KR20040064191A - Electroforming material of stacked thin film and fabricating method thereof - Google Patents

Abstract

PURPOSE: An electro forming material of a stacked thin film is provided to form an electro forming material of a desired height by repeatedly performing a stack process, and to eliminate a boundary surface formed by a stack by continuously stacking an electro forming material. CONSTITUTION: A photosensitive material(2) is applied to a base preform(1). An exposure process and a cleaning process are performed to form the first electrode base having the first exposure part(3) and the first space part. An electro forming process is performed on the first electrode base to form the first electro forming material in the first space part. A photosensitive material is applied to the upper part of the first electro forming material and the second space part. An exposure and a cleaning process are performed to form the second electrode base having the second exposure part and the second space part. An electro forming process is performed on the second electrode base to form the second electro forming material in the second space part.

Description

Laminated thin film electroformed workpiece and its manufacturing method. {Omitted}

The present invention relates to the technical field of forming an electroplated article by applying a photosensitive material, and then forming an exposed portion and a space portion and subjecting the space portion to electroplating. In order to obtain a thick product of the pole cast, the thickness of the photosensitive material must be thickened. In this case, however, when the thickness of the photosensitive material is increased, a light beam capable of photosensitive thick photosensitive material is required. However, in reality, the ability of the light beam is limited, so it was not possible to use a photoresist beyond a certain depth. In order to solve this problem, in the present invention, all the problems can be solved by laminating photosensitive materials and performing the electric pole processing for a plurality of times.

Ordinary pole work could not be obtained above a certain height due to the constraint of photoresist. However, the laminated thin film workpiece of the present invention can be subjected to repeated lamination processing, thereby obtaining a poled workpiece of a desired height. In the prior art, the electroplated workpiece is usually formed in a straight line, but in the present invention, it is possible to obtain a curved electroplated workpiece of a desired shape. This can be said to be a feature of the laminated thin film that can form a cross-sectional shape of a desired shape by repeating lamination while changing the position of the exposed portion.

FIG. 1 is a state diagram showing a state where a first photosensitive agent is applied onto a base base material composed of an electrode plate.

FIG. 2 is an explanatory diagram illustrating the formation of a first exposure portion in the photosensitive material of FIG. 1.

3 is an explanatory diagram illustrating the configuration of the first electrode base.

FIG. 4 is an explanatory diagram for explaining that the electroforming processing is started between the first exposure portions of the first electrode base by performing electroforming on the first electrode base.

FIG. 5 is an explanatory diagram showing a state in which the electroformed workpiece of FIG. 4 grows by the height of the first exposed portion to become the first electroformed workpiece.

FIG. 6 is an explanatory diagram showing the application of the first photosensitive agent to the first electroformed workpiece and the upper part of the first exposure portion again.

7 is an explanatory diagram for explaining formation of a second exposure portion on the second photosensitive agent.

FIG. 8 shows that the non-exposed part of the second photosensitive layer of FIG. 7 is removed as the second electrode base 9.

FIG. 9 is an explanatory diagram illustrating the formation of the electroformed workpiece by performing electroplating on the second electrode base.

FIG. 10 is a state diagram showing a state in which the electroformed workpiece of FIG. 9 grows, grows by the height of the second exposed portion, and becomes the second electroformed workpiece.

FIG. 11 is an explanatory view showing that a third photosensitive layer is formed again on the second electroplated material and the second exposed portion.

12 is a state diagram in which the third exposure portion is formed again in the third photosensitive layer.

13 is an explanatory diagram for explaining a third pole base.

FIG. 14 is an explanatory view for explaining that electroforming processing is generated by subjecting the third electrode base to electroforming.

FIG. 15 is a state diagram when the third pole-shaped workpiece is formed by growing the pole-formed workpiece of FIG. 14 at the same height as the exposed portion.

16 is a state diagram of the laminated thin film electroformed workpiece.

17 is an embodiment of a laminated thin film electroformed material grown in various forms.

18 is an explanatory diagram for explaining a method for forming a laminated thin film electroform processed in various shapes.

* Description of the symbols for the main parts of the drawings *

DESCRIPTION OF SYMBOLS 1 Base base material 2: Photosensitive material 3: Exposure part 4: 1st electrode base 5: Electrode processing forming material 6: 1st pole processing material 7: 2nd photosensitive material 8: 2nd exposure part 9: 2nd electrode base 17: Laminated Thin Film Electrode

According to the present invention, after the photosensitive material is applied to the base substrate, the first electrode base having the first exposed portion and the first space portion is formed through an exposure and washing process, and the electrolytic pole is formed on the first positive base. A basic step of processing to form a first electroformed workpiece in the first space; After applying the photoresist on the first electroformed workpiece and the first exposure part again, a second electrode base having a second exposure part and a second space part is formed through an exposure and washing process, and the second positive electrode is formed. The present invention relates to a laminated thin film electroformed article and a method of manufacturing the same, wherein the base is formed through a lamination process of forming a second electroformed article in the second space by performing electroforming. In the present invention, it is common for the lamination step to be repeated two or more times. If the second exposure portion is formed at the same position as the first exposure portion in the lamination step performed after the basic step, the resultant pole-shaped workpiece is laminated in a vertical form, but in the lamination step, the first exposure portion and the second exposure portion are laminated. If the position is configured differently, it is possible to stack the workpieces in various forms of curved lines instead of straight lines. Hereinafter, the present invention will be described in detail with reference to the drawings.

1 is a state diagram showing a state in which the first photosensitive agent 2 is applied onto the base base material 1 constituted by the electrode plate.

FIG. 2 is an explanatory diagram illustrating the formation of the first exposure portion 3 on the photosensitive material of FIG. 1.

3 is an explanatory diagram illustrating the configuration of the first electrode base. The 1st electrode base 4 is defined as removing the part except the exposure part of the photosensitive layer apply | coated to the base base material. The base base material is usually composed of a plate of a conductor of a plate, and examples thereof include a well polished stainless steel plate. A stainless steel plate is a conductor having a high strength and easily demolded with electroforming such as nickel or copper. In the embodiment of the most commonly used. In the present invention, since the lower side of the base base material does not have a technical meaning, description thereof will be omitted, but it is preferable to insulate the lower part of the base base material so that electric pole processing is not performed.

FIG. 4 is an explanatory diagram for explaining that the electroforming process 5 starts to be formed between the first exposure portions of the first electrode base by performing electroforming on the first electrode base.

FIG. 5 is an explanatory diagram showing a state in which the electroformed workpiece of FIG. 4 grows by the height of the first exposed portion to form the first electroformed workpiece 6.

FIG. 6 is an explanatory diagram showing that the first photosensitive agent 7 is again applied to the first electroforming material and the first exposure portion.

7 is an explanatory diagram for explaining formation of a second exposure portion on the second photosensitive agent.

FIG. 8 shows that the non-exposed part of the second photosensitive layer of FIG. 7 is removed as the second electrode base 9.

FIG. 9 is an explanatory diagram illustrating that the electroforming processing product 10 is formed by performing electroforming on the second electrode base.

FIG. 10 is a state diagram showing a state in which the electroformed workpiece of FIG. 9 grows, grows by the height of the second exposed portion, and becomes the second electroformed workpiece 11.

FIG. 11 is an explanatory diagram showing that the third photosensitive layer 12 is formed again on the second electroforming material and the second exposed portion.

FIG. 12 is a state diagram in which the third exposure portion 13 is again formed in the third photosensitive layer.

13 is an explanatory diagram for explaining a third pole base. This removes the unexposed portion of the photosensitive material of FIG. 12 and defines it as the third electrode base 14.

FIG. 14 is an explanatory diagram for explaining that the electroforming processing product 15 is generated by subjecting the third electrode base to electroforming.

FIG. 15 is a state diagram when the third pole-shaped workpiece 16 is formed by growing the pole-formed workpiece of FIG. 14 to the same height as the exposed portion.

16 is a state diagram of the laminated thin film electroformed workpiece. In FIG. 15, the base base material and all the exposed parts are removed, which is defined as a laminated thin film tribute 17.

17 is an embodiment of a laminated thin film electroformed material grown in various forms. Various shapes such as laminated thin film electroformed products grown in an S-shape (18), grown in a step shape (19), and grown in a jar shape (20) can be configured. These laminated thin film workpieces are surrounded by the stacked photosensitive materials 21. Photosensitive materials stacked in this manner are defined as laminated photosensitive materials in the present invention.

18 is an explanatory diagram for explaining a method for forming a laminated thin film electroform processed in various shapes. The lamination photosensitive layer was formed three times from FIG. 1 to FIG. 16, and as a result, three laminated thin film electroforms were obtained. In the present invention, the laminated thin film pole can be carried out a number of times as many times as desired. As described above, when the laminated thin film electroformed workpiece is formed in multiple layers, the position of the exposed portion may be always configured at the same position, but the multilayered structure may be formed by moving the position of the exposed portion. When exposing to the same position at all times, the laminated thin film pole which is grown only vertically can obtain a tribute, and when the exposed portion is moved while being laminated, various types of laminated thin film electroforms can be obtained. In FIG. 18, five layers (22, 23, 24, 25, and 26) are stacked five times. At this time, the positions of the exposed portions are differently configured for each stacking step.

Although the thickness of the photoresist which can be exposed to photoresist by forming the exposed part and the space part by the photoresist has a certain limit, the height of the electroformed workpiece cannot be obtained above a certain height, but the laminated thin film electroformed product of the present invention. It is possible to perform repeated lamination processing to obtain the pole-shaped workpiece of the desired height. In addition, as the lamination is continuously performed in the lamination of the electroformed workpiece, there is a big advantage that there is no interface according to the lamination.

Claims (8)

In the electroplated workpiece, after coating the photosensitive material on the base substrate, it forms a first electrode base having a first exposure portion and a first space portion through an exposure and washing process, and performs electroplating on the first positive base. A basic step of forming a first electroformed workpiece in the first space; After applying a photosensitive material on the first electroforming material and the first exposure portion again, and forming a second electrode base to form a second exposure portion and a second space portion through the exposure and cleaning process, the second positive electrode The laminated thin film electroformed article, which is formed through a lamination process of subjecting the base to the second electroformed workpiece in the second space. 2. The laminated thin film workpiece according to claim 1, wherein the lamination process is repeated two or more times. The laminated thin film electroformed product according to claim 1 or 2, wherein the second exposed portion is formed at the same position as the first exposed portion in the lamination step. The laminated thin film electroformed product according to claim 1 or 2, wherein various types of electroformed workpieces are formed by lamination by different positions of the first exposure part and the second exposure part in the lamination process. In the method of manufacturing a laminated thin film electroformed product, after applying a photosensitive agent to the base base material, and forming the first electrode base formed with the first exposure portion and the first space portion through the exposure and washing process, the first positive base A basic step of forming a first pole pole workpiece by subjecting the pole pole to the first space; After applying a photoresist on the first electroformed workpiece and the first exposure part again, a second electrode base having a second exposure part and a second space part is formed through an exposure and washing process, and the second positive base A method of manufacturing a laminated thin film electroformed article, characterized in that the laminated thin film electroformed article is manufactured by carrying out a lamination process of subjecting the second electroformed part to a second space. The method of claim 5, wherein the lamination process is repeated a plurality of times or more. 7. The method of claim 5 or 6, wherein the second exposure portion is formed at the same position as the first exposure portion in the lamination step. The method for manufacturing a laminated thin film workpiece according to claim 5 or 6, wherein various types of electroformed workpieces are formed by stacking by different positions of the first exposed portion and the second exposed portion in the lamination process.