KR20030062246A - 재생성이 우수한 콜리메이터 - Google Patents
재생성이 우수한 콜리메이터 Download PDFInfo
- Publication number
- KR20030062246A KR20030062246A KR1020030001013A KR20030001013A KR20030062246A KR 20030062246 A KR20030062246 A KR 20030062246A KR 1020030001013 A KR1020030001013 A KR 1020030001013A KR 20030001013 A KR20030001013 A KR 20030001013A KR 20030062246 A KR20030062246 A KR 20030062246A
- Authority
- KR
- South Korea
- Prior art keywords
- collimator
- coating layer
- protective coating
- base material
- group
- Prior art date
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3447—Collimators, shutters, apertures
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (4)
- 콜리메이터 금속 모재; 및상기 모재의 표면에 형성된 α-Si, 옥시나이트라이드, 산화물, 질화물, 및 고분자로 이루어진 군에서 선택되는 보호 코팅층을 포함하는 콜리메이터.
- 제1항에 있어서, 상기 보호 코팅층은 SiO2, SiON, SixNy(0<x≤5, 1≤y≤6), 폴리실리콘 및 이들의 혼합물로 이루어진 군에서 선택되는 물질을 포함하는 것인 콜리메이터.
- 제1항에 있어서, 상기 보호 코팅층의 두께는 6000Å 이상인 콜리메이터.
- 제1항에 있어서, 상기 보호 코팅층을 형성하는 방법은 액상 물질에 담근 다음 건조하여 고형화하는 방법, 스프레이 코팅, 이온주입, 스퍼터링, 증착, 및 기상증착으로 이루어진 군에서 선택되는 것인 콜리메이터.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020030001013A KR100564228B1 (ko) | 2003-01-08 | 2003-01-08 | 재생성이 우수한 콜리메이터, 및 그 제조방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020030001013A KR100564228B1 (ko) | 2003-01-08 | 2003-01-08 | 재생성이 우수한 콜리메이터, 및 그 제조방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20030062246A true KR20030062246A (ko) | 2003-07-23 |
KR100564228B1 KR100564228B1 (ko) | 2006-03-28 |
Family
ID=32226364
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020030001013A KR100564228B1 (ko) | 2003-01-08 | 2003-01-08 | 재생성이 우수한 콜리메이터, 및 그 제조방법 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR100564228B1 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101221001B1 (ko) * | 2011-07-07 | 2013-01-10 | 한국원자력연구원 | 분산각을 조절하기 위한 코팅물질 또는 초거울을 증착한 Si 웨이퍼를 이용한 고효율 중성자 콜리메이터 |
-
2003
- 2003-01-08 KR KR1020030001013A patent/KR100564228B1/ko active IP Right Grant
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101221001B1 (ko) * | 2011-07-07 | 2013-01-10 | 한국원자력연구원 | 분산각을 조절하기 위한 코팅물질 또는 초거울을 증착한 Si 웨이퍼를 이용한 고효율 중성자 콜리메이터 |
Also Published As
Publication number | Publication date |
---|---|
KR100564228B1 (ko) | 2006-03-28 |
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