KR20030024892A - Method and device for combustion type exhaust gas treatment - Google Patents

Abstract

A combustion type exhaust gas treatment method for introducing a waste gas produced by an industrial product processing process into a combustion flame to thermally decompose or oxidatively combustible components in the exhaust gas. Hydrogen gas and oxygen gas are generated by electrolysis of water, and the hydrogen gas and oxygen gas are supplied as a combustion gas to form a combustion flame. A tube or a hole is formed in the wall of the burner section upstream of the combustion flame, and the combustion flame is detected by the UV sensor through the tube or the hole.

Description

Combustion Exhaust Gas Treatment Method and Apparatus {METHOD AND DEVICE FOR COMBUSTION TYPE EXHAUST GAS TREATMENT}

The conventional combustion type exhaust gas treating apparatus includes a burner section and a combustion chamber on a downstream side of the burner section, and supplies combustible gas (auxiliary combustion gas) to the burner section to combust the combustible gas to form a flame. And to combust the exhaust gas. As the combustible gas, combustible gases such as hydrogen gas, city gas and propane gas are used as the fuel gas, and oxygen or air is usually used as the oxidant.

In the conventional combustion type exhaust gas treating apparatus, since fuel gases such as hydrogen gas, city gas, and propane gas are used as the combustible gas, piping for supplying these fuel gases to the combustion type exhaust gas treating apparatus must be provided. . In addition, when city gas, propane gas, or the like is used as a fuel gas, carbon monoxide (CO) having high toxicity is generated during incomplete combustion.

Hydrogen gas is ignitable and explosive, but once burned, the flame rarely goes out, and very stable combustion is obtained, so it is suitable as a fuel gas for combustion in a combustion exhaust gas treatment system, but it is expensive and has high operating cost. There is this. The longer the piping to be supplied to the hydrogen gas from the storage vessel and to the exhaust gas treatment device is likely to leak from the pipe joint.

In the combustion type exhaust gas treating apparatus, a combustion flame is detected using a UV (ultraviolet = ultraviolet) sensor as a method of confirming the ignition of the combustion flame, and ignition is confirmed. However, the method of detecting the combustion flame by using this UV sensor has a problem that by-products such as dust during exhaust gas treatment block the skylight. In addition, the detection method of the combustion flame by the UV sensor is that when the reflected light from the inner wall of the flame is detected, the flame cannot be detected because the by-product having UV absorption properties is attached to the inner wall of the reaction portion because the UV light is absorbed. There was a problem. In addition, there is a problem that the mining port becomes high temperature due to the high temperature of the reaction part and melt corrosion corrodes.

In the combustion type exhaust gas treatment apparatus, the auxiliary combustion gas is supplied to the burner section through a nozzle opening opened on the inner wall of the burner section, and the flame is formed by burning the auxiliary combustion gas injected from the nozzle opening. There is a problem that the flame is extinguished by the fluctuation of the amount of inflow of exhaust gas introduced into the site. In addition, there was a problem that backfire occurs in a fuel pipe for supplying auxiliary combustion gas.

The present invention is an exhaust gas produced by processing industrial products such as semiconductors and liquid crystals, for example, silane gas (SiH ₄ ) or halogen-based gas (NF ₃ , ClF ₃ , SF ₆ , CHF ₃ , C ₂ F ₆ , CF _It relates to a combustion type exhaust gas treatment method and apparatus for treating harmful flammable or hardly decomposable exhaust gas by combustion or thermal decomposition and / or oxidative decomposition.

1 is a diagram showing an example of the system configuration of a combustion type exhaust gas treating apparatus of the present invention;

2 is a view showing a configuration example of a unit facility including a combustion type exhaust gas treating apparatus of the present invention;

3 is a longitudinal sectional view showing a specific configuration example of a combustion type exhaust gas treating apparatus of the present invention;

4 is a cross-sectional view taken along line A-A of FIG.

5 is a diagram showing an example of the configuration of a burner section of the combustion type exhaust gas treating apparatus according to the present invention;

6 is a view showing an example of the installation configuration of a flame directing tube of the combustion type exhaust gas treating apparatus according to the present invention;

7 is a view showing an example of the installation configuration of a flame directing tube of a combustion type exhaust gas treating apparatus according to the present invention;

8 is a diagram showing an example of the configuration of a burner section of the combustion type exhaust gas treating apparatus according to the present invention;

9 is a view showing a configuration example of an auxiliary combustion gas nozzle opening group of a combustion type exhaust gas treating apparatus according to the present invention;

10 is a diagram showing an example of the entire configuration of a combustion type exhaust gas treating apparatus according to the present invention.

※ Explanation of symbols for main parts of drawing

1: H ₂ / O ₂ generator 2: exhaust gas treatment device

3: piping 4: exhaust gas inlet pipe

5: exhaust pipe 10: burner

11: flame holder 12: cylindrical body

13: outer cylinder 14: air chamber

15 combustion gas chamber 16 exhaust gas inlet pipe

17: air nozzle 18: gas nozzle for combustion

20: combustion chamber 21: secondary air chamber

22: partition plate 23: secondary air nozzle

24: outer container 25: inner wall

26: space 27: insulation

28: purge air introduction pipe 29: UV sensor

30: pilot burner 31: cooling unit

32: discharge part 33: nozzle

34: exhaust pipe 35: drain port

36: inner wall 37: insulation

37 ': space 38: purge air introduction pipe

39: pilot burner 40: cooling unit

41: discharge part 42: nozzle

43: exhaust pipe 44: drain port

100: box body 101: exhaust dust

115: auxiliary combustion gas chamber 118: auxiliary combustion gas nozzle

124: burning flame 125: flame direct view tube

126: UV sensor 127: connection

128: quartz glass plate 129: sealing member

130: purge gas introduction pipe 131: optical fiber

133: air nozzle opening group 134: auxiliary combustion gas nozzle opening group

135: outer container

SUMMARY OF THE INVENTION The present invention has been made in view of the above, and it is an object of the present invention to provide an exhaust gas decontamination apparatus that does not store a combustible material, does not require a complicated piping configuration, and is unlikely to cause a gas leakage accident. It is an object of the present invention to provide a combustion type exhaust gas treatment method and apparatus which uses a mixture of hydrogen gas and oxygen gas as fuel fuel gas, which is low in equipment cost and operating cost, and which can almost eliminate leakage of hydrogen gas or oxygen gas. do.

An object of the present invention is to provide a combustion type exhaust gas treatment apparatus that can accurately detect the presence of the combustion flame always by the UV sensor by eliminating the above problems. In addition, it is an object of the present invention to provide a combustion type exhaust gas treatment device capable of forming a stable combustion flame without the flame extinguishing due to fluctuations in the amount of exhaust gas introduced into the burner, and without the risk of backfire to the auxiliary combustion gas supply pipe. .

In order to solve the above problems, the first invention is a combustion type exhaust gas treatment method in which an exhaust gas is introduced into a combustion flame to thermally decompose or oxidatively combust a flammable component in the exhaust gas, wherein hydrogen gas and oxygen gas are formed by electrolysis of water. And hydrogen and oxygen gas are used as the combustion gas which forms a combustion flame. In the first aspect of the invention, preferably, hydrogen gas and oxygen gas are used to form the combustion flame as a mixed gas without changing the generated gas ratio.

The second invention comprises a burner section for forming a combustion flame from hydrogen gas and oxygen gas in a combustion type exhaust gas treatment device, and an electrolysis device for water generating hydrogen gas and oxygen gas. In the second aspect of the invention, a combustion chamber is preferably provided downstream of the burner to introduce the target exhaust gas into the combustion flame to perform thermal oxidative decomposition of the exhaust gas.

In order to solve the said subject, 3rd invention provides the combustion type waste gas processing apparatus provided with a burner part and the combustion chamber downstream of a burner part. An auxiliary combustion gas is supplied to the burner to form a combustion flame from the burner to the combustion chamber. The exhaust gas is introduced into the combustion flame to oxidatively decompose the exhaust gas. A pipe or a hole capable of directly facing the combustion flame is provided on the upstream side of the combustion flame on the burner wall, and a UV sensor is installed to detect the combustion flame through the tube or the hole.

By installing a pipe or a hole to face the combustion flame directly upstream rather than the downstream side of the combustion flame, by-products such as dust during exhaust gas treatment block the light port so that the UV sensor cannot detect the combustion flame. The problem does not happen. In addition, since the combustion flame is directly faced through the tube or the hole, even if a by-product having UV absorption characteristics adheres to the reaction portion, the light is not disturbed, and the UV sensor does not interfere with detecting the combustion flame. Moreover, by providing the pipe or the hole which can face the combustion flame directly upstream of the comparatively low temperature combustion flame of the burner part side wall, the mining port part is not closed by melting or corrosion by high temperature.

In the third invention, preferably, a UV light transmitting member is disposed at a connection portion of a tube or a hole capable of directly facing a combustion flame and a UV sensor to block the UV sensor from the atmosphere in the burner section so as to burn the burner from the UV light transmitting member in the tube or hole. The purge gas flows to the negative side. In this way, the UV light transmitting member is disposed in the tube or the hole and the connecting portion to block the UV sensor from the atmosphere in the burner portion, and the purge gas flows from the UV light transmitting member in the tube or the hole toward the burner portion, whereby the light outlet is blocked by a by-product or the like. The problem goes away.

In the third invention, preferably, the half-burner portion end of the tube or hole capable of facing the combustion flame is closed to transmit light from the combustion flame in the tube or the hole to the UV sensor via the optical fiber. In this way, the light from the combustion flame in the tube or hole is transmitted to the UV sensor through the optical fiber, and thus the UV sensor is spaced in the case where the UV sensor cannot be installed at the end of the half burner side of the tube or hole due to a problem in space or heat resistance. I can install it in the place without the problem of heat resistance.

The fourth invention includes a burner section and a combustion chamber downstream of the burner section, supplies auxiliary combustion gas to the burner section to form a combustion flame from the burner section toward the combustion chamber, and introduces exhaust gas into the combustion flame to exhaust the exhaust gas. In the combustion type exhaust gas treatment apparatus for oxidative decomposition, the auxiliary combustion gas is supplied to the burner section through a nozzle opening opened on the inner wall surface of the burner section, and three or more nozzle holes approach to form a nozzle group. Since the nozzle port is constituted by three or more opening groups in this manner, it is possible to prevent the blowing out of the combustion flame even if the amount of the exhaust gas inflow introduced into the burner portion is varied. In the case of using a carbon-based fuel gas having a slow flame propagation rate as the auxiliary combustion gas, the nozzle port is composed of six or more opening groups, so that the combustion flame can be prevented from blowing off even if the exhaust gas inflow amount varies.

In the fourth invention, preferably, the auxiliary combustion gas injection speed injected from the nozzle sphere group is made faster than the propagation speed of the flame. Thus, by making the auxiliary combustion gas injection speed injected from the nozzle port faster than the propagation speed of a flame, backfire to an auxiliary combustion gas supply piping etc. can be prevented. The propagation speed of the flame is determined by the type of fuel gas of the auxiliary combustion gas, the mixing ratio of pre-mixed air or oxygen, the shape and arrangement of the nozzle port, and the injection speed of the auxiliary combustion gas is determined by the supply pressure of the auxiliary combustion gas and the nozzle group. Since it is determined by the total cross-sectional area, the total opening cross-sectional area of the nozzle opening group and the like are set so that the injection speed of the auxiliary combustion gas becomes faster than the propagation speed of the flame in consideration of these.

The present invention is to install a so-called H ₂ / O ₂ generator having a water electrolysis device to generate hydrogen gas and oxygen gas by electrolysis of water with the H ₂ / O ₂ generator, to generate a mixed gas of hydrogen gas and oxygen gas Since it is supplied to a burner part, supply of oxidant gas from the exterior is unnecessary. If the H ₂ / O ₂ generator is placed as close as possible to the burner section and the mixed gas at the hydrogen and oxygen generation ratio is supplied to the burner section, the piping may be short, and the hydrogen and oxygen gas need to be supplied to different lines. Since it does not exist, the structure of a piping becomes simple and it becomes inexpensive for auxiliary equipment.

Of course, the two kinds of gas are supplied to the burner part by different lines, so as not to interfere with the mixed combustion by the burner of the double nozzle structure or the like. In addition, since the piping is short, the possibility of leakage of hydrogen gas or oxygen gas is reduced. In short piping, the possibility of ignition is low, and it goes without saying that structural or operational attention is paid to backfire from the nozzle in practice. In addition, since water is electrolyzed and used as fuel on the spot, it does not hold excess flammable gas, and in case of emergency, it can respond immediately by stopping operation of the H ₂ / O ₂ generator. This becomes cheaper.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described based on drawing. BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows the system structure of the combustion type | mold exhaust gas treating apparatus which concerns on this invention. 1 is an H ₂ / O ₂ generator that generates hydrogen gas and oxygen gas by electrolysis of water, and 2 is an exhaust gas treatment apparatus for heating and oxidatively decomposing harmful combustible exhaust gas G1 from a semiconductor manufacturing apparatus. The mixed gas (H ₂ + (1/2) O ₂ ) of hydrogen and oxygen from the H ₂ / O ₂ generator (1) passes through the pipe (3) to the burner section of the exhaust gas treating apparatus (detailed later). (Explained).

In the burner portion, the mixed gas of hydrogen and oxygen is combusted to form a flame toward the combustion chamber. The exhaust gas G1 from the exhaust gas inflow pipe 4 is introduced into the flame, and the exhaust gas treated by heating and oxidative decomposition is removed from the exhaust pipe 5. H ₂ / O ₂ generator 1 can be an existing one, the shorter the length of the pipe 3 by placing the H ₂ / O ₂ generator (1) in the vicinity of the burner part. In addition, supplying a mixed gas of hydrogen and oxygen eliminates the need to supply hydrogen gas and oxygen gas to the respective lines, which simplifies the piping and shortens the internal reserve by the shorter piping (3). There is a safety improvement.

As the combustion type exhaust gas treatment system is shown in FIG. 2, since the combustion chamber 20 including the H ₂ / O ₂ generator 1 and the burner section 10 is provided in close proximity, these combustion apparatuses are provided in one box body ( It can also be packaged as 100). At this time, it is preferable to provide the exhaust dust 101 to the box body 100, whereby when the leak occurs in the pipe, it becomes more safe. Moreover, installation in a factory becomes easier than when hydrogen gas and oxygen gas are separate objects. The exhaust gas passing through the exhaust dust 101 is discharged to the atmosphere through the water scrubber of the factory.

3 and 4 are diagrams showing specific structural examples of the exhaust gas treating apparatus 2 of the first and second inventions. FIG. 3 is a longitudinal sectional view and FIG. 4 is a sectional view taken along the line A-A of FIG. The exhaust gas treating apparatus is composed of a cylindrical sealed container and includes a burner part 10 at the upper end, a combustion chamber (combustion reaction part) 20 at the upper end, and a cooling part 31 and an exhaust part 32 at the lower end. have. As the cooling medium of the cooling unit 31, for example, a liquid such as water or a gas such as air is used.

The burner part 10 has the cylindrical body 12 which forms the flame holding part 11 which opens toward a combustion chamber, and the outer cylinder 13 which surrounds the circumference | surroundings of this cylindrical body 12 at predetermined intervals, and is a cylindrical cylinder. Between the sieve 12 and the outer cylinder 13, the air chamber 14 which hold | maintains combustion air, and the combustion gas chamber 15 are formed. The air chamber 14 is connected to an air source not shown, and the combustion gas chamber 15 is connected to the H ₂ / O ₂ generator 1 via a pipe 3.

An exhaust gas inlet pipe 16 for introducing harmful exhaust gas G1 discharged from a semiconductor manufacturing apparatus, a liquid crystal panel manufacturing apparatus, or the like into the apex portion of the cylindrical body 12 covering the upper portion of the flame holding portion 11 (FIG. Corresponding to 1 exhaust gas inlet pipe 4] is connected. The exhaust gas G1 does not necessarily need to be a flammable gas, and any combustion gas may be thermally decomposed by the flame holding unit 11 by adjusting the combustion flame. Moreover, the cylindrical body 12 has the air nozzle 17 which communicates the air chamber 14 and the flame holding part 11, and the some combustion gas which communicates the combustion gas chamber 15 and the flame holding part 11 with each other. The nozzle 18 is provided.

In this example, the air nozzle 17 extends with a predetermined angle with respect to the tangential direction of the cylindrical body 12, as shown in FIG. 4, and is blown out in order to form the swirl flow in the flame holding part 11 . Similarly, the combustion gas nozzle 18 extends with a predetermined angle with respect to the tangential direction of the cylindrical body 12, and blows out the combustion gas so that a swirl flow may be formed in the flame | frame holding part 11. As shown in FIG. The air nozzle 17 and the combustion gas nozzle 18 are equally arranged in the circumferential direction of the cylindrical body 12.

The combustion chamber 20 is a space for oxidatively decomposing exhaust gas by supplying secondary air from the rear end of the burner unit 10, and has a flame holding unit inside the hermetic cylindrical outer container 24 formed of metal or the like. It is partitioned by the cylindrical inner wall 25 arrange | positioned continuously with 11). The inner wall 25 is formed of, for example, fiber reinforced ceramics. Moreover, the heat insulating material 27 made of porous ceramics is inserted in the space 26 between the inner wall 25 and the outer container 24. The outer container 24 is connected with a purge air introduction pipe 28 for introducing purge air into the space 26.

The combustion chamber 20 is provided with a UV sensor 29 for detecting the flame and a pilot burner 30 for igniting the burner unit 10. In the lower part of the combustion chamber 20, the several nozzle 33 is provided in the lower edge of the cooling part 31 at equal intervals in the circumferential direction, and water curtain is formed by spraying water toward this center from this nozzle 33. As shown in FIG. Thus, a scrubber device is used to cool exhaust gas and to capture particles in the exhaust gas. The side wall of the discharge part 32 is provided with an exhaust pipe 34 for discharging the treated exhaust gas, and a drain port 35 for discharging water injected from the nozzle 33 is provided at the bottom.

In the exhaust gas treating apparatus of the above-described configuration, the swirl gas is generated toward the flame holding portion 11 through the combustion gas nozzle 18 through the combustion gas in the combustion gas chamber 15. Then, when ignited by the pilot burner 30, a combustion flame that swings in the cylindrical body (cylinder) 12 is formed. On the other hand, the exhaust gas G1 to be treated is ejected toward the flame holding part 11 from the exhaust gas inflow pipe 16 which opens on the inner wall surface of the apex part of the cylindrical body 12. The ejected exhaust gas G1 is mixed with a swirling flow of combustion gas (including air), combusted, heated, oxidized and decontaminated through the combustion chamber 20 to remove water curtain from the nozzle 33. It cools and is discharged | emitted from the exhaust pipe 34 by it.

The gas treatment apparatus of the combustion type exhaust gas treating apparatus according to the present invention is not limited to the configuration shown in Figs. 2 and 3, but it is important to include a burner section and a combustion chamber downstream of the burner section and burn the burner section. The gas may be supplied, the combustion gas may be combusted to form a flame, and the exhaust gas may be burned by the flame. That is, the present invention has a point of using a mixed gas of hydrogen and oxygen from a commercially available H ₂ / O ₂ generator that generates hydrogen gas and oxygen gas by electrolysis of water as a combustion gas supplied to the burner unit. The configuration of the gas treatment device is not particularly limited. Naturally, arrangement | positioning of the quantity of nozzles regarding a burner, air supply, etc. is not limited, either, The presence or absence of the structure below the combustion chamber 20 is arbitrary.

Fig. 5 is a diagram showing the configuration of a burner section of the combustion type exhaust gas treating apparatus according to the third and fourth inventions. The burner part 10 has a cylindrical body 12 which forms a flame holding part 11 which opens toward the combustion chamber 20 located below, and an outer cylinder 13 which surrounds the circumference | surroundings of the cylindrical body 12 at predetermined intervals. And an air chamber 14 for holding combustion air and an auxiliary combustion gas chamber 115 between the cylindrical body 12 and the outer cylinder 13. The air chamber 14 is connected to an air source not shown, and the auxiliary combustion gas chamber 115 is connected to an auxiliary combustion gas supply source through an auxiliary combustion gas supply pipe (not shown).

At the apex of the cylindrical body 12 covering the flame holding part 11, an exhaust gas inlet pipe for introducing harmful and flammable exhaust gas G1 discharged from a semiconductor manufacturing apparatus, a liquid crystal panel manufacturing apparatus, or the like ( 16) is connected. In addition, the cylindrical body 12 includes a plurality of auxiliary combustion gases communicating with the air nozzle 17 communicating with the air chamber 14 and the flame holding part 11, and the auxiliary combustion gas chamber 115 and the flame holding part 11. The nozzle 118 is installed.

As described in detail later, the air nozzle 17 is blown to form a swirl flow in the flame holding portion 11. Similarly, the auxiliary combustion gas nozzle 118 ejects the auxiliary combustion gas so as to form a swirl flow in the flame holding unit 11. The air nozzle 17 and the auxiliary combustion gas nozzle 118 are evenly disposed in the circumferential direction of the cylindrical body 12.

The secondary air chamber 21 is formed around the boundary of the flame holding part 11 and the combustion chamber 20 so as to surround the opening part of the flame holding part 11, and the secondary air chamber 21 has secondary air. Communicate with an air source (not shown) for supplying. In the partition plate 22 partitioning between the secondary air chamber 21 and the combustion chamber 20, the secondary air nozzle 23 which blows out secondary air for oxidizing exhaust gas in the combustion chamber 20 is provided. It is arrange | positioned and arrange | positioned evenly in this circumferential direction. In addition, a cooling medium flows into the space 21 to form a cooling structure. Water or the like is used for the cooling medium. Thereby, the cylindrical body 12 heated by the flame formed in the opening part of the cylindrical body 12 is cooled.

The combustion flame 124 formed by burning the auxiliary combustion gas injected from the auxiliary combustion gas nozzle 118 through the cylindrical body 12 and the outer cylinder 13, which are wall portions of the burner part 10, can be directly faced. The flame direct tube 125 is installed. The flame direct-view tube 125 is provided upstream of the combustion flame 124, and the UV sensor 126 which detects the combustion flame 124 is provided in the half burner part side end part of the flame direct-view tube 125. do.

As described above, by installing the flame direct view tube 125 not on the downstream side of the combustion flame 124 but on the upstream side, by-products such as dust during exhaust gas treatment block the light outlet of the flame direct view tube 125, It is no longer said that the UV sensor 126 cannot detect the combustion flame 124. In addition, since the combustion flame 124 is directly faced through the flame direct tube 125, even if a by-product having UV absorption characteristics is attached to the reaction unit (mainly in the combustion chamber 20), it does not interfere with the light. 126 may detect the combustion flame 124. In addition, the flame directing tube 125 is provided upstream of the relatively low-temperature combustion flame 124 of the wall portion of the burner portion 10 so that the mining port portion is not melted or corroded due to high temperature, thereby preventing clogging.

It is a figure which shows the example of another installation structure of the flame direct view tube of the combustion type waste gas processing apparatus which concerns on this invention. In addition, in FIG. 6, the same code | symbol as FIG. 5 shows the same or equivalent part. The same applies to the other drawings. As shown, the quartz glass plate 128 which transmits UV is arrange | positioned at the connection part 127 of the flame | frame direct view tube 125 and the UV sensor 126, and the sealing member between the quartz glass plate 128 and the connection part 127 is shown. The UV sensor 126 is cut off from the internal atmosphere of the burner part 10 via the 129. The purge gas introduction pipe 130 is connected to the flame direct pipe 125 to allow the purge gas PG (for example, air) to flow into the flame direct pipe 125.

As described above, the quartz glass plate 128 is disposed at the connection portion 127 of the flame direct view tube 125 and the UV sensor 126 to block the UV sensor 126 from the internal atmosphere of the burner unit 10, thereby directing the flame direct view tube. By flowing purge gas PG to 125, the light outlet of the flame directing tube 125 is not blocked by the by-product or the like. In addition, the quartz glass plate 128 has a thickness sufficient to withstand the internal pressure of the burner unit 10. The heat-resistant packing is used for the sealing member 129.

It is a figure which shows the example of another installation structure of the flame direct view tube of the combustion type waste gas processing apparatus which concerns on this invention. As shown in the figure, the half burner end side of the flame directing tube 125 is closed, and the purge gas introduction pipe 130 is connected to the flame directing tube 125 so that purge gas PG can flow and The light from the combustion flame 124 in the direct view tube 125 is transmitted to the UV sensor 126 via the optical fiber 131.

As described above, since the light from the combustion flame 124 in the flame directing tube 125 is transmitted to the UV sensor 126 via the optical fiber 131, the flame directing tube 125 may be deteriorated due to space or heat resistance. In the case where the UV sensor 126 cannot be provided at the end portion of the half burner portion, the UV sensor 126 can be installed in a place where there is no problem of space or heat resistance. In addition, in the above example, since the side wall of the burner part 10 is comprised by the cylindrical body 12 and the outer cylinder 13, and the air chamber 14 exists between them, the flame direct-view tube 125 was installed through it, When the side wall of the burner part 10 is comprised by 1 sheet, you may provide a flame directing hole in the upstream of the combustion flame of a side wall, and a UV sensor may be provided here.

8 is a view showing an example of the configuration of a burner section of the combustion type exhaust gas treating apparatus according to the present invention. As shown, an air nozzle opening group in which a plurality of openings (air injection holes) 17a of the air nozzles 17 are arranged in series in the vertical direction on the inner wall surface of the cylindrical body 12 of the burner part ( 133 are formed at equal intervals in the circumferential direction. Further, an auxiliary combustion gas nozzle opening group in which a plurality of openings (secondary combustion gas injection holes) 118a of the auxiliary combustion gas nozzle 118 (three in the drawing) are gathered (accessed) below the air nozzle opening group 133 ( 134 are arranged at equal intervals in the circumferential direction. In addition, the opening 118a of the auxiliary combustion gas nozzle 118 constituting the auxiliary combustion gas nozzle opening group 134 is not limited to three, but may be three or more.

The auxiliary combustion gas is burned by being injected from the opening 118a of each of the auxiliary combustion gas nozzles 118 constituting the auxiliary combustion gas nozzle opening group 134, thereby forming a combustion flame 24 (see Fig. 1). That is, each opening 118a becomes a spark formation port. In the case where the openings 118a are discretely arranged, the combustion flame 124 may blow off due to fluctuations in the inflow amount of the exhaust gas G1 introduced into the burner unit 10. As described above, the number of the openings 118a of the auxiliary combustion gas nozzles 118 constituting the auxiliary combustion gas nozzle opening group 134 is three or more, so that the exhaust gas G1 introduced into the burner section 10 is introduced. ), It is possible to prevent the blowing out of the combustion flame even if the inflow of the

In addition, in the case of using carbon-based fuel gas (city gas, propane gas, etc.) with slow flame propagation speed as the fuel gas of the auxiliary combustion gas, the auxiliary combustion gas nozzle constituting the auxiliary combustion gas nozzle opening group 34 ( As shown in Fig. 9, the number of openings 18a is 6 or more, so that auxiliary combustion gas is injected from each other opening 18a to increase the thermal power, so that the combustion flame is not blown off even if the exhaust gas inflow is varied. You can prevent it.

In addition, in order to prevent backfire into the auxiliary combustion gas chamber 115 and the auxiliary combustion gas pipe which supplies the auxiliary combustion gas to the auxiliary combustion gas chamber 115, the injection of auxiliary combustion gas injected from the auxiliary combustion gas nozzle opening group 134 is prevented. Make the speed faster than the flame propagation speed. The propagation speed of the flame is determined by the type of fuel gas of the auxiliary combustion gas, the mixing ratio of premixed air or oxygen, the shape and arrangement of the auxiliary combustion gas nozzle opening group 134, and the like. The auxiliary combustion gas injection speed is determined by the supply pressure of the auxiliary combustion gas (here, the internal pressure of the auxiliary combustion gas chamber 115) or the total opening cross-sectional area of the auxiliary combustion gas nozzle opening group 134. In consideration of these, the total opening cross-sectional area and the like of the auxiliary combustion gas nozzle opening group 134 are set so that the auxiliary combustion gas injection speed becomes faster than the propagation speed of the flame.

Next, the whole structural example of the combustion type | mold exhaust gas treating apparatus which concerns on this invention, and its operation | movement are demonstrated. FIG. 10 is a longitudinal sectional view showing a configuration example of the exhaust gas treating apparatus, and A-A sectional view of FIG. 10 is the same as FIG. The exhaust gas treating apparatus is constituted as a cylindrical sealed container as a whole, and has a burner part 10 at the upper end, a combustion chamber (combustion reaction part) 20 at the upper end, and a cooling part 40 and an exhaust part 41 at the lower end. Equipped with. As the cooling medium of the cooling unit 40, for example, a liquid such as water or a gas such as air is used.

As shown in FIG. 4, the air nozzle 17 extends at a predetermined angle with respect to the tangential direction of the cylindrical body 12, and blows out to form a swirl flow in the flame holding unit 11. Similarly, the auxiliary combustion gas nozzle 118 extends at a predetermined angle with respect to the tangential direction of the cylindrical body 12, and blows out the auxiliary combustion gas so as to form a swirl flow in the flame holding portion 11. The air nozzle 17 and the auxiliary combustion gas nozzle 118 are evenly disposed in the circumferential direction of the cylindrical body 12.

The combustion chamber 20 is a space for oxidatively decomposing the exhaust gas at the rear end of the burner section 10, and is disposed so as to be continuous with the flame holding section 11 inside the hermetic cylindrical outer container 135 formed of metal or the like. It is partitioned by the cylindrical inner wall 36. The inner wall 36 is formed of, for example, fiber reinforced ceramics. Insulation material 37 made of porous ceramic is inserted into space 37 ′ between inner wall 36 and outer container 135. The outer container 135 is connected to a purge air introduction pipe 38 for introducing purge air into the space 37 '.

The cooling part 40 in the lower part of the combustion chamber 20 is equipped with the some nozzle 42 in the lower edge part at equal intervals in the circumferential direction, and water curtain is sprayed by injecting water toward this center from this nozzle 42. Is formed to cool the exhaust gas and capture particles in the exhaust gas. An exhaust pipe 43 for discharging the treated exhaust gas is provided on the side wall of the discharge part 41, and a drain port 44 for discharging water injected from the nozzle 42 is provided at the bottom part.

In the exhaust gas treatment apparatus of the above-described configuration, the swirling flow is generated toward the flame holding part 11 through the auxiliary combustion gas nozzle 18 through the auxiliary combustion gas of the auxiliary combustion gas chamber 15. Then, when ignited by the pilot burner 39, a combustion flame that swings in the cylindrical body (cylinder) 12 is formed. On the other hand, the exhaust gas G1 to be treated is ejected from the exhaust gas inlet pipe 16 opening on the inner wall surface of the apex part of the cylindrical body 12 toward the flame holding part 11. The ejected exhaust gas G1 Is burned by mixing with the swirling flow of auxiliary combustion gas, and further decomposed by heat decomposition through the combustion chamber 20, cooled by the water curtain from the nozzle 42, and discharged from the exhaust pipe 43.

According to the present invention, by installing a so-called H ₂ / O ₂ generator having an electrolysis device in place of the fuel gas tank, hydrogen gas and oxygen gas are generated by electrolysis of water with the H ₂ / O ₂ generator, thereby generating hydrogen. Since gas and oxygen gas are supplied to the burner, safe operation can be achieved with a simple piping configuration. In addition, when the H ₂ / O ₂ generator is arranged near the burner section, the pipe for supplying a mixed gas of hydrogen gas and oxygen gas to the burner section may be short. In particular, when supplied as a mixed gas, it is not necessary to supply hydrogen gas and oxygen gas in different lines.

In addition, the possibility of leakage of hydrogen gas or oxygen gas is reduced by the above configuration. In addition, since water is electrolyzed to generate fuel gas, the required amount can be supplied according to the amount of gas removed without the need for expensive hydrogen gas.

According to the present invention, by installing a pipe or a hole that can directly face the combustion flame upstream of the combustion flame, by-products such as dust during exhaust gas treatment block the mining port, or by-products having UV absorption characteristics react. Even if it is attached to the site, it does not interfere with light, and the UV sensor can accurately detect the presence of a combustion flame. Moreover, by providing the pipe or the hole which can face this combustion flame directly upstream of the comparatively low temperature combustion flame of a burner part side wall, a mining port part does not melt | melt or corrode by high temperature, and is closed.

In addition, by placing a UV light transmitting member in the tube or the hole and the connection portion, the UV sensor is blocked from the atmosphere in the burner portion, and the purge gas flows from the UV light transmitting member in the tube or the hole toward the burner portion so that the light outlet is not blocked by the by-product or the like. .

In addition, since light from a combustion flame in a tube or a hole is transmitted to the UV sensor through an optical fiber, the UV sensor may be used in a space or heat resistance, for example, when a UV sensor cannot be installed at the end of the burner side of the tube or a hole due to a problem in space or heat resistance. We can install in place without problem.

According to the present invention, three or more approaches to form a nozzle group, it is possible to prevent the blowing off of the combustion flame, even if the amount of inlet exhaust gas introduced into the burner portion changes. In addition, it is possible to prevent backfire to the auxiliary combustion gas supply pipe by making the auxiliary combustion gas injection speed injected from the nozzle port faster than the propagation speed of the flame.

Claims (9)

A combustion type exhaust gas treatment method for introducing a combustion flame into a combustion flame to thermally decompose or oxidatively decompose a flammable component in the exhaust gas. A hydrogen gas and oxygen gas are generated by electrolysis of water, and the hydrogen gas and oxygen gas are supplied as a combustion gas for forming the combustion flame. The method of claim 1, And the hydrogen gas and the oxygen gas are supplied to the combustion flame formation without changing the gas ratio generated. And a burner part for forming a combustion flame from hydrogen gas and oxygen gas generated by the electrolysis device of water to generate hydrogen gas and oxygen gas and the electrolysis device of water. The method of claim 3, wherein A combustion chamber for introducing exhaust gas into the combustion flame to perform heating and oxidative decomposition of the exhaust gas is provided downstream of the burner section. And a combustion chamber located downstream of the burner section, and supplying auxiliary combustion gas to the burner section to form a combustion flame from the burner section toward the combustion chamber, and introducing exhaust gas into the combustion flame to oxidatively decompose the exhaust gas. In the combustion type exhaust gas treating apparatus, A combustion exhaust gas treatment apparatus comprising: a tube or a hole capable of facing a combustion flame formed on a wall of a burner section on an upstream side of the combustion flame; and a UV sensor for detecting the combustion flame through the tube or the hole. The method of claim 5, Placing a UV light transmitting member at the connection portion of the tube or hole which can directly face the combustion flame and the UV sensor to block the UV sensor from the atmosphere in the burner part, and to flow the purge gas from the UV light transmitting member in the tube or hole to the burner part side. Combustion type exhaust gas treatment device characterized in that. The method of claim 5, And an end burner side end portion of the tube or hole capable of facing the combustion flame, and transmitting light from the combustion flame in the tube or hole to the UV sensor via an optical fiber. A burner section and a combustion chamber located downstream of the burner section are provided, the auxiliary combustion gas is supplied to the burner section, a combustion flame is formed from the burner section toward the combustion chamber, and exhaust gas is introduced into the combustion flame to oxidatively decompose the exhaust gas. In the combustion type exhaust gas treating apparatus, Auxiliary combustion gas is supplied to the burner through a nozzle opening that opens on the inner wall of the burner, Combustion-type exhaust gas treatment apparatus, characterized in that the nozzle sphere is approaching three or more to form a nozzle sphere group. The method of claim 8, Combustion gas treatment apparatus characterized in that the injection speed of the auxiliary combustion gas injected from the nozzle group is faster than the propagation speed of the flame.