KR20050112333A - Thinner composition for removing photosensitive resin - Google Patents
Thinner composition for removing photosensitive resin Download PDFInfo
- Publication number
- KR20050112333A KR20050112333A KR1020040037385A KR20040037385A KR20050112333A KR 20050112333 A KR20050112333 A KR 20050112333A KR 1020040037385 A KR1020040037385 A KR 1020040037385A KR 20040037385 A KR20040037385 A KR 20040037385A KR 20050112333 A KR20050112333 A KR 20050112333A
- Authority
- KR
- South Korea
- Prior art keywords
- photoresist
- thinner composition
- alkyl
- ethanoate
- ether acetate
- Prior art date
Links
- 239000000203 mixture Substances 0.000 title claims abstract description 55
- 239000011347 resin Substances 0.000 title description 3
- 229920005989 resin Polymers 0.000 title description 3
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 62
- -1 alkyl amide Chemical class 0.000 claims abstract description 43
- 238000000034 method Methods 0.000 claims abstract description 33
- 238000004519 manufacturing process Methods 0.000 claims abstract description 24
- 239000004065 semiconductor Substances 0.000 claims abstract description 21
- 239000004973 liquid crystal related substance Substances 0.000 claims abstract description 16
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 16
- DKPFZGUDAPQIHT-UHFFFAOYSA-N butyl acetate Chemical compound CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 claims description 13
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 claims description 10
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 claims description 9
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 claims description 8
- 229940113088 dimethylacetamide Drugs 0.000 claims description 8
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 claims description 7
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 claims description 7
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 claims description 6
- 150000001346 alkyl aryl ethers Chemical class 0.000 claims description 6
- 125000002947 alkylene group Chemical group 0.000 claims description 6
- YKYONYBAUNKHLG-UHFFFAOYSA-N propyl acetate Chemical compound CCCOC(C)=O YKYONYBAUNKHLG-UHFFFAOYSA-N 0.000 claims description 5
- 125000000217 alkyl group Chemical group 0.000 claims description 3
- 125000004432 carbon atom Chemical group C* 0.000 claims description 3
- 235000019439 ethyl acetate Nutrition 0.000 claims description 3
- JMMWKPVZQRWMSS-UHFFFAOYSA-N isopropyl acetate Chemical compound CC(C)OC(C)=O JMMWKPVZQRWMSS-UHFFFAOYSA-N 0.000 claims description 3
- KXKVLQRXCPHEJC-UHFFFAOYSA-N methyl acetate Chemical compound COC(C)=O KXKVLQRXCPHEJC-UHFFFAOYSA-N 0.000 claims description 3
- FUWDFGKRNIDKAE-UHFFFAOYSA-N 1-butoxypropan-2-yl acetate Chemical compound CCCCOCC(C)OC(C)=O FUWDFGKRNIDKAE-UHFFFAOYSA-N 0.000 claims description 2
- LIPRQQHINVWJCH-UHFFFAOYSA-N 1-ethoxypropan-2-yl acetate Chemical compound CCOCC(C)OC(C)=O LIPRQQHINVWJCH-UHFFFAOYSA-N 0.000 claims description 2
- DMFAHCVITRDZQB-UHFFFAOYSA-N 1-propoxypropan-2-yl acetate Chemical compound CCCOCC(C)OC(C)=O DMFAHCVITRDZQB-UHFFFAOYSA-N 0.000 claims description 2
- OHLUUHNLEMFGTQ-UHFFFAOYSA-N N-methylacetamide Chemical compound CNC(C)=O OHLUUHNLEMFGTQ-UHFFFAOYSA-N 0.000 claims description 2
- 239000000758 substrate Substances 0.000 abstract description 14
- 239000011521 glass Substances 0.000 abstract description 7
- 235000012431 wafers Nutrition 0.000 description 17
- 230000000052 comparative effect Effects 0.000 description 6
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 5
- 231100000111 LD50 Toxicity 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 3
- 241000699666 Mus <mouse, genus> Species 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- 238000004090 dissolution Methods 0.000 description 3
- 238000005507 spraying Methods 0.000 description 3
- JDSQBDGCMUXRBM-UHFFFAOYSA-N 2-[2-(2-butoxypropoxy)propoxy]propan-1-ol Chemical compound CCCCOC(C)COC(C)COC(C)CO JDSQBDGCMUXRBM-UHFFFAOYSA-N 0.000 description 2
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 2
- TVEXGJYMHHTVKP-UHFFFAOYSA-N 6-oxabicyclo[3.2.1]oct-3-en-7-one Chemical compound C1C2C(=O)OC1C=CC2 TVEXGJYMHHTVKP-UHFFFAOYSA-N 0.000 description 2
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 241000282412 Homo Species 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- 229940116333 ethyl lactate Drugs 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 231100000820 toxicity test Toxicity 0.000 description 2
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- LPEKGGXMPWTOCB-UHFFFAOYSA-N 8beta-(2,3-epoxy-2-methylbutyryloxy)-14-acetoxytithifolin Natural products COC(=O)C(C)O LPEKGGXMPWTOCB-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- 241000699670 Mus sp. Species 0.000 description 1
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 description 1
- 206010074268 Reproductive toxicity Diseases 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 231100000176 abortion Toxicity 0.000 description 1
- 206010000210 abortion Diseases 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010227 cup method (microbiological evaluation) Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- ODQWQRRAPPTVAG-GZTJUZNOSA-N doxepin Chemical compound C1OC2=CC=CC=C2C(=C/CCN(C)C)/C2=CC=CC=C21 ODQWQRRAPPTVAG-GZTJUZNOSA-N 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000001605 fetal effect Effects 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 201000002364 leukopenia Diseases 0.000 description 1
- 231100001022 leukopenia Toxicity 0.000 description 1
- 230000004060 metabolic process Effects 0.000 description 1
- 229940057867 methyl lactate Drugs 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 235000013772 propylene glycol Nutrition 0.000 description 1
- 229960004063 propylene glycol Drugs 0.000 description 1
- 231100000372 reproductive toxicity Toxicity 0.000 description 1
- 230000007696 reproductive toxicity Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
- G03F7/423—Stripping or agents therefor using liquids only containing mineral acids or salts thereof, containing mineral oxidizing substances, e.g. peroxy compounds
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/02—Inorganic compounds ; Elemental compounds
- C11D3/04—Water-soluble compounds
- C11D3/044—Hydroxides or bases
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/50—Solvents
- C11D7/5004—Organic solvents
- C11D7/5013—Organic solvents containing nitrogen
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/168—Finishing the coated layer, e.g. drying, baking, soaking
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
- G03F7/32—Liquid compositions therefor, e.g. developers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
- G03F7/425—Stripping or agents therefor using liquids only containing mineral alkaline compounds; containing organic basic compounds, e.g. quaternary ammonium compounds; containing heterocyclic basic compounds containing nitrogen
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
- G03F7/426—Stripping or agents therefor using liquids only containing organic halogen compounds; containing organic sulfonic acids or salts thereof; containing sulfoxides
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
- C11D2111/10—Objects to be cleaned
- C11D2111/14—Hard surfaces
- C11D2111/22—Electronic devices, e.g. PCBs or semiconductors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Wood Science & Technology (AREA)
- Inorganic Chemistry (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
본 발명은 포토레지스트 제거용 씬너 조성물에 관한 것으로, 특히 a) 알킬 아마이드 및 b) 알킬 에타노에이트를 포함하는 포토레지스트 제거용 씬너 조성물에 관한 것이다.The present invention relates to a thinner composition for removing photoresist, and more particularly to a thinner composition for removing photoresist comprising a) alkyl amide and b) alkyl ethanoate.
본 발명의 포토레지스트 제거용 씬너 조성물은 액정 디스플레이 디바이스에 사용되는 글라스 기판 및 반도체 제조에 사용되는 웨이퍼의 가장자리와 후면 부위에 사용되어 불필요하게 부착되어진 포토레지스트를 단시간에 효율적으로 제거할 수 있을 뿐만 아니라, 다양한 공정, 특히 Spin-less PR 공정에 적용 가능하고, 제조공정을 간편화하며 경제적으로 생산수율을 향상시킬 수 있다.The thinner composition for removing photoresist of the present invention can efficiently remove unnecessarily attached photoresist in a short time by being used at the edges and backside portions of the glass substrate used in the liquid crystal display device and the wafer used in semiconductor manufacturing. It can be applied to various processes, especially Spin-less PR process, to simplify the manufacturing process and improve the production yield economically.
Description
본 발명은 포토레지스트 제거용 씬너 조성물에 관한 것으로, 더욱 상세하게는 액정 디스플레이 디바이스에 사용되는 글라스 기판 및 반도체 제조에 사용되는 웨이퍼의 가장자리와 후면 부위에 사용되어 불필요하게 부착되어진 포토레지스트를 단시간에 효율적으로 제거할 수 있을 뿐만 아니라, 다양한 공정, 특히 Spin-less PR 공정에 적용 가능하고, 제조공정을 간편화하며 경제적으로 생산수율을 향상시킬 수 있는 포토레지스트 제거용 씬너 조성물에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thinner composition for removing photoresist, and more particularly, a photoresist that is used unnecessarily to be attached to edges and backside portions of a glass substrate used in a liquid crystal display device and a semiconductor used in the manufacture of semiconductors in a short time. The present invention relates to a thinner composition for photoresist removal, which can be removed as well as being applicable to various processes, especially a spin-less PR process, which can simplify the manufacturing process and improve the production yield economically.
반도체 제조공정 중 포토리소그래피(photo lithography) 공정은 웨이퍼에 포토레지스트를 도포하고, 사전에 설계된 패턴을 전사하고, 전사된 패턴에 따라 적절하게 깎아내는 식각공정을 통하여 전자회로를 구성해나가는 작업으로 매우 중요한 작업의 하나이다.The photolithography process in the semiconductor manufacturing process is a process of forming an electronic circuit by applying a photoresist to a wafer, transferring a predesigned pattern, and etching appropriately according to the transferred pattern. It is one of the important tasks.
이러한 포토리소그래피 공정은This photolithography process
⑴ 웨이퍼의 표면에 포토레지스트를 균일하게 도포하는 공정,(B) applying a photoresist uniformly to the surface of the wafer;
⑵ 도포된 포토레지스트로부터 용제를 증발시켜 포토레지스트가 웨이퍼의 표면에 달라붙게 하는 소프트 베이킹 공정,A soft baking process in which the solvent is evaporated from the applied photoresist to cause the photoresist to adhere to the surface of the wafer,
⑶ 자외선 등의 광원을 이용하여 마스크 상의 회로 패턴을 반복적이고 순차적으로 축소 투영하면서 웨이퍼를 노광시켜 마스크의 패턴을 웨이퍼 상으로 전사하는 노광공정,An exposure step of transferring the mask pattern onto the wafer by exposing the wafer while repeating and sequentially reducing and projecting the circuit pattern on the mask using a light source such as ultraviolet rays;
⑷ 광원에의 노출에 의한 감광에 따라 용해도 차와 같은 물리적 성질이 다르게 된 부분들을 현상액을 사용하여 선택적으로 제거하는 현상공정,현상 a developing process for selectively removing parts with different physical properties such as solubility difference by exposure to light sources using a developer,
⑸ 현상작업 후 웨이퍼 상에 잔류하는 포토레지스트의 웨이퍼에의 보다 긴밀한 고착을 위한 하드 베이킹 공정,하드 a hard baking process for tighter adhesion of the photoresist remaining on the wafer to the wafer after development
⑹ 현상된 웨이퍼의 패턴에 따라 소정 부위를 에칭하는 식각공정, 및An etching process for etching a predetermined portion in accordance with the developed wafer pattern, and
⑺ 상기 공정 후 불필요하게 된 포토레지스트를 제거하는 박리공정 박리 a stripping process for removing unnecessary photoresist after the above step
등으로 대별될 수 있다.Or the like.
이러한 포토리소그래피 공정 중 상기 ⑵의 소프트 베이킹 공정 후에는 웨이퍼의 에지(edge) 부분이나 이면에 불필요하게 도포된 포토레지스트를 제거하는 작업이 필요한데, 이는 웨이퍼의 에지나 이면에 포토레지스트가 존재하는 경우, 이들의 존재에 의하여 에칭, 이온주입 등과 같은 후속공정에서 여러 가지 불량이 발생할 수 있으며, 그에 따라 전체 반도체 장치의 수율의 저하를 초래하는 문제점이 있다.In the photolithography process, after the soft baking process of the wafer, an operation of removing an unnecessarily applied photoresist on the edge part or the back side of the wafer is required, and when the photoresist exists on the edge or the back side of the wafer, Due to their presence, various defects may occur in subsequent processes such as etching, ion implantation, and the like, thereby causing a problem of lowering the yield of the entire semiconductor device.
종래 웨이퍼의 에지나 이면에 존재하는 포토레지스트를 제거하기 위하여 웨이퍼 에지 부분의 상하에 분사노즐을 설치하고, 상기 노즐을 통하여 에지나 이면에 유기용제 성분으로 된 씬너를 분사하는 방법이 주로 사용되었다. Conventionally, in order to remove photoresist existing on the edge or backside of a wafer, a spray nozzle is provided above and below the wafer edge portion, and a thinner made of an organic solvent component is sprayed on the edge or backside through the nozzle.
종래 사용되는 포토레지스트를 제거하기 위한 씬너 조성물로 일본공개특허공보 소63-69563호는 셀로솔브, 셀로솔브 아세테이트, 프로필렌글리콜 에테르, 프로필렌글리콜 에테르 아세테이트 등의 에테르 및 에테르 아세테이트류, 아세톤, 메틸에틸케톤, 메틸이소부틸케톤, 씨클로 헥사논 등의 케톤류, 메틸 락테이트, 에틸 락테이트, 메틸 아세테이트, 에틸 아세테이트, 부틸 아세테이트 등의 에스테르류를 씬너 조성물로 하여, 상기 씬너를 기판의 주도부, 연도부, 배면부의 불필요한 포토레지스트에 접촉시켜 제거하는 방법에 대하여 개시하고 있다. 또한 일본공개특허공보 평4-49938호는 씬너 조성물로 프로필렌글리콜 메틸에테르아세테이트를 사용하는 방법에 대하여 개시하고 있으며, 일본공개특허공보 평4-42523호는 씬너 조성물로 알킬알콕시 프로피오네이트를 사용하는 방법에 대하여 개시하고 있다.As a thinner composition for removing photoresist used in the prior art, Japanese Patent Application Laid-Open No. 63-69563 discloses ether and ether acetates such as cellosolve, cellosolve acetate, propylene glycol ether, propylene glycol ether acetate, acetone, methyl ethyl ketone , Ketones such as methyl isobutyl ketone, cyclohexanone, and other esters such as methyl lactate, ethyl lactate, methyl acetate, ethyl acetate, and butyl acetate as thinner compositions. Disclosed is a method of contacting and removing unnecessary photoresist on the back portion. In addition, Japanese Patent Application Laid-open No. Hei 4-49938 discloses a method of using propylene glycol methyl ether acetate as the thinner composition, and Japanese Patent Laid-Open No. Hei 4-42523 uses an alkylalkoxy propionate as the thinner composition. The method is disclosed.
상기에서 에틸렌글리콜 모노에틸에테르 아세테이트의 경우 용해속도는 우수하나, 휘발성과 인화성이 높고, 특히 백혈구 감소증, 태아유산 유발 등의 생식독성을 나타낸다는 문제점이 있다. 또한, 에틸 락테이트는 점도가 높고 용해속도가 낮기 때문에 단독으로는 충분한 세정효과를 얻을 수 없다는 문제점이 있다.In the case of ethylene glycol monoethyl ether acetate, the dissolution rate is excellent, but there is a problem in that it exhibits reproductive toxicity, such as high volatility and flammability, in particular leukopenia and induction of fetal abortion. In addition, since ethyl lactate has a high viscosity and a low dissolution rate, there is a problem that a sufficient washing effect cannot be obtained by itself.
따라서, 액정 디스플레이 디바이스에 사용되는 글라스 기판 및 반도체 제조에 사용되는 웨이퍼의 가장자리와 후면 부위에 사용되어 불필요하게 부착되어진 포토레지스트를 단시간에 효율적으로 제거할 수 있는 씬너 조성물에 대한 연구가 더욱 필요한 실정이다.Therefore, there is a need for further studies on thinner compositions capable of efficiently removing unnecessarily attached photoresist used at the edges and backsides of glass substrates used in liquid crystal display devices and wafers used in semiconductor manufacturing in a short time. .
상기와 같은 종래기술의 문제점을 해결하고자, 본 발명은 액정 디스플레이 디바이스에 사용되는 글라스 기판 및 반도체 제조에 사용되는 웨이퍼의 가장자리와 후면 부위에 사용되어 불필요하게 부착되어진 포토레지스트를 단시간에 효율적으로 제거할 수 있는 포토레지스트 제거용 씬너 조성물을 제공하는 것을 목적으로 한다.In order to solve the problems of the prior art as described above, the present invention can efficiently remove unnecessarily attached photoresist in a short time to the glass substrate used in the liquid crystal display device and the wafer and used in the semiconductor manufacturing. An object of the present invention is to provide a thinner composition for removing photoresist.
본 발명의 다른 목적은 포토레지스트를 인체에 대한 안전성이 높아 작업자에게 보다 안전하며, 다양한 공정, 특히 Spin-less PR 공정에 적용 가능하고, 액정 디스플레이 디바이스 및 반도체 제조공정의 생산수율을 향상시킬 수 있는 포토레지스트 제거용 씬너 조성물을 제공하는 것이다.It is another object of the present invention that the photoresist is safer to humans due to its high safety to humans, and can be applied to various processes, especially spin-less PR processes, and can improve the production yield of liquid crystal display devices and semiconductor manufacturing processes. It is to provide a thinner composition for removing photoresist.
상기 목적을 달성하기 위하여, 본 발명은In order to achieve the above object, the present invention
a) 알킬 아마이드; 및a) alkyl amides; And
b) 알킬 에타노에이트b) alkyl ethanoates
를 포함하는 포토레지스트 제거용 씬너 조성물을 제공한다. It provides a thinner composition for removing a photoresist comprising a.
바람직하기로는 상기 씬너 조성물은Preferably the thinner composition is
a) 알킬 아마이드 1 내지 99 중량부; 및a) 1 to 99 parts by weight of alkyl amide; And
b) 알킬 에타노에이트 1 내지 80 중량부b) 1 to 80 parts by weight of alkyl ethanoate
를 포함한다.It includes.
또한 본 발명은 상기 씬너 조성물을 사용하는 반도체 소자 또는 액정표시장치의 제조방법을 제공한다.In addition, the present invention provides a method of manufacturing a semiconductor device or a liquid crystal display device using the thinner composition.
또한 본 발명은In addition, the present invention
a) 알킬렌글리콜 모노알킬 에테르 아세테이트; a) alkylene glycol monoalkyl ether acetates;
b) 알킬 아마이드; 및b) alkyl amides; And
c) 알킬 에타노에이트c) alkyl ethanoates
을 포함하는 포토레지스트 제거용 씬너 조성물을 제공한다.It provides a thinner composition for removing a photoresist comprising a.
바람직하기로는 상기 씬너 조성물은Preferably the thinner composition is
a) 알킬렌글리콜 모노알킬 에테르 아세테이트 1 내지 80 중량부;a) 1 to 80 parts by weight of alkylene glycol monoalkyl ether acetate;
b) 알킬 아마이드 1 내지 98 중량부; 및b) 1 to 98 parts by weight of alkyl amide; And
c) 알킬 에타노에이트 1 내지 80 중량부c) 1 to 80 parts by weight of alkyl ethanoate
를 포함한다.It includes.
또한 본 발명은 상기 씬너 조성물을 사용하는 반도체 소자 또는 액정표시장치의 제조방법을 제공한다.In addition, the present invention provides a method of manufacturing a semiconductor device or a liquid crystal display device using the thinner composition.
이하 본 발명을 상세하게 설명한다. Hereinafter, the present invention will be described in detail.
본 발명의 포토레지스트 제거용 씬너 조성물은 a) 알킬 아마이드 및 b) 알킬 에타노에이트를 포함하는 것을 특징으로 한다.The thinner composition for removing photoresist of the present invention is characterized in that it comprises a) alkyl amide and b) alkyl ethanoate.
본 발명에 사용되는 상기 알킬 아마이드, 알킬 에타노에이트, 및 알킬렌글리콜 모노알킬 에테르 아세테이트는 씬너 조성물에 용제로 사용되며, 각각 반도체 등급의 극히 순수한 것을 사용할 수 있으며, VLSI 등급에서는 0.1 ㎛ 수준으로 여과한 것을 사용할 수 있다.The alkyl amides, alkyl ethanoates, and alkylene glycol monoalkyl ether acetates used in the present invention are used as solvents in the thinner composition, each of which can be used as an extremely pure semiconductor grade, and filtered to a level of 0.1 μm in the VLSI grade. You can use one.
본 발명에 사용되는 상기 a)의 알킬 아마이드는 초기 용해속도를 높여 액정 디스플레이 디바이스에 사용되는 글라스 기판 및 반도체 제조 공정상에 발생되는 문제점을 보완하는 작용을 한다. The alkyl amide of a) used in the present invention increases the initial dissolution rate and serves to compensate for problems in the glass substrate and semiconductor manufacturing process used in the liquid crystal display device.
상기 알킬 아마이드는 N-메틸 아세트 아마이드, 디메틸 포름 아마이드, 또는 디메틸 아세트 아마이드 등을 사용할 수 있으며, 특히 디메틸 아세트 아마이드가 바람직하다. As the alkyl amide, N-methyl acetamide, dimethyl formamide, or dimethyl acetamide may be used. Particularly, dimethyl acetamide is preferable.
상기 알킬 아마이드는 씬너 조성물에 1 내지 99 중량부로 포함되는 것이 바람직하며, 그 함량이 상기 범위내일 경우에는 휘발도 및 용해력의 증가에 있어 더욱 좋다.The alkyl amide is preferably included in the thinner composition in an amount of 1 to 99 parts by weight, and when the content is in the above range, it is more preferable in increasing the volatility and the dissolving power.
본 발명에 사용되는 상기 b)의 알킬 에타노에이트는 알킬기의 탄소수가 1∼4인 것이 바람직하며, 구체적으로 메틸 에타노에이트, 에틸 에타노에이트, 이소프로필 에타노에이트, 노말프로필 에타노에이트, 또는 부틸 에타노에이트 등이 있다. The alkyl ethanoate of b) used in the present invention is preferably an alkyl group having 1 to 4 carbon atoms, specifically methyl ethanoate, ethyl ethanoate, isopropyl ethanoate, normal propyl ethanoate, Or butyl ethanoate.
더욱 바람직하기로는 상기 알킬 에타노에이트로서 점도가 비교적 낮으며 적당한 휘발도를 가지는 이소프로필 에타노에이트, 노말프로필 에타노에이트, 또는 부틸 에타노에이트를 사용하는 것이다. 가장 바람직하기로는 부틸 에타노에이트이며, 부틸 에타노에이트는 각종 수지에 대한 용해도가 우수하며, 특히 표면장력이 낮을 뿐만 아니라, 씬너 조성물에 소정의 함량만 첨가해도 우수한 계면 특성을 발휘할 수 있다. 상기 부틸 에타노에이트는 독성실험에서 마우스에 구강투여로 인한 50 % 치사량을 나타내는 LD50(mouse)은 7.0 g/㎏을 나타내고, 물리적 성질은 끓는점 126.1 ℃, 인화점(클로즈드 컵방식으로 측정) 23 ℃, 점도(25 ℃) 0.74 cps, 표면장력이 25 dyne/㎠이다.More preferably, as the alkyl ethanoate, isopropyl ethanoate, normal propyl ethanoate, or butyl ethanoate having a relatively low viscosity and moderate volatility is used. Most preferably, it is butyl ethanoate, and butyl ethanoate has excellent solubility in various resins, and in particular, has a low surface tension and can exhibit excellent interfacial properties even when only a predetermined content is added to the thinner composition. The butyl ethanoate in LD 50 (mouse) showing a 50% lethal dose due to oral administration in the mouse in the toxicity test represents 7.0 g / ㎏, physical properties of boiling point 126.1 ℃, flash point (measured by the closed cup method) 23 ℃ , Viscosity (25 ° C.) is 0.74 cps, and surface tension is 25 dyne / cm 2.
상기 알킬 에타노에이트는 씬너 조성물에 1 내지 80 중량부로 포함되는 것이 바람직하며, 그 함량이 상기 범위일 경우 적정한 휘발력과 용해력을 갖춰 포토레지스트의 제거에 효과적이라는 잇점이 있다.The alkyl ethanoate is preferably included in the thinner composition in an amount of 1 to 80 parts by weight. When the content is in the above range, the alkyl ethanoate has an appropriate volatilization and dissolving power and is effective in removing the photoresist.
또한 본 발명은 a) 알킬렌글리콜 모노알킬 에테르 아세테이트, b) 알킬 아마이드, 및 c) 알킬 에타노에이트를 포함하는 포토레지스트 제거용 씬너 조성물을 제공하는 바, 상기 씬너 조성물은 a) 알킬렌글리콜 모노알킬 에테르 아세테이트 1 내지 80 중량부, b) 알킬 아마이드 1 내지 98 중량부, 및 c) 알킬 에타노에이트 1 내지 80 중량부를 포함한다.The present invention also provides a thinner composition for removing photoresist comprising a) alkylene glycol monoalkyl ether acetate, b) alkyl amide, and c) alkyl ethanoate, the thinner composition comprising a) alkylene glycol mono 1 to 80 parts by weight of alkyl ether acetate, b) 1 to 98 parts by weight of alkyl amide, and c) 1 to 80 parts by weight of alkyl ethanoate.
본 발명에 사용되는 상기 a)의 알킬렌글리콜 모노알킬 에테르 아세테이트는 알킬기의 탄소수가 1∼5인 것을 사용하는 것이 좋으며, 구체적으로는 프로필렌글리콜 모노메틸 에테르 아세테이트, 프로필렌글리콜 모노에틸 에테르 아세테이트, 프로필렌글리콜 모노프로필 에테르 아세테이트, 또는 프로필렌글리콜 모노부틸 에테르 아세테이트 등이 더욱 좋으며, 특히 고분자에 대한 용해도가 탁월한 프로필렌글리콜 모노메틸 에테르 아세테이트를 사용하는 것이 바람직하다.As the alkylene glycol monoalkyl ether acetate of a) used in the present invention, it is preferable to use an alkyl group having 1 to 5 carbon atoms, specifically, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol Monopropyl ether acetate, or propylene glycol monobutyl ether acetate and the like are more preferred, and in particular, it is preferable to use propylene glycol monomethyl ether acetate having excellent solubility in polymers.
상기 프로필렌글리콜 모노메틸에테르 아세테이트는 공기 중에 노출시 인체에 대한 안전성이 높으며, 물질대사 측면에서도 인체에서 급속히 프로필렌글리콜과 알코올로 분해되어 안전하다. 또한, 독성실험에서 마우스에 구강투여로 인한 50 % 치사량을 나타내는 LD50(mouse)은 8.5 g/㎏을 나타내며 가수분해에 의하여 빠르게 분해된다.The propylene glycol monomethyl ether acetate has high safety for the human body when exposed to air, and in terms of metabolism, it is rapidly decomposed into propylene glycol and alcohol and is safe. In addition, the LD 50 (mouse) showing a 50% lethal dose due to oral administration to mice in the toxicity test represents 8.5 g / kg and is rapidly degraded by hydrolysis.
상기 알킬렌글리콜 모노알킬 에테르 아세테이트는 씬너 조성물에 1 내지 80 중량부로 포함되는 것이 바람직하며, 그 함량이 상기 범위내일 경우에는 적정한 휘발력과 용해력을 갖추어 포토레지스트의 제거에 더욱 효과적이다. The alkylene glycol monoalkyl ether acetate is preferably included in the thinner composition in an amount of 1 to 80 parts by weight, and when the content is in the above range, it has an appropriate volatilization and dissolving power, which is more effective in removing the photoresist.
본 발명에 사용되는 상기 b)의 알킬 아마이드 및 c)의 알킬 에타노에이트는 상기 기재한 바와 동일한 것을 사용할 있음은 물론이다.Of course, the alkylamide of b) and the alkyl ethanoate of c) used in the present invention may be the same as those described above.
또한 본 발명은 상기와 같은 씬너 조성물을 사용하는 반도체 소자 또는 액정표시장치의 제조방법을 제공한다.The present invention also provides a method of manufacturing a semiconductor device or a liquid crystal display device using the thinner composition as described above.
상기와 같은 성분으로 이루어지는 본 발명의 포토레지스트 제거용 씬너 조성물은 적하 또는 노즐을 통한 스프레이 방식으로 분사하여 기판의 에지와 후면 부위에 발생된 불필요한 포토레지스트를 제거한다.The thinner composition for removing photoresist of the present invention comprising the above components is sprayed by dropping or spraying through a nozzle to remove unnecessary photoresist generated at edges and rear surfaces of the substrate.
상기 포토레지스트 제거용 씬너 조성물의 적하 혹은 분사량은 사용하는 감광성 수지의 종류, 막의 두께에 따라 조절하여 사용 가능하며, 특히 5∼100 cc/min의 범위에서 선택하여 사용하는 것이 바람직하다. 또한, 본 발명은 상기와 같이 씬너 조성물을 분사한 후 후속 포토리소그래피 공정을 거쳐 미세 회로 패턴을 형성할 수 있다.The dropping or spraying amount of the thinner composition for removing the photoresist can be used according to the kind of the photosensitive resin and the thickness of the film to be used, and it is particularly preferable to select and use in the range of 5 to 100 cc / min. In addition, the present invention may be formed by spraying the thinner composition as described above to form a fine circuit pattern through a subsequent photolithography process.
상기와 같은 본 발명의 포토레지스트 제거용 씬너 조성물과 이를 이용한 반도체 소자 또는 액정표시장치의 제조방법은 액정 디스플레이 디바이스에 사용되는 글라스 기판 및 반도체 제조에 사용되는 웨이퍼의 가장자리와 후면 부위에 사용되어 불필요하게 부착되어진 포토레지스트를 단시간에 효율적으로 제거할 수 있을 뿐만 아니라, 동시에 인체에 대한 안전성이 높아 작업자에게 보다 안전하며, 다양한 공정, 특히 Spin-less PR 공정에 적용 가능하고, 액정 디스플레이 디바이스 및 반도체 제조공정을 간편화하며 경제적으로 생산수율을 향상시킬 수 있는 잇점이 있다. 또한 본 발명의 포토레지스트 제거용 씬너 조성물은 PR 분사척, 즉 PR 분사용 슬릿노즐(slit nozzle)에 불필요하게 남아있는 PR의 제거에도 탁월한 효과가 있다.As described above, the thinner composition for removing the photoresist of the present invention and a method of manufacturing a semiconductor device or a liquid crystal display device using the same are unnecessary for the glass substrate used for the liquid crystal display device and the edges and the rear portions of the wafer used for the semiconductor manufacturing. Not only can the attached photoresist be removed efficiently in a short time, but also the safety of human body is high, which is safer for workers, and can be applied to various processes, especially Spin-less PR process, and liquid crystal display device and semiconductor manufacturing process. This has the advantage of simplifying and economically improving the production yield. In addition, the thinner composition for removing a photoresist of the present invention has an excellent effect on the removal of PR that is unnecessarily left in the PR jet chuck, that is, the slit nozzle for PR jet.
이하, 본 발명의 이해를 돕기 위하여 바람직한 실시예를 제시하나, 하기 실시예는 본 발명을 예시하는 것일 뿐 본 발명의 범위가 하기 실시예에 한정되는 것은 아니다.Hereinafter, preferred examples are provided to help understanding of the present invention, but the following examples are merely to illustrate the present invention, and the scope of the present invention is not limited to the following examples.
[실시예]EXAMPLE
실시예 1Example 1
n-부틸 아세테이트(n-buthyl acetate, nBA) 70 중량부 및 디메틸 아세트아마이드(dimethyl acetamide, DMAc) 30 중량부를 균일하게 혼합하여 씬너 조성물을 제조하였다.A thinner composition was prepared by uniformly mixing 70 parts by weight of n-butyl acetate (nBA) and 30 parts by weight of dimethyl acetamide (DMAc).
실시예 2∼7, 및 비교예 1∼5Examples 2-7 and Comparative Examples 1-5
상기 실시예 1에서 하기 표 1에 나타낸 성분과 조성비로 사용한 것을 제외하고는 상기 실시예 1과 동일한 방법으로 실시하여 씬너 조성물을 제조하였다. 이때 표 1의 단위는 중량부이다.A thinner composition was prepared in the same manner as in Example 1, except that Example 1 was used as a component and a composition ratio shown in Table 1 below. At this time, the unit of Table 1 is a weight part.
상기 실시예 1 내지 7, 및 비교예 1 내지 5에서 제조한 씬너 조성물의 불필요 포토레지스트 제거(Edge Bead Removing, EBR) 정도를 측정하기 위하여 하기와 같이 EBR 실험을 실시하고, 그 결과를 하기 표 4에 나타내었다.In order to measure the degree of unnecessary photoresist removal (EBR) of the thinner compositions prepared in Examples 1 to 7, and Comparative Examples 1 to 5, an EBR experiment was performed as follows, and the results are shown in Table 4 below. Shown in
먼저 직경이 8 인치인 산화 실리콘 기판을 각각 과산화수소/황산 혼합물을 함유하는 2개의 욕에서 세정(각각의 욕에서 5 분 동안 침잠시킴)한 다음 초순수로 헹구었다. 이 과정은 주문 제작한 세정 설비에서 진행하였다. 이후 이들 기판을 스핀 드라이어(SRD 1800-6, VERTEQ사)에서 회전 건조시켰다. 그 다음 기판의 상부면에 하기 표 2에 나타낸 각각의 포토레지스트를 회전 피복기(EBR TRACK, 고려반도체사)를 사용하여 일정 두께로 피복하였다. 상기 회전 피복조작에 있어서 포토레지스트 10 ㏄를 정지된 기판의 중앙에 적하하였다. 이후, 회전 피복기를 사용하여 500 rpm에서 3 초간 포토레지스트를 분포시킨 다음, 기판을 약 500∼1000 rpm 정도의 회전속도로 가속시켜 각 포토레지스트를 소정의 두께로 조정하였다. 이때, 회전 시간은 약 20∼30 초이다.The silicon oxide substrates, 8 inches in diameter, were first washed in two baths each containing a hydrogen peroxide / sulfuric acid mixture (soaked for 5 minutes in each bath) and then rinsed with ultrapure water. This process was carried out in a customized cleaning facility. These substrates were then spin dried in a spin dryer (SRD 1800-6, VERTEQ). Then, on the upper surface of the substrate, each photoresist shown in Table 2 was coated to a certain thickness using a rotating coater (EBR TRACK, Korea Semiconductor). 10 kPa of photoresist was dripped at the center of the stationary board | substrate in the said rotary coating operation. Thereafter, the photoresist was distributed at 500 rpm for 3 seconds using a rotating coater, and then the substrate was accelerated at a rotational speed of about 500 to 1000 rpm to adjust each photoresist to a predetermined thickness. At this time, the rotation time is about 20 to 30 seconds.
상기와 같이 준비된 포토레지스트가 피복된 기판에 상기 실시예 1 내지 7, 및 비교예 1 내지 5에서 제조한 씬너 조성물을 각각 분사하여 하기 표 3의 조건으로 포토레지스트를 제거하였다. 이때, 각각의 씬너 조성물은 압력계가 장치된 가압통에서 공급되며, 이때의 가압 압력은 1.0 kgf이고, EBR 노즐에서 나오는 씬너 조성물의 유량은 10∼20 ㏄/min으로 하였다.The thinner composition prepared in Examples 1 to 7, and Comparative Examples 1 to 5 was respectively sprayed onto the photoresist-coated substrate prepared as described above to remove the photoresist under the conditions shown in Table 3 below. At this time, each thinner composition was supplied from a pressure vessel equipped with a pressure gauge, and the pressurization pressure at this time was 1.0 kgf, and the flow rate of the thinner composition coming out of the EBR nozzle was 10 to 20 kPa / min.
상기 표 4를 통하여, 본 발명에 따른 실시예 1 내지 7의 씬너 조성물들은 모든 포토레지스트에 대하여 우수한 EBR 성능(EBR line uniformity 양호여부)을 나타내는 반면, 비교예 1 내지 5는 포토레지스트에 대한 침투현상을 억제하는데 있어서 실시예들에 비해 성능이 현저히 저하됨을 확인할 수 있었다.Through Table 4, the thinner compositions of Examples 1 to 7 according to the present invention showed excellent EBR performance (good EBR line uniformity) for all photoresists, whereas Comparative Examples 1 to 5 penetrated the photoresist. It can be seen that the performance is significantly reduced compared to the embodiments in suppressing the.
본 발명에 따른 포토레지스트 제거용 씬너 조성물은 액정 디스플레이 디바이스에 사용되는 글라스 기판 및 반도체 제조에 사용되는 웨이퍼의 가장자리와 후면 부위에 사용되어 불필요하게 부착되어진 포토레지스트를 단시간에 효율적으로 제거할 수 있을 뿐만 아니라, 동시에 인체에 대한 안전성이 높아 작업자에게 보다 안전하며, 다양한 공정, 특히 Spin-less PR 공정에 적용 가능하고, 액정 디스플레이 디바이스 및 반도체 제조공정을 간편화하여 경제적으로 생산수율을 향상시킬 수 있는 효과가 있다. 또한 본 발명의 포토레지스트 제거용 씬너 조성물은 PR 분사척, 즉 PR 분사용 슬릿노즐(slit nozzle)에 불필요하게 남아있는 PR의 제거에도 탁월한 효과가 있다.The thinner composition for removing photoresist according to the present invention can efficiently remove unnecessarily attached photoresist in a short time by being used at the edges and backside portions of a glass substrate used in a liquid crystal display device and a wafer used in semiconductor manufacturing. At the same time, it is safer for workers because of its high safety to human body, and it can be applied to various processes, especially Spin-less PR process, and it has the effect of economically improving production yield by simplifying liquid crystal display device and semiconductor manufacturing process. have. In addition, the thinner composition for removing a photoresist of the present invention has an excellent effect on the removal of PR that is unnecessarily left in the PR jet chuck, that is, the slit nozzle for PR jet.
Claims (9)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020040037385A KR101142868B1 (en) | 2004-05-25 | 2004-05-25 | Thinner composition for removing photosensitive resin |
| JP2005146572A JP4669737B2 (en) | 2004-05-25 | 2005-05-19 | Thinner composition for removing photoresist and method for manufacturing semiconductor device or liquid crystal display device using the same |
| TW094116294A TWI405051B (en) | 2004-05-25 | 2005-05-19 | Thinner composition for removing photosensitive resin |
| CN2005100740420A CN1702560B (en) | 2004-05-25 | 2005-05-25 | Diluent composition for removing photosensitive resin |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020040037385A KR101142868B1 (en) | 2004-05-25 | 2004-05-25 | Thinner composition for removing photosensitive resin |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20050112333A true KR20050112333A (en) | 2005-11-30 |
| KR101142868B1 KR101142868B1 (en) | 2012-05-10 |
Family
ID=35492409
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020040037385A KR101142868B1 (en) | 2004-05-25 | 2004-05-25 | Thinner composition for removing photosensitive resin |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4669737B2 (en) |
| KR (1) | KR101142868B1 (en) |
| CN (1) | CN1702560B (en) |
| TW (1) | TWI405051B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20170094586A (en) * | 2016-02-11 | 2017-08-21 | 주식회사 이엔에프테크놀로지 | Thinner composition for removing color resist |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW200641560A (en) * | 2005-02-09 | 2006-12-01 | Showa Denko Kk | Photosensitive composition removing liquid |
| US8021490B2 (en) | 2007-01-04 | 2011-09-20 | Eastman Chemical Company | Substrate cleaning processes through the use of solvents and systems |
| WO2014104192A1 (en) * | 2012-12-27 | 2014-07-03 | 富士フイルム株式会社 | Resist-removing liquid and resist-stripping method |
| CN106773562A (en) * | 2016-12-23 | 2017-05-31 | 昆山艾森半导体材料有限公司 | A kind of removal AZ photoresists remove glue |
| CN114375378B (en) | 2019-09-24 | 2024-02-09 | 大金工业株式会社 | Welded body |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3248781B2 (en) * | 1993-06-28 | 2002-01-21 | 東京応化工業株式会社 | Solvent for removing and cleaning resist and method for producing base material for producing electronic parts using the same |
| JP3978255B2 (en) * | 1997-06-24 | 2007-09-19 | Ａｚエレクトロニックマテリアルズ株式会社 | Lithographic cleaning agent |
| KR100271761B1 (en) * | 1997-11-21 | 2000-12-01 | 윤종용 | Manufacturing method of semiconductor device |
| KR100638243B1 (en) * | 2000-11-20 | 2006-10-24 | 주식회사 동진쎄미켐 | Thinner compositon for washing resist of lcd device |
| KR100569533B1 (en) * | 2001-10-25 | 2006-04-07 | 주식회사 하이닉스반도체 | Solution composition for removing a remaining photoresist resins |
| JP2005514661A (en) * | 2002-01-11 | 2005-05-19 | クラリアント インターナショナル リミテッド | Cleaning composition for positive or negative photoresist |
| KR100843984B1 (en) * | 2002-02-22 | 2008-07-07 | 주식회사 동진쎄미켐 | Thinner composition for removing photosensitive resin |
-
2004
- 2004-05-25 KR KR1020040037385A patent/KR101142868B1/en active IP Right Grant
-
2005
- 2005-05-19 TW TW094116294A patent/TWI405051B/en not_active IP Right Cessation
- 2005-05-19 JP JP2005146572A patent/JP4669737B2/en not_active Expired - Fee Related
- 2005-05-25 CN CN2005100740420A patent/CN1702560B/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20170094586A (en) * | 2016-02-11 | 2017-08-21 | 주식회사 이엔에프테크놀로지 | Thinner composition for removing color resist |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI405051B (en) | 2013-08-11 |
| JP4669737B2 (en) | 2011-04-13 |
| TW200604760A (en) | 2006-02-01 |
| JP2005338825A (en) | 2005-12-08 |
| CN1702560A (en) | 2005-11-30 |
| CN1702560B (en) | 2011-08-03 |
| KR101142868B1 (en) | 2012-05-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101352509B1 (en) | Thinner composition | |
| JP4669737B2 (en) | Thinner composition for removing photoresist and method for manufacturing semiconductor device or liquid crystal display device using the same | |
| KR20070052943A (en) | Thinner composition for removing photoresist | |
| KR100951364B1 (en) | Thinner composition for removing photosensitive resin | |
| KR101215429B1 (en) | Thinner composition for removing photosensitive resin | |
| KR20050032719A (en) | A thinner composition for removing photosensitive resin | |
| KR101370704B1 (en) | thinner composition for removing photosensitive resin and anti-reflective coating | |
| KR20030078374A (en) | Thinner composition for removing photosensitive resin | |
| KR20140101156A (en) | Thinner compositoin and uses thereof | |
| KR101016724B1 (en) | Thinner composition for removing photosensitive resin | |
| KR101109057B1 (en) | Thinner composition for removing photosensitive resin | |
| KR20110016137A (en) | Thinner composition for removing photosensitive resin | |
| KR100951365B1 (en) | Thinner composition for removing photoresist | |
| KR20110128604A (en) | Thinner composition for removing photosensitive resin and anti-reflective coating | |
| KR101370693B1 (en) | thinner composition for removing photosensitive resin and anti-reflective coating | |
| KR102652985B1 (en) | Thinner composition for improving applying performance a photosensitive resin and anti-reflective coating, and removing the photosensitive resin and anti-reflective coating | |
| KR101213144B1 (en) | Thinner composition for removing photosensitive resin | |
| KR20110016138A (en) | Thinner composition for removing photosensitive resin | |
| KR100742120B1 (en) | Thinner composition for removing photosensitive resin | |
| KR20050037972A (en) | Thinner composition for removing photosensitive resin | |
| KR20130016882A (en) | Thinner composition for removing photosensitive resin or anti-reflective coating | |
| KR20130016881A (en) | Thinner composition for removing photosensitive resin or anti-reflective coating | |
| KR20100027511A (en) | Thinner composition for removing photosensitive resin and anti-reflective coating | |
| KR20110127817A (en) | Thinner composition for removing photosensitive resin and anti-reflective coating | |
| KR20070013475A (en) | Thinner composition for removing photoresist |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| E902 | Notification of reason for refusal | ||
| AMND | Amendment | ||
| E601 | Decision to refuse application | ||
| J201 | Request for trial against refusal decision | ||
| AMND | Amendment | ||
| B701 | Decision to grant | ||
| GRNT | Written decision to grant | ||
| FPAY | Annual fee payment |
Payment date: 20160308 Year of fee payment: 5 |
|
| FPAY | Annual fee payment |
Payment date: 20170308 Year of fee payment: 6 |
|
| FPAY | Annual fee payment |
Payment date: 20180319 Year of fee payment: 7 |
|
| FPAY | Annual fee payment |
Payment date: 20200309 Year of fee payment: 9 |