KR20050012688A - 포토마스크 블랭크용 기판의 선정방법 - Google Patents
포토마스크 블랭크용 기판의 선정방법Info
- Publication number
- KR20050012688A KR20050012688A KR1020040057851A KR20040057851A KR20050012688A KR 20050012688 A KR20050012688 A KR 20050012688A KR 1020040057851 A KR1020040057851 A KR 1020040057851A KR 20040057851 A KR20040057851 A KR 20040057851A KR 20050012688 A KR20050012688 A KR 20050012688A
- Authority
- KR
- South Korea
- Prior art keywords
- substrate
- shape
- photomask
- film
- top surface
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/60—Substrates
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/50—Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
- G03F1/84—Inspecting
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
Description
Claims (2)
- 적어도 마스킹 막 또는 위상 시프트 막을 포함하는 하나이상의 막의 층이 포토마스크 블랭크를 형성하기 위해 포토마스크 블랭크용 기판의 상면에 성막되고, 성막된 막은 포토마스크를 형성하도록 패터닝되고, 포토마스크는 노광 툴에 장착되는 공정에서의 사용을 위한 포토마스크 블랭크용 기판의 선정방법에 있어서, 상기 방법은,포토마스크가 노광 툴에 장착되었을 때 막이 성막되기 이전에, 기판의 상면의 형상의 변화를 시뮬레이팅하는 단계,포토마스크가 노광 툴에 장착되었을 때 기판 상면에 편평 형상을 부여하는 상기 변화 이전에 기판 상면의 형상을 결정하는 단계, 및수용가능한 기판으로서, 성막 이전에 상기 상면 형상을 갖는 기판을 선정하는 단계를 포함하는 것을 특징으로 하는 방법.
- 제1항에 있어서, 포토마스크가 노광툴에 장착되었을 때 기판 상면의 패터닝 영역에 부여되는 상면 형상은, 그 형상의 변화 이전에 기판 상면의 형상이 패터닝-영역 최소자승 평면으로부터 패터닝 영역까지의 높이에 대한 최대값과 최소값에 0.5㎛ 이하인 차이를 가지면 편평 형상인 것을 특징으로 하는 방법.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2003-00280464 | 2003-07-25 | ||
JP2003280464A JP4232018B2 (ja) | 2003-07-25 | 2003-07-25 | フォトマスクブランク用基板の選定方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20050012688A true KR20050012688A (ko) | 2005-02-02 |
KR100803634B1 KR100803634B1 (ko) | 2008-02-19 |
Family
ID=34074781
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020040057851A KR100803634B1 (ko) | 2003-07-25 | 2004-07-23 | 포토마스크 블랭크용 기판의 선정방법 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7070888B2 (ko) |
JP (1) | JP4232018B2 (ko) |
KR (1) | KR100803634B1 (ko) |
DE (1) | DE102004035610B4 (ko) |
TW (1) | TWI330590B (ko) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005043836A (ja) | 2003-07-25 | 2005-02-17 | Shin Etsu Chem Co Ltd | フォトマスクブランク用基板の選定方法 |
TWI329779B (en) * | 2003-07-25 | 2010-09-01 | Shinetsu Chemical Co | Photomask blank substrate, photomask blank and photomask |
JP4314462B2 (ja) * | 2003-07-25 | 2009-08-19 | 信越化学工業株式会社 | フォトマスクブランク用基板の製造方法 |
DE102005063624B4 (de) | 2004-09-29 | 2019-06-27 | Hoya Corp. | Substrat für Maskenrohling, Maskenrohling, Belichtungsmaske und Herstellungsverfahren für Maskenrohlingssubstrat |
JP5153998B2 (ja) | 2005-02-25 | 2013-02-27 | Hoya株式会社 | マスクブランク用透明基板の製造方法、マスクブランクの製造方法、露光用マスクの製造方法、及び半導体デバイスの製造方法 |
JP2007199434A (ja) * | 2006-01-27 | 2007-08-09 | Dainippon Printing Co Ltd | プロキシミティ方式の露光方法とそれに用いられるマスク基板、および該マスク基板の作製方法 |
JP4971278B2 (ja) * | 2008-09-25 | 2012-07-11 | 信越化学工業株式会社 | フォトマスクブランクスの選択方法及び製造方法並びにフォトマスクの製造方法 |
JP4728414B2 (ja) | 2009-03-25 | 2011-07-20 | Hoya株式会社 | マスクブランク用基板、マスクブランク、フォトマスクおよび半導体デバイスの製造方法 |
JP4853685B2 (ja) * | 2009-03-31 | 2012-01-11 | 信越化学工業株式会社 | フォトマスクブランク又はその製造中間体の検査方法及び良否判定方法 |
JP5683930B2 (ja) * | 2010-01-29 | 2015-03-11 | Hoya株式会社 | マスクブランク用基板、マスクブランク、転写用マスク及び半導体デバイスの製造方法 |
JP4819191B2 (ja) * | 2011-04-14 | 2011-11-24 | Hoya株式会社 | マスクブランク用基板、マスクブランク、フォトマスクおよび半導体デバイスの製造方法 |
US11688589B2 (en) | 2013-06-10 | 2023-06-27 | View, Inc. | Carrier with vertical grid for supporting substrates in coater |
CN105378142B (zh) * | 2013-06-10 | 2019-04-19 | 唯景公司 | 用于溅射系统的玻璃托盘 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100805360B1 (ko) * | 1999-06-07 | 2008-02-20 | 더 리전트 오브 더 유니버시티 오브 캘리포니아 | 코팅층을 갖는 반사 마스크 기판 |
WO2002065519A1 (fr) * | 2001-02-13 | 2002-08-22 | Nikon Corporation | Dispositif de support, procede de support, dispositif d'exposition et procede de production des dispositifs |
US6537844B1 (en) * | 2001-05-31 | 2003-03-25 | Kabushiki Kaisha Toshiba | Manufacturing method for exposure mask, generating method for mask substrate information, mask substrate, exposure mask, manufacturing method for semiconductor device and server |
JP3572053B2 (ja) | 2001-05-31 | 2004-09-29 | 株式会社東芝 | 露光マスクの製造方法、マスク基板情報生成方法、半導体装置の製造方法およびサーバー |
DE10314212B4 (de) * | 2002-03-29 | 2010-06-02 | Hoya Corp. | Verfahren zur Herstellung eines Maskenrohlings, Verfahren zur Herstellung einer Transfermaske |
TWI329779B (en) * | 2003-07-25 | 2010-09-01 | Shinetsu Chemical Co | Photomask blank substrate, photomask blank and photomask |
JP2005043836A (ja) * | 2003-07-25 | 2005-02-17 | Shin Etsu Chem Co Ltd | フォトマスクブランク用基板の選定方法 |
JP4314462B2 (ja) * | 2003-07-25 | 2009-08-19 | 信越化学工業株式会社 | フォトマスクブランク用基板の製造方法 |
-
2003
- 2003-07-25 JP JP2003280464A patent/JP4232018B2/ja not_active Expired - Lifetime
-
2004
- 2004-07-22 DE DE102004035610.6A patent/DE102004035610B4/de active Active
- 2004-07-22 TW TW093121955A patent/TWI330590B/zh active
- 2004-07-23 US US10/897,078 patent/US7070888B2/en active Active
- 2004-07-23 KR KR1020040057851A patent/KR100803634B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
DE102004035610A1 (de) | 2005-03-10 |
US20050019678A1 (en) | 2005-01-27 |
TWI330590B (en) | 2010-09-21 |
KR100803634B1 (ko) | 2008-02-19 |
JP4232018B2 (ja) | 2009-03-04 |
TW200517263A (en) | 2005-06-01 |
JP2005043837A (ja) | 2005-02-17 |
DE102004035610B4 (de) | 2021-01-21 |
US7070888B2 (en) | 2006-07-04 |
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