KR20060048416A - Apparatus for dividing a substrate into works and transporting and storing the works - Google Patents

Abstract

The conveyance of the said workpiece | work W carried out in contact with the horizontal direction which is substantially orthogonal to a conveyance direction from the division apparatus 2 which divides the sheet | seat board | substrate 100 into a single-shaped workpiece | work W during conveyance is carried out. After separating in the horizontal direction, the workpiece storage device for storing the sorting alignment conveying apparatus 3 to be aligned in the longitudinal direction substantially the same as the conveying direction, and the workpiece W aligned in connection with the separating sorting conveying apparatus 3. (4), the separation alignment conveyance apparatus 3 isolate | separates and arranges in the said longitudinal direction with the conveyance belt 6 and the separation belt 7 which isolate | separate the individual workpiece | work W in the horizontal direction during conveyance. It consists of a feed belt 8.

Sheet board, splitter, conveyer, separation belt, feed belt

Description

Separation conveyance storing apparatus of work {APPARATUS FOR DIVIDING A SUBSTRATE INTO WORKS AND TRANSPORTING AND STORING THE WORKS}

1 is a front view showing a schematic configuration of a work separation conveyance storage device according to a first embodiment of the present invention,

2 is a partial plan view of the apparatus;

3 is an enlarged front view of a main part of FIG. 1;

4 is an enlarged plan view of a part of the work storage device and the delivery mechanism;

5 is an enlarged front view of a part of the work storage device and the delivery mechanism;

6 is a side view of the workpiece storage device;

7 is an enlarged cross-sectional view of a part of the work storage device and the delivery mechanism;

8 is a plan view illustrating separation alignment conveyance of a work piece;

9 is a plan view showing a main part of a second embodiment of the present invention;

10 is a plan view showing a main part of a third embodiment of the present invention;

It is a front view which shows the principal part of the 4th Embodiment of this invention,

12A is an explanatory view of dividing a sheet substrate to form a single-shaped workpiece, a plan view of a sheet substrate in which an electronic component is respectively created in a tip component surrounded by a vertical cut surface and a horizontal cut surface;

12B is a plan view showing a single-shaped workpiece formed by dividing a sheet substrate (primary division);

It is a top view of the principal part of the conventional separated conveyance storage apparatus.

<Description of Symbols for Main Parts of Drawings>

4; Work storage device 5; Base plate

6; Conveying belt 7; Detachable belt

8; Separate transport belt 9; Idler wheel

10; Drive pulley 11; Driven pulley

12; Idler wheel 13; Driven pulley

14; Drive pulley 15; Secondary pulley

16; Tension pulley 35; A delivery mechanism

50; Storing table 53; Work storing tool

This invention relates to the workpiece | work separation conveyance storage apparatus which divides a sheet | seat board | substrate into a single-shaped workpiece | work, isolate | separates the divided workpiece | work into individual workpieces, and carries out alignment conveyance and accommodates in a workpiece storage tool.

FIG. 12A shows a sheet substrate on which an electronic component is formed, and FIG. 12B shows a single-shaped workpiece W. FIG. As shown to FIG. 12A, the sheet | seat board | substrate 100 is provided with the vertical cut place 100a and the horizontal cut place 100b. Electronic components are formed in the chip components l00c surrounded by the cut portions l00a and 100b, respectively. When the sheet substrate 100 is divided (primary division) from a vertical cut portion l00a or a horizontal cut portion l00b, a single-shaped workpiece W as shown in Fig. 12B can be obtained.

FIG. 13: is a separate conveyance storage apparatus of the workpiece | work stored in the workpiece storage tool 53 which is a magazine after separating and conveying the workpiece | work W one by one in Unexamined-Japanese-Patent No. 2004-121990.

The separate conveyance storage device of the said workpiece transfers from the front wheel 61a of the primary conveyance belt 60 which conveys the divided | segmented single-shape workpiece | work W, and the primary conveyance belt 60. The front wheel 61b of the secondary conveyance belt 62 which carries out the conveyance of the workpiece | work W which was iii) separated. The front wheels 61a and 61b have shafts in common and constitute an idler wheel 61 provided to be rotatable independently of each other.

The workpieces W conveyed in the direction of the arrow a densely and side by side on the primary conveyance belt 60 are transferred onto the secondary conveyance belt 62 at the idler wheel 61. Since the secondary conveyance belt 62 is operated in the same direction as the primary conveyance belt 60 and at a higher speed than the primary conveyance belt 60, the work W is placed on the secondary conveyance belt 62. It is separated and conveyed as W1).

On the downstream side of the secondary conveyance belt 62, the conveyance table 63 which rotates intermittently is provided. The conveyance table 63 is provided with a plurality of transfer mechanisms 64 equally arranged, and each transfer mechanism 64 is separated and conveyed by the secondary transfer belt 62 at the work transfer position P1. It suction-holds and maintains (W1) individually, and is conveyed to the workpiece storage position P2.

In the storage table 50 of the workpiece storage device 4 of the following process, the workpiece storage tool 53 which is a magazine for several workpiece storage is equally multiplied, and is lined up and conveyed in the workpiece storage position P2. The workpiece | work W1 suction-protected and hold | maintained by the transfer mechanism 64 of the table 63 is laminated | stacked in the workpiece storage tool 53, and is accommodated in order.

However, in the separate conveyance storage apparatus of the workpiece | work as mentioned above, although reliable conveyance storing of the workpiece | work W and W1 is possible, in recent years, the chip component l00c which can be obtained by dividing the workpiece | work W1 by secondary division is As it becomes further refine | miniaturized, the separation conveyance speed and the storing process speed of the workpiece | work W and W1 become higher speed further. Therefore, as mentioned above, in the process by intermittent operation | movement, such as the suction protection hold | maintenance of the workpiece | work W1, the opening at the time of storage, or the intermittent rotation of the conveyance table 63, the limit has become high speed.

This invention is made | formed in view of the said situation, Comprising: It aims at providing the separated conveyance storage apparatus of the workpiece | work which can reliably separate and receive a process even more than the conventional process speed.

According to this invention, after separating the sheet | seat board | substrate which divides a sheet | seat board | substrate into a single-shaped workpiece | work, and the said workpiece conveyed in a horizontal direction which is substantially perpendicular to a conveyance direction from the said division apparatus, and carried out, is carried out in transverse direction, A separation alignment conveying device which is aligned in a longitudinal direction substantially the same as the conveying direction, and a workpiece storage device which is connected to the separation sorting conveying device and accommodates the aligned work, wherein the separate sorting conveying device is an individual workpiece during work conveying. The separation conveyance apparatus of the workpiece | work which consists of a separating part which isolate | separates as a horizontal direction, and the alignment conveyance part etc. which align the said workpiece in the longitudinal direction can be obtained.

According to the said structure, in the separated conveyance storage apparatus which leads to division | segmentation of a sheet | seat board | substrate and storing of a workpiece | work in a workpiece storage apparatus, a series of operations, such as a separation | separation of a workpiece | work, a change of direction, and storage, are performed by the process conveyed linearly. . Therefore, the processing speed accompanying the miniaturization of chip components can meet the demand for higher speed. Moreover, the whole apparatus can be simplified and the product cost can be largely reduced, without requiring a special apparatus for workpiece transfer and storing.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described based on drawing.

The work division conveyance storage apparatus 1 shown in FIG. 1 divides the sheet | seat board | substrate 100 as shown in FIG. 12A, and makes the primary division apparatus 2 into the single-piece shaped workpiece W as shown in FIG. 12B. And the separation alignment conveyance apparatus 3 which isolate | separates and arranges and conveys the workpiece | work W carried out also in the horizontal direction which is also substantially perpendicular to the conveyance direction from the said primary division apparatus 2, and conveys one by one, and the following process It consists of a workpiece storage device (4) for laminating and storing the workpiece (W) in a workpiece storage magazine 53 (hereinafter referred to as "work storage tool") for.

As shown in FIG. 2, the separation alignment conveyance apparatus 3 consists of the separation part which isolate | separates individual workpiece | work W in the horizontal direction during conveyance, and the alignment conveyance part which aligns in a vertical direction. The separation part of the said separation alignment conveyance apparatus 3 is the conveyance belt 6 of the primary division apparatus 2 which conveys the workpiece | work W further in a horizontal direction, and conveys, and the two belts 7a and 7b of constant velocity. It consists of the primary separation belt 7 which consists of these. The separating belt 7 has a clamping part 6a which conveyance surface is substantially the same as the conveyance belt 6, and clamps the downstream end of the conveyance belt 6 at the upstream end part. Moreover, it conveys in the same direction also in the conveyance surface of substantially the same height as the conveyance belt 6. In addition, the conveyance belt 6 is a flat belt, and the separating belt 7 which consists of two belts 7a and 7b is a round belt.

As shown in FIG. 1, the separation belt 7 is attached to the drive pulley 10, the idler wheel 12, the driven pulley 11, and the idler wheel 9 rotatably installed on the base plate 5. It is wound. In addition, the separating feed belt 8 as a secondary separating belt made of a flat belt includes a drive pulley 14, an auxiliary pulley 15, and an idler wheel 12 rotatably provided on the base plate 5. ), A driven pulley 13 and a tension pulley 16 are wound. And the workpiece conveyance path is comprised by the said conveyance belt 6, the separation belt 7, and the separation conveyance belt 8.

The drive pulleys 9b (see FIG. 3) of the drive pulleys 10 and 14 and the conveyance belt 6 respectively pass through the base plate 5 and are driven by a drive mechanism not shown on the rear surface side. The conveyance speed of the conveyance belt 6, the separation belt 7, and the separation conveyance belt 8 is set so that the relationship between the separation conveyance belt 8> separation belt 7> conveyance belt 6 is established, Moreover, the speed difference is more than several times, respectively.

The delivery mechanism 35 is arrange | positioned and designed by the downstream end of the separation transfer belt 8, and the workpiece storage device 4 is arranged and designed facing the said delivery mechanism 35. As shown in FIG. In the intermittent rotation of the storage table 50 of the workpiece storage device 4, a plurality of workpiece storage tools 53 are equally arranged in a row as shown in FIG. 2. The workpiece | work W sent out by the delivery mechanism 35 in the workpiece storage position P is laminated | stacked on the workpiece storage tool 53 sequentially, and is accommodated.

In FIG. 2, the direction change guide 18, the auxiliary guide 19 which guide the workpiece | work W on the separating transfer belt 8 via the base board 17 installed at right angles from the base board 5, The sperm guide 20 is arrange | positioned, respectively. The turning guide 18 is a guide formed of a curved surface or a smooth polygonal circumference near the downstream end of the separating transfer belt 8 from the vicinity of the idler wheel 12. The guide is arranged to face the base plate 17, and is opened as the work outlet 25 between the auxiliary guide 19 and the sperm guide 20 forming the passage of the work.

As shown in FIG. 2, the workpiece discharge port 25 detects the front and rear detection sensor 21 which detects the front and back of the workpiece | work W, and the division | segmentation defective workpiece | work W in which several workpiece | work W was connected. The split sensor 22, the air injection nozzle 23 which discharges the workpiece | work W of the front and back defect by air injection, and the air injection nozzle 24 which discharges the division failure workpiece | work W are arrange | positioned and designed.

Next, the structure of the vicinity of the separation belt 7 is demonstrated by FIG. The idler wheel 9 is coaxial with the drive pulley 9b which drives the conveyance belt 6 of the primary division apparatus 2 shown in FIG. 1, and the said drive pulley 9b, and the drive pulley 9b. It consists of a pair of idlers 9a provided so as to be rotatable independently from each other, with the drive pulley 9b interposed therebetween.

The idler wheel 12 is the same axis as the conveying idler 12c for the separating transfer belt 8, and the small diameter idler 12a and the large diameter idler 12B, respectively, between the conveying idler 12c. It is configured to be rotatable independently. The pressure roller 30 is provided on the shaft center of the idler wheel 9 and clamps the conveyance belt 6 with the drive pulley 9b.

The separation belt 7 is constituted by a pair of endless belts 7a and 7b provided with the transfer belt 6 and the separation transfer belt 8 interposed therebetween. One separation belt 7a (hereinafter referred to as a small diameter side belt 7a) passes from the driving pulley 10 via a small diameter idler 12a and the other separation belt 7b (hereinafter, referred to as a large diameter side belt). (Referred to as 7b) is wound around the idler 9a and the driven pulley 11 via the large diameter idler 12b, respectively.

As shown in FIGS. 4-7, the workpiece delivery mechanism 35 is comprised from the delivery guide block 26 and the delivery guide 27. As shown in FIG. The delivery guide block 26 is provided with the delivery guide groove 34 which the bottom face and one side surface opened, corresponding to the width Wd (refer FIG. 12B) and the thickness dimension of the workpiece | work W. As shown in FIG. Moreover, the delivery guide groove 34 which covered the open side surface of the delivery guide groove 34 by the delivery guide 27, and opened only the bottom surface is formed.

The injection nozzle 32 communicates with the delivery guide groove 34 at the downstream end of the separation | transmission belt 8 by the injection nozzle 32 in the said delivery guide block 26. As shown in FIG. The injection nozzle 32 is provided in the hole at the inclination angle of 15 degree toward the downstream side of conveyance with respect to the conveyance surface 8a of the separation conveyance belt 8, for example. The air supply side of the injection nozzle 32 communicates with the connecting hole 33. Moreover, the injection nozzle 32 is connected with the compressed air supply source which is not shown in figure so that injection pressure can be adjusted through the fastening joint 31 screwed to the communication hole 33. As shown in FIG.

One end of the positioning block 41 is fixed to the plate 40 provided by being fixed to the base plate 5 in the work storage device 4 provided in contact with the delivery mechanism 35 and the downstream side of the transport as shown in FIG. 6. It is installed. One end of the fixed storage guide 42 is fixedly installed on the positioning block 41, and one end of the movable storage guide 43 is supported to be swingable.

At the other end of the positioning block 41, a clamp 41a for positioning the work storage tool 53 on the storage table 50 at a position where work storage can be accommodated opens the side facing the work storage tool 53. It is formed in the form of 'コ'.

Opposite to the delivery guide groove 34 of the delivery mechanism 35, the clamp 41a is provided with an insertion guide groove 41b opened and opened as shown in FIG. 7, and the workpiece W sent out from the delivery guide groove 34. Is inserted into the insertion guide groove 41b.

One end of the fixed storage guide 42 is fixed to the positioning block 41 and provided. At the other end of the fixed storage guide 42, a storage guide groove 42a having a lower surface and one side surface thereof is communicated with the insertion guide groove 41b. Furthermore, one end of the movable storage guide 43 is provided in the positioning block 41 so as to be swingable. The other end of the movable storage guide 43 covers the open side surface of the storage guide groove 42a of the fixed storage guide 42 so as to form a U-shaped storage guide with the lower surface opened.

In FIG. 5, FIG. 6, the several workpiece storage tool 53 radially and lined up in the storage table 50 is provided in the lower surface side of the storage table 50, and the workpiece storage position P is provided. . In addition, the slide support plate 49 and the positioning rod 48 are provided so as to be movable up and down, respectively, through the long holes 51 provided in the storage table 50 corresponding to the plurality of work storage tools 53. have. Then, after the work receiving tool 53 is pressed against the clamp 41a by the positioning rod 48 and positioned, the bottom support plate 52 of the work receiving tool 53 is lifted by the slide support plate 49. It is.

The cylinder 45 is fixed to the cylinder base 44 provided in the L shape on the said plate 40. The piston rod 45a of the cylinder 45 penetrates the cylinder support 44 so that the slide movement is possible, and the stay 46 is provided in the front-end | tip. The stay 46 is a block having a length in a direction parallel to the work storage tool 53 at the work storage position P. The stay 46 is extruded in the vicinity of both ends thereof, and one end of the rod 47 is lined up. The other end of the extrusion rod 47 is inserted into the through hole provided in the clamp 41a of the positioning block 41 so as to be slidable.

Next, the operation will be described. In FIG. 8, when the workpiece | work W divided by the primary dividing apparatus 2 and conveyed by the conveyance belt 6 and conveyed is transferred from the conveyance belt 6 to the separation belt 7, the drive pulley (B, 9b, FIG. 3) and the pressure roller 30 are clamped together with the conveyance belt 6, and it is regulated by the conveyance speed of the conveyance belt 6. As shown in FIG.

On the other hand, the head work W1 opened through the pressure roller 30 is conveyed by the separation belt 7 at high speed. In the speed difference between the conveyance belt 6 (speed V6) and the separation belt 7 (speed V7), the interval d between the workpieces (see FIG. 8) is the width Wd of the workpiece W at the speed of the conveyance belt 6. The distance which the separation belt 7 advances at the time which passes through 11) becomes the conveyance pitch p of the workpiece | work W (p = Wd * V7 / V6). Therefore, the spacing d between the workpieces is obtained by subtracting the width Wd from the conveyance pitch P. FIG. That is, it conveys at intervals of d = Wd (V7-V6) / V6, and is transferred to the separated conveyance belt 8.

3 illustrates the action of the transfer part on the separation transfer belt 8. The position at which the work conveying surface 8a of the separation transfer belt 8 and the outer circumference of the small diameter side belt 7a intersect is more than the position at which the outer circumference of the work conveying surface 8a and the large diameter side belt 7b intersects. Because of the difference in diameter, it is closer to the axis of the idler wheel 12. The value obtained by dividing the difference s of the position by the speed V7 of the separation belt 7 is that the workpiece W2 in FIG. 8 has a smaller diameter side belt 7a and a larger diameter side belt in FIG. 3. The time difference t placed on the workpiece conveyance surface 8a is set apart from each other at 7b (t = s / V7). Therefore, since the workpiece | work W is placed on the workpiece | work mounting surface 8a of the separation | separation conveyance belt 8 quickly as the diameter side belt 7a side like W3 is inclined with respect to the advancing direction like FIG. When the time t is multiplied by the speed V8 of the separation transfer belt 8, the distance S (S ==) where the small diameter side belt 7a side of the workpiece W precedes the large side diameter belt 7b side. s · V8 / V7).

After that, when the other end (large diameter side belt 7b side) of the workpiece W3 follows the contacting guide 18, the movement of the separation transfer belt 8 in the traveling direction is further restricted. The direction is switched as shown by W4 of FIG. 8 according to the polygonal guide surface 18a formed in a polygon. The workpiece | work W5 which reached | attained the polygonal guide surface 18a of the direction switching guide 18 is correct | amended so that a preceding one side may be guided to the auxiliary guide 19 and to follow the inclined guide surface 18b.

The inclined guide surface 18b of the direction changing guide 18 is installed at a slight inclination with respect to the advancing direction of the separating transfer belt 8, and the workpieces W5, W6, and W7 are downstream of the separating transfer belt 8. It is conveyed stably in the state which was always pressed against the inclined guide surface 18b until it reaches near.

As for the inclination-angle (theta) of the inclination guide surface 18b, about 0.5 degree-about 15 degree are preferable so that a workpiece | work may be press-contacted with respect to the advancing direction of the separating transfer belt 8 (small diameter side belt 7a side). In addition, the smaller the inclination angle is, the smaller the resistance is, the faster the speed of the separation transfer belt 8 is.

The front and back of the workpiece | work W6 which reached the cutout part of the said workpiece discharge port 25 is detected by the front and back detection sensor 21. In the front and back detection sensor 21, if it is determined that it is defective, the high pressure air is injected from the injection nozzle 23 and discharged into the discharge receiving box 29. The workpiece | work W6 which was not judged to be bad by the front and back detection sensor 21 is examined by the division sensor 22 whether it is divided normally (plural workpiece | work W is not connected). If it is determined that the split sensor 22 is defective, the high pressure air is injected from the injection nozzle 24 and discharged into the discharge receiver 29.

Both the front and back detection sensor 21 and the split sensor 22 are judged to be excellent products, and the workpiece W7 conveyed near the downstream end of the separate delivery belt 8 is guided to the delivery guide groove 34 of the delivery mechanism 35. And it is conveyed to the downstream end of the separation conveyance belt 8. Furthermore, as shown in FIG. 7, the workpiece | work W is press-contacted to the conveyance surface 8a of the separation conveyance belt 8 by the compressed air sprayed forward by the injection nozzle 32 to the delivery guide groove 34. As shown in FIG. .

Moreover, the downstream end of the workpiece storage device 4 which opposes the delivery mechanism 35, and the conveyance surface 8a of the separation transfer belt 8 at least has a gap corresponding to the radius of the driven pulley 13, The tip of (W) is inclined downward and comes into contact with the insertion guide groove 41b of the workpiece storage device 4, resulting in clogging of the workpiece. However, it is possible to prevent the tip side of the work W from tilting downward by accelerating forward in the state in which the work W is pressed by the injection to the front of the compressed air. Accordingly, the work blockage can be eliminated and the workpiece W is reliably inserted from the insertion guide groove 41b into the workpiece storage device 4 by feeding, and guided to the storage guide groove 42a to store the workpiece. The tool 53 is sequentially stacked and stored.

Moreover, the method of positioning the empty workpiece storage tool 53 in the storage position P of the workpiece | work W in order to make it possible to accommodate the workpiece storage tool 53 at this time is demonstrated.

In FIG. 5, while the storage table 50 is rotated, the positioning rod 48 and the slide support plate 49 which are retracted below the storage table 50 so as not to disturb the rotation thereof are stored in the storage table 50. ) Is intermittently rotated, and the empty workpiece storage tool 53 is positioned at the workpiece storage position P and stops. When the empty workpiece storage tool 53 stops at the workpiece storage position P, it is driven by an actuator (not shown) and ascends, respectively, and is inserted from the long hole 51 of the storage table 50. Thereafter, the positioning rod 48 presses the work storage tool 53 from the lower surface side, and positions the surface of the work storage tool 53 by pressing the clamp 41a tightly.

On the other hand, the slide support plate 49 is inserted into the workpiece storage tool 53 at an insertion hole in the lower portion of the workpiece storage tool 53, and the bottom plate 52 supporting the work W stored in the workpiece storage tool 53 is supported. Stop by pushing up to the limit position. When the workpiece W is accommodated in this state, the slide support plate 49 descends by the thickness dimension for each of the stored workpieces, thereby lowering the bottom plate 52, and always keeping the upper surface position of the workpiece W constant. do.

When the slide support plate 49 reaches the lower limit, the supply of the work W is temporarily stopped, and the slide support plate 49 and the positioning rod 48 are lowered to the lower retreat position of the storage table 50. In addition, the cylinder 45 moves to lower the piston rod 45a, and presses the stay 46 at the tip of the rod and the extrusion rod 47 at both ends of the stay. The tip of the extrusion rod 47 slides down the through hole of the clamp 41a, presses the upper surface of the work storage tool 53 abutting on the clamp 41a, and escapes from the clamp 41a.

Then, when the workpiece storage tool 53 is positioned on the storage table 50, the extrusion rod 47 returns to the raised position, the storage table 50 rotates one pitch intermittently, and the workpiece W is The stored work storage tool 53 is taken out from the storage position P. FIG. The next empty work storage tool 53 is positioned at the storage position P, and the storing operation is repeated again.

Moreover, the movable storage guide 43 can open and close the storage guide groove | channel 42a part by rocking up and down, and it can respond when the workpiece | blocking etc. generate | occur | produce in the storage guide groove | channel 42a part. .

9 shows a second embodiment. In the first embodiment, the direction change guide 18 is a polygon, but as shown in FIG. 9, the direction change guides 28 and 9 have a curved guide surface 28a and an inclined guide surface 28b. Other than the switching guide 28, it is the same as FIG. 8). It goes without saying that the inclination angle θ1 of the inclined guide surface 28b is the same as the inclination angle θ of FIG. 8.

10 shows a third embodiment. In the first embodiment, the storage table 50 is a rotary table, but a method using the linear table 55 as shown in FIG. 10 may be used. In this case, it is the same as that of 1st Embodiment except that a table goes straight.

In addition, even if the storage table 50 is a rotary table as described above or the linear table 55, the storage direction of the work storage tool 53 is inclined angle θ with respect to the advancing direction of the separate transfer belt 8 of the work W. It is preferable to be provided in parallel with the inclined guide surface 18b or 28b provided in the figure) and to face the feeding of the workpiece W in the separate transfer belt 8.

11 shows a fourth embodiment. This embodiment prevents the unstable storage of the workpiece | work which arises by making the sheet | seat board | substrate 100 into an important cause. That is, in the sheet | seat board | substrate 100 shown to FIG. 12A, when the said board | substrate 100 is produced, thick unevenness may generate | occur | produce. For example, in the case of the sheet | seat board | substrate 100 shown to FIG. 12B, the thickness dimension is thick in the upper part of a longitudinal direction, and it tends to become thin as it goes to a lower part.

When the sheet substrate 100 having such a tendency is used, the workpiece W laminated in the storage tool 53 is stored in an inclined state because variations in thickness occur in the front-rear direction. If such storage is carried out, for example, there may be a phenomenon such as rotation of the deposited metal in a subsequent step such as electrode preparation.

In this embodiment, in order to solve the said problem, when supplying the sheet | seat board | substrate 100 to the primary dividing apparatus 2, it is going to supply the sheet | seat board | substrate 100 by 180 degrees reversely every sheet.

Specifically, the reverse conveyance apparatus 70 which has an inversion function was provided as the supply apparatus which supplies the sheet | seat board | substrate 100 to the delivery side of the primary dividing apparatus 2. In the inversion conveyance apparatus 70, the sheet | seat board | substrate 100 is taken out from the sheet | seat board | substrate 75 which the sheet | seat board | substrate 100 was piled up, and is accommodated, for example, ), For example, a structure in which a reversing function is provided in the conveying machine 71 placed on the placing point A defined on the conveying belt 6 immediately before the primary dividing device 2 is used. In detail, the said conveyer 71 moves the movement mechanism from the upper side of the sheet | seat board stocker 75 to the upper side of the mounting point A of the primary division apparatus 2, for example, the sheet | seat board stocker 75 The rail-type movement mechanism 74 comprised by combining the rail 71a arrange | positioned and arranged along the rail 71a and the moving body 74a moving along the said rail 71a is provided between the mounting points A. And the conveyer 71 adsorb | sucks on the lower part of the moving body 74a of the said moving mechanism 74 via the support rod 72 (corresponding to the inversion part) which gives a movement of an up-down direction and an inversion direction. For example, the adsorption head 73 which made the sheet | seat board | substrate 100 adsorb | suck by the given vacuum suction force is provided, and is comprised.

As the action of the reverse conveyance device 70, at the point where the sheet substrate stocker 75 is present, the support rod 72 is first lowered to bring the adsorption head 73 into close contact. Next, a vacuum suction force is applied to the suction head 73 to adsorb the sheet substrate 100. Then, after returning to the upper conveyance position by the raising and lowering of the support rod 72, the sheet | seat board | substrate 100 is conveyed to the mounting point A of the primary dividing apparatus 2 by the movement of the movable body 74a. Let's do it. In the middle of this conveyance, the support rod 72 is rotated, the direction of the suction head 73 is reversed, and the direction of the sheet substrate 100 is reversed by 180 degrees. And the sheet | seat board | substrate 100 which completed the reversal is mounted on the conveyance belt 6 on the mounting point A using the lowering of the support rod 72 and the detachment of the suction head 73. FIG.

In this way, the sheet substrate 100 is inverted at an interval of one sheet, and the sheet substrate 100 is placed on the mounting point A on the conveyance belt 6. The single-shaped workpiece | work W which consists of these is piled up in the same direction. Since the single-shaped workpiece | work W which consists of the following one sheet board | substrate 100 is laminated | stacked in the direction opposite to it (it is inverted and laminated for every one sheet board | substrate 100), the sheet | seat board | substrate 100 Even if thick unevenness | corrugation generate | occur | produced, the thickness deviation of the front-back direction of the workpiece | work W is corrected, and the favorable workpiece | work W can be accommodated. The storage quantity of the workpiece | work W in the workpiece storage tool 53 at this time is preferably even-numbered by conversion of the sheet | seat board | substrate 100. FIG. Of course, the adsorption | suction used for conveyance of the sheet | seat board | substrate 100 is not limited to vacuum adsorption, and may be a structure which adsorb | sucks a sheet | seat board | substrate electrostatically, for example.

In addition, this invention is not limited to the said embodiment as it is, In an implementation step, a component can be modified and actualized in the range which does not deviate from the summary. In addition, various inventions can be formed by appropriate combinations of a plurality of components disclosed in the above embodiments. For example, some components may be deleted from all the components shown in the embodiment. Furthermore, the components may be combined in different embodiments.

According to this invention, in the separated conveyance storage apparatus which leads to division | segmentation of a sheet | seat board | substrate and storing of a workpiece | work in a workpiece storage apparatus, a series of operations, such as a separation | separation of a workpiece | work, direction change, and storage, are performed by the process conveyed linearly. . Therefore, the processing speed accompanying the miniaturization of chip components can meet the demand for higher speed. Moreover, the whole apparatus can be simplified and the product cost can be largely reduced, without requiring a special apparatus for workpiece transfer and storing.

Claims (27)

A dividing device for dividing the sheet substrate into a single-shaped workpiece, A separation-aligned conveying apparatus for aligning the workpieces, which are carried out in a horizontal direction substantially perpendicular to the conveying direction, from the dividing apparatus, in a horizontal direction during conveyance, and then aligning in the longitudinal direction substantially the same as the conveying direction, It is provided with the workpiece storage device which is connected to the said separate alignment conveyance apparatus, and accommodates the aligned workpiece | work, The said separate alignment conveyance apparatus is a separated conveyance apparatus of the workpiece | work which consists of the separation part which isolate | separates individual workpiece | work in the horizontal direction, and the alignment conveyance part which aligns the said workpiece | work in the vertical direction during workpiece conveyance. The method of claim 1, The separating part comprises a separating belt consisting of a conveyance belt and two belts at constant speed, which are connected and conveyed in the lateral direction, and the conveying surface of the separating belt is provided substantially the same as the conveying belt. And a gripping portion for pinching the downstream end of the conveying belt at an upstream end of the separating belt, wherein the separating belt moves in the same direction at substantially the same height as the conveying belt, and the separating belt The conveyance speed of the said conveyance speed was made faster than the conveyance speed of the said conveyance belt, The separated conveyance storage apparatus of the workpiece | work characterized by the above-mentioned. The method of claim 2, The said clamping part provided the pulley which supports the said conveyance belt, and the said 2nd belt | belt idler provided concentrically to the said pulley concentrically. The separated conveyance storage apparatus of the workpiece | work characterized by the above-mentioned. The method of claim 2 or 3, The said conveyance belt is a flat belt, and the separation belt which consists of said two belts is a round belt, The separated conveyance storage apparatus of the workpiece | work characterized by the above-mentioned. The method of claim 1, The said arrangement conveyance part consists of the 1st direction switching means of a workpiece | work, the 2nd direction switching means of a workpiece | work, the alignment conveyance means of a workpiece | work, and the workpiece conveyance discrimination processing part characterized by the above-mentioned. The method of claim 5, wherein The 1st direction switching means of the said workpiece has the conveyance surface substantially the same as the said two belts in the downstream end of the separation belt which consists of said two belts, and an upstream end is proximate between the two belts of the said separation belt. A concentrically provided pulley for upstream end of the separating conduit belt, which is installed in an intervening manner, for supporting the upstream end of the separating conduit belt, and two idlers for the separating belt provided to closely sandwich the pulley. And setting the idler diameter so that one conveying surface of the two separating belts is at the same height as the conveying surface of the separating conveying belt, and changing the other idler diameter so that the other one of the separating belts becomes higher than the separating belt. The separated conveyance storage apparatus of the workpiece | work which was set. The method of claim 6, The said separated feed belt is a flat belt, The separated conveyance storage apparatus of the workpiece | work characterized by the above-mentioned. The method of claim 5, wherein The second direction switching means of the workpiece is provided with a guide in parallel with the upper part of the separation transfer belt, and along the workpiece along the direction switching portion provided on the upstream outer periphery of the separation transfer belt of the guide. Separation conveyance storage apparatus of the workpiece | work which was set as the structure to switch. The method of claim 8, The said direction change part was made into the polygon which made the outer periphery convex from the upstream side to the downstream side of the said separation transmission belt, The separated conveyance storage apparatus of the workpiece | work characterized by the above-mentioned. The method of claim 8, The said direction change part was made into the arc shape which made an outer periphery convex from the upstream side to the downstream side of the said separation transmission belt, The separated conveyance storage apparatus of the workpiece | work characterized by the above-mentioned. The method of claim 5, wherein Alignment conveyance means of a workpiece provides a guide close to the upper part of the said separation conveyance belt, and forms the guide substantially in a straight line from the upstream side to the downstream side of the said separation conveyance belt, and conveys a workpiece by Separation conveyance storage apparatus of the workpiece | work characterized by setting it as the inclined surface of the direction which presses a workpiece | work. The method of claim 11, The said inclined surface has the angle of 15 degrees or less with respect to the conveyance direction of the said separated feed belt, The separated conveyance storage apparatus of the workpiece | work characterized by the above-mentioned. The method according to claim 8 or 11, wherein The guide of the conveyance downstream of the said 2nd direction switching means, and the guide of the conveyance upstream of the alignment conveyance means of the said workpiece are connected smoothly, The separated conveyance storage apparatus of the workpiece | work characterized by the above-mentioned. The method of claim 5, wherein The determination processing unit for determining whether the work is defective has front and back detection means having a front and back detection sensor and a division detection means having a division sensor for detecting division failure of the work, and the detection result from the front and back detection means or the division detection means. It consists of the discharge | ejection means of the defective workpiece which discharge | emits a defective workpiece | work, and was provided in the downstream side of the said separation conveyance belt. The method of claim 14, The discharging means of the said defective workpiece is by blowing of compressed air, The separated conveyance storage apparatus of the workpiece | work characterized by the above-mentioned. The method according to any one of claims 5, 11, 14 and 15, Separation processing unit of the workpiece, characterized in that the determination processing unit whether the workpiece is defective or not provided in the alignment conveying means of the workpiece. The method of claim 1, And said workpiece storage device comprises a workpiece storage means, a guide means for storing a workpiece in said workpiece storage means, and a workpiece feeding means for sending a workpiece to said guide means. The method of claim 17, The work storage means includes: a work storage tool for stacking and storing the work; a transport means for carrying in and out the work storage tool; and a work storage tool fixing means for fixing the work storage tool at the storage position; Separation conveyance storage apparatus of the workpiece | work which consists of a workpiece height adjustment means in a workpiece storage tool. The method of claim 18, The said workpiece height adjustment means inserts a slide support plate from the lower part of the said workpiece storage tool, and descend | falls as much as the thickness of a workpiece | work each time the said workpiece is accommodated, The conveyance storage apparatus of the workpiece | work characterized by the above-mentioned. The method of claim 17, The guide means is provided immediately above and in the vicinity of the work storage tool, and a cross section located at an extension of an inclined surface provided in the alignment conveyance means of the work is made up of a guide groove of an inverted-co shape, and the work is in the longitudinal direction Separation conveyance storage apparatus of the workpiece | work carried by the said guide groove from the said inclined surface. The method of claim 20, The guide groove is at least partially opened and closed, characterized in that the separated conveyance storage device for the work. The method of claim 17, The said workpiece sending means provided the sending mechanism which accelerates and delivers a workpiece | work in the guide groove extended and provided in the upper downstream end of the said separation delivery belt, The separated conveyance storage apparatus of the workpiece characterized by the above-mentioned. The method of claim 22, The said delivery mechanism provided the injection nozzle which makes the cross section of the said guide groove blow out compressed air toward the said workpiece storage tool side from the upper bottom part of the reverse co-shape, The separated conveyance storage apparatus of the workpiece | work characterized by the above-mentioned. The method of claim 18, The said conveying means consists of a storage table which roughly lined the workpiece storage tool with the workpiece storage tool, The separated conveyance storage apparatus of the workpiece | work characterized by the above-mentioned. The method of claim 18, The said conveying means consists of the linear table which lined up the workpiece storage tool in substantially linear shape, The separated conveyance storage apparatus of the workpiece | work characterized by the above-mentioned. The method of claim 1, And a supply means for supplying the sheet substrate to the dividing apparatus, wherein the supply means takes out a sheet substrate stocker for repeatedly accommodating the sheet substrate and the sheet substrate in the sheet substrate stocker one by one. It is further comprised by the reverse conveyance apparatus which inverts a direction and supplies it to the said dividing means, The separated conveyance storage apparatus of the workpiece characterized by the above-mentioned. The method of claim 26, The said reverse conveyance apparatus is comprised by the adsorption | suction part which takes out a sheet | seat board | substrate from inside the said sheet | seat substrate stocker by adsorption, the inverting part which inverts an adsorption part, and the moving mechanism which moves the adsorption part which completed the inversion to the accommodating part of the said splitting apparatus. Separation conveyance storage apparatus of the workpiece | work characterized by the above-mentioned.

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