KR20220165461A - Test apparatus and method for display panel - Google Patents

Abstract

The present invention relates to an apparatus and a method for inspecting a display panel, which comprises: a rotational stage having a plurality of inspection stages to move each inspection stage by rotational operation to each inspection position for a plurality of inspection works; a loading module loading a panel to be inspected on the rotational stage and unloading the panel that has completed inspection; a photographing module photographing the inspection stage at a reference position among the plurality of the inspection stages arranged on the rotational stage; and a control unit calculating an error occurring in the loading module and the rotational stage based on the states of the panel to be inspected and the panel that has completed inspection, which are photographed by the photographing module and compensating for a supply position of the panel to be inspected, based on the calculated error, wherein the loading operation of loading the panel to be inspected on the rotational stage and the unloading operation of unloading the panel that has completed inspection are simultaneously performed to increase a speed of the inspection work and the seated state of the panel that has completed inspection, which is seated on the rotational stage and the loading state of the panel to be inspected, which is loaded by a loader are photographed to compensate for a mechanical error.

Description

Display panel inspection device and method {TEST APPARATUS AND METHOD FOR DISPLAY PANEL}

The present invention relates to a display panel inspection apparatus and method, and more particularly, to a display panel inspection apparatus and method for inspecting whether a display panel is operating normally.

Display panels are manufactured in various sizes and shapes and are used in various types of devices. During the manufacturing process, these display panels undergo various tests to determine whether the panels are normally manufactured before being combined with devices. Among these tests, there is an aging test as a test for verifying whether the panel is normally driven.

The aging test is a process of supplying electrical signals for testing to a panel to check whether pixels operate normally. To this end, the panel is mounted on a test frame provided in an inspection device, and probes provided on the test frame are connected to terminals of the panel. In this state, the inspection device supplies an electrical signal to the panel through the probe to inspect whether or not it is normally driven.

Here, the probe is a major component that supplies electricity to the panel. Probes are manufactured and used in various forms such as FPCB (Flexible Printed Circuit Board), blades, and pins. In particular, the probe is configured to come into contact with the contact terminals of the panel formed at a small pitch.

Patent Document 1 and Patent Document 2 below disclose display panel inspection device technology according to the prior art.

Meanwhile, a rotation stage provided with a plurality of inspection stages is applied to the display panel inspection apparatus in order to simultaneously inspect a plurality of panels.

The rotation stage receives panels to each inspection stage by a loader, and performs a plurality of inspection tasks by rotation. When the inspection work is completed, the rotating stage moves the inspected panel to the reference position by rotation again, and the inspected panel is transferred to the pallet by the unloader and moved for the next process.

In this way, in the display panel inspection apparatus that moves and inspects the panel by the rotational operation of the rotational stage, mechanical tolerances may occur during the rotational operation of the rotational stage.

In addition, a tolerance may occur in the process of loading the panel using a loader.

Accordingly, in the display panel inspection apparatus according to the prior art, the alignment of the panel is incomplete due to tolerances occurring in the rotation stage and the loader, and the contact with the probe unit for inspection is poor, resulting in a decrease in accuracy of inspection results. There was a problem.

Korean Patent Publication No. 10-2017-0090774 (published on August 8, 2017) Korean Patent Registration No. 10-0712679 (published on May 2, 2007)

An object of the present invention is to solve the above problems, and to provide a display panel inspection apparatus and method capable of continuously performing a series of inspections on a display panel by a rotating operation of a rotating stage.

Another object of the present invention is to provide a display panel inspection apparatus and method capable of improving the precision of inspection results by loading a display panel in an accurate position by compensating for an error occurring during a rotation operation of a rotating stage and a loading operation of a loader. .

In order to achieve the above object, the display panel inspection apparatus according to the present invention includes a rotation stage provided with a plurality of inspection stages and moving each inspection stage to each inspection position for a plurality of inspection tasks by a rotation operation; A loading module for loading the display panel to be inspected (hereinafter referred to as 'inspected panel') on the rotation stage and unloading the panel after inspection (hereinafter referred to as 'inspection completed panel'); An error occurring in the loading module and the rotating stage is calculated based on a photographing module that photographs the inspection stage disposed at a reference position among the inspection stages, and the states of the inspection target panel and the inspection completed panel captured by the imaging module, and the calculated error It is characterized in that it comprises a control unit for controlling to compensate for the supply position of the inspection target panel based on.

In addition, in order to achieve the above object, a display panel inspection method according to the present invention includes (a) sequentially loading an inspection target panel onto a plurality of inspection stages provided on a rotation stage using a loader of a loading module; (b) unloading the inspected panel from the rotation stage to the unloading stage using an unloader, (c) photographing the loading state of the inspected panel and the seating state of the inspected panel using a photographing module. and (d) calculating an error occurring in the loader and the rotating stage using the captured image in a controller, and controlling the supply position of the panel to be inspected to be compensated based on the calculated error. to be characterized

As described above, according to the display panel inspection apparatus and method according to the present invention, an effect of loading the inspection target panel and unloading the inspection completed panel can be simultaneously performed on the rotating stage.

Accordingly, according to the present invention, the effect of improving workability is obtained by increasing the inspection work speed for a large amount of display panels.

Further, according to the present invention, it is possible to compensate for mechanical errors by photographing the seating state of the inspected panel seated on the rotating stage and the loading state of the panel to be inspected loaded by the loader.

Accordingly, according to the present invention, by finely adjusting the position and angle of the panel to be inspected and loading the panel onto the rotation stage, mechanical errors generated in the rotation stage and the loader can be effectively compensated for.

Accordingly, according to the present invention, it is possible to improve the accuracy of inspection results by loading the display panel in an accurate position by compensating for errors caused by the rotational operation of the rotating stage and the moving operation of the loader.

1 is a block diagram of a display panel inspection apparatus according to a preferred embodiment of the present invention;
2 and 3 are a plan view and a front view of the display panel inspection apparatus shown in FIG. 1, respectively;
4 is a perspective view of an inspection stage applied to the rotation stage shown in FIG. 2;
5 is a perspective view of the loading module shown in FIG. 2;
6 is a perspective view of the loading module shown in FIG. 5 from another angle;
7 is an enlarged perspective view of the compensation module shown in FIG. 6;
8 is a cross-sectional view taken along line AA′ shown in FIG. 7;
9 is a perspective view showing a second camera unit of the photographing module shown in FIG. 2;
10 is a diagram illustrating an image captured by a first camera unit;
11 is a diagram illustrating an image captured by a second camera unit;
12 is a flowchart illustrating a step-by-step inspection method using a display panel inspection apparatus according to a preferred embodiment of the present invention.

Hereinafter, a display panel inspection apparatus and method according to a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

1 is a block configuration diagram of a display panel inspection apparatus according to a preferred embodiment of the present invention, and FIGS. 2 and 3 are a plan view and a front view of the display panel inspection apparatus shown in FIG. 1, respectively.

Hereinafter, terms indicating directions such as 'left', 'right', 'front', 'rear', 'upper' and 'downer' are defined as indicating each direction based on the state shown in each drawing. do.

As shown in FIGS. 1 to 3 , the display panel inspection apparatus 10 according to a preferred embodiment of the present invention is provided with a plurality of inspection stages 21 and rotates each inspection stage 21 into a plurality of Rotation stage 20 that moves to each inspection position for inspection work, load the display panel to be inspected (hereinafter referred to as 'inspection target panel') on the rotation stage 20, and A loading module 30 for unloading the finished panel'), a photographing module 40 for photographing the inspection stage 21 disposed at a reference position among a plurality of inspection stages 21 provided on the rotation stage 20, and The driving of each device is controlled, and errors generated in the loading module 30 and the rotation stage 20 are calculated based on the state of the inspection target panel and the inspection completed panel captured by the photographing module 40, and based on the calculated error. and a control unit 50 that controls the driving of the loading module 30 to compensate for the supply position of the panel to be inspected.

In addition, the display panel inspection apparatus 10 according to a preferred embodiment of the present invention supplies the inspection target panel to the loading stage 12 and discharges the inspection completed panel from the unloading stage 13 to an external pallet. It may further include a module 60.

The supply and discharge module 60 completes the test unloaded to the unloading stage 13 by the first picker 61 and the loading module 30 that supplies the panels to be inspected loaded on the pallet to the loading stage 12. It may include a second picker 62 that discharges the panels from the unloading stage 13 to an external pallet.

Of course, the present invention is not necessarily limited thereto, and may be modified so that the panel to be inspected is supplied using one picker and the inspected panel is discharged, or supply and discharge operations are performed using three or more pickers.

The rotation stage 20 may be rotatably installed on the work table 11 .

The work table 11 is configured by connecting a plurality of frames, and may be provided as a base frame on which each device is installed. The rotation stage 20 may be installed on one side of the work table 11, on the upper right side when viewed in FIG. 2 .

A plurality of, for example, five inspection stages 21 for performing a plurality of inspection processes may be disposed on the upper surface of the rotation stage 20 .

For example, the rotating stage 20 is an inspection device for performing different inspection processes on a panel to be inspected, such as image inspection, characteristic inspection, stain inspection, touch inspection, and manual inspection, or an inspection position of an inspector for each inspection target. A rotation operation may be performed to sequentially move the panels.

To this end, at the bottom of the rotation stage 20, power transmission such as a drive module that generates driving force by a control signal from the control unit 50, a rotation shaft that transfers the driving force generated from the drive module to the rotation stage 20, and a gear unit A module may be provided.

4 is a perspective view of an inspection stage applied to the rotation stage shown in FIG. 2;

As shown in FIG. 4 , each inspection stage 21 functions to move the inspection target panel to each inspection position by the rotational operation of the rotation stage 20 in a state where the inspection target panel is seated.

As shown in FIG. 4 , the inspection stage 21 may be provided with a tilting operation for rotating the inspection target panel seated on the upper surface toward each inspection equipment or inspector.

To this end, the inspection stage 21 has one side, that is, the outer end, which is shaft-coupled to the upper part of the rotation stage 20, and the lower part of the inspection stage 21 is a cylinder unit ( 22) and a connecting unit 23 including one or more connecting links to tilt the inspection stage 21 by the stretching operation of the cylinder unit 22 may be provided.

Meanwhile, in this embodiment, a plurality of panels to be inspected, for example, four, are simultaneously put into the inspection stage.

To this end, each of the inspection stages 21 may be provided with four stages 24 on which four inspection target panels are respectively seated.

On top of each stage 24 , a probe unit 25 , which contacts a panel to be inspected mounted on each stage 24 and supplies power and electrical signals, may be installed so as to be able to move up and down.

Each probe unit 25 may be provided with a contact block 26 contacting a terminal provided on each panel to be inspected.

The loading module 30 includes a loader 31 for loading the inspection target panel supplied to the loading stage 12 to each inspection stage 21 and an unloader for unloading the inspection completed panel to the unloading stage 13 ( 32) may be included.

For example, FIG. 5 is a perspective view of the loading module shown in FIG. 2, and FIG. 6 is a perspective view of the loading module shown in FIG. 5 from another angle.

As shown in FIGS. 5 and 6 , the loader 31 of the loading module 30 may include four loading pickers that simultaneously load four panels to be inspected.

Also, the unloader 32 may include four unloading pickers that simultaneously unload four inspected panels.

Each loading picker and unloading picker can load or unload by adsorbing each panel in a vacuum suction method to prevent damage to the panel during the loading and unloading process.

The loader 31 and the unloader 32 follow a pair of guide frames 14 installed side by side on one side of the work table 11, respectively, when viewed in FIG. , That is, it may be installed to be movable in the Z-axis direction.

Here, the loader 31 and the unloader 32 may be installed to be movable separately from each other, but in the present embodiment, they are installed to be movable at the same time so that loading and unloading operations of each panel can be performed simultaneously. can

For example, a movable frame 15 may be installed above the pair of guide frames 14 to be movable in the left and right directions, that is, in the X-axis direction, along the pair of guide frames 14 .

In addition, the loader 31 and the unloader 32 are installed on a pair of installation frames 16 movably installed on both sides of the moving frame 15 in the forward and backward directions, that is, in the Y-axis direction, respectively. It can be.

Each of the loader 31 and the unloader 32 may be driven by receiving driving force generated by the driving module.

For example, the driving module is provided with a hydraulic motor driven by using pressure generated by receiving fluid such as air or oil, or an electric motor driven by receiving power, and the driving module and the loader 31 and A power transmission module may be provided between the loaders 32 to lift and lower the loader 31 and the unloader 32 using driving force generated in each driving module.

On the other hand, the loader 31 moves the loaded inspection target panel in the X-axis and Y-axis directions according to the control signal of the control unit 50 and rotates it around the Z-axis, so that the loader 31 and the rotation stage 20 generate A compensation module 70 for compensating for the mechanical error may be further provided.

FIG. 7 is an enlarged perspective view of the compensation module shown in FIG. 6 , and FIG. 8 is a cross-sectional view taken along the line A-A′ shown in FIG. 7 .

A suction plate 33 for adsorbing a panel to be inspected may be provided at a lower end of the loader 31 , and a compensation module 70 may be installed between the suction plate 33 and the loader 31 .

The compensation module 70 includes a driving unit generating a driving force to move the suction plate 33 in the X-axis and Y-axis directions and rotating about the Z-axis according to a control signal from the control unit 50, and a driving force generated by the driving unit. A power transmission unit for moving the suction plate 33 in each direction may be included.

In detail, the compensation module 70 is installed in the X-axis direction along the first block 71 installed at the lower end of the loader 31 and the first guide rail 711 installed at the lower part of the first block 71. The second block 72 provided to be movable, the third block 73 provided to be movable in the Y-axis direction along the second guide rail 721 installed below the second block 72, and the third block The first to third drive motors (75 to 75) generating driving force to move or rotate the fourth block 74 and the first to third blocks 71 to 73 rotatably coupled to the lower portion of the 73, respectively. 77) may be included.

A connecting member 78 may be provided between the first block 71 and the lower end of the loader 31 or between the fourth block 74 and the suction plate 33 .

For example, a rotation shaft having a screw thread formed on an outer surface may be connected to an output shaft of the first driving motor 75, and the rotation shaft may be rotatable on one side of the second block 72.

Thus, the second block 72 may move along the first guide rail 711 in the X-axis direction or in the opposite direction by the rotation of the rotation shaft.

A rotation shaft having a screw thread formed on an outer surface is connected to the output shaft of the second drive motor 76 , and the rotation shaft may be connected to one side of the third block 73 .

Thus, the third block 73 may move along the second guide rail 721 in the Y-axis direction or in the opposite direction by the rotation of the rotating shaft.

The lower surface of the third block 73 may be formed with a rotating protrusion 741 formed on the upper surface of the fourth block 74 and a coupling ball in which a bearing coupled to an outer circumferential surface of the rotating protrusion 741 is rotatably coupled.

So, the fourth block 74 is rotatably provided around the rotating protrusion 741, and one side of the fourth block 74 moves in the Y-axis direction or the opposite direction by the third drive motor 77. A movement block 742 may be connected.

In this way, the compensation module 70 drives the first to third driving motors 75 to 77 forward or backward according to a control signal from the control unit 50 to move the suction plate 33 in the X-axis and Y-axis directions. or rotate around the Z axis.

Accordingly, the compensation module 70 may adjust the position and angle of the panel to be inspected adsorbed to the suction plate 33 to compensate for mechanical errors generated by the rotation stage 20 and the loader 31 .

Accordingly, the loader 31 may load the panel to be inspected onto the rotation stage 20 in a state in which a mechanical error is compensated for during the loading process.

The photographing module 40 performs a function of capturing and recognizing a state in which the inspected panel is seated on the inspection stage 21 and a state in which the panel to be inspected is lifted by the loader 31 .

FIG. 9 is a perspective view showing a second camera unit of the photographing module shown in FIG. 2 .

The photographing module 40 is adsorbed and lifted by the first camera unit 41 and the loader 31 for capturing a state in which the inspected panel is seated on the inspection stage 21 (hereinafter referred to as a 'seated state'). It may include a second camera unit 42 that captures a loaded state (hereinafter referred to as 'loading state').

The first camera unit 41 is a loader 31 and an unloader 32 of the loading module 30 as shown in FIG. can be installed between

That is, the first camera unit 41 includes four first cameras 43 corresponding to the number of inspected panels at the lower part of the moving frame 15 where the loader 31 and the unloader 32 are installed. can do.

As shown in FIG. 9, the second camera unit 42 includes eight second cameras installed below the loading module 30 to capture the loading state of the panel to be inspected loaded by the loader 31. (44) may be included.

Here, the eight second cameras 44 may be installed side by side in two rows of four at the lower part of the moving path along which the panel to be inspected is loaded and moved.

Thus, one inspection target panel can be simultaneously photographed by the two second cameras 44 in the loading state.

Thus, the first and second camera units 41 and 42 may capture the seating state of the inspected panel and the loading state of the inspection target panel, and transfer the captured image information to the control unit 50 .

Again in FIG. 1 , the controller 50 may be provided as a main controller unit that controls driving of each device provided in the display panel inspection device 10 .

The controller 50 may control driving of the compensation module 70 to compensate for mechanical errors by analyzing image information captured by the photographing module 40 .

For example, the control unit 50 calculates an error using the image analysis unit 51 that analyzes the image information captured by the photographing module 40, the result analyzed by the image analysis unit 51, and calculates the error. An error compensation unit 52 that calculates compensation information to compensate and a signal generator 53 that generates a control signal to control the driving of the compensation module 70 based on the compensation information calculated by the error compensation unit 52 can include

In addition, the controller 50 may further include a storage unit 54 for storing a driving program for driving each device and reference position information for calculating an error between the panel to be tested and the panel to be tested.

10 is a diagram illustrating an image captured by a first camera unit, and FIG. 11 is a diagram illustrating an image captured by a second camera unit.

10 illustrates an image having a field of view (FOV) size of an area having a horizontal length of about 12 mm and a vertical length of about 9 mm.

In the image captured by the first camera unit 41, the alignment teaching position lines LX and LY along the X-axis direction and the Y-axis direction and the contact block 26 of the probe unit 25 are provided to calculate the error. Four alignment mark points (AP) marked at each vertex position of the marked substantially square shape may be included.

Here, the central point of the center of the image where the alignment teaching location lines LX and LY meet is referred to as the teaching reference point P0.

The four alignment mark points (AP) are for calculating the calculation reference point (CP) for calculating the error generated in the inspected panel.

That is, a point where two straight lines connecting two pairs of symmetrically arranged align mart points (AP) among the four align mark points (AP) meet becomes the calculation reference point (CP).

Further, distance information between each alignment mark point AP is input through an input unit (not shown), and the input distance information is stored in the storage unit 54 .

The image analyzer 51 analyzes the captured images to recognize alignment mark points (APs) included in each image, and transmits location information of the recognized alignment mark points (APs) to the error compensator 52. can

Therefore, the error compensation unit 52 calculates the calculation reference point CP using the positional information of each alignment mark point AP in the captured image, and the rotation angle with the teaching reference point P0 located at the center of the screen. Assuming that is 0°, measure the angle (θ) at which the calculation reference point is distorted with the teaching reference point (P0) as the center.

Further, the error compensation unit 52 calculates the movement distances (x, y) in the X-axis and Y-axis directions by the rotation amount of the measured twist angle θ from the teaching reference point P0.

Through this process, the error compensating unit 52 may calculate first error information including the calculated twist angle θ and movement distances (x, y) in the X-axis and Y-axis directions.

Meanwhile, in FIG. 11 , an image having a field of view (FOV) size of a region having a horizontal length of about 6.7 mm and a vertical length of about 5.4 mm is illustrated.

An approximately cross-shaped alignment mark (AM) is shown in this FOV area, and the second camera unit 42 includes a pair of second cameras 44 respectively disposed on the lower left and right sides of the panel to be inspected in a loaded state. You can use it to take a picture of the panel to be inspected.

Therefore, the image captured by the second camera unit 42 may include a pair of images captured using a pair of second cameras 44 on both left and right sides of the teaching reference point.

In FIG. 11, PM is a central point between each alignment mark (AM) in a pair of captured images, and is referred to as a 'teaching reference point' hereinafter.

The image analyzer 51 may analyze the captured images, recognize the alignment marks AM included in each image, and transmit positional information of the recognized alignment marks AM to the error compensation unit 52. .

The error compensation unit 52 assumes that the teaching reference point (PM) is positioned at the center of the screen and the rotation angle is 0° in a pair of captured images, and each alignment mark (AM) is set to the teaching reference point (PM). Measure the angle (θ) twisted around .

And the error compensation unit 52 calculates the angle correction amount using the measured angle, and the X-axis and Y-axis movement distances (x1, y1) (x2, y2) to the reference point of each alignment mark by the calculated angle correction amount. ) is measured.

Through this process, the error compensation unit 52 may calculate second error information including the measured twist angle θ and the moving distances (x1, y1) (x2, y2) in the X-axis and Y-axis directions. .

Therefore, the error compensation unit 52 calculates a correction amount based on the first and second error information, and transfers compensation information according to the calculated correction amount to the signal generator 53 .

Then, the signal generator 53 may generate a control signal to drive the compensation module 70 according to the compensation information.

In this way, the present invention can compensate for mechanical errors by photographing the seating state of the tested panel seated on the rotation stage and the loading state of the panel to be tested loaded by the loader.

Therefore, the present invention can effectively compensate for mechanical errors occurring in the rotation stage and the loader by finely adjusting the position and angle of the panel to be inspected and loading the rotation stage.

Accordingly, the present invention can improve the precision of inspection results by loading the display panel in an accurate position by compensating for an error caused by the rotational operation of the rotating stage and the moving operation of the loader.

Next, referring to FIG. 12, an inspection method using a display panel inspection apparatus according to a preferred embodiment of the present invention will be described in detail.

12 is a flowchart illustrating a step-by-step inspection method using a display panel inspection apparatus according to a preferred embodiment of the present invention.

When the power switch (not shown) is turned on in step S10 of FIG. 12 and power is supplied through the power supply unit (not shown), the control unit 50 loads the driving program stored in the storage unit 54 to each device. Initializes and prepares for the inspection operation of the display panel.

In step S12, the controller 50 controls the first picker 61 of the supply and discharge module 60 and the loader of the loading module 30 to supply the panels to be inspected loaded on the external pallet to the rotation stage 20 ( 31) to generate a control signal.

Then, the first picker 61 supplies the inspection target panel to the loading stage 12, and the loader 31 transfers the inspection target panel supplied to the loading stage 12 to the inspection stage 21 provided on the rotation stage 20. ) is loaded (S14).

At this time, a plurality, for example, four panels to be inspected may be simultaneously loaded onto the four stages 24 provided on the inspection stage 21 .

The loading operation of the inspection target panel is repeatedly performed until the inspection target panels are all loaded on a plurality of, for example, five inspection stages 21 provided on the rotation stage 20 .

In step S16, the rotation stage 20 rotates so that each inspection stage 21 moves to the inspection position of each inspection equipment and inspector for a plurality of inspection tasks.

Then, each inspection equipment and inspector inspects the inspection target panel moved to the corresponding position.

At this time, the inspection target panels seated on each inspection stage come into contact with each other by the descending motion of the probe unit 25 and are supplied with power and electrical signals. A plurality of inspection tasks may be sequentially performed.

Through this process, when a plurality of inspection processes of the inspection target panel loaded on one inspection stage 21 are completed, the control unit 50 performs a loading operation of the inspection target panel and unloading of the inspection completed panel at the same time. Control.

In addition, the control unit 50 drives the photographing module 40 to capture the seating state of the tested panel and the loading state of the test target panel, and compensates for mechanical errors based on the photographed image information to compensate for the position and angle of the test target panel. is controlled to load in the correct location.

That is, in step S18, the loader 31 moves toward the rotation stage 20 in a state in which the panel to be inspected is adsorbed and lifted.

At this time, the second camera unit 42 installed below the movement path of the inspection target panel captures the loading state of each inspection target panel using a pair of second cameras 44 .

In step S20, the first camera unit 41, which has moved to the side of the rotating stage 20 together with the loader 31, captures the seated state of the inspected panel seated on the rotating stage 20.

Then, the image analysis unit 51 receives and analyzes the images captured by each of the camera units 41 and 42, and the error compensating unit 52 analyzes the distortion angle and the movement distance in the X-axis and Y-axis directions in each analyzed image. Calculate first and second error information including (S22).

The error compensator 52 calculates a correction amount based on the first and second error information and transmits compensation information according to the calculated correction amount to the signal generator 53 . Then, the signal generator 53 generates a control signal to drive the compensation module 70 according to the compensation information.

In step S24, the compensation module 70 drives the first to third driving motors 75 to 77 forward or backward according to the control signal of the controller 50 to move the suction plate 33 in the X-axis and Y-axis directions. and rotate around the Z-axis. Accordingly, the compensation module 70 compensates mechanical errors occurring in the rotation stage 20 and the loader 31 by precisely adjusting the position and angle of the panel to be inspected adsorbed to the suction plate 33 .

Through this process, the unloader 32 adsorbs and lifts the panel to be inspected, and the loader 31 places the panel to be inspected in an accurate position where the error is compensated to complete the loading operation.

At this time, the unloader 32 moves to the opposite side again and unloads the lifted inspected panel to the unloading stage 13 . Then, the second picker 62 of the supply and discharge module 60 loads the unloaded inspected panels onto an external pallet and discharges them.

In step S26, the control unit 50 checks whether the inspection work for all the inspection target panels is completed, and repeatedly performs steps S18 to S26 until the inspection work for all the inspection target panels is completed.

If, as a result of the inspection in step S26, the entire inspection target panel inspection task is completed, the control unit 70 stops driving of each device and ends the operation.

Through the process as described above, according to the present invention, a loading operation of loading the panel to be inspected and an unloading operation of the inspected panel can be simultaneously performed on the rotating stage.

Accordingly, the present invention can improve workability by increasing the inspection work speed for a large amount of display panels.

In addition, the present invention can compensate for mechanical errors by photographing the seating state of the inspected panel seated on the rotating stage and the loading state of the panel to be inspected loaded by the loader.

Accordingly, the present invention can effectively compensate for mechanical errors occurring in the rotation stage and the loader by finely adjusting the position and angle of the panel to be inspected and loading the rotation stage.

Accordingly, the present invention can improve the accuracy of inspection results by loading the display panel in an accurate position by compensating for an error caused by the rotational operation of the rotating stage and the moving operation of the loader.

Although the invention made by the present inventors has been specifically described according to the above embodiments, the present invention is not limited to the above embodiments, and various changes can be made without departing from the gist of the present invention.

According to the present invention, the loading operation of loading the panel to be inspected on the rotating stage and the unloading operation of the panel to be inspected simultaneously increase the inspection work speed, and the seating state of the inspected panel seated on the rotating stage and the inspection target panel loaded by the loader are improved. It is applied to a display panel inspection device and method technology that compensates for mechanical errors by photographing the loading state of

10: display panel inspection device
11: workbench 12: loading stage
13: unloading stage 14: guide frame
15: moving frame 16: installation frame
20: rotation stage 21: inspection stage
22: cylinder unit 23: connection unit
24: stage 25: probe unit
26: contact block
30: loading module 31: loader
32: unloader 33: suction plate
40: photographing module 41, 42: first and second camera units
43,44: first and second cameras
50: control unit 51: image analysis unit
52: error compensating unit 53: signal generating unit
54: storage unit
60: supply and discharge module 61,62: first and second pickers
70: compensation module 71 to 74: first to fourth blocks
711,721: first and second guide rails 741: rotating protrusion
742: moving blocks 75 to 77: first to fourth drive motors
78: connecting member
LX,LY: X-axis, Y-axis alignment teaching position line
AP: Align Mark Point CP: Calculation Reference Point
P0: teaching reference point

Claims (12)

A rotation stage provided with a plurality of inspection stages and moving each inspection stage to each inspection position for a plurality of inspection tasks by a rotation operation;
A loading module for loading a display panel to be inspected (hereinafter referred to as 'inspection target panel') on the rotation stage and unloading a panel for which inspection work has been completed (hereinafter referred to as 'inspection completed panel');
A photographing module for photographing an inspection stage disposed at a reference position among a plurality of inspection stages provided on the rotation stage; and
a control unit that calculates an error generated in the loading module and the rotation stage based on the state of the inspection target panel and the inspection completed panel captured by the photographing module, and controls the supply position of the inspection target panel to be compensated based on the calculated error; Display panel inspection apparatus comprising the. According to claim 1,
Further comprising a supply and discharge module for supplying the inspected panel to the loading stage and discharging the inspected panel from the unloading stage to an external pallet,
The loading module includes a loader for loading the inspection target panel supplied to the loading stage to each inspection stage;
And an unloader for unloading the inspected panel to the unloading stage,
The control unit controls driving of the loading module to simultaneously perform a loading operation of the loader and an unloading operation of the unloader. According to claim 2,
Each inspection stage is provided with a plurality of stages on which a plurality of inspection target panels are seated, respectively;
At the upper part of each stage, a probe unit that supplies power and electrical signals by contacting the panel to be inspected seated on each stage is installed so as to be able to move up and down.
A display panel inspection apparatus, characterized in that each probe unit is provided with a contact block contacting terminals provided on each inspection target panel. According to claim 2,
The loader is provided with a compensation module for compensating for an error generated by the loader and the rotating stage by moving the loaded inspection target panel in the X-axis and Y-axis directions and rotating it around the Z-axis. Display panel inspection apparatus, characterized in that . The method of claim 4, wherein the compensation module
A first block installed at the lower end of the loader;
A second block provided to be movable in the X-axis direction along a first guide rail installed under the first block;
A third block provided to be movable in the Y-axis direction along a second guide rail installed below the second block;
A fourth block rotatably coupled to the lower portion of the third block, and
The display panel inspection apparatus comprising first to third driving motors generating driving force to move or rotate the first to third blocks, respectively. According to claim 2,
The photographing module includes a first camera unit for photographing a seating state in which the inspected panel is seated on the inspection stage;
A second camera unit for capturing a loading state of a panel to be inspected that is adsorbed and loaded by the loader,
The first camera unit is installed between a loader and an unloader of the loading module and moves together with the loading module,
The display panel inspection apparatus, characterized in that the second camera units are installed in two rows under the moving path of the loading module to photograph the loading state of each panel to be inspected with a pair of cameras. According to claim 2 or 6,
The control unit includes an image analysis unit for analyzing image information captured by the photographing module;
An error compensator calculating an error using the result analyzed by the image analyzer and calculating compensation information to compensate for the calculated error;
A signal generating unit generating a control signal to control driving of the compensation module based on the compensation information calculated by the error compensating unit; and
A display panel inspection apparatus comprising a storage unit for storing driving programs for driving each device and reference position information for calculating an error between an inspection target panel and an inspection completed panel. According to claim 7,
The error compensation unit calculates a calculation reference point using four alignment mark points included in the image captured by the first camera unit, and the teaching reference point where the X-axis and Y-axis teaching position lines meet is located at the center of the screen. Calculate first error information including the twist angle of the calculation reference point and the movement distance in the X-axis and Y-axis directions in
First error information including the twist angle of each alignment mark and the movement distance in the X-axis and Y-axis directions based on the teaching reference point at the center between each alignment mark included in the pair of images captured by the second camera unit. Calculate,
A display panel inspection apparatus characterized in that a correction amount is calculated based on the first and second error information, and compensation information according to the calculated correction amount is transmitted to the signal generator. In the inspection method using the display panel inspection device according to any one of claims 1 to 8,
(a) sequentially loading an inspection target panel onto a plurality of inspection stages provided on a rotation stage using a loader of a loading module;
(b) unloading the inspected panel from the rotation stage to the unloading stage using an unloader;
(c) photographing the loading state of the inspection target panel and the seating state of the inspection completed panel using a photographing module; and
(d) calculating an error occurring in the loader and the rotation stage using the captured image by a controller, and controlling the supply position of the panel to be inspected to be compensated based on the calculated error. Display panel inspection method. According to claim 9,
The display panel inspection method according to claim 1 , wherein the loading operation of the step (a) and the unloading operation of the step (b) are simultaneously performed when the inspection task of the panel to be inspected loaded on the inspection stage is completed. The method of claim 9, wherein step (d)
(d1) analyzing image information captured by the photographing module using an image analyzer provided in the controller;
(d2) calculating an error using the result analyzed by the error compensation unit and calculating compensation information to compensate for the calculated error;
(d3) generating a control signal for controlling driving of a compensation module provided in the loader based on the compensation information calculated by the signal generator. The method of claim 11, wherein the (d2) step
(d21) A state in which the reference point for calculation is calculated using the four alignment mark points included in the image of the seated state of the inspected panel, and the teaching reference point where the X-axis and Y-axis teaching location lines meet is located in the center of the screen Calculating first error information including the twist angle of the calculation reference point and the movement distance in the X-axis and Y-axis directions in
(d22) A first error including the distortion angle of each alignment mark and the moving distance in the X-axis and Y-axis directions based on the teaching reference point at the center between each alignment mark included in a pair of images of the inspection target panel. Steps to calculate information and
(d23) calculating a correction amount based on the first and second error information, and transmitting compensation information according to the calculated correction amount to the signal generator.

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