JPH09274779A - Handling mechanism for magnetic disk - Google Patents

Abstract

PROBLEM TO BE SOLVED: To simultaneously perform loading/unloading or change of disks for a relay mount and a test device, to unnecessitate Y movement of a holder of the relay mount, and to stabilize holding of a disk by improving both two axis- and three axis-manipulators of a handling mechanism. SOLUTION: Two hands ha , hb for two disks 1, 1' are provided at both manipulators 43, 44 respectively at a fixed interval L, also, two holders Ha , Hb of a relay mount are arranged at a fixed interval L in the direction of X. Any part of an outer peripheral edge of a disk 1 having different depth is made to have curvature in complete contact with both slant faces of a V type groove in circular arcs of a V type groove of both holders Ha , Hb . Thereby, throughput of a test is improved, and as the disk is stably held in the holder H, there is no hindrance in handling.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic disk handling mechanism used in an inspection system.

[0002]

2. Description of the Related Art A hard magnetic disk (simply a disk) used for storing information in a computer system is inspected by a test device for the presence or absence of physical defects in the medium and the soft storage performance. An inspection system has been developed to streamline this inspection, and the disks are efficiently inspected by a flow process.

FIG. 4 shows an example of the configuration of a practical inspection system, which comprises a disk supply / accommodation section 2, a test device 3, and a handling mechanism 4. The disc supply / accommodation unit 2 has a rotary table 21 on which a plurality of cassettes 22a, ... Are mounted, for example, cassettes 22a, 22c are uninspected for accommodating uninspected discs 1 and
22b and 22d are for inspected, which accommodates the inspected disk 1 '. Discs 1 (discriminate 1'only if necessary below) are housed vertically in each cassette 22,
The position a is the access position of the disk 1, and in the inspection, the rotary table 21 is rotated to stop the required cassette 22 at the access position. The test apparatus 3 includes, for example, spindles 31a, 31b, 31 for mounting the three disks 1 respectively.
Each mounted disc 1 having c is tested in parallel. The handling mechanism 4 includes a guide rail 41 in the X direction.
And a relay table 42 for holding the disk 1 and a hand h for chucking the disk 1 at the tip of the fixed arm 431.
2-axis manipulator 43 that moves in Z and a rotating arm
It also has a hand h at the tip of 441, and is composed of a three-axis manipulator 44 that moves X / Z and rotates by θ. In the relay stand 42, two holders H _a and H _b for vertically holding the disk 1 are arranged in the Y direction, and these holders move in the Y direction to move each hand h.
The disk 1 is stopped at the attachment / detachment position.

In the disc inspection, the manipulator 43 (the fixed arm 431 of the manipulator 43) descends, and the hand h chucks and takes out the disc 1 of the cassette 22a, and the Z moves upward to move along the guide rail 41 and the relay stand 42. X move to
For example, when the holder H _a is at the attachment / detachment position, the holder is lowered by Z and the disk 1 is attached and held therein. If the Z movement is omitted, the held disc 1 is chucked by the hand h of the manipulator 44 and moved to the test apparatus 4 in the X direction. For example, when the disc 1'of the spindle 31c is removed, the disc 1 is removed. Rotate horizontally and attach to it.
During this time, for example, when the spindle 31b has been inspected, the hand h is moved X to chuck the disk 1 ', and it is rotated vertically to move X to the relay stand 42, and to move Y to the attachment / detachment position. Attach it to a certain holder H _b . Then, the hand h of the manipulator 43 chucks the disk 1 ′ and moves X to the access position of the rotary table 21.
The quality of the disk 1'is classified according to the inspection result, and the cassette 22b or 22d corresponding to the classification is stopped at the access position by the rotation of the rotary table 21, and the disk 1'is stored therein. In this way, the discs 1 of the uninspected cassette are sequentially mounted on the respective spindles 41 and inspected, and the discs 1 ′ are sequentially accommodated in the inspected cassettes.

Nowadays, the demand for magnetic disks has been increasing more and more, and in response to this, the production amount and the inspection amount are increasing. Therefore, it is necessary to improve the inspection throughput of the inspection system. In response to this, improvement of the above-mentioned handling mechanism is required. That is, the two manipulators 43, 44 are arranged so that each time the disk 1 is attached to or detached from the holders H _a , H _b and the spindle 31, the X / Z is performed.
The holders H _a and H _b must be moved each time they are attached and detached. Therefore, the disks 1 and 1'are simultaneously attached to and detached from both holders H _a and H _b , and the disks 1 and 1'are simultaneously exchanged to the same spindle 31, and the Y movement of both holders H _a and H _b is performed. If it is improved so that the number of X / Z movements can be omitted, the number of X / Z movements can be reduced, and the attachment / detachment time can be shortened to improve the inspection throughput.

Next, the above-mentioned both holders H_a, H_b Is this
The retention of the claw 1 may become unstable. This is shown in FIG.
Explain. In FIG. 5 (a), at the upper end of the holder H,
Disk radius R₀ Is constant and corresponds to a part of its outer circumference
A V-shaped groove having a V-shaped cross section is formed in an arc shape.
And the outer edge of the disc 1 mounted on the
It is held in contact with both slopes of the V-shaped groove. But the disc
There is a tolerance in the thickness d of 1 and it depends on the manufacturing lot etc.
When d is different, the contact position of the outer peripheral edge changes. (b)
In the A section shown in, the thickness d with zero tolerance₀ Having di
The outer edge of the disk 1 is the point D on the slope.₀ Contact with
You. The V-shaped groove is formed by rotating the V-shaped cutting blade
D₀ Radius R including ₀ Because it is a method of cutting into an arc of
The radius (or curvature) of the arc differs depending on the position of the slope.
For example, let the radius of the lowest point B on the slope be R₁ , Radius of the highest point E
R_Two Then, R₁ > R₀ > R_Two It is. For this reason,
Thickness d '(> d₀) The outer peripheral edge of the disk 1 has a V-shaped groove
Point p at both ends_a, p_b Touches, but the corresponding point of section A
No contact with D'and no gap ΔR between both slopes
You. For this purpose the thickness d₀ Disc 1 with different thickness d
Is both points p_a, p_b It may be supported only by and tilt.
If it tilts, the chuck with the hand h becomes uncertain.
Therefore, the handling of the disc 1 is hindered.

[0007]

SUMMARY OF THE INVENTION In the present invention, both holders H _a , of the relay stand 42 by the above-mentioned both manipulators 43, 44 are provided.
The object is to simultaneously perform the mounting and removal or replacement of the disk 1 with respect to H _b and the respective spindles 31 of the test apparatus 3, eliminate the Y movement of both holders H _a and H _b , and stabilize the disk holding. And

[0008]

SUMMARY OF THE INVENTION The present invention is a magnetic disk handling mechanism which solves the above-mentioned problems.
Each of the two-axis manipulator and the three-axis manipulator of the conventional handling mechanism described above is provided with two hands for two discs at a constant interval L in the X direction, and two holders of the relay stand in the X direction. It is arranged at a constant interval L. The two hands of both manipulators simultaneously attach / detach or replace the disks to / from the two holders of the relay stand and the spindles of the test apparatus, respectively. In the above description, the two holders of the relay stand are formed in an arc shape on the upper part thereof and have a V-shaped groove corresponding to a part of the outer circumference of the disk 1. Any part of the outer peripheral edge of has a curvature so as to be in contact with both slopes of the V-shaped groove.

[0009]

BEST MODE FOR CARRYING OUT THE INVENTION The operation of the above-described handling mechanism of the present invention will be described below. The two-axis manipulator hands described above are h _a and h _b , and the three-axis manipulator hands are h
_c , h _d , the hands h _a , h _c on the disk 1, the hand h
Dedicate _b and _hd to the disk 1 ', respectively. 2 of the relay stand
The holders are the same as in the conventional case, H _a and H _b , with H _a dedicated to the disc 1 and H _b dedicated to the disc 1 ′. The Z movement operation of both manipulators will be omitted.

[0010] 2-axis manipulator, the hand h _a is chucked disk 1 uninspected cassette and X movement, mounted perpendicularly to the attendant of the holder H _a. Both hands h _a two-axis manipulator, and X distance h _b, both holders H attendant console
_a, since X distance H _b is the same L they correspond to each other, hand h _a simultaneously with the loading of the disk 1 by the hand h _b is the holder H _b disk 1 held in the '
The chucked by X movement, after accommodating the inspected cassette, attached to the holder H _a to the next disc 1 and X moves the hand h _a until Attendant chucked, repeating these operations following .

Also in the three-axis manipulator, since the X intervals of both hands h _c and h _{d and} the X intervals of both holders H _a and H _b are the same, the hand h _c is held by the disk held by the holder H _a. At the same time one chucking, hand h _d is wearing the disc 1 'that chuck the holder H _b, to X moved to the position of the spindle inspection of the test apparatus is completed. Here, hand h _d is rotated in the horizontal direction to chuck and remove disk 1 ′ of this spindle, and then it is rotated 180 ° to mount disk 1 of hand h _{c on} the same spindle, that is, to replace at the same time. . However, this exchange is not exactly simultaneous, but here it is simultaneous.
Then, the disk 1'is moved again to the relay stand to mount the disk 1'on the holder _Hb , and the above operation is repeated.

By [0012] As described above, according to each hand h _a ~h _d,
Since the holders H _a and H _b and the disks 1 and 1 ′ for each spindle are simultaneously attached and detached or exchanged, the X / Z movements of both manipulators and the number of θ rotations of the three-axis manipulator are reduced, so that the attachment and detachment can be performed. It also saves time.
Further, since the Y movement of both holders H _a and H _b which is conventionally required is not necessary, the inspection throughput is improved and
These controls are simplified.

Next, both holders H _a and H _b of the relay stand will be described. The V-shaped grooves of both holders H _a and H _b are formed so that any part of the outer peripheral edge of a disk having different arc curvatures comes into contact with both slopes, so the mounted disk 1 Is held stably without tilting, and chucking by the hand h is surely performed.

[0014]

1 to 3 show an embodiment of the present invention,
FIG. 1 is a block diagram of the two-axis manipulator 43, FIG. 2 is a block diagram of the three-axis manipulator 44, and FIG. 3 is a diagram for explaining the two holders H _a and H _b of the relay stand 42. Holder H _a , H _b
FIG. 3B is an explanatory view of an improved V-shaped groove of both holders H _a and H _b .

[0015] In FIG. 1, on both sides of the front end of the fixed arm 431 of the 2-axis manipulator 43, two hands h _a, h _b
However, the chucked discs 1 are attached in parallel with each other at a constant interval L in the X direction and vertically. Both hands h _a, h _b is the three rollers r _a respectively, r _b, has a r _c, r _a, r _b corresponds to the top of the outer periphery of the disc 1, r
_{The c} is arranged corresponding to the upper end of the central hole 1a. Each roller r _a, r _b, the r _c, when pressed by the pressing mechanism (not shown), the disc 1 is chucked, stopping the press to release the disk 1. In the handling, hand h _a
Is dedicated to the disk 1 and the hand h _b is dedicated to the disk 1 ', and when one chucks, the other simultaneously releases.

In FIG. 2, a fixed plate 442 and a fixed block 443 are attached to the tip of the rotary arm 441 of the triaxial manipulator 44.
Is fixed, and two hands h _c and h _d are attached to both sides thereof similarly to the above-mentioned two-axis manipulator 43. However, these are due to the θ rotation of the rotating arm 441.
To the spindle 31 and to the spindle 31 in the horizontal direction. Each of the hands h _c , h _d has three chuck claws c _a , c _b , c _c, which are arranged corresponding to three points on the outer circumference of the disc 1. Each chuck claw c _a , c _b , c _c
When is pressed / stopped, the disc 1 is chucked / released. In handling, the hand h _c is the disk 1
, The hand h _d is dedicated respectively to the disc 1 ', similar to the above, one when the chuck and the other is simultaneously released.

[0017] In FIG. 3 (a), 2 pieces of the holder H _a relay board 42, H _b is arranged at regular intervals L in the X direction, each of the both hands h _a above the two manipulators 43, 44, h _b
And the positions in the Y direction corresponding to h _c and h _d , that is, the attachment / detachment positions. In FIG. 3 (b), the arcuate V-shaped grooves formed on the upper portions of both holders H _a and H _b have the same curvature of the arc of any point on both slopes as the curvature of the outer periphery of the disk 1 having the radius R _0. Made equal. That is, the curvature of the circular arc between the lowest point B and the highest point E of the slope is made equal to the curvature of the outer circumference of the disk 1 having the radius R ₀ . As a result, the mounted disc 1
As long as the radius is R ₀ , even if the thickness is different, any part of the outer peripheral edge is in contact with both slopes,
It is held securely and there is no risk of tilting.

[0018]

As described above, according to the handling mechanism of the present invention, the hands of the biaxial and triaxial manipulators attach and detach the disk 1 to and from the holders of the relay stand and the spindles of the test apparatus. By exchanging them simultaneously, the number of X / Z movements of both manipulators is reduced, the attachment / detachment time is shortened, and the Y movement of both holders is not required, so that the inspection throughput is improved and these The control is simplified, and both holders of the relay stand are improved so as to reliably hold the disk, and the effect that contributes to the improvement of the inspection efficiency of the magnetic disk inspection system is great.

[Brief description of drawings]

FIG. 1 is a configuration diagram of two hands of a two-axis manipulator according to the present invention.

FIG. 2 is a configuration diagram of two hands of the same three-axis manipulator.

3A and 3B are views for explaining two holders of the relay stand, FIG. 3A is a layout view of both holders, and FIG. 3B is an explanatory view of an improved V-shaped groove of both holders. .

FIG. 4 is an explanatory diagram of a configuration of a magnetic disk inspection system and a handling mechanism.

5A and 5B are views for explaining two holders of a conventional relay stand. FIG. 5A is a side view and a cross-sectional view showing a holding state of the disc by both holders, and FIG. 5B is a mounted disc. It is explanatory drawing of the reason that becomes unstable.

[Explanation of symbols]

1 ... Hard magnetic disk, simply disk or untested disk, 1 '... Inspected disk, 2 ... Disk supply / storage unit, 21 ... Rotary table, 22 ... Cassette, 3 ... Test device, 31a-31c ... Spindle, 4 ... Handling mechanism, 41 ... X-direction guide rail, 42 ... Relay stand, 43 ... 2-axis manipulator, 431 ... Fixed arm, 44 ... 3-axis manipulator, 441 ... Rotary arm, 442 ... Fixed plate, 443 ... Fixed block, h , h _a ~h _d ... hand, H _a, H _b ... holder, r _a ~r _c ... roller, c _a ~c _d ... chuck claws,
R ₀ ... Disk radius, d ... Disk thickness.

Claims (2)

[Claims] 1. A rotary table on which cassettes for uninspected disks and inspected disks are placed, a relay stand having holders for holding the disks, a test device having a plurality of spindles for mounting the disks, and the disks. Chuck each and place X / between the rotary table and the relay stand.
In a magnetic disk inspecting system comprising a Z-moving two-axis manipulator and a handling mechanism composed of a three-axis manipulator X / Z-moving and θ-rotating between the relay stand and the test device, each of the manipulators is provided. Two hands are provided at a constant interval L in the X direction, and two holders are arranged on the relay stand at a constant interval L in the X direction. With each two hands of both manipulators,
A magnetic disk handling mechanism, wherein the two holders of the relay stand and the disks of the spindle of the test apparatus are simultaneously attached and detached or replaced. 2. The two holders of the relay stand are formed in an arcuate shape in the upper part thereof, and have a groove having a V-shaped cross section for holding a part of the outer periphery of the mounted disk 1, and the V-shaped groove 2. The magnetic disk handling mechanism according to claim 1, wherein the circular arc has a curvature such that any part of the outer peripheral edge of the disk having a different thickness is in contact with both slopes of the V-shaped groove.