KR20040020852A - 진동 억제 기능을 가지는 자기 베어링 장치, 진동 추정기능을 가지는 자기 베어링 장치 및 이 자기 베어링장치를 탑재한 펌프 장치 - Google Patents
진동 억제 기능을 가지는 자기 베어링 장치, 진동 추정기능을 가지는 자기 베어링 장치 및 이 자기 베어링장치를 탑재한 펌프 장치 Download PDFInfo
- Publication number
- KR20040020852A KR20040020852A KR1020030061419A KR20030061419A KR20040020852A KR 20040020852 A KR20040020852 A KR 20040020852A KR 1020030061419 A KR1020030061419 A KR 1020030061419A KR 20030061419 A KR20030061419 A KR 20030061419A KR 20040020852 A KR20040020852 A KR 20040020852A
- Authority
- KR
- South Korea
- Prior art keywords
- magnetic bearing
- rotating body
- vibration
- acceleration
- displacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000013016 damping Methods 0.000 title description 5
- 230000001133 acceleration Effects 0.000 claims abstract description 131
- 238000006073 displacement reaction Methods 0.000 claims abstract description 123
- 238000004364 calculation method Methods 0.000 claims abstract description 39
- 238000012546 transfer Methods 0.000 claims abstract description 34
- 238000001514 detection method Methods 0.000 claims description 65
- 230000004907 flux Effects 0.000 claims description 37
- 230000006698 induction Effects 0.000 claims description 36
- 230000001629 suppression Effects 0.000 claims description 35
- 238000000034 method Methods 0.000 claims description 19
- 238000006243 chemical reaction Methods 0.000 claims description 13
- 230000008859 change Effects 0.000 claims description 12
- 238000005188 flotation Methods 0.000 claims description 9
- 230000005540 biological transmission Effects 0.000 claims description 8
- 230000004044 response Effects 0.000 claims description 7
- 230000009466 transformation Effects 0.000 abstract description 6
- 230000000452 restraining effect Effects 0.000 abstract 2
- 230000006870 function Effects 0.000 description 64
- 238000010586 diagram Methods 0.000 description 17
- 239000004065 semiconductor Substances 0.000 description 14
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 12
- 229910052751 metal Inorganic materials 0.000 description 12
- 239000002184 metal Substances 0.000 description 12
- 230000033001 locomotion Effects 0.000 description 10
- 125000006850 spacer group Chemical group 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 7
- 230000014509 gene expression Effects 0.000 description 6
- 229910052742 iron Inorganic materials 0.000 description 6
- 150000002739 metals Chemical class 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 230000004069 differentiation Effects 0.000 description 3
- 238000010926 purge Methods 0.000 description 3
- 208000027418 Wounds and injury Diseases 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- -1 metals Chemical class 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 238000013519 translation Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000000386 athletic effect Effects 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000005347 demagnetization Effects 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 210000004185 liver Anatomy 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0444—Details of devices to control the actuation of the electromagnets
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2360/00—Engines or pumps
- F16C2360/44—Centrifugal pumps
- F16C2360/45—Turbo-molecular pumps
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002257538 | 2002-09-03 | ||
| JPJP-P-2002-00257538 | 2002-09-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20040020852A true KR20040020852A (ko) | 2004-03-09 |
Family
ID=31712280
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020030061419A Withdrawn KR20040020852A (ko) | 2002-09-03 | 2003-09-03 | 진동 억제 기능을 가지는 자기 베어링 장치, 진동 추정기능을 가지는 자기 베어링 장치 및 이 자기 베어링장치를 탑재한 펌프 장치 |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US6806606B2 (https=) |
| EP (1) | EP1396649B1 (https=) |
| JP (1) | JP4287213B2 (https=) |
| KR (1) | KR20040020852A (https=) |
| DE (1) | DE60320072T2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20180027341A (ko) * | 2016-09-06 | 2018-03-14 | 캐논 가부시끼가이샤 | 리소그래피 장치 및 물품의 제조 방법 |
Families Citing this family (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2829200B1 (fr) * | 2001-09-06 | 2004-12-31 | Mecanique Magnetique Sa | Dispositif et procede de compensation automatique de perturbations synchrones |
| US20030155882A1 (en) * | 2002-02-19 | 2003-08-21 | Nikon Corporation | Anti-gravity mount with air and magnets |
| JP4287213B2 (ja) * | 2002-09-03 | 2009-07-01 | エドワーズ株式会社 | 振動抑制機能を有する磁気軸受装置、振動推定機能を有する磁気軸受装置及び該磁気軸受装置を搭載したポンプ装置 |
| JP2005273802A (ja) * | 2004-03-25 | 2005-10-06 | Boc Edwards Kk | 磁気軸受装置及び該磁気軸受装置を搭載したターボ分子ポンプ |
| WO2006041113A1 (ja) * | 2004-10-15 | 2006-04-20 | Boc Edwards Japan Limited | ダンパおよび真空ポンプ |
| JP4962851B2 (ja) * | 2006-03-06 | 2012-06-27 | 株式会社島津製作所 | 真空ポンプ |
| DE102006034478A1 (de) | 2006-07-26 | 2008-01-31 | Oerlikon Leybold Vacuum Gmbh | Verfahren zur Ermittlung einer Aussage über einen Zustand einer Turbomolekularpumpe sowie eine Turbomolekularpumpe |
| JP4914165B2 (ja) * | 2006-10-06 | 2012-04-11 | エドワーズ株式会社 | 制振装置及び制振方法 |
| JP2008229806A (ja) * | 2007-03-23 | 2008-10-02 | Jtekt Corp | 磁気軸受装置 |
| US8279401B2 (en) * | 2008-04-25 | 2012-10-02 | Asml Netherlands B.V. | Position control system, a lithographic apparatus and a method for controlling a position of a movable object |
| US8128649B2 (en) | 2008-12-16 | 2012-03-06 | Slater Charles R | Spring scissor blade |
| JP5763885B2 (ja) * | 2010-01-29 | 2015-08-12 | 株式会社東芝 | 磁気浮上装置 |
| JP5966651B2 (ja) * | 2012-06-19 | 2016-08-10 | 株式会社ジェイテクト | 主軸装置 |
| DE102013219196A1 (de) * | 2013-09-24 | 2015-03-26 | Siemens Aktiengesellschaft | Verfahren zum Kompensieren einer niederfrequenten Stör-Kraft eines Rotors mit aktiven Magnetlagern, aktives Magnetlager mit Kompensations-Regel-Kreis zur Durchführung des Kompensierens und Verwendung des Magnetlagers |
| JP6015701B2 (ja) * | 2014-03-27 | 2016-10-26 | Ｊｆｅスチール株式会社 | 鋼板の制振制御方法及び制振制御装置 |
| US9816965B2 (en) | 2014-11-14 | 2017-11-14 | General Electric Company | Method to detect vibration nodes between a sensor and an actuator in a rotatable component |
| US10018274B2 (en) | 2015-08-10 | 2018-07-10 | Exxonmobil Upstream Research Company | Device and method for magnetically controlled dry gas seal |
| US10132412B2 (en) | 2016-08-05 | 2018-11-20 | Exxonmobil Upstream Research Company | Device and method for controlling rotating equipment seal without buffer support equipment |
| JP7148230B2 (ja) * | 2017-08-31 | 2022-10-05 | エドワーズ株式会社 | 真空ポンプ及び制御装置 |
| CN111193454B (zh) * | 2020-01-16 | 2023-05-09 | 江苏大学 | 开关磁阻轮毂电机减振及脉动抑制复合控制系统构造方法 |
| CN111836013B (zh) * | 2020-07-09 | 2022-04-12 | 河南中电投华新电力工程有限公司 | 一种基于vr的火电厂检修平台 |
| US11698287B2 (en) * | 2020-08-31 | 2023-07-11 | Rolls-Royce Deutschland Ltd & Co Kg | System and method for detecting vibrations in rotating machinery |
| CN113623239B (zh) * | 2021-09-16 | 2024-06-25 | 北京航空航天大学宁波创新研究院 | 一种不平衡磁拉力控制方法、装置、系统、设备和介质 |
| CN114235143B (zh) * | 2021-12-16 | 2023-09-22 | 常州大学 | 一种磁悬浮多跨转子不对中振动的自适应检测系统 |
| CN114371622B (zh) * | 2022-01-07 | 2024-04-12 | 北京航空航天大学 | 基于多谐波逆Park变换的磁悬浮转子谐波振动力抑制方法 |
| CN115514280B (zh) * | 2022-10-20 | 2024-06-25 | 核工业西南物理研究院 | 一种磁悬浮电机加入低通滤波模块后控制启机振荡的方法 |
| CN119419125B (zh) * | 2024-08-15 | 2025-09-19 | 鑫益邦半导体(江苏)有限公司 | 阻力可变式减震键合设备 |
| CN119675526B (zh) * | 2024-12-18 | 2025-10-03 | 华中科技大学 | 一种磁悬浮电机电磁振动主动抑制方法及系统 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2561738B1 (fr) * | 1984-03-26 | 1986-08-22 | Europ Propulsion | Procede et dispositif de reduction des vibrations des machines tournantes equipees d'une suspension magnetique active |
| US4795927A (en) * | 1986-05-02 | 1989-01-03 | Mitsubishi Jukogyo Kabushiki Kaisha | Control system for a magnetic type bearing |
| US4999534A (en) * | 1990-01-19 | 1991-03-12 | Contraves Goerz Corporation | Active vibration reduction in apparatus with cross-coupling between control axes |
| JPH0720359B2 (ja) * | 1990-03-16 | 1995-03-06 | 株式会社荏原製作所 | 回転体のアンバランス修正装置 |
| WO1991017368A2 (de) * | 1990-05-08 | 1991-11-14 | Teldix Gmbh | Vibrationsisolation eines magnetisch gelagerten körpers |
| US5202824A (en) * | 1990-06-21 | 1993-04-13 | Mechanical Technology Incorporated | Rotating force generator for magnetic bearings |
| JPH0676808B2 (ja) * | 1991-07-02 | 1994-09-28 | 株式会社荏原製作所 | 磁気軸受装置 |
| JP3182197B2 (ja) * | 1992-03-16 | 2001-07-03 | 株式会社荏原製作所 | 磁気軸受装置 |
| JP3296074B2 (ja) * | 1994-03-18 | 2002-06-24 | 株式会社日立製作所 | 高速回転体およびそれに用いる磁気軸受の制御装置 |
| US5736801A (en) * | 1995-08-18 | 1998-04-07 | Ebara Corporation | Filter circuit and control circuit for controlling a rotor |
| US6074180A (en) * | 1996-05-03 | 2000-06-13 | Medquest Products, Inc. | Hybrid magnetically suspended and rotated centrifugal pumping apparatus and method |
| US6394769B1 (en) * | 1996-05-03 | 2002-05-28 | Medquest Products, Inc. | Pump having a magnetically suspended rotor with one active control axis |
| JP2002147454A (ja) * | 2000-11-15 | 2002-05-22 | Seiko Instruments Inc | 磁気軸受装置を備える回転機械 |
| FR2829200B1 (fr) * | 2001-09-06 | 2004-12-31 | Mecanique Magnetique Sa | Dispositif et procede de compensation automatique de perturbations synchrones |
| JP2003166554A (ja) * | 2001-11-28 | 2003-06-13 | Mitsubishi Heavy Ind Ltd | 回転装置の駆動軸 |
| JP4287213B2 (ja) * | 2002-09-03 | 2009-07-01 | エドワーズ株式会社 | 振動抑制機能を有する磁気軸受装置、振動推定機能を有する磁気軸受装置及び該磁気軸受装置を搭載したポンプ装置 |
-
2003
- 2003-08-18 JP JP2003207729A patent/JP4287213B2/ja not_active Expired - Fee Related
- 2003-08-29 US US10/651,518 patent/US6806606B2/en not_active Ceased
- 2003-09-02 EP EP03255465A patent/EP1396649B1/en not_active Expired - Lifetime
- 2003-09-02 DE DE60320072T patent/DE60320072T2/de not_active Expired - Fee Related
- 2003-09-03 KR KR1020030061419A patent/KR20040020852A/ko not_active Withdrawn
-
2005
- 2005-12-29 US US11/322,207 patent/USRE41035E1/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20180027341A (ko) * | 2016-09-06 | 2018-03-14 | 캐논 가부시끼가이샤 | 리소그래피 장치 및 물품의 제조 방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20040041478A1 (en) | 2004-03-04 |
| EP1396649A3 (en) | 2005-06-08 |
| EP1396649A2 (en) | 2004-03-10 |
| DE60320072T2 (de) | 2009-06-18 |
| US6806606B2 (en) | 2004-10-19 |
| JP2004150628A (ja) | 2004-05-27 |
| EP1396649B1 (en) | 2008-04-02 |
| JP4287213B2 (ja) | 2009-07-01 |
| DE60320072D1 (de) | 2008-05-15 |
| USRE41035E1 (en) | 2009-12-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR20040020852A (ko) | 진동 억제 기능을 가지는 자기 베어링 장치, 진동 추정기능을 가지는 자기 베어링 장치 및 이 자기 베어링장치를 탑재한 펌프 장치 | |
| US8860381B2 (en) | Balancing vibrations at harmonic frequencies by injecting harmonic balancing signals into the armature of a linear motor/alternator coupled to a Stirling machine | |
| Zheng et al. | Rotor balancing for magnetically levitated TMPs integrated with vibration self-sensing of magnetic bearings | |
| Gruber et al. | Bearingless segment motor with five stator elements—Design and optimization | |
| US8800302B2 (en) | Driving an active vibration balancer to minimize vibrations at the fundamental and harmonic frequencies | |
| CN109563876B (zh) | 磁轴承装置及使用了该磁轴承装置的流体机械系统 | |
| JP6351400B2 (ja) | 改良された能動型磁気軸受制御システム | |
| Valente et al. | Performance improvement of bearingless multisector PMSM with optimal robust position control | |
| Tsunoda et al. | Vibration control for a rotor supported by oil-film bearings using a bearingless motor | |
| Horiuchi et al. | Development of magnetic bearing momentum wheel for ultra-precision spacecraft attitude control | |
| JP2025086439A (ja) | 磁気軸受の制御装置および制御方法 | |
| KR100575556B1 (ko) | 자기베어링 주축의 고정밀 진동제어 방법 | |
| JP2008232029A (ja) | ポンプ装置 | |
| Sabirin et al. | Modeling and digital control of an active magnetic bearing system | |
| Bonfitto et al. | Turbomolecular pumps on conical active magnetic bearings | |
| Asama et al. | Suspension performance of a two-DOF actively positioned consequent-pole bearingless motor with a wide magnetic gap | |
| Sahinkaya et al. | Bias current optimization and fuzzy controllers for magnetic bearings in turbo molecular pumps | |
| JP4914165B2 (ja) | 制振装置及び制振方法 | |
| Wellerdieck et al. | Experimental verification of an angle-sensorless control scheme for bearingless permanent magnet machines | |
| Yabui et al. | Control Performance Improvement of Excitation System with Active Magnetic Bearing for Measurement of Rotordynamic Forces | |
| JP2003328940A (ja) | ターボ分子ポンプを用いた真空排気装置 | |
| JP3789750B2 (ja) | アクティブ除振装置 | |
| JPH0419422A (ja) | 磁気軸受制御装置 | |
| DEFOY et al. | Numerical and experimental assessment of a large industrial thrust bearing | |
| HK1202144B (en) | Balancing vibrations at harmonic frequencies by injecting harmonic balancing signals into the armature of a linear motor/alternator coupled to a stirling machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0109 | Patent application |
Patent event code: PA01091R01D Comment text: Patent Application Patent event date: 20030903 |
|
| PG1501 | Laying open of application | ||
| N231 | Notification of change of applicant | ||
| PN2301 | Change of applicant |
Patent event date: 20040607 Comment text: Notification of Change of Applicant Patent event code: PN23011R01D |
|
| PC1203 | Withdrawal of no request for examination | ||
| WITN | Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid |