KR20030075541A - Probe of inspection apparatus for testing flat pannel display - Google Patents
Probe of inspection apparatus for testing flat pannel display Download PDFInfo
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- KR20030075541A KR20030075541A KR1020020014812A KR20020014812A KR20030075541A KR 20030075541 A KR20030075541 A KR 20030075541A KR 1020020014812 A KR1020020014812 A KR 1020020014812A KR 20020014812 A KR20020014812 A KR 20020014812A KR 20030075541 A KR20030075541 A KR 20030075541A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/69—Arrangements or methods for testing or calibrating a device
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- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Measuring Leads Or Probes (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
Description
본 발명은 평판표시소자 검사장치의 프로브에 관한 것으로써, 보다 상세하게는 LCD(Liquid Crystal Display) 등의 평판표시소자의 패드 전극에 전기 신호를 인가함으로써 평판표시소자의 정상유무를 테스트하는 평판표시소자 검사장치의 프로브에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe of a flat panel display device inspection apparatus, and more particularly, a flat panel display for testing whether a flat panel display device is normal by applying an electrical signal to a pad electrode of a flat panel display device such as an LCD (Liquid Crystal Display). A probe for an element inspection device.
일반적으로, LCD 등의 평판표시소자는 제조를 완료한 후, 평판표시소자의 ITO(Indium Tin Oxide) 및 IZO(In2O3Zn5) 등의 재질로 이루어지는 패드 전극에 프로브(Probe)의 전기적 접촉체를 접촉하여 전기 신호를 인가함으로써 평판표시소자의 정상 유무를 확인하여 불량 평판표시소자를 조기에 제거하는 테스트(Test) 공정을 진행하고 있다.In general, after a flat panel display device such as an LCD is manufactured, the probe electrode is electrically connected to a pad electrode made of a material such as indium tin oxide (ITO) and IZO (In 2 O 3 Zn 5 ) of the flat panel display device. A test process is performed to check whether the flat panel display device is normal by contacting the contactor and to remove the defective flat panel display device early.
이와 같은 테스트 공정은 평판표시소자 검사장치의 프로브를 이용하여 진행되며 종래의 평판표시소자 검사장치의 프로브는, 도1 및 도2에 도시된 바와 같이 프로브 홀더(10) 하부에 평판표시소자의 패드 전극과 접촉하는 복수의 전기적 접촉체(16)가 소정의 이격거리를 가지며 일렬로 배치 설치된다.Such a test process is performed by using a probe of the flat panel display device inspecting apparatus. The probe of the conventional flat panel display device inspecting apparatus has a pad of the flat panel display device under the probe holder 10 as shown in FIGS. 1 and 2. A plurality of electrical contacts 16 in contact with the electrodes are arranged in a line with a predetermined distance.
여기서, 상기 전기적 접촉체(16)는 전기 절연막(12) 상에 구비되는 금속배선(14) 상에 설치되고, 상기 금속배선(14) 상에 전기적 접촉체(16)가 일렬로배치 설치된 것이다.Here, the electrical contact 16 is provided on the metal wiring 14 provided on the electrical insulating film 12, the electrical contact 16 is arranged in a row on the metal wiring (14).
특히, 상기 전기적 접촉체(16)는 끝단부가 뾰족한 피라밋 형상으로 이루어진다.In particular, the electrical contact 16 has a pyramid shape with a sharp tip.
따라서, 상기 프로브 홀더(10) 하부의 전기적 접촉체(16)는 도3에 도시된 바와 같이 평판표시소자의 일렬로 나열된 복수의 패드 단자(18)와 일렬로 접촉하게 된다.Accordingly, the electrical contact 16 under the probe holder 10 is in contact with a plurality of pad terminals 18 arranged in a line of the flat panel display element as shown in FIG.
이때, 상기 패드 단자(18)와 전기적 접촉체(16)의 접촉 과정의 전기적 접촉체(16)는 소정의 OD(Over Drive)에 의해서 패드 단자(18) 내부로 삽입되어 접촉하게 된다.At this time, the electrical contact 16 of the contact process between the pad terminal 18 and the electrical contact 16 is inserted into the pad terminal 18 by a predetermined OD (Over Drive) to contact.
그리고, 상기 전기적 접촉체(16)와 패드 단자(18)가 접촉한 상태에서 전기적 접촉체(16)는 패드 단자(18)에 전기신호를 인가함으로써 일련의 제조공정에 의해서 제조된 평판표시소자의 정상 유무를 테스트하게 된다.In the state in which the electrical contact 16 and the pad terminal 18 are in contact with each other, the electrical contact 16 applies an electrical signal to the pad terminal 18 to produce a flat panel display device manufactured by a series of manufacturing processes. Test for normality.
그런데, 상기 전기적 접촉체는 프로브 홀더에 일렬로 배치 설치됨으로써 짧은 피치간격을 가지는 고집적화된 평판표시소자에 대응이 용이하지 않은 문제점이 있었다.However, since the electrical contacts are arranged in a line in the probe holder, there is a problem that it is not easy to cope with the highly integrated flat panel display device having a short pitch interval.
즉, 상기 평판표시소자 검사장치의 전기적 접촉체는 일렬로 배열되어 전기적 접촉체의 간격을 극도로 줄이게 되면, 이웃하는 전기적 접촉체가 서로 접촉하게 됨으로써 이웃하는 전기적 접촉체 사이에 최소한의 간격의 유지가 필요하여 최근에 고집적화된 평판표시소자의 짧은 피치간격에 대응이 용이하지 않은 문제점이 있었다.That is, when the electrical contacts of the flat panel display element inspection apparatus are arranged in a line to reduce the gap of the electrical contacts extremely, the neighboring electrical contacts are brought into contact with each other, thereby maintaining the minimum distance between the adjacent electrical contacts. Recently, there has been a problem that it is not easy to cope with the short pitch interval of the highly integrated flat panel display device.
또한, 상기 전기적 접촉체의 단부는 뾰족함으로써 전기적 접촉체와 패드 단자가 접촉하는 과정에 일정 OD로 패드 단자에 삽입된 후, 패드 단자 물질을 상부로 들떠 올려 파티클(Particle)을 발생시키는 문제점이 있었다.In addition, since the end of the electrical contact is pointed, the electrical contact and the pad terminal is inserted into the pad terminal at a constant OD in the process of contacting, and then the pad terminal material is lifted upward to generate particles. .
특히, 상기 전기적 접촉체의 단부가 뾰족함으로써 패드 단자와의 접촉도가 떨어져 전기 전도성이 떨어지는 문제점이 있었다.In particular, since the end of the electrical contact is sharp, there is a problem that the electrical conductivity is inferior in contact with the pad terminal.
본 발명의 목적은, 전기적 접촉체의 배열상태를 변화시켜 고집적화된 평판표시소자의 짧은 피치간격에 용이하게 대응할 수 있는 평판표시소자 검사장치의 프로브를 제공하는 데 있다.SUMMARY OF THE INVENTION An object of the present invention is to provide a probe of a flat panel display device inspection apparatus which can easily cope with a short pitch interval of a highly integrated flat panel display device by changing the arrangement of electrical contacts.
본 발명의 다른 목적은, 전기적 접촉체의 단부가 뾰족함으로써 전기적 접촉체와 패드 단자가 접촉하는 과정에 파티클을 발생시키는 것을 방지할 수 있는 평판표시소자 검사장치의 프로브를 제공하는 데 있다.Another object of the present invention is to provide a probe of a flat panel display device inspection apparatus capable of preventing particles from being generated during the contact between the electrical contact body and the pad terminal due to the sharp end of the electrical contact body.
본 발명의 또 다른 목적은, 전기적 접촉체의 단부가 뾰족함으로써 패드 단자와의 전기적 접촉도가 떨어지는 것을 방지할 수 있는 평판표시소자 검사장치의 플로브를 제공하는 데 있다.Still another object of the present invention is to provide a flop of a flat panel display device inspection apparatus capable of preventing the electrical contact with the pad terminal from falling off due to the sharp end of the electrical contact body.
도1은 종래의 평판표시소자 검사장치의 프로브를 설명하기 위한 사시도이다.1 is a perspective view for explaining a probe of a conventional flat panel display device inspection apparatus.
도2는 종래의 평판표시소자 검사장치의 프로브의 개략적 저면도이다.2 is a schematic bottom view of a probe of a conventional flat panel display device inspection apparatus.
도3은 종래의 평판표시소자 검사장치의 프로브의 전기적 접촉체의 작용을 설명하기 위한 도면이다.3 is a view for explaining the action of the electrical contact of the probe of the conventional flat panel display device inspection apparatus.
도4은 본 발명의 일 실시예에 따른 평판표시소자 검사장치의 프로브를 설명하기 위한 사시도이다.4 is a perspective view for explaining a probe of the flat panel display device inspection apparatus according to an embodiment of the present invention.
도5는 본 발명의 일 실시예에 따른 평판표시소자 검사장치의 프로브의 저면도이다.5 is a bottom view of the probe of the flat panel display device inspection apparatus according to an embodiment of the present invention.
도6은 본 발명의 일 실시예에 따른 평판표시소자 검사장치의 전기적 접촉체의 작용을 설명하기 위한 도면이다.6 is a view for explaining the operation of the electrical contact of the flat panel display device inspection apparatus according to an embodiment of the present invention.
도7은 본 발명의 일 실시예에 따른 평판표시소자 검사장치의 전기적 접촉체를 나타내는 사시도이다.7 is a perspective view showing an electrical contact of the flat panel display device inspection apparatus according to an embodiment of the present invention.
<도면의 주요 부분에 대한 부호의 설명><Explanation of symbols for the main parts of the drawings>
10, 20 : 프로브 홀더 12, 22 : 전기 절연막10, 20: probe holder 12, 22: electrical insulating film
14, 24 : 금속배선 16, 26, 30 기적 접촉체14, 24: metal wiring 16, 26, 30 miracle contact
32 : 절단면32: cutting surface
상기 목적을 달성하기 위한 본 발명에 따른 평판표시소자 검사장치의 프로브는, 일렬로 나열된 평판표시소자의 패드 단자와 접촉하는 복수의 전기적 접촉체를 구비하는 평판표시소자 검사장치의 프로브에 있어서, 상기 전기적 접촉체는 일정의 단차를 가지고 소정간격 이격되어 설치된 것을 특징으로 한다.Probe of the flat panel display device inspection apparatus according to the present invention for achieving the above object is a probe of the flat panel display device inspection apparatus having a plurality of electrical contacts in contact with the pad terminals of the flat panel display device arranged in a line, The electrical contact is characterized in that it is installed at predetermined intervals with a predetermined step.
여기서, 상기 전기적 접촉체의 단부는 라운딩되거나 끝단부가 절단되어 절단면이 형성되도록 할 수 있다.Here, the end of the electrical contact may be rounded or the end may be cut to form a cut surface.
이하, 첨부한 도면을 참고로 하여 본 발명의 구체적인 실시예를 상세히 설명한다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.
도4은 본 발명의 일 실시예에 따른 평판표시소자 검사장치의 프로브를 설명하기 위한 사시도이고, 도5는 본 발명의 일 실시예에 따른 평판표시소자 검사장치의 프로브의 저면도이다.4 is a perspective view illustrating a probe of a flat panel display device inspecting apparatus according to an embodiment of the present invention, and FIG. 5 is a bottom view of the probe of the flat panel display device inspecting apparatus according to an embodiment of the present invention.
본 발명에 따른 평판표시소자 검사장치의 프로브는, 도4 및 도5에 도시된 바와 같이 프로브 홀더(20) 하부에 평판표시소자의 패드 전극과 접촉하는 복수의 전기적 접촉체(26)가 일정의 단차를 가지고 소정간격 이격되어 배치 설치됨으로써 고집적화된 평판표시소자의 짧은 피치간격에 대응할 수 있도록 되어 있는 것에 특징이 있다.In the probe of the flat panel display device inspection apparatus according to the present invention, as shown in FIGS. 4 and 5, a plurality of electrical contacts 26 contacting the pad electrodes of the flat panel display device are provided at a lower portion of the probe holder 20. It is characterized in that it is possible to cope with the short pitch interval of the highly integrated flat panel display element by being arranged at a predetermined interval with a step difference.
여기서, 상기 전기적 접촉체(26)는 전기 절연막(22) 상에 구비되는 금속배선(24) 상에 설치된다.Here, the electrical contact 26 is provided on the metal wiring 24 provided on the electrical insulating film 22.
그리고, 상기 금속배선(24) 상의 전기적 접촉체(26)는 연속하여 이웃하는 복수의 전기적 접촉체(26) 본 실시에에서는 3개의 전기적 접촉체(26)가 일정 단차를 가지고 소정간격 이격되어 배치 설치되고, 다시 3개의 전기적 접촉체(26)가 일정 단차를 가지고 소정간격 이격되어 배치 설치되는 방식으로 배치 설치되어 있다In addition, the electrical contacts 26 on the metal wiring 24 are arranged in such a manner that a plurality of electrical contacts 26 adjacent to each other are continuously spaced apart at predetermined intervals with a predetermined step. In addition, the three electrical contacts 26 are arranged in such a manner that the three electrical contacts 26 are arranged to be spaced apart by a predetermined interval with a predetermined step.
또한, 본 실시예에서는 3개의 전기적 접촉체(26)를 일정 단차를 가지고 소정간격 이격 배치 설치하였으나, 이에 한정하지 않고 2개 이상의 전기적 접촉체(26)를 일정 단차를 가지고 소정간격 이격 배치설치할 수 있다.In addition, in the present embodiment, the three electrical contacts 26 are disposed at predetermined intervals with a predetermined step. However, the present disclosure is not limited thereto, and the two or more electrical contacts 26 may be disposed at predetermined intervals with a predetermined step. have.
.특히, 상기 전기적 접촉체(26)는 패드 단자(28)와의 접촉 과정에 파티클의 발생을 억제하고 패드 단자(28)와의 접촉도를 높여 전기 전도성을 향상시킬 수 있도록 단부가 라운딩(Rounding)된 피라밋 형상으로 이루어진다.In particular, the electrical contact member 26 has rounded ends to suppress the generation of particles during contact with the pad terminals 28 and improve the electrical conductivity by increasing the contact with the pad terminals 28. It is made of pyramid shape.
그리고, 도7에 도시된 바와 같이 전기적 접촉체(30)는 패드 단자(28)와의 접촉 과정에 파티클의 발생을 억제하고 패드 단자(28)와의 접촉도를 높여 전기 전도성을 향상시킬 수 있도록 단부가 절단되어 절단면(32)이 구비된 형상으로 이루어질 수도 있다.As shown in FIG. 7, the electrical contact body 30 has an end portion to suppress the generation of particles during the contact with the pad terminal 28 and to improve the electrical conductivity by increasing the contact with the pad terminal 28. It may be cut to form a shape provided with a cutting surface (32).
따라서, 상기 프로브 홀더(20) 하부의 전기적 접촉체(26)는 도6에 도시된 바와 같이 평판표시소자의 복수의 패드 단자(28)와 일정 단차를 가지며 소정간격 이격되어 접촉하게 된다.Therefore, the electrical contact 26 under the probe holder 20 is in contact with the pad terminals 28 of the flat panel display device at predetermined intervals and spaced apart at predetermined intervals, as shown in FIG.
이때, 상기 패드 단자(28)와 전기적 접촉체(26)의 접촉 과정의 전기적 접촉체(26)는 소정의 OD(Over Drive)에 의해서 패드 단자(28) 내부로 삽입되어 접촉하게 된다.In this case, the electrical contact 26 in the contact process between the pad terminal 28 and the electrical contact 26 is inserted into and contacted with the pad terminal 28 by a predetermined OD (Over Drive).
그리고, 본 발명에 따라 전기적 접촉체(26)가 일정 단차를 가지며 소정간격 이격되어 배치 설치됨으로써 평판표시소자가 고집적화되어 피치간격이 짧아져 패드 단자(28)와 패드 단자(28) 사이의 간격이 극도로 작아져도 이웃하는 주변에 다른 전기적 접촉체(26)가 구비되지 않아 전기적 접촉체(26)와 전기적 접촉체(26) 사이의 이격거리를 축소시킴으로써 고집적화된 평판표시소자의 짧은 피치간격에 적극 대응할 수 있는 것이다.In addition, according to the present invention, the electrical contact 26 has a predetermined step and is disposed to be spaced apart by a predetermined interval so that the flat panel display device is highly integrated to shorten the pitch interval so that the gap between the pad terminal 28 and the pad terminal 28 is increased. Even if it is extremely small, other electrical contacts 26 are not provided in the neighboring periphery, thereby reducing the separation distance between the electrical contacts 26 and the electrical contacts 26 so as to be active in the short pitch interval of the highly integrated flat panel display element. It can respond.
그리고, 상기 전기적 접촉체(26)와 패드 단자(28)가 접촉한 상태에서 전기적 접촉체(26)는 패드 단자(28)에 전기신호를 인가함으로써 일련의 제조공정에 의해서 제조된 평판표시소자의 정상 유무를 테스트하게 된다.In the state where the electrical contact 26 and the pad terminal 28 are in contact with each other, the electrical contact 26 applies an electrical signal to the pad terminal 28 to provide a flat panel display device manufactured by a series of manufacturing processes. Test for normality.
특히, 상기 테스트 과정의 전기적 접촉체(26)의 단부는 라운딩져 있음으로써 전기적 접촉체(26)와 패드 단자(28)가 접촉하는 과정에 일정 OD로 패드 단자(28)에 삽입된 후, 패드 단자(28) 물질을 상부로 들떠올려 파티클(Particle)을 발생시킴이 방지된다.In particular, the end of the electrical contact 26 of the test process is rounded, so that the contact between the electrical contact 26 and the pad terminal 28 is inserted into the pad terminal 28 at a constant OD, and then the pad Terminal 28 material is prevented from lifting upwards to generate particles.
그리고, 상기 전기적 접촉체(26)의 단부는 라운딩져 있음으로써 패드 단자(28)와의 접촉도를 높여 전기 전도성을 향상시킬 수 있다.In addition, since the end of the electrical contact 26 is rounded, the electrical contact with the pad terminal 28 may be increased.
또한, 상기 테스트 과정의 전기적 접촉체(30)는 단부가 절단되어 절단면(32)이 형성되어 있으므로 전기적 접촉체(30)와 패드 단자(28)가 접촉하는 과정에 일정 OD로 패드 단자(28)에 삽입된 후, 패드 단자(28) 물질을 상부로 들떠올려 파티클(Particle)을 발생시킴을 방지하고, 패드 단자(28)와의 접촉도를 높여 전기 전도성을 향상시킬 수 있다.In addition, since the electrical contact 30 of the test process is cut at an end portion thereof, the cutting surface 32 is formed, so that the pad terminal 28 is contacted with the electrical contact 30 and the pad terminal 28 at a constant OD. After being inserted into the pad terminal 28, the material of the pad terminal 28 may be lifted upward to prevent generation of particles, and the electrical contact with the pad terminal 28 may be increased.
본 발명에 의하면, 전기적 접촉체를 일정 단차를 가지고 소정간격 이격되어 배치 설치됨으로써 고집적화된 평판표시소자의 짧은 피치간격에 용이하게 대응할 수 있는 효과가 있다.According to the present invention, the electrical contact body is disposed to be spaced at a predetermined interval with a predetermined step so that it is easy to cope with a short pitch interval of the highly integrated flat panel display device.
그리고, 전기적 접촉체의 단부를 라운딩하거나 절단면을 구비시킴으로써 전기적 접촉체와 패드 단자가 접촉하는 과정에 파티클이 발생하는 것을 방지하고,접촉도를 높여 전기 전도성을 향상시킬 수 있는 효과가 있다.And, by rounding the end of the electrical contact or having a cutting surface to prevent particles from occurring in the process of contact between the electrical contact and the pad terminal, there is an effect that can improve the electrical conductivity by increasing the contact.
이상에서는 본 발명은 기재된 구체예에 대해서만 상세히 설명되었지만 본 발명의 기술 사상 범위 내에서 다양한 변형 및 수정이 가능함은 당업자에게 있어서 명백한 것이며, 이러한 변형 및 수정이 첨부된 특허청구범위에 속함은 당연한 것이다.Although the present invention has been described in detail only with respect to the described embodiments, it will be apparent to those skilled in the art that various modifications and variations are possible within the technical spirit of the present invention, and such modifications and modifications belong to the appended claims.
Claims (3)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| KR1020020014812A KR20030075541A (en) | 2002-03-19 | 2002-03-19 | Probe of inspection apparatus for testing flat pannel display |
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| Application Number | Priority Date | Filing Date | Title |
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| KR1020020014812A KR20030075541A (en) | 2002-03-19 | 2002-03-19 | Probe of inspection apparatus for testing flat pannel display |
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| KR20030075541A true KR20030075541A (en) | 2003-09-26 |
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| KR100704186B1 (en) * | 2006-02-21 | 2007-04-06 | 강성일 | An apparatus for testing a flat panel display device |
| KR100750466B1 (en) * | 2006-02-21 | 2007-08-22 | 강성일 | A probing assembly for testing flat panel display device |
| KR100982874B1 (en) * | 2008-09-19 | 2010-09-16 | 엠아이엠 세라믹스(주) | Probe apparatus |
| KR20100118511A (en) * | 2009-04-28 | 2010-11-05 | 가부시끼가이샤 니혼 마이크로닉스 | Method for testing electric products |
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