KR20050096361A - 플래시 메모리의 셀프 어라인 소스 제조방법 - Google Patents
플래시 메모리의 셀프 어라인 소스 제조방법 Download PDFInfo
- Publication number
- KR20050096361A KR20050096361A KR1020040021532A KR20040021532A KR20050096361A KR 20050096361 A KR20050096361 A KR 20050096361A KR 1020040021532 A KR1020040021532 A KR 1020040021532A KR 20040021532 A KR20040021532 A KR 20040021532A KR 20050096361 A KR20050096361 A KR 20050096361A
- Authority
- KR
- South Korea
- Prior art keywords
- self
- flash memory
- sidewalls
- aligned source
- gate
- Prior art date
Links
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D21/00—Defrosting; Preventing frosting; Removing condensed or defrost water
- F25D21/14—Collecting or removing condensed and defrost water; Drip trays
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D23/00—General constructional features
- F25D23/003—General constructional features for cooling refrigerating machinery
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D23/00—General constructional features
- F25D23/10—Arrangements for mounting in particular locations, e.g. for built-in type, for corner type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D2321/00—Details or arrangements for defrosting; Preventing frosting; Removing condensed or defrost water, not provided for in other groups of this subclass
- F25D2321/14—Collecting condense or defrost water; Removing condense or defrost water
- F25D2321/141—Removal by evaporation
- F25D2321/1412—Removal by evaporation using condenser heat or heat of desuperheaters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D2321/00—Details or arrangements for defrosting; Preventing frosting; Removing condensed or defrost water, not provided for in other groups of this subclass
- F25D2321/14—Collecting condense or defrost water; Removing condense or defrost water
- F25D2321/143—Collecting condense or defrost water; Removing condense or defrost water characterised by means to fix, clamp, or connect water pipes or evaporation trays
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D2321/00—Details or arrangements for defrosting; Preventing frosting; Removing condensed or defrost water, not provided for in other groups of this subclass
- F25D2321/14—Collecting condense or defrost water; Removing condense or defrost water
- F25D2321/144—Collecting condense or defrost water; Removing condense or defrost water characterised by the construction of drip water collection pans
- F25D2321/1441—Collecting condense or defrost water; Removing condense or defrost water characterised by the construction of drip water collection pans inside a refrigerator
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Semiconductor Memories (AREA)
- Non-Volatile Memory (AREA)
Abstract
Description
Claims (1)
- 기판 상에 터널산화막, 플로팅 게이트, 절연막, 콘트롤 게이트가 적층된 게이트를 인접하게 형성한 후 그 게이트의 측면에 측벽을 형성하는 단계와;상기 구조의 상부전면에 상기 측벽과는 선택적 식각이 가능한 층간절연막을 증착하고 패터닝하여 상기 인접한 게이트의 사이 기판영역을 노출시키는 단계와;상기 구조의 상부전면에 다결정실리콘을 증착하고, 에치백하여 상기 인접한 게이트의 측벽 사이 기판상에 접하는 셀프 어라인 소스를 형성하는 단계와;상기 층간절연막을 제거하는 단계로 이루어진 것을 특징으로 하는 플래시 메모리의 셀프 어라인 소스 제조방법.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020040021532A KR100710646B1 (ko) | 2004-03-30 | 2004-03-30 | 플래시 메모리의 셀프 어라인 소스 제조방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020040021532A KR100710646B1 (ko) | 2004-03-30 | 2004-03-30 | 플래시 메모리의 셀프 어라인 소스 제조방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20050096361A true KR20050096361A (ko) | 2005-10-06 |
KR100710646B1 KR100710646B1 (ko) | 2007-04-24 |
Family
ID=37276447
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020040021532A KR100710646B1 (ko) | 2004-03-30 | 2004-03-30 | 플래시 메모리의 셀프 어라인 소스 제조방법 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR100710646B1 (ko) |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06214662A (ja) * | 1993-01-14 | 1994-08-05 | Canon Inc | 温度制御装置 |
-
2004
- 2004-03-30 KR KR1020040021532A patent/KR100710646B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
KR100710646B1 (ko) | 2007-04-24 |
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