KR20060106511A - 웨이퍼 카세트의 하우징 제작방법 - Google Patents
웨이퍼 카세트의 하우징 제작방법 Download PDFInfo
- Publication number
- KR20060106511A KR20060106511A KR1020050029712A KR20050029712A KR20060106511A KR 20060106511 A KR20060106511 A KR 20060106511A KR 1020050029712 A KR1020050029712 A KR 1020050029712A KR 20050029712 A KR20050029712 A KR 20050029712A KR 20060106511 A KR20060106511 A KR 20060106511A
- Authority
- KR
- South Korea
- Prior art keywords
- wafer
- housing
- manufacturing
- mold
- supporter
- Prior art date
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67346—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (4)
- 하우징 제작용 금형 내부에 웨이퍼가 안착되도록 다수개의 선반이 상하로 구비된 웨이퍼 서포터를 설치하는 단계;상기 금형 내부에 설치된 상기 웨이퍼 서포터의 노출면에 상기 웨이퍼 서포터를 보호하는 보호지그를 설치하는 단계;상기 하우징 제작용 금형 내부에 가소화된 중합재료를 분사하여 하우징을 사출 성형하는 단계로 이루어지는 것을 특징으로 하는 웨이퍼 카세트의 하우징 제작방법.
- 제 1 항에 있어서, 상기 사출단계 이후 상기 하우징 금형에 설치된 상기 보호지그를 분리하기 위한 지그분리단계가 실시되는 것을 특징으로 하는 웨이퍼 카세트의 하우징 제작방법.
- 제 1 항에 있어서, 상기 지그의 일측면에는 상기 선반에 삽입되도록 돌출된 지지돌기가 형성되는 것을 특징으로 하는 웨이퍼 카세트의 하우징 제작방법.
- 제 1 항에 있어서, 상기 웨이퍼 서포터는 폴리에테르에테르케톤 재질인 것을 특징으로 하는 웨이퍼 카세트의 하우징 제작방법.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050029712A KR100676853B1 (ko) | 2005-04-09 | 2005-04-09 | 웨이퍼 카세트의 하우징 제작방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050029712A KR100676853B1 (ko) | 2005-04-09 | 2005-04-09 | 웨이퍼 카세트의 하우징 제작방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20060106511A true KR20060106511A (ko) | 2006-10-12 |
KR100676853B1 KR100676853B1 (ko) | 2007-02-01 |
Family
ID=37627229
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020050029712A KR100676853B1 (ko) | 2005-04-09 | 2005-04-09 | 웨이퍼 카세트의 하우징 제작방법 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR100676853B1 (ko) |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20020088557A (ko) * | 2001-05-18 | 2002-11-29 | 삼성전자 주식회사 | 웨이퍼 카세트 |
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2005
- 2005-04-09 KR KR1020050029712A patent/KR100676853B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
KR100676853B1 (ko) | 2007-02-01 |
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