KR200311419Y1 - transfer roller system for LCD borad - Google Patents

Abstract

The present invention relates to an LCD substrate transfer roller device for flowing the cleaning liquid supplied to the substrate in one direction.

In particular, the present invention relates to a substrate feed roller device of a semiconductor manufacturing apparatus in which guide rollers installed on both sides of a rotating shaft can transfer a substrate through a bearing roller. More specifically, the outer roller is coupled to both ends of the shaft. It consists of a configuration including a conveying support portion formed as a support that the curved support bearing is coupled to flow at a predetermined angle, and the guard support portion is provided with a guard bearing rotated about a guard axis to support the side of the substrate conveyed by the shaft .

Accordingly, the substrate is inclined at a predetermined angle by the transfer support so that the cleaning liquid sprayed on the substrate flows along the inclined surface of the substrate so that impurities such as mist can be quickly cleaned without reattaching the substrate. A roller device is provided.

Description

LCD substrate transfer roller device {transfer roller system for LCD borad}

The present invention relates to a PCB substrate transfer roller device which is provided between the bearing rollers between the guide rollers installed on both sides of the shaft to transfer the PCB, the support bearing is coupled to both ends of the shaft inwardly and the outer periphery is curved The support support is configured to rotate at a predetermined angle in this support, and the guard bearing includes a guard support having a guard axis as a rotation axis to support the side surface of the substrate conveyed by the support bearing, so that the substrate is inclined at a predetermined angle. The cleaning liquid sprayed on the surface of the substrate flows in one direction to quickly clean the contaminants separated by the cleaning liquid without being reattached to the substrate, and to prevent damage such as scratches on the side of the substrate when moving in an inclined state. Provided is a substrate transfer roller device.

In general, the substrate transfer roller device of the semiconductor manufacturing apparatus sequentially transfers the substrate through various processes. The existing guide roller for transferring the substrate is provided with guide rollers installed on both sides of the shaft fixed to the shaft and rotated at the upper portion thereof. The substrate located is transferred.

However, when the guide roller is stopped for a while, friction is generated between the transferred LCD substrate and the stopped guide roller, which causes a problem of scratching the substrate.

Therefore, in order to prevent the scratch that occurs when the guide roller stops, the present invention has a support having a first ceramic ball inserted between the inner ring and the outer ring of the slide and maintained by the first retainer in Utility Model Registration No. 220926. It is fitted to both ends of the additional shaft is fixed to the bracket having the guide groove, the hollow fixing portion is provided in the center of the shaft integrally provided with a curved outer guide groove on the outer surface, a plurality of second ceramic balls are the outer guide groove The substrate of the semiconductor manufacturing apparatus comprising a rotating part to be seated on the second ceramic ball, to prevent the second retainer from being biased to one side, and to have a mountain-shaped ring on the outside and an inner guide groove integrally on the inner outer wall. Conveying roller "but provided with guide rollers fixed to the shaft on both sides of the shaft When the furnace shaft is inclined to one side or the substrate on the upper side is in close contact with the guide roller, the edge of the substrate that moves according to the rotation of the shaft corresponds to one side of the guide roller, and friction occurs, accelerating abrasion. Sitting on the substrate has a problem that the defective rate of the product is increased.

In addition, the cleaning liquid is sprayed through the nozzle to the substrate transported horizontally to remove contaminants on the surface of the substrate. At this time, the washing liquid collides with the substrate to generate impurities such as mist. As the substrate is transported horizontally, the surface of the substrate is reattached again in another part of the substrate because the substrate cannot be completely moved outward from the surface of the substrate.

An object of the present invention for improving the above problems is to provide an LCD substrate transfer roller device to reduce the frictional resistance with the guide roller when the transfer device for transferring the substrate stops for a while to prevent wear.

In addition, the LCD substrate transfer roller device allows the cleaning liquid to flow in one direction so that contaminants such as mist are cleaned quickly without reattaching to the substrate, and does not cause damage such as scratches on one side of the substrate during transfer. To provide.

1 is a front view showing an LCD substrate transfer roller device according to the present invention.

Figure 2a and Figure 2b is a side cross-sectional view and plan view showing an LCD substrate transfer roller device according to the present invention.

3 is a perspective view showing a transfer support of the LCD substrate transfer roller device according to the present invention.

Figure 4a and Figure 4b is an operating state showing the transfer support of the LCD substrate transfer roller device according to the present invention.

5 is a cross-sectional view showing a guide roller of the LCD substrate transfer roller device according to the present invention.

6a and 6b are a plan view and a side cross-sectional view showing a guard bearing of the LCD substrate transfer roller device according to the present invention.

Figure 7a and Figure 7b is a side cross-sectional view showing a guard bearing of the LCD substrate transfer roller apparatus according to another embodiment of the present invention.

<Code Description of Main Parts of Drawing>

100.Transfer support 110 ... Support bearing

120 Support 121 Supporter

130.Ceramic Ball 200 ... Guard Support

210 ... Guard Shaft 220 ... Guard Bearing

300 ... guide roller 400 ... shaft

500 ... substrate

In order to achieve the above object, the present invention provides a drive gear installed at one end of a shaft, and a substrate transfer roller device of a semiconductor manufacturing apparatus which is capable of transferring a substrate via a bearing roller between guide rollers installed at both sides of the shaft. In the support, the support bearing is coupled to the inner side to support both ends of the shaft and the outer periphery is formed, and the insertion hole into which the support bearing is inserted so as to flow at a predetermined angle corresponding to the curved outer periphery of the support bearing. The substrate is provided with a support support formed as a support support formed therein and a guard bearing which is rotated about a guard axis to support the side surface of the substrate which moves the upper portion of the shaft having a predetermined inclination by the transport support. It is made of a configuration to be transported in an eccentric state.

The support bearing according to the present invention, the outer side is a curved shape and the hollow rotating portion is formed in the inner guide grooves, respectively, so that the first and second ceramic balls are seated from the top, and the first and second ceramic balls at the bottom The outer guide grooves are respectively formed in the outer circumference so as to be seated and connected to the inner side of the rotating part by ball contact, and the fixing parts are connected to the shaft inwardly, and the both sides of the first and second ceramic balls are supported so as to support the respective sides. And a retainer formed by introducing a retaining hole corresponding to the first and second ceramic balls.

The guard bearing according to the present invention is a hollow rotating part that is formed with an inner guide groove inwardly, and the holding hole through the ceramic ball to be coupled to the outer guide groove corresponding to the inner guide groove is coupled to the inner side of the rotating part; It is characterized by consisting of a hollow fixing portion coupled to the retainer having.

The rotating unit according to the present invention is characterized in that the extension is made of any one selected from one side or both sides according to the thickness of the side of the substrate to be transferred.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The present invention, as shown in Figure 1, the guide roller 300 for supporting the shaft 400 is rotated in one direction so that the substrate is transported on both sides, both sides end so as to incline the rotating shaft 400 a predetermined angle It is composed of a large transfer support 100 coupled to the guard support 200 for supporting the side cross-section of the substrate 500 is inclined by the shaft 400.

The guide roller 300, as shown in Figure 5, is installed while maintaining a predetermined interval on both sides of the shaft 400 rotated by the drive gear 410, the shaft 400 is the guide roller ( And move in contact with 300).

That is, the guide roller 300, the body 310 is inserted into the shaft 400, the fixing ring 320 is interposed and coupled to the inside of the body 310 when the shaft 400 is inserted, and It is made as a coupling 330 is rotatably coupled to one side end of the body (310).

The body 310 is coupled to the shaft 400 at regular intervals so that the substrate 500 can be moved in one direction by the rotation of the shaft 400, the expansion hole 311 formed on the inside After the shaft 400 is inserted, the shaft 400 is coupled between the shaft 400 and the expansion opening 311 via a fixing ring 320. The outer surface of the shaft 400 is an inner ring 312, and the outer surface of the inner ring 312 is fixed. The outer ring 313 having a predetermined inclined surface through the ball 314 is coupled.

Here, the outer ring 313, the material is preferably made of a ceramic or synthetic resin so as to minimize the amount of wear by reducing noise and frictional resistance.

In addition, the body 310, it is preferable that the ring-type packing 315 is coupled to be installed so that the substrate 500 moving the guide roller 300 to the other outer surface can be safely transported without slipping during the transfer. In some cases, two or more packings may be provided.

The fixing ring 320 is coupled to the expansion opening 311 of the body 310, the shaft 400 is inserted into the expansion opening 311, and the notch groove 321 formed at one side when the coupling is coupled is tightened. The shaft 400 is inserted into and fixed to the body 310.

In addition, the coupling 330 is coupled to the body 310, the cutting groove of the fixing ring by pressing the other end of the fixing ring 320 inserted into the expansion opening 311 of the body 310 ( While tightening the 321 is rotatably coupled to the body 310 to be fixed in close contact with the expansion opening (311).

On the other hand, as shown in Figure 3, the transfer support portion 100 is installed at both ends of the shaft 400, the support bearing coupled to the shaft 400 that is rotated by a predetermined distance spaced apart by the drive gear 410 ( 110 and the support bearing 110 is configured as a support 120 is mounted so as to rotate a predetermined angle.

As shown in FIG. 4A or 4B, the support bearing 110 has a predetermined through hole corresponding to the diameter of the shaft 400 so that the shaft 400 is drawn inward, and the outer circumferential surface thereof is constant. Since the diameter of the center portion is enlarged to be curved in curvature, the support bearing 110 is inserted into the guide hole 121 formed in the inner side of the support 120, and then the predetermined angle can be rotated along the curved slope of the inner side. It is configured to.

At this time, the support bearing 110, the rotating portion 140 of the curved shape so as to correspond to the contact surface of the inner guide hole 121 of the support 120, and the ceramic ball 130 interposed in the rotating portion 140 Retainer coupled to one side of the ceramic ball 130 to support the fixing part 150 and the ceramic ball 130 interposed between the rotating part 140 and the fixing part 150 from the side by the ball ( 160).

The rotating unit 140 is formed in a curved shape having a predetermined curvature on the outer circumferential surface to be coupled to correspond to the guide hole 121 of the support 120, each of the pair of inner guide grooves 141 are formed along the inner inner diameter It is made of a hollow structure.

In addition, the fixing part 150 which is in contact with the ball by the rotating part 140 and the ceramic ball 130, the outer guide surface is formed with an outer guide groove 151 corresponding to the inner guide groove 141 is the inner guide The first and second ceramic balls 131 and 132 are respectively seated between the groove 141 and the outer guide groove 151, and the inner circumferential surface of the shaft 400 is inserted into and coupled to the shaft 400. It has a through hole of a shape corresponding to the diameter.

The retainer 160 installed between the rotating part 140 and the fixing part 150 may include first and second ceramic balls 131 interposed between the inner guide groove 141 and the outer guide groove 151. Retaining holes corresponding to the first and second ceramic balls 131 and 132 are inserted into side surfaces corresponding to the ceramic balls so as to support the 132 from the side surfaces.

In addition, the support 120 on which the support bearing 110 is mounted has a guide hole 121 corresponding to the curved outer circumferential surface of the support bearing 110, and the guide hole 121 is the support bearing 110. ) Is configured to have a diameter gradually enlarged to the inner center to allow a predetermined angle free rotation after insertion.

In addition, the guide hole 121, when the shaft 400 coupled to the support bearing 110 is inclined inclined predetermined rotation, as the shaft 400 is inclined installed, the outermost angle of the guide hole 121 It is preferable that the diameter of the outermost circumference of the guide hole 121 is slightly enlarged or chamfered to prevent the friction of the shaft 400 from contacting the circumference.

On the other hand, as shown in Figure 2a or 2b, the shaft 400 is installed so as to be rotated in a predetermined angle inclined by a feed support 100 having different heights respectively installed at both ends thereof, the shaft The guard support 200 is installed on the side of the substrate 500 to support the side of the substrate 500 that is moved by the rotation of the 400.

The guard support 200 is configured as a guard bearing 220 which is installed to be perpendicular to the side of the substrate 500, and a guard shaft 210 coupled to the center of the guard bearing 220 to serve as a rotation axis. do.

In this case, the guard bearing 220 has a hollow shape and is formed so as to correspond to the inner portion of the inner guide groove 141 'and the rotating portion 140' having an inner guide groove 141 'formed therein, and an outer circumferential surface thereof. It is made as a fixing portion 150 'having an outer guide groove 151', the holding hole 161 'of the shape corresponding to the ceramic ball 130' to support the ceramic ball 130 'from one side Retainer 160 'having a coupled to one side.

In this case, as shown in FIG. 7A or 7B, the rotation part 140 ′ may prevent damage such as scratches of side cross-sections generated as the substrate 500 moves with a predetermined slope. It is installed to be in contact with the side end surface of the 500 in the vertical direction, the rotation surface is extended by one side or formed on both sides in accordance with the thickness of the substrate 500 is transferred by the rotation of the shaft 400 inclined to one side It is configured to prevent damage to the side of the substrate 500 generated during.

Looking at the effect of the present invention made by the method as described above are as follows.

First, a driving force is transmitted to the shaft by a drive gear connected to one end of the shaft, and the shaft which receives a predetermined rotational force from the drive gear transmits the driving force to guide rollers installed at predetermined intervals on both sides while rotating. Here, the guide roller, the side of the outer ring is tapered inclined surface is formed so that the friction surface is minimized on the side of the substrate to move the guide roller of the shaft, the friction is generated by the wheel at the same speed as the moving speed of the substrate during friction This does not occur at all, so that the substrate is not scratched.

Subsequently, the LCD substrate is transferred through the guide roller of the shaft inclined by the conveying support, wherein the support bearings coupled to both ends of the shaft are connected to allow a predetermined angle to be rotated into the support. It prevents abrasion or friction generated when the shaft is tilted and rotates, and as the substrate is transferred in a state of inclination at an angle, the sprayed cleaning solution is completely moved to one side along the inclined surface to remove impurities separated by the cleaning solution. Prevents reattachment to the substrate.

At this time, the LCD substrate moving along the shaft rotated at an angle is also tilted to move, at this time, the guard substrate is installed on the side of the LCD substrate to ensure a smooth transfer of the substrate. Here, the guard support is provided to be in contact with the side of the substrate in a vertical direction, the rotation surface is formed to extend to one side or formed on both sides according to the thickness of the substrate side of the substrate regardless of the thickness of the substrate This prevents scratches from occurring.

As such, the present invention has an advantage of reducing the friction generated between the substrate and the guide roller as the substrate moves in contact with the guide roller so that the transfer is smoothly performed even for a long time use.

In addition, since the substrate is transferred in a state of inclination at an angle, impurities such as mist washed by the cleaning liquid may move and clean the inclined surface of the substrate to prevent impurities from reattaching to the substrate due to the retention of the cleaning liquid. There is an advantage.

Although the present invention has been shown and described with respect to specific embodiments, it is to be understood that the present invention may be variously modified and changed without departing from the spirit or the scope of the present invention provided by the following Utility Model Registration Claims. It is to be clarified that a person of ordinary skill in the industry can understand it very easily.

As described above, according to the present invention, the substrate is wheeled together with the outer ring of the guide roller, thereby reducing the friction generated between the substrate and the guide roller, thereby making it possible to smoothly transport even when used for a long time.

In addition, since the substrate is transferred in a state of inclined angle, the cleaning liquid moves along the inclined surface of the substrate when spraying the cleaning liquid, and the substrate is quickly cleaned without impurities such as mist being reattached along the inclined surface of the substrate. The effect is to increase.

Claims (4)

A drive gear is installed at one end thereof so that the shaft is rotated, and guide rollers are installed at both sides so as to move the substrate on the rotating shaft line, and a semiconductor manufacturing apparatus is installed with a bearing roller interposed between the guide rollers. In the substrate feed roller device of, Both ends of the shaft 400 are coupled inwardly and rotated from the inside thereof, and an outer circumference of the support bearing 110 is formed to be curved at a predetermined curvature, and the shaft 400 rotates after the support bearing 110 is mounted inside. A conveyance support part 100 formed as a support 120 having an inner side of the guide hole 121 corresponding to the outer circumference of the support bearing 110 so as to form a predetermined slope; Guard support portion 200 is provided with a guard bearing 220 that rotates around the guard shaft 210 coupled to the inside to support the side of the substrate 500 moving the upper portion of the guide roller 300 of the shaft 400 LCD substrate transfer roller device consisting of a configuration comprising a. According to claim 1, wherein the support bearing 110, the diameter of the center portion is formed to be enlarged so that the outer side is curved, the inner guide groove so that the first and second ceramic balls 131, 132 is seated from the upper side Hollow rotating part 140 is formed, respectively 141, The first and second ceramic balls 131 and 132 are seated in the lower portion, and the outer guide grooves 151 are formed on the outer circumference so as to be connected to the inside of the rotating part 140 by ball contact, respectively, and the shaft has an inner diameter. Fixed part 150 is coupled to 400, The first and second ceramic balls 131 seated between the rotating part 140 and the fixing part 150. An LCD substrate transfer roller device, characterized in that the retainer 160 is formed on one side of the holding hole into which the first and second ceramic balls 131 and 132 are inserted so as to support 132 on both sides thereof. The method of claim 1, wherein the guard bearing 220 is coupled to the inner side of the hollow rotating portion 140 'and the rotating portion 140' is formed with an inner guide groove 141 'inward, the inner guide groove A retainer 160 'having a retaining hole 161' into which the ceramic ball 130 'is inserted to be coupled through the ceramic ball 130' in the outer guide groove 151 'corresponding to 141'. An LCD substrate transfer roller device, characterized in that formed as a fixed portion 150 'coupled to one side. The method of claim 3, wherein the rotating part 140 ′ is formed such that one selected from one end or both ends of the outer circumference contacting the side surface of the rotating part 140 ′ extends in the longitudinal direction according to the thickness of the substrate 500 being transferred. An LCD substrate transfer roller device.