KR100982874B1 - Probe apparatus - Google Patents

Abstract

The present invention relates to a probe device for inspecting characteristics of an electric device such as a TFT display or a semiconductor chip, comprising: a first accommodating block having at least one first accommodating slot having a first gap; A second accommodation block bonded to the first accommodation block and having at least one second receiving slot having a second spacing therein; A first probe received in the first receiving slot; And a second probe part accommodated in the first accommodating slot and another part accommodating the second accommodating slot, so that the mechanical characteristics may be compensated even if the interval between the accommodating slots is narrowed. It is possible to improve the reliability of the device, to cope with the trend of miniaturization of the gap between the electrode pads, and to adjust the position of the electrode pads to facilitate inspection even at a finer narrow pitch, and to easily adjust the position and maintenance of the probe. It has an effect that can be done.

Housing slot, housing block, probe, tip, gap, width

Description

Probe apparatus

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe device, and more particularly, to a probe device for inspecting whether a display device such as a TFT LCD or a semiconductor chip is turned on or an electrical property of an electric device.

In general, a flat panel display panel such as TFT-LCD is composed of a large number of fine RGB pixels, and in order to check whether the display panel is operated, the operation of each pixel must be checked and the operation of these pixels There is a need for a probe device including a plurality of probes having a tip portion electrically connected to an electrode pad to be inspected for detection with a conventional signal, and a receiving block made of a material capable of maintaining distance and electrically insulating the probes. Do.

Typically, the plurality of probes should be arranged side by side at a predetermined distance as fine as a gap between the micro-electrode pad to be inspected and the adjacent pad, the receiving block is formed with fine receiving slots for accommodating the probes do.

Therefore, the probes are accommodated in the receiving slots formed in the receiving block, each of which is configured to maintain a constant interval by the receiving slot.

On the other hand, in recent years, the gap between electrode pads to be inspected, such as a driving IC of a liquid crystal display panel, has been continuously narrowed and miniaturized.

Therefore, in the conventional accommodating block generally made of an insulating material such as high toughness zirconia ceramic, the spacing between the accommodating slots is narrowed in response to the miniaturization trend.

However, when the space between the receiving slots is narrowed due to the characteristics of the ceramic insulating material, the mechanical properties (impact resistance, shear strength, durability, etc.) of the receiving slots are remarkably degraded, so that the reliability of the probe device is suddenly increased, such that the parts are easily broken and malfunction. There was a problem of deterioration.

An object of the present invention for solving the above problems is to improve the reliability of the device by complementing the mechanical characteristics even if the interval between the receiving slot is narrowed by using the second receiving block having a wide interval between the receiving slot, It is possible to cope with the trend of miniaturization of the gap between the electrode pads, and by aligning the tip of the probe with the first alignment line and the second alignment line to adjust the position of the electrode pad to facilitate inspection even at a finer narrow pitch. It is to provide a probe device that can facilitate the position adjustment and maintenance of the.

The probe device of the present invention for achieving the above object is a probe device for inspecting the characteristics of an electrical element such as a flat panel display device such as TFT LCD or a semiconductor chip, the at least one first receiving slot having a first interval is formed A first receiving block; A second accommodation block bonded to the first accommodation block and having at least one second receiving slot having a second spacing therein; A first probe received in the first receiving slot; And a second probe part accommodated in the first accommodating slot and the other part accommodated in the second accommodating slot.

Further, according to the present invention, the second interval is preferably at least twice the first interval plus the width of the first accommodating slot.

Further, according to the present invention, it is preferable that the width of the second accommodating slot is equal to the width of the first accommodating slot.

Further, according to the present invention, it is preferable that the second accommodating block is joined to the first accommodating block such that the path of the second accommodating slot is connected to each other with the path of a part of the first accommodating slot of the first accommodating block.

In addition, according to the present invention, the material of the first accommodating block and the second accommodating block may include a ceramic.

Meanwhile, according to the present invention, it is possible that the tips of the first probes are aligned with the first alignment line, and the tips of the second probes are aligned with the second alignment line.

As described above, according to the probe device of the present invention, even if the distance between the receiving slots is narrowed, the reliability of the device can be improved by complementing the mechanical characteristics by the ceramic accommodating block having twice the accommodating spacing, It is possible to cope with the trend of gap miniaturization, and by adjusting the position of the electrode pad, the inspection can be easily performed even at a finer narrow pitch, and the position adjustment and maintenance of the probe can be easily performed.

Hereinafter, a probe device according to a preferred embodiment of the present invention will be described in detail with reference to the drawings.

1 is an exploded perspective view showing parts of a first accommodating block and a second accommodating block of a probe device according to an exemplary embodiment of the present invention, and FIG. 2 is an assembled view of the first accommodating block and the second accommodating block of FIG. 1. It is a component assembly diagram which shows a state, and FIG. 3 is a component assembly diagram which shows the state which the 1st probe and the 2nd probe were assembled to the 1st accommodating block and the 2nd accommodating block of FIG.

As illustrated in FIGS. 1 to 3, a probe device according to an exemplary embodiment of the present invention is a device for inspecting characteristics of an electric device such as a TFT LCD or a semiconductor chip, and the first device of FIGS. 1 and 2. It is a structure comprised including the accommodating block B1, the 2nd accommodating block B2, and the 1st probe P1 and the 2nd probe P2 of FIG.

As shown in FIG. 1, in the first accommodation block B1, the first accommodation block B1 is formed with at least one first accommodation slot S1 having a first distance L1. will be.

In addition, as shown in FIG. 2, the second accommodating block B2 is bonded to the first accommodating block B1 and includes at least one second accommodating slot S2 having a second spacing L2. ) Is formed.

Here, the second spacing L2 is larger than at least the first spacing L1 so as to increase the mechanical strength of the first accommodating block B1. Preferably, as shown in FIG. 2, The second spacing L2 has a width W1 of the first accommodating slot S1 at twice the first spacing L1 so that the first probe P1 and the second probe P2 can be arranged in a cross position. Will be added.

Therefore, when the second accommodation block B2 is joined to the first accommodation block B1, the path of the second accommodation slot S2 is partially partially accommodated in the first accommodation block B1. Can be connected to each other and the path of the lot (S1).

Here, the width W2 of the second accommodating slot S2 is preferably equal to the width W2 of the first accommodating slot S1.

Therefore, even if the distance between the first accommodating slots S1 of the first accommodating block B1, that is, the first interval L1 is narrowed to decrease the mechanical strength of the first accommodating slots S1, The first accommodation block B1 has a second accommodation block B1 having a distance between the first accommodation slots S1 of the first accommodation block B1, that is, a second interval L2 that is wider than the first interval L1. By joining with it can reinforce the mechanical strength of the first receiving slot (S1).

Here, the first probe P1 and the second probe P2 are preferably made of a conductive metal material, and the materials of the first accommodating block B1 and the second accommodating block B2 are high toughness zirconia. It is preferable to comprise ceramics, such as a ceramic.

The first accommodating block B1 and the second accommodating block B2 may be adhered to each other by an organic or inorganic adhesive. In addition, the first accommodating block B1 and the second accommodating block B2 may be bonded by welding or other methods, and may be formed by cutting or the like. Anything is possible.

On the other hand, the first probe P1 is accommodated in the first accommodating slot S1 and does not reach the second accommodating block B1.

Meanwhile, a part of the second probe P2 is accommodated in the first accommodating slot S1, and another part of the second probe P2 reaches the second accommodating block B2 to be accommodated in the second accommodating slot P2. will be.

Accordingly, the tips P1a of the first probes P1 are aligned with the first alignment line A1, and the tips P2a of the second probes P2 are aligned with the second alignment line A2. Can be.

Therefore, since the electrode pads of the electric element to be inspected can also be arranged in two rows in accordance with the first alignment line A1 and the second alignment line A2, the density of the pads can be reduced and the electrical connection can be smoothly performed. In this way, the pad can be miniaturized.

The present invention is not limited to the above-described embodiments, and of course, modifications may be made by those skilled in the art without departing from the spirit of the present invention.

That is, it is possible to change the shape of the joining surface between the receiving blocks so as to have a structure that is easy to join and join.

In addition, although not shown, various embodiments are possible, such as further including a third accommodating block having a third accommodating slot having a third gap, and the like.

Therefore, the scope of the claims in the present invention will not be defined within the scope of the detailed description, but will be defined by the following claims and their technical spirit.

1 is an exploded perspective view showing parts of a first accommodating block and a second accommodating block of a probe device according to an exemplary embodiment of the present invention.

FIG. 2 is a component assembly diagram illustrating an assembled state of the first accommodating block and the second accommodating block of FIG. 1.

FIG. 3 is a component assembly diagram illustrating a state in which the first probe and the second probe are assembled to the first accommodating block and the second accommodating block of FIG. 2.

(Description of Major Symbols in the Drawing)

B1: 1st accommodating block L1: 1st space | interval

S1: first accommodating slot B2: second accommodating block

L2: second space S2: second accommodation slot

P1: first probe P2: second probe

W1: width of first accommodating slot W2: width of second accommodating slot

P1a: tip of first probe P2a: tip of second probe

A1: first alignment line A2: second alignment line

Claims (6)

In constructing a probe device for inspecting characteristics of an electric element such as a flat panel display device such as TF LCD or a semiconductor chip, A first receiving block in which at least one first receiving slot having a first spacing is formed; A second accommodation block bonded to the first accommodation block and having at least one second receiving slot having a second spacing therein; A first probe received in the first receiving slot; And A second probe, part of which is accommodated in the first receiving slot and the other part of which is received in the second receiving slot; Probe device comprising a. The method of claim 1, And the second interval is at least twice the first interval plus the width of the first receiving slot or greater. The method of claim 1, And a width of the second accommodating slot is equal to a width of the first accommodating slot. The method of claim 1, And the second accommodating block is joined to the first accommodating block such that a path of the second accommodating slot is connected with a path of a part of the first accommodating slot of the first accommodating block. The method of claim 1, Probe device, characterized in that the material of the first receiving block and the second receiving block comprises a ceramic. The method of claim 1, And the tips of the first probes are aligned with a first alignment line, and the tips of the second probes are aligned with a second alignment line.

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