KR20030067491A - 공진형 평면외 써멀 버클빔 액츄에이터 - Google Patents

공진형 평면외 써멀 버클빔 액츄에이터 Download PDF

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Publication number
KR20030067491A
KR20030067491A KR10-2003-0002970A KR20030002970A KR20030067491A KR 20030067491 A KR20030067491 A KR 20030067491A KR 20030002970 A KR20030002970 A KR 20030002970A KR 20030067491 A KR20030067491 A KR 20030067491A
Authority
KR
South Korea
Prior art keywords
actuator
buckle
thermal
frequency
plane
Prior art date
Application number
KR10-2003-0002970A
Other languages
English (en)
Korean (ko)
Inventor
신클레어마이클제이.
Original Assignee
마이크로소프트 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 마이크로소프트 코포레이션 filed Critical 마이크로소프트 코포레이션
Publication of KR20030067491A publication Critical patent/KR20030067491A/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0024—Transducers for transforming thermal into mechanical energy or vice versa, e.g. thermal or bimorph actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/053—Translation according to an axis perpendicular to the substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/055—Translation in a plane parallel to the substrate, i.e. enabling movement along any direction in the plane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/058—Rotation out of a plane parallel to the substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
KR10-2003-0002970A 2002-01-17 2003-01-16 공진형 평면외 써멀 버클빔 액츄에이터 KR20030067491A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/052,169 2002-01-17
US10/052,169 US6708492B2 (en) 2000-10-31 2002-01-17 Resonant thermal out-of-plane buckle-beam actuator

Publications (1)

Publication Number Publication Date
KR20030067491A true KR20030067491A (ko) 2003-08-14

Family

ID=21975901

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2003-0002970A KR20030067491A (ko) 2002-01-17 2003-01-16 공진형 평면외 써멀 버클빔 액츄에이터

Country Status (6)

Country Link
US (1) US6708492B2 (fr)
EP (1) EP1331201B1 (fr)
JP (1) JP4544823B2 (fr)
KR (1) KR20030067491A (fr)
DE (1) DE60223785T2 (fr)
TW (1) TW550237B (fr)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7064879B1 (en) * 2000-04-07 2006-06-20 Microsoft Corporation Magnetically actuated microelectrochemical systems actuator
US6775048B1 (en) * 2000-10-31 2004-08-10 Microsoft Corporation Microelectrical mechanical structure (MEMS) optical modulator and optical display system
US7464547B2 (en) 2001-05-02 2008-12-16 Silverbrook Research Pty Ltd Thermal actuators
US6804959B2 (en) * 2001-12-31 2004-10-19 Microsoft Corporation Unilateral thermal buckle-beam actuator
US7053519B2 (en) * 2002-03-29 2006-05-30 Microsoft Corporation Electrostatic bimorph actuator
US20040207895A1 (en) * 2002-05-20 2004-10-21 Oettinger Eric G. Calibration method to maximize field of view in an optical wireless link
US6985650B2 (en) * 2003-08-05 2006-01-10 Xerox Corporation Thermal actuator and an optical waveguide switch including the same
US6985651B2 (en) * 2003-08-05 2006-01-10 Xerox Corporation Thermal actuator with offset beam segment neutral axes and an optical waveguide switch including the same
US6983088B2 (en) * 2003-08-05 2006-01-03 Xerox Corporation Thermal actuator and an optical waveguide switch including the same
US7482664B2 (en) * 2006-01-09 2009-01-27 Microsoft Corporation Out-of-plane electrostatic actuator
GB0910476D0 (en) * 2009-06-18 2009-07-29 Rolls Royce Plc Temperature activatable actuator
US11016289B2 (en) 2018-08-31 2021-05-25 Microsoft Technology Licensing, Llc Micromirror actuator assembly

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5061914A (en) * 1989-06-27 1991-10-29 Tini Alloy Company Shape-memory alloy micro-actuator
US5619177A (en) * 1995-01-27 1997-04-08 Mjb Company Shape memory alloy microactuator having an electrostatic force and heating means
US5994816A (en) 1996-12-16 1999-11-30 Mcnc Thermal arched beam microelectromechanical devices and associated fabrication methods
US5867297A (en) * 1997-02-07 1999-02-02 The Regents Of The University Of California Apparatus and method for optical scanning with an oscillatory microelectromechanical system
US6130464A (en) 1997-09-08 2000-10-10 Roxburgh Ltd. Latching microaccelerometer
US6218762B1 (en) * 1999-05-03 2001-04-17 Mcnc Multi-dimensional scalable displacement enabled microelectromechanical actuator structures and arrays
US6246504B1 (en) * 1999-06-30 2001-06-12 The Regents Of The University Of Caifornia Apparatus and method for optical raster-scanning in a micromechanical system
JP2001281564A (ja) * 2000-03-30 2001-10-10 Seiko Epson Corp 微細構造体、その製造方法、光スイッチングデバイス、光スイッチングユニットおよび画像表示装置
US6360539B1 (en) * 2000-04-05 2002-03-26 Jds Uniphase Corporation Microelectromechanical actuators including driven arched beams for mechanical advantage
US6422011B1 (en) * 2000-10-31 2002-07-23 Microsoft Corporation Thermal out-of-plane buckle-beam actuator

Also Published As

Publication number Publication date
US20020088224A1 (en) 2002-07-11
EP1331201B1 (fr) 2007-11-28
DE60223785D1 (de) 2008-01-10
EP1331201A3 (fr) 2005-02-16
JP4544823B2 (ja) 2010-09-15
DE60223785T2 (de) 2008-10-30
EP1331201A2 (fr) 2003-07-30
JP2003260697A (ja) 2003-09-16
TW200302202A (en) 2003-08-01
TW550237B (en) 2003-09-01
US6708492B2 (en) 2004-03-23

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E902 Notification of reason for refusal
E601 Decision to refuse application