KR20040043239A - Singulation-equipment for cam press-type having floater and working-beam - Google Patents

Abstract

PURPOSE: A cam press type singulation apparatus having a floater and a walking beam is provided to be capable of considerably improving the processing speed of the singulation apparatus. CONSTITUTION: A cam press type singulation apparatus is provided with a floater(500) and a walking beam(700) for gradually transferring a process object part(10) to the process progressing direction, and a defective product removing part. At this time, the defective product removing part includes a rotator(920) installed at a groove(500a) of the floater for supporting the process object part or unloading the process object part from the floater, and a spring(930) installed at the floater for supporting the rotator, a driving part(910) for compulsorily spinning the rotator.

Description

Singulation-equipment for cam press-type having floater and working-beam}

The present invention relates to a cam-driven singulation device having a plotter and a walking beam, and more particularly to a cam-driven singulation device capable of quickly distinguishing defective products and regular products.

As is well known, the semiconductor package is finally separated from the lead frame body by a singulation device after several steps of processing, and the singulation device is largely cam according to the type of driving means for operating the mold in the vertical direction. It is divided into a driving method and a cylinder driving method. Currently, the use of a singular driving device of a cam driving method is increasing due to various advantages.

Such a cam driven singulation device includes a plotter that is linearly reciprocated in a vertical direction in conjunction with a drive shaft of a drive means, and a working beam linearly reciprocated in a left and right direction (forward and backward directions of a process) in conjunction with a drive shaft of the drive means. The workpiece is to be gradually moved in the process progress direction by these plotters and walking beams.

In the conventional cam-driven singulation device, in order to collect the semiconductor packages separated from the lead frame as defective or regular products, the workpieces removed from the plotter must be singulated separately and then collected separately. In this case, since the semiconductor packages separated from the lead frame must be transported individually, this causes a problem that the singulation processing speed is greatly reduced.

Therefore, in the case of a workpiece which is easy to detect defects by hand, the workpieces transported by the working beam are singulated after being inserted into the plotter and collected in a batch, and then the worker sorts the defective articles by manual labor. In some cases, however, its use is extremely limited.

Accordingly, the present invention has been invented to solve the above problems, the workpiece transported by the working beam is singulated after being singulated in the state inserted into the plotter, so that the processing speed of the singulation device is improved faster. Its purpose is to provide a cam driven singulation device with a plotter and working beam.

Figure 1a is a front view of a singulation device according to the present invention,

1B is a partial right cross-sectional view of FIG. 1A;

1C is a top view of FIG. 1A,

2A to 6 are views for explaining the operating state of the defective product removing means according to the present invention.

-Explanation of terms for the main parts of the accompanying drawings-

10; Workpiece, B; Base,

B10; Workpiece positioning block, B10a; Guide,

DL; Defective Collection Line, OL; Regular Collection Line,

S; Position detection sensor, 100; Driving,

110; Drive motor 120; driving axle,

130; Coupler, 140; Encoder,

200; Press power transmission means, 210; Main cam,

220; Lower movable block 230; Power Transmission Shaft,

300; Press block 400; Plotter Drive,

410; Cam 420; Shanghai East Block,

430; Plotter support bars, 440; spring,

500; Plotter 500a; home,

500b; Airline 600; Walking beam driving means,

610; First power conversion mechanism, 611; cam,

612; Shanghai East Block, 612a; Fastener,

620; Second power conversion mechanism, 621; nut,

622; Screw shaft, 623; Revolving Block,

630; Third power conversion mechanism, 631; link,

632; Sliding block 640; Power transmission member,

641; Sliding bar, 642; Walking Beam Fixture,

700; Working beam 700a; Hanging Pin,

700b; Airline 800; Photography,

811,812; Lighting equipment; camera,

830; Reflector 900; Reject removal means,

910; Drive mechanism; Air Cylinder,

912; Pusher, 920; Rotor,

930; spring.

The present invention for achieving the above object, the work piece is gradually progressed in the process progress direction by a plotter that is linearly reciprocated in the vertical direction in conjunction with the drive shaft, and a working beam linearly reciprocated in the left and right directions in conjunction with the drive shaft CLAIMS 1. A cam driven singulation device which is transported to an apparatus, comprising: a rotor rotatably installed in a groove of the plotter to support a workpiece or to pull the workpiece out of the plotter; A spring installed in the plotter, the spring supporting the rotor in one direction so that the workpiece is supported on the rotor; It is a structure characterized in that a defective article removing means comprising a drive mechanism for forcibly rotating the rotor so that the workpiece placed on the rotor is pulled out of the plotter is provided.

Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings.

1A to 1C show a cam driven semiconductor manufacturing apparatus with a buffer means according to the present invention. Referring to this, the structure of a cam driven semiconductor manufacturing apparatus will be described as follows.

Cam driven semiconductor manufacturing apparatus; A driving means (100) comprising a driving motor (110) and a driving shaft (120) engaged with the driving motor (110); A press power transmission means 200 interlocked with the drive shaft 120 to reciprocate the press block 300 in the vertical direction; A press block 300 which is reciprocated in the vertical direction by the press power transmission means 200; A plotter driving means 400 interlocked with the drive shaft 120 to reciprocate the plotter 500 in the vertical direction; A plotter 500 which is reciprocated in the vertical direction by the plotter driving means 400; A working beam driving means 600 interlocked with the drive shaft 120 to reciprocate the working beam 700 in a horizontal direction (process forward and backward direction; left and right directions in FIG. 1); It consists of a working beam 700 reciprocating in the left and right directions by the working beam driving means 600. Here, reference numeral 130 denotes a coupler connecting the power shaft of the drive motor 110 and the drive shaft 120 to each other, and 140 denotes an encoder that detects the operation of the drive shaft 120.

As shown in FIGS. 1A and 1B, the press power transmission means 200 reciprocates in a vertical direction while rotatably surrounding the main cam 210 and the main cam 210 engaged with the drive shaft 120. The lower movement block 220 and the lower movement block 220 is made of a power transmission shaft 230 which penetrates the base B and protrudes to the top thereof in a state where the lower end thereof is fixed. The press block 300 is fixed to the upper end of the power transmission shaft 230, the upper holder of the master die is detachably fixed to the press block 300, the singulation punch is installed on the upper holder of the master die. . On the other hand, the lower holder of the master die is fixed to the base (B), the singulation die is installed in this lower holder.

As shown in FIGS. 1A and 1B, the plotter driving means 400 includes a cam 410 engaged with the drive shaft 120, and a shanghai block 420 reciprocated vertically in conjunction with the cam 410. ), It is made of a plotter support bar 430 reciprocating in the vertical direction in conjunction with the Shanghai East block 420. The plotter 500 is fixed to the top of the plotter support bar 430 is reciprocated in the vertical direction. On the other hand, reference numeral "440" is a spring fixed to the Shanghai East block 420 to support the floater support bar 430 in the upward direction, due to the interference with the outside when the plotter 500 is moved upwards It performs the function of mitigating the generated shock.

As shown in FIGS. 1A and 1C, the working beam driving unit 600 is interlocked with the drive shaft 120 and the first power conversion mechanism 610 for converting the rotational movement of the drive shaft 120 into the up and down reciprocating motion. And a second power conversion mechanism 620 and a second power conversion mechanism 620 that are linked to the first power conversion mechanism 610 to convert the up and down reciprocation of the first power conversion mechanism 610 into rotational motion. A third power conversion mechanism 630 for converting the rotational movement of the second power conversion mechanism 620 into a left and right reciprocating motion, and a power transmission member fixed to the main body while being engaged with the third power conversion mechanism 630 and fixed to the main body. 640. The first power conversion mechanism 610 is composed of a cam 611 that is engaged with the drive shaft 120, and the shankdong block 612 is reciprocated in the vertical direction in conjunction with the cam 611. The second power conversion mechanism 620 is fixed to the fastening portion 612a of the shanghai copper block 612, the nut 621 and reciprocating in the vertical direction, and the main body (in this embodiment, while engaging the nut 621) A screw shaft 622 which is rotatably fixed perpendicularly to the housing fixed to the base B}, and a rotation block 623 fixed to the upper end of the screw shaft 622 to be rotated together with the screw shaft 622. . One end of the third power conversion mechanism 630 is rotatably fixed to the rotation block 623 of the second power conversion mechanism 620, and its fixed shaft is fixed to be deflected from the center of the screw shaft 622. A link 631; The sliding block 632 is rotatably fixed to the other end of the link 631 and linearly reciprocates in a horizontal direction along the guide rail 71. The power transmission member 640, the main body (in this embodiment, the sliding bar support 20 fixed to the base (B); A sliding bar 641 that is rotatable and linearly reciprocally fixed in a lateral direction, and one end of the sliding bar 641 are engaged with the sliding block 632 of the third power conversion mechanism 630. It is made of a working beam fixing stand 642 fixed to. The working beam 700 is fixed to the other end of the working beam fixing unit 642 and is linearly reciprocated in the left and right direction. Such a walking beam 700 has a plurality of locking pins on its bottom as shown in FIG. 700a) is formed.

Referring to the operation of the semiconductor manufacturing apparatus schematically, when the driving motor 110 of the driving means 100 is driven, the drive shaft 120 engaged with it is rotated, the driving force of the driving motor 110 is driven motor 110 ) → drive shaft 120 → main cam 210 → lower moving block 220 → power transmission shaft 230 → is transmitted to the press block 300, the lower moving block 220 and the power transmission shaft 230 and The press block 300 is linearly reciprocated in the vertical direction, whereby the workpiece 10 is processed by the vertical mold. At the same time, the driving force of the drive motor 110 is driven by the drive motor 110 → drive shaft 120 → cam 410 → Shanghai copper block 420 → plotter support bar 430 and spring 440 → plotter 500. In response, the shandong block 420, the plotter support bar 430, the spring 440 and the plotter 500 is linearly reciprocated in the vertical direction. In addition, the driving force of the drive motor 110 is the drive motor 110 → drive shaft 120 → cam 611 → Shanghai copper block 612 → nut 621 → screw shaft 622 → rotation block 623 → Link 631 → Sliding Block 632 → Walking Beam Fixture 642 → Sliding Bar 641 and Working Beam 700 are transferred to Sliding Block 632, Working Beam Fixture 642, Sliding Bar 641 ) And the walking beam 700 is linearly reciprocated in the left and right directions.

Here, in the case of the present invention, as shown in Figure 1b and 1c, the defective workpiece removal means that can be collected separately in the state in which the defective workpiece 10 transported by the working beam 700 is inserted into the plotter 500. It should be noted that 900 is provided at the end of the plotter 500.

According to this, since the workpiece 10 conveyed by the working beam 700 is singulated after being singulated while being inserted into the plotter 500 while maintaining the same feed rate as a whole, the processing speed of the singulation device is greatly increased. This reduces the product productivity of the singulation device.

Such defective article removal means 900 is; A rotor 920 rotatably installed in the groove 500a of the plotter 500 to support the workpiece 10 or to pull the workpiece 10 out of the plotter 500; A spring 930 installed in the plotter 500 to support the rotor 920 in one direction so that the workpiece 10 is supported by being placed on the rotor 920; It consists of a drive mechanism 910 forcibly rotating the rotor 920 so that the workpiece 10 placed on the rotor 920 is pulled out of the plotter 500. In the present embodiment, the drive mechanism 910, the air cylinder 911 is fixed to the main body (in the case of the base (B) in the present embodiment), and linearly reciprocating in the vertical direction by the air cylinder 911 is selectively Although the one made of a pusher 912 for forcibly rotating the rotor 920 is used, the present invention is not limited thereto, and all the known ones that can forcibly rotate the rotor 920 may be used. . For example, a known belt mechanism, a ball screw mechanism, a repinion mechanism, or the like may be used as the driving mechanism 910.

Hereinafter, the operation state of the defective product removing means 900 according to the present invention will be described in detail with reference to FIGS. 2A to 6 in connection with the transfer process of the workpiece 10 by the plotter 500 and the working beam 700.

First, as shown in FIGS. 2A and 2B, the plotter 500 is stopped downward so that the workpiece 10 inserted into the plotter 500 is located between the guide protrusions B10a of the workpiece positioning block B10. In the fixed position, when the plotter 500 is lifted upward as shown in FIGS. 3A and 3B, the workpiece 10 seated on the plotter 500 by the locking pin 700a of the working beam 700 is lifted. ) Is engaged. At this time, the driving mechanism 910 of the debris removal means 900 is maintained in a stopped state, the rotor 920 is supported by the spring 930 is being supported by the rotor 920 to the workpiece 10 ) Will remain seated. The locking pin 700a of the working beam 700 may be inserted into a hole for a separate transfer formed in the workpiece 10. However, in this embodiment, the locking pin 700a is fitted into a gap between the semiconductor packages of the workpiece 10. The workpiece position setting block (B10) is to be fixed to the workpiece 10 fitted to the plotter 500 when the plotter 500 is moved in a downward direction, the locking pin ( In general, the guide protrusion B10a is inserted into the same portion as the portion 700a). In the meantime, the workpiece 10 is already singulated and the semiconductor package is separated from the lead frame. In this state, the working beam 700 is moved to the right as shown in FIG. 4A, where the workpiece 10 seated on the plotter 500 is caught by the locking pin 700a of the working beam 700. To the right. In this way, when the workpiece 10 is moved to the right side, the workpiece 10 positioned at the end of the plotter 500 is pushed into the regular product collection line OL. Here, the non-described reference numeral "700b" formed at the end of the walking beam 700 is an air line for ejecting the high-pressure air to force the workpiece 10 is forced into the regular product collection line (OL). Subsequently, when the workpiece 10 newly inserted into the rotor 920 is a genuine product, the state of FIG. 3B is maintained, while in the case of a defective product, the air of the driving mechanism 910 is shown in FIG. 4B. Since the cylinder 911 is operated to push the rotor 920 while the pusher 912 moves upward, the rotor 920 rotates about the hinge axis H while the spring 930 is pressed. As a result, the defective workpiece 10 placed on the rotor 920 falls free from the plotter 500 and falls freely to the defective product collection line DL. Thereafter, as shown in Figure 4c, it is returned to the initial state, in which the rotor 920 to maintain a state in which the workpiece 10 is not mounted. Thereafter, as shown in FIG. 5, after the plotter 500 is lowered in the state where the movement to the right side of the walking beam 700 is completed, the walking beam 700 is moved to the left side as shown in FIG. 6. It will return to the initial position. This operation is repeated continuously to transfer the workpiece 10 in the sequential process progress direction.

The present invention is not limited to the above embodiment, but may be modified in various ways.

First, as shown in Figure 2a, if the sensor (S) for detecting whether the workpiece 10 is mounted on the rotor 920 is installed, whether the defect removal means 900 is operating normally It can be seen whether or not, there is an advantage that the malfunction of the singulation device is prevented. For example, the workpiece 10 placed on the rotor 920 is a defective product, and thus the defective product removing means 900 is operated so that the workpiece 10 is removed by the defective collection line DL. When the workpiece 10 is detected as being placed on the workpiece 920, a problem occurs in the defective product removing means 900. In this case, the control means (not shown) for controlling the operation of the singulation device stops the operation of the singulation device and warns the malfunction of the defective product removing means 900.

In addition, as shown in FIG. 4B, the airline 500b is formed on the plotter 500, and the defective workpiece 10 mounted on the rotor 920 is applied to the high-pressure air injected from the airline 500b. By quickly removing from the plotter 500, the defective workpiece 10 is reliably removed from the plotter 500.

The present invention is not limited to the above embodiments, and of course, various modifications can be made without departing from the scope of the following claims.

For example, in the present embodiment, four defective article removing means 900 are provided in a row, but one or more defective article removing means 900 is appropriately disposed as necessary in accordance with one moving unit of the workpiece 10. Of course, it is possible, of course, can be arranged in parallel with the reject removal means 900 corresponding to the arrangement of the workpiece 10.

According to the present invention as described above, there is a structure in which the defective article removal means for separating and collecting the defective workpiece conveyed by the working beam in the state of being inserted into the plotter is provided at the end of the plotter, Since the singulation operation and the separate collection operation are performed while being sequentially inserted in the process progress direction while maintaining the inserted state, the processing speed of the singulation apparatus is significantly shortened.

Claims (4)

The workpiece 10 is in process by the plotter 500 interlocked with the drive shaft 120 in a linear reciprocating direction and the working beam 700 interlocked with the drive shaft 120 in a linear reciprocation direction. In the cam driven singulation device that is gradually transferred in the direction, A rotor (920) rotatably installed in the groove (500a) of the plotter (500) to support the workpiece (10) or to pull the workpiece (10) out of the plotter (500); A spring 930 installed in the plotter 500 to support the rotor 920 in one direction so that the workpiece 10 is supported by being placed on the rotor 920; Rotor 920 is forcibly rotated so that the defective product removing means 900 made of a drive mechanism 910 is provided with the workpiece 10 mounted on the rotor 920 to be pulled out from the plotter 500. Cam driven singulation device with a plotter and working beam. The driving mechanism 910 of claim 1, wherein the driving mechanism 910 is linearly reciprocated vertically by the air cylinder 911 fixed to the main body and the air cylinder 911 to selectively rotate the rotor 920. Cam driven singulation device having a plotter and a walking beam, characterized in that consisting of a pusher (912). The cam-driven singulation device according to claim 1, further comprising a sensor (S) for detecting whether or not the workpiece (10) is placed on the rotor (920). According to claim 1, Airline 500b is formed in the plotter 500, the defective workpiece 10 placed on the rotor 920 is a floater (by a high-pressure air is injected from the airline 500b) Cam driven singulation device with a plotter and working beam, characterized in that it is quickly removed from.