KR200416604Y1 - Left/right part support apparatus for use of photo-mask conveyance apparatus - Google Patents

Abstract

The present invention relates to a left and right surface support device of the photomask transport apparatus,

On the slider 112 which is slid along two LM shafts 110 installed on the supporting plate 101, the movable plate 120 horizontally installed as the support 114 and the rotating chain 130 rotated around the support plate ( A stage transfer part 100 connected to both ends of the connection part 114a of the 114 to move the back and forth of the movable plate 120 as a driving motor 136; Moving pulleys 212 and 213 on the bottom of the movable plate 120 and main and driven pulleys 212 and 213 and 215 and the first and second driving belts 216 on the bottom of the movable plate 120. 217, the driving motor 210 is installed to give a driving force, and the contact members 230 facing each other by installing the guide member 120 having a slide bar 222 symmetrically on both sides around the moving plate ( A left and right side support part 200 which protrudes on the 120 and moves on the driving belts 216 and 217; And the first and second moving tables 331 and 332 which are transported to face the front and rear directions on the sliders 333 and 334 so that the rockers 322 and the respective moving tables 331 and 332 are installed. The vertical support 330 is installed upright, and includes a front and rear side support portion in which front and rear side spacing of the transport box is adjusted.

Photomask, stage, photomask carrier.

Description

Left / right part support apparatus for use of photo-mask conveyance apparatus}

1 is an overall perspective view of a photomask transport apparatus of the present invention,

2 is an exploded perspective view of a photomask transport apparatus of the present invention,

Figure 3 is a perspective view of the left and right side support portion of the present invention photomask transport apparatus,

Figure 4a, 4b is a partial cross-sectional view of the left and right side support portion of the photomask conveying device of the present invention,

Figure 5 is an exploded cross-sectional view of the guide member of the left, right spacing adjusting unit of the subject innovation photomask conveying device.

Figure 6a is a plan view illustrating the operation of the left and right side support portion of the present invention photomask conveying device,

Figure 6b is a front view of the operation description of the left, right spacing adjusting unit of the subject innovation photomask conveying device,

Figure 7 is a plan sectional view illustrating the overall operation of the present invention photomask conveying apparatus,

8 is a front view showing the overall operation of the photomask transport apparatus of the present invention.

※ Explanation of codes for main parts of drawing

100: stage transfer unit, 101: support plate, 110: LM shaft, 112: slider,

114: support, 114a: connection, 120: moving plate, 122, 124, 126: guideman,

130: rotation chain, 132, 134: main, driven pulley, 136: first drive motor, 200: left, right side support,

210: second driving motor, 211: driving shaft, 212, 213: driving pulley, 214, 215: driven pulley,

216, 217: first and second drive belt, 220: slide bar, 224: slider, 230: contactor,

The present invention relates to a photomask conveying apparatus, and more particularly, to a photomask conveying apparatus installed for unmanned movement of a photomask packed with a transport box to a predetermined position.

Generally, in order to manufacture a semiconductor device, various unit processes, such as photolithography, diffusion, etching, and chemical vapor deposition, are performed on a wafer, and the photolithography process of such unit processes forms a predetermined pattern on a semiconductor wafer. As a process for making it, the PR (Photoresist) layer is uniformly formed on the upper surface of the semiconductor wafer, and then a mask (or reticle) formed in a predetermined layout is formed to irradiate light having a high intensity wavelength to separate and clean unnecessary PR layers. The required pattern is formed on the semiconductor wafer.

The mask having a predetermined pattern on the semiconductor wafer is transported to a predetermined inspection equipment so as to inspect the pattern chemically applied to the surface layer through a predetermined visual inspection to check for errors. In the conventional method of mobilizing a worker or a robot, as in the case of transporting a lot of damage to the mask, a large amount of transport is a problem that it was necessary to unmanned automatic transfer system.

The present invention is provided with left and right side support devices that can automatically adjust the left and right side spacing on the stage of the transport box of the transport equipment of the photomask transported in a packaged state in order to improve the problems caused during the transport of the conventional photomask. It is also an object to provide a photomask carrier.

The present invention photomask conveying apparatus for achieving the above object,

A support plate, two rows of LM shafts mounted on the support plate, sliders sliding along the LM shaft, supports mounted upright on these sliders, a movable plate horizontally mounted on the support plates, and on the support plate The support chain consists of a rotation chain installed to rotate around one of the LM shafts, a main and driven pulley for winding up and down by rotating both sides of the rotation chain, and a first driving motor installed on the main pulley side. A stage feeder configured to connect both ends to a connection part protruding from one of the inner surfaces to move the plate forward and backward by forward and reverse driving of a drive motor; Two driving pulleys on the bottom of the movable plate formed with guide holes, a second driving motor connected to a driving shaft to drive the driving pulleys, and attached to the bottom of the moving plate, and based on the driving shaft of the second driving motor. Follower pulleys attached to the left and right sides at a predetermined distance apart, the first and second drive belts wound between these main and driven pulleys, and two rows of slides symmetrically spaced apart on both sides of the drive motor. Left and right side support portions provided with a bar to move the contacts to face each other through the guide hole of the movable plate while the contacts protruding on the movable plate adjust the left and right side spacing of the photomask box; And a slider is moved along a pair of sliding rails in the front and rear directions, and the first and second moving tables, which are conveyed to face each other in the front and rear directions, are installed to face each other. In the upright and vertically installed side by side through the guide hole of the movable plate and installed upright side, the second movable platform includes a front and rear side support that is provided with a vertically penetrated rocker upright in the guide hole of the mobile plate Is achieved as a photomask carrier.

The left and right side support parts of the subject innovation photomask transport apparatus for achieving the above object,

The first and second guide members having symmetrically spaced to both sides around the driving motor of the bottom surface of the movable plate having guide holes formed therein, the slide members having two upper and lower slide bars, and slide along the slide bars of the guide members. It is preferable that the sliders are installed side by side at the predetermined positions of the two driving belts, and the contactors having a predetermined structure are further provided.

The front and rear side support portion of the subject innovation photomask transport apparatus for achieving the above object,

A pair of sliding rails, a third driving motor, a main, driven pulley, and a driving belt are installed on the bottom of the moving play in the front and rear directions, and the slider slidingly coupled to the rails and fixed to the driving belt. Install the first and second mobile carriers to be transported facing each other in the front and rear directions across the brackets, and upright to the first mobile carrier through the guide hole of the mobile plate to install the vertical stand side by side Preferably, the second moving table has rocker cylinders having a rocker penetrating upright in the guide hole of the moving plate.

The contactor of the present invention photomask conveying apparatus for achieving the above object is preferably further provided with a protruding sensor and the shaft of the sensor, the elastic member on which the shaft is carried, and the switching member in contact with the rear end of the shaft.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is an exploded perspective view of the photomask transport apparatus of the present invention, FIG. 2 is an exploded perspective view of the photomask transport apparatus of the present invention, and FIG. 3 is a perspective view of left and right side support portions of the photomask transport apparatus of the present invention. 4 is an excerpted sectional view of the guide member of the left and right spacing adjusting part of the present invention photomask conveying apparatus.

As shown in the drawings, the subject innovation photomask conveying apparatus is composed of a stage conveying part 100, a left and right side support part 200, and a front and rear side support part 300, and on a movable plate 120. Guide holes 122, 124, 126 are formed in the longitudinal, transverse direction.

The stage transfer unit 100 shown in the drawings is provided with two lines of the LM shaft 110 on the support plate 101 installed on the ground.

Sliding sliders 112 are installed on the LM shaft 110 installed side by side on the flat surface, and the sliders 112 form the support members 114 which are integrally installed upright, and are horizontally placed on the support members 114. Install the moving plate 120.

When the movable plate 120 is installed to be movable, devices for moving it are then installed.

That is, the rotating chain 130 is installed so as to rotate around one of the LM shafts 110 on the supporting plate 101, and both sides of the rotating chain 130 are main and driven pulleys 132 and 134. It is wound as, and the first drive motor 136 connected to the drive shaft 131 on the main pulley 132 side is installed to enable the driving of the rotational power.

In order to operably connect these power units with sliding means, a connecting portion 114a is formed on the inner side of any one of the supports 114, and both ends of the rotating chain 130 are connected to the connecting portion 114a. By connecting the moving plate 120 also forward or backward by the forward and reverse driving of the drive motor 136.

In addition, the upper surface of the movable plate 120 is guide holes 122, 124, 126 are drilled in a predetermined direction and the operation length so that the pedestal and the rockers protrude from the bottom to support the transport box of the gap adjustment unit to be described later.

The left and right side support portion 200 of the present invention photomask conveying device according to the drawings, as described above, the contact structure 230 through the guide hole 122 facing the opposite side from both sides to reduce or increase the interval of the bottom surface Will be equipped.

That is, the two driving pulleys 212 and 213 and the driving shaft 211 to drive the driving pulleys 212 and 213 to the bottom surface of the movable plate 120 on which the guide hole 122 is formed. A second driving motor 210 attached to the bottom of the movable plate 120 is attached in a hanging manner.

Similarly, after attaching the driven pulleys 214 and 215 which are attached to the left and right sides at a predetermined distance from the driving shaft 211 of the second driving motor 210, these main and driven pulleys 212 and 213 are attached. The motor power can be transmitted by winding the first and second driving belts 216 and 217 between the 214 and 215.

Symmetrically spaced bilaterally around the drive motor 210 and provided with two upper and lower slide bars 222, and sliding along the slide bars 222 of the guide members 220 and the upper portion of the movable plate. The guide member 220, which is provided with the slider 224, is installed to be opposite to both sides so as to be exposed to the guide slot 122 of the 120, as well as the predetermined positions of the first and second driving belts 216 and 217. By connecting the side of the slider 224 in the circumferential rotation of the driving belt 216, 217 the slider 224 is moved forward, backward in the section range of the slide bar 222 of the guide member 220 will be.

Since the contactor 230 is formed at the upper end of the slider 224, when the forward and reverse driving of the second driving motor 210 is started, an operation of increasing the distance facing each other or gradually away from the driving belt is performed.

The drive shafts 211 are attached to the bottom surface of the movable plate 120 by brackets 219 having internal bearings, and the contactors 230 form the protruding sensors 231 at positions facing each other. The rear end of the sensor 231 constitutes the shaft bar 232, and the shaft bar 232 is installed to return to its original position as the elastic member 233, and the switching member 234 such as a tact switch is located at the rear end of the shaft bar 232. In order to generate a predetermined signal.

Figure 4a, 4b is a partial cross-sectional view of the left, right side support portion of the photomask conveying device of the present invention, Figure 5 is an excerpted cross-sectional view of the guide member of the left and right spacing adjustment portion of the photomask conveying device of the present invention, Figure 6a It is a top view explaining the operation of the left and right side support parts of the mask conveyance apparatus, and FIG. 6B is a front view of the operation description of the left and right space | interval adjusting part of this invention photomask conveyance apparatus.

According to these drawings, the left and right side surface spacing of the transport box of the photomask transport apparatus of the present invention is adjusted. That is, the transport box moved to the predetermined position as the moving plate 120 is supported by the left and right side intervals before moving to the inspection equipment to prevent the flow in the process of withdrawing the photomask from the inside of the transport box later.

When the driving shaft 211 drives the main pulleys 212 and 213 by the driving of the second driving motor 210, driven pulleys 214 and 215 spaced apart from each other on both sides of the left and right sides based on the driving shaft 211. ) Rotates around each of the first and second driving belts (216, 217).

The slider 224, which is installed upright in the guide member 220 consisting of the slide bars 222 of the upper and lower two rows in the circumferential rotation of the driving belts 216 and 217, slides along the slide bar 222 and the Contactors 230 horizontally fixed side by side at predetermined positions of the first and second driving belts 216 and 217 are brought into close contact with each other according to the left and right side spacing of the transport box located therebetween.

At this time, the contactor 230 is driven by contacting the switching member 234 at the rear end of the shaft 232 while the shaft rod 232 of the sensor 231 presses the elastic member 233 as the protrusion sensor 231 contacts therein. The driving of the motor 210 is stopped to support the left and right sides of the transport box.

7 is a cross-sectional view illustrating the operation of the front, rear, left, right of the present invention photomask conveying device, Figure 8 is a front view showing the left, right operation of the present invention photomask conveying device.

As shown in the drawing, when the driving shaft 211 drives the main pulleys 212 and 213 by the driving of the second driving motor 210, the driving shaft 211 is spaced a predetermined distance from both left and right sides based on the driving shaft 211. Slider driven driven pulleys 214 and 215 rotate around each of the first and second drive belts 216 and 217, and are installed upright in the guide member 220, which is composed of two upper and lower slide bars 222. The transport box 224 is slid along the slide bar 222 and the contactors 230 horizontally fixed side by side at a predetermined position of the first and second drive belts 216 and 217 are located therebetween. It is approached / supported on the left and right sides of the frame.

In this case, when the third driving motor 310 is also driven, the driving belt 311 between the main and driven pulleys 312 and 313 rotates, thereby sliding the sliders 335 and 336 to the rails 333 and 334. 1) The first and second moving bases 331 and 332 which face each other are adjacent to each other with a carrying box therebetween, and the first and second moving bases 331 each provided with a vertical support 330 and a rocker 322, respectively. By moving the 332, the moving play 120 is moved in the front and rear directions, respectively, so that the transport box is supported without front and rear flow.

As described above, the photomask transport box transported in a packaged state is stably supported on the left and right sides by improving various problems of photomask damage and transport that occurred during the transport process that the workers in the related art have loaded and transported. In addition to the stage transfer of the photomask take-out operation on the stage has the effect of providing a new unmanned photomask conveying device that prevents the flow to be able to withdraw without contact damage.

Claims (3)

In photomask conveying apparatus, Installing a moving plate 120 to be moved on the support plate 101, and installed two moving pulleys (212, 213) on the bottom of the middle portion of the moving plate 120, this driving pulley (212) (213) Attaching the second drive motor 210 connected to the drive shaft 211 of the two, the driven pulleys (212, 213) with a predetermined distance on both left and right sides with respect to the driven pulleys (214, 215) are installed The first and second drive belts 216 and 217 are wound between the main and driven pulleys 212, 213, 214 and 215. The first and second drive belts 216 and 217 are wound. ) Is installed so as to face each of the contacts 230 protruding from each other through the guide hole 122 of the movable plate 120 to support the left and right sides of the photomask box on the movable plate 120. Left and right side support device of the photomask conveying device. The method of claim 1, Guide consisting of a slide bar 222 of the upper and lower rows in the symmetrically spaced position around the drive motor 210 to move the contact 230 protruding from the guide hole 122 of the movable plate 120 to face Sliders 224 which are respectively provided with members 220 and integrally connected to predetermined positions of the first and second driving belts 216 and 217 to slide along the slide bars 222 of the guide members 220. And the contactor 230 is installed on the slider 224, the left and right surface support apparatus of the photomask transport apparatus. The method of claim 1, The contactor 230 is formed at the tip of the shaft 232, the elastic member 233 on which the shaft 232 is held, the switching member 234 contacting the rear end of the shaft 232, and the shaft 232. Left and right surface support of the photomask transport apparatus, characterized in that consisting of a sensor (231).

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