KR20060052850A - 반도체 산업을 위한 수소화물 가스 정제 - Google Patents
반도체 산업을 위한 수소화물 가스 정제 Download PDFInfo
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- KR20060052850A KR20060052850A KR1020067001411A KR20067001411A KR20060052850A KR 20060052850 A KR20060052850 A KR 20060052850A KR 1020067001411 A KR1020067001411 A KR 1020067001411A KR 20067001411 A KR20067001411 A KR 20067001411A KR 20060052850 A KR20060052850 A KR 20060052850A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/86—Catalytic processes
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- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B25/00—Phosphorus; Compounds thereof
- C01B25/06—Hydrogen phosphides
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- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
- C01B3/50—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
- C01B3/50—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification
- C01B3/56—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by contacting with solids; Regeneration of used solids
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/04—Hydrides of silicon
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B35/00—Boron; Compounds thereof
- C01B35/02—Boron; Borides
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- C01B6/00—Hydrides of metals including fully or partially hydrided metals, alloys or intermetallic compounds ; Compounds containing at least one metal-hydrogen bond, e.g. (GeH3)2S, SiH GeH; Monoborane or diborane; Addition complexes thereof
- C01B6/34—Purification; Stabilisation
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01C—AMMONIA; CYANOGEN; COMPOUNDS THEREOF
- C01C1/00—Ammonia; Compounds thereof
- C01C1/02—Preparation, purification or separation of ammonia
- C01C1/024—Purification
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/32—Hydrogen storage
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- Silicon Compounds (AREA)
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Abstract
Description
Claims (21)
- 가스 스트림의 오염물질의 수준을 약 10억 분의 100(ppb) 이하로 감소시키기 위해서 수소화물 가스 스트림을, 가스에 의해 실질적으로 영향을 받지 않는 물질인, 일정량의 란탄족 금속 산화물을 포함하는 물질과 접촉시키는 것을 포함하는 수소화물 가스의 스트림으로부터의 오염물질 제거 방법.
- 제1항에 있어서, 란탄족 금속이 (La), 세륨(Ce), 프라세오디뮴(Pr), 네오디뮴(Nd), 프로메튬(Pm), 사마륨(Sm), 유로퓸(Eu), 가돌리늄(Gd), 테르븀(Tb), 디스프로슘(Dy), 홀뮴(Ho), 에르븀(Er), 툴륨(Tm) 및 이테르븀(Yb)으로 구성된 군으로 부터 선택되는 방법.
- 제1항에 있어서, 란탄족 금속이 La, Ce 및 Sm으로 구성된 군으로부터 선택되는 방법.
- 제1항에 있어서, 물질이 높은 전기양성 금속 또는 높은 전기양성 금속 산화물을 추가로 포함하는 방법.
- 제1항에 있어서, 물질이 스칸듐(Sc), 이트륨(Y) 또는 루테튬(Lu)으로 구성된 군으로부터 선택된 희토류 금속, 란탄족 금속 또는 이의 산화물, 또는 이들의 조합 물을 추가로 포함하는 방법.
- 제1항에 있어서, 물질이 적어도 하나의 전이 금속 또는 이의 산화물을 추가로 포함하는 방법.
- 제6항에 있어서, 전이금속이 망간, 크로뮴, 몰리브덴, 바나듐, 티타늄 및 지르코늄으로 구성된 군으로부터 선택되는 방법.
- 제1항에 있어서, 물질이 지지기질 상에 지지되는 방법.
- 제1항에 있어서, 물질이 약 100 m2/g 미만의 표면적을 가지는 방법.
- 제1항에 있어서, 물질이 약 75 m2/g 미만의 표면적을 가지는 방법.
- 제1항에 있어서, 물질이 약 50 m2/g 미만의 표면적을 가지는 방법.
- 제1항에 있어서, 물질이 약 20 m2/g 미만의 표면적을 가지는 방법.
- 제1항에 있어서, 물질이 25 ℃ 및 15 psig에서 물질의 단위 리터당 적어도 산소 약 4 리터의 산소 용량을 가지는 방법.
- 제13항에 있어서, 물질이 25 ℃ 및 15 psig에서 물질의 단위 리터당 적어도 수증기 약 4 리터의 수증기 용량을 가지는 방법.
- 제1항에 있어서, 수소화물 가스가 암모니아, 아르신, 포스핀, 디보란, 디실란, 게르만, 실란 및 수소로 구성된 군으로부터 선택되는 방법.
- 제1항에 있어서, 하나 이상의 오염물질이 물, 이산화 탄소, 산소, 비메탄계 탄화수소, 수소화물 가스 산화 생성물, 이차 수소화물 가스 오염물질, x가 1-3인 SOx 및 NOx로 구성된 군으로부터 선택되는 방법.
- 제16항에 있어서, 하나 이상의 오염물질이 물, 산소 및 이의 조합물로 구성된 군으로부터 선택되는 방법.
- 제1항에 있어서, 하나 이상의 오염물질이 휘발성 금속 화합물인 방법.
- 제1항에 있어서, 하나 이상의 오염물질이 금속 함유 화합물인 방법.
- 란탄족 산화물의 무게가 3-20 중량%를 포함하는, 필수적으로 구리, 철 또는 니켈 중 적어도 하나가 없는 수소화물 가스의 정제용 조성물.
- 제20항에 있어서, 조성물이 산화망간을 추가로 포함하는 조성물.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US48885003P | 2003-07-21 | 2003-07-21 | |
US60/488,850 | 2003-07-21 | ||
US51335103P | 2003-10-22 | 2003-10-22 | |
US60/513,351 | 2003-10-22 |
Publications (2)
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KR20060052850A true KR20060052850A (ko) | 2006-05-19 |
KR100945095B1 KR100945095B1 (ko) | 2010-03-02 |
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KR1020067001411A KR100945095B1 (ko) | 2003-07-21 | 2004-07-21 | 반도체 산업을 위한 수소화물 가스 정제 |
Country Status (6)
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US (1) | US7510692B2 (ko) |
EP (1) | EP1648592B1 (ko) |
JP (1) | JP4664913B2 (ko) |
KR (1) | KR100945095B1 (ko) |
TW (1) | TWI316871B (ko) |
WO (1) | WO2005009593A1 (ko) |
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EP1641553A1 (en) * | 2003-06-23 | 2006-04-05 | Entegris, Inc. | Apparatus and method for purification of corrosive gas streams |
WO2006014655A1 (en) * | 2004-07-20 | 2006-02-09 | Entegris, Inc. | Removal of metal contaminants from ultra-high purity gases |
WO2006052997A1 (en) * | 2004-11-08 | 2006-05-18 | Trustees Of Tufts College | Apparatus and methods for non-regenerative and regenerative hot gas desulfurization |
JP4210310B2 (ja) * | 2006-06-29 | 2009-01-14 | 三井金属鉱業株式会社 | 除湿・脱酸素方法 |
US7591985B2 (en) * | 2007-05-31 | 2009-09-22 | Metaloid Precursors, Inc. | Method for purifying germanium hydrides |
JP2011513591A (ja) * | 2008-03-05 | 2011-04-28 | エスアールアイ インターナショナル | シリコン太陽電池用基板およびその作製方法 |
KR101640960B1 (ko) * | 2008-11-17 | 2016-07-19 | 에어 리퀴드 어드밴스드 머티리얼즈 엘엘씨 | 저메인 정제 |
US9101876B2 (en) | 2009-02-25 | 2015-08-11 | Applied Hybrid Energy Pty Ltd. | Carbon capture |
KR102431612B1 (ko) * | 2019-02-26 | 2022-08-12 | 한국자동차연구원 | 수소충전소용 수분제거장치 |
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FR2622564B1 (fr) | 1987-10-28 | 1990-02-02 | Rhone Poulenc Chimie | Procede de purification de silane |
IT1277458B1 (it) * | 1995-08-07 | 1997-11-10 | Getters Spa | Processo per la rimozione di ossigeno da ammoniaca a temperatura ambiente |
EP0832688B1 (en) * | 1996-04-11 | 2007-08-29 | ICT Co., Ltd. | Exhaust gas purifying catalyst and exhaust gas purifying method |
JP4330666B2 (ja) * | 1996-11-29 | 2009-09-16 | 株式会社アイシーティー | 排気ガス浄化用触媒および排気ガス浄化方法 |
US6059859A (en) | 1997-09-19 | 2000-05-09 | Aeronex, Inc. | Method, composition and apparatus for water removal from non-corrosive gas streams |
JP3796744B2 (ja) * | 1997-10-16 | 2006-07-12 | 日産自動車株式会社 | 水素ガス中のco選択酸化触媒およびその製造方法ならびに水素ガス中のco除去方法 |
US6241955B1 (en) * | 1998-10-02 | 2001-06-05 | Aeronex, Inc. | Method and apparatus for purification of hydride gas streams |
JP3215680B1 (ja) * | 1999-03-18 | 2001-10-09 | 松下電工株式会社 | 水素ガス中のco除去用触媒 |
US6692545B2 (en) * | 2001-02-09 | 2004-02-17 | General Motors Corporation | Combined water gas shift reactor/carbon dioxide adsorber for use in a fuel cell system |
US6391090B1 (en) | 2001-04-02 | 2002-05-21 | Aeronex, Inc. | Method for purification of lens gases used in photolithography |
US6733734B2 (en) * | 2001-10-31 | 2004-05-11 | Matheson Tri-Gas | Materials and methods for the purification of hydride gases |
EP1641553A1 (en) | 2003-06-23 | 2006-04-05 | Entegris, Inc. | Apparatus and method for purification of corrosive gas streams |
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- 2004-07-21 US US10/565,353 patent/US7510692B2/en active Active
- 2004-07-21 JP JP2006521217A patent/JP4664913B2/ja active Active
- 2004-07-21 KR KR1020067001411A patent/KR100945095B1/ko active IP Right Grant
- 2004-07-21 EP EP04757186A patent/EP1648592B1/en active Active
- 2004-07-21 WO PCT/US2004/023491 patent/WO2005009593A1/en active Application Filing
- 2004-07-21 TW TW093121731A patent/TWI316871B/zh active
Also Published As
Publication number | Publication date |
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KR100945095B1 (ko) | 2010-03-02 |
TWI316871B (en) | 2009-11-11 |
JP2006528127A (ja) | 2006-12-14 |
US20060188420A1 (en) | 2006-08-24 |
US7510692B2 (en) | 2009-03-31 |
EP1648592A1 (en) | 2006-04-26 |
WO2005009593A1 (en) | 2005-02-03 |
JP4664913B2 (ja) | 2011-04-06 |
TW200515943A (en) | 2005-05-16 |
EP1648592B1 (en) | 2011-07-06 |
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