supports 48 by the rotation of a pair of lower gears 45cA. Therefore, similarly to the embodiment, compared with the case where the anode 40 does not move around the wire 100 when viewed from the X direction, the electrocasting layer 200 can be uniformly formed around the wire 100 when viewed from the X direction.

In variant 1, the driving force of a single anode motor 44A is transmitted to a pair of rotating supports 48 via a rotating shaft 45aA, a pair of upper gears 45bA, and a pair of lower gears 45cA. Therefore, it is not necessary to synchronize a pair of anode motors disposed on both sides of the anode 40 in the X direction with each other to rotate the anode 40, and the control of the rotation of the anode 40 becomes easy.

FIG. 7 is a diagram for explaining the manufacturing method of the electrocast tube of variant 2. The manufacturing method of the electrocast tube of variant 2 is referred to as the method of variant 2. The method of variant 2 is the same as the method of the implementation type except for the following points.

In FIG. 7 , the virtual line L’ is shown in dotted lines for the convenience of explanation. The virtual line L’ passes through the center of the wire 100’ approximately parallel to the X direction. That is, the virtual line L’ shows the axial direction of the wire 100’.

In the example shown in FIG. 7 , similarly to the embodiment, an electrocasting layer is formed on the outer peripheral surface of the wire 100 ' in a state where the anode 40 ' and the wire 100 ' are immersed in an electrocasting liquid. In the method of the second modification, the wire 100 ' is rotated around the anode 40 when viewed from the X direction, and the wire 100 ' is moved around the anode 40 ' when viewed from the X direction. When viewed from the X direction, the wire 100 ' moves around the anode 40 ' in a manner that different portions of the outer peripheral surface of the wire 100 ' are opposed to the anode 40 ' at different times. For example, the wire 100' may be rotated around the anode 40' without rotating the wire 100' around the virtual line L' when viewed from the X direction but in a fixed state. Alternatively, the wire 100' may be rotated around the virtual line L' and the anode 40' may be rotated around the virtual line L' when viewed from the X direction. The wire 100' is rotated around the anode 40' when viewed from the X direction, for example, by a cathode motor not shown. In addition, the wire 100' may be rotated around the virtual line L' when viewed from the X direction by the cathode motor.

In the method of variation 2, the same portion of the outer peripheral surface of the wire 100' may not always face the anode 40 when viewed from the X direction. In addition, the electrocasting liquid around the anode 40' may be stirred by the wire 100'. In this case, a peripheral vortex with an axis roughly parallel to the horizontal direction or close to the horizontal direction may be generated in the electrocasting liquid around the anode 40' when viewed from the X direction. Therefore, compared with the case where the wire 100' does not move around the anode 40' when viewed from the X direction, the electrocasting layer may be uniformly formed around the wire 100' when viewed from the X direction.

The embodiments and variations of the present invention have been described above with reference to the drawings. These are examples of the present invention, and various structures other than those described above may also be adopted.

For example, when one of the anode and the wire is moved around the other of the anode and the wire, the other of the anode and the wire may not be fixed. That is, the other of the anode and the wire may also move around the one of the anode and the wire.

The electrocast layer may be a plurality of layers instead of a single layer. In addition, a conductive layer may be provided on the inner circumference of the electrocast layer. The conductive layer is coated on the outer circumference of the wire. As the material of the conductive layer, a material having affinity with the material of the electrocast layer is used. The conductive layer is, for example, a metal coating layer such as a gold coating layer. Alternatively, the conductive layer may be a metal other than gold such as silver, iron, copper, aluminum, etc.

According to this specification, the following electrocasting tube manufacturing method and electrocasting device are provided.

(Sample 1)

In the first aspect, the method for manufacturing an electrocast tube includes the step of causing at least one of the anode and at least one wire that acts as a cathode to move around the other of the anode and the at least one wire.

According to the above-mentioned aspect, the same portion of the outer peripheral surface of the wire will not always face the anode. In addition, the electrocasting liquid around the anode and the wire can be stirred by at least one of the anode and the wire. Therefore, compared with the case where at least one of the anode and the wire does not move around the anode and the wire, the electrocasting layer can be uniformly formed around the wire.

(Sample 2)

In the second aspect, in the step of causing at least one of the anode and the at least one wire to move around the other of the anode and the at least one wire, the anode is caused to move around the wire.

According to the above-mentioned state, the same part of the outer peripheral surface of the wire will not always face the anode. In addition, the electrocasting liquid around the wire can be stirred by the anode. Therefore, compared with the case where the anode does not move around the wire, the electrocasting layer can be formed uniformly around the wire.

(Style 3)

In the third aspect, in the step of causing at least one of the anode and the at least one wire to move around the other of the anode and the at least one wire, the wire is caused to move around the anode.

According to the above-mentioned state, the same part of the outer peripheral surface of the wire will not always face the anode. In addition, the electrocasting liquid around the anode can be stirred by the wire. Therefore, compared with the case where the wire does not move around the anode, the electrocasting layer can be uniformly formed around the wire.

(Style 4)

In the fourth aspect, in the step of moving at least one of the anode and the at least one wire around the other of the anode and the at least one wire, at least one of the length directions of the anode and the at least one wire is approximately parallel to the horizontal direction or inclined at an angle of less than 45°.

According to the above-mentioned aspect, in the electrocasting liquid around the anode and at least one wire, a vortex around an axis roughly parallel to the horizontal direction or close to the horizontal direction can also be generated.

(Sample 5)

In the fifth aspect, the method for manufacturing the electrocast tube further includes a step of causing the outer peripheral surface of the aforementioned wire to move around the axial direction of the aforementioned wire (that is, to move around the axial direction of the aforementioned wire).

According to the above-mentioned aspect, the same portion of the outer circumference of the wire will not always face the anode. Therefore, compared with the case where the outer circumference of the wire does not move around in the axial direction of the wire, the electrocasting layer can be uniformly formed around the wire.

(Style 6)

In the sixth aspect, the electrocasting device comprises: an anode; and a first driving unit, which causes at least one of the anode and at least one wire rod acting as a cathode to move around the other of the anode and at least one wire rod.

The "first driving unit" is equivalent to the "positive pole motor" or "negative pole motor" of the above-mentioned implementation or modification.

According to the above-mentioned aspect, in the same manner as the aspect, compared with the case where at least one of the anode and the wire does not move around the other of the anode and the wire, the electrocasting layer can be uniformly formed around the wire.

(Style 7)

In aspect seven, the first driving unit causes the anode to move around the wire.

According to the above-mentioned aspect, similar to aspect 2, compared with the case where the anode does not move on the outer peripheral surface of the wire, the electrocasting layer can be uniformly formed around the wire.

(Style 8)

In the eighth aspect, the first driving unit causes the wire to move around the anode.

According to the above-mentioned aspect, similar to aspect 3, compared with the case where the wire does not move around the anode, the electrocasting layer can be uniformly formed around the wire.

(Style 9)

In aspect nine, at least one of the length direction of the anode and the length direction of at least one wire is approximately parallel to the horizontal direction or inclined at an angle of less than 45°.

According to the above-mentioned aspect, in the electrocasting liquid around the anode and at least one wire, a vortex around an axis roughly parallel to the horizontal direction or close to the horizontal direction can also be generated.

(Style 10)

In aspect 10, the electrocasting device is further provided with a second driving part for moving the outer peripheral surface of the aforementioned wire in the axial direction of the aforementioned wire.

The "second driving unit" is equivalent to the "cathode motor" of the above-mentioned implementation form or variation.

According to the above-mentioned aspect, similar to aspect 5, compared with the case where the outer peripheral surface of the wire does not move around the axial direction of the wire, the electrocasting layer can be uniformly formed around the wire.

This application claims priority based on Japanese Patent Application No. 2022-073118 filed on April 27, 2022, and all the contents disclosed therein are incorporated herein.

1:Electrocasting equipment

10:Electrocasting tank

12: External groove

20: Electrocasting fluid

32: Cathode wiring

34:Cathode Motor

40: Yang pole

42: Anode wiring

44: Yang pole motor

46: Fixed support body

48: Rotating support body

50: Power supply

100: Wire

L:Virtual line

Claims (10)

A method for manufacturing an electrocast tube includes the step of causing at least one of an anode and at least one wire that acts as a cathode to move around the other of the anode and the at least one wire. The method for manufacturing an electrocast tube as described in claim 1, wherein in the step of causing at least one of the anode and the at least one wire to move around the other of the anode and the at least one wire, the anode is caused to move around the wire. The method for manufacturing an electrocast tube as described in claim 1, wherein in the step of causing at least one of the anode and the at least one wire to move around the other of the anode and the at least one wire, the wire is caused to move around the anode. The method for manufacturing an electrocast tube as described in claim 1, wherein, in the step of moving at least one of the anode and the at least one wire around the other of the anode and the at least one wire, at least one of the longitudinal directions of the anode and the at least one wire is substantially parallel to the horizontal direction or inclined at an angle of less than 45°. The method for manufacturing an electrocast tube as described in any one of claims 1 to 4 further comprises a step of causing the outer peripheral surface of the aforementioned wire to move around the axial direction of the aforementioned wire. An electrocasting device having: Anode; and The first driving unit causes at least one of the aforementioned anode and at least one wire material acting as a cathode to move around the other of the aforementioned anode and at least one wire material. The electrocasting device as described in claim 6, wherein the first driving part moves the anode around the wire. The electrocasting device as described in claim 6, wherein the first driving part causes the wire to move around the anode. The electrocasting device as described in claim 6, wherein at least one of the length direction of the anode and the length direction of at least one wire is approximately parallel to the horizontal direction or inclined at an angle of less than 45°. The electrocasting device as described in any one of claims 6 to 9 is further provided with a second driving part for moving the outer peripheral surface of the aforementioned wire in the axial direction of the aforementioned wire.

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