KR20060069246A - Substrate processing apparatus - Google Patents

Abstract

Provided is a slit coater capable of changing a bumper member for contacting foreign objects and the like quickly and at low cost.

The vibration sensor 7 is mounted to the slit nozzle 41 to which the bumper member 6 is fixed, rather than being directly mounted to the bumper member 6. As a result, the damaged bumper member 6 can be replaced while the vibration sensor 7 is mounted on the slit nozzle 41. Therefore, there is no need of attaching the vibration sensor 7 every time the bumper member 6 is replaced, so that the bumper member 6 can be replaced quickly, and the replacement cost can be reduced. Moreover, if the bumper member 6 is comprised by the some partial material 62, and only the damaged partial material 62 is replaced, the replacement cost can be further reduced.

Description

Substrate Processing Unit {SUBSTRATE PROCESSING APPARATUS}

1 is a perspective view showing a schematic configuration of a slit coater;

2 is a diagram illustrating an example of a detected object;

3 is a diagram illustrating an example of a detected object;

4 is a perspective view schematically illustrating a configuration according to detection of a detected object;

5 is a side view schematically showing a configuration according to detection of a detected object;

6 is a side view schematically illustrating a configuration according to detection of a detected object;

7 is a view showing a flow of operation of a slit coater;

8 is a view showing an example in the case where the bumper member is composed of a plurality of partial materials;

9 is a view showing an example where the lower part of the bumper member is inclined;

10 is a perspective view showing a shape from the back side of the discharge mechanism.

<Description of the symbols for the main parts of the drawings>

1: control unit 2: coating processing unit

4 discharge mechanism 5 moving mechanism

6: bumper member 7: vibration sensor

30: holding surface 41: slit nozzle

42: nozzle holder 62: part material

90: substrate

The present invention relates to a substrate processing apparatus for applying a processing liquid to a substrate held on a holding surface.

In the manufacturing process of various substrates, such as a liquid crystal glass substrate, a semiconductor substrate, a film liquid crystal flexible substrate, a photomask substrate, and a color filter substrate, a coating apparatus which is a substrate processing apparatus which applies a processing liquid to the surface of a substrate is used. It is becoming. As such a coating apparatus, the slit coater which performs the slit coating which apply | coats a process liquid to the whole board | substrate by moving this slit nozzle with respect to a board | substrate, discharging a process liquid from a slit nozzle, or the slit spin which rotates a board | substrate after slit coating. Coaters and the like are known.

When performing slit coating in these coating apparatuses, a slit nozzle is moved with respect to a board | substrate with the discharge port used as the lower end of a slit nozzle and a board | substrate adjoining. For this reason, if foreign matter adheres to the surface of the substrate, or if the substrate has raised portions due to foreign matter between the substrate and the holding surface holding the same, these foreign substances or raised portions and the slit nozzle come into contact with each other, resulting in damage to the slit nozzle, There is a risk of damage to the substrate or poor coating.

Therefore, conventionally, the technique which detects the foreign material etc. before the slit nozzle contacts a foreign material etc. is proposed. For example, an elongate detection member (bumper member) is disposed on the front side of the slit nozzle in advance, and vibration of the detection member caused by contact between the detection member and the foreign matter is directly transmitted to the detection member. The technique which detects with the vibration sensor attached | subjected is known (for example, refer patent document 1).

(Patent Document 1) Japanese Patent Application Laid-Open No. 2000-24571

By the way, as described above, since the detection member is intentionally contacted with a foreign material or the like, it may be damaged by contact with the foreign material or the like, and in this case, it is necessary to replace the detection member. However, in the above-described prior art, since the vibration sensor is mounted directly on the detection member, when the detection member is replaced, the vibration sensor is further required to be attached to the detection member after the replacement. For this reason, the replacement of the detection member has become a very complicated work, and a relatively long working time is required.

This invention is made | formed in view of the said subject, and an object of this invention is to provide the substrate processing apparatus which can replace the detection member promptly.

In order to solve the said subject, invention of Claim 1 is a substrate processing apparatus which apply | coats a process liquid to the board | substrate hold | maintained on the substantially horizontal holding surface, The nozzle which can discharge a process liquid to a said board | substrate from a slit-type discharge port, Holding means for holding and holding the nozzle so that the discharge port is along a first direction that is substantially horizontal, and having a crosslinked structure covering both sides of the holding surface; and a second horizontally orthogonal direction perpendicular to the first direction. Relatively moving means for moving the holding means and the nozzle to cause the nozzle to perform the ejection scanning on the substrate, and a forward direction of the ejection scanning of the nozzle such that a lower end is located below the lower end of the nozzle. It is fixed to the side, and is attached to the detecting member for extending along the first direction and the nozzle, the true to detect the vibration of the nozzle And a control means for controlling the movement means based on the detection means and the detection result of the vibration detection means.

In addition, the invention of claim 2 is a substrate processing apparatus for applying a processing liquid to a substrate held on a substantially horizontal holding surface, the nozzle capable of discharging the processing liquid to the substrate from a slit discharge port, and the holding surface on both sides. A holding means for fixing and holding the nozzle so that the discharge port is along a first direction substantially horizontal, and the holding relative to the substrate in a substantially horizontal second direction orthogonal to the first direction; Moving means for moving the means and the nozzle to cause the nozzle to perform ejection scanning on the substrate, and fixedly installed at the front side of the ejection scanning of the nozzle so that the lower end is located below the lower end of the nozzle, A detecting member extending along the first direction, vibration detecting means mounted to the holding means and detecting vibration of the holding means; Based on the detection result of the group vibration detecting means, and a control means for controlling said moving means.

Moreover, the invention of Claim 3 is the substrate processing apparatus of Claim 1 or 2 WHEREIN: The said detection member is comprised from the some partial material arrange | positioned along the said 1st direction.

In addition, according to the invention of claim 4, in the substrate processing apparatus according to claim 1 or 2, the lower portion of the detection member is an inclined shape in which the width in the second direction becomes smaller as it is lower.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described, referring drawings.

<1. Overview of Substrate Processing Equipment>

FIG. 1: is a perspective view which shows schematic structure of the slit coater 10 which is a substrate processing apparatus which concerns on embodiment of this invention. The slit coater 10 is a coating processing apparatus for performing a coating treatment called slit coating for applying a resist liquid as a processing liquid to the surface of the substrate 90, and selectively etching an electrode layer or the like formed on the surface of the substrate 90. It is used for a process. The substrate 90 to which the slit coater 10 is applied is typically a rectangular glass substrate for manufacturing a screen panel of a liquid crystal display device, but a semiconductor substrate, a flexible substrate for a film liquid crystal, a substrate for a photomask, and a color. Other substrates, such as a filter substrate, may be sufficient.

As shown in FIG. 1, the slit coater 10 is largely divided into the control part 1 which controls the whole apparatus, and the coating process part 2 which performs an application | coating process. The control part 1 is electrically connected with each part of the application | coating process part 2, and controls the operation | movement of each part of the application | coating process part 2 collectively. The control part 1 is equipped with the microcomputer comprised with CPU, RAM, ROM, etc. Various control functions by the control unit 1 are realized by the CPU performing arithmetic processing while using the RAM in accordance with a predetermined program or data. Moreover, the control part 1 is provided with the operation part 11 which receives the input operation from an operator, and the display part 12 which displays various data, and these function as a user interface.

The coating processing unit 2 mainly includes a stage 3 for holding the substrate 90, a discharge mechanism 4 for discharging a resist liquid to the substrate 90 held on the stage 3, and a discharge mechanism ( It consists of the movement mechanism 5 which moves 4) to a predetermined direction.

In addition, in the following description, when showing a direction and a direction, the three-dimensional XYZ rectangular coordinate shown in drawing is used suitably. This XYZ axis is fixed relative to the stage 3. Here, the X-axis and Y-axis directions are in the horizontal direction, and the Z-axis direction is in the vertical direction (+ Z side is upper side). In addition, for convenience, the X-axis direction is the depth direction (+ X side is the front side, -X side is the back side), and the Y-axis direction is the left-right direction (viewed from the front side, + Y side is right side, -Y side). Left).

The stage 3 is composed of a stone such as granite having a substantially rectangular parallelepiped shape, and the upper surface thereof is processed into a substantially horizontal flat surface to function as the holding surface 30 of the substrate 90. The holding surface 30 is formed by dispersing a plurality of vacuum suction ports. Since the board | substrate 90 is adsorbed by these vacuum suction ports, the board | substrate 90 is hold | maintained in a substantially horizontal state at a predetermined position at the time of an application | coating process. In addition, a plurality of lift pins LP capable of lifting up and down along the vertical direction (Z-axis direction) are provided on the holding surface 30 with a predetermined distance from each other.

The discharge mechanism 4 mainly consists of the slit nozzle 41 which discharges a resist liquid, and the nozzle holding part 42 which hold | maintains the slit nozzle 41 fixedly.

The slit nozzle 41 discharges the resist liquid supplied from the supply mechanism other than the figure to the upper surface of the board | substrate 90 from a slit discharge port. This slit nozzle 41 is fixedly supported by the nozzle holding part 42 so that its discharge port extends along the Y-axis direction substantially parallel to the holding surface 30 and faces vertically downward (-Z side). do. Therefore, the lower end of the slit nozzle 41 becomes a discharge port.

The nozzle holding part 42 is comprised by the fixing member 42a which fixes the slit nozzle 41, and the two lifting mechanisms 42b which support and raise and hold the fixing member 42a. The fixing member 42a is comprised by the cross-section spherical rod-shaped member, such as carbon fiber reinforced resin which makes a Y-axis direction the longitudinal direction.

The two lifting mechanisms 42b are connected to both left and right ends of the fixing member 42a, and are each provided with an AC servomotor, a ball screw, and the like. By the two lifting mechanisms 42b, the fixing member 42a and the slit nozzle 41 fixed thereto are raised and lowered in the vertical direction (Z-axis direction), so that the gap between the slit nozzle 41 and the substrate 90 ( Gap), the attitude of the slit nozzle 41 with respect to the substrate 90, and the like are adjusted.

As shown in FIG. 1, the nozzle holding | maintenance part 42 formed by these fixing member 42a and the two raising / lowering mechanisms 42b traverses the left and right both ends of the stage 3 along the Y-axis direction. And a crosslinked structure covering both the holding surfaces 30. The movement mechanism 5 moves the whole discharge mechanism 4 including the nozzle holding | maintenance part 42 as this bridge | crosslinked structure, and the slit nozzle 41 fixed and held to it along the X-axis direction.

As shown in the figure, the movement mechanism 5 has a symmetrical structure (symmetry in the + Y side and the -Y side), and guides the movement of the discharge mechanism 4 in the X axis direction in each of the left and right sides. A travel rail 51, a linear motor 52 for generating a moving force for moving the discharge mechanism 4, and a linear encoder 53 for detecting the position of the discharge mechanism 4 are provided.

The two traveling rails 51 extend along the X-axis direction at the edge part (left and right edge part) of the stage 3 in the Y-axis direction, respectively. The lower end portions of the two lifting mechanisms 42b are guided along these two traveling rails 51, respectively, so that the moving direction of the discharge mechanism 4 is defined in the X-axis direction.

The two linear motors 52 are each configured as an AC coreless linear motor having a stator 52a and a mover 52b. The stator 52a is provided along the X-axis direction at the side surface (left-right side surface) of the stage 3 in the Y-axis direction. On the other hand, the mover 52b is fixed to the outer side of the elevating mechanism 42b. The linear motor 52 moves the discharge mechanism 4 by the magnetic force which arises between these stators 52a and the mover 52b.

In addition, the two linear encoders 53 each have a scale part 53a and a detection part 53b. The scale part 53a is provided in the lower part of the stator 52a of the linear motor 52 fixed to the stage 3 along the X-axis direction. On the other hand, the detection part 53b is fixed to the outer side of the mover 52b of the linear motor 52 fixedly attached to the lifting mechanism 42b, and is arrange | positioned facing the scale part 53a. The linear encoder 53 is a position of the discharge mechanism 4 in the X-axis direction (more specifically, the discharge port of the slit nozzle 41) based on the relative positional relationship between the scale 53a and the detector 53b. Position).

With the above structure, the slit nozzle 41 holds the upper space of the holding surface 30 on which the substrate 90 is held in the X axis direction parallel to the holding surface 30 in the holding surface 30. It becomes relatively movable with respect to. When the coating process is performed, the slit nozzle 41 is moved at a predetermined speed in the X-axis direction in a state where the resist liquid is discharged from the discharge port, and scanning by the slit nozzle 41 on the approximately entire surface of the substrate 90 ( Discharge scan). By this coating process, the resist liquid is uniformly applied over substantially the entire surface of the substrate 90, and a layer of the resist liquid having a predetermined film thickness is formed on the surface of the substrate 90. In the slit coater 10 of the present embodiment, the moving direction of the slit nozzle 41 in the coating process (discharge scan) is in the + X direction (front side).

<2. Foreign Object Detection Function>

Moreover, the slit coater 10 has a function which detects the foreign material etc. which may contact the slit nozzle 41 at the time of a coating process.

2 and 3 are side views illustrating examples of foreign matters and the like that may come into contact with the slit nozzle 41. In the coating process, the slit nozzle 41 is disposed above the substrate 90 so that the discharge port serving as the lower end portion thereof has a gap of, for example, 50 μm to 200 μm with respect to the substrate 90. It is moved in the + X direction while holding it.

In the area | region to which the discharge port of the slit nozzle 41 should move in a coating process (henceforth "moving object area | region"), as shown in FIG. 2, the foreign material Fm adhering to the upper surface of the board | substrate 90 As shown in FIG. 3, there is a case where a ridge 90a of the substrate 90 (a bulging portion other than that generated by the foreign matter Fm is inserted between the substrate 90 and the holding surface 30). have. In the case where the coating process is enforced while such foreign matter Fm or the ridge 90a is present, these foreign matters Fm, 90a and the discharge port (lower end) of the slit nozzle 41 come into contact with each other to form a slit nozzle ( 41) may be damaged.

For this reason, in the slit coater 10, as shown in FIG. 1, a foreign material or the like is detected by contact so that the foreign material or the like can be detected before the discharge port of the slit nozzle 41 contacts such a foreign material or the like. The bumper member 6 which is a detection member is fixedly attached to + X (front side) of the slit nozzle 41. In addition, the foreign material Fm and ridge | bulb 90a used as a detection object are hereafter collectively called "detected object" (NG).

FIG. 4: is a perspective view which shows typically the structure of the slit coater 10 by detection of such a to-be-detected object NG. 5 and 6 are side views from the -Y side (left side) of this configuration.

As shown in these figures, the bumper member 6 is a plate-shaped member (plate) which is elongated and has a rectangular cross section longer than the size of the slit nozzle 41 in the Y-axis direction, for example, the thickness is 5 mm. It consists of metals, such as stainless which are about -20 mm. The bumper member 6 is fixed to the side on the + X side of the slit nozzle 41 so that the longitudinal direction thereof is along the Y axis direction and the thickness direction is on the X axis direction. As a result, the bumper member 6 is placed at a predetermined interval on the + X side (the front side of the advancing of the slit nozzle 41 in the coating process) with respect to the sharp discharge port of the slit nozzle 41. The relative is fixed.

In addition, in either of the Y-axis directions in which the slit nozzle 41 extends, the bumper member 6 is disposed such that its lower end is located, for example, about 10 占 퐉 below the discharge port (lower end) of the slit nozzle 41. do. As a result, the virtual line extending horizontally in the + X direction at the lower end of the slit nozzle 41 is always blocked by the bumper member 6.

As shown in FIG. 4, the bumper member 6 is fixed with a bolt or the like at predetermined intervals in the Y-axis direction at a plurality of fixing positions 61 with respect to the substantially flat side surface of the slit nozzle 41. Although the long bumper member 6 may have a deflection of its own weight, it is possible to prevent the deflection of its own weight by adopting such a fixed method, and the entire lower end of the bumper member 6 is substantially horizontal along the Y axis direction. Can be placed.

Here, as shown in FIG. 5, the case where the to-be-detected object NG exists in the movement object area | region is assumed. When the slit nozzle 41 moves further to the + X side from the state of FIG. 5, since the bumper member 6 is disposed on the + X side of the discharge port of the slit nozzle 41, as shown in FIG. 6, the detected object NG contacts the bumper member 6 before contacting the discharge port of the slit nozzle 41. From this contact, the bumper member 6 generates vibrations in which the X-axis direction is the main vibration direction. In the slit coater 10, the presence of the detected object NG is detected by detecting such a vibration.

For this reason, the slit coater 10 is provided with the vibration sensor 7 for detecting a vibration. However, this vibration sensor 7 is not directly attached to the bumper member 6, but is attached to the slit nozzle 41 as shown in Figs. Therefore, the vibration sensor 7 detects the vibration which generate | occur | produces in the slit nozzle 41 by the transmission of the vibration which arose in the bumper member 6. As shown in FIG. In short, the vibration sensor 7 indirectly detects the vibration of the bumper member 6 by the detection of the vibration of the slit nozzle 41.

The vibration sensor 7 has the structure which enclosed the two cylindrical members large and small, and the comparatively large cylindrical member is the main-body part 71, and the comparatively small cylindrical member is the mounting part 72. As shown in FIG. Hereinafter, the direction (axial direction of the main body 71 and the mounting part 72) of the two cylindrical members of the vibration sensor 7 is called "axial direction" of the vibration sensor 7. This axial direction becomes the vibration detection direction of the vibration sensor 7.

The main body portion 71 has a structure in which a piezoelectric element is sandwiched in the axial direction with a base and a weight, and outputs an electrical signal proportional to the acceleration in the axial direction. As a result, the vibration sensor 7 detects vibration along the axial direction as an electric signal.

In addition, the mounting portion 72 is cut into a screw like the tip of the bolt. This attaching part 72 is screwed together with the mounting hole 41a cut | disconnected by the screw form formed along the X-axis direction at the side of -X side of the slit nozzle 41. As shown in FIG. As shown in FIG. 4, this mounting hole 41a is preferably a center position in the longitudinal direction (Y-axis direction) of the slit nozzle 41. Thereby, the vibration sensor 7 is attached to the side surface of the slit nozzle 41 at the side of -X side, with the axial direction along the X-axis direction.

By the above, the vibration sensor 7 is arrange | positioned so that the vibration detection direction may follow an X-axis direction. As described above, the main vibration direction of the vibration of the bumper member 6 caused by the contact with the object NG is the X axis direction. Therefore, the vibration detection direction of the vibration sensor 7 matches the main vibration direction of the vibration of this bumper member 6, and the vibration sensor 7 vibrates the bumper member 6, that is, the detected object. The presence of (NG) can be detected with high sensitivity.

The vibration detected by the vibration sensor 7 is input to the control unit 1 as an electric signal. Thereby, the control part 1 can grasp | ascertain the presence of the to-be-detected object NG.

<3. Coating Process>

Next, the detail of the application | coating process with detection of such a to-be-detected body NG is demonstrated. FIG. 7: is a figure which shows the flow of the operation | movement of the slit coater 10 which apply | coats a resist liquid with respect to the board | substrate 90. FIG. This operation is performed for each substrate 90 to be coated. The operation of the slit coater 10 will be described below with reference to this figure. In addition, operation control of each part in this description is performed by the control part 1 unless there is particular notice.

First, the board | substrate 90 is carried in to the coating process part 2 by the conveyance mechanism of the exterior of the coating process part 2, and is handed to the lift pin LP. In response to receiving the substrate 90, the lift pin LP is lowered and embedded in the stage 3. Thereby, the board | substrate 90 carried in is mounted in the predetermined position of the holding surface 30 of the stage 3, and it is adsorbed and hold | maintained by the vacuum suction port. At the time of carrying in such a board | substrate 90, the slit nozzle 41 is waiting in the evacuation position shown in FIG. 1 (step S11).

Next, the height of the discharge port of the slit nozzle 41 is adjusted by the lifting mechanism 42b. At this time, the position of the lower end part of the bumper member 6 becomes upper than the upper surface of the board | substrate 90 (step S12). Subsequently, the slit nozzle 41 moves to the predetermined start position (more specifically, the position immediately above the end on the -X side of the substrate 90) at which the ejection of the resist liquid should be started by the moving mechanism 5. (Step S13).

Next, discharge of the resist liquid is started from the discharge port of the slit nozzle 41 toward the substrate 90 (step S14). At the same time, the moving mechanism 5 starts the horizontal movement of the slit nozzle 41 at a predetermined speed toward the + X side (step S15). That is, the coating process (ejection scan) which discharges a resist liquid to the board | substrate 90 while the slit nozzle 41 moves on the board | substrate 90 is started.

This application | coating process is continued until the slit nozzle 41 moves to a predetermined | prescribed end position (more specifically, the position directly on the edge part of the + X side of the board | substrate 90) (step S17). On the other hand, while this application | coating process is continued, the control part 1 monitors whether the to-be-detected object NG exists in the movement object area | region of the slit nozzle 41. FIG. That is, it is monitored whether or not the vibration sensor 7 detects vibration (step S16).

When vibration is detected by the vibration sensor 7 by this monitoring (Yes in step S16), a coating process is forcibly stopped at that time. That is, discharge of the resist liquid from the slit nozzle 41 is stopped, and horizontal movement of the slit nozzle 41 is stopped. Moreover, as an alarm, the warning screen which shows that the to-be-detected object NG was detected is displayed on the display part 12 of the control part 1 (step S19).

Since the bumper member 6 which contacts the to-be-detected body NG is arrange | positioned at the front side of the advancing of the discharge port of the slit nozzle 41 at a predetermined space | interval, immediately when the to-be-detected object NG is detected. By stopping the horizontal movement of the slit nozzle 41, the contact between the slit nozzle 41 and the object to be detected NG can be prevented in advance. As a result, the slit nozzle 41 can be effectively prevented from being damaged by the contact with the object NG.

In addition, by outputting an alarm, the operator can be notified of the abnormality, so that a recovery operation or the like can be efficiently performed. In addition, as long as the alarm can inform an operator of occurrence of an abnormal situation, for example, the alarm may be made by other methods such as output of an alarm sound from a speaker, lighting of a warning lamp, and the like.

After such step S19 is executed, the slit nozzle 41 is lifted by the elevating mechanism 42b and moved to the evacuation position by the moving mechanism 5 (step S20). Subsequently, the board | substrate 90 is pushed up from the holding surface 30 by the raise of the lift pin LP, and the board | substrate 90 is carried out from the coating process part 2 by an external conveyance mechanism in this state. (Step S21). Since this coating | coating 90 is not completed, it is distinguished from the other board | substrate 90 in which the coating | coating process was completed. Moreover, when the bumper member 6 is damaged by the contact with the to-be-detected body NG, the bumper member 6 is replaced. In addition, in this case, as shown in FIG. 3, since the foreign material Fm is also attached to the stage 3, it is preferable to perform the restoration process, such as cleaning the stage 3, and so on. .

On the other hand, when the detected object NG is not detected in the coating process and the slit nozzle 41 is moved to the predetermined end position (Yes in step S17), the coating process is completed normally and ends at the normal time. Processing takes place. That is, discharge of the resist liquid from the slit nozzle 41 is stopped (step S18), and the slit nozzle 41 is moved to the evacuation position by the moving mechanism 5 (step S20). And the board | substrate 90 with which the coating process was completed is carried out from the coating process part 2 (step S21).

As described above, in the slit coater 10, the vibration sensor 7 is not mounted directly to the bumper member 6, but is mounted to the slit nozzle 41. For this reason, the damaged bumper member 6 can be replaced in the state which mounted the vibration sensor 7 with respect to the slit nozzle 41. FIG. Therefore, there is no need of attaching the vibration sensor 7 every time the bumper member 6 is replaced, so that the bumper member 6 can be replaced quickly, and the replacement cost can be reduced.

In addition, since the vibration sensor 7 is attached to the slit nozzle 41 instead of the bumper member 6, vibration generated by abnormality other than vibration caused by the contact between the detected object NG and the bumper member 6. It also becomes possible to detect effectively. For example, when a foreign material is inserted between the discharge mechanism 4 and the travel rail 51, the movement of the discharge mechanism 4 is prevented, and the discharge mechanism 4 including the slit nozzle 41 is included in the discharge mechanism 4. Vibration different from usual occurs. Such a driving abnormality of the discharge mechanism 4 leads to the unnecessary application of the resist liquid to the surface of the substrate 90. However, since the vibration sensor 7 can also detect the vibration caused by the abnormal driving, the application is performed. The board | substrate 90 in which the defect generate | occur | produced can be detected effectively.

<4. Other Embodiments>

As mentioned above, although embodiment of this invention was described, this invention is not limited to the said embodiment (henceforth "1st aspect"), and various deformation | transformation are possible. Hereinafter, such another embodiment will be described.

<4-1. Second form: plural parts>

In the 1st aspect, although the bumper member 6 was comprised by one member, you may be comprised divisionally from several partial materials. FIG. 8: is a figure which shows the example in the case where the bumper member 6 is comprised from the some partial material 62. As shown in FIG.

The bumper member 6 shown in the example of the figure is comprised from five partial materials 62. As shown in FIG. These five partial materials 62 are arranged along the Y-axis direction, and are respectively fixed to the side of the + X side of the slit nozzle 41 by the volt | bolt etc. at the some fixing position 63, respectively.

Since the bumper member 6 is for making contact with the minute to-be-detected object NG, in order to raise detection accuracy, the lower surface of the bumper member 6 which opposes the board | substrate 90 will have a precise level of precision. It is desirable to be a high flat surface. However, with the recent enlargement of the slit nozzle 41, the size required for the longitudinal direction (Y-axis direction) of the bumper member 6 is also extended to about 2000 mm, for example. For this reason, if the bumper member 6 is comprised by one member, processing to the rigid flat surface over the whole surface corresponded to a lower surface will be very difficult, and manufacturing cost of the bumper member 6 will rise. . On the other hand, if the bumper member 6 is comprised from the some partial material 62 like this 2nd aspect, since the magnitude | size of the longitudinal direction of one partial material 62 can be made relatively short, it corresponds to a lower surface. Processing of the surface into a flat surface is particularly easy, and the manufacturing cost of the entire bumper member 6 can be greatly reduced.

Moreover, also when replacing the damaged bumper member 6, it is not necessary to replace the whole bumper member 6, and only the damaged partial material 62 among the some partial materials 62 needs to be replaced. In addition, the exchange cost can be greatly reduced.

In addition, assuming that the vibration sensor is directly attached to the bumper member 6 here, for example, when the bumper member 6 is constituted by the plurality of partial materials 62, each of the plurality of partial materials 62 is used. It is necessary to mount a vibration sensor with respect to. On the other hand, in the slit coater 10 of this embodiment, since the vibration sensor 7 is attached to the slit nozzle 41, only the one vibration sensor 7 vibrates the vibration of all the part materials 62. FIG. Can be detected. Therefore, also in this, manufacturing cost can be reduced.

<4-2. Third form: slope

In the first aspect, the bumper member 6 is composed of a plate-shaped member having a rectangular cross section, and the width (thickness) in the X-axis direction is constant. However, the bumper member 6 may have an inclined shape in which the width in the X-axis direction becomes smaller as it is lower. FIG. 9: is a figure which shows the example in the case where the lower part 6b of the bumper member 6 is inclined.

The bumper member 6 shown in the example of the figure is comprised from the upper part 6a which the width of a X-axis direction is constant, and the lower part 6b which becomes smaller as the width of a X-axis direction becomes lower. As shown in the figure, the width t2 of the lower surface of the bumper member 6 in the X-axis direction is smaller than the width t1 of the upper surface, and the width in the X-axis direction at the lower portion 6b of the bumper member 6. It is gradually narrowing down.

In the slit coater 10 of this embodiment, since the vibration sensor 7 is attached to the slit nozzle 41, the bumper member 6 is mass enough to transmit the vibration to the slit nozzle 41 effectively. You need to have For this reason, it is preferable that the width of the bumper member 6 in the X-axis direction becomes as large as possible. On the other hand, as described above, the lower surface of the bumper member 6 is preferably a flat surface at a rigid level in order to increase the detection accuracy, but in order to reduce the manufacturing cost, the X axis direction of the bumper member 6 is reduced. It is desirable that the width of is as small as possible.

In short, the request to "large" and the request to "small" compete with each other for the width of the bumper member 6 in the X-axis direction. On the other hand, as in this third embodiment, by making the lower portion 6b of the bumper member 6 into an inclined shape in which the width in the X-axis direction becomes smaller as the lower side thereof, these requests can be made compatible and the detection accuracy is improved. While maintaining, the manufacturing cost of the bumper member 6 can be reduced.

In addition, of course, after forming the bumper member 6 with the some partial material 62 like the 2nd aspect, the lower part of each partial material 62 is inclined shape which becomes smaller in width in the X-axis direction as it goes down. You may also

<4-3. Mounting to Nozzle Retention Unit>

Although the vibration sensor 7 was attached to the slit nozzle 41 in the 1st aspect, since the vibration of the bumper member 6 is transmitted to the whole discharge mechanism 4, the slit nozzle 41 is fixed and held. Even if the vibration sensor 7 is attached to the nozzle holding unit 42 (fixing member 42a and the lifting mechanism 42b) to detect the vibration of the nozzle holding unit 42, the bumper member 6 indirectly vibrates. It is possible to detect. Therefore, you may attach the vibration sensor 7 to the fixing member 42a and the lifting mechanism 42b.

FIG. 10: is a perspective view which shows the shape from the back side (-X side) of the discharge mechanism 4. As shown in FIG. As shown in FIG. 10, as a mounting position of the vibration sensor 7, the center position P1 of the longitudinal direction (Y-axis direction) of the fixing member 42a, the position P2 in the elevating mechanism 42b, P3) etc. can be considered.

Also in this case, it is preferable that the vibration detection direction of the vibration sensor 7 matches the main vibration direction of the vibration of the bumper member 6. For this reason, when employ | adopting the same vibration sensor 7 as mentioned above, it mounts along the X-axis direction to the side surface (which may be either -X side and + X side) of an X-axis direction similarly to 1st aspect. It is preferable to form a hole and to screw the mounting portion 72 of the vibration sensor 7 to the mounting hole.

Moreover, when the vibration sensor 7 is attached to the nozzle holding part 42 in this way, the vibration which arises from abnormality other than the vibration by the contact of the to-be-detected object NG and the bumper member 6 more effectively It becomes possible to detect.

<4-4. Other Modifications>

In the above description, the direction of movement of the slit nozzle 41 in the coating process (discharge scanning) is one direction in the + X direction, and the bumper member 6 is mounted only on the + X side of the slit nozzle 41. Although the description has been made, however, when the slit nozzle 41 is movable to both the + X side and the -X side, the bumper member 6 may be mounted on both the + X side and the -X side of the slit nozzle 41. do. Also in this case, since the vibration sensor 7 is attached to the slit nozzle 41 or the nozzle holding | maintenance part 42, only one vibration sensor 7 bumper member of both + X side and -X side. The vibration of (6) can be detected.

In addition, in the above description, only one vibration sensor 7 is mounted, but a plurality of vibration sensors 7 may be mounted.

According to the inventions of claims 1 to 5, since the vibration detecting means is not directly attached to the detecting member, it is not necessary to attach the vibration detecting means every time the detecting member is replaced, so that the detecting member can be quickly replaced. Can be. In addition, vibrations other than the detecting member caused by the contact of the foreign matter with the holding means or the like can be effectively detected.

In particular, according to the invention of claim 3, even if the detecting member is damaged, only the damaged partial material needs to be replaced, so that the replacement cost can be reduced. Moreover, manufacture of a detection member becomes easy, and manufacturing cost can be reduced.

Moreover, according to invention of Claim 4 especially, manufacturing cost of a member for a detection can be reduced, maintaining detection accuracy.

Claims (4)

A substrate processing apparatus for applying a processing liquid to a substrate held on a substantially horizontal holding surface, A nozzle capable of discharging the processing liquid onto the substrate from a slit discharge port; Holding means for fixing the nozzle so as to have a cross-linked structure covering both of the holding surfaces, and the discharge port in a substantially horizontal first direction; Moving means for moving the holding means and the nozzle relative to the substrate in a substantially horizontal second direction orthogonal to the first direction, causing the nozzle to perform ejection scanning on the substrate; A detection member fixedly installed at the front side of the discharging scan of the nozzle so as to be positioned below the lower end of the nozzle and extending along the first direction; Vibration detection means mounted to the nozzle to detect vibration of the nozzle; And control means for controlling the moving means based on a detection result of the vibration detecting means. A substrate processing apparatus for applying a processing liquid to a substrate held on a substantially horizontal holding surface, A nozzle capable of discharging the processing liquid onto the substrate from a slit discharge port; Holding means for fixing the nozzle so as to have a cross-linked structure covering both of the holding surfaces, and the discharge port in a substantially horizontal first direction; Moving means for moving the holding means and the nozzle relative to the substrate in a substantially horizontal second direction orthogonal to the first direction, causing the nozzle to perform ejection scanning on the substrate; A detection member fixedly installed at the front side of the discharging scan of the nozzle so as to be positioned below the lower end of the nozzle and extending along the first direction; Vibration detection means mounted to the holding means and detecting vibration of the holding means; And control means for controlling the moving means based on a detection result of the vibration detecting means. The method according to claim 1 or 2, The said processing member is comprised from the some partial material arrange | positioned along the said 1st direction, The substrate processing apparatus characterized by the above-mentioned. The method according to claim 1 or 2, A lower portion of the detecting member has an inclined shape in which the width in the second direction decreases as the lower side thereof.

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