JP2983799B2 - Substrate holding method and substrate holding cassette - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate holding method and a substrate holding cassette for transferring a substrate used for a hard disk such as a computer, for example, an aluminum substrate.

[0002]

2. Description of the Related Art A substrate for a hard disk,
For example, an aluminum substrate (hereinafter, referred to as an aluminum substrate)
In many cases, the substrate is often transported in units of 25 sheets, and the substrate storage cassette used at that time is configured to have a specific size depending on the outer diameter of the substrate.

For example, an outer diameter of 3.5 inches (95.0 m)
m), 2.5 inch (65.0 mm), and 1.89 inch (48.0 mm) substrate shapes are available in dedicated cassettes. However, at present, high throughput (processing volume) is required, so automation is progressing, cassettes specific to manufacturing machines are often installed, and lots with different substrate outer diameters are often flowed continuously in production planning. is there.
In this case, it is necessary to perform an operation such as changing the cassette after stopping the line once, and there is a disadvantage that time loss is extremely large and operation efficiency is reduced.

[0004]

SUMMARY OF THE INVENTION In view of the above-mentioned problems, the present invention provides a method for holding a substrate for a hard disk capable of accommodating a plurality of substrates having different outer diameters in the same cassette, and a substrate holding cassette for transfer. The point is to provide.

[0005]

The substrate holding method of the present invention comprises:
The lowermost part of the vertically arranged first hard disk aluminum substrate is used as a point of contact with the holder, and a range of an angle of 20 to 45 degrees on the substrate side below a horizontal line passing through the center point of the first aluminum substrate. In this case, three-point holding is performed so as to be in contact with the holder at a point on the outer peripheral line of the first aluminum substrate, and a second hard disk aluminum substrate having a larger outer diameter than the first aluminum substrate can be held. An angle of 20 ° to 45 ° on the substrate side below a horizontal line passing through the center point of the second aluminum substrate and the other two contacts excluding the lowermost holder contact of the outer periphery of the first aluminum substrate. In contact with the holder at two points, ie, two contacts with the outer peripheral line of the second aluminum substrate.
A plurality of aluminum substrates having different outer diameters are held by the point holding.

In order to achieve the above-mentioned method, a holder is provided in contact with the lowermost portion of the first aluminum substrate arranged vertically,
A holder that contacts a substrate side below a horizontal line passing through a center point of the first aluminum substrate at two points on an outer peripheral line of the first aluminum substrate within an angle of 20 to 45 degrees;
And a center point of the second aluminum substrate, the other two contacts of the first aluminum substrate except for a lowermost holder contact point, so as to be able to hold a second aluminum substrate having a larger outer diameter than the aluminum substrate. 20 to 4 degrees below the horizontal line passing through
The aluminum substrate holding cassette is configured to include a holder that contacts two points at two angles with the outer peripheral line of the second aluminum substrate within a range of 5 degrees.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIGS. First, in describing an embodiment of the present invention, a technical idea of the present invention will be described with reference to FIG. In FIG. 2, the lowermost point 2 of the outer periphery of a circular substrate 1 (hereinafter, referred to as a substrate 1) having a small outer diameter arranged vertically is used as a contact point with the holder. Further, a horizontal line 3 passing through the center point of the substrate 1 and a horizontal line 3 passing through the center point of the substrate 1
The straight line 4 forms an angle of not less than degrees, and the straight line 5 forms an angle of 45 degrees.

Next, the center point of a circular substrate 6 having a large outer diameter (hereinafter, referred to as the substrate 6) also arranged in the vertical direction is arranged on the same perpendicular line 7 as the center point of the substrate 1, and
The contact 8 between the outer peripheral line of the substrate 6 and the outer peripheral line of the substrate 6 is connected to the straight line 4.
And between the straight line 5. A horizontal line 9 passing through the center point of the substrate 6 and a straight line 10 passing through the center point of the substrate 6 and forming an angle of 20 degrees or more below the horizontal line 9 and a straight line 11 forming an angle of 45 degrees; In addition, a point 12 in contact with the outer peripheral line of the substrate 6 is a contact point with the holder.

In the above description, since the substrate 1 and the substrate 6 are disk-shaped, they are symmetric with respect to the straight line 7 as the axis of symmetry. Therefore, the portion holding the substrate 1 is held at the points 2 and 8 and its symmetry point 8 ', and the portion holding the substrate 6 is held at the point 8 and its symmetry point 8', and the point 12 and its symmetry point 12 '. Will do.

An embodiment of the present invention based on the technical idea of the present invention will be described below. In FIG. 1, the outer diameter φ
A lowermost point 14 of a 2.5-inch (φ65.0 mm) circular substrate 13 (hereinafter, referred to as a substrate 13) is used as a holding contact,
A horizontal line 15 passing through the center of the substrate 13;
An angle formed by a straight line 16 passing through the center line 3 and below the horizontal line 15 is defined as θ1. The center point of a circular substrate 18 (hereinafter referred to as the substrate 18) having an outer diameter of 3.5 inches (φ96.0 mm) and the center point of the substrate 13 are the same perpendicular line 1.
9, and the triple intersection point between the outer peripheral lines of the substrates 13 and 18 and the straight line 16 is set as 20 to be a contact point with the holder.

Further, an angle formed by a horizontal line 21 passing through the center point of the substrate 18 and a straight line 22 passing through the center point of the substrate 18 and below the horizontal line 21 is defined as θ2. The intersection of the straight line 22 is 24. Also in this case, the perpendicular 19 is made to be axisymmetric,
0 ′, which is a symmetry point 24 ′ of the point 24.

Therefore, the contact points of the holder of the substrate 13 having an outer diameter of 2.5 inches are equal to those of the points 14, 20 and 20 '.
And the contact points of the holder of the substrate 18 having an outer diameter of 3.5 inches are four points of points 20, 20 ', 24 and 24'. To determine the point of contact of these holders, the angle θ
For 1 and θ2, 25 substrates were arranged according to the combinations shown in Table 1, and vibration and impact were applied to test the substrate stability.

[0013]

[Table 1]

In the results shown in Table 1, the case where a fall occurs so as to come into contact with an adjacent substrate is indicated by a cross, and the case where no contact is caused by the fall is indicated by a circle. The contacts for holding the substrate having a small outer diameter are points 14, 20 and 20 '.
The angle θ1 of the position of the contact 20 is preferably 20 to 45 degrees, and the contact holding the substrate having a large outer diameter is:
In addition to the contact 20 having the angle θ1 in the range of 20 ° to 45 °, it was satisfactory if the angle θ2 was in the range of 20 ° to 45 ° at the position of the contact 24. The holder of the cassette contacts the substrate at the contacts 14, 20, 20 ', 24, and 24', supports the substrate as a V-groove, and holds the holder side plate 26 so as to contact the substrate at each of the contacts. Tool 25a,
Attach 25b, 25c, 25d, 25e.

The cassette of the present invention is not limited to the size of the outer peripheral diameter of the substrate, but is 1.89 inches (48.0 m
m) and a size of φ1.3 inch (φ34.0 mm). Further, it is possible to simultaneously use two or more substrates. For example, in FIG. 2, the substrate 13 has an outer diameter of 1.3 inches (34 mm).
If the substrate 18 has an outer diameter of 1.89 inches (48.0 mm), the angle θ1 at the position of the contact 20 is 25 to 35 degrees, and the angle θ2 at the position of the contact 24 is 30 to 40 degrees. It is.

Further, as a substrate having a larger outer diameter, φ
It is also possible to arrange 2.5 inches (φ65.0 mm), φ3.5 inches (φ95.0 mm), and the like. In this case, the contact positions of the respective substrates with the holders are also combinations as shown in Table 1 above. It was found that when the contact position with the holder was set within the range of the corner, it was stable during the transfer of the substrate.

[0017]

As described above, according to the present invention, even a substrate having a different outer diameter as a cassette for transporting substrates can be accommodated by one cassette by setting the contact point of the holding portion at a specific position. It was configured to be possible. This eliminates the need to change the cassette even when the substrate size is different at the time of transporting the substrate, so that the time can be greatly reduced, the operation rate can be improved, and the cost can be reduced.

In addition, a cassette storage shelf when not in use is not required, so that space can be saved. However, in a substrate manufacturing line, it is in a clean room, and the effect of space saving in the clean room is very large.

[Brief description of the drawings]

FIG. 1 is an embodiment of a transport cassette according to the present invention.

FIG. 2 is an explanatory view of a holder contact position of the transport cassette according to the present invention.

[Explanation of symbols]

 Reference Signs List 13 Substrate with small outer diameter 18 Substrate with large outer diameter 14, 20, 24 Contact between substrate and holder 25a, 25b, 25c, 25d, 25e Board holder 26 Holder side plate

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int. Cl. ⁶ , DB name) B65G 1/00-1/20 H01L 21/68

Claims (4)

(57) [Claims] 1. A lowermost part of a first circular substrate arranged vertically.
Is the contact point with the holder, and the center point of the first circular substrate is
An angle of 20 to 45 degrees on the substrate side below the passing horizontal line
At a point on the outer peripheral line of the first circular substrate within the range of
And three points held in contact with the first circle
A second circular substrate having a larger outer diameter than the substrate can be held.
As described above, the holder contact at the lowermost periphery of the first circular substrate is
Passes through the other two contacts and the center point of the second circular substrate
An angle of 20 to 45 degrees on the substrate side below the horizontal line
Two points within the box and two contact points with the outer peripheral line of the second circular substrate
By contacting the holder at 4 points and holding it at 4 points,
A circular substrate characterized by holding a plurality of circular substrates
Retention method. 2. The lowermost part of a vertically arranged first circular substrate.
Passing through the center point of the first circular substrate
An angle of 20 to 45 degrees on the substrate side below the horizontal line
The contact between two points on the outer peripheral line of the first circular substrate within the enclosure
A jig having a larger outer diameter than the first circular substrate;
The first circular substrate so as to be able to hold the second circular substrate
The other two contacts except for the lowermost retainer contact of the outer periphery of the
On the substrate side below the horizontal line passing through the center point of the circular substrate 2
The second circular substrate within an angle range of 20 degrees to 45 degrees;
And a holder that contacts at two points with two contact points with the outer peripheral line of
A circular substrate holding cassette characterized by the above-mentioned. 3. The first and second circular substrates have a front surface.
Aluminum for hard disk with magnetic recording medium formed on the surface
2. A circular substrate according to claim 1, wherein said substrate is a nickel substrate.
Substrate holding method. 4. The apparatus according to claim 1, wherein said first and second circular substrates have respective surfaces.
Aluminum for hard disk with magnetic recording medium formed on the surface
3. The circular substrate according to claim 2, wherein the substrate is a nickel substrate.
Substrate holding cassette.