KR20030066557A - Continuous surface-treating apparatus for three-dimensional shape of polymer and continuous surface-treating method thereof - Google Patents

Abstract

PURPOSE: Provided are a device and a method for continuously treating a surface of steric polymer, which improve an antistatic property and conductivity of surface of polymer having a steric conformation, by using plasma ion implantation with pulse. CONSTITUTION: The device comprises a high frequency supply part consisting of a high frequency power supply unit(27), a matching box(26) and an antenna(25); a gas inlet unit(71); a gas source(72); and a processing chamber(21) having vacuum pump(12); an inlet chamber(11) and an outlet chamber(33) which can be air-stripped; a transfer unit(51) which is positioned so as to sequentially pass the inlet chamber(71), the processing chamber(21), and the outlet chamber(33); and a transfer system for driving the transfer unit. Further, the device is characterized by further comprising automatic opening/shutting doors which enables the transfer unit to pass the inlet chamber(71), the outlet chamber(33), septa between the inlet chamber(71) and the processing chamber(21), and septa between the processing chamber(21) and the outlet chamber(33).

Description

Continuous surface-treating apparatus for three-dimensional shape of polymer and continuous surface-treating method

The present invention relates to continuous surface treatment of three-dimensional polymers. More specifically, the present invention relates to a continuous surface treatment apparatus and a continuous surface treatment method for improving the antistatic and conductivity of the surface of the polymer having a three-dimensional shape by plasma ion implantation by a negative voltage pulse.

Polymer materials have a wide variety of applications due to their light weight, formability and processability, transparency, and electrical insulation. The polymer material needs to improve only the surface properties without changing the properties of the entire polymer material depending on the purpose of use. Particularly, the hydrophilicity or hydrophobicity of the surface may affect the wettability, printability, and colorability of the polymer material. colorability), biocompatibility, antistatic, adhesiveness, waterproof, moisture-proof, etc. have a decisive effect, various methods for improving this have been used.

Examples of the surface modification method of the polymer material include chemical treatment, corona treatment, plasma treatment, and the like. Representative examples of chemical treatment methods include fluorine-based polymer surface treatment using Na / NH ₃ (see US Pat. No. 2,789,063 and UK Pat. No. 793,731). This method has the advantage of predicting the functional groups formed on the surface by a general chemical reaction, but has the disadvantage that the treatment process is cumbersome and causes the problem of waste liquid, which is a contaminant.

Corona discharge treatment at atmospheric pressure, on the other hand, is a surface treatment of packaging materials such as polyolefin and polyethylene terephthalate films (see J. Pochan, L. Gerenser, and J. Elman, Polymer, Vol. 27, p. 1058, issued in 1986). Although the modified layer is very thin, there is a problem in that after treatment, it is easily deteriorated with time and it is difficult to optimize processing process parameters such as humidity in the air.

Polymer surface treatment method using plasma at low pressure is to improve the hydrophilicity of polypropylene, polyethylene, polystyrene, etc. using oxygen plasma (M. Morra, E. Occhiello, and F. Garbassi, Journal of Applied Polymer Science, 39, page 249, published in 1990).

Plasma is considered a fourth state of matter and means a partially ionized gas. Its constituents are electrons, cations and neutral and heavy atoms. When energy is applied to the gas particles, the gas particles have a positive charge because the outermost electrons move out of the orbit and become free electrons. Thus formed electrons and a large number of ionized gases gather to maintain electrical neutrality as a whole, by the interaction between the constituent particles emit a unique light and the particles are activated to have a high reactivity. The plasma treatment has advantages in that the reaction gas can be selected and the process pressure and the like can be adjusted in comparison with the corona treatment. However, the modified surface layer is thin, so that deterioration with time after the treatment is known as a problem.

In addition, recently, a method of improving hydrophilicity by injecting an ion beam of an inert element (Ar) in a polymer sample in an oxygen atmosphere has been reported (S. Koh, S. Song, W. Choi, and H. Jung, Journal of Materials Research, Vol. 10, pp. 2390, published in 1995), also suffers from a sharp drop in hydrophilicity over time and the use of ion beams, making the device complex and difficult to uniformize large areas. .

On the other hand, as a technique suitable for ion implantation of a three-dimensional object, the plasma source ion implantation method and apparatus described in US Pat. No. 4,764,394 are known.

Korean Patent Laid-Open Publication No. 1987-7562 discloses various processes such as etching the surface of semiconductors, metals or insulators, modifying the surface, cleaning the surface, implanting impurities into the surface, and depositing thin films on the surface. A surface treatment method and a surface treatment apparatus for use therein are disclosed, wherein an ion beam containing at least one type of element is incident on a surface of a solid target to scatter particles forward, and include the at least one type of element. After generating the forward scattering particle beam, injecting the forward scattering particle beam toward the surface of the workpiece to etch or modify the surface of the workpiece or to deposit a film on the surface of the workpiece. It is describing.

Korean Unexamined Patent Publication No. 1997-73239 discloses a surface modification method for improving the hydrophilic or hydrophobic properties of a surface of a polymer material by plasma ion implantation, and a device used therein, wherein the sample table located in a vacuum chamber is disclosed. Positioning a plate-like polymer material thereon; introducing a plasma source gas into a vacuum chamber; generating an ion plasma from the introduced plasma source gas; a pulse voltage of -1 kV to -20 kV, the voltage at pulse-off A negative high voltage pulse having a pulse width of 0 V to -1 kV, a pulse width of 1 Hz to 50 Hz, and a pulse frequency of 10 Hz to 500 Hz is applied to the sample of the polymer material, and ions extracted from the plasma generate high energy. Method for surface modification of a polymer material, characterized in that it consists of the step of being injected to the surface of the sample while retaining There.

However, all of the above methods are intended to increase or decrease the hydrophilicity or hydrophobicity of the polymer material, and are not intended to improve antistatic properties and conductivity.

In the case of antistatic and conductive polymers, conductive carbon and carbon fiber are kneaded in the polymer, but in the case of these antistatic polymers and conductive polymers, particles of carbon and carbon fibers are peeled off after molding. As well as causing a great damage to the product, particles are stuck to electronic products, semiconductors and liquid crystal display (LCD) substrates, causing large damage to the pattern or chip. The use of an antistatic agent for antistatic may cause the antistatic effect of its own to disappear after a certain period of time, thus preventing the antistatic effect.

In the case of an aqueous solution in which a conductive polymer of polypyrrole and polyaniline is dissolved or an aromatic polymer and an atactic polymer solution, the solution is impregnated and dried to be sensitive to scratches, moisture, etc. There is a problem that causes the phenomenon.

In addition, in the case of the surface modification of the polymer using the ion beam, the product should be processed by accelerating the beam, spreading the beam, and spaced apart from the region where the neutron is present. It is used, and it is very difficult to carry out the continuous process of mass production in the yield of the product.

In addition, Korean Laid-Open Patent Publication No. 2002-20010 discloses a surface modification method and apparatus using plasma ion implantation technology to improve the surface properties and electrical conductivity of the three-dimensional solid polymer material and products, (A) placing a stereoscopic polymeric material in a grid in a vacuum chamber; (b) positioning a grid at a distance from the material surface in the vacuum chamber; (c) forming gas plasma ions to form a graphite layer having a lower resistance on the material surface in the vacuum chamber, and (d) injecting gas plasma ions to the surface of the material by applying a negative voltage pulse to the grid. A surface treatment method of a three-dimensional polymer material by plasma ion implantation of a three-dimensional polymer using a grid comprising a. However, there is a problem that the above method is not suitable for mass production.

An object of the present invention is to provide a continuous surface treatment method for improving the antistatic and conductivity of the surface of the polymer having a three-dimensional shape by plasma ion implantation by a negative voltage pulse.

1 is a block diagram showing one specific embodiment of a continuous surface treatment apparatus of a three-dimensional polymer according to the present invention.

FIG. 2 is a perspective view showing one specific embodiment of the conveying apparatus used in the apparatus of FIG.

Figure 3 is a block diagram showing one specific embodiment of the pretreatment apparatus that can be used in connection with the continuous surface treatment apparatus of the three-dimensional polymer in accordance with the present invention.

※ Explanation of code about main part of drawing ※

11: drawing room 12: vacuum pump

13: first door 21: treatment chamber

22: vacuum pump 23: high voltage pulse generator

24 grid 25 antenna

26: matching box 27: high frequency power supply

28: second door 31: withdrawal room

32: vacuum pump 33: third door

34: fourth door 41: three-dimensional polymer

51 transfer device 52 transfer plate

53: feed wing 54: fixture

61: feed roller 71: gas introduction device

72: gas supply source 81: pretreatment chamber

82: blower 83: first intermittent valve

84: air compressor 85: second control valve

86: vacuum pump 87: second pretreatment chamber

88: second blower 89: third check valve

90: fourth intermittent valve

Continuous surface treatment apparatus of a three-dimensional polymer according to the present invention, the high-frequency power supply unit including a high-frequency power supply device and a matching box and an antenna for generating and ion implanting the plasma, and supplying a process gas to be ionized to configure the plasma A surface treatment apparatus comprising a gas introduction device, a gas supply source connected thereto, and a treatment chamber provided with a vacuum pump, the surface treatment apparatus comprising: a degassable drawing chamber and a degassing drawing chamber which are mounted adjacent to each other before and after the treatment chamber; And a conveying apparatus mounted so as to sequentially pass through the drawing chamber, the processing chamber, and the drawing chamber, and conveying means for driving the conveying apparatus, wherein the drawing chamber, the drawing chamber, the partition wall between the drawing chamber and the processing chamber, and Automatic opening and closing which the transfer device can pass through the partition walls between the processing chamber and the drawing chamber It comprises of a door.

The conveying means may be a conveying roller rotatably mounted.

The conveying device is fixed to the conveying plate and the upper end of the conveying plate integrally fixed to the lower end of the conveying blade and the conveying plate which is variable in contact with the conveying roller as the conveying means, suspended or fixed three-dimensional polymer It consists of a fixture that can be made.

The pretreatment chamber further comprises a pretreatment chamber for pre-treatment by spraying dry hot air of a temperature of 70 to 85 ℃ to the three-dimensional polymer to be surface-treated adjacent to the inlet chamber, the pretreatment chamber and a blower for blowing the hot air into the pretreatment chamber Via a first control valve for regulating the flow of hot air supplied to the blower, and a second control valve for regulating the flow of exhaust air for discharging and evacuating air from the pretreatment chamber and the second control valve. A vacuum pump for discharging air from the pretreatment chamber is connected.

An air compressor for generating hot air may be further connected to the first control valve.

The pretreatment chamber may be formed in two parallel, for this purpose, a second pretreatment chamber may be installed in addition to the pretreatment chamber, and a second blower for blowing hot air into the pretreatment chamber and the second pretreatment chamber. A third control valve for controlling the flow of hot air supplied to the blower, a fourth control valve for controlling the flow of exhaust air for evacuating and evacuating air from the second pretreatment chamber, and the fourth control valve A vacuum pump for discharging air from the pretreatment chamber is connected by way of. Here, the vacuum pump may share one vacuum pump via the second control valve and the fourth control valve. In addition, the air compressor for generating hot air can be shared by the third control valve.

In addition, the continuous surface treatment method of the three-dimensional polymer according to the present invention, in the surface modification using the plasma ion implantation technology, (1) the step of introducing a three-dimensional polymer article to be treated into a degassing draw room; (2) a first vacuuming step of depressurizing and degassing the inside of the drawing chamber into which the three-dimensional polymer is introduced; (3) a first transfer step of transferring the three-dimensional polymer in the drawing chamber to the processing chamber; (4) a surface treatment step of surface treatment using plasma to the three-dimensional polymer transferred into the treatment chamber; (5) a second vacuuming step of depressurizing and degassing the inside of the degassable extraction chamber; (6) a second transfer step of transferring the surface-treated three-dimensional polymer into the evacuated drawing chamber; And (7) a withdrawal step of withdrawing the three-dimensional polymer in the withdrawal chamber to the outside.

A pretreatment step of removing moisture from the three-dimensional polymer by applying hot air to the three-dimensional polymer in the drawing room before and after the first vacuuming step of (2).

Surface treatment step (4) is a pulse width of 20 to 30 kHz, a high frequency frequency 500 for plasma generation while continuously supplying a process gas consisting of argon, nitrogen or mixtures thereof in an amount of 15 to 100 sccm To surface treatment under a process condition of 1 to 1500 kHz and high voltage pulse 21 to 25 KV.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

As shown in FIG. 1, the apparatus for continuous surface treatment of a three-dimensional polymer according to the present invention includes a high frequency power supply device 27, a matching box 26, and an antenna 25 to generate plasma and implant ions. And a high frequency supply unit, a gas introduction unit 71 for supplying a process gas to be ionized to construct a plasma, a gas supply source 72 connected thereto, and a processing chamber 21 including a vacuum pump. The degassing drawing chamber 11 and the degassing drawing chamber 31 which are mounted adjacent to each other before and after the processing chamber 21, the drawing chamber 11, the processing chamber 21 and the drawing chamber ( 31, the transfer device 51 and the transfer means for driving the transfer device 51 is mounted so as to pass through sequentially, the entry chamber 11, the withdrawal chamber 31, The partition wall between the drawing chamber 11 and the processing chamber 21 and the Including the chamber 21 and the take-off chamber 31, the door can automatically open and close with a transfer device 51 above the partition wall between can pass characterized by true.

A high frequency power supply unit including a high frequency power supply device 27, a matching box 26 and an antenna 25 to generate plasma and ion implantation therein, and a gas introduction device supplying a process gas to be ionized to construct a plasma. Surface treatment apparatus including the 71 and the gas supply source 72 connected thereto, and the processing chamber 21 provided with a vacuum pump, etc. can be understood to be known to those skilled in the art to be commercially available. The surface treatment apparatus using such a plasma supplies the process gas to be ionized in the vacuumized processing chamber 21 and applies high frequency power in a strong magnetic field to partially ionize the process gas to form a plasma called a fourth material state. The workpiece is placed on a specimen table charged with a high voltage, or the workpiece is placed in the grid 24, and the polarity of the current applied to the specimen table or the grid 24 among the ions constituting the plasma is opposed to the workpiece. The ions to be applied are mainly electrostatically induced by applying a high voltage pulse to the grid 24 to be applied to the surface of the workpiece so that ion implantation is performed on the surface of the workpiece. That is, in the present invention, in order to be able to continuously process the workpiece in such a known surface treatment apparatus, the drawing chamber 11 and the drawing chamber 31 are provided before and after the treatment chamber 21, and the drawing chamber (11) and the withdrawal chamber 31 are each provided with a vacuum pump or the like so as to be degassable, and are mounted in the withdrawal chamber 11, the processing chamber 21 and the withdrawal chamber 31 so as to pass through them sequentially. It comprises a conveying device 51 and a conveying means for driving the conveying device (51).

In addition, the transfer device 51 may be transferred by a transfer means, and preferably, the transfer means is rotatably mounted to the drawing chamber 11, the processing chamber 21, and the drawing chamber 31. The rollers 61 may be.

As shown in FIG. 2, the conveying apparatus 51 conveyed by the conveying rollers 61 is integrally fixed to the conveying plate 52 and the upper end of the conveying plate 52 and in contact with the roller. It is fixed integrally fixed to the lower end of the transfer blade 53 and the transfer plate 52, and comprises a fastener (54) that can be suspended or fixed to the three-dimensional polymer (41). In the above, although specifically described as a feed roller 61 and a feed device 51 conveyed by these feed rollers 61, other means for transferring the three-dimensional polymer 41 is also possible, but only The material constituting the transfer device 51 and the feed rollers 61 may be made of the same or similar material as that of the stainless steel constituting the processing chamber 21, and does not affect plasma, high frequency power, or high voltage pulse. It can be sufficiently achieved by consisting of.

In order to transfer the three-dimensional polymer 41 by the transfer device 51, a partition wall between the drawing chamber 11, the drawing chamber 31, the drawing chamber 11, and the processing chamber 21 and the processing chamber 21 are provided. The partitions between the 21 and the withdrawal chamber 31 include automatic opening and closing doors through which the transfer device 51 can pass. These doors can be opened and closed by known operating means such as solenoids, pneumatic cylinders or hydraulic cylinders, and can be passed by a conveying device 51 on which the three-dimensional polymer 41 is fixed by opening, and by closing the gas. It can be achieved by the configuration of the door that can not pass through to maintain a constant degree of vacuum. Particularly preferably, the doors are opened and closed based on the narrowest width of the three-dimensional polymer 41 so that the doors can be opened and closed within a short time so that they can be quickly closed after the passage of the three-dimensional polymer 41. A sliding door structure that opens and closes enough to allow passage is possible, and such a structure may be understood to be well known to those skilled in the art.

As shown in FIG. 3, a pretreatment chamber 81 is further included for pretreatment by spraying dry hot air at a temperature of 70 to 85 ° C. on the three-dimensional polymer 41 to be surface-treated adjacent to the drawing chamber 11. The pretreatment chamber 81 includes a blower 82 for blowing hot air into the pretreatment chamber 81, a first intermittent valve 83 for controlling a flow of hot air supplied to the blower 82, and the pretreatment chamber. The air is discharged from the pretreatment chamber 81 via the second control valve 85 and the second control valve 85 for controlling the flow of exhaust air for evacuating and evacuating air from the air. Vacuum pump is connected.

An air compressor 84 for generating hot air may be further connected to the first control valve 83.

The pretreatment chamber 81 may be formed in two parallel, for this purpose, a second pretreatment chamber 87 may be installed in addition to the pretreatment chamber 81, and hot air may be applied to the second pretreatment chamber 87. From the second blower 88 to blow into the pretreatment chamber 81 and the third intermittent valve 89 and the second pretreatment chamber 87 to control the flow of hot air supplied to the second blower 88. A vacuum pump for discharging air from the pretreatment chamber 81 via the fourth control valve 90 and the fourth control valve 90 to control the flow of exhaust air for discharging and evacuating the air is provided. Connected. Here, the vacuum pump may share one vacuum pump via the second control valve 85 and the fourth control valve 90. In addition, the air compressor 84 for generating hot air can be shared by the third intermittent valve 89.

In addition, the blower 82 provided in the pretreatment chamber 81 and the intermittent valve for controlling the hot air without a separate pretreatment chamber 81 and an air compressor connected thereto are provided. By providing 84 or the like, it is possible to enable pretreatment by application of hot air in the drawing chamber 11.

Referring to FIG. 1, the transfer device 51 for transferring the three-dimensional polymer 41 by the above-described configuration opens the first door 13 once while the three-dimensional polymer 41 is fixed. After entering the drawing chamber 11 through the first door 13, the first door 13 is closed, and a vacuum pump is operated to sufficiently evacuate the drawing chamber 11, and then the drawing chamber ( 11) and the second door 28 between the processing chamber 21 is opened, and the feed roller 61 is driven to transfer the transfer device 51 to the process chamber 21 so as to be fixed to the transfer device 51. After allowing the stereopolymer 41 to be positioned in the grid 24 in the processing chamber 21, the second door 28 is closed, and then plasma processing is performed. Plasma processing is the same as or similar to the conventional plasma processing, and vacuums the inside, and then introduces a processing gas, drives the high frequency power supply device 27, the matching box 26, the high voltage pulse generator 23, and the like. Surface of the three-dimensional polymer 41 located within the grid 24 by electrostatically attracting positive ions toward the grid 24 to which high voltage pulses are applied by generating high-frequency power through the antenna 25. To be injected into. Subsequently, when the surface treatment is completed, the third door 33 between the processing chamber 21 and the drawing chamber 31 is opened, and the feed roller 61 is also driven to drive the drawing apparatus 51 to the drawing chamber ( 31). The transfer device 51 transferred to the transfer chamber is then completely drawn out through the fourth door 34 by the driving of the transfer roller 61. After the transfer device 51 is pulled out by opening the fourth door 34, after closing the fourth door 34, the inside of the drawing chamber 31 is evacuated. The evacuation of the drawing chamber 31 serves to prevent external air from flowing into the processing chamber 21 when the third door 33 is subsequently opened, thereby processing conditions for continuous processing in the processing chamber 21. It is possible to recover the surface in a short time and prepare for surface treatment. In the same manner as described above, the polymer 41 having a three-dimensional shape can be continuously surface treated. The transfer device 51 may be repeatedly used by circulation by fixing the three-dimensional polymer 41 to be treated to be introduced into the drawing chamber 11 and removing the treated three-dimensional polymer 41. .

In addition, the continuous surface treatment method of the three-dimensional polymer according to the present invention, in the surface modification using the plasma ion implantation technology, (1) the step of introducing a three-dimensional polymer article to be treated into a degassing draw room; (2) a first vacuuming step of depressurizing and degassing the inside of the drawing chamber into which the three-dimensional polymer is introduced; (3) a first transfer step of transferring the three-dimensional polymer in the drawing chamber to the processing chamber; (4) a surface treatment step of surface treatment using plasma to the three-dimensional polymer transferred into the treatment chamber; (5) a second vacuuming step of depressurizing and degassing the inside of the degassable extraction chamber; (6) a second transfer step of transferring the surface-treated three-dimensional polymer into the evacuated drawing chamber; And (7) a withdrawal step of withdrawing the three-dimensional polymer in the withdrawal chamber to the outside.

The retraction step of (1) is degassable in order to function as a previous step for continuously supplying the three-dimensional polymer 41 article into the processing chamber 21 without affecting the degree of vacuum in the processing chamber 21. A step of introducing the three-dimensional polymer 41 article to be treated into the drawing chamber 11 is performed. Thereafter, in the first vacuuming step (2), the inside of the drawing chamber 11 into which the three-dimensional polymer 41 article is introduced is depressurized and degassed. By vacuuming the inside of the drawing chamber 11 in the first vacuuming step of (2), the three-dimensional polymer 41 article as a work in the drawing chamber 11 is transferred to the processing chamber 21 by the conveyer. At the time of transfer, the conditions for transferring the three-dimensional polymer 41 article into the processing chamber 21 are achieved without significantly changing the internal process conditions such as the degree of vacuum of the processing chamber 21. Subsequently, in the first transfer step of (3), the three-dimensional polymer 41 article in the drawing chamber 11 is transferred to the processing chamber 21, and then, in the surface treatment step of (4), Surface treatment is performed by using plasma on the three-dimensional polymer 41 article transferred into the treatment chamber 21. Subsequently, in the second vacuuming step of (5), the inside of the degassing withdrawal chamber 31 is decompressed and degassed, which in turn vacuums the inside of the withdrawal chamber 31. It is a step of evacuating the three-dimensional polymer 41 article of which surface treatment is completed to the draw chamber 31 without affecting the degree of vacuum. Subsequently, in the second transfer step of (6), the polymer 41 article having the surface treatment is transferred into the evacuation chamber 31 which is evacuated, and then, in the discharge step of (7), the withdrawal chamber 31 After being transferred into the c), the three-dimensional polymer 41 article is continuously surface treated by causing the surface-treated polymers 41 to be discharged from the drawing chamber 31.

Before and after the first vacuuming step of (2), a pretreatment step of removing moisture and the like by applying hot air to the three-dimensional polymer 41 article in the drawing chamber 11 may be further performed. The pretreatment step preheats the three-dimensional polymer 41 article in the draw chamber 11 to allow the implantation of ions into the surface of the three-dimensional polymer 41 article to a deeper location. In the pretreatment step, hot air at a temperature of 70 to 85 ° C. is applied to remove moisture, and the three-dimensional polymer 41 is heated, and the heating temperature is different from the type of polymer 41 constituting the polymer 41 article. It may vary depending on physical properties and sizes, and those skilled in the art can determine the appropriate heating temperature experimentally by theory or empirical rules.

Surface treatment step (4) is a high-frequency for generating a pulse width of 20 to 30 kHz, plasma generation while supplying a process gas consisting of argon, nitrogen or a mixture thereof to the process chamber 21 continuously in an amount of 15 to 100 sccm The surface treatment is performed under a process condition of applying a high voltage of 21 to 25KV as a frequency of 500 to 1500 kHz and a high voltage pulse. Such process conditions may vary depending on the type, size, shape, etc. of the three-dimensional polymer 41, and those skilled in the art can understand that theoretically and empirically suitable process conditions can be performed to perform ion implantation by surface treatment. It is.

As the three-dimensional polymer 41 as the workpiece to be processed by the surface treatment apparatus and the surface treatment method according to the present invention as described above, all kinds of known polymers are possible, and preferably, low density polyethylene (LDPE), linear low density Vinyl polymers 41 such as polyethylene (LLDPE), high density polyethylene (HDPE), polypropylene (PP), polystyrene (PS), nylon 6 such as nylon 6, nylon 11, nylon 12, nylon 66, and other polycarbonates PC), polyethylene terephthalate (PET), acrylonitrile-butadiene-styrene copolymer (ABS), styrene-acrylonitrile copolymer (SAN), polyphenylene sulfide (PPS), polyetherimide resin (PEI), Polyimide (PI), modified polyphenylene oxide (MPPO), modified polysulfone (MPSU; Modified polysulfone), modified polyether (MPES) and polyether ether ketone (PEEK).

Hereinafter, preferred embodiments and comparative examples of the present invention will be described.

The following examples are intended to illustrate the invention and should not be understood as limiting the scope of the invention.

Examples 1 and 2

After introducing the three-dimensional polymer 41 article made of polyethylene as the workpiece to be processed into the drawing chamber 11 by using the apparatus as shown in FIG. 1, the inside of the drawing chamber 11 was depressurized and degassed to obtain a vacuum. After the evacuation and vacuuming is completed, the plasma surface treatment is carried out while continuously transferring the three-dimensional polymer 41 article in the inlet chamber 11, but the process conditions of the surface treatment are performed as shown in Table 1 below. (31) After depressurizing and degassing the inside to evacuate, the surface-finished three-dimensional polymer (41) article is transferred into the evacuated withdrawal chamber (31) and finally withdrawn out of the withdrawal chamber (31). The continuous surface treatment was carried out by the method, and as a result, the ion resistance in the process and the surface resistance of the three-dimensional polymer as the workpiece after the treatment were also measured, and are also shown in Table 1 below.

division Process gas (argon, sccm) Process gas (nitrogen, sccm) Pulse width Frequency High voltage (KV) Ion Density (ea / ㎠) Surface resistance (Ω / ㎠) Example 1 38 - 20 500 25 10 ¹⁰ 10 ^{7-10 8} Example 2 25 14 25 650 21.6 10 ¹¹ 10 ^{7-10 8}

Therefore, according to the present invention, a low surface resistance of 10 ⁷ to 10 ⁸ mW / cm 2 can be achieved to improve the antistatic property and the conductivity of the surface of the three-dimensional polymer 41, and in particular, the three-dimensional polymer 41 can be continuously By making it possible to surface-treat, the mass production is facilitated.

Although the present invention has been described in detail only with respect to the described embodiments, it will be apparent to those skilled in the art that various modifications and variations are possible within the technical scope of the present invention, and such modifications and modifications are within the scope of the appended claims.

Claims (9)

A high frequency power supply unit including a high frequency power supply device, a matching box and an antenna to generate plasma and ion implantation, a gas introduction device supplying a process gas to be ionized to construct a plasma, a gas supply source connected thereto, a vacuum pump, etc. A surface treatment apparatus comprising a treatment chamber provided therein, wherein the degassing drawing chamber and the degassing drawing chambers which are mounted adjacent to each other before and after the treatment chamber can sequentially pass through the drawing chamber, the treatment chamber, and the drawing chamber. And a conveying apparatus mounted so as to drive the conveying apparatus, wherein the conveying apparatus is provided in the drawing chamber, the drawing chamber, the partition wall between the drawing chamber and the processing chamber, and the partition walls between the processing chamber and the drawing chamber. A three-dimensional feature comprising doors capable of opening and closing automatically Continuous surface treatment of phase polymer. The method of claim 1, Apparatus for continuous surface treatment of the three-dimensional polymer, characterized in that the conveying roller is rotatably mounted. The method of claim 1, The conveying device is fixed to the conveying plate and the upper end of the conveying plate integrally fixed to the lower end of the conveying blade and the conveying plate which is variable in contact with the conveying roller as the conveying means, suspended or fixed three-dimensional polymer Continuous surface treatment apparatus of the three-dimensional polymer characterized in that it comprises a fixture that can be made. The method of claim 1, The pretreatment chamber further comprises a pretreatment chamber for pre-treatment by spraying dry hot air of a temperature of 70 to 85 ℃ to the three-dimensional polymer to be surface-treated adjacent to the inlet chamber, the pretreatment chamber and a blower for blowing the hot air into the pretreatment chamber Via a first control valve for regulating the flow of hot air supplied to the blower, and a second control valve for regulating the flow of exhaust air for discharging and evacuating air from the pretreatment chamber and the second control valve. And a vacuum pump for discharging air from the pretreatment chamber is connected. The method of claim 4, wherein The first control valve is a continuous surface treatment apparatus of the three-dimensional polymer, characterized in that the air compressor for generating hot air is further connected. The method of claim 4, wherein In addition to the pretreatment chamber, a second pretreatment chamber is installed, and the second pretreatment chamber includes a second blower for blowing hot air into the pretreatment chamber and a third intermittent valve for controlling the flow of hot air supplied to the second blower. And a fourth control valve for controlling the flow of exhaust air for evacuating and evacuating air from the second pretreatment chamber and a vacuum pump for discharging air from the pretreatment chamber via the fourth control valve. Continuous surface treatment apparatus of the three-dimensional polymer, characterized in that made. In surface modification using plasma ion implantation technology, (1) an introduction step of introducing a three-dimensional polymer article to be treated into a degassing entrance chamber; (2) a first vacuuming step of depressurizing and degassing the inside of the drawing chamber into which the three-dimensional polymer is introduced; (3) a first transfer step of transferring the three-dimensional polymer in the drawing chamber to the processing chamber; (4) a surface treatment step of surface treatment using plasma to the three-dimensional polymer transferred into the treatment chamber; (5) a second vacuuming step of depressurizing and degassing the inside of the degassable extraction chamber; (6) a second transfer step of transferring the surface-treated three-dimensional polymer into the evacuated drawing chamber; And (7) a withdrawal step of withdrawing the three-dimensional polymer in the withdrawal chamber to the outside; Continuous surface treatment method of the three-dimensional polymer, characterized in that consisting of. The method of claim 7, wherein A pretreatment step of removing moisture from the three-dimensional polymer by applying hot air to the three-dimensional polymer in the drawing chamber before and after the first vacuuming step of (2). Continuous surface treatment method. The method of claim 7, wherein Surface treatment step (4) is a pulse width of 20 to 30 kHz, a high frequency frequency 500 for plasma generation while continuously supplying a process gas consisting of argon, nitrogen or mixtures thereof in an amount of 15 to 100 sccm The surface treatment method of the three-dimensional polymer, characterized in that the surface treatment is carried out at a process condition of 1 to 1500 kV and high voltage pulse 21 to 25KV.