JP4490801B2 - Substrate processing equipment - Google Patents

Description

  The present invention relates to a substrate processing apparatus for applying a processing liquid to a substrate held on a holding surface.

  In the manufacturing process of various substrates such as glass square substrates for liquid crystals, semiconductor substrates, flexible substrates for film liquid crystals, substrates for photomasks, substrates for color filters, etc., a coating processing apparatus that is a substrate processing apparatus that applies a processing liquid to the surface of the substrate Is used. As such a coating processing apparatus, a slit coater for performing a slit coating to apply the processing liquid to the entire substrate by moving the slit nozzle relative to the substrate while discharging the processing liquid from the slit nozzle, or after the slit coating. A slit / spin coater for rotating a substrate is known.

  When slit coating is performed in these coating treatment apparatuses, the slit nozzle is moved relative to the substrate in a state where the discharge port serving as the lower end portion of the slit nozzle and the substrate are close to each other. For this reason, if foreign matter adheres to the surface of the substrate, or if there is a raised portion on the substrate due to foreign matter between the substrate and the holding surface that holds it, the foreign matter or raised portion and the slit nozzle come into contact with each other, There is a risk that the slit nozzle may be damaged, the substrate may be damaged, or the coating may be poor.

  Therefore, conventionally, there has been proposed a technique for detecting a foreign substance or the like before the slit nozzle comes into contact with the foreign substance or the like. For example, a long detection member (bumper member) is disposed on the front side of the progress of the slit nozzle, and the vibration of the detection member caused by the contact between the detection member and a foreign object is directly applied to the detection member. There is known a technique of detecting by a vibration sensor attached to the (see, for example, Patent Document 1).

JP 2000-24571 A

  By the way, as described above, the detection member is intentionally brought into contact with a foreign object or the like, and may be damaged by contact with the foreign object or the like. In this case, the detection member needs to be replaced. However, in the above-described conventional technology, the vibration sensor is directly attached to the detection member. Therefore, when the detection member is replaced, it is further necessary to attach the vibration sensor to the detection member after replacement. It becomes. For this reason, replacement of the detection member is a very complicated operation, and a relatively long operation time is required.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a substrate processing apparatus capable of quickly replacing a detection member.

In order to solve the above problems, the invention of claim 1 is a substrate processing apparatus for applying a processing liquid to a substrate held on a substantially horizontal holding surface, and discharges the processing liquid to the substrate from a slit-like discharge port. A nozzle having a bridging structure straddling the holding surface, the holding means for fixing and holding the nozzle so that the discharge port extends along a substantially horizontal first direction, and a substantially horizontal that is orthogonal to the first direction. Moving means for moving the holding means and the nozzle relative to the substrate in a second direction, and causing the nozzle to perform ejection scanning on the substrate; and a lower end positioned below the lower end of the nozzle. A detection member fixed to the front side of the discharge scanning of the nozzle and extending along the first direction; a single vibration detecting means attached to the nozzle for detecting vibration of the nozzle; Of vibration detection means Based on the output results, and control means for controlling said moving means, said detection member includes a plurality of component materials arranged along the first direction, can be replaced for each component materials It is said that .

The invention of claim 2 is a substrate processing apparatus for applying a processing liquid to a substrate held on a substantially horizontal holding surface, a nozzle capable of discharging the processing liquid to the substrate from a slit-like discharge port; A cross-linking structure straddling the holding surface, the holding means for fixing and holding the nozzle so that the discharge port is in a substantially horizontal first direction, and the substantially horizontal second direction orthogonal to the first direction. Moving means for moving the holding means and the nozzle relative to the substrate and causing the nozzle to perform discharge scanning on the substrate; and discharging the nozzle so that a lower end is positioned below a lower end of the nozzle. A detection member fixed on the front side of the scanning and extending along the first direction; a single vibration detection means attached to the holding means for detecting the vibration of the holding means; and the vibration detection means Based on detection results Te, and a control means for controlling said moving means, said detection member includes a plurality of component materials arranged along the first direction, have been interchangeable for each component materials Yes.

According to a third aspect of the present invention, in the substrate processing apparatus according to the first or second aspect , the lower portion of the detection member has an inclined shape in which the width in the second direction becomes smaller toward the lower side.

According to the first to third aspects of the present invention, since the vibration detection means is not directly attached to the detection member, it is not necessary to attach the vibration detection means every time the detection member is replaced, and the detection member can be quickly obtained. Can be replaced. In addition, vibrations other than the detection member caused by contact of foreign matter with the holding means or the like can be detected effectively.

In addition, according to the first to third aspects of the invention, even if the detection member is damaged, only the damaged partial material needs to be replaced, so that the replacement cost can be reduced. Further, the detection member can be easily manufactured, and the manufacturing cost can be reduced.

In particular, according to the invention of claim 3 , the manufacturing cost of the detection member can be reduced while maintaining the detection accuracy.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

<1. Outline of substrate processing equipment>
FIG. 1 is a perspective view showing a schematic configuration of a slit coater 10 which is a substrate processing apparatus according to an embodiment of the present invention. The slit coater 10 is a coating processing apparatus that performs a coating process called slit coating for coating a resist solution, which is a processing liquid, on the surface of the substrate 90, and selectively etches an electrode layer or the like formed on the surface of the substrate 90. Used for processes. The substrate 90 to be coated with the slit coater 10 is typically a rectangular glass substrate for manufacturing a screen panel of a liquid crystal display device, but is a semiconductor substrate, a flexible substrate for a film liquid crystal, a substrate for a photomask, a color Other substrates such as a filter substrate may be used.

  As shown in FIG. 1, the slit coater 10 is roughly divided into a control unit 1 that controls the entire apparatus and a coating processing unit 2 that performs coating processing. The control unit 1 is electrically connected to each part of the coating processing unit 2 and comprehensively controls the operation of each part of the coating processing unit 2. The control unit 1 includes a microcomputer including a CPU, a RAM, a ROM, and the like. Various control functions by the control unit 1 are realized by the CPU performing arithmetic processing using the RAM according to predetermined programs and data. Further, the control unit 1 is provided with an operation unit 11 that receives an input operation from an operator and a display unit 12 that displays various data, and these function as a user interface.

  The coating processing unit 2 mainly includes a stage 3 for holding the substrate 90, a discharge mechanism 4 for discharging a resist solution to the substrate 90 held on the stage 3, and a movement for moving the discharge mechanism 4 in a predetermined direction. And a mechanism 5.

  In the following description, the three-dimensional XYZ orthogonal coordinates shown in the figure are used as appropriate when indicating the direction and direction. The XYZ axes are fixed relative to the stage 3. Here, the X-axis and Y-axis directions are the horizontal direction, and the Z-axis direction is the vertical direction (the + Z side is the upper side). For convenience, the X-axis direction is the depth direction (the + X side is the front side and the -X side is the back side), and the Y-axis direction is the left-right direction (when viewed from the front side, the + Y side is the right side and the -Y side is the left side).

  The stage 3 is made of a stone material such as granite having a substantially rectangular parallelepiped shape, and the upper surface thereof is processed into a substantially horizontal flat surface and functions as the holding surface 30 of the substrate 90. A large number of vacuum suction ports are dispersedly formed on the holding surface 30. By adsorbing the substrate 90 through these vacuum suction ports, the substrate 90 is held in a substantially horizontal state at a predetermined position during the coating process. The holding surface 30 is provided with a plurality of lift pins LP that can be moved up and down along the vertical direction (Z-axis direction) at a predetermined distance from each other.

  The discharge mechanism 4 mainly includes a slit nozzle 41 that discharges a resist solution and a nozzle holding portion 42 that fixes and holds the slit nozzle 41.

  The slit nozzle 41 discharges the resist solution supplied from a supply mechanism (not shown) to the upper surface of the substrate 90 from the slit-shaped discharge port. The slit nozzle 41 is fixedly supported by the nozzle holding portion 42 such that the discharge port extends along the Y-axis direction substantially parallel to the holding surface 30 and faces vertically downward (−Z side). Therefore, the lower end portion of the slit nozzle 41 becomes a discharge port.

  The nozzle holding part 42 includes a fixing member 42a that fixes the slit nozzle 41, and two lifting mechanisms 42b that support the fixing member 42a and move it up and down. The fixing member 42a is configured by a rod-shaped member having a rectangular cross section such as a carbon fiber reinforced resin whose longitudinal direction is the Y-axis direction.

  The two elevating mechanisms 42b are connected to the left and right ends of the fixing member 42a, and each includes an AC servo motor and a ball screw. By these two raising / lowering mechanisms 42b, the fixing member 42a and the slit nozzle 41 fixed thereto are moved up and down in the vertical direction (Z-axis direction), and the interval (gap) between the slit nozzle 41 and the substrate 90, and the slit nozzle with respect to the substrate 90 41's posture and the like are adjusted.

  As shown in FIG. 1, the nozzle holding portion 42 formed by the fixing member 42 a and the two lifting mechanisms 42 b bridges the left and right ends of the stage 3 along the Y-axis direction and bridges the holding surface 30. It has a structure. The moving mechanism 5 moves the entire discharge mechanism 4 including the nozzle holding portion 42 as the bridging structure and the slit nozzle 41 fixed and held along the X-axis direction.

  As shown in the figure, the moving mechanism 5 has a symmetrical structure (symmetric on the + Y side and −Y side), and a traveling rail 51 that guides the movement of the discharge mechanism 4 in the X-axis direction on each of the left and right sides. And a linear motor 52 that generates a moving force for moving the discharge mechanism 4 and a linear encoder 53 for detecting the position of the discharge mechanism 4.

  Each of the two traveling rails 51 extends along the X-axis direction at the end (left and right ends) of the stage 3 in the Y-axis direction. By guiding the lower ends of the two lifting mechanisms 42b along the two traveling rails 51, the movement direction of the discharge mechanism 4 is defined in the X-axis direction.

  Each of the two linear motors 52 is configured as an AC coreless linear motor having a stator 52a and a mover 52b. The stator 52a is provided on the side surface (left and right side surfaces) in the Y-axis direction of the stage 3 along the X-axis direction. On the other hand, the mover 52b is fixed to the outside of the elevating mechanism 42b. The linear motor 52 moves the discharge mechanism 4 by the magnetic force generated between the stator 52a and the mover 52b.

  Each of the two linear encoders 53 includes a scale unit 53a and a detection unit 53b. The scale portion 53a is provided along the X-axis direction below the stator 52a of the linear motor 52 fixed to the stage 3. On the other hand, the detection unit 53b is fixed to the outer side of the mover 52b of the linear motor 52 fixed to the elevating mechanism 42b, and is arranged to face the scale unit 53a. The linear encoder 53 detects the position of the discharge mechanism 4 in the X-axis direction (more specifically, the position of the discharge port of the slit nozzle 41) based on the relative positional relationship between the scale unit 53a and the detection unit 53b. To do.

  With the configuration described above, the slit nozzle 41 can move relative to the holding surface 30 in the X-axis direction parallel to the holding surface 30 in the upper space of the holding surface 30 where the substrate 90 is held. It is said. When performing the coating process, the slit nozzle 41 is moved at a predetermined speed in the X-axis direction in a state where the resist solution is discharged from the discharge port, and scanning (discharge scanning) is performed by the slit nozzle 41 on substantially the entire surface of the substrate 90. The By such a coating process, the resist solution is uniformly applied over substantially the entire surface of the substrate 90, and a layer of the resist solution having a predetermined thickness is formed on the surface of the substrate 90. In the slit coater 10 of the present embodiment, the movement direction of the slit nozzle 41 in the coating process (discharge scanning) is the + X direction (front side).

<2. Foreign object detection function>
Further, the slit coater 10 has a function of detecting a foreign substance or the like that may come into contact with the slit nozzle 41 during the coating process.

  2 and 3 are side views showing examples of foreign matters and the like that may come into contact with the slit nozzle 41. FIG. In the coating process, the slit nozzle 41 is disposed above the substrate 90 such that the discharge port as the lower end thereof is separated from the substrate 90 by a gap of, for example, 50 μm to 200 μm. Moved.

  In the region where the discharge port of the slit nozzle 41 should move in the coating process (hereinafter referred to as “movement target region”), the foreign matter Fm adhering to the upper surface of the substrate 90 as shown in FIG. In some cases, a raised portion 90a of the substrate 90 (a portion raised from the other portion generated by the foreign matter Fm sandwiched between the substrate 90 and the holding surface 30) 90a may exist. When the application process is performed with the foreign matter Fm and the raised portion 90a being present, the foreign matter Fm, 90a and the discharge port (lower end portion) of the slit nozzle 41 come into contact with each other, and the slit nozzle 41 may be damaged. May occur.

  For this reason, in the slit coater 10, as shown in FIG. 1, for detecting foreign matter etc. by contact, the foreign matter etc. can be detected before the discharge port of the slit nozzle 41 comes into contact with such foreign matter etc. A bumper member 6 as a member is fixedly attached to the + X side (front side) of the slit nozzle 41. Hereinafter, the foreign object Fm to be detected and the raised portion 90a are collectively referred to as “detected object” NG.

  FIG. 4 is a perspective view schematically showing the configuration of the slit coater 10 related to the detection of the detection object NG. 5 and 6 are side views of this configuration from the -Y side (left side).

  As shown in these drawings, the bumper member 6 is a plate-shaped member (plate) having a long and longer rectangular shape than the size of the slit nozzle 41 in the Y-axis direction, and has a thickness of about 5 mm to 20 mm, for example. Consists of metals such as stainless steel. The bumper member 6 is fixed to the side surface on the + X side of the slit nozzle 41 so that the longitudinal direction thereof is along the Y-axis direction and the thickness direction is the X-axis direction. As a result, the bumper member 6 is relatively fixed to the sharp discharge port of the slit nozzle 41 at a predetermined distance on the + X side (the front side of the progress of the slit nozzle 41 in the coating process).

  Further, in any of the Y-axis directions in which the slit nozzle 41 extends, the bumper member 6 is disposed so that the lower end portion thereof is positioned, for example, about 10 μm below the discharge port (lower end portion) of the slit nozzle 41. The As a result, the imaginary line extending horizontally in the + X direction from the lower end of the slit nozzle 41 is surely blocked by the bumper member 6.

  As shown in FIG. 4, the bumper member 6 is fixed with bolts or the like at predetermined intervals in the Y-axis direction at a plurality of fixing positions 61 with respect to the substantially flat side surface of the slit nozzle 41. The long bumper member 6 may be bent by its own weight, but by adopting such a fixing method, it is possible to prevent its own weight from being bent, and the entire lower end of the bumper member 6 extends along the Y-axis direction. It can be arranged substantially horizontally.

  Here, it is assumed that the detected object NG exists in the movement target region as shown in FIG. When the slit nozzle 41 is further moved to the + X side from the state of FIG. 5, the bumper member 6 is disposed on the + X side of the discharge port of the slit nozzle 41, so that the detected object NG is a slit as shown in FIG. Prior to contact with the discharge port of the nozzle 41, the bumper member 6 is contacted. Due to this contact, the bumper member 6 generates a vibration whose main vibration direction is the X-axis direction. The slit coater 10 detects the presence of the detected object NG by detecting such vibration.

  For this reason, the slit coater 10 is provided with a vibration sensor 7 for detecting vibration. However, the vibration sensor 7 is not directly attached to the bumper member 6, but is attached to the slit nozzle 41 as shown in FIGS. Therefore, the vibration sensor 7 detects vibration generated in the slit nozzle 41 by transmission of vibration generated in the bumper member 6. That is, the vibration sensor 7 indirectly detects the vibration of the bumper member 6 by detecting the vibration of the slit nozzle 41.

  The vibration sensor 7 has a configuration in which two large and small cylindrical members are overlapped. The main body 71 is a relatively large cylindrical member, and the mounting portion 72 is a relatively small cylindrical member. Hereinafter, the direction of the axes of the two cylindrical members of the vibration sensor 7 (the direction in which the main body portion 71 and the attachment portion 72 are arranged) is referred to as the “axial direction” of the vibration sensor 7. This axial direction is the vibration detection direction of the vibration sensor 7.

  The main body 71 has a structure in which a piezoelectric element is sandwiched between a base and a weight along the axial direction, and outputs an electrical signal proportional to the acceleration in the axial direction. Thereby, the vibration sensor 7 detects the vibration along the axial direction as an electric signal.

  The mounting portion 72 is threaded like a tip of a bolt. The mounting portion 72 is screwed into a threaded mounting hole 41 a formed along the X-axis direction on the −X side side surface of the slit nozzle 41. As shown in FIG. 4, the mounting hole 41 a is desirably a central position in the longitudinal direction (Y-axis direction) of the slit nozzle 41. Thereby, the vibration sensor 7 is attached to the side surface of the slit nozzle 41 on the −X side in a state where the axial direction is along the X-axis direction.

  As described above, the vibration sensor 7 is arranged so that the vibration detection direction is along the X-axis direction. As described above, the main vibration direction of the vibration of the bumper member 6 caused by the contact with the detection object NG is the X-axis direction. Therefore, the vibration detection direction of the vibration sensor 7 coincides with the main vibration direction of the vibration of the bumper member 6, and the vibration sensor 7 increases the vibration of the bumper member 6, that is, the presence of the detected object NG. It can be detected with sensitivity.

  The vibration detected by the vibration sensor 7 is input to the control unit 1 as an electric signal. Thereby, the control part 1 can grasp | ascertain presence of the to-be-detected body NG.

<3. Application process>
Next, the details of the coating process with such detection of the detection object NG will be described. FIG. 7 is a diagram showing a flow of operations of the slit coater 10 that applies a resist solution to the substrate 90. This operation is performed for each substrate 90 to be coated. Hereinafter, the operation of the slit coater 10 will be described with reference to this figure. Note that the operation control of each part in this description is performed by the control part 1 unless otherwise specified.

  First, the substrate 90 is carried into the coating processing unit 2 by the transport mechanism outside the coating processing unit 2 and delivered to the lift pins LP. In response to receiving the substrate 90, the lift pins LP are lowered and buried in the stage 3. As a result, the loaded substrate 90 is placed at a predetermined position on the holding surface 30 of the stage 3, and is further sucked and held by the vacuum suction port. When such a substrate 90 is carried in, the slit nozzle 41 is on standby at the retracted position shown in FIG. 1 (step S11).

  Next, the height of the discharge port of the slit nozzle 41 is adjusted by the elevating mechanism 42b. At this time, the lower end portion of the bumper member 6 is positioned above the upper surface of the substrate 90 (step S12). Subsequently, the slit nozzle 41 is moved by the moving mechanism 5 to a predetermined start position (more specifically, a position immediately above the −X side end of the substrate 90) where the discharge of the resist solution should be started (step S13). ).

  Next, the discharge of the resist solution is started from the discharge port of the slit nozzle 41 toward the substrate 90 (step S14). At the same time, the horizontal movement of the slit nozzle 41 at a predetermined speed is started toward the + X side by the moving mechanism 5 (step S15). That is, a coating process (discharge scanning) is started in which the slit nozzle 41 discharges the resist liquid onto the substrate 90 while moving on the substrate 90.

  Such a coating process is continued until the slit nozzle 41 moves to a predetermined end position (more specifically, a position immediately above the + X side end of the substrate 90) (step S17). On the other hand, while the coating process is continued, the control unit 1 monitors whether or not the detected object NG exists in the movement target area of the slit nozzle 41. That is, it is monitored whether the vibration sensor 7 detects vibration (step S16).

  If vibration is detected by the vibration sensor 7 by this monitoring (Yes in step S16), the coating process is forcibly stopped at that time. That is, the discharge of the resist solution from the slit nozzle 41 is stopped and the horizontal movement of the slit nozzle 41 is stopped. Further, as a warning, a warning screen indicating that the detected object NG has been detected is displayed on the display unit 12 of the control unit 1 (step S19).

  The bumper member 6 that comes into contact with the detected object NG is disposed at a predetermined interval in front of the progress of the discharge port of the slit nozzle 41, so that the slit nozzle 41 is immediately detected when the detected object NG is detected. By stopping the horizontal movement, the contact between the slit nozzle 41 and the detection object NG can be prevented in advance. Thereby, it can prevent effectively that the slit nozzle 41 is damaged by contact with the to-be-detected body NG.

  Moreover, since an abnormality can be notified to the operator by outputting an alarm, recovery work and the like can be performed efficiently. Note that the alarm may be performed by other methods, for example, output of an alarm sound from a speaker, lighting of a warning lamp, etc., as long as the operator can know the occurrence of an abnormal situation.

  After such step S19 is executed, the slit nozzle 41 is raised by the elevating mechanism 42b and further moved to the retracted position by the moving mechanism 5 (step S20). Subsequently, the substrate 90 is pushed up from the holding surface 30 by raising the lift pins LP, and in this state, the substrate 90 is unloaded from the coating processing unit 2 by the external transport mechanism (step S21). Since this substrate 90 has not been subjected to the coating process, it is distinguished from other substrates 90 that have completed the coating process. In addition, when the bumper member 6 is damaged due to contact with the object to be detected NG, the bumper member 6 is replaced. In this case, as shown in FIG. 3, it is considered that the foreign matter Fm is attached to the stage 3, and therefore it is preferable to perform a recovery operation such as cleaning the stage 3.

  On the other hand, when the object to be detected NG is not detected in the coating process and the slit nozzle 41 moves to the predetermined end position (Yes in step S17), the coating process is completed normally, and the normal end process is performed. Is made. That is, the discharge of the resist solution from the slit nozzle 41 is stopped (step S18), and the slit nozzle 41 is moved to the retracted position by the moving mechanism 5 (step S20). Then, the substrate 90 on which the coating process has been completed is unloaded from the coating processing unit 2 (step S21).

  As described above, in the slit coater 10, the vibration sensor 7 is not attached directly to the bumper member 6 but attached to the slit nozzle 41. For this reason, the damaged bumper member 6 can be replaced while the vibration sensor 7 remains attached to the slit nozzle 41. Therefore, it is not necessary to attach the vibration sensor 7 each time the bumper member 6 is replaced, the bumper member 6 can be replaced quickly, and the replacement cost can be reduced.

  Further, since the vibration sensor 7 is attached not to the bumper member 6 but to the slit nozzle 41, it is possible to effectively detect vibration caused by an abnormality other than vibration due to contact between the detected object NG and the bumper member 6. For example, when a foreign object is sandwiched between the discharge mechanism 4 and the traveling rail 51, the movement of the discharge mechanism 4 is hindered, and the discharge mechanism 4 including the slit nozzle 41 generates vibrations different from usual. Such running abnormality of the discharge mechanism 4 leads to unnecessary application of the resist solution to the surface of the substrate 90. However, the vibration sensor 7 can also detect vibration related to the running abnormality, so that application failure occurred. The substrate 90 can be detected effectively.

<4. Other embodiments>
Although the embodiment of the present invention has been described above, the present invention is not limited to the above-described embodiment (hereinafter referred to as “first embodiment”), and various modifications are possible. Hereinafter, such other embodiments will be described.

<4-1. Second form: plural parts>
In the first embodiment, the bumper member 6 is composed of a single member, but may be composed of a plurality of partial materials. FIG. 8 is a diagram illustrating an example in which the bumper member 6 is configured by a plurality of partial members 62.

  The bumper member 6 shown in the example of the figure is composed of five partial members 62. These five partial members 62 are arranged along the Y-axis direction, and are fixed to the + X side surface of the slit nozzle 41 with bolts or the like at a plurality of fixing positions 63, respectively.

  Since the bumper member 6 is for making contact with the minute object to be detected NG, in order to increase the detection accuracy, the lower surface of the bumper member 6 facing the substrate 90 is flat with high accuracy at a strict level. It is desirable to be a surface. However, with the recent increase in size of the slit nozzle 41, the size required in the longitudinal direction (Y-axis direction) of the bumper member 6 is also increased to, for example, about 2000 mm. For this reason, if the bumper member 6 is composed of a single member, it is very difficult to form a strictly flat surface over the entire surface corresponding to the lower surface, and the manufacturing cost of the bumper member 6 increases. It will be. On the other hand, if the bumper member 6 is composed of a plurality of partial members 62 as in the second embodiment, the size of one partial member 62 in the longitudinal direction can be made relatively short. Processing on the surface is much easier, and the manufacturing cost of the entire bumper member 6 can be greatly reduced.

  In addition, when replacing the damaged bumper member 6, it is not necessary to replace the entire bumper member 6, and only the damaged partial material 62 out of the plurality of partial materials 62 needs to be replaced. It can be greatly reduced.

  Further, assuming that the vibration sensor is directly attached to the bumper member 6 here, when the bumper member 6 is constituted by a plurality of partial members 62, the vibration sensor is attached to each of the plurality of partial members 62. There is a need. On the other hand, in the slit coater 10 according to the present embodiment, the vibration sensor 7 is attached to the slit nozzle 41, so that the vibration of all the partial materials 62 can be detected by only one vibration sensor 7. Therefore, the manufacturing cost can be reduced also by this.

<4-2. Third form: Inclination>
In the first embodiment, the bumper member 6 is configured by a plate-shaped member having a rectangular cross section, and has a constant width (thickness) in the X-axis direction, but has an inclined shape in which the width in the X-axis direction becomes smaller toward the lower side. It may be. FIG. 9 is a diagram illustrating an example in which the lower portion 6b of the bumper member 6 is inclined.

  The bumper member 6 shown in the example of the figure includes an upper part 6a having a constant width in the X-axis direction and a lower part 6b having a width in the X-axis direction that decreases as it goes downward. As shown in the figure, the width t2 of the lower surface of the bumper member 6 in the X-axis direction is smaller than the width t1 of the upper surface, and the lower portion 6b of the bumper member 6 gradually becomes narrower as the width in the X-axis direction becomes lower.

  In the slit coater 10 of the present embodiment, since the vibration sensor 7 is attached to the slit nozzle 41, the bumper member 6 needs to have a mass that can effectively transmit the vibration to the slit nozzle 41. For this reason, it is desirable that the width of the bumper member 6 in the X-axis direction be as large as possible. On the other hand, as described above, the lower surface of the bumper member 6 is desired to be a flat surface at a strict level in order to increase the detection accuracy. It is desirable that the axial width be as small as possible.

  That is, regarding the width of the bumper member 6 in the X-axis direction, a request to “make it large” and a request to “make it small” compete. In contrast, as in the third embodiment, the lower portion 6b of the bumper member 6 is formed in an inclined shape in which the width in the X-axis direction becomes smaller toward the lower side. The manufacturing cost of the bumper member 6 can be reduced while maintaining the accuracy.

  Of course, the bumper member 6 may be composed of a plurality of partial members 62 as in the second embodiment, and the lower portion of each partial member 62 may be inclined so that the width in the X-axis direction becomes smaller toward the bottom.

<4-3. Attaching to the nozzle holder>
In the first embodiment, the vibration sensor 7 is attached to the slit nozzle 41. However, since the vibration of the bumper member 6 is transmitted to the entire ejection mechanism 4, a nozzle holding portion 42 (fixing member) that fixes and holds the slit nozzle 41. The vibration of the bumper member 6 can be indirectly detected even if the vibration sensor 7 is attached to 42a and the elevating mechanism 42b) and the vibration of the nozzle holding portion 42 is detected. Therefore, you may attach the vibration sensor 7 to the fixing member 42a and the raising / lowering mechanism 42b.

  FIG. 10 is a perspective view illustrating a state from the back side (−X side) of the discharge mechanism 4. As shown in FIG. 10, the attachment position of the vibration sensor 7 may be a central position P1 in the longitudinal direction (Y-axis direction) of the fixing member 42a, positions P2 and P3 in the lifting mechanism 42b, and the like.

  Even in this case, it is desirable that the vibration detection direction of the vibration sensor 7 coincides with the main vibration direction of the bumper member 6. For this reason, when the vibration sensor 7 similar to the above is employed, a mounting hole is formed along the X-axis direction on the side surface in the X-axis direction (which may be either the −X side or the + X side), as in the first embodiment. Then, it is desirable to screw the mounting portion 72 of the vibration sensor 7 into the mounting hole.

  In addition, when the vibration sensor 7 is attached to the nozzle holding portion 42 in this way, it is possible to more effectively detect vibration caused by an abnormality other than vibration due to contact between the detected object NG and the bumper member 6.

<4-4. Other variations>
In the above description, it has been described that the direction of movement of the slit nozzle 41 in the coating process (discharge scanning) is one direction + X, and the bumper member 6 is attached only to the + X side of the slit nozzle 41. When 41 can move to both the + X side and the −X side, the bumper member 6 may be attached to both the + X side and the −X side of the slit nozzle 41. Even in this case, since the vibration sensor 7 is attached to the slit nozzle 41 and the nozzle holding portion 42, the vibration of the bumper member 6 on both the + X side and the −X side can be detected by only one vibration sensor 7. .

  In the above description, only one vibration sensor 7 is attached, but a plurality of vibration sensors 7 may be attached.

It is a perspective view which shows schematic structure of a slit coater. It is a figure which shows an example of a to-be-detected body. It is a figure which shows an example of a to-be-detected body. It is a perspective view which shows typically the structure which concerns on the detection of a to-be-detected body. It is a side view which shows typically the structure which concerns on the detection of a to-be-detected body. It is a side view which shows typically the structure which concerns on the detection of a to-be-detected body. It is a figure which shows the flow of operation | movement of a slit coater. It is a figure which shows the example at the time of comprising a bumper member with a some partial material. It is a figure which shows the example in case the lower part of a bumper member inclines. It is a perspective view which shows the mode from the back side of a discharge mechanism.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Control part 2 Application | coating process part 4 Discharge mechanism 5 Movement mechanism 6 Bumper member 7 Vibration sensor 30 Holding surface 41 Slit nozzle 42 Nozzle holding part 62 Partial material 90 Substrate

Claims (3)

A substrate processing apparatus for applying a processing liquid to a substrate held on a substantially horizontal holding surface,
A nozzle capable of discharging the processing liquid from the slit-shaped discharge port to the substrate;
Holding means for fixing and holding the nozzle so as to have a bridging structure straddling the holding surface, and the discharge port along a substantially horizontal first direction;
Moving means for moving the holding means and the nozzle relative to the substrate in a substantially horizontal second direction orthogonal to the first direction, and causing the nozzle to perform ejection scanning on the substrate;
A detection member that is fixedly provided on the front side of the discharge scanning of the nozzle so as to be positioned below the lower end of the nozzle and extends along the first direction;
A single vibration detecting means attached to the nozzle for detecting the vibration of the nozzle;
Control means for controlling the moving means based on the detection result of the vibration detecting means;
Equipped with a,
The detection member is composed of a plurality of partial members arranged along the first direction,
The substrate processing apparatus according to claim that you have been interchangeable for each component materials. A substrate processing apparatus for applying a processing liquid to a substrate held on a substantially horizontal holding surface,
A nozzle capable of discharging the processing liquid from the slit-shaped discharge port to the substrate;
Holding means for fixing and holding the nozzle so as to have a bridging structure straddling the holding surface, and the discharge port along a substantially horizontal first direction;
Moving means for moving the holding means and the nozzle relative to the substrate in a substantially horizontal second direction orthogonal to the first direction, and causing the nozzle to perform ejection scanning on the substrate;
A detection member that is fixedly provided on the front side of the discharge scanning of the nozzle so as to be positioned below the lower end of the nozzle and extends along the first direction;
A single vibration detecting means attached to the holding means for detecting the vibration of the holding means;
Control means for controlling the moving means based on the detection result of the vibration detecting means;
Equipped with a,
The detection member is composed of a plurality of partial members arranged along the first direction,
The substrate processing apparatus according to claim that you have been interchangeable for each component materials. In the substrate processing apparatus of Claim 1 or Claim 2,
The lower portion of the detecting member is a substrate processing apparatus according to claim inclined shape der Rukoto said second width is smaller as lower.

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