KR200452471Y1

KR200452471Y1 - Embossing jig

Info

Publication number: KR200452471Y1
Application number: KR2020100000880U
Authority: KR
Inventors: 김영곤
Original assignee: (주)코리아스타텍
Priority date: 2010-01-26
Filing date: 2010-01-26
Publication date: 2011-03-03

Abstract

The present invention relates to an embossing jig, and looking at the features of the configuration, jig plate 10; The first jig groove 22 recessed in a hemispherical shape on one surface of the jig plate 10 and the bottom surface of the jig plate 10 corresponding to the first jig groove 22 is formed in a hemispherical shape. And a perforation 20 having a second jig groove 24 in which the jig hole 26 is formed in communication with the first jig groove 22.
Accordingly, the subject innovation is that the first and second jig grooves of the hemispherical shape are formed to be symmetrical with each other in the form of an hourglass, so that the spray projections are formed in the hemispherical shape during the thermal spraying process, so that the embossing jig can be easily separated after the thermal spraying process. The peeling phenomenon of the embossing protrusion due to the friction with the perforation is prevented.

Description

Embossing jig {Embosing jig}

The present invention relates to an embossing jig, and more particularly, to an embossing jig for forming a thermal spray projection on an electrode plate of an embossing type used for stably fixing an array substrate in a TFT manufacturing process.

The electrode plate is a device that is installed on a plasma source, which is an etchinger and a CVD equipment used for manufacturing a thin film transistor (TFT), to stably fix an object such as a glass substrate. Plane type that controls the contact area with the object to be processed according to the shape of the contact surface, trench type that repeatedly constitutes the valleys and valleys at regular intervals on the contact surface, and forms a plurality of fine protrusions on the contact surface It is divided into emboss type.

For example, the electrode plate of the embossed type has only a small part of the projection contacting the workpiece, so that the contact area is minimized to prevent slippage of the workpiece, and the overall flatness and load uniformity are maintained while the workpiece is fixed. It is characterized by the fact that the workpiece is not easily contaminated due to the dispersion effect and the depressions between the protrusions.

However, conventionally, the embossing type electrode plate is manufactured by integrally forming the embossing protrusion on the body, and then subjecting the surface to ceramic spray treatment. Although the upper surface of the electrode plate is regenerated by ceramic thermal spraying after cutting a part of the electrode plate, when the electrode plate is regenerated and used several times, the conventional thermally sprayed ceramic layer is not completely removed, and the ceramic thermally thermally sprayed again with some remaining state. When the regeneration operation is repeated about 10 times, the spray thickness gradually becomes thick, and the number of times that the electrode plate can be reproduced and used is extremely limited due to the phenomenon that the embossing projection is relatively small.

In addition, if the blasting process is wrong, not only the ceramic thermal spray layer but also the protrusions formed on the body are cut and damaged, and in particular, even if only some of the protrusions are damaged, it is impossible to repair locally, and thus, the body must be newly manufactured. In addition, when the electrode plate is newly manufactured, cylindrical embossing protrusions must be formed by cutting processing using equipment such as a machining center, resulting in a decrease in workability and productivity, resulting in a rise in manufacturing cost.

Accordingly, the present applicant forms a projection layer on the electrode plate body using the embossing jig in Patent Registration No. 10-0908227, so that the electrode plate body is not replaced as a whole even if the embossing projection is deformed or damaged by several regeneration operations. The new embossing protrusions can be easily formed and semi-permanently extended, and in particular, even if the embossing protrusions are locally damaged, the damaged parts can be partially repaired. have.

However, embossing jig has a lot of problems in manufacturing and use as perforations are mainly formed through the cutting process on the jig plate.

First, the manufacturing cost is increased along with the delay in processing time due to cutting tens of thousands to hundreds of thousands of perforations.

Second, as the upper and lower diameters of the perforations are formed uniformly, as shown in FIG. 4, after the thermal spraying process, the perforations and the thermal spraying projections 1 mesh with each other, thereby removing the thermal spraying projections when the embossing jig is removed.

The present invention has been devised to solve the above problems, and relates to an embossing jig that is easy to separate after the thermal spray treatment, as well as peeling of the thermal spray projections due to friction with the perforations and thermal expansion of the jig plate.

Features of the present invention to achieve this purpose, the jig plate 10; The first jig groove 22 recessed in a hemispherical shape on one surface of the jig plate 10 and the bottom surface of the jig plate 10 corresponding to the first jig groove 22 is formed in a hemispherical shape. And a perforation 20 having a second jig groove 24 in which the jig hole 26 is formed in communication with the first jig groove 22.

At this time, the jig plate 10 is characterized in that formed of a copper material having a thickness of 0.3 ~ 1mm.

In addition, the first and second jig grooves 22 and 24 may be formed by etching the both surfaces of the jig plate 10.

According to the above configuration and action, the present invention is formed so that the first and second jig grooves of the hemispherical shape are symmetrical with each other in the form of an hourglass, so that the spraying projections are formed in the hemispherical shape during the thermal spraying treatment, so that the embossing jig is separated after the thermal spraying treatment. Easily, of course, there is an effect that the peeling phenomenon of the embossing projections due to friction with the perforation is prevented.

1 is a configuration diagram showing an overall embossing jig according to the present invention.
Figure 2 is a block diagram showing a process of forming a perforation of the embossing jig according to the present invention.
Figure 3 is a block diagram showing a state of use of the embossing jig according to the present invention.
4 is a configuration diagram showing a conventional embossing jig.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The present invention relates to an embossing jig, wherein the embossing jig passes through a plurality of perforations formed through the sprayed ceramic particles to form embossed protrusions on the upper surface of the electrostatic chuck body, and the embossing jig is easily removed after the spraying process. In order to prevent the peeling phenomenon of the thermal spraying projection 1 during separation of the jig, the perforation 20 is composed of one and two jig grooves 22 and 24 and a jig hole 26.

Jig plate 10 according to the present invention is formed of a copper material having a thickness of 0.3 ~ 1mm. The jig plate 10 is a plate-shaped jig, which is easily divided in consideration of the overall size of the electrostatic chuck body and is manufactured to be prevented from deformation due to bending, and is prevented from flowing during the thermal spraying process while being seated on the upper surface of the electrostatic chuck body. It is fixed by the connecting member. In addition, since the jig plate 10 is formed of a copper material having excellent thermal conductivity and a thin thickness of 0.3 to 1 mm, the defective rate due to the thermal spraying is reduced by rapid recovery from thermal deformation due to local strong heat by the thermal spraying flame.

In addition, the perforation 20 according to the present invention is the back surface of the jig plate 10 corresponding to the first jig groove 22 and the first jig groove 22 formed recessed in one surface of the jig plate 10. The second jig groove 24 is formed in a hemispherical shape, the bottom surface is in communication with the first jig groove 22 to form a jig hole 26. The first and second jig grooves 22 and 24 are formed by etching the both sides of the jig plate 10, wherein the etching is performed by performing corrosion treatment on only the necessary parts and then unnecessary. As a conventional surface treatment method of removing a portion to obtain a desired shape, a portion corresponding to the first and second jig grooves 22 and 24 of the jig plate 10 is formed by corrosion.

In the non-corrosive etching process, the jig plate 10 is immersed in the etchant to corrode both sides at the same time. However, since the corrosion time is set to be shorter than before, the hemispherical first and second jig grooves 22 and 24 are respectively formed on both sides. Is formed.

In other words, as shown in (a) of FIG. 2, after the anticorrosive etching treatment is performed on the remaining portions except for the portions where the first and second jig grooves 22 and 24 are to be formed on both surfaces of the jig plate 10, 1 and 2 jig grooves 22 and 24 are recessed in a hemispherical shape, respectively, as shown in FIG. 2 (b), and the jig holes 26 at positions in which the first and second jig grooves 22 and 24 are symmetric with each other. Are communicated with each other through the cross-sectional shape to form an hourglass shape.

Accordingly, as shown in FIG. 3, the thermal spray projections 1 sprayed on the upper surface of the electrostatic chuck body through the perforations 20 are formed in a hemispherical shape, the diameter of which is narrowed from the lower portion to the upper portion. Even if (10) is deformed, the peeling phenomenon of the thermal spray projections 1 is prevented, and after the thermal spraying treatment, the jig plate 10 is easily separated and the thermal spray projections 1 are damaged and peeled off due to friction with the perforations 20. This is avoided.

10: jig board 20: perforation

Claims

Jig plate 10;
The first jig groove 22 recessed in a hemispherical shape on one surface of the jig plate 10 and the bottom surface of the jig plate 10 corresponding to the first jig groove 22 is formed in a hemispherical shape. Embossing jig, characterized in that it comprises; a perforation (20) is provided with a second jig groove (24) in communication with the first jig groove (22) is formed a jig hole (26).

The method of claim 1,
The jig plate 10 is embossed jig, characterized in that formed of a copper material having a thickness of 0.3 ~ 1mm.

The method of claim 1,
The first and second jig grooves (22) and (24) are embossed jig, characterized in that formed by etching the etching (Etching) on both sides of the jig plate (10).