KR20040105118A - Working stage system for Flat Panel Display and Flat Panel Display working method using its system - Google Patents

Abstract

PURPOSE: A working stage system for flat display and a method for proceeding a working process using the same are provided to save the time required to load or unload the flat display, thereby improving the efficiency of working process by performing a loading process, an unloading process and a working process of the flat display consecutively on a single working table. CONSTITUTION: A working stage system for flat display comprises a working table(16) having a plurality of work-sites(16a,16b), a working unit for performing a working process, a working unit-moving unit, a loading/unloading unit for load/unload the flat display on the working table, and a controller for controlling the loading/unloading unit, the working unit and the working unit-moving unit selectively. When the flat display is loaded on the working table, the working unit-moving unit moves the working unit to the working table, thereby performing the working process of the flat display.

Description

Working stage system for flat panel display and flat panel display working method using its system}

The present invention relates to a work stage system for a flat display and a flat display working method using the system, and more particularly, to continuously and simultaneously loading and unloading the LCD and the work on the LCD in one work table. The work stage system and the system for a flat panel display, which saves loading and unloading time by increasing the work volume of the LCD processed by the worktable per reference time, not only increases work efficiency but also significantly increases productivity. It relates to a flat display working method using.

The so-called flat panel display (FPD) refers to a flat panel display as a whole, and is categorized into a cathode ray tube (CRT) display and a liquid crystal display (LCD) to be described later.

The CRT is made of glass and panels joined together in front and rear, and the electron gun is accommodated inside the neck portion of the funnel, which has a high resolution but a heavy weight. Accordingly, as the display industry develops in recent years, the supply and demand of LCDs rather than CRTs are increasing. Hereinafter, for convenience of description, the flat panel display will be described as LCD.

1 is a schematic plan view of a work stage system for a conventional planar display, and FIG. 2 is a side view of FIG. As shown in these figures, a conventional work stage system for a flat panel display has a work table 116 in which the LCD 101 of a work object is largely arranged, and is mounted on the work table 116 and mounted on the work table 116. It includes a working unit 120 for performing a predetermined operation toward the LCD 101 loaded in the). One side of the work table 116 is provided with a robot 117 that moves in one direction to move or unload the LCD 101 to the work table 116.

A plurality of support pins 119 supporting the lower surface of the LCD 101 are provided on the work table 116. When the LCD 101 is moved to the worktable 116 by the robot 117, the support pins 119 stand up to support the lower surface of the LCD 101 as an end thereof, and when the robot 117 is taken out, one direction. By rotating the LCD 101 to face the top of the work table (116).

On the upper side of the worktable 116, a pair of columns 118a spaced apart from each other at predetermined intervals is mounted, and a connection portion 118b interconnecting the columns 118a between the pair of columns 118a. Is provided. The working unit 120 is provided in the connecting portion 118b to perform a predetermined operation toward the LCD 101 while moving along the connecting portion 118b by a predetermined electrical signal.

Here, the predetermined operation toward the LCD 101, as will be described later in detail, in addition to the inspection of the short circuit and disconnection of the electrical signal that can be formed in the LCD 101, repairing it, etching, such as repairing, etc. ) Includes all operations, inspections, and repairs performed before the product is released as a good product, which will be described later.

Looking at the operation mechanism for a conventional work stage system for a flat display having such a configuration is as follows.

First, the robot 117 grips one LCD 101 from a cassette (not shown) in which the LCD 101 of the work object is gathered, and then arranges the LCD 101 above the work table 116. When the LCD 101 is disposed above the work table 116 by the robot 117, the respective support pins 119 rotate so that their ends face upward.

When the support pins 119 stand upright, the robot 117 lowers (loads) the held LCD 101 to the ends of the respective support pins 119. Then, it returns to the original position again.

When the LCD 101 is placed at the ends of the standing support pins 119, the support pins 119 rotate in one direction to face the LCD 101 on the work table 116. The position at this time becomes the working position of the LCD 101.

As such, when the LCD 101 is disposed at a predetermined working position by the robot 117 and the support pins 119, the working unit 120 moves along the connection portion 118b by the predetermined electrical signal. The predetermined work is performed toward

As a result, in the case of a conventional flat display work stage system, a large number of steps are taken in succession, such as loading of the LCD 101, work on the LCD 101, and unloading of the finished LCD 101. The individual operations are performed one by one on the LCD 101.

By the way, in such a conventional flat display work stage system, the LCD 101 of the work object is loaded or finished on the work table 116 rather than the actual work time of actually working on the LCD 101. The time taken to unload 101 from worktable 116 is relatively much longer.

Since the time required for loading and unloading the LCD 101 is too long, it is impossible to efficiently perform the operation on the LCD 101, which inevitably lowers work efficiency and significantly reduces productivity. In fact, it is true that the actual amount of work of the LCD 101 which one work table 116 processes per reference time is not so large.

Therefore, if the loading and unloading process of the LCD 101 and the work on the LCD 101 can be performed in parallel in one work table 116, the work table 116 may be the LCD 101 of the work target. Can save the time taken to load the unloaded LCD 101 from the worktable 116 from the worktable 116, thereby increasing the amount of work of the LCD 101 that the worktable 116 processes per reference time, thereby increasing work efficiency and productivity. This could be greatly improved.

Accordingly, an object of the present invention is to save the loading and unloading time by successively performing the loading and unloading process of the LCD and the operation on the LCD in one working table, so that the working table processes per reference time. It is to provide a work stage system for a flat panel display and a planar display work method using the system, in which the productivity of the LCD is increased to increase the work efficiency and the productivity can be significantly improved.

1 is a schematic plan view of a work stage system for a conventional flat display;

2 is a side view of FIG. 1;

3 is a schematic plan view of a work stage system for a flat panel display according to a first embodiment of the present invention;

4 is a side view of FIG. 3;

5 is a schematic plan view of a work stage system for a flat panel display according to a second embodiment of the present invention;

6 is a schematic diagram showing coordinate information for an LCD;

7 is a perspective view showing a state in which a work stage system for a flat display according to a third embodiment of the present invention is applied as an inspection apparatus;

8 is a partially enlarged perspective view of FIG. 7;

9 is a partially enlarged perspective view of FIG. 8;

10 is an enlarged perspective view of the lower portion of the working unit;

* Explanation of symbols for the main parts of the drawings

1: LCD 10: Cabinet

12: inspection stage 14: horizontal adjuster

16: work table 16a: first work position

16b: 2nd working position 17: robot

18: controller 19a: first support pin group

19b: second support pin group 20: walking unit

21: first probe card 21a: first probe tip

22: second probe card 22a: second probe tip

32: monitor 34: control

40: X axis moving part 50: Y axis moving part

60: Z axis moving part 70: camera

The object is, according to the present invention, a work table having a plurality of working positions so that at least two or more flat display of the work object can be arranged; A working unit provided on an upper portion of the work table to continuously perform a predetermined work toward the planar display loaded at each work position; Unit moving means for moving the working unit with respect to the working position; A loading / unloading unit for continuously loading the flat display of the work target into the plurality of empty working positions and the unloading of the flat display completed by the working unit; And a controller for selectively controlling said loading / unloading unit, said working unit and said unit moving means.

Here, the loading / unloading part is provided in a plurality of working positions on the upper portion of the work table, and when the flat display is loaded into the work position by a separate robot, the plurality of support pins supporting the flat display. Can be replaced.

The plurality of support pins are driven differently by the controller.

The unit moving means includes an X-axis moving unit for moving the working unit in parallel with the loading and unloading directions of the flat panel display loaded onto the work table; A Y-axis moving unit which moves the working unit along the horizontal direction with respect to the X-axis moving unit; And a Z-axis moving unit for partially elevating the working unit along the transverse direction with respect to the imaginary plane of XY relative to the X and Y axis moving units.

The working unit may be employed to inspect a short circuit and a disconnection of an electrical signal that can be formed in the flat panel display. This is explained in the third embodiment.

The working unit can be employed for repairing a defect formed in the flat panel display, which will be described as a fourth embodiment. In this case, the repair operation may include at least one of a module repair, a panel repair, an array repair, and a depo repair.

The working unit may be employed for the task of partially etching the planar display. The working unit may be mounted on any one of an A.O.I device or an A.O.I repair device.

On the other hand, according to another field of the present invention, the above object, according to the present invention, the step of loading a flat panel display to a plurality of working positions formed on the work table; The working unit performing a predetermined work toward the flat panel display while continuously moving toward the work position in the loading order; Unloading the planar display on which work by the working unit is completed; It is also achieved by a planar display working method using a work stage system for a planar display comprising the step of loading a new planar display into the corresponding unloaded and empty work position.

Here, it may be preferable that the above steps are performed continuously by a predetermined controller.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings, and in the description of each embodiment, the same reference numerals will be given to the same components.

First embodiment

3 is a schematic plan view of a work stage system for a planar display according to a first embodiment of the present invention, and FIG. 4 is a side view of FIG.

As shown in these figures, in the work stage system for a flat display according to the first embodiment of the present invention, at least two flat displays (hereinafter referred to as LCD 1) of a work subject can be arranged. A work table 16 having a plurality of work positions, a working unit 20 provided on an upper portion of the work table 16 to continuously perform a predetermined work toward the LCD 1 loaded at each work position, and The LCD 1 completed by the working unit 20 and the operation of loading the LCD 1 of the work target into a plurality of working positions include a loading / unloading unit for continuously performing the unloading operation to the corresponding working position. And a controller 18 for selectively controlling the loading / unloading unit, the working unit 20 and the unit moving means.

One side of the worktable 16 is provided with a robot 17 that moves in each direction to move or unload the LCD 1 to the worktable 16. The robot 17 is movable by a separate moving means 17a, as shown in FIG. However, in addition to this type of robot 17, a robot used to move a wafer in the semiconductor industry may be employed.

In the first embodiment, two work positions are provided at the top of the work table 16. Hereinafter, for convenience of description, the two working positions will be described as first working position 16a and second working position 16b from the left side of FIG. 3, respectively.

The working unit 20 continuously performs a predetermined work toward the corresponding LCD 1 while moving to the desired position from the top of the work table 16 by a predetermined unit moving means.

At this time, as the work that can be performed by the working unit 20, an operation for checking whether there is a short circuit or disconnection of an electrical signal that can be formed on the LCD 1 (see the third embodiment), a defect formed in the LCD 1 Includes all operations performed before the LCD 1 is released to a quality product, including repairing the device (the repair apparatus filed by the applicant), and partially etching the LCD 1; .

The unit moving means has various configurations for moving the working unit 20 to the X / Y / Z axis, respectively, which will be described in the following third embodiment.

Typically, the LCD 1 is formed of a thin plate-like body having a relatively large area. Therefore, the robot 17 supports the lower part of the LCD 1 of the plate-like object, and then rotates or moves to move or unload the first and second work positions 16a and 16b on the work table 16. It is advantageous to have a structure that is. Since the robot 17 is frequently employed in the general semiconductor equipment industry, the description thereof will be omitted.

When the robot 17 supports the lower part of the LCD 1 and places it on the first and second working positions 16a and 16b, the first and second working positions 16a and 16b and the robot 17 If there is no separation interval with the robot 17 can not be taken out.

Therefore, in this embodiment, the loading / unloading unit is further provided in conjunction with the work of the robot 17. The loading / unloading unit, as shown in FIGS. 3 and 4, is provided on the work table 16, and the robot 1 makes the LCD 1 move to the first and second working positions 16a and 16b. In the case of being loaded into a), the LCD 1 may be employed as a plurality of support pins 19 for supporting the LCD 1 so as to be supported at the work position.

The support pin 19 is also controlled by the controller 18. In the present embodiment, the support pins provided in the first work position 16a are referred to as the first support pin group 19a and are located in the second work position 16b. The provided support pins will be described as a second support pin group 19b.

Both the first and second support pin groups 19a and 19b stand up when the LCD 1 is moved to the first and second work positions 16a and 16b of the work table 16 by the robot 17. The lower end of the LCD 1 is supported as an end thereof, and when the robot 17 is taken out, the robot 17 is rotated in one direction so as to face-load the LCD 1 to the upper working position of the work table 16.

Of course, although the support pins 19 are all shown in a structure that can rotate in one direction, by using an actuator, the support pins (not shown) may have a structure that can be elevated in the height direction. . In addition, after spraying the compressed air toward the LCD 1 even if the LCD 1 is not directly in contact with the LCD 1, the compressed air is gradually removed to allow the LCD 1 to display the first and second working positions of the work table 16 ( It is also possible to employ a structure that can be loaded into 16a, 16b).

Looking at the operating mechanism for the work stage system for a flat display according to the first embodiment of the present invention having such a configuration as follows.

First, the robot 17 grasps one LCD 1 from the cassette in which the LCDs 1 of the work object are gathered, and then arranges it above the work table 16 corresponding to the first work position 16a. . When the LCD 1 is disposed above the work table 16 corresponding to the first work position 16a by the robot 17, the first support pin groups 19a are rotated so that their ends face upward.

When the first support pin groups 19a are standing upright, the robot 17 lowers the held LCD 1 to the ends of the first support pin groups 19a. When the LCD 1 is placed at the ends of the standing first group of support pins 19a, the first group of support pins 19a rotate in one direction to move the LCD 1 to the upper first work position of the work table 16 ( Face to 16a).

When the LCD 1 is disposed at the first work position 16a by the robot 17 and the first support pin groups 19a, the working unit 20 that receives the electrical signal by the controller 18 moves the unit. The predetermined operation is performed toward the LCD 1 while being moved to the predetermined position by the means.

On the other hand, the LCD 1 is placed in the first working position 16a so that work is performed by the working unit 20, while the robot 17 returns to its original position and grips the new LCD 1 again from the cassette. . Then, it is arranged above the work table 16 corresponding to the empty second work position 16b.

When the LCD 1 is placed on the upper side of the work table 16 corresponding to the second work position 16b by the robot 17, the second support pin group 19b is rotated at this time, and its end faces upward. . When the second support pin groups 19b are standing upright, the robot 17 lowers (loads) the held LCD 1 to the ends of the second support pin groups 19b.

When the LCD 1 is placed at the ends of the standing second group of supporting pins 19b, the second group of supporting pins 19b rotate in one direction to move the LCD 1 to the upper second working position ( 16b).

As described above, the time required for loading and unloading the LCD 1 is relatively much longer than the actual working time for the working unit 20 to work on the LCD 1.

Therefore, in the process of loading the new LCD 1 into the second work position 16b of the work table 16 by the robot 17 and the second support pin groups 19b, the robot 17 and the second support pin group 19b are moved to the first work position 16a. The arranged LCD 1 has already finished the work by the working unit 20. As a result, the working unit 20 subsequently performs work on the LCD 1 loaded at the second work position 16b continuously.

On the other hand, the robot 17 moves to the first work position 16a of the work table 16 to take out the LCD 1 on which work is completed at the first work position 16a. At this time, the first support pin group 19a receiving the signal from the controller 18 stands up again to raise the finished LCD 1 at the first working position 16a. The robot 17 supports the lower end of the LCD 1 injured by the first support pin group 19a and moves it to a separate storage part.

Then, after holding the new LCD 1 again from the cassette in which the LCDs 1 of the work are gathered again, the first working position 16a of the work table 16 in association with the first support pin groups 19a. )

Then, during this time, the working unit 20 has completed the work on the LCD 1 loaded in the second working position 16b, so that the working unit 20 is again controlled by the controller 18 to perform the work. One operation is performed on the LCD 1 loaded at the work position 16a.

At the same time, the robot 17 moves to the second work position 16b of the work table 16 and then works at the second work position 16b by interacting with the second support pin groups 19b. After moving the completed LCD 1 to the storage unit, the new LCD 1 is again loaded into the second empty working position 16b.

As described above, according to the first embodiment of the present invention, the robot 18, the first and second support pin groups 19a and 19b, and the working unit 20 are selectively controlled by the controller 18. Likewise, the operation of the working unit 20 is stopped in the process of loading the LCD 1 or vice versa, and the time loss such as the movement of the robot 17 is stopped in the process of operating the working unit 20 is maximized. Can be reduced.

Therefore, the loading and unloading process of the LCD 1 and the operation for the LCD 1 can be performed in parallel in one working table 16, thereby saving the loading and unloading time, thereby making the working table 16 ), The amount of work of the LCD 1 processed per reference time increases, which not only increases work efficiency but also significantly improves productivity.

Second embodiment

5 is a schematic plan view of a work stage system for a planar display according to a second embodiment of the present invention.

In the first embodiment described above, two first and second working positions 16a and 16b are provided in the work table 16 to provide the robot 17, the first and second support pin groups 19a and 19b and the working unit. As the (20) interacted, the work on the LCD (1) was continuously performed in parallel, including loading and unloading on the LCD (1).

However, only two working positions 16a and 16b need not be provided in the work table 16.

That is, as shown in Fig. 5 showing the second embodiment of the present invention, with respect to the robot 17 movable by the separate moving means 17a, three working positions 16a, 16b on the work table 16 are provided. 16c), if the robot 17 and the working unit 20, also associated with the support pins 19, can be properly controlled by the controller 18, much more work than in the first embodiment. There will be an advantage to increase the efficiency.

Of course, at this time, the first to third support pin groups 19a to 19c should be provided in each of the three working positions 16a, 16b, and 16c.

On the other hand, since four or more working positions may be provided in the work table 16, each case is not shown separately.

Third embodiment

Meanwhile, FIGS. 6 to 10 are views showing a state in which a work stage system for a flat display according to a third embodiment of the present invention is applied to an inspection apparatus.

Referring to FIG. 6, the LCD 1 is provided with predetermined coordinate information including a scan electrode, a signal electrode, and the like. That is, the LCD 1 has a plurality of contact pad groups 2a to 2d into which predetermined coordinate information including electrical signals are input, respectively, and the contact pad groups 2a to 2d are each made of three groups. It is formed to have a different arrangement direction.

The LCD 1 coordinate information is formed by forming a plurality of contact pad groups 2a to 2d into which predetermined coordinate information, including electrical signals, is input at the time of manufacture of the LCD 1 by the manufacturer of the LCD 1. ) Is common. In addition, the manufacturer manufacturing the computer examines the coordinate information in the LCD 1 supplied from the LCD 1 manufacturer, and adopts it as the monitor panel of the computer only when it is determined to be good.

At this time, an inspection apparatus for inspecting the LCD 1 is shown in Figs. 7 to 10, in which the work stage system for a flat display of the present invention is employed.

The LCD inspection apparatus according to the third embodiment of the present invention detects information from the contact pad group 2a to 2d to which predetermined coordinate information including an electrical signal provided in the LCD 1 shown in FIG. It is used to determine the fitness of (1).

The LCD inspection apparatus is provided with a cabinet 10 forming an exterior of the apparatus, an inspection stage 12 provided in the cabinet 10, and an inspection stage 12 provided on the inspection stage 12 to which the LCD 1 of the inspection object is seated. The work table 16, the working unit 20 disposed above the work table 16, a unit moving means for moving the working unit 20 in at least one direction, and a probe tip of the working unit 20 And a monitor unit 32 for outputting the test result values by 21a and 22a.

The cabinet 10 includes a plurality of unit side wall portions 10a to protect the inspection stage 12 and the working unit 20 from the outside. If the LCD inspection apparatus is not used, the cabinet 10 may be closed.

The inspection stage 12 is provided in the cabinet 10 and is manufactured in a surface plate. Although not shown in the inspection stage 12, vibration damping means for removing vibrations that may occur from outside and inside are provided. In the lower four corner regions of the test stage 12, a plurality of horizontal adjusters 14 supporting the test stage 12 are provided. The horizontal adjuster 14 supports the test stage 12 horizontally and has a height adjusting bolt 14a for adjusting the horizontal state of the test stage 12.

The work table 16 on which the LCD 1 of the inspection object is loaded and seated is provided to be swingable at a predetermined angle with respect to the horizontal direction of the upper surface of the inspection stage 12. The reason why the work table 16 is provided so as to be able to swing at a predetermined angle is to correct the loading position of the LCD 1 to be inspected more reliably and quickly.

Therefore, if the loading angle of the robot 17 loading the LCD 1 with the inspection apparatus of the present invention can be precisely controlled, it is not necessary to provide the work table 16 in a swingable manner. Although not shown, the oscillation means may be a vibrating element or the like. Above the work table 16, as described in the above-described first embodiment, first and second work positions 16a and 16b are provided.

The unit moving means is provided in the inspection stage 12, and the contact pad groups 2a to 2d formed on the LCD 1 of the inspection target with the probe tips 21a and 22a provided in the working unit 20 to be described later, see FIG. The working unit 20 is moved in at least one direction so as to be able to be contacted. Here, one direction refers to the X-axis, Y-axis, and Z-axis as mentioned later.

The unit moving means includes an X-axis moving unit 40 for moving the working unit 20 side by side with respect to the loading direction of the LCD 1 to be loaded and unloaded onto the work table 16, and the X-axis. Y-axis moving part 50 for moving the walking unit 20 along the transverse direction with respect to the moving part 40 and the probe tips 21a and 22a provided on the working unit 20 on the Y-axis moving part 50. It includes a Z-axis moving unit 60 for elevating.

In the following, reference numerals for the unit moving means will be omitted since it is difficult to designate reference numerals in the drawings of the unit moving means. In addition, the movement of the unit moving means in the X-axis, Y-axis and Z-axis adopts an LM Guide structure in which a ball screw that is rotated by a motor is mounted to move the detailed description thereof. Shall be.

The X-axis moving parts 40 are spaced apart from each other along the transverse direction with respect to the loading direction of the LCD 1 loaded into any one of the first and second working positions 16a and 16b of the work table 16. First and second X-axis supports 41a and 41b provided to stand up from an upper surface of the stage 12, and first and second Xs provided to upper ends of the first and second X-axis supports 41a and 41b. At least one pair of X-axis rail blocks 43 and X-axis rail blocks provided on the shaft rail portions 42a and 42b and the first and second X-axis rail portions 42a and 42b to be slidably movable in a mutual dovetail shape. And an X-axis driving portion 44 for sliding 43 on the first and second X-axis rail portions 42a and 42b.

At this time, the X-axis rail block 43 may be provided in a pair, but in this embodiment, the X-axis rail block 43 is a work table in order to improve the reliability of the inspection by increasing the accuracy of the inspection while reducing the inspection time. The square sphere is also arranged around (16).

The Y-axis moving unit 50 includes first and second Y-axis supports 51a and 51b for interconnecting a pair of X-axis rail blocks 43 corresponding to each other, and first and second Y-axis supports ( First and second Y-axis rail portions 52a and 52b provided at 51a and 51b, and one end thereof are slidably coupled to the first and second Y-axis rail portions 52a and 52b, and the other end thereof is a walking unit 20. Y-axis rail block 53 coupled to the Y, and Y-axis driving unit 54 for sliding the Y-axis rail block 53 on the first and second Y-axis rail portions (52a, 52b).

At this time, one pair of Y-axis rail blocks 53 are provided in the first and second Y-axis rail portions 52a and 52b, respectively. Therefore, a total of four walking units 20 are coupled to the Y-axis rail block 53.

The Z-axis moving unit 60 includes a stationary unit 62 coupled to the Y-axis rail block 53, a movable unit 64 coupled to the stationary unit 62 so as to be movable up and down, and a movable unit 64. It includes a Z-axis driving unit 66 for elevating the fixed unit 62.

The camera 70 is attached to the movable unit 64 of the working unit 20. The camera 70 is electrically connected to the monitor unit 32 and transmits an image pickup signal of the LCD 1 to the monitor unit 32. Accordingly, the worker swings the work table 16 by a predetermined angle through a control unit (not shown) while checking a partial image of the LCD 1 captured by the camera 70, or walking through the unit moving means. To control the position of the unit 20 and the like.

As described above, the rocking of the work table 16 from the loading of the LCD 1 and the position control of the working unit 20 by the unit moving means control the control unit 34 while the operator checks the monitor unit 32. Perform. However, all of these work actions may be made to be performed automatically by a predetermined control program.

Between the movable unit 64 and the camera 70, the camera moving part 72 which moves the camera 70 horizontally to the lifting direction of the movable unit 64 is provided. The camera moving part 72 has a horizontal fixed block 72a fixed to the movable unit 64, the camera 70 is coupled and is engaged with the horizontal fixed block 72a in a dovetail shape, and transversely with respect to the horizontal fixed block 72a. And a camera driving motor 72c for driving the horizontally movable block 72b. At this time, the camera driving motor 72c is also controlled by the control unit 34.

9 and 10, the first and second probe cards 21 and 22 are detachably coupled to the lower portion of the working unit 20. The first and second probe cards 21 and 22 are in contact with the contact pad groups 2a to 2d of the LCD 1 to detect predetermined information input to the contact pad groups 2a to 2d. First and second probe tips 21a and 22a are provided.

As described above, the contact pad groups 2a to 2d of the LCD 1 have different arrangement directions. Accordingly, in order to correspond to different arrangement directions of the contact pad groups 2a to 2d, the first and second probe cards 21 and 22 also have different arrangement directions (orthogonal directions) at the lower end of the working unit 20. It is arranged to have. The first and second probe cards 21 and 22 are supported by clamps 21d and 22d, respectively.

By arranging the first and second probe cards 21 and 22 in a direction perpendicular to each other, the first and second probe tips 21a and 22a provided on the first and second probe cards 21 and 22 are also alternated with each other. Arranged to have different alignment directions. End portions of the first and second probe tips 21a and 22a are bent for contact with the contact pad groups 2a to 2d (see FIG. 2).

The first and second probe cards 21 and 22 arranged in the orthogonal direction to each other can be independently lifted up and down on the movable unit 64. That is, the first probe card 21 is independently lifted by the first probe lifter 21b, and the second probe card 22 is lifted independently by the second probe lifter.

Accordingly, any one of the plurality of contact pad groups 2a to 2d shown in FIG. 6 is, for example, the first of the first probe card 21 by the first probe lifting unit 21b. The other probe pad group is inspected by the probe tip 21a, and the other contact pad group is to be inspected by the second probe tip 22a of the second probe card 22, for example, by the second probe lifter 22b. Can be. Of course, the result values inspected by the first and second probe tips 21a and 22a are all output to the monitor unit 32.

At this time, unlike the structures of the motor and the ball screw described above, the first and second probe elevating portions 21b and 22b employ elevating cylinders 21c and 22c together with the L guide. This is because the first and second probe tips 21a and 22a reciprocate only at both end positions of the start position and the end position, so that the control of the lift cylinders 21c and 22c is advantageous compared to the motor control described above.

The operation of the LCD inspection apparatus having such a configuration will be described with reference to the stage system for a flat panel display described above.

First, the robot 17 grasps one LCD 1 from the cassette in which the LCDs 1 of the work object are gathered, and then arranges it above the work table 16 corresponding to the first work position 16a. . When the LCD 1 is disposed above the work table 16 corresponding to the first work position 16a by the robot 17, the first support pin groups 19a are rotated so that their ends face upward.

When the first support pin groups 19a are standing upright, the robot 17 lowers the held LCD 1 to the ends of the first support pin groups 19a. When the LCD 1 is placed at the ends of the standing first group of support pins 19a, the first group of support pins 19a rotate in one direction to move the LCD 1 to the upper first work position of the work table 16 ( Face to 16a).

When the LCD 1 is disposed at the first work position 16a by the robot 17 and the first support pin groups 19a, the working unit 20 that receives the electrical signal by the controller 18 moves the unit. The predetermined operation is performed toward the LCD 1 while being moved to the predetermined position by the means.

That is, the four X-axis rail blocks 43 are moved on the first and second X-axis rail portions 42a and 42b in the X-axis direction by the X-axis driving portion 44, and the Y-axis driving portion 54 The four Y-axis rail blocks 53 are moved in the Y-axis direction on the first and second Y-axis rail portions 52a and 52b, respectively.

When the four working units 20 are moved on the plurality of contact pad groups 2a to 2d (see FIG. 6) by the X-axis moving unit 40 and the Y-axis moving unit 50, the Z-axis moving unit ( 60) works. That is, the movable unit 64 is moved downward by a predetermined distance toward the LCD 1 to be inspected by the Z-axis driving unit 66 with respect to the fixed unit 62.

When it is moved downwardly, either one of the first and second probe cards 21 and 22 is lowered by the operation of any one of the first and second probe lifting portions 21b and 22b, and the corresponding probe tip is lowered. Make contact with the contact pad group. When the probe tip is in contact with the contact pad group and detects predetermined information input to the contact pad group, the detected result value is output to the monitor unit 32 to determine whether the LCD 1 to be inspected is good or bad.

On the other hand, as described above, the LCD 1 is arranged at the first working position 16a so that the work is performed by the working unit 20, and at the same time, the robot 17 returns to the original position, and again the new LCD 1 from the cassette. Gripping. Then, it is arranged above the work table 16 corresponding to the empty second work position 16b.

When the LCD 1 is placed on the upper side of the work table 16 corresponding to the second work position 16b by the robot 17, the second support pin group 19b is rotated at this time, and its end faces upward. . When the second support pin groups 19b are standing upright, the robot 17 lowers the held LCD 1 to the ends of the second support pin groups 19b.

When the LCD 1 is placed at the ends of the standing second group of supporting pins 19b, the second group of supporting pins 19b rotate in one direction to move the LCD 1 to the upper second working position ( 16b).

As described above, the time required for loading and unloading the LCD 1 is relatively much longer than the actual working time for the working unit 20 to work on the LCD 1.

Therefore, while the robot 17 loads the new LCD 1 into the second working position 16b of the work table 16, the LCD 1 disposed at the first working position 16a is a working unit ( The work by 20) has already been completed. As a result, the working unit 20 subsequently performs work on the LCD 1 loaded at the second work position 16b continuously.

On the other hand, the robot 17 moves to the first work position 16a of the work table 16 to take out the LCD 1 on which work is completed at the first work position 16a. At this time, the first support pin group 19a receiving the signal from the controller 18 stands up again to raise the finished LCD 1 at the first working position 16a. The robot 17 supports the lower end of the LCD 1 injured by the first support pin group 19a and moves it to a separate storage part.

Then, after holding the new LCD 1 again from the cassette in which the LCDs 1 of the work are gathered again, the first working position 16a of the work table 16 in association with the first support pin groups 19a. ) Then, during this time, the working unit 20 has completed the work on the LCD 1 loaded in the second working position 16b, so that the working unit 20 is again controlled by the controller 18 to perform the work. One operation is performed on the LCD 1 loaded at the work position 16a.

At the same time, the robot 17 moves to the second work position 16b of the work table 16 and then works at the second work position 16b by interacting with the second support pin groups 19b. After moving the completed LCD 1 to the storage unit, the new LCD 1 is again loaded into the second empty working position 16b.

As described above, according to the third embodiment of the present invention, the loading and unloading process of the loading and unloading of the LCD 1 and the operation of the LCD 1 can be performed in one work table 16. By saving the time, the amount of work of the LCD 1 processed by the work table 16 per reference time is increased, which not only increases work efficiency but also significantly improves productivity.

Fourth embodiment

In the fourth embodiment, a description is made without the accompanying drawings. However, since the repair apparatus which has been filed by the present applicant is stolen, those skilled in the art will be able to fully understand and implement the present invention.

In the above-described third embodiment, the case in which the work stage system is applied to the LCD inspection apparatus is illustrated and described, but the present invention can be applied to the LCD repair apparatus.

The repair apparatus filed by the applicant has in fact a shape similar to that of the equipment shown in FIG. 7.

For example, if one electrical signal line extending from any one of the contact pad groups 2a to 2d shown in FIG. 6 overlaps with each other and is not parallel to an adjacent signal line (this is referred to as "defect"). The correct image cannot be formed on the LCD. In this case, the defect must be repaired so that the signal lines do not overlap each other by cutting or repairing the overlapping portions between the signal lines. Such equipment is called a repair apparatus.

Therefore, the repair apparatus also has a worktable on which the LCD to be repaired is placed, and a repair unit (working unit) for repairing defects formed on the LCD above the worktable is movable by a separate unit moving means. It is installed. The repair unit has a configuration such as a laser scope for repairing the image of the defect of the LCD seated on the work table.

At this time, in the same manner as in the third embodiment, a plurality of working positions are provided on the work table of the repair apparatus, support pins corresponding to the working positions are provided, and then the robot and the support pins for moving or unloading the LCD, If the repair unit is controlled by a separate controller, the loading and unloading operation of the LCD and the operation of repairing the LCD can be performed in parallel.

Accordingly, this also saves loading and unloading time, thereby increasing the work load of the LCD processed by the worktable per reference time, thereby increasing work efficiency and significantly improving productivity.

Although the present invention has been described in detail above, the present invention is not limited thereto.

That is, in addition to the above-described embodiment, briefly explain various operations that can be performed by the working unit as follows. Of course, each of the operations and devices described in the following are to use common terms that are easily understood by those skilled in the art.

The working unit can perform operations such as a module repair, a panel repair, an array repair, and the like. These are to complete the work by a working unit by cutting the said defect using a laser, and each work progresses by a panel unit, an array unit, and a module unit.

In addition, the working unit can also perform a depo repair operation. This is the same as above to cut the defect using a laser, but is different in that the cut position can be deposited.

On the other hand, the working unit can also be applied to an A.O.I device or an A.O.IRepair. The former is a device for detecting defects by irradiating a separate light source, and the latter is a device including a separate camera capable of inspecting A.O.I in the repair devices described above.

As described above, according to the present invention, the loading and unloading process of the LCD and the operation on the LCD can be performed in parallel in one working table, thereby saving the loading and unloading time, so that the working table is stored per reference time. There is provided a work stage system for a flat panel display and a planar display working method using the system, in which the throughput of the LCD to be processed increases not only to increase work efficiency but also to significantly improve productivity.

Claims (11)

A work table having a plurality of work positions such that at least two flat displays of the work object can be arranged; A working unit provided on an upper portion of the work table to continuously perform a predetermined work toward the planar display loaded at each work position; Unit moving means for moving the working unit with respect to the working position; A loading / unloading unit for continuously loading the flat display of the work target into the plurality of empty working positions and the unloading of the flat display completed by the working unit; And a controller for selectively controlling the loading / unloading unit, the working unit, and the unit moving means. The method of claim 1, The loading / unloading unit is provided in a plurality of working positions on the upper part of the work table, and when the flat display is loaded into the work position by a separate robot, the plurality of support pins for supporting the flat display are characterized in that the Work stage system for flat panel displays. The method of claim 2, And said plurality of support pins are driven differently by said controller. The method of claim 1, The unit moving means, An X-axis moving unit which moves the working unit side by side with respect to the loading and unloading direction of the planar display loaded onto the work table; A Y-axis moving unit which moves the working unit along the horizontal direction with respect to the X-axis moving unit; And a Z-axis moving unit for partially elevating the working unit along a transverse direction with respect to the virtual plane of XY with respect to the X-axis and Y-axis moving units. The method of claim 1, And said working unit is employed in the operation of inspecting whether short-circuit and disconnection of an electrical signal that can be formed in said flat panel display. The method of claim 1, And said working unit is employed for repairing a defect formed in said flat panel display. The method of claim 6, The repair operation may include at least one of a module repair, a panel repair, an array repair, and a depo repair. The method of claim 1, And said working unit is employed for the task of partially etching said planar display. The method of claim 1, And said working unit is mounted on one of an A.O.I device or an A.O.I repair device. Loading a flat panel display into a plurality of work positions formed in the work table; The working unit performing a predetermined work toward the flat panel display while continuously moving toward the work position in the loading order; Unloading the planar display on which work by the working unit is completed; A flat display work method using a work stage system for a flat display comprising the step of loading a new flat display into the corresponding unloaded and empty work position. And said steps are performed successively by a predetermined controller.