KR20030081471A - 압전 구동기를 갖춘 레이저 파장 제어 유닛 - Google Patents
압전 구동기를 갖춘 레이저 파장 제어 유닛 Download PDFInfo
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- KR20030081471A KR20030081471A KR10-2003-7011272A KR20037011272A KR20030081471A KR 20030081471 A KR20030081471 A KR 20030081471A KR 20037011272 A KR20037011272 A KR 20037011272A KR 20030081471 A KR20030081471 A KR 20030081471A
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Abstract
Description
센서 유형 | 유도성(에디 전류) | 용량성 | 광 섬유 | 레이저 |
제조자 | Kaman Instrumentation | Capacitec | Philtec | Keyence |
웹 사이트 | Kaman Instrumentation. com | Capacitec.com | Philtec.com | Keyence.com |
부품# | SMU 9000/15N | HPB 계열(HPB-40) | D63 | LC-2420 |
스태틱 레졸루션 | 2 나노미터 | 2.5 나노미터 | 10 나노미터 | 10 나노미터 |
범위 | 250 마이크로미터 | 380 마이크로미터 | 20 마이크로미터 | 200 마이크로미터 |
이점 | 소형 패키지,제조자는 레졸루션과 범위를 교체할 수 있다. | 소형 패키지,넓은 선형 범위 | 초소형 센서 헤드, 양호한 고주파 성능 | 양호한 고주파 성능, 양호한 선형성 |
단점 | 금속 타겟을 필요로 함 | 타겟은 용량적으로 접지되고, 파티클에 감응함. | 저 레졸루션 및 범위 | 저 레졸루션, 둔중한 전자장비 |
첨부 파일 | Kaman_SMU9000.pdf | Capacitec_Button.mht | Philtec_D63.pdf | Keyence_Ic.pdf |
Claims (24)
- 전기 방전 레이저에 의해 산출된 레이저 빔의 중심 파장을 제어하기위한 정밀한 파장 제어부를 갖춘 전기 방전 레이저에 있어서,A) 레이저 챔버;B) 상기 챔버내에 포함되고, 빔 방향에서 롱 디멘젼을 정의하는 방전 영역을 형성하고, 일정 거리만큼 분리된 신장된 형태의 아노드와 신장된 형태의 캐소드를 포함하는, 신장된 형태의 전극 구조체;C) 상기 챔버내에 함유된 레이저 가스;D) 상기 챔버내에서 그리고 상기 방전 영역을 통하여 상기 레이저를 순환시키기 위한 팬; 및E) 1) 상기 중심 파장을 측정하기 위한 파장계,2) a) 확대된 빔을 산출하기 위해 상기 챔버내에 산출된 레이저 빔의 일부분을 확대시키도록 구성된 빔 익스팬더,b) 격자, 및c) i) 압전 구동기, 및 ii) 상기 압전 구동기를 제어하도록 구성된 적어도 하나의 피드백 제어 시스템을 포함하고, 상기 격자상에 상기 확대된 빔의 조명각을 조정하기 위한 조명각 제어 유닛을 포함하는 파장 선택 유닛,을 포함하는 정밀 파장 제어 시스템;을 포함하는 것을 특징으로 하는 전기 방전 레이저.
- 제1 항에 있어서, 상기 조명각 제어 유닛은 튜닝 미러를 포함하고 상기 압전 구동기는 상기 미러의 위치를 제어하도록 구성된 것을 특징으로 하는 전기 방전 레이저.
- 제1 항에 있어서, 상기 적어도 하나의 피드백 제어 시스템은 상기 파장계에 의해 제공된 측정치를 기초로 하여 상기 압전 구동기를 제어하도록 구성된 전자 장비를 포함하는 것을 특징으로 하는 전기 방전 레이저.
- 제1 항에 있어서, 상기 조명각 제어 유닛에 작용하는 힘을 모니터링하기 위한 로드 셀을 더 포함하는 것을 특징으로 하는 전기 방전 레이저.
- 제4 항에 있어서, 상기 조명각 제어 유닛은 미러인 것을 특징으로 하는 전기 방전 레이저.
- 제5 항에 있어서, 상기 적어도 하나의 피드백 제어 시스템은 상기 로드 셀에 의한 측정치를 기초로 하여 상기 압전 구동기를 제어하도록 구성된 전자 장비를 포함하는 것을 특징으로 하는 전기 방전 레이저.
- 제4 항에 있어서, 상기 로드 셀로부터의 측정치를 기초로 하여 상기 조명각제어 유닛의 움직임을 감쇠시키기 위한 액티브 댐핑 유닛을 더 포함하는 것을 특징으로 하는 전기 방전 레이저.
- 제1 항에 있어서, 상기 레이저의 버스트 모드 동작과 연관된 트랜지언트에 파장을 최소화 또는 상쇄시키기 위한 반전 함수를 계산하기 위한 알고리즘이 구성되어 있는 프로세서를 더 포함하는 것을 특징으로 하는 전기 방전 레이저.
- 제2 항에 있어서, 상기 조명각 제어 유닛은 스테퍼 모터를 포함하는 것을 특징으로 하는 전기 방전 레이저.
- 제8 항에 있어서, 상기 조명각 제어 유닛은 초기 발생 처프의 형태를 인식하기 위한 인식 알고리즘으로 프로그래밍된 프로세서를 포함하는 것을 특징으로 하는 전기 방전 레이저.
- 제1 항에 있어서, 상기 조명각 제어 유닛은 2 밀리초 미만의 시간 주기로 미러 조정을 행하도록 구성된 것을 특징으로 하는 전기 방전 레이저.
- 제1 항에 있어서, 상기 조명각 제어 유닛은 500 마이크로초 미만의 시간 주기로 미러 조정을 행하도록 구성된 것을 특징으로 하는 전기 방전 레이저.
- 제12 항에 있어서, 상기 조명각 제어 유닛은 외부 스핀들을 갖는 스테퍼 모터를 더 포함하는 것을 특징으로 하는 전기 방전 레이저.
- 제13 항에 있어서, 상기 조명각 제어 유닛은 상기 외부 스핀들의 선형 이동이 확대되지 않도록 하기 위해 피벗축 둘레로 피벗된 레버 암을 더 포함하는 것을 특징으로 하는 전기 방전 레이저.
- 제1 항에 있어서, 상기 액티브 처프 완화 수단은 거친 파장 제어를 위한 스테퍼 모터와 미세한 파장 제어를 위한 압전 구동기를 포함하는 것을 특징으로 하는 전기 방전 레이저.
- 제8 항에 있어서, 상기 컴퓨터 프로그램은 상기 프로그램이 소망 범위내의 파장을 갖는 레이저 빔을 산출하기 위해 상기 튜닝 미러에 대한 필요한 조정을 인식할 수 있게 하는 인식 알고리즘을 포함하는 것을 특징으로 하는 전기 방전 레이저.
- 전기 방전 레이저에 의해 산출된 레이저 빔의 중심 파장을 제어하기 위한 정밀한 파장 제어부를 갖춘 전기 방전 레이저에 있어서,A) 레이저 챔버;B) 상기 챔버내에 포함되고, 빔 방향에서 롱 디멘젼을 정의하는 방전 영역을형성하고 일정 거리만큼 분리된 신장된 형태의 아노드와 신장된 형태의 캐소드를 포함하는, 신장된 형태의 전극 구조체;C) 상기 챔버내에 함유된 레이저 가스;D) 상기 챔버내에서 그리고 상기 방전 영역을 통하여 상기 레이저를 순환시키기 위한 팬;E) 상기 중심라인 파장을 측정하기 위한 파장계;F) 적어도 하나의 압전 구동기를 포함하는 파장 튜닝 매커니즘; 및G) 파장 처프를 능동적으로 제어하기 위해 상기 파장계로부터의 측정 정보를 사용하여 상기 튜닝 매커니즘을 제어하기 위한 피드백 제어 시스템을 포함하는 것을 특징으로 하는 전기 방전 레이저.
- 제17 항에 있어서, 상기 튜닝 매커니즘은 버스트의 초기 부분에서 발생하는 처프를 완화시키기 위해 펄스의 버스트에 앞서 튜닝 미러의 위치를 조정하기 위한 조정 매커니즘과 튜닝 미러를 포함하는 것을 특징으로 하는 전기 방전 레이저.
- 제18 항에 있어서, 상기 조정 매커니즘은 초기에 나타나는 처프의 형태를 인식하기 위해 인식 알고리즘으로 프로그래밍된 프로세서를 포함하는 것을 특징으로 하는 전기 방전 레이저.
- 제17 항에 있어서, 상기 튜닝 매커니즘은 거친 튜닝을 위한 스테퍼 모터와미세 튜닝을 위한 압전 구동기를 포함하는 것을 특징으로 하는 전기 방전 레이저.
- 전기 방전 레이저에 의해 산출된 레이저 빔의 중심 파장을 제어하기 위한 정밀한 파장 제어부를 갖춘 전기 방전 레이저에 있어서,A) 레이저 챔버;B) 상기 챔버내에 포함되고, 빔 방향에서 롱 디멘젼을 정의하는 방전 영역을 형성하고 일정 거리만큼 분리된 신장된 형태의 아노드와 신장된 형태의 캐소드를 포함하는, 신장된 형태의 전극 구조체;C) 상기 챔버내에 함유된 레이저 가스;D) 상기 챔버내에서 그리고 상기 방전 영역을 통하여 상기 레이저를 순환시키기 위한 팬;E) 중심라인 파장을 측정하기 위한 파장계;F) 튜닝 미러 및 이 튜닝 미러를 구동시키기 위한 압전 구동기를 포함하는 파장 튜닝 매커니즘;G) 파장 처프를 능동적으로 제어하기 위해 상기 파장계로부터의 측정 정보를 사용하여 상기 튜닝 매커니즘을 제어하기 위한 피드백 제어 시스템;H) 상기 튜닝 미러의 진동을 측정하도록 구성된 로드 셀; 및I) 상기 로드 셀로부터의 신호에 기초하여 상기 파장 튜닝 매커니즘을 제어하기 위한 피드백 제어 시스템을 포함하는 것을 특징으로 하는 전기 방전 레이저.
- 파장 선택 격자를 갖는 라인 내로우잉된 레이저를 위한 진동 제어 시스템에 있어서,A) 상기 격자 유닛상에서의 조명각을 제어하기 위한 조명각 제어 유닛;B) 상기 제어 유닛을 구동시키기 위한 압전 구동기 유닛; 및C) 상기 제어 유닛상에서의 힘을 모니터링하고 상기 압전 구동기 유닛에 피드백 신호를 제공하기 위한 압전 로드 셀 모니터링 유닛을 포함하는 것을 특징으로 하는 진동 제어 시스템.
- 제22 항에 있어서, 상기 조명각 제어 유닛은 피벗가능한 미러를 포함하는 것을 특징으로 하는 진동 제어 시스템.
- 제22 항에 있어서, 상기 조명각 제어 유닛은 피벗가능한 격자를 포함하는 것을 특징으로 하는 진동 제어 시스템.
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US10/027,210 | 2001-12-21 | ||
US10/027,210 US6650666B2 (en) | 2000-02-09 | 2001-12-21 | Laser wavelength control unit with piezoelectric driver |
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EP (1) | EP1382095A4 (ko) |
JP (1) | JP4571777B2 (ko) |
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JP2002525856A (ja) | 1998-09-11 | 2002-08-13 | ニュー・フォーカス・インコーポレイテッド | 波長可変レーザ |
AU2001241421A1 (en) * | 2000-02-09 | 2001-08-20 | Cymer, Inc. | Bandwidth control technique for a laser |
-
2001
- 2001-12-21 US US10/027,210 patent/US6650666B2/en not_active Expired - Lifetime
-
2002
- 2002-02-15 EP EP02726577A patent/EP1382095A4/en not_active Withdrawn
- 2002-02-15 KR KR1020037011272A patent/KR100878772B1/ko active IP Right Grant
- 2002-02-15 JP JP2002568476A patent/JP4571777B2/ja not_active Expired - Fee Related
- 2002-02-15 WO PCT/US2002/004623 patent/WO2002069461A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
EP1382095A4 (en) | 2006-02-08 |
US20020154669A1 (en) | 2002-10-24 |
KR100878772B1 (ko) | 2009-01-14 |
JP2004526313A (ja) | 2004-08-26 |
EP1382095A1 (en) | 2004-01-21 |
JP4571777B2 (ja) | 2010-10-27 |
US6650666B2 (en) | 2003-11-18 |
WO2002069461A1 (en) | 2002-09-06 |
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