KR20040091570A - Substrate holding tool, manufacturing method of electronic device, and manufacturing method of photo mask - Google Patents

Abstract

PURPOSE: A substrate retention mechanism, a method of manufacturing an electronic device and a method of manufacturing a photo mask are provided to accommodate efficiently many types of substrates and to prevent the substrates from falling by supporting the substrates in a tilted state using a plurality of substrate supporting parts. CONSTITUTION: A substrate retention mechanism(10) includes a plurality of substrate supporting parts(16) for supporting many types of substrates(1) in a tilted state. The substrate supporting parts are divided into a major supporting region and a minor supporting region. A first angle(θ) between the major supporting region and a horizontal plane is smaller than a second angle between the minor supporting region and the horizontal plane.

Description

Substrate holding area, manufacturing method of electronic device, manufacturing method of photomask {SUBSTRATE HOLDING TOOL, MANUFACTURING METHOD OF ELECTRONIC DEVICE, AND MANUFACTURING METHOD OF PHOTO MASK}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate holder for holding substrates such as a liquid crystal display panel substrate and a photomask substrate. Furthermore, the present invention relates to a method for manufacturing an electronic device using the substrate holder and a method for manufacturing a photomask using the substrate holder. It is about.

A liquid crystal display panel (electronic device) and a photomask used for its manufacture are usually manufactured by performing a predetermined treatment on a rectangular substrate (glass substrate or the like). In such manufacture, the board | substrate holding tool holding a board | substrate is used at the time of carrying out a temporary waiting, conveyance, storage, etc. of a board | substrate (for example, refer patent document 1).

The board | substrate holding opening shown in patent document 1 is a box-shaped cassette, and is provided with the opening part used as an entrance and exit of a board | substrate. A plurality of storage ports are formed in parallel on each of two opposite inner surfaces of the cassette, and a plurality of substrates are accommodated by inserting two parallel sides of the substrate into the storage port.

In Patent Document 1, the cassette is placed in a longitudinal position, the substrate is held in a vertical form, the cassette is placed in a lateral position, and the substrate is held in a horizontal form, and the cassette is inclined. The state which kept the board | substrate in the inclined form in the attitude | position is disclosed.

[Patent Document 1]

Japanese Patent Laid-Open No. 9-115996 (the second page, first degree)

By the way, liquid crystal display panels and photo masks do not have a size standard in particular, and in recent years, since liquid crystal display panels tend to be enlarged, it is required to handle substrates of various sizes in the manufacture of liquid crystal display panels and photo masks. . For example, in the case of a photomask used for the manufacture of a liquid crystal display panel, the size of the processing substrate may exceed more than ten types at the time of its manufacture.

However, since the board | substrate holding fixture shown in the said patent document 1 is comprised so that the parallel two sides of a board | substrate can be maintained, the size of the board | substrate which can be maintained is limited. As a result, a dedicated substrate holding tool is required for each size of the board, which not only increases equipment cost but also has a problem that such a board holding tool occupies a lot of space.

In addition, when handling a substrate at the time of manufacturing a liquid crystal display panel or a photo mask, it is required to handle the substrate carefully in order to prevent the substrate from being damaged by falling.

However, in the board | substrate holding area shown by patent document 1, since the parallel two sides of a board | substrate are lifted by both hands at the time of entrance and exit of a board | substrate, a hand may slip and fall a board | substrate when handling a large heavy board | substrate.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and a first object of the present invention is to provide a substrate holder which can not only hold a substrate having a different size but also facilitate handling of the substrate and prevent the substrate from falling.

In addition, in the manufacture of electronic devices such as liquid crystal display panels, by reducing the type and number of substrate holding holes required, not only can the equipment cost and the area occupied by the substrate holding holes be reduced, but also the handling of the substrate can be facilitated to improve productivity. It is a second object of the present invention to provide a method for manufacturing an electronic device.

In addition, in manufacturing the photomask, it is possible to reduce the type and number of substrate holders required to reduce the equipment cost and the area occupied by the substrate holders, as well as to facilitate the handling of the substrates to improve productivity. It is a third object to provide a manufacturing method.

The substrate holder of the present invention for achieving the above object is a substrate holder for holding a rectangular substrate so that the main surface thereof along the vertical direction, the substrate for supporting the adjacent two sides of the substrate from the bottom in a predetermined angle inclined state It is set as the structure provided with the support part.

If the board | substrate holding tool is comprised in this way, it becomes possible to hold board | substrate of a different size by supporting the adjacent two sides of a board | substrate below. As a result, not only the equipment cost can be reduced but also the space occupied by the substrate holder can be reduced as compared with the conventional method of preparing a dedicated substrate holder for each substrate size.

In addition, since the two adjacent sides of the substrate can be handled so as to be kept from the lower side, it is possible to prevent the substrate from falling when entering and leaving the substrate.

In addition, the substrate holding apparatus of the present invention includes a long side support region for supporting the long side of the rectangular substrate from below, and a short side support region for supporting the short side of the rectangular substrate from below, wherein the long side support region and the horizontal plane The angle formed is smaller than the angle formed by the short side support region and the horizontal plane.

By configuring the substrate holding tool in this way, the center position of the rectangular substrate to be held can be suppressed low, so that the substrate can be held stably and the fall of the substrate can be prevented.

Further, the substrate holder of the present invention is a substrate holder for holding a circular or polygonal substrate so that its main surface is in the vertical direction, and has two support regions for supporting the side edges of the substrate from below. Moreover, such a support area is comprised with the board | substrate support part which has a predetermined angle with a horizontal plane.

By configuring the substrate holder in this manner, it is possible to support a circular or polygonal substrate, and the same effect as the substrate support for supporting a rectangular substrate can be obtained. Here, the polygon refers to more than a pentagon, and the circular includes an ellipse as well as a complete circle.

In addition, a method for manufacturing an electronic device according to the present invention for achieving the above object is a method for manufacturing an electronic device by manufacturing a predetermined process on a substrate, including the step of holding the substrate to the substrate holding region. I'm doing it.

According to this method of manufacturing an electronic device, not only the type and number of necessary board holding strips can be reduced, but also the equipment cost and the area occupied by the board holding strips can be reduced, and the handling of the board can be facilitated to improve productivity.

In addition, a method of manufacturing a photomask in the present invention for achieving the above object is a photomask manufacturing method for manufacturing a photomask by performing a predetermined treatment on the substrate, comprising the step of holding the substrate to the substrate holding sphere I'm doing it.

According to this method of manufacturing the photomask, not only the type and number of necessary substrate holding strips can be reduced, but also the equipment cost and the area occupied by the substrate holding strips can be reduced, and the substrate can be easily handled to improve productivity.

Fig. 1 is a side view showing the substrate holder of the first embodiment.

Fig. 2 is a plan view showing the substrate holder of the first embodiment.

Fig. 3A is a schematic side view showing the substrate holding tool of the first embodiment holding the substrate, and Fig. 3B is a schematic front view showing the substrate holding tool of the first embodiment holding the substrate.

4 is an explanatory diagram showing a handling time of a substrate;

Fig. 5 is a side view showing the substrate holder of the second embodiment.

Fig. 6 is a perspective view showing the substrate holder of the third embodiment.

Fig. 7 is a side view showing the substrate holder of the fourth embodiment.

Fig. 8 is a side view showing the substrate holder in a state of supporting a circular substrate.

Fig. 9 is a side view showing the substrate holder in a state of supporting an octagonal substrate.

Explanation of symbols on the main parts of the drawings

1: Substrate 10: Substrate Holding Zone

11: base portion 12: substrate support portion

13: side plate 16: support member

20: substrate holder 21: base portion

22: substrate support 24: longitudinal pipe

25: fixed support member 26: rotation support member

30: substrate holder 31: base portion

32: substrate support 33: support frame

40: substrate holding portion 41: base portion

42: substrate support 43: wheel

44: support frame 45: support member

Best Mode for Carrying Out the Invention Embodiments of the present invention will be described below with reference to the drawings.

[First Embodiment of Substrate Holding District]

First, a first embodiment of a substrate holding tool according to the present invention will be described with reference to FIGS.

Fig. 1 is a side view showing the substrate holder of the first embodiment, Fig. 2 is a plan view showing the substrate holder of the first embodiment, Fig. 3A is a schematic side view showing the substrate holder of the first embodiment holding the substrate, and Fig. 3B is 4 is a schematic front view showing the substrate holding tool of the first embodiment holding the substrate, and FIG. 4 is an explanatory view showing the handling of the substrate.

As shown in these figures, the substrate holder 10 of the first embodiment includes a base portion 11 mounted on an upper surface and a substrate support portion 12 supporting the substrate 1. It is comprised.

The substrate 1 held by the substrate holder 10 is a rectangle (rectangular, square, etc.) used as a liquid crystal display panel substrate or a photo mask substrate. In this embodiment, one side is 170 mm or more (preferably 300 Mm or more), and the weight assumes the glass substrate of 0.2 kg-10 kg.

The base portion 11 includes a pair of side plates 13 facing each other through a predetermined gap, a plurality of upper connecting members 14 for integrally connecting the upper portions of the side plates 13, and the side plates 13. Consists of a plurality of lower connection member 15 for integrally connecting the lower portions of).

On the upper side of the side plate 13, a right triangular recessed portion 13a corresponding to the shape of each portion of the substrate 1 is formed, and a plurality of upper connecting members 14 are disposed along the recessed portion 13a. have.

The material of the side plate 13, the upper connection member 14, and the lower connection member 15 can be selected as long as it is resistant to the weight of the substrate 1. For example, stainless, aluminum, resins and the like are recommended.

The substrate support part 12 is composed of a plurality of support members 16. The supporting member 16 of the present embodiment is formed in a cylinder through which the upper connecting member 14 can penetrate, and is attached to the side plate 13 through the upper connecting member 14. On the outer circumferential portion of the support member 16, a plurality of supporters 16a are formed at predetermined intervals in the longitudinal direction. This support tool 16a supports the side (side surface) of the board | substrate 1, and the width | variety of the spherical bottom face 16b is set larger than the thickness of the board | substrate 1 which hold | maintains. In addition, the spherical side surface 16c of the support tool 16a becomes the inclined surface which inclines the side of the board | substrate 1 to the spherical surface 16b.

The material of the support member 16 can be selected arbitrarily as long as it is relatively hard and there are few oscillations. For example, aluminite-treated metals such as Teflon (registered trademark), derurin, and aluminum are recommended.

In addition, the support member 16 of the present embodiment is fixed to the upper connecting member 14, but may be freely rotated with respect to the upper connecting member (14).

In addition, the support member 16 of the present embodiment has a plurality of supports 16a for holding a plurality of substrates 1, but in the case of holding one substrate 1, the supports 16a are integrally formed. You may.

The plurality of support members 16 described above are parallel to an imaginary straight line inclined at a predetermined angle θ with respect to the horizontal plane when viewed from the side of the substrate holder 10 along an imaginary straight line perpendicular to this.

When the board | substrate 1 is hold | maintained in the board | substrate holding slot 10, as shown in FIG. 4, the board | substrate 1 is handled so that a main surface may incline along a perpendicular direction and a side may incline. At this time, since the two adjacent sides of the substrate 1 can be held with both hands from below, the hands are less likely to slip compared to the case where the parallel two sides of the substrate 1 are held from both left and right sides, and the substrate 1 falls down. It is possible to prevent effectively.

Then, when the substrate 1 handled as described above is lowered on the support member 16 and two adjacent sides of the substrate 1 are set on the support 16a of each support member 16, the substrate 1 It is hold | maintained by the board | substrate holding tool 10. As shown in FIG.

That is, when the board | substrate 1 is set to the board | substrate holding opening 10 as mentioned above, many support members 16 support two adjacent sides of the board | substrate 1 below, and the main surface is a posture according to a perpendicular direction. The substrate 1 is held. According to such a substrate holding structure, since only two sides of the lower side adjacent to the four sides of the substrate 1 are supported, the size of the substrate 1 to be held is supported, such as to support the parallel two sides of the substrate 1. Without being limited, it becomes possible to hold the substrate 1 of various sizes.

In addition, in the substrate support part 12 of this embodiment, when supporting two adjacent sides of the board | substrate 1, the support area which supports one side (henceforth a long side support area) supports the other side. It is longer than (hereinafter referred to as a short side support region), and when the rectangular substrate 1 is held, the long side of the substrate 1 is set in the long side support region.

The angle θ formed by the long side support region and the horizontal plane is preferably 5 ° to 45 °, more preferably 10 ° to 30 °. That is, if the angle θ formed by the long side support region and the horizontal plane is smaller than the angle (90-θ) formed by the short side support region and the horizontal plane, the center position of the substrate 1 can be suppressed low while holding the rectangular substrate 1. As a result, the substrate 1 can be stably held to prevent the substrate 1 from falling.

In addition, the substrate support part 12 of this embodiment is comprised by the several support member 16 arrange | positioned through the predetermined clearance gap, and it supports with the board | substrate 1 in order to partially support the adjacent two sides of the board | substrate 1, Oscillation due to contact of the member 16 and dust accumulation on the support member 16 can be suppressed to reduce adhesion of dust to the substrate 1.

Second Embodiment of Board Holding District

Next, a second embodiment of the substrate holder according to the present invention will be described with reference to FIG. However, the structure and the effect which are common to 1st Example are based on the description of 1st Example, and demonstrates focusing on difference with 1st Example.

Fig. 5 is a side view showing the substrate holder of the second embodiment.

As shown in this figure, the board | substrate holding tool 20 of 2nd Example is comprised with the base part 21 mounted in the upper surface, and the board | substrate support part 22 which supports the board | substrate 1. As shown in FIG.

The base part 21 is comprised integrally provided with the horizontal pipe 23 along the upper surface, and the many longitudinal pipe 24 mounted in the horizontal pipe 23. As shown in FIG. The upper end position of each longitudinal pipe 24 is set to a height along an imaginary straight line inclined at a predetermined angle θ with respect to the horizontal plane when viewed from the side of the substrate holder 20 and a imaginary straight line orthogonal to this.

The substrate support part 22 is comprised from the fixed support member 25 and the rotation support member 26 provided in the upper end part of each longitudinal pipe 24. As shown in FIG. The fixed support member 25 constitutes a long side support region, and a support tool 25a corresponding to the support tool 16a of the first embodiment is formed. In addition, the rotation support member 26 constitutes a short side support region, and is formed of a pulley-type rotation member having a support tool 26a.

Also in the substrate holder 20 of the second embodiment configured as described above, since the adjacent two sides of the substrate 1 are supported by the plurality of support members 25 and 26 from below, the substrate holder 10 of the first embodiment is provided. Similarly, it is possible to hold the substrate 1 of various sizes.

Further, in the substrate holder 20 of the second embodiment, since a plurality of longitudinal pipes 24 are placed and the support members 25 and 26 are provided at the upper ends thereof, the hands below the substrate 1 It is possible to make the handling of the substrate 1 easier by securing a space of the entering area.

[Third Embodiment of Substrate Holding District]

Next, a third embodiment of the substrate holder according to the present invention will be described with reference to FIG. However, the structure and effect which are common to the said Example shall use the description of the said Example, and demonstrates focusing on difference with the said Example.

Fig. 6 is a perspective view showing the substrate holder of the third embodiment.

As shown in this figure, the board | substrate holding tool 30 of 3rd Example is comprised with the base part 31 mounted in the upper surface, and the board | substrate support part 32 which supports the board | substrate 1. As shown in FIG.

The base portion 31 constitutes a rotary table rotatable about a vertical axis, and a Y-shaped support frame 33 constituting the substrate support portion 32 is placed in the center portion thereof. When the upper part of the support frame 33 is viewed from the side of the substrate holding tool 30, the shape is set so as to conform to the virtual straight line inclined at a predetermined angle (θ) with respect to the horizontal plane and the virtual straight line perpendicular to this. On the upper surface thereof, a supporting member 33a corresponding to the supporting member 16a of the first embodiment is formed continuously. Since the support tool 33a supports the adjacent two sides of the board | substrate 1 from below, like the board | substrate holding tool 10 of 1st Example, it becomes possible to hold the board | substrate 1 of various sizes.

Further, since the substrate holding tool 30 of the third embodiment can rotate the substrate 1 held with the base portion 31 as the rotating table, the substrate holding tool 30 can be rotated for the substrate 1 of various sizes. (目視) Can also be used as a visual inspection apparatus capable of conducting inspections.

[Fourth Embodiment of Substrate Holding District]

Next, a fourth embodiment of the substrate holder according to the present invention will be described with reference to FIG. However, the structure and effect which are common to the said Example shall use the description of the said Example, and demonstrates focusing on difference with the said Example.

Fig. 7 is a side view showing the substrate holder of the fourth embodiment.

As shown in this figure, the board | substrate holding fixture 40 of 4th Example is comprised with the base part 41 mounted on the upper surface, and the board | substrate support part 42 which supports the board | substrate 1. As shown in FIG.

The base portion 41 constitutes a trolley having a plurality of wheels 43 on its lower surface, and two support frames 44 are placed in the center thereof. In the upper part of the support frame 44, many support members 45 which comprise the board | substrate support part 42 are provided. This support member 45 is disposed so as to follow the virtual straight line inclined at a predetermined angle (Θ) with respect to the horizontal plane when viewed from the side of the substrate holder 40, and the virtual straight line perpendicular to this. It has the support 45a equivalent to the support 16a. Since these support members 45a support two adjacent sides of the substrate 1 from below, it is possible to hold the substrates 1 of various sizes similarly to the substrate holder 10 of the first embodiment.

In addition, since the substrate holder 40 of the fourth embodiment can convey the substrate 1 held with the base portion 41 as a vehicle, the substrate holder 40 can also be used as a substrate transfer apparatus capable of conveying substrates 1 of various sizes. Can be used.

[Method for Manufacturing Electronic Device]

Next, the manufacturing method of the electronic device which concerns on this invention is demonstrated using the manufacturing method of a liquid crystal display panel as an example.

The manufacturing process of the liquid crystal display panel includes a process of preparing a liquid crystal display panel substrate, a plurality of processes of forming a liquid crystal display panel by performing a predetermined treatment on the liquid crystal display panel substrate, and a process of inspecting the formed liquid crystal display panel. .

It is required to hold the liquid crystal display panel substrate in the substrate holding zone or the like when performing the temporary waiting, storage, conveyance, visual inspection, etc. of the liquid crystal display panel substrate between the above processes or each process. The manufacturing method of the electronic device according to the present invention is characterized in that the liquid crystal panel substrate is held by the above-described substrate holding holes 10, 20, 30, 40 when it is necessary to hold the liquid crystal display panel substrate. In other words, since the substrate holders 10, 20, 30, and 40 can hold substrates of various sizes, it is possible to reduce the equipment cost and the occupied area of the substrate holder by reducing the type and number of necessary substrate holders. Furthermore, since the substrate holders 10, 20, 30, and 40 facilitate handling of the substrate, not only can the substrate be damaged by falling, but also the productivity can be improved.

[Production method of photomask]

Next, the manufacturing method of the photomask which concerns on this invention is demonstrated.

The manufacturing process of a photomask includes the process of preparing a photomask board | substrate, the many process of forming a photomask by performing predetermined process on a photomask board | substrate, and the process of inspecting the formed photomask.

It is required to hold the photomask substrate in the substrate holding zone or the like when performing the temporary waiting, storage, conveyance, visual inspection, etc. of the photomask substrate between the above steps or each step. The photomask manufacturing method according to the present invention is characterized in that the photomask substrate is held by the above-described substrate holders 10, 20, 30, and 40 when it is necessary to hold the photomask substrate. That is, since the substrate holding regions 10, 20, 30, and 40 can hold substrates of various sizes, it is possible to reduce the equipment cost and the occupying area of the substrate holding region by reducing the type and number of necessary substrate holding regions. In addition, since the substrate holders 10, 20, 30, and 40 facilitate the handling of the substrate, not only can the substrate be damaged by the drop, but also the productivity can be improved.

The present invention is not limited to the above-described rectangular substrate, but can also be applied to circular or polygonal substrates. In the case of such a substrate, it is preferable that the intersection angle of two support regions supporting the side edge of the substrate beneath is set to an angle that matches the shape of the substrate to be held.

In addition, as the board | substrate support 50 at the time of supporting the board | substrate 1 of a perfect circle (in combination with the board | substrate support which supports a rectangular board | substrate) using the board | substrate support which orthogonally crosses two support areas, FIG. As shown in the figure, it is good to make the structure which provided the support tool 53 in the board | substrate support part 52, and it becomes possible to support circular board | substrates of different diameters by doing so.

In addition, similarly, as the board | substrate support 60 at the time of supporting the polygonal board | substrate 1, for example, the octagonal board | substrate 1, the structure which provided the support member 66 to the board | substrate support part 62 is shown. Can be used.

As described above, according to the present invention, not only the substrate having a different size can be held in the substrate holding region, but also the substrate can be easily handled to prevent the substrate from falling.

In addition, in manufacturing electronic devices such as liquid crystal display panels, it is possible to reduce the type and number of necessary substrate holding strips, thereby reducing equipment costs and the area occupied by the substrate holding slots, as well as improving productivity by facilitating handling of the substrates. Can be.

Further, in manufacturing the photomask, not only the type and number of necessary substrate holding strips can be reduced, but also the equipment cost and the area occupied by the substrate holding strips can be reduced, and the substrate can be easily handled to improve productivity.

Claims (5)

A substrate holder for holding a rectangular substrate so that its main surface is in the vertical direction, And a substrate support portion for supporting two adjacent sides of the substrate from below with a predetermined angle inclined therebetween. 2. The substrate of claim 1, wherein the substrate support portion includes a long side support region for supporting the long side of the rectangular substrate from below, and a short side support region for supporting the short side of the rectangular substrate from below. A substrate holding tool characterized by being set smaller than an angle formed by the short side support region and a horizontal plane. A substrate holder for holding a circular or polygonal substrate so that its main surface is in the vertical direction. A substrate holding tool having two support areas for supporting the side edges of the substrate from below, and these support areas having a substrate support having a predetermined angle with a horizontal plane. An electronic device manufacturing method of manufacturing an electronic device by applying a predetermined treatment to a substrate, The manufacturing method of the electronic device characterized by the process of holding the said board | substrate with the board | substrate holding tool of Claim 1, 2 or 3. A photomask manufacturing method of manufacturing a photomask by applying a predetermined treatment to a substrate, The manufacturing method of the photomask which includes the process of holding the said board | substrate with the board | substrate holding tool of Claim 1, 2 or 3.