KR20060011898A - Photo-mask manless conveyance apparatus - Google Patents

Abstract

The present invention relates to a photomask unmanned conveying device,

On the slider 112 which is slid along two LM shafts 110 installed on the supporting plate 101, the movable plate 120 horizontally installed as the support 114 and the rotating chain 130 rotated around the support plate ( A stage transfer part 100 connected to both ends of the connection part 114a of the 114 to move the back and forth of the movable plate 120 as a driving motor 136; Moving pulleys 212 and 213 on the bottom of the movable plate 120 and main and driven pulleys 212 and 213 and 215 and the first and second driving belts 216 on the bottom of the movable plate 120. 217, the driving motor 210 is installed to give a driving force, and the contact members 230 facing each other by installing the guide member 120 having a slide bar 222 symmetrically on both sides around the moving plate ( A left and right side support part 200 which protrudes on the 120 and moves on the driving belts 216 and 217; And the first and second moving tables 331 and 332 which are transported to face the front and rear directions on the sliders 333 and 334 so that the rockers 322 and the respective moving tables 331 and 332 are installed. The vertical support 330 is installed upright, and includes a front and rear side support portion in which front and rear side spacing of the transport box is adjusted.

Photomask, Stage, Photomask Unmanned Carrier.

Description

Photo-mask manless conveyance apparatus

1 is an overall perspective view of the photomask unmanned conveying device of the present invention,

Figure 2 is an exploded perspective view of the photomask unmanned conveying device of the present invention,

Figure 3 is an exploded perspective view of the stage transfer unit of the photomask unmanned conveying device of the present invention

Figure 4a, 4b is a partial cross-sectional view of the stage photomask unmanned conveying device of the photomask unmanned conveying device of the present invention,

5 is a cross-sectional view of the operation of the stage photomask unmanned conveying device of the present invention photomask unmanned conveying device,

Figure 6 is a perspective view of the left and right side support portion of the photomask unmanned conveying device of the present invention,

Figure 7a, 7b is a partial cross-sectional view of the left and right side support portion of the photomask unmanned conveying device of the present invention,

Figure 8 is an excerpted cross-sectional view of the guide member of the left and right interval adjusting portion of the photomask unmanned conveying device.

Figure 9a is a plan view illustrating the operation of the left and right side support portion of the photomask unmanned conveying device of the present invention,

Figure 9b is a front view of the operation description of the left and right interval adjusting portion of the photomask unmanned conveying device of the present invention,

10 is an overall exploded perspective view showing the front and rear support portions of the photomask unmanned conveying device of the present invention;

Figure 11 is a plan sectional view of the front and rear gap adjustment unit of the present invention photomask unmanned conveying device,

12 is a front sectional view of the front and rear support portions of the photomask unmanned conveying device of the present invention.

13a and 13b are cross-sectional views of the front and rear support portions of the photomask unmanned conveying device of the present invention;

14 is a plan sectional view illustrating the entire operation of the photomask unmanned conveying device of the present invention;

15 is a front view showing the overall operation of the photomask unmanned conveying device of the present invention.

※ Explanation of codes for main parts of drawing

100: stage transfer unit, 101: support plate, 110: LM shaft, 112: slider,

114: support, 114a: connection, 120: moving plate, 122, 124, 126: guideman,

130: rotation chain, 132, 134: main, driven pulley, 136: first drive motor, 200: left, right side support,

210: second driving motor, 211: driving shaft, 212, 213: driving pulley, 214, 215: driven pulley,

216, 217: first and second drive belt, 220: slide bar, 224: slider, 230: contactor,

300: front and rear support, 330: vertical support, 331, 332: first and second mobile,

333,334: Sliding rail, 335, 336: Slider, 322: Rocker,

The present invention relates to a photomask unmanned conveying device, and more particularly, to a photomask unmanned conveying device installed for unmanned movement of a photomask packed with a transport box to a predetermined position.

Generally, in order to manufacture a semiconductor device, various unit processes, such as photolithography, diffusion, etching, and chemical vapor deposition, are performed on a wafer, and the photolithography process of such unit processes forms a predetermined pattern on a semiconductor wafer. As a process for making it, the PR (Photoresist) layer is uniformly formed on the upper surface of the semiconductor wafer, and then a mask (or reticle) formed in a predetermined layout is formed to irradiate light having a high intensity wavelength to separate and clean unnecessary PR layers. The required pattern is formed on the semiconductor wafer.

The mask having a predetermined pattern on the semiconductor wafer is transported to a predetermined inspection equipment so as to inspect the pattern chemically applied to the surface layer through a predetermined visual inspection to check for errors. In the conventional method of mobilizing a worker or a robot, as in the case of carrying a lot of damage to the mask, there is a problem that large amounts of transportation is impossible, it was necessary to have an automatic transfer system unmanned.

The present invention is transported a predetermined distance in a state in which the front, rear, left, right of the transport box is stably supported in the transport facilities of the photomask transported in a packaged state in order to improve the problems caused during the transport of the conventional photomask. The purpose is to provide a photomask unmanned conveying device.

The present invention also achieves the above object, and an object of the present invention is to provide a photomask unmanned conveying device of a stage, in particular, a photomask unmanned conveying device for unattended transport of a photomask in a transport box.

The present invention is to provide a photomask unmanned conveying device having a front and rear support device capable of automatically adjusting the front and rear side spacing in the above step in the photomask unmanned conveying device for unmanned transfer of the photomask in the transport box. There is a purpose.

It is another object of the present invention to provide a photomask unmanned conveying device having a left and right side support device that can automatically adjust left and right spacing in a steer or more in a photomask unmanned conveying device for unmanned transport of a photomask in a transport box. have.

The photomask unmanned conveying device of the present invention for achieving the above object,

A support plate, two rows of LM shafts mounted on the support plate, sliders sliding along the LM shaft, supports mounted upright on the sliders, a movable plate horizontally mounted on the support plates, and on the support plate The support chain is composed of a rotation chain installed to rotate around one of the LM shafts, a main and driven pulley for winding up and down by rotating both sides of the rotation chain, and a first driving motor installed on the main pulley side. A stage feeder configured to connect both ends to a connection part protruding from one of the inner surfaces to move the plate forward and backward by forward and reverse driving of a drive motor; Two driving pulleys on the bottom of the movable plate formed with guide holes, a second driving motor connected to a driving shaft to drive the driving pulleys, and attached to the bottom of the moving plate, and based on the driving shaft of the second driving motor. Follower pulleys attached to the left and right sides at a predetermined distance apart, the first and second drive belts wound between these main and driven pulleys, and two rows of slides symmetrically spaced apart on both sides of the driving motor. Left and right side support portions provided with a bar to move the contacts to face each other through the guide hole of the movable plate while the contacts protruding on the movable plate adjust the left and right side spacing of the photomask box; And a slider is moved along a pair of sliding rails in the front and rear directions, and the first and second moving tables, which are conveyed to face each other in the front and rear directions, are installed to face each other. In the upright and vertically installed side by side through the guide hole of the movable plate and installed upright side, the second movable platform includes a front and rear side support that is provided with a vertically penetrated rocker upright in the guide hole of the mobile plate Is achieved as a photomask unmanned conveying device.

The left and right side support portion of the photomask unmanned conveying device of the present invention for achieving the above object,

The first and second guide members having symmetrically spaced to both sides around the driving motor of the bottom surface of the movable plate having guide holes formed therein, the slide members having two upper and lower slide bars, and slide along the slide bars of the guide members. It is preferable that the sliders are installed side by side at the predetermined positions of the two driving belts, and the contactors having a predetermined structure are further provided.

The front and rear side support portion of the photomask unmanned conveying device of the present invention for achieving the above object,

A pair of sliding rails, a third driving motor, a main, driven pulley, and a driving belt are installed on the bottom of the moving play in the front and rear directions, the slider slidingly coupled to the rails, and a fixed bracket fixed to the driving belt. Install the first and second moving tables which are conveyed to face each other in the front and rear directions, respectively, and vertically install the vertical support side by side through the guide holes of the moving plates, standing upright on the first moving tables, The second moving table is preferably installed rocker cylinders having a rocker penetrates upright in the guide hole of the moving plate.

The contactor of the photomask unmanned conveying device of the present invention for achieving the above object is preferably further provided with a protruding sensor and the shaft of the sensor, the elastic member on which the shaft is carried, and the switching member in contact with the rear end of the shaft. .

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is an exploded perspective view of the photomask unmanned conveying device of the present invention, FIG. 2 is an exploded perspective view of the photomask unmanned conveying device of the present invention, and FIG. 3 is an exploded perspective view of a stage transfer unit of the photomask unmanned conveying device of the present invention. .

As shown in the drawing, the photomask unmanned conveying device of the present invention is composed of a stage conveying part 100, a left and right side support part 200, and a front and rear side support part 300, and on a movable plate 120. Guide holes 122, 124, 126 are formed in the longitudinal, transverse direction, the upright support 330 and rockers 230 to be described later are exposed to perform a predetermined interval adjustment function.

The stage transfer unit 100 shown in the drawings is provided with two lines of the LM shaft 110 on the support plate 101 installed on the ground.

Sliding sliders 112 are installed on the LM shaft 110 installed side by side on the flat surface, and the sliders 112 form the support members 114 which are integrally installed upright, and are horizontally placed on the support members 114. Install the moving plate 120.

When the movable plate 120 is installed to be movable, devices for moving it are then installed.

That is, the rotating chain 130 is installed so as to rotate around one of the LM shafts 110 on the supporting plate 101, and both sides of the rotating chain 130 are main and driven pulleys 132 and 134. It is wound as, and the first drive motor 136 connected to the drive shaft 131 on the main pulley 132 side is installed to enable the driving of the rotational power.

In order to operably connect these power units with sliding means, a connecting portion 114a is formed on the inner side of any one of the supports 114, and both ends of the rotating chain 130 are connected to the connecting portion 114a. By connecting the moving plate 120 is also forward or backward by the forward and reverse driving of the drive motor 136.

In addition, the guide plate (122, 124, 126) is drilled in a predetermined direction and the operation length so that the pedestal and the rockers protrude from the bottom to support the transport box of the gap adjusting portion to be described later in the moving plate 120.

6 is a perspective view of the left and right side support portion of the photomask unmanned conveying device of the present invention, and FIG. 8 is an excerpted sectional view of the guide member of the left and right spacing adjusting part of the photomask unmanned conveying device of the present invention.

Left and right side support portion 200 of the photomask unmanned conveying device of the present invention according to the drawings, the contact structure 230 through the guide hole 122 as described above, so as to narrow or increase the interval while facing the contact from both sides thereof It will be equipped on the bottom.

That is, the two driving pulleys 212 and 213 and the driving shaft 211 to drive the driving pulleys 212 and 213 to the bottom surface of the movable plate 120 on which the guide hole 122 is formed. A second driving motor 210 attached to the bottom of the movable plate 120 is attached in a hanging manner.

Similarly, after attaching the driven pulleys 214 and 215 which are attached to the left and right sides at a predetermined distance from the driving shaft 211 of the second driving motor 210, these main and driven pulleys 212 and 213 are attached. The motor power can be transmitted by winding the first and second driving belts 216 and 217 between the 214 and 215.

Symmetrically spaced on both sides of the drive motor 210 to the upper and lower two slide bars 222, and slides along the slide bars 222 of the guide members 220 as well as the upper portion of the movement The guide member 220 in which the slider 224 is installed is installed opposite to both sides so as to be exposed to the guide hole 122 of the plate 120, and the predetermined of the first and second driving belts 216 and 217. By connecting the side of the slider 224 in the position, the slider 224 is moved forward and backward in the interval range of the slide bar 222 of the guide member 220 by the circumferential rotation of the drive belts 216 and 217. Will be.

Since the contactor 230 is formed at the upper end of the slider 224, when the forward and reverse driving of the second driving motor 210 is started, an operation of increasing the distance facing each other or gradually away from the driving belt is performed.

The drive shafts 211 are attached to the bottom surface of the movable plate 120 by brackets 219 having internal bearings, and the contactors 230 form the protruding sensors 231 at positions facing each other. The rear end of the sensor 231 constitutes the shaft bar 232, and the shaft bar 232 is installed to return to its original position as the elastic member 233, and the switching member 234 such as a tact switch is located at the rear end of the shaft bar 232. In order to generate a predetermined signal.

10 is an exploded perspective view showing the front and rear side support parts of the photomask unmanned conveying device of the present invention, and FIG. 11 is a plan sectional view of the front and rear gap adjusting part of the photomask unmanned conveying device of the present invention. Front sectional drawing of the front and rear side support parts of this invention photomask unmanned conveying apparatus.

The front and rear side support portion 300 of the photomask unmanned conveying device of the present invention shown in the drawings is a pair of sliding rails (333, 334) in the front and rear directions on the bottom surface of the movable plate 120, The three drive motor 310, the main, driven pulleys (312) (313) and the drive belt (311) is attached to the hanging.

The rails 333 and 334 attached to the bottom surface of the movable plate 120 are provided with sliders 335 and 336 that are slidably coupled and are slidably transported.

In addition, both sides are formed high so as to be fixed to the sliders 335 and 336 so as to face each other on the bottom surface of the movable plate 120, and the inner and lower sides of the first and second movements having a substantially 낮 shape that are formed low to form a mounting space. Bases 331 and 332 are formed, and the movable bases 331 and 332 are installed to be movable by sliders 335 and 336.

As such, the main and driven pulleys 312 and 313 driven as the third driving motor 310 by the fixing brackets 314 and 315 in order to power them in the state in which movement of the movable tables are facing each other are possible. Attaching and fixing and winding the drive belt 311, the drive belt 311 is fixed to the first and second moving table (331, 332).

In addition, the first movable table 331 is installed with a rocker 322 penetrating the upright in the guide hole 126 of the movable plate 120 protruding from the bottom rocker cylinders 320, the second movement The stand 332 is upright and penetrates the guide hole 124 of the movable plate 120 so that the vertical support 330 is installed upright side by side.

Therefore, as the driving belt 311 rotates around the driving motor 310, the first and second moving tables 331 and 332, as well as the rocker 322 and the vertical stand (uprightly installed or mounted thereon) are installed. As the 330 is facing, the front and rear side gaps are narrowed or widened.

The cylinder 320 is a cylinder having a rotary clamping rocker 322 at the tip.

4A and 4B are partial cross-sectional views of the stage photomask unmanned conveying device of the photomask unmanned conveying device of the present invention, and FIG. 5 is a cross-sectional view of the stage photomask unmanned conveying device of the photomask unmanned conveying device of the present invention.

According to the drawings will be described the operation of the stage transfer unit of the photomask photomask unmanned conveying apparatus of the present invention.

When the driving shaft 131 is driven by the driving motor 136, the rotation chain 130 wound between the main and driven pulleys 132 and 134 rotates for one week.

In the repetitive rotation of the chain 130, the support 114 integrally connected to the chain 130 is slid on the LM shaft 112 together with the slider 112.

Sliders 112 sliding along two rows of LM shafts 110 drive upright supports 114 mounted on sliders 112 and a movable plate 120 horizontally mounted on these supportes 114. Since it is conveyed along the direction of the motor 136, the photomask carrying box mounted thereon is moved to a predetermined position.

Since the gap adjustment for supporting the transport box on the moving plate 120 will be described.

7A and 7B are partial cross-sectional views of the left and right side support portions of the photomask unmanned conveying device of the present invention, and FIG. 8 is an excerpted sectional view of the guide members of the left and right spacing adjusting portions of the photomask unmanned conveying device of the present invention. 9A is a plan view illustrating the operation of the left and right side support portions of the photomask unmanned conveying device of the present invention, and FIG. 9B is a front view of the operation of the left and right spacing adjusting part of the photomask unmanned conveying device of the present invention.

According to these drawings, the left and right side intervals of the transport box of the photomask unmanned transport device of the present invention are adjusted. That is, the transport box moved to the predetermined position as the moving plate 120 is supported by the left and right side intervals before moving to the inspection equipment to prevent the flow in the process of withdrawing the photomask from the inside of the transport box later.

When the driving shaft 211 drives the main pulleys 212 and 213 by the driving of the second driving motor 210, driven pulleys 214 and 215 spaced apart from each other on both sides of the left and right sides based on the driving shaft 211. ) Rotates around each of the first and second driving belts (216, 217).

The slider 224, which is installed upright in the guide member 220 consisting of the slide bars 222 of the upper and lower two rows in the circumferential rotation of the driving belts 216 and 217, slides along the slide bar 222 and the Contactors 230 horizontally fixed side by side at predetermined positions of the first and second driving belts 216 and 217 are brought into close contact with each other according to the left and right side spacing of the transport box located therebetween.

At this time, the contactor 230 is driven by contacting the switching member 234 at the rear end of the shaft 232 while the shaft rod 232 of the sensor 231 presses the elastic member 233 as the protrusion sensor 231 contacts therein. The driving of the motor 210 is stopped to support the left and right sides of the transport box.

12 is a sectional front view of the front and rear support portions of the photomask unmanned conveying device of the present invention, and FIGS. 13A and 13B are cross-sectional views of the front and rear support portions of the photomask unmanned conveying device of the present invention.

Before and after the operation of the front and rear side support portion 300 of the photomask unmanned transfer device according to the drawings can be made at the same time or sequentially made with the left and right side intervals of the transport box after the overall stage transfer. have.

As described above, after the left and right side surfaces of the photomask transport box are adjusted, the third driving motor 310 is driven to rotate the driving belt 311 between the main and driven pulleys 312 and 313 to rotate the rails. The first and second moving tables 331 and 332 facing one another of the sliders 335 and 336 slidingly coupled to the 333 and 334 are close to each other with the transport box interposed therebetween.

That is, the second movable table 332 is installed vertically 330 side by side to pass through the guide hole 124 of the movable plate 120, the first movable table 331 on the opposite side The rocker 322 penetrates upright in the guide hole 126 of the movable plate 120 is protruded to support the front and rear of the transport box.

Accordingly, the first and second mobile units 331 and 332 provided with the vertical support 330 and the rocker 322, respectively, are sliders 335 and 336 that slide in the front and rear directions on the bottom of the movable play 120, respectively. The rails 333 and 334 are moved along to support the front and rear surfaces of the transport box on the moving plate 120.

In the accompanying drawings, Figure 14 is a cross-sectional view illustrating the operation of the front, rear, left, right of the photomask unmanned conveying device of the present invention, Figure 15 is a front view showing the left, right operation of the photomask unmanned conveying device of the present invention.

As shown in the drawing, when the driving shaft 211 drives the main pulleys 212 and 213 by the driving of the second driving motor 210, the driving shaft 211 is spaced a predetermined distance from both left and right sides based on the driving shaft 211. Slider driven driven pulleys 214 and 215 rotate around each of the first and second drive belts 216 and 217, and are installed upright in the guide member 220, which is composed of two upper and lower slide bars 222. The transport box 224 is slid along the slide bar 222 and the contactors 230 horizontally fixed side by side at a predetermined position of the first and second drive belts 216 and 217 are located therebetween. It is approached / supported on the left and right sides of the frame.

In this case, when the third driving motor 310 is also driven, the driving belt 311 between the main and driven pulleys 312 and 313 rotates, thereby sliding the sliders 335 and 336 to the rails 333 and 334. 1) The first and second moving bases 331 and 332 which face each other are adjacent to each other with a carrying box therebetween, and the first and second moving bases 331 each provided with a vertical support 330 and a rocker 322, respectively. By moving the 332, the moving play 120 is moved in the front and rear directions, respectively, so that the transport box is supported without front and rear flow.

As described above, the photomask transport box transported in a packaged state is stably improved in front, back, left, and right sides by improving various problems of photomask damage and transport that occurred in the transport process of the present invention by loading and transporting workers. It has the effect of newly providing an unmanned photomask unmanned conveying device which is supported and prevents the flow so that it can be taken out without damaging the contact during the photomask take-out operation on the stage as well as the linear stage transfer.

Claims (4)

In the photomask unmanned conveying device, The moving plate 120 is installed to slide along two lines of the LM shaft 110 installed on the support plate 101, and both sides of the rotational chain 130 rotating around the main and driven pulleys 132 and 134. Winding and forward and reverse driving as the first drive motor 136 installed on the main pulley 132 side, but fixed to both ends of the rotation chain 130 at the bottom of the movable plate 120 to move the movable plate 120 , The stage transfer unit 100 is moved backward; And Two driving pulleys 212 and 213 are attached to the bottom surface of the movable plate 120 on which the guide hole 122 is formed and connected to the driving shaft 211 to drive the driving pulleys 212 and 213. The second driving motor 210 is attached to the bottom surface of the movable plate 120, and driven driven pulley is spaced apart from the left and right sides by a predetermined distance based on the drive shaft 211 of the second driving motor 210. (214) and 215, and the first and second drive belts 216 and 217 are wound between these main and driven pulleys 212,213 and 214 and215. The contacts 230 protruding from each other through the guide hole 122 of the 120 are fixed to the first and second driving belts 216 and 217, respectively, so as to face each other on or near the moving plate 120. Photomask unmanned conveying device comprising a left and right side support portion 200 to support the left and right side of the photomask box. The method of claim 1, The sliders 335 and 336 are moved in the forward and rearward directions by a pair of sliding rails 333 and 334, and the sliders 333 and 334 are respectively provided with first and second moving tables 331. 332 is connected, and the first first movable table 331 is installed in the vertical stand 330 side by side through the guide hole 124 of the movable plate 120 on both sides, and the second movable table 331 is a rocker 322 to be installed vertically through the guide hole 126 of the movable plate 120, and the third drive motor 310 is attached to the bottom surface of the movable plate 120, The primary and driven pulleys 312 and 313 are attached to each other at a predetermined distance, and the driving belt 311 is wound, and the first and second movements are transferred to the driving belt 311 while facing forward and backward, respectively. Further comprising a front and rear support portion 300 to connect the base 331, 332 to the front and rear surfaces of the transport box to support the vertical support 330 and the rockers 322. The photomask unmanned carrier. The method according to claim 1 or 2, The left and right side support part 200, Guide members 220 provided with two upper and lower slide bars 222 spaced symmetrically about the driving motor 210 from the bottom surface of the movable plate 120 having the guide hole 122 and the guide. It is installed to slide along the slide bar 222 of the members 220 and is integrally connected to a predetermined position of the first and second drive belts 216 and 217 and provided with a contactor 230 at an upper end thereof. A photomask unmanned conveying device further comprising a slider (224). The method of claim 3, wherein The contactor 230 may include a protruding sensor 231 and a shaft bar 232 of the sensor 231, an elastic member 233 on which the shaft bar 232 is held, and a switching member contacting the rear end of the shaft bar 232. 234) further comprising a photomask unmanned conveying device.

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